CN114364999A - 用于平面外方向磁场集中的磁通量集中器 - Google Patents

用于平面外方向磁场集中的磁通量集中器 Download PDF

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Publication number
CN114364999A
CN114364999A CN202080063008.6A CN202080063008A CN114364999A CN 114364999 A CN114364999 A CN 114364999A CN 202080063008 A CN202080063008 A CN 202080063008A CN 114364999 A CN114364999 A CN 114364999A
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CN
China
Prior art keywords
substrate
horizontal
hall sensor
magnetic concentrator
magnetic
Prior art date
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Pending
Application number
CN202080063008.6A
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English (en)
Chinese (zh)
Inventor
美藤成
本杰明·史塔生·库克
李德元
凯特·瑞安·格伦
大竹健二
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Texas Instruments Inc
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Texas Instruments Inc
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Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of CN114364999A publication Critical patent/CN114364999A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0011—Arrangements or instruments for measuring magnetic variables comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/50—Devices characterised by the use of electric or magnetic means for measuring linear speed
    • G01P3/52—Devices characterised by the use of electric or magnetic means for measuring linear speed by measuring amplitude of generated current or voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
CN202080063008.6A 2019-09-09 2020-09-08 用于平面外方向磁场集中的磁通量集中器 Pending CN114364999A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/565,130 2019-09-09
US16/565,130 US20210072327A1 (en) 2019-09-09 2019-09-09 Magnetic flux concentrator for out-of-plane direction magnetic field concentration
PCT/US2020/049640 WO2021050406A1 (en) 2019-09-09 2020-09-08 Magnetic flux concentrator for out-of-plane direction magnetic field concentration

Publications (1)

Publication Number Publication Date
CN114364999A true CN114364999A (zh) 2022-04-15

Family

ID=74850867

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080063008.6A Pending CN114364999A (zh) 2019-09-09 2020-09-08 用于平面外方向磁场集中的磁通量集中器

Country Status (5)

Country Link
US (1) US20210072327A1 (https=)
EP (1) EP4028786A4 (https=)
JP (2) JP2022547945A (https=)
CN (1) CN114364999A (https=)
WO (1) WO2021050406A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3992652B1 (en) * 2020-11-03 2026-04-15 Melexis Technologies SA Magnetic sensor device
US20250218636A1 (en) * 2023-12-28 2025-07-03 Daniel Jones Spherical magnetic flux concentrator
US12613295B2 (en) * 2024-04-23 2026-04-28 Texas Instruments Incorporated Vertical hall sensor with integrated trace

Citations (14)

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JPH07221362A (ja) * 1994-01-28 1995-08-18 Matsushita Electron Corp 磁気センサー装置、その製造方法およびそれに用いる磁性体の製造方法
US20060255797A1 (en) * 2005-05-16 2006-11-16 Allegro Microsystems, Inc. Integrated magnetic flux concentrator
CN101421635A (zh) * 2006-04-13 2009-04-29 旭化成电子材料元件株式会社 磁传感器及其制造方法
US20110193556A1 (en) * 2010-02-05 2011-08-11 Stmicroelectronics S.R.I. Integrated magnetic sensor for detecting vertical magnetic fields and manufacturing process thereof
US20120217960A1 (en) * 2011-02-28 2012-08-30 Infineon Technologies Ag 3-d magnetic sensor
US20130082340A1 (en) * 2011-09-30 2013-04-04 Infineon Technologies Ag Apparatus having a back-bias magnet and a semiconductor chip element
US20140167749A1 (en) * 2012-12-14 2014-06-19 Samsung Electro-Mechanics Co., Ltd. Hall sensor and method of manufacturing the same
CN104035056A (zh) * 2013-03-08 2014-09-10 美格纳半导体有限公司 磁传感器及其制造方法
US20140367813A1 (en) * 2013-06-12 2014-12-18 Magnachip Seminconductor, Ltd. Magnetic sensor and method of manufacture thereof
CN104834021A (zh) * 2015-05-11 2015-08-12 上海集成电路研发中心有限公司 一种地磁传感器灵敏度的计算方法
CN105914293A (zh) * 2015-02-19 2016-08-31 精工半导体有限公司 磁传感器及其制造方法
US20160254441A1 (en) * 2015-02-26 2016-09-01 Sii Semiconductor Corporation Magnetic sensor and method of manufacturing the same
US20170271575A1 (en) * 2016-03-15 2017-09-21 Sii Semiconductor Corporation Magnetic sensor and method of manufacturing the same
US20180031645A1 (en) * 2016-07-26 2018-02-01 Melexis Technologies Sa Sensor device with a soft magnetic alloy having reduced coercivity, and method for making same

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Publication number Priority date Publication date Assignee Title
DE59609089D1 (de) * 1995-10-30 2002-05-23 Sentron Ag Zug Magnetfeldsensor und Strom- oder Energiesensor
JPH09129944A (ja) * 1995-10-31 1997-05-16 Hitachi Ltd 磁電変換素子
JP5434542B2 (ja) * 2009-12-07 2014-03-05 パナソニック株式会社 入力装置
US20140028305A1 (en) * 2012-07-27 2014-01-30 International Business Machines Corporation Hall measurement system with rotary magnet
RU2656237C2 (ru) * 2016-07-14 2018-06-04 Роберт Дмитриевич Тихонов Магнитный датчик тока с пленочным концентратором
US11237223B2 (en) * 2019-07-24 2022-02-01 Texas Instruments Incorporated Magnetic flux concentrator for in-plane direction magnetic field concentration

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07221362A (ja) * 1994-01-28 1995-08-18 Matsushita Electron Corp 磁気センサー装置、その製造方法およびそれに用いる磁性体の製造方法
US20060255797A1 (en) * 2005-05-16 2006-11-16 Allegro Microsystems, Inc. Integrated magnetic flux concentrator
CN101421635A (zh) * 2006-04-13 2009-04-29 旭化成电子材料元件株式会社 磁传感器及其制造方法
US20110193556A1 (en) * 2010-02-05 2011-08-11 Stmicroelectronics S.R.I. Integrated magnetic sensor for detecting vertical magnetic fields and manufacturing process thereof
US20120217960A1 (en) * 2011-02-28 2012-08-30 Infineon Technologies Ag 3-d magnetic sensor
US20130082340A1 (en) * 2011-09-30 2013-04-04 Infineon Technologies Ag Apparatus having a back-bias magnet and a semiconductor chip element
US20140167749A1 (en) * 2012-12-14 2014-06-19 Samsung Electro-Mechanics Co., Ltd. Hall sensor and method of manufacturing the same
CN104035056A (zh) * 2013-03-08 2014-09-10 美格纳半导体有限公司 磁传感器及其制造方法
US20140367813A1 (en) * 2013-06-12 2014-12-18 Magnachip Seminconductor, Ltd. Magnetic sensor and method of manufacture thereof
CN105914293A (zh) * 2015-02-19 2016-08-31 精工半导体有限公司 磁传感器及其制造方法
US20160254441A1 (en) * 2015-02-26 2016-09-01 Sii Semiconductor Corporation Magnetic sensor and method of manufacturing the same
CN104834021A (zh) * 2015-05-11 2015-08-12 上海集成电路研发中心有限公司 一种地磁传感器灵敏度的计算方法
US20170271575A1 (en) * 2016-03-15 2017-09-21 Sii Semiconductor Corporation Magnetic sensor and method of manufacturing the same
CN107192969A (zh) * 2016-03-15 2017-09-22 精工半导体有限公司 磁传感器及其制造方法
US20180031645A1 (en) * 2016-07-26 2018-02-01 Melexis Technologies Sa Sensor device with a soft magnetic alloy having reduced coercivity, and method for making same

Also Published As

Publication number Publication date
WO2021050406A1 (en) 2021-03-18
US20210072327A1 (en) 2021-03-11
EP4028786A4 (en) 2022-11-09
EP4028786A1 (en) 2022-07-20
JP2022547945A (ja) 2022-11-16
JP2026015580A (ja) 2026-01-29

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