JP2003106814A - Inspection method and system for shadow mask and its program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for improving the accuracy of inspection and confirmation and improving the efficiency of inspection process by exactly detecting defect part position not by a method of fixed corrected position but by putting on a moving stage when a product is put on an inspection table or an inspection/confirmation table. SOLUTION: In the inspection method, a marking hole and a reference hole are provided in a product, individual discrimination marks are given, the data of the marking hole are registered, the product is put on the inspection table, the reference hole is set as the origin, the position of the marking hole is measured and compared with the registered data, equation converting from inspection machine coordinates to product coordinates is produced and the detected defect position of pattern is converted to the product coordinates with the conversion equation and stored. In the defect part inspection/confirmation method, the product is put on the inspection/ confirmation table, the discrimination mark is input, the marking hole is measured and compared with the registered data, an equation converting from product coordinates to inspection machine coordinates is produced, the read out defect position is converted to the inspection machine coordinates, the defect part is output in image in a screen view and the defect part is inspected and confirmed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to accurate storage and data output of position data of a defective portion detected in a shadow mask inspection process.

[0002]

2. Description of the Related Art Generally, a shadow mask is made of a thin metal plate and is formed by a photoetching method. The shadow mask has an image portion in which a large number of through holes 11 are formed according to a predetermined arrangement, and a skirt portion surrounding the outer periphery of the image portion, which is a portion to be press-molded. In the inspection process of the shadow mask 7, the inspection is performed using the transmitted light that has passed through the through hole 11 or the surface reflected light. For example, through hole 1
As for the inspection as to whether 1 has a predetermined hole diameter, an automatic inspection using an automatic mechanical device is generally carried out.

When the defective portion 8 of the through hole is detected during the inspection, another inspection confirming machine 10 is used to perform detailed inspection confirmation.

Here, the inspection machine 9 or the inspection confirmation machine 10
When automatically inspecting or inspecting and confirming the products placed on the inspection table and the inspection confirmation table 21 attached to, the position of the defective part cannot be recognized depending on the way of placing the products 7 placed on the table 21. For example, when the product is placed on the table obliquely in a plan view, the inclination 6 or the like tends to cause an error in the accuracy of the defective portion position data. That is,
When the product cannot always be placed at a specific position on the table, even if a defective portion is detected, the position where the product is placed is different each time, and the correct position coordinates on the product cannot be obtained.

As a countermeasure, as shown in the perspective side view of the prior art of FIG. 4, a fixing pin hole formed in the product is fitted and mounted on the fixing pin 12 provided in the inspection and inspection confirmation table 21. There is a way. Further, there is also adopted a method of dealing with the procedure of finely adjusting and correcting the product placement method, such as correction by the alignment means provided on the table 21 with the stage mechanism 22.

However, in the above method, the product 7 placed on the table 21 is subjected to an unreasonable force when it is inserted into or removed from the fixing pin, and the product 7 for shadow mask is deformed. In addition, the positional accuracy becomes incorrect due to the play accuracy between the hole and the fixing pin 12 and the accuracy of the alignment portion provided on the table 21, and the position of the defective portion cannot be confirmed because accurate position coordinates cannot be obtained. There is also a problem that it interferes with the work of inspection and inspection confirmation.

[0007]

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems. The problem is that even if a product is roughly placed on an inspection or inspection confirmation table, it is placed on a transfer table. It is an object of the present invention to provide a method that can always obtain a constant position coordinate value while improving inspection accuracy and inspection process efficiency.

[0008]

In order to solve the above-mentioned problems, the invention according to the first aspect of the invention is directed to a pattern defect portion of a shadow mask in which a large number of through holes are formed in a thin metal plate according to a predetermined arrangement. An inspection method for a shadow mask to be inspected, comprising: (a) determining relative coordinate axes (inspection machine coordinate system) of each shadow mask at the same position of at least one pair of opposed edges of each shadow mask to be inspected. A step of providing a mark hole; (b) a step of giving a unique identification symbol to each shadow mask to be inspected in advance and entering it in the memory means; (c) a preset reference hole of the shadow mask as an origin Storing the position coordinate value of the mark hole of the product coordinate axis as a reference position coordinate value in the memory means,
(D) placing each shadow mask on the inspection table one by one, and (e) aligning the reference holes of the shadow mask with the inspection machine coordinate axes and setting the coordinates of the reference holes as the origin. f) a step of detecting the reference position coordinate value of the inspection machine coordinate system of each of the mark holes formed on the opposite end edges of the shadow mask by giving the unique identification mark, and (g)
The reference position coordinate value of the inspection machine coordinate of the detected mark hole is calculated from the inspection coordinate axis of the shadow mask to the product coordinate axis by using the comparison calculation method with the reference position coordinate value of the mark hole of the product coordinate axis stored in the memory. And (h) inspecting the pattern defective portion of each through hole of the shadow mask,
Detecting the position coordinates of the inspection machine coordinates of the defective portion,
(I) a step of converting the detected position coordinate of the inspection machine coordinate axis of the shadow mask into a product coordinate system axis by using the comparison calculation method; and (j) detecting the shadow mask by the memory means. And a step of storing the position coordinate value of the product coordinate axis of the pattern defective portion of each through hole, and the pattern defective portion formed on the shadow mask is inspected.

In the invention according to claim 2, the defective portion is inspected by using the position coordinate value of the product coordinate axis of the pattern defective portion detected by the shadow mask inspection method according to the first aspect. (A) a step of: (a) inputting a unique identification symbol given to a shadow mask to be inspected and inspecting, and invoking a position coordinate value of a product coordinate axis of a detected pattern defect portion of the shadow mask; ) A step of storing the position coordinate value of the mark hole of the product coordinate axis with the reference hole of the preset shadow mask as the origin in the memory means as the reference position coordinate value, and (c) each shadow mask on the inspection confirmation table. The step of placing one by one,
(D) aligning the reference holes of the shadow mask with the coordinate axes of the inspection and confirmation machine, and using the coordinates of the reference holes as the origin;
(E) the step of detecting the position coordinate values of the inspection and confirmation machine coordinates of the mark holes formed on the opposite end edges of the shadow mask by giving the unique identification mark, and (f) the detected mark holes. Calculating the inspection confirmation machine coordinate value from the product coordinate axis of the shadow mask to the inspection confirmation machine coordinate axis by using a comparison calculation method with the reference position coordinate value of the mark hole of the coordinate product coordinate axis stored in the memory; ) Converting the position coordinate value of the product coordinate axis of the pattern defect portion of the shadow mask called from the memory into the position coordinate value of the inspection confirming machine coordinate axis using the comparison calculation method, and storing the coordinate value in the memory. (H) outputting the image of the defective pattern portion in the screen field of view using the stored position coordinate values of the inspection and confirmation machine coordinate axis of the defective pattern portion of the shadow mask; For shadow masks, characterized by inspecting and confirming the detected pattern defects by the process of inspecting and confirming by the function of moving the image in the vicinity of the screen field of view or scaling the image in the screen field of view. It is an inspection method.

The invention according to claim 3 is an apparatus for inspecting a defective pattern portion of a shadow mask in which a large number of through holes are formed in a thin metal plate according to a predetermined arrangement. Means for providing each shadow mask to be provided with a mark hole for determining the inspection machine coordinate axis of each shadow mask at the same position of at least one pair of opposed edges,
(B) a means for giving a unique identification symbol to each shadow mask to be inspected in advance and entering it in the memory means,
(C) A means for storing the position coordinate value of the mark hole of the product coordinate axis with the reference hole of the preset shadow mask as the origin in the memory means as the reference position coordinate value, and (d) each shadow mask on the inspection table. And (e) a means for placing one by one on the substrate, (e) a means for aligning the reference holes of the shadow mask with the coordinate axes of the inspection machine, and origins of the coordinates of the reference holes.
Means for detecting the reference position coordinate values of the inspection hole coordinate system of the mark holes formed on the opposite end edges of the shadow mask by giving the unique identification mark, and (g) the detected mark hole inspection machine Means for calculating the reference position coordinate value of the coordinate system from the inspection coordinate axis of the shadow mask to the product coordinate axis by using the comparison calculation method with the reference position coordinate value of the mark hole of the product coordinate axis stored in the memory; A means for inspecting a defective pattern portion of each through hole of the shadow mask to detect a position coordinate of the defective portion in an inspection machine coordinate system; and (i) a position coordinate of the detected inspection machine coordinate axis of the shadow mask, A means for converting and correcting into a product coordinate axis by using the comparison calculation method; and (j) storing the position coordinate value of the product coordinate axis of the defective pattern portion of each through hole detected by the shadow mask from the memory means. That by means a shadow mask inspection apparatus characterized by inspecting a pattern defect portion formed in the shadow mask.

According to a fourth aspect of the present invention, the defective portion is inspected by using the position coordinate value of the product coordinate axis of the pattern defective portion detected by the shadow mask inspection apparatus according to the third aspect. An apparatus for confirming, (a) means for inputting a unique identification symbol given to a shadow mask to be inspected and confirming, and a position coordinate value of a product coordinate axis of a detected pattern defective portion of the shadow mask, (b) ) Means for storing in the memory means the position coordinate values of the mark holes of the product coordinate axis with the reference hole of the preset shadow mask as the origin, and (c) each shadow mask on the inspection confirmation table. Means for placing one by one,
(D) Means for aligning the reference hole of the shadow mask with the axis of the inspection and confirmation machine to origin the coordinates of the reference hole, and (e) Coordinates of the inspection and confirmation machine of the mark holes formed on the opposite edges of the shadow mask. Means for detecting the position coordinate value of the product by adding the unique identification symbol, and (f) the reference position coordinate value of the inspection and confirmation machine coordinates of the detected mark hole of the mark hole of the product coordinate axis stored in the memory. A means for calculating the product coordinate axis of the shadow mask from the product coordinate axis of the shadow mask to the coordinate axis of the inspection and confirmation machine by using the comparison calculation method with the reference position coordinate value; Is converted into position coordinate values of the inspection confirming machine coordinate axis by using the comparison calculation method, and the coordinate values are stored in a memory; and (h) the stored pattern defective portion of the shadow mask. A means for outputting the image of the pattern defect portion in the screen visual field by using the position coordinate values of the inspection and confirmation machine coordinate axes; and (i) moving the image in the screen visual field in the vicinity of the screen visual field and the image in the screen visual field. The inspection apparatus for a shadow mask is characterized by inspecting and confirming a defective pattern portion formed on the shadow mask by means of an inspection and confirmation function with the enlargement and reduction functions of.

The invention according to claim 5 is a program for inspecting a shadow mask for inspecting a pattern defective portion of a shadow mask in which a large number of through holes are formed in a thin metal plate according to a predetermined arrangement. , (A) a program for providing a mark hole for determining an inspection machine coordinate axis of each shadow mask at the same position of at least one pair of opposing edges on each shadow mask to be inspected, and (b) each shadow mask to be inspected And a program for entering a unique identification symbol in advance in the memory means, and (c) using the preset position of the reference hole of the shadow mask as the origin, the position coordinate value of the mark hole of the product coordinate axis as the reference position coordinate value. A program for storing in the memory means, (d) a program for placing each shadow mask on the inspection table one by one,
(E) A program for aligning the reference holes of the shadow mask with the coordinate axes of the inspection machine and setting the coordinates of the reference holes as the origin.
(F) A program for detecting the reference position coordinate values of the inspection machine coordinates of the mark holes formed on the opposite end edges of the shadow mask by giving the unique identification mark, and (g) the detected mark hole. A program for calculating the reference position coordinate value of the inspection machine coordinate from the inspection coordinate axis of the shadow mask to the product coordinate axis by using the comparison calculation method with the reference position coordinate value of the mark hole of the product coordinate axis stored in the memory. ) A program for inspecting the pattern defective portion of each through hole of the shadow mask to detect the position coordinate of the inspection machine coordinate of the defective portion, and (i) the position coordinate of the inspection machine coordinate axis of the detected shadow mask, A program for converting and correcting the product coordinate axis by using the comparison calculation method, and (j) a product of a pattern defective portion of each through hole detected by the shadow mask from the memory means. By the step of storing the position coordinates of the target axis, an inspection program for a shadow mask, characterized in that to inspect the defective pattern portion formed in the shadow mask.

The invention according to claim 6 is a program for inspecting and confirming a defective portion detected by using the program according to claim 5, which is (a) applied to a shadow mask for inspecting and confirming. (B) a program for inputting the unique identification code described above to call the position coordinate value of the product coordinate axis of the detected pattern defect portion of the shadow mask,
A program for storing in the memory means the position coordinate values of the mark holes of the product coordinate axis whose origin is the reference hole of the preset shadow mask, and (c) 1 for each shadow mask on the inspection confirmation table. A program for mounting the shadow masks one by one, (d) a program for aligning the reference holes of the shadow mask with the axis of the inspection and confirmation machine and setting the coordinates of the reference holes as the origin, and (e) formed on opposite edges of the shadow mask. A program for detecting and detecting the position coordinate values of the inspection and confirmation machine coordinates of the respective mark holes by adding the above-mentioned unique identification symbols to the detected coordinates, and (f) the reference position coordinate values of the inspection and confirmation machine coordinates of the detected mark holes. A program for calculating from the product coordinate axis of the shadow mask to the inspection confirmation machine coordinate axis by using the comparison calculation method with the reference position coordinate value of the mark hole of the product coordinate axis stored in the memory; (G) The position coordinate value of the product coordinate axis of the defective pattern of the shadow mask called from the memory is converted into the position coordinate value of the inspection confirming machine coordinate axis by using the comparison calculation method, and the coordinate value is stored in the memory. A program, (h) a program for outputting the image of the pattern defect portion in the screen visual field by using the stored position coordinate values of the inspection and confirmation machine coordinate axis of the pattern defect portion of the shadow mask, and (i) an image in the screen visual field A shadow mask characterized by inspecting and confirming a pattern defective portion formed in each shadow mask by a program for inspecting and checking by a function of moving in the screen field of view near the output and enlarging / reducing the image in the screen field of view. Inspection program.

The invention according to claim 7 is the transfer table attached to the inspection machine 9 or the inspection confirmation machine 10 by installing the shadow mask program according to claim 5 or 6. The inspection apparatus for a shadow mask is characterized by automatically inspecting a product placed on 21 or performing automatic inspection confirmation.

[0015]

In the conventional inspection method, an error in the accuracy of the position data 1 tends to occur due to the way the product placed on the inspection table 21 is placed, for example, the inclination 6. As a countermeasure for the conventional technique, a method of inserting the fixing pin hole into the fixing pin 12 provided on the inspection table 21 and placing the fixing pin 12 on the inspection table 21 and a correction by an alignment means provided with a stage mechanism on the inspection table are used for placing products. A corresponding method is adopted by finely adjusting the one. However, according to the method of the present invention, it is possible to output and utilize the position data obtained by converting the position data of the placed product by the automatic calculation method using the correction value such as the inclination, and reduce the error in the position accuracy.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION An example of an embodiment of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a perspective side view showing an example of an embodiment of the present invention. Note that FIG.
FIG. 1A is an inspection device for detecting a defective portion, and FIG.
(B) is an inspection confirmation device 10 for further inspecting a defective portion detected by the inspection device.

First, as shown in the inspection device 9 of FIG. 1A, the system means 17 for managing the device is installed. The system means 17 is composed of a data storage unit for storing data and for inputting / outputting data, a desk memory unit for storing the program of the present invention, a processor unit, and an operating system (OS).

Next, the calculation means 16 is mainly composed of a plurality of mathematical expression processing programs for correcting the position data of the defective portion, and executes an automatic conversion work for converting the position coordinate data into different coordinate systems. .

Next, the CCD camera or the line sensor 19 has means for taking an image, means for converting the image into a bit image, means for automatically measuring the position data of the detected defective portion, and means for reducing or enlarging. Ask.

Here, as means for scanning the entire surface of the object to be inspected, there is a method of moving a CCD camera or a line sensor 19 successively and continuously, or a method in which the camera is fixed and the inspection table 21 is fixed. One method is to move them in sequence.

Next, the inspection confirmation apparatus of FIG. 1B has system means 17 for managing the apparatus. The system means 17 is composed of a data storage unit for storing data and for inputting / outputting data, a desk memory unit for storing the program of the present invention, a processor unit, and an operating system (OS).

Next, the calculation means 16 is mainly configured to store a plurality of mathematical expression processing programs for correcting and calculating the position data of the defective portion, and executes automatic conversion work for converting the position coordinate data into different coordinate systems. To do.

CCD camera or line sensor 19
Has an image pickup means, a means for converting the image into a bit image, a means for automatically measuring the position data of the detected defective portion, and a means for reducing or enlarging.

Next, it has an XY drive means 20 for automatically guiding the through holes 8 of the defective portion detected by the inspection device 9 sequentially into the visual field of the screen of the CCD camera or the line sensor. As a means for putting the screen view in the defective portion, a method of moving the CCD camera or the line sensor 19,
There is a method of fixing the position of the camera and moving the inspection confirmation table 21 by the XY drive means 20.

Next, the plan view shown in FIG. 2A shows an example of normal position data 2.

The normal position data as used herein means a state in which the coordinate XY axes 13 of the inspection machine and the coordinate xy axes 14 of the product placed on the inspection table completely match.
Here, a reference hole is previously formed in the product, and the reference hole is formed so as to be the origin of the coordinates xy of the product. Further, in the normal position data 2, the coordinate value 4 of the reference hole, the origin 23 of the coordinate axis 13 of the inspection machine, and the origin 24 of the coordinate axis 14 of the product placed on the inspection table 21 match.
In this case, the position data 1 of the defective part detected by the inspection machine
Is stored in the memory area as the position data 2 of the product coordinates without conversion.

The plan view shown in FIG. 2B shows position data 1.

The coordinate XY axes 13 of the inspection machine and the coordinate xy axes 14 of the products placed on the inspection table show a state of disagreement. Similar to FIG. 1A, the coordinate value 4 of the reference hole previously formed in the product and the origin 23 of the coordinate axis 13 of the inspection machine.
And the origin 2 of the coordinate axis 14 of the product placed on the inspection table.
It matches with 4. In this state, the two coordinate axes can be mathematically expressed as an inclination 6 centered on the origins 4, 23, 24 of the coordinate axes. The inclination 6 is caused by the variation in the placement of the shadow mask 7 when the shadow mask is placed on the inspection table 21. In this case, the position data 1 of the defective portion detected by the inspection machine is the position data 1 on the coordinates of the inspection XY axis system 13, and the position data 1 is placed on the inspection table by using the calculating means 16 of the present invention. The converted product coordinate axis 14 is stored in the memory area as the product coordinate position data 2.

The inspection method of the present invention will be described with reference to FIG.

In a shadow mask inspection method for inspecting a pattern defect portion of a shadow mask in which a large number of through holes are formed in a thin metal plate according to a predetermined arrangement, first,
A material for a continuous thin metal plate is put into a shadow mask manufacturing process. Next, the product which has undergone all the processes is cut into a sheet-like shape having a predetermined size, and is put into the inspection process for 100% inspection.

In the method for inspecting the shadow mask 7 of the present invention, first, (a) the inspector coordinate axis of each shadow mask is determined at the same position on at least one pair of opposed edges of each shadow mask to be inspected. There is a mark hole for this. The mark hole may be provided using a punch or the like after the shadow mask manufacturing process, or may be formed simultaneously with the formation of the through hole during the manufacturing process. The uneven portion formed on the outline of the shadow mask may be used as the mark hole.

Then, (b) a step of giving a unique identification symbol to each shadow mask to be inspected in advance and entering it in the memory means is included. In this step, the unique numbers assigned to all products are registered in advance. For example, by the method of directly printing the recognition symbol of each product on each product,
There is also a management method using the unique number of the cassette. In the subsequent steps, all data are centrally managed by the data having the above-mentioned unique recognition symbol as a code number.

Then, (c) a step of storing the position coordinate values of the mark holes of the product coordinate axis with the preset reference hole of the shadow mask as the origin in the memory means as the reference position coordinate value. In the process, the product coordinate axis having the center position of the reference hole as the coordinate origin is referred to as an absolute coordinate axis, and the arrangement coordinate values of various patterns arranged on the product are defined as the position coordinates of the absolute coordinate axis. In general, the inspection machine coordinate axes are called relative coordinate axes. The reference hole may also be provided by using a punch or the like after the shadow mask manufacturing process, or may be formed simultaneously with the formation of the through hole during the manufacturing process. Further, the position is preferably provided at a corner portion outside the image portion where the through hole is formed, for example, a skirt portion and a corner portion outside the image portion is desirable.

Next, in the step (d) of placing each shadow mask on the inspection table one by one, the inspection surface of the sheet-shaped shadow mask 7 is placed on the inspection table 21 of the inspection machine 9 with the CCD camera 19 surface. Place it in a predetermined position.

Next, there is a step (e) of aligning the reference holes of the shadow mask with the coordinate axes of the inspection machine and setting the coordinates of the reference holes as the origin. In this step, the coordinates 4 of the reference hole previously given to the product 7 placed on the inspection table 21 are aligned with the origin 23 of the inspection machine coordinate axis 13. For example, in the case of automation, if the shape of the reference hole 4 and its dimension are registered in advance, the reference hole is defined as an origin mark, and the reference hole is automatically identified as the origin mark, the position is automatically measured, It is possible to deal with the situation by developing and automating a program with the position as the origin.

Next, (f) the position coordinate values of the inspection machine coordinates of the mark holes formed on the opposite edges of the shadow mask are detected by adding the unique identification mark. In this step, the position of the mark hole is measured, and the measured position data is stored according to the identification mark.

Next, (g) the detected position coordinate value of the inspection hole coordinates of the mark hole is compared with the reference position coordinate value of the mark hole of the product coordinate axis stored in the memory,
Calculate from the inspection coordinate axis of the shadow mask to the product coordinate axis. In the step, after the reference holes are aligned with the origins 4, 24, 23, the reference position coordinate values of the mark holes of the product coordinate axis stored in the memory in advance, and the four measured mark holes 1 to 4 are measured. By comparing the position coordinate values of, the relational expressions of both coordinate systems are created. A data deviation (variation amount) between the actually measured data of the positions of the mark holes 5a to 5d of the product and the position data of the registered product coordinate axis is calculated by a calculation formula, and the inclination value 6 of the product is determined. Next, using the inclination value 6 of the product, a relational expression for comparing and converting the actually measured position data of the inspection coordinate axis to the position data of the product coordinate axis is created.

Next, (h) the defective pattern portion of each through hole of the shadow mask is inspected to detect the position coordinates of the inspection machine coordinates of the defective portion. The process is the inspection table 2
The entire surface of the product 7 placed on the No. 1 is scanned to detect the defective portion 8 of the through hole. The detection of the defective portion 8 by this inspection may be performed by using a conventional method for detecting a defect. By the way, it is generally applied to judge whether the pattern of the through hole is good or not, by judging based on the size and the difference between the shape and the normal shape. Then, the detected position coordinate value of the defective portion of the through hole is stored in the memory unit. The position coordinate value is a position coordinate value on the inspection machine coordinate axis.

Then, (i) the detected position coordinates of the inspection machine coordinate axis of the shadow mask are converted into the product coordinate axis and corrected by using the comparison calculation method. In this step, the position coordinate value on the inspection machine coordinate axis is converted into the position coordinate value on the product coordinate axis by two coordinate system conversion formulas.

Next, (j) the position coordinate value of the defective pattern portion of each through hole detected by the shadow mask is stored from the memory means as the position coordinate value of the product coordinate axis. In this step, the position coordinate value of the inspection coordinate axis of the pattern defective portion formed on each shadow mask is converted into the position coordinate value of the product coordinate axis and stored.

By performing the above steps (a) to (j), the inspection result is stored for each unique number of each shadow mask, and the position of the defective pattern portion of the through hole is stored by the position coordinate value of the product coordinate axis. The automatic inspection is completed. Further, in the automatic inspection using the present invention, it is possible to detect a defective portion with high accuracy and high efficiency.

Next, the inspection confirmation method of the present invention will be described with reference to FIG.

A method of inspecting and confirming the defective portion detected by the above-described inspection method will be described.

First, (a) the unique identification symbol given to the shadow mask to be inspected is input, and the position coordinate value of the product coordinate axis of the detected pattern defect portion of the shadow mask is called.

Then, (b) the step of storing the position coordinate value of the mark hole of the product coordinate axis having the reference hole of the preset shadow mask as the origin in the memory means as the reference position coordinate value is on the inspection confirmation table 21. Product 7 to be placed on
The reference hole 4 given in advance is set as the origin 24 and aligned with the origin 23 of the coordinate system 13 of the inspection and confirmation machine.

(C) In the step of placing each shadow mask on the inspection confirmation table one by one, the shadow mask 7 after the inspection is inspected by the inspection confirmation table 21 of the inspection confirming device 10.
The shadow mask 7 is placed at a predetermined position with the surface of the shadow mask 7 facing the CCD camera 19 surface.

(D) The reference hole of the shadow mask is aligned with the coordinate axis of the inspection and confirmation device, and the coordinates of the reference hole are set as the origin.

(E) The position coordinate values of the inspection and confirmation machine coordinates of the mark holes formed on the opposite edges of the shadow mask are detected by adding the unique identification mark.

(F) A shadow mask is calculated by comparing the detected reference position coordinate value of the inspection hole machine coordinate of the mark hole with the reference position coordinate value of the mark hole of the product coordinate axis stored in the memory. In the process of calculating from the product coordinate axis to the inspection confirmation machine coordinate axis, the deviation between the data of the mark hole position coordinate value of the product coordinate axis stored in the memory in advance and the actually measured coordinate value after adjusting to the origin 4, 24, 23 ( (Variation amount) is calculated from a calculation formula, and the inclination value 6 of the product is determined. Next, the position coordinate value of the product coordinate axis to be stored is converted into the position coordinate value of the inspection coordinate axis using the inclination value 6 of the product, and the position coordinate value of the inspection coordinate axis is calculated.

(G) The position coordinate value of the product coordinate axis of the pattern defect portion of the shadow mask called from the memory is converted into the position coordinate value of the inspection confirming machine coordinate axis by using the comparison calculation method, and the coordinate value is stored in the memory. To store.

(H) a step of outputting an image of the pattern defective portion in the visual field of the screen by using the stored position coordinate values of the inspection and confirmation machine coordinate axes of the pattern defective portion of the shadow mask,
Next, the defective portion 8 of the detected through hole of the product placed on the inspection confirmation table 21 is output as an image in the visual field of the screen. Two
When there are a plurality of defective portions at more than one place, the images are sequentially output within the visual field of the screen.

(I) Through the process of inspecting and confirming by the function of moving within the screen field of view near the image output in the screen field of view and enlarging and reducing the image within the screen field of view, first, the through hole of the defective portion to be detected is detected. The screen field of view is moved to the center position of 8, and then the central part of the defective portion is sequentially output within the screen field of view. Next, the inspection is confirmed by the function of enlarging and reducing the image.

By executing the above steps, the defective portion 8 of the through hole detected by the inspection machine can be accurately output to the confirmation screen in a short time. Therefore, if a mechanism for automatically determining whether or not the cause of the defect can be ignored is added to the confirmation screen, automatic inspection confirmation can be performed.

[0054]

EXAMPLE Next, a specific example of the present invention is shown in FIG.
Will be explained.

<Embodiment 1> FIG. 7 is a plan view showing a case where the placement of the shadow mask 7 placed on the inspection table 21 varies greatly.

First, as shown in FIG. 1A, a shadow mask was roughly placed on a table 21 of an inspection machine at a predetermined position.

FIG. 3 (a) shows a case where the shadow mask 7 placed on the table is placed on the table with a tilt in plan view.

Next, the unique identification code given to each product is registered. The unique identification symbol is in a general TEXT data format, and all the data are centrally managed by using the unique identification symbol as a code number. In addition, in this embodiment, the unique recognition symbol is an 8-digit English character and a numeral.

Next, the coordinate 4 of the reference hole formed in advance on the product 7 placed on the inspection table 21 was used as the origin 24, and the origin 23 of the coordinate system 13 for the inspection machine was aligned with the origin 24.

Further, each of four points of the mark holes 5a to 5d is measured. A data deviation (variation amount) between the actually measured value data 1 of the positions of the mark holes 5a to 5d formed in the product and the position data 2 of the registered product coordinate axis is calculated by a calculation formula.

The change amount of the mark hole 5a is only a change amount clockwise or counterclockwise around the origins 4, 23 and 24 of the two coordinate systems. The tilt value 6 of the product was automatically calculated by the rotating angle calculation formula. Next, the inclination value 6 of the product is used to convert the position data of the inspection coordinate axis into the product coordinate axis position data.

Next, the entire surface of the product placed on the inspection table 21 was scanned and inspected, and the defective portion 8 of the through hole was detected. A generally adopted method was used for the defect detection method.

The position data 1 of the defective portion of the through hole 8 detected in the product inspection was measured by measuring the distance from the coordinate origin to the center of the defective portion, and the measured value was used as the position data 1.
The distance was calculated by the trigonometric method (trigonometric function method) and converted into the position data 2 of the product coordinate axis, and the position data 2 of the product coordinate axis was obtained.

Next, the defective portion detected in the above inspection was inspected and confirmed using the position data 2 of the product coordinate axis stored for each unique number.

That is, as shown in FIG. 1B, the shadow mask 7 that has undergone the inspection is roughly placed at a substantially predetermined position on the inspection confirmation table 21 of the inspection confirming device. Next, enter the unique recognition symbol of the product and enter the through hole 8 of the product.
The position data 2 of the product coordinate axis of the defective part of 1 is called.

Next, the coordinate 4 of the reference hole previously given to the product 7 placed on the inspection confirmation table 21 is set as the origin 24, and the origin 24 is aligned with the origin 23 of the inspection confirmation machine coordinate system 13.

Further, each point of the mark holes 5a to 5d is actually measured. A data deviation (variation amount) 6 between the measured value data 1 of the positions of the mark holes 5a to 5d and the position data 2 of the product coordinate axis stored in the memory is calculated by a calculation formula. The fluctuation amount of the mark hole 5a is a fluctuation amount of only clockwise or counterclockwise rotation around the origins 4, 23 and 24 of the two coordinate systems. The tilt value 6 of the product was automatically calculated by the rotating angle calculation formula. Next, using the inclination value 6 of the product, the position data 2 of the product coordinate axis to be stored is converted into the position data 1 of the inspection coordinate axis, and the position data 1 of the inspection coordinate axis is stored.

Next, in the product placed on the inspection confirmation table 21, the detected defective portion 8 of the through hole is image-outputted within the screen visual field by using the stored position data 1. If there are two or more defective parts, images are sequentially output within the visual field of the screen.

First, the screen visual field was moved to the center position of the defective through-hole portion 8 to be detected, and the entire defective portion was displayed on the screen at a magnification that allows output to one screen visual field. Next, the central portion of the defective portion 8 was moved into the screen visual field, and the entire defective portion 8 was displayed on the screen with a magnification that allows output to one screen visual field. After that, images were sequentially output by the same procedure. Next, when necessary, the inspection was confirmed by appropriately enlarging and reducing the image by the operation. I was able to confirm the defective part.

As a result, the defective portion 8 of the through hole detected by the inspection machine can be accurately output to the confirmation screen in a short time, and the automatic inspection confirmation can be performed.

[0071]

According to the method of the present invention, inspection (inspection confirmation)
Even when the product is roughly placed on the table (on the transfer table), a constant position coordinate value can always be obtained by the data conversion method of the present invention. Therefore, it is possible to accurately recognize the detected position of the defective portion. In addition, in the inspection method of the present invention, it is not necessary to insert or remove the product into or from the fixing pin, so that no unreasonable force is applied to the product. Therefore, it is possible to inspect without causing a defect that the shadow mask product is deformed. That is, by using the present invention, improvement of inspection accuracy and improvement of efficiency of the inspection process can be achieved, and defects in which a product is deformed can be reduced.

[Brief description of drawings]

FIG. 1 is a partial perspective sectional view of an inspection apparatus of the present invention,
(A) is an inspection machine, (b) is an inspection confirmation machine.

FIG. 2 is a partial plan view of a product placed on a transfer table for explaining a calculation means of the present invention.

FIG. 3 is a partial plan view of a product placed on a transfer table for explaining an embodiment of the present invention, for explaining an embodiment.

FIG. 4 is a partial plan view of a product placed on a transfer table for explaining an example of a conventional method, FIG.
Is a perspective side view, and (b) is a partial side sectional view.

[Explanation of symbols]

1 ... Coordinate value of relative coordinate axis (inspection coordinate system) 2 ... Coordinate value of absolute coordinate axis (product coordinate system) 3 ... Recognition symbol 4 (unique to each product) 4 ... Reference hole 5a ... Mark hole 15b ... Mark hole 2 5c ... Mark hole 3 5d ... Mark hole 4 6 ... Product inclination 7 ... Shadow mask 8 ... Through hole defective portion 9 ... (For shadow mask) Inspection machine 10 ... (For shadow mask) Inspection confirmation machine 11 ... Through hole 12 ... Fixing pin 13 ... (reference) coordinate system of the inspection machine (reference coordinate system of the inspection confirmation machine) 14 ... (Coordinate system of the product mounted on the transfer table) 15 ... Image part 16 in which through holes are assembled ... ( Comparison) Arithmetic means 17 ... System means 18 ... Screen, input keyboard 19 ... CCD camera and line sensor 20 ... XY drive means 21 ... Inspection (inspection confirmation) table (transfer table) 22 ... XY stage 23 ... (relative of inspection machine Source of coordinate axis system (inspection confirmation machine) 24 ... (was placed on the stage) of the product of (absolute) coordinate system origin

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Claims (7)

[Claims] 1. A shadow mask inspection method for inspecting a pattern defect portion of a shadow mask in which a large number of through holes are formed in a thin metal plate according to a predetermined arrangement, wherein (a) at least 1 is provided for each shadow mask to be inspected. A step of providing a mark hole for determining a relative coordinate axis (inspection machine coordinate system) of each shadow mask at the same position of the opposite edges of the pair, and (b) a unique identification symbol is previously assigned to each shadow mask to be inspected. (C) The position coordinate value of the mark hole of the absolute coordinate axis (product coordinate system) with the preset reference hole (reference pattern 4) of the shadow mask as the origin is used as a reference. A step of storing the position coordinate values in a memory means; (d) a step of placing each shadow mask on the inspection table one by one; and (e) a relative position of the reference hole of the shadow mask. In accordance with the axis (inspection machine coordinate system),
A step of using the coordinates of the reference hole as an origin, and (f) assigning the respective reference position coordinate values (inspection machine coordinate system) of the mark holes formed on the opposite edges of the shadow mask to the unique identification mark. And (g) comparing the detected reference position coordinate value of the mark hole (inspection machine coordinate system) with the reference position coordinate value of the mark hole of the absolute coordinate axis (product coordinate system) stored in the memory. Using the calculation method, from the relative coordinate axes (inspection coordinate system) of the shadow mask to the absolute coordinate axes (product coordinate system)
And (h) inspecting the pattern defective portion of each through hole of the shadow mask to detect the position coordinates (inspection machine coordinate system) of the defective portion, and (i) the detected shadow mask Position coordinate of relative coordinate axis (inspection machine coordinate system) is converted into an absolute coordinate axis (product coordinate system) using the comparison calculation method, and (j) from the memory means, the shadow mask is used. A shadow mask characterized by inspecting a pattern defective portion formed in the shadow mask by a step of storing the position coordinate value of the absolute coordinate axis (product coordinate system) of the detected pattern defective portion of each through hole. Inspection method. 2. A method for inspecting and confirming a defective portion by using position coordinate values of absolute coordinate axes of the pattern defective portion detected by the shadow mask inspection method according to claim 1.
(A) A step of inputting a unique identification symbol given to a shadow mask to be inspected and calling, and a position coordinate value of an absolute coordinate axis of a detected pattern defect portion of the shadow mask, and (b) preset A step of storing the position coordinate value of the mark hole of the absolute coordinate axis (product system coordinate) with the reference hole (reference pattern 4) of the shadow mask as the origin in the memory means as the reference position coordinate value; A step of placing them one by one on the inspection confirmation table, and (d)
Aligning the reference hole of the shadow mask with a relative coordinate axis (inspection confirmation system) and setting the coordinates of the reference hole as an origin; and (e) each of the mark holes formed at the opposite end edges of the shadow mask. A step of detecting a position coordinate value (inspection confirmation machine coordinate system) by adding the unique identification symbol, and (f) a reference position coordinate value of the detected mark hole (inspection confirmation machine coordinate system)
By comparing the absolute coordinate axis (product system coordinate) stored in the memory with the reference position coordinate value of the mark hole, and using the relative operation method (inspection confirmation) from the absolute coordinate axis (product coordinate system) of the shadow mask. The process of calculating in the machine coordinate system),
(G) The position coordinate value of the absolute coordinate axis (product coordinate system) of the pattern defect portion of the shadow mask called from the memory is calculated by using the above-mentioned comparison calculation method. And storing the coordinate values in a memory, and (h) using the stored position coordinate values of the relative coordinate axes (inspection confirmation machine coordinate system) of the pattern defective portions of the shadow mask to store the pattern defective portions. It is detected by the step of outputting an image in the screen field of view and the step of (i) moving in the screen field of view in the vicinity of the image output in the screen field of view, or performing a check by a function of enlarging or reducing the image in the screen field of view An inspection method for a shadow mask, characterized by inspecting and confirming a defective pattern portion. 3. An apparatus for inspecting a pattern defect portion of a shadow mask in which a large number of through holes are formed in a thin metal plate according to a predetermined arrangement, wherein (a) each shadow mask to be inspected has at least one pair of opposed ends. Means for providing a mark hole for determining the relative coordinate axis (inspection machine coordinate system) of each shadow mask at the same position on the edge, and (b) a memory in which each shadow mask to be inspected is given a unique identification symbol in advance. Means for entering the means, and (c) the position coordinate value of the mark hole of the absolute coordinate axis (product coordinate system) with the reference hole (reference pattern 4) of the preset shadow mask as the origin is used as the reference position coordinate value. Means for storing in the memory means, (d) means for placing each shadow mask on the inspection table one by one, and (e) relative coordinate axes for the reference holes of the shadow mask (inspection machine coordinate system). In addition, means for locating the coordinates of the reference hole and (f) the reference position coordinate values (inspection machine coordinate system) of the reference holes formed on the opposite edges of the shadow mask are given the unique identification symbols. And means to detect,
(G) The detected reference position coordinate value of the mark hole (inspection machine coordinate system) is compared with the reference position coordinate value of the mark hole of the absolute coordinate axis (product coordinate system) stored in the memory by using a comparison calculation method. A means for calculating an absolute coordinate axis (product coordinate system) from the relative (inspection coordinate system) of the shadow mask, and (h) a pattern defective portion of each through hole of the shadow mask is inspected, and the position of the defective portion Means for detecting coordinates (inspection machine coordinate system); and (i) absolute coordinate axes (product coordinate system) of the detected position coordinates of the relative coordinate axes (inspection machine coordinate system) of the shadow mask using the comparison calculation method. ), And (j) means for storing the position coordinate value of the absolute coordinate axis (product coordinate system) of the defective pattern portion of each through hole detected by the shadow mask from the memory means.
A shadow mask inspection apparatus, which inspects a defective pattern portion formed on a shadow mask. 4. An apparatus for inspecting and confirming a defective portion by using the position coordinate value of the absolute coordinate axis of the defective portion of the pattern detected by the inspection apparatus for a shadow mask according to claim 3.
(A) means for inputting a unique identification symbol given to a shadow mask to be inspected and checking, and calling the position coordinate value of the absolute coordinate axis of the detected pattern defect portion of the shadow mask, and (b) preset Means for storing in the memory means the position coordinate value of the mark hole of the absolute coordinate axis (product system coordinate) with the reference hole (reference pattern) of the shadow mask as the origin, and (c) inspecting each shadow mask A means for placing one by one on the confirmation table, and (d) means for aligning the reference holes of the shadow mask with relative coordinate axes (inspection confirmation machine system) and origin of the coordinates of the reference holes.
(E) a means for detecting the position coordinate values (inspection confirmation machine coordinate system) of the mark holes formed on the opposite edges of the shadow mask by giving the unique identification mark, and (f) the detected mark hole. The absolute coordinate axis of the shadow mask is calculated using the comparison calculation method of the reference position coordinate value (the inspection confirmation machine coordinate system) of the absolute coordinate axis (product system coordinate) stored in the memory with the reference position coordinate value of the mark hole. A means for calculating from the (product coordinate system) to a relative coordinate axis (inspection confirmation machine coordinate system), and (g) the position coordinate value of the absolute coordinate axis (product coordinate system) of the defective pattern of the shadow mask called from the memory. A means for converting the relative coordinate axes (inspection and confirmation machine coordinate system) into position coordinate values using the comparison calculation method, and storing the coordinate values in a memory; and (h) the pattern defect portion of the stored shadow mask. relative Means for outputting an image of the pattern defect portion in the screen visual field by using position coordinate values of coordinate axes (inspection confirmation machine coordinate system); and (i) moving in the screen visual field in the vicinity of the image output in the screen visual field, and An inspecting apparatus for a shadow mask, which inspects and confirms a pattern defective portion formed in the shadow mask by means of inspecting and confirming with a function of enlarging or reducing an image in a screen visual field. 5. A program for inspecting a shadow mask for inspecting a pattern defect portion of a shadow mask, wherein a large number of through holes are formed in a thin metal plate according to a predetermined arrangement.
(A) A program in which each shadow mask to be inspected is provided with a mark hole for determining a relative coordinate axis (inspection machine coordinate system) of each shadow mask at the same position of at least one pair of opposing edges, and (b) inspection A program for assigning a unique identification symbol to each shadow mask to be entered in advance in the memory means, and (c) an absolute coordinate axis (product which is a preset reference hole (reference pattern 4) of the shadow mask as an origin) (Coordinate system), a program for storing the position coordinate values of the mark holes in the memory means as reference position coordinate values, (d) a program for placing each shadow mask on the inspection table one by one, and (e) the shadow mask A program for setting the reference hole of (1) to the relative coordinate axis (inspection machine coordinate system) and setting the coordinates of the reference hole as the origin, and (f) the shadow mask is formed on the opposite edge of the shadow mask. A program for detecting the reference position coordinate value (inspection machine coordinate system) of each of the mark holes by applying the unique identification symbol, and (g) the detected reference position coordinate value of the mark hole (inspection machine coordinate system), The absolute coordinate axis (product coordinate system) is changed from the relative coordinate axis (inspection coordinate system) of the shadow mask by using a method of comparing the absolute coordinate axis (product coordinate system) stored in the memory with the reference position coordinate value of the mark hole. And (h) a program for inspecting a pattern defective portion of each through hole of the shadow mask to detect the position coordinates (inspection machine coordinate system) of the defective portion, and (i) the detected shadow mask Relative coordinate axes (inspection machine coordinate system)
A program for converting and correcting the position coordinates of the above into an absolute coordinate axis (product coordinate system) using the comparison calculation method, and (j)
The step of storing the position coordinate value of the absolute coordinate axis (product coordinate system) of the pattern defective portion of each through hole detected by the shadow mask from the memory means, and inspecting the pattern defective portion formed in the shadow mask. An inspection program for shadow masks, characterized by: 6. A program for inspecting and confirming a defective portion detected by using the shadow mask inspection program according to claim 5, wherein (a) a unique identification symbol given to the shadow mask to be inspected is inputted. , A program for calling the position coordinate values of the absolute coordinate axes of the detected pattern defect portion of the shadow mask, and (b) the absolute coordinate axis with the preset reference hole (reference pattern 4) of the shadow mask as the origin ( A program that stores the position coordinate value of the mark hole (product system coordinate) in the memory means as the reference position coordinate value;
(C) A program for placing each shadow mask on the inspection confirmation table one by one, and (d) Aligning the reference holes of the shadow mask with the relative coordinate axes (inspection confirmation system) to determine the coordinates of the reference holes. A program for origin, (e) a program for detecting each position coordinate value (inspection confirmation machine coordinate system) of the mark hole formed on the opposite end edge of the shadow mask by adding the unique identification mark, and (f) ) The reference position coordinate value of the detected mark hole (inspection confirmation machine coordinate system) is compared with the reference position coordinate value of the mark hole of the absolute coordinate axis (product system coordinate) stored in the memory, A program that calculates from the absolute coordinate axis (product coordinate system) of the shadow mask to the relative coordinate axis (inspection confirmation machine coordinate system), (g)
The position coordinate value of the absolute coordinate axis (product coordinate system) of the defective pattern of the shadow mask called from the memory is converted into the position coordinate value of the relative coordinate axis (inspection confirmation machine coordinate system) by using the comparison calculation method. , A program for storing the coordinate values in a memory, and (h) using the stored position coordinate values of relative coordinate axes (inspection confirmation machine coordinate system) of the pattern defective portion of the shadow mask in the visual field of the screen. A shadow mask is formed by a program for outputting an image to (1) and a program for (i) moving within the screen field of view near the image output in the screen field of view, and enlarging and reducing the image in the field of view for inspection and confirmation. An inspection program for a shadow mask, characterized by inspecting and confirming a defective pattern portion. 7. An inspection table attached to an inspection machine or an inspection confirmation machine, or a product placed on the inspection confirmation table is automatically inspected by installing the shadow mask program according to claim 5 or 6, Alternatively, a shadow mask inspection device characterized by automatic inspection confirmation.