CN114371178A

CN114371178A - Panel detection device and method, electronic equipment and storage medium

Info

Publication number: CN114371178A
Application number: CN202111547336.6A
Authority: CN
Inventors: 匡梦良; 殷亚男; 许超; 朱小明; 张鑫
Original assignee: Suzhou Mega Technology Co Ltd
Current assignee: Suzhou Mega Technology Co Ltd
Priority date: 2021-12-16
Filing date: 2021-12-16
Publication date: 2022-04-19

Abstract

The invention provides a panel detection device and method, electronic equipment and a storage medium. The panel detection device comprises a detection platform, a first positioning module, a visual detection module and a control module; the detection platform is used for bearing the panel to be detected; the first positioning module is used for acquiring identification images of a first identification and a second identification on a panel to be detected on the detection platform so as to acquire position information of the first identification and the second identification; the visual detection module is used for performing visual detection on the panel to be detected on the detection platform; the control module is used for determining first position deviation of the first mark and the second mark relative to the corresponding first reference position and the second reference position according to the position information and controlling the detection platform and/or the visual detection module to compensate the first position deviation. The deviation is subjected to multi-degree-of-freedom position compensation through the detection platform and the visual detection module, and the requirements can be met through less times or even only one time of positioning and position compensation.

Description

Panel detection device and method, electronic equipment and storage medium

Technical Field

The invention relates to the technical field of display panel detection, in particular to a panel detection device and a panel detection method.

Background

The panel detection device can detect the binding effect of the display panel and/or the appearance of an Integrated Circuit (IC) through a visual detection module thereon, and can also detect conductive particle indentations. The Conductive particle indentation detection is used for detecting the indentation condition of Conductive particles of an Anisotropic Conductive Film (ACF) behind a Chip On Glass (COG) and a Film On Glass (FOG) of a connection (bonding) section of a display panel or the indentation condition of Conductive particles of an ACF of an IC (IC on Film, COF) product.

In the detection process, the display panel is placed on the detection platform by the manipulator, and the detection platform conveys the display panel to the visual detection module for line scanning. And a DIC camera in the visual detection module is responsible for conducting particle indentation detection. The DIC camera has a small visual field and high precision, so that the display panel needs to be accurately positioned after being placed on the detection platform, and the display panel conveyed to the visual detection module is accurately positioned in a line scanning area of the visual detection module.

However, in the prior art, after the fine positioning, the position of the detection platform is basically adjusted to compensate the position deviation generated when the display panel is placed on the detection platform. In practice, the compensation effect is not ideal, and the requirements of subsequent links can be met only by multiple times of fine positioning and multiple times of position compensation, so that the time for fine positioning and position compensation is too long, and the production efficiency is reduced.

Disclosure of Invention

To at least partially solve the problems in the prior art, according to one aspect of the present invention, there is provided a panel inspection apparatus including an inspection platform, a first positioning module, a visual inspection module, and a control module; the detection platform is used for bearing the panel to be detected; the first positioning module is used for acquiring identification images of a first identification and a second identification on a panel to be detected on the detection platform so as to acquire position information of the first identification and the second identification; the visual detection module is used for performing visual detection on the panel to be detected on the detection platform; the control module is used for determining first position deviation of the first mark and the second mark relative to the corresponding first reference position and the second reference position according to the position information and controlling the detection platform and/or the visual detection module to compensate the first position deviation; the first reference position and the second reference position are located on a first calibration template, and the first calibration template can be located in the center of the visual field of the visual detection module.

Illustratively, the detection platform is movable along a longitudinal direction in a horizontal plane and rotatable in the horizontal plane, and the visual detection module is movable along a transverse direction perpendicular to the longitudinal direction in the horizontal plane and performs visual detection on the panel to be detected during the movement; the first positional deviation comprises a first amount of lateral translation X in the lateral direction₁A first longitudinal translation Y in the longitudinal direction₁And a first deflection angle R in the horizontal plane₁。

Illustratively, the control module is configured to simultaneously control the rotation of the inspection platform to compensate for the first yaw angle R₁And controlling the detection platform to move along the longitudinal direction to compensate the first longitudinal translation amount Y₁And controlling the visual detection module to move along the transverse direction to compensate the first transverse translation amount X₁。

Illustratively, for each panel to be detected, the first positioning module is in the same position for image acquisition.

Exemplarily, still include the transport module, the transport module is portable along the transverse direction, and the transport module is used for carrying the panel of waiting to detect, and first locating module sets up on the transport module, and the transport module still is used for driving first locating module and removes along the transverse direction to gather the sign image of first sign and second sign.

Illustratively, the handling module includes a feeding mechanism for carrying the panel to be inspected onto the inspection platform in a first transverse direction and a blanking mechanism for carrying the panel to be inspected away from the inspection platform in a second transverse direction opposite to the first transverse direction.

Illustratively, the first positioning module is arranged on the feeding mechanism or the discharging mechanism, and the sequence of the first positioning module for acquiring the image of the first identifier and the image of the second identifier is determined by the shortest moving distance of the first positioning module when the images are acquired.

Exemplarily, the panel detection device further comprises a second positioning module, the second positioning module is used for acquiring the position information of the characteristic portion of the panel to be detected before the panel to be detected is conveyed onto the detection platform, and the control module is further used for determining a second position deviation of the characteristic portion relative to the calibration position according to the position information of the characteristic portion and controlling the detection platform and/or the conveying module to compensate the second position deviation before the panel to be detected is conveyed onto the detection platform; the calibration position is located on a second calibration template, and the second calibration template can be located in the center of the visual field of the first positioning module.

Illustratively, the inspection platform is movable along a longitudinal direction within a horizontal plane and rotatable within the horizontal plane, and the handling module is movable along a lateral direction within the horizontal plane perpendicular to the longitudinal direction; the second positional deviation includes a second amount of lateral translation X in the lateral direction₂A second longitudinal translation Y in the longitudinal direction₂And a second deflection angle R in the horizontal plane₂。

Illustratively, the control module is configured to simultaneously control the rotation of the inspection platform to compensate for the second yaw angle R₂Controlling the carrying module to move along the transverse direction to compensate the second transverse translation amount X₂And controlling the detection platform to move along the longitudinal direction to compensate the second longitudinal translation amount Y₂。

Illustratively, the feature comprises a predetermined corner of the panel to be detected, or the feature comprises a first logo and a second logo.

The control module is further used for controlling the carrying module and the detection platform to respectively return to the respective reference positions before the identification images of the first identification and the second identification are acquired.

According to another aspect of the present invention, there is also provided a panel inspection method, including: acquiring identification images of a first identification and a second identification on a panel to be detected on a detection platform to acquire position information of the first identification and the second identification; determining first position deviations of the first mark and the second mark relative to a corresponding first reference position and a corresponding second reference position according to the position information, wherein the first reference position and the second reference position are positioned on a first calibration template, and the first calibration template can be positioned in the center of the visual field of the visual detection module; and a compensation step: the control detection platform and/or the visual detection module compensates for the first position deviation.

Illustratively, the first positional deviation comprises a first amount of lateral translation X in the lateral direction₁A first longitudinal translation Y in the longitudinal direction₁And a first deflection angle R in the horizontal plane₁The transverse direction and the longitudinal direction are perpendicular to each other in the horizontal plane,

the compensation step comprises: controlling the detection platform to rotate to compensate the first deflection angle R₁(ii) a Controlling the detection platform to move along the longitudinal direction to compensate the first longitudinal translation amount Y₁(ii) a And controlling the vision detection module to move in the transverse direction to compensate for the first transverse translation amount X₁。

Illustratively, the method further comprises, before the step of acquiring the marker images of the first marker and the second marker: grabbing the panel to be detected by using a carrying module; collecting position information of a characteristic part of a panel to be detected; determining a second position deviation of the characteristic part relative to the calibration position according to the position information of the characteristic part; controlling the detection platform and/or the carrying module to compensate the deviation of the second position, wherein the calibration position is positioned on a second calibration template which can be positioned at the center of the visual field of the first positioning module; and the carrying module carries the panel to be detected to the detection platform.

Illustratively, the method further comprises, after the transporting module transports the panel to be detected onto the detection platform and before the step of acquiring the identification images of the first identification and the second identification: and respectively returning the carrying module and the detection platform to the respective reference positions.

According to an aspect of the present invention, there is provided an electronic device comprising a processor and a memory, wherein the memory has stored therein computer program instructions for executing the panel detection method as above when the computer program instructions are executed by the processor.

According to an aspect of the present invention, there is provided a storage medium having stored thereon program instructions for performing the panel detection method as above when executed.

The panel detection device with the arrangement can acquire the position information of the first mark and the second mark on the panel to be detected through the first positioning module, the control module can compare the position information with the first reference position and the second reference position which are calibrated in advance in the first calibration template, so as to determine the first position deviation between the current position and the reference position of the panel to be detected, and then the detection platform and/or the visual detection module are controlled to compensate the first position deviation before visual detection. In this way, the inspection platform can convey the panel to be inspected to the center of the field of view of the vision inspection module along a predetermined path. According to the method and the device, the deviation of the two marks on the panel to be detected relative to respective reference positions is compared to perform accurate positioning on the panel to be detected, so that the accuracy of the accurate positioning can be improved. Moreover, the farther the distance between the first mark and the second mark is, the higher the spatial position accuracy of the panel to be detected is calculated, and especially for a large-size panel, the angular deviation of the panel to be detected in the horizontal plane can be obtained more accurately. Furthermore, the deviation can be subjected to multi-degree-of-freedom position compensation through the detection platform and the visual detection module, so that the panel to be detected can be positioned to the visual field center of the visual detection module by fewer times or even only once positioning and position compensation, and the detection efficiency is improved.

A series of concepts in a simplified form are introduced in the summary of the invention, which is described in further detail in the detailed description section. This summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.

The advantages and features of the present invention are described in detail below with reference to the accompanying drawings.

Drawings

The following drawings of the invention are included to provide a further understanding of the invention. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention. In the drawings, there is shown in the drawings,

FIG. 1 is a perspective view of a panel inspection device according to an exemplary embodiment of the present invention;

FIG. 2 illustrates an identification image according to one embodiment of the present invention;

FIG. 3 is a perspective view of a panel inspection device in an environment of use according to an exemplary embodiment of the present invention;

FIG. 4 is a schematic view of a vision inspection module and its peripheral components in accordance with an exemplary embodiment of the present invention;

FIG. 5 is a schematic view of an inspection platform and its surrounding components according to an exemplary embodiment of the present invention;

FIG. 6 is an exploded view of FIG. 5;

FIG. 7 is a flow chart of a panel inspection method according to an exemplary embodiment of the present invention;

FIG. 8 is a flow chart of a panel inspection method according to another exemplary embodiment of the present invention; and

fig. 9 is a flowchart of a panel inspection method according to still another exemplary embodiment of the present invention.

Wherein the figures include the following reference numerals:

101. a feeding mechanism; 102. a blanking mechanism; 110. carrying the guide rail; 200. a detection platform; 210. detecting a platform guide rail; 220. a support device; 221. a turntable; 222. a base; 223. a rotating assembly; 310. a first positioning module; 320. a second positioning module; 400. a visual detection module; 401. a carrier base; 402. a visual inspection module guide rail; 410. an appearance detection camera; 420. a border inspection camera; 430. a particle detection camera; 510. a first identifier; 520. a second identifier; 530. a first reference position; 540. a second reference position; 800. a panel to be detected; 910. feeding; 920. and (7) blanking.

Detailed Description

In the following description, numerous details are provided to provide a thorough understanding of the present invention. One skilled in the art, however, will understand that the following description merely illustrates a preferred embodiment of the invention and that the invention may be practiced without one or more of these details. In other instances, well known features have not been described in detail so as not to obscure the invention.

According to one aspect of the present invention, a panel inspection apparatus is provided. Fig. 1 illustrates a panel inspection apparatus according to an exemplary embodiment of the present invention, which may include an inspection platform 200, a visual inspection module 400, and a control module (not shown).

The inspection platform 200 is used for bearing a panel to be inspected. The panel to be detected can be fixed on the panel to be detected by means of adsorption force. The first positioning module 310 is configured to collect mark images of the first mark and the second mark on the panel to be detected on the detection platform 200, so as to obtain position information of the first mark and the second mark. The number of the detection platforms 200 is not limited to 2 in the drawing, and may be 1 or more.

The first positioning module 310 may include an image acquisition unit. The image acquisition unit is used for acquiring an image of a panel to be detected on the detection platform 200. The first positioning module 310 captures identification images of the first and second identifications on the inspection platform 200 after the panel to be inspected is carried onto the inspection platform 200. For example, the first positioning module 310 may be disposed above the inspection platform 200, so that the image capturing unit may directly capture the identification images of the first identification and the second identification after the panel to be inspected is placed on the inspection platform 200. Alternatively, the first positioning module 310 may be located at a fixed position above the detection platform 200. Optionally, the first positioning module 310 may also be movable above the detection platform 200. Generally, the first positioning module 310 has a high shooting precision, and the first mark and the second mark may be located at positions far away from the panel to be detected, for example, at two corners of the panel to be detected, respectively, so as to avoid occupying an effective area on the panel to be detected. In this case, the photographing field of view of the first positioning module 310 may not cover the first marker and the second marker at the same time. Therefore, the first positioning module 310 may be required to photograph the first identifier and then move to the second identifier.

The visual inspection module 400 is used for performing visual inspection on a panel to be inspected on the inspection platform 200. The vision inspection module 400 may include one or more of a particle inspection camera, a tour inspection camera, an appearance inspection camera, and the like. The particle detection camera includes, for example, a DIC detection camera for detecting particle distribution, particle shift, bubble detection, foreign matter detection, and the like. The edge inspecting camera is used for inspecting the appearance of the substrate, such as the presence or absence of cracks, scratches, edge chipping, and the like on the substrate. The appearance detection camera is used for detecting the appearance of the integrated circuit, particularly the conditions of edge breakage, corner breakage and the like.

The control module is configured to determine a first position deviation of the first identifier and the second identifier relative to the corresponding first reference position and second reference position according to the position information and control the detection platform 200 and/or the visual detection module 400 to compensate for the first position deviation. The first reference position and the second reference position are located on the first calibration template. The first calibration template can be centered in the field of view of the visual inspection module.

The control module can be built by adopting electronic elements such as a comparator, a register, a digital logic circuit and the like, or can be realized by adopting processor chips such as a singlechip, a microprocessor, a Programmable Logic Controller (PLC), a Digital Signal Processor (DSP), a Field Programmable Gate Array (FPGA), a Programmable Logic Array (PLA), an Application Specific Integrated Circuit (ASIC) and the like and peripheral circuits thereof. Of course, in some embodiments, the functions of the camera are continuously improved, and the camera not only can be used as an image acquisition unit, but also can be used as a control module, so that the integration level of the positioning assembly can be improved.

FIG. 2 illustrates an identification image according to one embodiment of the present invention. The marker image includes a first marker 510 and a second marker 520, and a first reference position 530 and a second reference position 540. The first mark 510 and the second mark 520 may be located at two adjacent corners of the panel to be detected. Illustratively, the first identifier 510 and the second identifier 520 may be a "cross" glyph identifier. The position information of the first marker 510 and the second marker 520 may include their position coordinates in the coordinate system of the marker image. The position coordinates of the first marker 510 may be (x)₁，y₁) The position coordinates of the second marker 520 may be (x)₂，y₂). The position coordinates of the first reference position 530 may be (x)_a，y_a) The position coordinates of the second reference position 540 may be (x)_b，y_b). Based on the position coordinates, a first position deviation of the first marker 510 and the second marker 520 with respect to the corresponding first reference position 530 and the second reference position 540 may be determined. The first positional deviation may include the amount of translation and the amount of deflection of the current panel to be inspected relative to the first calibration template.

The first reference position 530 and the second reference position 540 may be located on a first calibration template. The first calibration module may be obtained based on a test panel. The panel to be detected on the detection platform 200 is positioned, and the purpose is that the panel to be detected can be accurately positioned at the center of the visual field of the visual detection module 400 when the detection platform 200 conveys the panel to be detected to the visual detection module 400. The first calibration template obtained by testing the panel can be centered in the field of view of the vision inspection module.

For example, the first calibration template may be obtained in the following manner. First, the inspection platform 200 reversely transports a test panel located at the center of the field of view of the vision inspection module 400 to the image capture area of the first positioning module 310 along the predetermined line a. That is, positioning marks (mark) on the test panel are positioned within the field of view of the first positioning module 310. It should be noted that the test panel has two positioning marks that are identical to the first mark and the second mark on the panel to be detected. The position of the first positioning module 310 may be adjusted such that the positioning indicia on the test panel are located at a desired location within the field of view of the first positioning module 310. And shooting images of the positioning marks to obtain a first reference position and a second reference position of the two positioning marks so as to obtain a first calibration template. Meanwhile, the position of the first positioning module 310 at this time is recorded, which is the reference position of the first positioning module 310.

If the first positioning module 310 can only capture one mark at a time, the first positioning module 310 is moved to locate the first mark at the center of the field of view of the first positioning module 310, and an image of the first mark is captured to obtain a first reference position. The reference position a of the first positioning module 310 at this time is recorded. Then, the first positioning module 310 is moved to locate the second mark at the center of the field of view of the first positioning module 310, and an image of the second mark is captured to obtain a second reference position. The reference position b of the first positioning module 310 at this time is recorded. The reference positions a and b are positions where the first positioning module 310 then photographs the first mark 510 and the second mark 520 on the panel to be detected, respectively. The reference position of the first positioning module 310 is fixed for each panel to be inspected. That is, the first positioning module 310 is in the same position for image acquisition for each panel to be detected. Therefore, the first positioning module 310 can be associated with the position of the visual inspection module 400, so that after the panel to be inspected is placed on the inspection platform 200 and cannot move, the position deviation of how to compensate by using the visual inspection module 400 and the inspection platform 200 can be utilized, thereby ensuring that the visual inspection module 400 can shoot the same position for each panel to be inspected.

After the control module determines the first position deviation of the first marker and the second marker relative to the corresponding first reference position and the second reference position, the detection platform 200 and/or the visual detection module 400 may be controlled to compensate for the first position deviation. Illustratively, the inspection platform 200 may be rotated and/or translated in a horizontal plane and the vision inspection module 400 may be translated in the horizontal plane to compensate for the first positional deviation. That is, the degrees of freedom of movement of the inspection platform 200 and the vision inspection module 400 can be fully utilized to compensate for a specific positional deviation. After compensation, the inspection platform 200 can move the panel to be inspected to the center of the field of view of the vision inspection module 500 by moving along the predetermined line a.

Referring back to fig. 2, O is the midpoint of the first reference position 530 and the second reference position 540, and O' is the midpoint of the first marker 510 and the second marker 520. By comparing the two middle points, the translation amount of the position deviation of the panel to be detected relative to the first calibration template can be calculated, and by comparing the included angle between the connecting line of the first reference position 530 and the second reference position 540 and the connecting line of the first mark 510 and the second mark 520, the deflection amount of the position deviation of the panel to be detected relative to the first calibration template can be calculated. For example, assuming that the orientation of fig. 2 is consistent with the orientation of the top view of fig. 1, when the panel to be detected is deflected by an angle θ in the counterclockwise direction with respect to the first calibration template, the detection platform 200 may be controlled to rotate by the angle θ in the clockwise direction in the horizontal plane. When the panel to be inspected is translated by a distance D to the lower right with respect to the first calibration template, the handling module and the vision inspection module 400 may be controlled to cooperate to translate the distance D in the opposite direction. Thereby, positional deviations of the panel to be detected can be compensated. Of course, the translation distance D may also be compensated for by the handling module or the visual detection module 400 only.

It will be understood by those skilled in the art that the translation distance D is described above in terms of the image size and the actual physical space 1:1, but in practice, the size in the identification image and the size in the actual physical space are scaled by a certain scale. The scale is determined by the first positioning module 310, and for the first positioning module 310, if the parameters such as the focal length of the first positioning module 310 are not changed after the first positioning module is adjusted during the first use, the scale is determined not to be changed.

The panel detection device with the arrangement can acquire the position information of the first mark and the second mark on the panel to be detected through the first positioning module 310, and the control module can compare the position information with the first reference position and the second reference position calibrated in advance in the first calibration template, so as to determine the first position deviation between the current position of the panel to be detected and the reference position, and then control the detection platform 200 and/or the visual detection module 400 to compensate the first position deviation before the visual detection. In this way, the inspection platform 200 can transport the panel to be inspected to the center of the field of view of the vision inspection module 400 along a predetermined route. According to the method and the device, the deviation of the two marks on the panel to be detected relative to respective reference positions is compared to perform accurate positioning on the panel to be detected, so that the accuracy of the accurate positioning can be improved. Moreover, the farther the distance between the first mark and the second mark is, the higher the spatial position accuracy of the panel to be detected is calculated, and especially for a large-size panel, the angular deviation of the panel to be detected in the horizontal plane can be obtained more accurately. Further, since the deviation can be subjected to multi-degree-of-freedom position compensation through the detection platform and the visual detection module, the panel to be detected can be brought to the visual field center of the visual detection module 400 through fewer times or even only one time of positioning and position compensation, thereby improving the detection efficiency. Also, automatic positioning and automatic position compensation calibration of the panel detecting apparatus may be achieved based on the first positioning module 310 and the control module. In actual operation, only by clicking on the key, the control module can control the first positioning module 310 to automatically acquire the image, calculate the first position deviation, and control the detection platform 200 and/or the visual detection module 400 to automatically perform the position compensation, thereby reducing the work of the personnel.

Illustratively, the inspection platform 200 is movable along a longitudinal direction within a horizontal plane and rotatable within the horizontal plane, and the vision inspection module 400 is movable along a lateral direction within the horizontal plane perpendicular to the longitudinal direction and performs vision inspection on the panel to be inspected during the movement. The first positional deviation comprises a first amount of lateral translation X in the lateral direction₁A first longitudinal translation Y in the longitudinal direction₁And a first deflection angle R in the horizontal plane₁。

The inspection stage 200 is movable along the longitudinal direction (i.e., Y-axis) and rotatable within a horizontal plane (i.e., XY plane). The inspection platform 200 moves primarily to transport the panel to be inspected thereon to the vision inspection area of the vision inspection module 500. In the present application, the movement of the inspection platform 200 can also compensate for the position deviation of different panels to be inspected when they are placed on the inspection platform 200. For example, as shown in FIGS. 5-6, the inspection platform 200 may be disposed on a support device 220, and the support device 220 may be slidably coupled to an inspection platform rail 210 extending along the Y-axis. The supporting device 220 can slide along the inspection platform rail 210 under the driving of the driving device. The driving device can adopt common devices such as a caterpillar track, a linear motor and the like, and the detailed structure of the driving device is not repeated. The supporting device 220 may include a turntable 221 at the top, a base 222 at the bottom, and a rotation assembly 223 connected between the turntable 221 and the base 222. The turntable 221 is rotatably connected to the base 222 by a rotating assembly 223. A rotation driving device may be disposed in the base 222, and the rotation driving device may include various common mechanisms such as a rotating motor, and the like, for driving the rotating assembly 223 to drive the rotating platform 221 to rotate around the vertical direction, so that the detection platform 200 may rotate in the horizontal plane. The inspection platform 200 may be secured to the turntable 221 by fasteners (not shown). Thus, the degrees of freedom of motion of the inspection platform 200 include a degree of freedom of movement in the longitudinal direction (i.e., Y-axis) and a degree of freedom of rotation in the horizontal plane (i.e., XY-plane).

The above freedom of movement of the inspection platform 200 is also used to control the movement of the supporting device 220 along the inspection platform rail 210 in a direction away from the vision inspection module 400 after one edge of the panel to be inspected is inspected. When the inspection platform 200 is far enough away from the vision inspection module 400, the inspection platform 200 can be controlled to rotate in the horizontal plane so that the next edge to be inspected of the panel to be inspected faces the vision inspection module 400. In this way, the inspection platform 200 may be prevented from colliding with the vision inspection module 400 while rotating. The inspection platform 200 is then moved back along the inspection platform rail 210 toward the visual inspection module 400 so that the next edge of the panel to be inspected moves into the visual inspection area of the visual inspection module 400. The scheme makes full use of the freedom of motion of the detection platform 200 when compensating the position deviation of the panel to be detected.

As shown in fig. 4, the vision inspection module 400 is movable in a lateral direction (i.e., X-axis direction) under the driving of the driving assembly to perform vision inspection on the panel to be inspected. The vision inspection module 400 may include an appearance inspection camera 410, a tour inspection camera 420, and a particle inspection camera 430. The appearance inspection camera 410, the edge inspection camera 420, and the particle inspection camera 430 are disposed on the mount 401. The carriage 401 is movably connected to the vision inspection module guide 402. The visual inspection module rail 402 may extend in a lateral direction (i.e., X-axis direction). The first driving assembly may be connected to the carriage 401 to drive the visual inspection module 400 to move in the lateral direction. The vision inspection module 400 may move along an edge of the panel 800 to be inspected during the inspection process, and perform vision inspection on the edge during the movement process. The first driving assembly may include a caterpillar track, a linear motor, and other common devices, and the detailed structure of the first driving assembly is not described herein.

The first positional deviation may include a first amount of lateral translation X in the lateral direction₁A first longitudinal translation Y in the longitudinal direction₁And a first deflection angle R in the horizontal plane₁. First amount of lateral translation X₁May be compensated for by translation of the visual detection module 400 in the lateral direction. First longitudinal translation Y₁May be compensated for by translation of the detection platform 200 in the longitudinal direction. First deflection angle R₁May be compensated for by rotation of the sensing platform 200 in the horizontal plane.

The above-described operation involves three operations: translation of visual inspection module 400 in the lateral direction to compensate for the first amount of lateral translation X₁The translation of the test platform 200 along the longitudinal direction compensates for the first amount of longitudinal translation Y₁And detecting rotation of platform 200 in the horizontal plane to compensate for first deflection angle R₁. The three actions are performed out of order, and may be performed simultaneously or in time intervals. Moreover, after the first positioning module 310 is positioned, the inspection platform 200 needs to transport the panel to be inspected along the predetermined route aTo the center of the field of view of the vision inspection module 400, and thus one or more of the three actions described above may also be performed during the course of the delivery.

Preferably, the control module is configured to simultaneously control the testing platform 200 to rotate to compensate for the first deflection angle R1, control the testing platform 200 to move in the longitudinal direction to compensate for the first amount of longitudinal translation Y1, and control the vision testing module 400 to move in the lateral direction to compensate for the first amount of lateral translation X1. Thus, the work efficiency can be improved.

Illustratively, the panel detecting device may further include a handling module. The handling module is movable in the lateral direction (i.e., the X-axis direction). The carrying module is used for carrying the panel to be detected. The first positioning module 310 is disposed on the carrying module, and the carrying module is further configured to drive the first positioning module 310 to move along the transverse direction, so as to collect the identification images of the first identification and the second identification.

Illustratively, the handling module may include two modules, namely a feeding mechanism 101 and a blanking mechanism 102. The feeding mechanism 101 is used for transporting the panel to be detected from the feeding position to the detection platform 200. The blanking mechanism 102 is used for transporting the panel to be detected from the detection platform 200 to a blanking position. The feeding mechanism 101 can convey the panel to be detected to the detection platform 200 along the first transverse direction. The blanking mechanism 102 can move the panel to be inspected away from the inspection platform 200 along a second transverse direction opposite to the first transverse direction. It is understood that the feeding mechanism 101 and the discharging mechanism 102 may not be distinguished, i.e. the carrying module may also comprise only one module, and the feeding and discharging operations are performed by the module.

Illustratively, in conjunction with fig. 1 and 3, the loading mechanism 101 may grasp a panel to be inspected from an upstream loading location 910. The loading mechanism 101 may be movably disposed on the carrying rail 110. The conveyance rail 110 extends in the lateral direction (i.e., the X-axis direction). The feeding mechanism 101 may convey the gripped panel to be detected onto the detection platform 200 along the conveying guide rail 110. The inspection platform 200 may be movably disposed on the inspection platform rail 210. The inspection platform rail 210 may extend along a longitudinal direction (i.e., the Y-axis direction). The inspection platform 200 may transport the panel to be inspected along the inspection platform rail 210 to the visual inspection area of the visual inspection module 400. The vision inspection module 400 may be disposed behind and below the carrying rail 110. After inspection is completed, the inspection platform 200 may be returned along the inspection platform rail 210, and the panel may be transported to the blanking station 920 by the blanking mechanism 102. The blanking mechanism 102 may also move along the conveyance rail 110.

After the panel to be detected is placed on the detection platform 200 by the carrying module, the carrying module is just above the panel to be detected. Therefore, by providing the first positioning module 310 on the carrier module, it is possible to dispense with additionally providing a stand for the first positioning module 310. In addition, the carrying module is further configured to drive the first positioning module 310 to move along the transverse direction, so as to collect the identification images of the first identification and the second identification.

As mentioned above, the first mark and the second mark are usually disposed on the panel to be detected at intervals along the transverse direction (i.e., the X-axis direction), for example, at two corners of the panel to be detected. Since the first positioning module 310 has high shooting accuracy, only one mark can be shot at a time, and therefore, after shooting one mark, the mark needs to be moved to a position above another mark in the transverse direction for shooting. The first positioning module 310 is disposed on the carrying module, and the carrying module can be driven to move in the transverse direction, so that a set of driving components can be reduced, and the cost of the panel detection device can be reduced.

In an embodiment where the handling module includes the loading mechanism 101 and the unloading mechanism 102, for example, the first positioning module 310 may be disposed on the loading mechanism 101; or may be provided on the blanking mechanism 102. The order in which the first positioning module 310 acquires the images of the first marker and the images of the second marker is determined by the shortest distance that the first positioning module 310 moves when acquiring the images.

Illustratively, the first positioning module 310 may be disposed on the feeding mechanism 101. The loading arm of the loading mechanism 101 and the first positioning module 310 may be sequentially arranged along a first transverse direction (e.g., along a right direction), as shown in fig. 1. The first positioning module 310 is arranged at the right side of the feeding arm. The first mark and the second mark on the panel to be detected can also be arranged in sequence along the first transverse direction. In this way, after the feeding mechanism 101 places the panel to be detected on the detection platform 200, the first positioning module 310 may preferentially collect the image of the second identifier located on the right side of the first identifier. Moreover, the distance between the feeding arm and the first positioning module 310 may also be set such that the second mark is just located in the visual field of the first positioning module 310 after the panel to be detected is placed on the detection platform 200. The feed mechanism 101 is then moved in a second lateral direction (e.g., to the left) opposite the first lateral direction to capture an image of the first indicia. This can shorten the moving distance of the feeding mechanism 101. After the first positioning module 310 finishes collecting the image of the first mark, it may directly return to the upstream feeding location. And the first positioning module 310 moves leftwards all the time after acquiring the image of the second identifier, so that the interference with the blanking operation of the blanking mechanism 102 can be avoided, and the size of the panel detection device can be reduced.

For example, the first positioning module may be disposed on the blanking mechanism 102. The feeding arm and the first positioning module of the feeding mechanism 102 may be sequentially disposed along a second transverse direction (e.g., along a left direction). The first positioning module is arranged on the left side of the blanking arm. The first mark and the second mark on the panel to be detected can also be arranged in sequence along the second transverse direction. Thus, after the panel to be detected on the detection platform 200 by the blanking mechanism 102 is visually detected, the first positioning module can be driven by the blanking mechanism 102 to rapidly move from the rightmost initial position to the position above the left second identifier, and preferentially collect the image of the left second identifier located on the first identifier. Because the moving stroke is long, the moving speed of the blanking mechanism 102 can be faster. Immediately after this image acquisition is completed, the blanking mechanism 102 is moved in a first lateral direction (e.g., to the right) to acquire an image of the first indicia on the right. In this way, the time during which the blanking mechanism 102 stays on the leftmost side is very short, and therefore, interference with the feeding operation of the feeding mechanism 101 can be avoided, thereby reducing the size of the panel detecting apparatus.

It is understood that in the embodiment where the first positioning module 310 is disposed on the feeding mechanism 101, the second mark is located at the right side of the first mark; and in embodiments where the first positioning module may be disposed on the blanking mechanism 102, the second indicia is located to the left of the first indicia.

Because the visual field of the DIC detection camera is small, the scanning length is long, generally more than 5 ten thousand lines, the comprehensive operation efficiency, the storage allowance and the like are limited, and the precision is generally required to be within 0.1 mm. Generally, the first positioning module 310 needs to have very high shooting accuracy so as to be able to more accurately position the panel to be detected. Therefore, the carrying module places the panel to be detected on the detection platform with a large position deviation, especially a large-size panel to be detected, and it is likely that the positioning mark on the panel to be detected moves out of the shooting view of the first positioning module 310. And also. If there is a large positional deviation of the panel to be inspected when placed on the inspection platform 200, it may also occur that the panel to be inspected is out of their movement range when the position of the panel to be inspected is compensated by the inspection platform 200 and the vision inspection module 400.

Illustratively, the panel inspection apparatus further includes a second positioning module 320, as shown in fig. 1, the second positioning module 320 is configured to collect position information of the feature of the panel to be inspected before the panel to be inspected is transported to the inspection platform 200. The control module is further configured to determine a second position deviation of the feature relative to the calibration position according to the position information of the feature and control the inspection platform 200 and/or the handling module to compensate for the second position deviation before the panel to be inspected is handled onto the inspection platform 200. The calibration position is located on a second calibration template, which can be located in the center of the field of view of the first positioning module.

Illustratively, the second positioning module 320 may include an image acquisition device, such as a camera. In the image capturing process, the second positioning module 320 may capture a picture of the panel to be detected. Due to the limited shooting view of the camera and the larger and larger area of the panel to be detected, the entire panel to be detected may not be included clearly within the field of view of the camera. In order to ensure that the imaging is sharp and in order that the processing unit can quickly calculate the image position of the feature in the image, the camera can aim the shooting field of view at the feature of the panel to be detected.

The handling module may handle the panel to be inspected to the image capture area of the second positioning module 320 before placing the panel to be inspected on the inspection platform 200. The second positioning module 320 captures an image of the feature of the panel to be detected to obtain the position information of the feature. When the second positioning module 320 captures images, the panel to be detected can be always kept on the carrying module. The characteristic part can be a predetermined angle or a positioning mark (mark) on the panel to be detected. If the field of view captured by the second positioning module 320 is small, the image may include only the portion of the panel to be detected where the feature is located. Usually, there may be deviations in the gripping of the different panels to be inspected by the handling module, but the deviations are not particularly large. After each panel to be inspected is conveyed by the conveying module along the predetermined route a toward the second positioning module 320, an image including the feature can be captured.

The nominal position of the feature may be obtained by:

first, the transport module transports a test panel located at a predetermined position on the inspection platform 200 to the image capture area of the second positioning module 320 along the predetermined path B in a reverse direction. A positioning mark (mark) of the test panel located at a predetermined position on the inspection platform 200 may be located at the center of the field of view of the first positioning module 310. The handling module may be movable along the handling rail 110. The conveyance rail 110 extends in the lateral direction (i.e., the X-axis direction). The transfer module may transfer the test panel at the predetermined position along the transfer rail 110 in a reverse direction to the image capture area of the second positioning module 320. The position of the second positioning module 320 is adjusted so that the feature of the test panel is within the field of view of the second positioning module 320. And shooting a test image comprising the characteristic part of the test panel, wherein the position of the characteristic part of the test panel in the test image is the calibration position of the characteristic part, so as to obtain a second calibration template. The characteristic portion of the test image corresponds to the characteristic portion of the panel to be detected, for example, both are predetermined corners (e.g., lower left corner or upper left corner) of the corresponding panel or both are positioning marks (marks) of the corresponding panel.

In addition, when adjusting the position of the second positioning module 320, the second positioning module 320 may be made movable along the longitudinal direction (i.e., the Y-axis direction). As shown in fig. 1-2, the second positioning module 320 may be slidably coupled to the positioning assembly rail 120. The positioning assembly rail 120 may extend along a longitudinal direction. In cooperation with the handling module being movable in the transverse direction, the features of the test panel may be positioned at desired locations within the image acquisition area of the second positioning module 320. And shooting a test image containing the characteristic part of the test panel, wherein the position of the characteristic part of the test panel in the test image is the calibration position of the characteristic part. After the nominal position of the feature is determined, it can be used in each subsequent position fix. Illustratively, the features of the test panel may be centered in the field of view of the second positioning module 320 when the features of the test panel are positioned in the desired locations. Of course, the desired position may also be any other suitable position within the field of view of the second positioning module 320.

The position (e.g., Y-axis coordinate) of the second positioning module 320 and the position (e.g., X-axis coordinate) of the carrier module at this time are recorded as the reference position of the second positioning module 320 and the reference position of the carrier module, respectively. Further, the reference position of the detection platform 200 is recorded.

Subsequently, the second positioning module 320 is located at its reference position when positioning each panel to be detected. However, during the time interval between positioning two panels to be inspected, the second positioning module 320 may move, for example, along the Y-axis, to avoid collision during the transportation of the panels to be inspected to the image capturing area of the second positioning module 320 by the transportation module. In the normal production process, the carrying module moves to the reference position of the carrying module for positioning after grabbing a new panel to be detected from the upstream material taking position. After the positioning is completed, the carrying module moves to the position above the detection platform 200 at the reference position along the predetermined line B, and places the panel to be detected on the detection platform 200.

Before the panel to be detected is placed on the detection platform 200, the control module may determine a second position deviation of the feature portion relative to the calibration position according to the position information of the feature portion, and control the detection platform 200 and/or the carrying module to compensate for the second position deviation, so that the position accuracy of the panel to be detected placed on the detection platform may be improved. The second positioning module 320 can prevent a panel to be detected (especially a large-sized panel to be detected) from being placed behind the detection platform and causing a large position deviation, and avoid the influence of the uncertain factors on subsequent detection. For example, the positioning mark on the panel to be detected can be prevented from moving out of the shooting view of the first positioning module 310. Because the second positioning module 320 can provide a better basic guarantee for the subsequent positioning link of the first positioning module 310, the position compensation amount performed by the panel detection device can be reduced in the positioning link of the first positioning module 310, so that the success rate and accuracy of the positioning link of the first positioning module 310 are improved, and the visual detection of the panel to be detected by the visual detection module is further facilitated. In addition, because the positioning component carries out positioning before the panel to be detected is placed on the detection platform, the placing position of each panel to be detected on the detection platform is stable, and the platform adsorption difference caused by position change is reduced.

Illustratively, the detection platform 200 is movable along a longitudinal direction within a horizontal plane and rotatable within the horizontal plane, and the handling module is movable along a lateral direction within the horizontal plane perpendicular to the longitudinal direction. The second positional deviation includes a second amount of lateral translation X in the lateral direction₂A second longitudinal translation Y in the longitudinal direction₂And a second deflection angle R in the horizontal plane₂. Second amount of lateral translation X₂Can be compensated by a translation of the handling module in the transverse direction. Second amount of longitudinal translation Y₂May be compensated for by translation of the detection platform 200 in the longitudinal direction. Second deflection angle R₂May be compensated for by rotation of the sensing platform 200 in the horizontal plane.

The above-described operation involves three operations: the translation of the handling module in the transverse direction compensates for the second amount of transverse translation X₂. Translation of inspection platform 200 along the longitudinal direction to compensate for the secondLongitudinal translation Y₂. Rotation of the detection platform 200 in the horizontal plane to compensate for the second deflection angle R₂. The three actions are performed out of order, and may be performed simultaneously or in time intervals. Furthermore, after the second positioning module 320 is positioned, the handling module needs to place the panel to be inspected on the inspection platform 200 along the predetermined route B, so that one or more of the above three actions can be performed during the placing process.

Preferably, the control module is used for simultaneously controlling the rotation of the detecting platform 200 to compensate the second deflection angle R₂Controlling the carrying module to move along the transverse direction to compensate the second transverse translation amount X₂Controlling the detecting platform 200 to move along the longitudinal direction to compensate the second longitudinal translation amount Y₂. Thus, the work efficiency can be improved.

Illustratively, the feature may comprise a predetermined angle of the panel to be detected. For example the upper left corner or the lower left corner of the panel to be detected. The control module can determine the boundary of the panel to be detected according to the difference of the pixel brightness of the panel to be detected and the background shot in the image, and further determine two edges forming the preset angle. The image position of the predetermined angle in the image can be calculated from these two edges. Illustratively, the features may include the aforementioned first and second indicia. That is, the first positioning module 310 and the second positioning module 320 may use the same identification for positioning.

In an embodiment including the second positioning module 320, the control module is further configured to control the carrying module and the detecting platform 200 to return to their respective reference positions before the subsequent first positioning module 310 acquires the identification images of the first identification and the second identification. The reason for this is that after the second positioning module 320 is positioned, the carrying module and the inspection platform 200 may have deviated from the reference position to respectively perform corresponding position compensation for the position difference of the different panels to be inspected on the inspection platform 200. Before the subsequent positioning step of the first positioning module 310, the handling module and the testing platform 200 should be returned to the reference position to avoid the deviation caused by the position compensation from affecting the positioning of the first positioning module 310.

According to another aspect of the invention, a panel detection method is also provided. As shown in fig. 7, the panel inspection method includes:

step S1: the method includes the steps of collecting identification images of a first identification and a second identification on a panel to be detected on the detection platform 200 to obtain position information of the first identification and the second identification. Illustratively, the identification image may be acquired with the first positioning module 310.

Step S2: and determining a first position deviation of the first mark and the second mark relative to a corresponding first reference position and a corresponding second reference position according to the position information, wherein the first reference position and the second reference position are positioned on a first calibration template, and the first calibration template can be positioned in the center of the visual field of the visual detection module. The first calibration template may be made as described in the corresponding parts above.

Step S3: the control detection platform 200 and/or the visual detection module 400 compensate for the first position deviation. This step S3 is a compensation step.

Illustratively, the first positional deviation may comprise a first amount of lateral translation X in the lateral direction₁A first longitudinal translation Y in the longitudinal direction₁And a first deflection angle R in the horizontal plane₁. Based on this, the compensating step S3 may include: controlling the rotation of the detecting platform 200 to compensate the first deflection angle R₁(ii) a Controlling the testing platform 200 to move in the longitudinal direction to compensate for the first longitudinal translation Y₁(ii) a And controlling the vision detection module to move in the transverse direction to compensate for the first transverse translation amount X₁. It should be noted that, the three steps are not executed in sequence.

Illustratively, as shown in fig. 8, the panel detecting method further includes, before step S1:

step S01: and grabbing the panel to be detected by using the carrying module.

Step S02: and collecting the position information of the characteristic part of the panel to be detected. Illustratively, the identification image may be acquired with the second positioning module 320. The feature may comprise a predetermined angle of the panel to be detected. For example the upper left corner or the lower left corner of the panel to be detected. Illustratively, the features may include the aforementioned first and second indicia.

Step S03: and determining a second position deviation of the characteristic part relative to the calibration position according to the position information of the characteristic part. The second positional deviation may include a second amount of lateral translation X in the lateral direction₂A second longitudinal translation Y in the longitudinal direction₂And a second deflection angle R in the horizontal plane₂。

Step S04: and controlling the detection platform 200 and/or the carrying module to compensate for the second position deviation, wherein the calibration position is located on a second calibration template, and the second calibration template can be located at the center of the visual field of the first positioning module. The second calibration template may be made as described in the corresponding part above.

Step S05: the carrying module carries the panel to be detected to the detection platform 200.

Illustratively, as shown in fig. 9, the panel detecting method further includes, after step S05 and before step S1:

step S06: the carrier module and the inspection platform 200 are returned to their respective reference positions. The reason for this is that after the second positioning module 320 is positioned, the carrying module and the inspection platform 200 may have deviated from the reference position to respectively perform corresponding position compensation for the position difference of the different panels to be inspected on the inspection platform 200.

According to another aspect of the invention, an electronic device is also provided. The electronic device may include a processor and a memory. Wherein the memory has stored therein computer program instructions for executing the panel detection method as described above when executed by the processor.

According to still another aspect of the present invention, there is also provided a storage medium. On the storage medium, program instructions are stored which, when executed, are adapted to perform the panel detection method as described above. The storage medium may include, for example, a storage component of a tablet computer, a hard disk of a personal computer, Read Only Memory (ROM), Erasable Programmable Read Only Memory (EPROM), portable compact disc read only memory (CD-ROM), USB memory, or any combination of the above storage media. The computer-readable storage medium may be any combination of one or more computer-readable storage media.

In the description of the present invention, it is to be understood that the directions or positional relationships indicated by the directional terms such as "front", "rear", "upper", "lower", "left", "right", "lateral", "vertical", "horizontal" and "top", "bottom", etc., are generally based on the directions or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, and in the case of not making a reverse explanation, these directional terms do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore, should not be construed as limiting the scope of the present invention; the terms "inner" and "outer" refer to the interior and exterior relative to the contours of the components themselves.

For ease of description, relative terms of regions such as "above … …", "above … …", "above … …", "above", and the like may be used herein to describe the regional positional relationship of one or more components or features with other components or features as illustrated in the figures. It is to be understood that the relative terms of the regions are intended to encompass not only the orientation of the element as depicted in the figures, but also different orientations in use or operation. For example, if an element in the drawings is turned over in its entirety, the articles "over" or "on" other elements or features will include the articles "under" or "beneath" the other elements or features. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". Further, these components or features may also be positioned at various other angles (e.g., rotated 90 degrees or other angles), all of which are intended to be encompassed herein.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, elements, components, and/or combinations thereof, unless the context clearly indicates otherwise.

It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are capable of operation in sequences other than those illustrated or described herein.

The present invention has been illustrated by the above embodiments, but it should be understood that the above embodiments are for illustrative and descriptive purposes only and are not intended to limit the invention to the scope of the described embodiments. Furthermore, it will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that many variations and modifications may be made in accordance with the teachings of the present invention, which variations and modifications are within the scope of the present invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The panel detection device is characterized by comprising a detection platform, a first positioning module, a visual detection module and a control module;

the detection platform is used for bearing a panel to be detected;

the first positioning module is used for acquiring identification images of a first identification and a second identification on the panel to be detected on the detection platform so as to acquire position information of the first identification and the second identification;

the visual detection module is used for performing visual detection on the panel to be detected on the detection platform;

the control module is used for determining a first position deviation of the first identifier and the second identifier relative to a corresponding first reference position and a corresponding second reference position according to the position information and controlling the detection platform and/or the visual detection module to compensate the first position deviation; the first reference position and the second reference position are located on a first calibration template, and the first calibration template can be located in the center of the visual field of the visual detection module.

2. The panel inspection apparatus of claim 1, wherein the inspection platform is movable along a longitudinal direction within a horizontal plane and rotatable within the horizontal plane, and the vision inspection module is movable along a lateral direction within the horizontal plane perpendicular to the longitudinal direction and performs vision inspection on the panel to be inspected during the movement; the first positional deviation comprises a first amount of lateral translation X in the lateral direction₁A first longitudinal translation Y in said longitudinal direction₁And a first deflection angle R in the horizontal plane₁。

3. The panel detecting apparatus of claim 2, wherein the control module is configured to simultaneously control the rotation of the detecting platform to compensate for the first deflection angle R₁And controlling the detection platform to move along the longitudinal direction to compensate the first longitudinal translation amount Y₁And controlling the visual detection module to move along the transverse direction to compensate the first transverse translation amount X₁。

4. The panel inspection apparatus of claim 1, wherein for each panel to be inspected, the first positioning module is in the same position for image acquisition.

5. The panel detecting apparatus according to claim 1, further comprising a carrying module, the carrying module being movable along a transverse direction, the carrying module being configured to carry the panel to be detected, the first positioning module being disposed on the carrying module, the carrying module being further configured to drive the first positioning module to move along the transverse direction so as to capture the identification images of the first identification and the second identification.

6. The panel testing device of claim 5, wherein the handling module includes a loading mechanism for handling the panel to be tested onto the testing platform in a first lateral direction and a blanking mechanism for removing the panel to be tested from the testing platform in a second lateral direction opposite to the first lateral direction.

7. The panel detecting apparatus according to claim 6, wherein the first positioning module is disposed on the feeding mechanism or the discharging mechanism, and an order in which the first positioning module captures the image of the first mark and the image of the second mark is determined by a shortest distance in which the first positioning module moves when the images are captured.

8. The panel testing device according to claim 5, further comprising a second positioning module for collecting position information of the feature of the panel to be tested before the panel to be tested is transported onto the testing platform, wherein the control module is further configured to determine a second position deviation of the feature relative to the calibration position according to the position information of the feature and control the testing platform and/or the transporting module to compensate for the second position deviation before the panel to be tested is transported onto the testing platform; the calibration position is located on a second calibration template, and the second calibration template can be located in the center of the field of view of the first positioning module.

9. The panel testing apparatus of claim 8, wherein said testing platform is movable along a longitudinal direction within a horizontal plane and rotatable within said horizontal plane, and said handling module is movable along a lateral direction within said horizontal plane perpendicular to said longitudinal direction; the second position deviation packageIncluding a second amount of lateral translation X in the lateral direction₂A second longitudinal translation Y in said longitudinal direction₂And a second deflection angle R in the horizontal plane₂。

10. The panel detecting apparatus of claim 9, wherein the control module is configured to simultaneously control the rotation of the detecting platform to compensate for the second deflection angle R₂Controlling the carrying module to move along the transverse direction to compensate the second transverse translation amount X₂And controlling the detection platform to move along the longitudinal direction to compensate the second longitudinal translation amount Y₂。

11. The panel inspection device of claim 9, wherein the feature comprises a predetermined corner of the panel to be inspected or the feature comprises the first indicia and the second indicia.

12. The panel inspection apparatus of any one of claims 1-11, wherein the control module is further configured to control the handling module and the inspection platform to return to their respective reference positions prior to capturing the identification images of the first and second identifications.

13. A panel inspection method, comprising:

acquiring identification images of a first identification and a second identification on a panel to be detected on a detection platform to acquire position information of the first identification and the second identification;

determining a first position deviation of the first mark and the second mark relative to a corresponding first reference position and a corresponding second reference position according to the position information, wherein the first reference position and the second reference position are positioned on a first calibration template, and the first calibration template can be positioned in the center of the visual field of the visual detection module; and

a compensation step: controlling the inspection platform and/or the visual inspection module to compensate for the first positional deviation.

14. The panel detection method of claim 13, wherein the first positional deviation comprises a first lateral translation X in a lateral direction₁A first longitudinal translation Y in the longitudinal direction₁And a first deflection angle R in the horizontal plane₁Said transverse direction and said longitudinal direction being perpendicular to each other in said horizontal plane,

the compensating step comprises:

controlling the detection platform to rotate to compensate for the first deflection angle R₁；

Controlling the detection platform to move along the longitudinal direction to compensate the first longitudinal translation amount Y₁(ii) a And

controlling the visual detection module to move in the lateral direction to compensate for the first amount of lateral translation X₁。

15. The panel inspection method of claim 13, further comprising, prior to the step of capturing an identification image of the first and second identifications:

grabbing the panel to be detected by using a carrying module;

collecting position information of the characteristic part of the panel to be detected;

determining a second position deviation of the characteristic part relative to the calibration position according to the position information of the characteristic part;

controlling the detection platform and/or the carrying module to compensate the deviation of the second position, wherein the calibration position is located on a second calibration template which can be located at the center of the visual field of the first positioning module; and

and the carrying module carries the panel to be detected to the detection platform.

16. The panel inspection method according to claim 15, further comprising, after the handling module handles the panel to be inspected on the inspection platform and before the step of capturing the identification images of the first and second identifications:

and respectively returning the carrying module and the detection platform to the respective reference positions.

17. An electronic device comprising a processor and a memory, wherein the memory has stored therein computer program instructions for execution by the processor to perform the panel detection method of any of claims 13 to 16.

18. A storage medium having stored thereon program instructions for performing, when executed, the panel detection method of any one of claims 13 to 16.