CN114361374A

CN114361374A - Mask plate repairing method and mask plate assembly

Info

Publication number: CN114361374A
Application number: CN202111667532.7A
Authority: CN
Inventors: 李妍妍; 王腾雨; 戴伟杰; 郭盈盈
Original assignee: Yungu Guan Technology Co Ltd
Current assignee: Yungu Guan Technology Co Ltd
Priority date: 2021-12-31
Filing date: 2021-12-31
Publication date: 2022-04-15
Anticipated expiration: 2041-12-31
Also published as: CN114361374B

Abstract

The invention provides a mask plate repairing method and a mask plate assembly, wherein the mask plate repairing method comprises the steps of aligning a mask plate main body with a substrate, and then detecting the deviation condition of an opening in the mask plate, wherein the detecting step comprises the following steps: the alignment detection equipment grabs opening edge coordinates on the mask plate main body, the opening edge coordinates are compared with corresponding preset opening edge coordinates in the memory, deviation conditions between the opening edges and the corresponding preset opening edges are obtained according to comparison results of the opening edge coordinates and the preset opening edge coordinates, wherein the opening deviation conditions comprise that the opening edges are located on the inner sides of the corresponding preset opening edges and the opening edges are located on the outer sides of the corresponding preset opening edges, and then the opening is processed according to the deviation conditions of the opening on the mask plate so that the opening meets preset opening standards. The mask plate repairing method can repair the deviation problem of the opening on the mask plate and avoid the problem that the manufactured target film layer is invalid.

Description

Mask plate repairing method and mask plate assembly

Technical Field

The invention belongs to the technical field of display, and particularly relates to a mask plate repairing method and a mask plate assembly.

Background

The Organic Light-Emitting Diode (OLED) display device has the advantages of thin thickness, Light weight, wide viewing angle, active Light emission, continuously adjustable Light emission color, low cost, fast response speed, low energy consumption, low driving voltage, wide working temperature range, simple production process, high Light-Emitting efficiency, flexible display and the like, and is more and more widely applied to the display fields of mobile phones, tablet computers, digital cameras and the like.

In the manufacturing process of the OLED display device, it is generally required to encapsulate the display device to prevent the intrusion of moisture, oxygen, or the like, and the encapsulation technology of the OLED display device mainly includes a cover plate type encapsulation and a thin film encapsulation, and the thin film encapsulation mainly includes encapsulation using an organic encapsulation layer and/or encapsulation using an inorganic encapsulation layer. The organic encapsulation layer is generally formed by ink-jet printing, and the inorganic encapsulation layer is usually formed by chemical vapor deposition, so that a macro-opening mask is often used in forming the inorganic encapsulation layer. Meanwhile, an electron injection layer, an electron transport layer, a hole injection layer, a hole transport layer, a light extraction layer, a cathode film layer and the like in the OLED film layer are generally formed by an evaporation process, and a mask plate with macroscopic openings is also needed.

Because the base station detection of mask plate supplier and mask plate user can not guarantee the exact samely, and the base station that the mask plate used deviation such as counterpoint can appear, opening off normal problem often can appear in the mask plate use, has the risk that the target rete that adopts the mask plate preparation became invalid.

Disclosure of Invention

The invention aims to provide a mask plate repairing method and a mask plate assembly, and aims to solve the problem of opening deviation of a mask plate in the using process in the prior art.

In order to achieve the purpose, the invention adopts the technical scheme that: a first aspect of the present invention provides a method for repairing a mask, where the mask includes a mask main body and a plurality of openings penetrating through the mask main body, and the method includes:

aligning the mask plate main body with the substrate;

detect the off normal condition of open-ended in the mask plate main part, the detection step includes:

the opening edge coordinates on the mask plate main body are grabbed by the alignment detection equipment;

comparing the opening edge coordinates with corresponding preset opening edge coordinates in a memory;

acquiring deviation conditions between the opening edge and the corresponding preset opening edge according to the comparison result of the opening edge coordinate and the preset opening edge coordinate, wherein the deviation conditions of the opening comprise that the opening edge is positioned on the inner side of the corresponding preset opening edge and the opening edge is positioned on the outer side of the corresponding preset opening edge;

and processing the opening edge according to the deviation condition so that the opening meets a preset opening standard.

In one embodiment, the processing the opening edge to make the opening meet a preset opening standard includes:

if the opening edge is positioned at the inner side of the corresponding preset opening edge, removing the area of the opening edge positioned at the inner side of the corresponding preset opening edge;

and if the opening edge is positioned at the outer side of the corresponding preset opening edge, blocking the area of the opening edge positioned at the outer side of the corresponding preset opening edge.

In an embodiment, a half-etching area is arranged on the mask plate body at the edge of each opening.

In one embodiment, the half-etching area is provided with at least two first cutting grooves, the distance between every two adjacent first cutting grooves is 20-30 um, and the groove width of each first cutting groove is 10 um;

the removing of the half-engraved area of the opening edge inside the corresponding preset opening edge comprises: cutting along the first cutting groove to form a gap matched with the edge of the opening.

In an embodiment, the area of the shielding opening edge outside the corresponding preset opening edge includes: and shielding the area of the opening edge outside the corresponding preset opening edge by using a metal strip.

In an embodiment, the shielding, by a metal strip, an area of the opening edge outside the corresponding preset opening edge includes: and shielding the part, which corresponds to the opening edge and is positioned at the outer side of the corresponding preset opening edge, by adopting a rectangular metal strip, and cutting along a preset second cutting groove on the metal strip, so that one side, which is close to the center of the opening, of the metal strip forms a gap matched with the preset opening edge.

In an embodiment, the number of the second cutting grooves is at least two, the distance between every two adjacent second cutting grooves is 20um-30um, and the groove width of the second cutting grooves is 10 um.

The invention provides a mask plate assembly, which comprises a mask plate main body and a plurality of openings penetrating through the mask plate main body, wherein a half-etching area is arranged on the mask plate main body at the edge of each opening.

In an embodiment, be provided with first cutting groove on half carving the region, first cutting groove be used for the cutting with form with open-ended edge assorted opening, the quantity of first cutting groove is two at least, adjacent two interval between the first cutting groove is 20um-30um, the groove width of first cutting groove is 10 um.

In an embodiment, the mask plate assembly further comprises a metal strip, the metal strip is rectangular, a second cutting groove is formed in the surface of the metal strip, and the second cutting groove is used for cutting to form a notch matched with the edge of the opening;

the number of the second cutting grooves is at least two, the distance between every two adjacent second cutting grooves is 20-30 um, and the groove width of each second cutting groove is 10 um;

the mask plate is characterized in that a first aligning hole is formed in the surface of the mask plate main body, and a second aligning hole used for aligning with the first aligning hole is formed in the metal strip.

The mask plate repairing method provided by the invention comprises the steps of aligning the main body of the mask plate with the substrate, and then detecting the deviation condition of the opening on the mask plate, wherein the detection step comprises the following steps: the alignment detection equipment grabs the opening edge coordinate on the mask plate main body, compares the opening edge coordinate with a corresponding preset opening edge coordinate in a memory, acquires the deviation condition between the opening edge and the corresponding preset opening edge according to the comparison result of the opening edge coordinate and the preset opening edge coordinate, the deviation condition of the opening comprises that the opening edge is located on the corresponding inner side of the preset opening edge and the opening edge is located on the corresponding outer side of the preset opening edge, and then the opening is processed according to the deviation condition of the opening on the mask plate so that the opening accords with the preset opening standard. The mask plate repairing method can repair the deviation problem of the upper opening of the mask plate, and avoids the problem that a target film layer manufactured by the mask plate is invalid due to the deviation of the upper opening of the mask plate.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed for the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

Fig. 1 is a flowchart of a detection step of a mask repairing method according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a mask plate main body according to an embodiment of the present invention;

fig. 3 is a schematic diagram illustrating a coordinate comparison between a point on an edge of an opening and a point on an edge of a preset opening according to an embodiment of the present invention;

fig. 4 is a schematic structural view of an opening and a half-etching region in a mask body according to an embodiment of the present invention;

fig. 5 is a schematic structural view of a metal strip and a mask main body of the mask according to the embodiment of the present invention;

fig. 6 is a schematic structural view of alignment holes and half-etched regions on a mask body according to an embodiment of the present invention;

fig. 7 is a schematic view of a partial structure of a metal strip according to an embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "comprises" and "comprising," and any variations thereof, as used herein, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

In addition, in the present application, unless otherwise expressly specified or limited, the terms "connected," "secured," "mounted," and the like are to be construed broadly, such as to encompass both mechanical and electrical connections; the terms may be directly connected or indirectly connected through an intermediate medium, and may be used for communicating between two elements or for interacting between two elements, unless otherwise specifically defined, and the specific meaning of the terms in the present application may be understood by those skilled in the art according to specific situations.

It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, as used herein, refer to an orientation or positional relationship indicated in the drawings, which is solely for the purpose of facilitating the description and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and is therefore not to be construed as limiting the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. It should be understood that the term "and/or" as used herein is merely one type of association that describes an associated object, meaning that three relationships may exist, e.g., a and/or B may mean: a exists alone, A and B exist simultaneously, and B exists alone. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the preparation process of the OLED display device, an inorganic packaging layer, an electron injection layer, an electron transport layer, a hole injection layer, a hole transport layer, a light extraction layer, a cathode film layer and the like in an OLED film layer are generally manufactured by using a mask plate with a macroscopic opening. Because the base station detection of mask plate supplier and mask plate user can not guarantee the exact same, and the base station that the mask plate used can appear deviation such as counterpoint, can often appear the opening off normal problem of mask plate. The inventor provides a mask plate repairing method and a mask plate assembly based on the problems, and can repair the deviation problem of an upper opening of the mask plate in a short time and ensure the timeliness of the use of the mask plate.

The mask repairing method and the mask assembly provided by the invention are described in detail below with reference to specific embodiments.

Fig. 1 is a flowchart of a detection step of a mask repairing method according to an embodiment of the present invention, fig. 2 is a schematic view of a structure of a mask main body according to an embodiment of the present invention, and fig. 3 is a schematic view of a comparison between coordinates of an opening and a preset opening according to an embodiment of the present invention, as shown in fig. 1 to 3, a first aspect of the present embodiment provides a mask repairing method, and the mask of the present embodiment includes a mask main body 1 and a plurality of openings 11 penetrating through the mask main body 1. The shape of the opening 11 is not particularly limited in this embodiment, and for example, the opening 11 may be a commonly-used rounded rectangle or rectangle. The mask plate of the embodiment can be used for chemical vapor deposition film formation of an inorganic packaging layer, or vapor deposition film formation of an electron injection layer, an electron transport layer, a hole injection layer, a hole transport layer, a light extraction layer, a cathode film layer and the like in an OLED film layer, and the specific application scene of the mask plate is not particularly limited in the embodiment.

The mask repairing method of the embodiment comprises the following steps:

s101, aligning the mask plate main body with the substrate;

specifically, the basement layer of the rete of the base plate for adopting the mask plate preparation of this embodiment, this embodiment is right the concrete material and the size of base plate do not do special restriction, the macro opening mask plate of the mask plate of this embodiment for being applied to above-mentioned scene, mask plate main part 1 is including being a plurality of openings 11 of array distribution, general every opening 11 has the same size, the mask plate of this embodiment can prepare a plurality of retes or panels that have the same shape simultaneously through seting up a plurality of openings 11, improve the utilization ratio of mask plate, this embodiment is right the size and the material of mask plate main part 1 do not do special restriction.

In order to ensure the alignment precision of the mask plate main body 1 and the substrate, alignment holes or alignment patterns may be formed in the mask plate main body 1 and the substrate, and the arrangement positions and forms of the alignment holes or the alignment patterns are not particularly limited in this embodiment. For example, the alignment holes in the mask body 1 and the substrate may be full-open holes, or the alignment holes in the substrate may be half-cut holes, and the alignment holes in the mask body 1 may be full-cut holes.

S102, detecting the deviation condition of an opening on the mask plate;

for example, the mask body 1 of the present embodiment has a plurality of openings 11 distributed in an array, and the deviation of the openings 11 may include the deviation of all the openings in one row or one column, or the deviation of one or more openings 11. All the openings 11 in the array sub-portion of the mask body 1 of the embodiment should have the same size in theory, wherein the deviation condition may include a deviation in size of the opening 11 or a deviation in position of the opening 11, or both a deviation in size and position of the opening 11, wherein the deviation in size of the opening 11 includes that the size of the opening 11 is smaller than a preset size, or the size of the opening 11 is larger than the preset size.

Specifically, the detecting step includes:

s1021, grabbing the opening edge coordinates on the mask plate main body by alignment detection equipment;

specifically, after the mask plate main body 1 is aligned with the substrate, the edge coordinates of the opening 11 in the mask plate main body 1 are obtained by using alignment detection equipment, and the specific structure and form of the alignment detection equipment are not particularly limited in this embodiment.

S1022, comparing the opening edge coordinate with a corresponding preset opening edge coordinate in a memory;

specifically, the preset opening edge coordinates of this embodiment are stored in the memory in advance, and the edge coordinates of the opening 11 are compared with corresponding preset opening (shown by a dotted line in fig. 3) edge coordinates in the memory, for example, taking the opening 11 as a rectangle as an example, the rectangular opening 11 on the mask plate main body includes a first long side, a second long side, a first short side and a second short side, and the preset opening pre-stored in the memory includes a corresponding first long side, a second long side, a first short side and a second short side, wherein the coordinates of a corresponding point on the first long side of the opening 11 on the mask plate main body 1 are compared with the coordinates of a corresponding point on the first long side of the preset opening on the memory, wherein the coordinates of a corresponding point on the second long side of the opening 11 on the mask plate main body are compared with the coordinates of a corresponding point on the second long side of the preset opening on the memory, and the coordinates of a corresponding point on the first short side of the opening 11 on the mask plate main body are compared with the corresponding point on the first short side of the preset opening on the memory Wherein the coordinates of the corresponding point on the second short side of the opening 11 on the mask plate main body 1 are compared with the coordinates of the corresponding point on the second short side of the preset opening on the memory. The coordinates of the corresponding points on the first long edge, the second long edge, the first short edge and the second short edge of the rectangular opening 11 on the mask plate main body 1 and the coordinates of the corresponding points on the first long edge, the second long edge, the first short edge and the second short edge of the preset opening can be selected according to experience, and the selection of the coordinates of the corresponding points is not specifically described in the embodiment.

S1023, acquiring the deviation condition between the opening edge and the corresponding preset opening edge according to the comparison result of the opening edge coordinate and the preset opening edge coordinate;

specifically, the comparison result may be determined according to the corresponding coordinate of the edge of the opening 11 on the mask plate body 1 and the corresponding coordinate difference value on the edge of the preset opening. Illustratively, the first long-side midpoint a1(X1, Y1) of the edge of the opening 11 of the mask body 1 and the corresponding first long-side midpoint a0(X0, Y1) of the edge of the preset opening edge are selected, and whether the a1 is inside or outside the preset opening can be judged according to the difference between X0 and X1, so as to judge whether the first long side of the edge of the opening of the mask body is inside or outside the opening, and the distance between a1 and a0 can be obtained according to the difference between X0 and X1. And then the distance between the first long edge of the opening 11 on the mask plate main body 1 and the first long edge on the preset opening can be obtained.

The deviation of the opening 11 of the present embodiment includes the opening edge being located inside the corresponding preset opening edge and the opening edge being located outside the corresponding preset opening edge.

S103, processing the opening edge according to the deviation condition to enable the opening to accord with a preset opening standard.

For example, if the opening edge is located inside the corresponding preset opening edge, the area of the opening edge located inside the corresponding preset opening edge is removed, and the width of the removed area is the distance between the opening edge and the corresponding preset opening edge. The size of the area of the removed opening edge inside the corresponding preset opening edge is determined according to the distance between the corresponding edge of the opening and the corresponding edge of the preset opening, wherein the distance between the opening edge and the corresponding preset opening edge can be determined according to the distance between the selected specific points.

And if the opening edge is positioned at the outer side of the corresponding preset opening edge, blocking the area of the opening edge positioned at the outer side of the corresponding preset opening edge. The width of the shielding region is the distance between the opening edge and the corresponding preset opening edge, wherein the size of the region, located outside the corresponding preset opening edge, of the shielding opening edge is determined according to the distance between the opening edge and the corresponding preset opening edge, and the distance between the opening edge and the corresponding preset opening edge can be determined according to the distance between the selected specific points.

The mask plate repairing method provided by the invention comprises the steps of aligning the main body of the mask plate with the substrate, and then detecting the deviation condition of the opening on the mask plate, wherein the detection step comprises the following steps: the alignment detection equipment grabs the opening edge coordinate on the mask plate main body, compares the opening edge coordinate with a corresponding preset opening edge coordinate in a memory, obtains the distance and the deviation condition between the opening edge and the corresponding preset opening edge according to the comparison result of the opening edge coordinate and the preset opening edge coordinate, and the deviation condition of the opening comprises that the opening edge is located correspondingly at the inner side of the preset opening edge and the opening edge is located correspondingly at the outer side of the preset opening edge, and then processes according to the deviation condition of the opening on the mask plate so that the opening accords with the preset opening standard. The mask plate repairing method can repair the deviation problem of the upper opening of the mask plate, and avoids the problem that a target film layer manufactured by the mask plate is invalid due to the deviation of the upper opening of the mask plate.

In an embodiment, fig. 4 is a schematic structural view of an opening and a half-etching region in a mask main body according to an embodiment of the present invention, please refer to fig. 4, where a half-etching region 12 is disposed on the mask main body 1 at an edge of each opening.

This embodiment is through all setting up half on mask plate main part 1 at every opening edge and carving regional 12, is located correspondingly at the opening edge predetermine under the inboard condition at opening edge, get rid of the opening edge and be located corresponding when predetermineeing the inboard region of opening edge, directly operate the excision on half carving regional 12, convenient operation is swift, can restore the off normal problem of mask plate in the short time, guarantees the use ageing nature of mask plate user.

Further, the half-etching area 12 is provided with at least two first cutting grooves 13, the distance between two adjacent first cutting grooves 13 is 20um to 30um, and the groove width of each first cutting groove 13 is 10 um; the distance between the first cutting grooves 13 of the present embodiment is not less than 20um and not more than 30 um. In this embodiment, the removing the half-engraved area of the opening edge inside the corresponding preset opening edge includes: cut along the first cut groove 13 to form a gap matching the edge of the opening.

The quantity of the first cutting grooves 13 of this embodiment is a plurality of, and adjacent two the interval between the first cutting grooves 13 is 20um-30um, can satisfy the cutting of the off normal condition of multiple size. Illustratively, the distance between adjacent first cutting grooves 13 is 30um, wherein the first cutting groove 13 can satisfy the cutting with the position deviation of 30um, and the second first cutting groove 13 can satisfy the cutting with the position deviation of 60 um.

In the embodiment, the first cutting groove is arranged on the half-etching area, the opening edge is positioned on the inner side of the corresponding preset opening edge, and the first cutting groove meeting the error range is cut when the area of the opening edge positioned on the inner side of the corresponding preset opening edge is removed. According to the mask plate, the first cutting groove is arranged, so that the operation is more convenient when the opening edge is removed and is located in the corresponding area inside the preset opening edge, the process of cutting and increasing through determining the cutting line is saved, and the repair efficiency of the mask plate main body is further improved.

Fig. 5 is a schematic structural view of a metal strip and a mask main body of a mask according to an embodiment of the present invention, and referring to fig. 5, in an embodiment, a region where an edge of a shielding opening is located outside a corresponding edge of a predetermined opening includes: and shielding the area of the opening edge, which is positioned at the outer side of the corresponding preset opening edge, by using a metal strip 2. The edge part of the opening of the embodiment exceeding the corresponding preset opening is shielded by the metal strip 2, and the operation is simple. In this embodiment, the fixing manner of the metal strip 2 and the mask plate main body 1 is not particularly limited. Exemplarily, adopt metal strip 2 to shelter from when opening edge is located corresponding preset opening edge outside region, weld metal strip 2 on mask plate main part 1, when metal strip 2 and mask plate main part 1 welding, the height of the solder joint between metal strip 2 and the mask plate main part 1 is less than or equal to 10 um. The height of the solder joint between the metal strip 2 and the mask plate main body 1 is less than or equal to 10um, so that the distance between the metal strip 2 and the mask plate main body 1 is reduced as much as possible, and unqualified products produced by evaporation plating or atomic layer deposition process caused by the distance between the metal strip 2 and the mask plate main body 1 are avoided.

Further, referring to fig. 7, the shielding, by the metal strip, the area of the opening edge outside the corresponding preset opening edge includes: and shielding the part, which corresponds to the opening edge and is positioned at the outer side of the corresponding preset opening edge, by adopting a rectangular metal strip 2, and cutting along a preset second cutting groove 22 on the metal strip 2, so that one side, which is close to the center of the opening, of the metal strip forms a gap matched with the preset opening edge. This embodiment adopts the rectangle metal strip to shelter from the corresponding part that predetermines the opening edge outside that is located corresponding opening edge, and the metal strip of being convenient for is counterpointed with the mask plate main part. In this embodiment, the second cutting groove 22 with the shape of opening edge profile matches, the quantity of second cutting groove 22 is two at least, adjacent two interval between the second cutting groove 22 is 20um-30um, the groove width of second cutting groove 22 is 10 um. Because every opening off normal size is uncertain on the mask plate, this embodiment can satisfy the use of the multiple size opening off normal condition through setting up a plurality of second cutting grooves 22, and preferably, the interval between two second cutting grooves 22 on the metal strip of this embodiment is more than or equal to 20um less than or equal to 30 um. After the metal strip is aligned, the size to be cut is determined according to the distance between the opening edge and the corresponding preset opening edge, and then the metal strip is cut along the corresponding second cutting groove 22. This embodiment cuts through setting up second cutting groove 22, and the size back edge metal strip 2 that need cut off is confirmed and is cut through predetermined second cutting groove 22, can improve the repair efficiency of mask plate main part.

Further, for the convenience of counterpoint, can set up counterpoint hole on mask plate main part 1 and the metal strip 2, can improve the counterpoint efficiency of metal strip 2 and mask plate main part 1.

The mask repairing method provided by the embodiment of the invention comprises the steps of aligning the main body of the mask with a substrate, and then detecting the deviation condition of an opening on the mask, wherein the detection step comprises the following steps: the alignment detection equipment grabs the opening edge coordinate on the mask plate main body, compares the opening edge coordinate with a corresponding preset opening edge coordinate in a memory, acquires the deviation condition between the opening edge and the corresponding preset opening edge according to the comparison structure of the opening edge coordinate and the preset opening edge coordinate, wherein the deviation condition of the opening comprises that the opening edge is located correspondingly at the inner side of the preset opening edge and the opening edge is located correspondingly at the outer side of the preset opening edge, and then processes according to the deviation condition of the opening on the mask plate so that the opening accords with the preset opening standard. The mask plate repairing method can repair the deviation problem of the mask plate, the mask plate does not need to be repaired in a factory, the using timeliness of the mask plate is guaranteed, and the problem that a target film layer manufactured by the mask plate fails due to deviation is avoided.

Referring to fig. 2 and 4, a second aspect of the present embodiment provides a mask plate assembly, including a mask plate main body 1, wherein the mask plate main body 1 is provided with a plurality of openings 11 penetrating through the mask plate main body, and a half-etching region 12 is disposed on the mask plate main body 1 at an edge of each opening.

The mask plate 1 of the present embodiment has a plurality of through openings 11, and the mask plate 1 of the present embodiment can be used for chemical vapor deposition, evaporation or inkjet printing processes, and the present embodiment does not particularly limit the application scenarios of the mask plate. For example, the mask plate of this embodiment may be applied to manufacture an electron injection layer, an electron transport layer, a hole injection layer, a hole transport layer, a light extraction layer, a cathode film layer, and the like in an OLED film layer, where the size of the opening 11 on the mask plate 1 of this embodiment is preset in advance according to an actual application scenario, and the specific shape and size of the opening 11 are not particularly limited in this embodiment. Exemplarily, the openings 11 of the mask plate 1 applied to the mobile phone display panel manufacturing process are rounded rectangular openings, and the openings 11 of the embodiment are distributed on the mask plate main body 1 in an array manner, so that the film layer of the mask plate main body post-manufacturing process can be conveniently cut and separated. The present embodiment does not particularly limit the pitch of the array distribution of the openings 11.

In this embodiment, the forming manner of the half-etching region 12 is not particularly limited, for example, the half-etching region 12 is formed by etching in a chemical manner, or the half-etching region is formed by fabricating in a physical manner. In this embodiment, the position of the half-etching region 12 is not particularly limited, for example, the half-etching region 12 is disposed on the first surface of the mask body 1, or the half-etching region 12 is disposed on the second surface of the mask body 1, or the half-etching region 12 is disposed on both the first surface and the second surface of the mask body 1. When the half-etching region 12 is simultaneously arranged on the first surface and the second surface of the mask plate main body 1, the processing technology for removing the half-etching region 12 is simpler, wherein when the half-etching region 12 is arranged on the first surface and the second surface of the mask plate 1, the half-etching region 12 on the first surface and the half-etching region 12 on the second surface can be arranged in a staggered manner, or the half-etching region 12 on the first surface and the half-etching region 12 on the second surface are arranged oppositely, wherein when the half-etching region 12 on the first surface and the half-etching region 12 on the second surface are arranged oppositely, the etching depth of the half-etching region 12 on the first surface and the half-etching region 12 on the second surface is smaller than half of the thickness of the mask plate 1.

When the mask plate 1 of the embodiment is used, when the size of the opening 11 on the mask plate main body 1 does not meet the preset opening size, the size of the opening 11 can be quickly adjusted so that the opening reaches the theoretical size. For example, when the edge of the opening on the mask body is located at the inner side of the corresponding edge of the preset opening, the area of the opening edge located at the inner side of the corresponding edge of the preset opening is removed; when the opening edge is located the corresponding outside of predetermineeing the opening edge, then shelter from the region that the opening edge is located the corresponding opening edge outside of predetermineeing, this embodiment is through all setting up half on mask plate main part 1 at every opening edge and carve region 12, be located the corresponding inboard of predetermineeing the opening edge at the opening edge, when getting rid of the opening edge and being located the corresponding region of predetermineeing the opening edge inboard, directly carve regional 12 operation excision at half, convenient operation is swift, can restore the off normal problem of mask plate main part 1 in the short time.

This embodiment is through all setting up half the region of carving in every opening edge's mask plate main part, when the opening edge lies in corresponding inboard of predetermineeing the opening edge and needs to excise the restoration mask plate main part, directly at half regional operation excision of carving, convenient operation is swift, can restore the off normal problem of mask plate in the short time, guarantees the use timeliness of mask plate user.

Referring to fig. 2 and 4, further, the half-cut region is provided with first cutting grooves 13, the first cutting grooves 13 are used for cutting to form openings matched with the edges of the openings 11, the number of the first cutting grooves 13 is at least two, the distance between two adjacent first cutting grooves 13 is 20um to 30um, and the groove width of each first cutting groove 13 is 10 um. The first cutting groove 13 is used for cutting to form a gap matching with the edge of the opening 11, for example, the opening 11 on the mask plate main body 1 of the embodiment is a rounded rectangle, and the portion of the first cutting groove 13 near the edge has an arc shape matching with the rounded rectangle. This embodiment is through setting up first cutting flutes 13 for it is more convenient to operate when cutting mask plate main part 1, practices thrift and confirms that the line of cut cuts the technology that increases, has further improved the repair efficiency of mask plate main part 1.

The quantity of the first cutting grooves 13 of this embodiment is two at least, and the interval between two adjacent first cutting grooves 13 is 20um-30um, and the groove width of first cutting grooves 13 is 10um, and the quantity of the first cutting grooves 13 of this embodiment is a plurality of, and adjacent two interval between the first cutting grooves 13 is 20um-30um, can satisfy the cutting of multiple size off normal condition. Illustratively, the distance between adjacent first cutting grooves 13 is 30um, wherein the first cutting groove 13 can satisfy the cutting with the position deviation of 30um, and the second first cutting groove 13 can satisfy the cutting with the position deviation of 60 um. Every the width of first cutting flute 13 all is less than or equal to 10um, and the width of cutting flute 13 of this embodiment sets up to be less than or equal to 10um, can improve the accuracy of cutting through the width setting with cutting flute 13 in certain extent.

This embodiment is through setting up first cutting flutes 13 for it is more convenient to operate when cutting the mask plate main part, practices thrift the technology that further confirms the line of cut to cut and increase, has further improved the repair efficiency of mask plate main part.

Referring to fig. 5 and 7, in an embodiment, the mask plate assembly further includes a metal strip 2, the metal strip 2 is rectangular, a second cutting groove 22 is formed in the surface of the metal strip 2, and the second cutting groove 22 is used for cutting to form a notch matching with an edge of the opening 11;

illustratively, the opening 11 of the mask plate body 1 of the present embodiment is a rectangular opening with rounded corners, the edge of the metal strip 2 has arc-shaped chamfers 22, and the arc-shaped chamfers 22 are the same as the chamfers at the corners of the rectangular opening 11 with rounded corners. Opening 11 in the mask plate main part 1 of this embodiment is rounded rectangle, and the edge of metal strip 2 has arc chamfer 22, and this embodiment adopts metal strip 2 to shelter from mask plate main part 1, and when cutting the metal strip along the second cutting groove 22 on 2 surfaces of metal strip, can form with opening edge assorted opening. The complex procedure of processing the round corner opening in the later period is avoided.

Fig. 6 is a schematic structural view of alignment holes and half-engraved regions on a mask body according to an embodiment of the present invention, and fig. 7 is a schematic structural view of a local metal strip according to an embodiment of the present invention, please refer to fig. 6 and 7, where a first alignment hole 14 is formed in a surface of the mask body, and a second alignment hole 21 for aligning with the first alignment hole 14 is formed in the metal strip 2.

Referring to fig. 7, the mask includes a metal strip 2, the metal strip 2 has a second alignment hole 21, and the mask body 1 has a first alignment hole 14 matching with the second alignment hole 21. This embodiment sets up first counterpoint hole 14 through setting up second counterpoint hole 21 on metal strip 2 on mask plate main part 1, and when metal strip 2 sheltered from, the position that metal strip 2 can be fixed a position fast in first counterpoint hole 14 and the cooperation of second counterpoint hole 21. Illustratively, the second alignment holes 21 are through holes, and the first alignment holes 14 are half-engraved holes. In this embodiment, the number of the first aligning holes 14 and the second aligning holes 21 is at least two, the specific number of the first aligning holes 14 and the second aligning holes 21 is not particularly limited, and the number of the first aligning holes 14 and the second aligning holes 21 may be more than two for the accuracy of aligning. Of course, in other embodiments, the first aligning holes 14 and the second aligning holes 21 may be replaced by an aligning pattern.

The number of the second cutting grooves 22 of this embodiment is at least two, the distance between two adjacent

second cutting grooves

2,2 is 20um-30um, and the groove width of the second cutting groove 22 is 10 um; in this embodiment, the plurality of second cutting grooves 22 can be provided to compensate for the openings 11 with different offset sizes.

Further, the thickness of the metal strip 2 is less than or equal to 25 um. In this embodiment, in order to avoid the gap between the metal strip 2 and the glass substrate or the working platform when the metal strip blocks the opening 11 and to affect the quality of the formed product in the evaporation or atomic layer deposition process, the thickness of the metal strip 2 is set to be less than or equal to 25 um. Preferably, when the metal strip 2 is used, the metal strip 2 is in welded connection with the mask plate main body 1, the manufacturing efficiency is high, and the connection quality is good. Preferably, the height of the welding spot between the metal strip 2 and the mask plate main body 1 is less than or equal to 10 um. The height of the solder joint between the metal strip 2 and the mask plate main body 1 is less than or equal to 10um, so that the distance between the metal strip 2 and the mask plate main body 1 is reduced as much as possible, and unqualified products produced by evaporation plating or atomic layer deposition process caused by the distance between the metal strip 2 and the mask plate main body 1 are avoided.

The mask plate of this embodiment is through all setting up half the region of carving in every opening edge's mask plate main part, be located the corresponding inboard of presetting the opening edge at the opening edge, get rid of the opening edge and be located the corresponding when presetting the inboard region of opening edge, directly at the regional operation excision of half carving, convenient operation is swift, can restore the off normal problem of mask plate in the short time, guarantee the use ageing of mask plate user, avoid adopting the target rete of mask plate preparation because the problem of opening off normal inefficacy.

The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

In the description above, references to the description of the term "an embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

Claims

1. A method for repairing a mask, wherein the mask comprises a mask body and a plurality of openings penetrating through the mask body, and the method comprises the following steps:

aligning the mask plate main body with the substrate;

2. A mask repairing method according to claim 1, wherein said processing the opening edge so that the opening meets a preset opening standard comprises:

3. A mask repairing method according to claim 2, wherein a half-engraved region is provided on the mask body at the edge of each opening.

4. A mask plate repairing method according to claim 3, wherein the half-engraved region is provided with at least two first cutting grooves, the distance between two adjacent first cutting grooves is 20um-30um, and the groove width of each first cutting groove is 10 um;

the removing of the region of the opening edge inside the corresponding preset opening edge comprises: cutting along the first cutting groove to form a gap matched with the edge of the opening.

5. A mask repairing method according to claim 3, characterized in that: the area of the shielding opening edge outside the corresponding preset opening edge comprises: and shielding the area of the opening edge outside the corresponding preset opening edge by using a metal strip.

6. The mask repairing method according to claim 5, characterized in that: adopt the metal strip to shelter from the opening edge is located the corresponding regional outside of predetermineeing the opening edge includes: and shielding the part, which corresponds to the opening edge and is positioned at the outer side of the corresponding preset opening edge, by adopting a rectangular metal strip, and cutting along a preset second cutting groove on the metal strip, so that one side, which is close to the center of the opening, of the metal strip forms a gap matched with the preset opening edge.

7. The mask repairing method according to claim 6, characterized in that: the quantity that the groove was cut to the second is two at least, adjacent two interval between the groove is cut to the second is 20um-30um, the groove width that the groove was cut to the second is 10 um.

8. A mask plate assembly, comprising: the mask plate comprises a mask plate main body and a plurality of openings penetrating through the mask plate main body, wherein a half-etching area is arranged on the mask plate main body at the edge of each opening.

9. The mask plate assembly of claim 8, wherein: half carve and be provided with first cutting groove on the region, first cutting groove be used for the cutting with form with open-ended edge assorted opening, the quantity of first cutting groove is two at least, adjacent two interval between the first cutting groove is 20um-30um, the groove width of first cutting groove is 10 um.

10. The mask plate assembly of claim 9, wherein: the mask plate component also comprises a metal strip, the metal strip is rectangular, a second cutting groove is formed in the surface of the metal strip, and the second cutting groove is used for cutting to form a notch matched with the edge of the opening;