CN114355555A - Two-dimensional reflector component - Google Patents
Two-dimensional reflector component Download PDFInfo
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- CN114355555A CN114355555A CN202111518806.6A CN202111518806A CN114355555A CN 114355555 A CN114355555 A CN 114355555A CN 202111518806 A CN202111518806 A CN 202111518806A CN 114355555 A CN114355555 A CN 114355555A
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- 230000007246 mechanism Effects 0.000 claims abstract description 55
- 230000003287 optical effect Effects 0.000 claims abstract description 12
- 238000009434 installation Methods 0.000 claims description 9
- 239000003292 glue Substances 0.000 claims description 8
- 238000002347 injection Methods 0.000 claims description 8
- 239000007924 injection Substances 0.000 claims description 8
- 230000005484 gravity Effects 0.000 claims description 3
- 229910001069 Ti alloy Inorganic materials 0.000 abstract description 12
- 238000013461 design Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000004308 accommodation Effects 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 2
- 239000013081 microcrystal Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
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Abstract
The invention discloses a two-dimensional mirror assembly, which belongs to the field of optical machines and comprises an azimuth rotating mechanism and a central shaft, wherein the azimuth rotating mechanism is provided with the central shaft; the azimuth rotating mechanism is fixed on the integrated optical frequency equipment and can rotate on a horizontal plane along the central shaft; the pitching rotating mechanism is fixed on the azimuth rotating mechanism through a support; the pitching rotating mechanism is movably connected with the support, so that the pitching rotating mechanism can rotate in a pitching mode on a vertical surface; the reflector is fixed on the pitching rotation mechanism; the mode that the integrated titanium alloy reflector is arranged on the pitching axis system is adopted, so that the problem of surface type variation of the reflector in high and low temperature environments is effectively solved.
Description
Technical Field
The invention relates to a two-dimensional reflector component, which is particularly suitable for a comprehensive optical frequency tracking optical path, realizes spatial direction by the direction and pitching motion of a two-dimensional reflector, and belongs to the field of optical machines.
Background
The sensors of television, laser, infrared and the like of the integrated optical frequency equipment are arranged in the sensor array, and a multiband common-path design is adopted. The integrated titanium alloy two-dimensional reflector component is an important component of a comprehensive optical frequency system, and spatial direction is realized through the azimuth and pitching rotation of the component.
The traditional two-dimensional reflector group adopts a mode of installing a reflector made of microcrystal materials on a pitching shafting mirror frame assembly, has the advantages of high precision, light weight, high bandwidth, high response speed and the like, and generally adopts adhesive and a screw pressing plate for assisting in fixing in order to reduce the problem of the type deterioration of the two-dimensional reflector installed on the back of the mirror frame. Considering that the difference between the thermal expansion coefficients of the mirror frame (aluminum alloy) and the reflector (microcrystal) is nearly 450 times, the scheme has high temperature sensitivity, and the reflector surface is poor and unstable in an environment with large temperature difference, so that the defects of poor environmental adaptability, complex assembly process and the like exist.
Disclosure of Invention
The two-dimensional reflector assembly with the novel structure is designed for solving the problems in the prior art, and the problem of poor surface form of the reflector in a high-temperature and low-temperature environment is effectively solved by adopting a mode that the integrated titanium alloy reflector is arranged on a pitching shaft system.
The specific scheme provided by the invention is as follows:
a two-dimensional mirror assembly comprising
An azimuth rotation mechanism having a central axis; the azimuth rotating mechanism is fixed on the integrated optical frequency equipment and can rotate on a horizontal plane along the central shaft;
the pitching rotating mechanism is fixed on the azimuth rotating mechanism through a support; the pitching rotating mechanism is movably connected with the support, so that the pitching rotating mechanism can rotate in a pitching mode on a vertical surface; and
and the reflecting mirror is fixed on the pitching rotation mechanism.
Furthermore, the azimuth rotating mechanism comprises an azimuth seat, an azimuth shaft and a torque motor;
the azimuth seat comprises a mandrel, an outer shaft and a chassis, wherein the outer shaft is arranged at intervals with the mandrel through the chassis;
the azimuth shaft is sleeved on the mandrel and is rotatably connected with the mandrel through an azimuth angle contact bearing;
the torque motor is positioned between the azimuth axis and the outer axis; the rotor of the torque motor is fixed with the azimuth shaft; the stator of the torque motor is fixed on the outer shaft.
Further, a motor shaft end pressing ring is mounted on the bottom surface of the azimuth shaft, and the motor shaft end pressing ring restrains the rotor of the torque motor in the axial direction; and a stop screw is installed on the outer shaft in the radial direction and used for fixing the stator of the torque motor.
Furthermore, the azimuth rotating mechanism also comprises a grating disc, the grating disc is arranged at the top of the torque motor, the mandrel, the chassis, the outer shaft and the grating disc jointly enclose an accommodating space, and the torque motor is positioned in the accommodating space; and an azimuth grating is fixedly arranged on the grating disc.
Furthermore, the upper end of the azimuth shaft is also provided with a bearing pressing ring, and the bearing pressing ring is used for limiting the azimuth to contact the bearing.
Furthermore, the side wall of the outer shaft is also provided with an installation seat, and the installation seat is fixedly installed on the outer shaft through a bracket; the mounting base is fixedly provided with a mounting plate, and the mounting plate is used for mounting the azimuth reading head.
Furthermore, a slip ring capable of freely rotating is fixedly mounted in the azimuth shaft, the slip ring is of a hollow structure, and the slip ring extends into the support.
Further, the support comprises a base, a left ring seat and a right ring seat which are arranged at the left end and the right end of the base;
a switching hole for the sliding ring to penetrate through is formed in the center of the base;
mounting holes are formed in the left ring seat and the right ring seat, and the two mounting holes are coaxially arranged; two sides of the reflector are respectively movably installed in the installation holes and realize pitching rotation through the pitching rotation mechanism.
Further, the pitching rotation mechanism comprises a driving component arranged on the left ring seat and an auxiliary component arranged on the right ring seat;
the driving assembly comprises a pitch angular contact bearing, a bearing pressing ring, a motor adapter, a pitch motor, a motor pressing ring and a bearing pressing ring which are sequentially arranged;
the auxiliary assembly comprises a pitching angular contact bearing, a bearing pressing ring, a grating adapter, a pitching reading head, a pitching circular grating and a grating cover which are sequentially arranged.
Further, a motor shaft which is connected with the pitching motor in a matched manner is installed on the left side of the reflector; a grating shaft matched with the pitching circular grating is installed on the right side of the reflector, and glue injection holes are formed in the motor shaft and the grating shaft;
the back of the reflector is provided with lightening holes, so that the gravity center of the reflector is positioned on an axis formed by the motor shaft and the grating shaft together.
The beneficial effect that adopts this technical scheme to reach does:
the problem of surface type variation of the reflector in high and low temperature environments is effectively solved by adopting a mode that the integrated titanium alloy reflector is arranged on the pitching axis; the flexible connection of the motor shaft, the grating shaft and the titanium alloy reflector is realized by adopting a glue injection mode of the glue injection hole, so that the problems of complex gluing process and difficult control of the optical element and the mirror bracket are effectively solved; the titanium alloy reflector adopts a lightweight design, so that the rotational inertia of the reflector group is effectively reduced, the bandwidth is high, and the response speed is high.
Drawings
Fig. 1 is a perspective view of the present solution.
Fig. 2 is a sectional structural view of the two-dimensional mirror assembly of the present embodiment.
Fig. 3 is an exploded view of the azimuth rotating mechanism.
Fig. 4 is an exploded view of the pitch mechanism.
Fig. 5 is a structural view of the mirror.
Fig. 6 is a structural view of the stent.
Wherein: the device comprises a 10 azimuth rotating mechanism, an 11 azimuth seat, a 12 azimuth shaft, a 13 torque motor, a 14 azimuth angular contact bearing, a 15 grating disk, a 20 support, a 21 base, a 22 left ring seat, a 23 right ring seat, a 30 pitch rotating mechanism, a 31 driving component, a 32 auxiliary component, a 100 reflector, a 101 motor shaft, a 102 grating shaft, a 111 mandrel, a 112 chassis, a 113 outer shaft, a 121 slip ring, a 131 motor shaft end clamping ring, a 141 bearing clamping ring, a 151 azimuth grating, a 161 mounting seat, a mounting plate 162, a 163 azimuth reading head and a 211 switching hole.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
The embodiment provides a two-dimensional mirror assembly, and the two-dimensional mirror assembly provided by the scheme can effectively solve the problem of surface type variation of the mirror in high and low temperature environments.
Specifically, referring to fig. 1, the two-dimensional mirror assembly includes an azimuth rotating mechanism 10, the azimuth rotating mechanism 10 having a central axis; the azimuth rotating mechanism 10 is fixed on an integrated optical frequency device (not shown) and can rotate on a horizontal plane along a central shaft; it can be understood that: the azimuth rotating mechanism 10 can rotate around a central shaft; the pitching rotation mechanism 30 is mounted on the azimuth rotation mechanism 10; specifically, the pitch rotating mechanism 30 is fixed on the azimuth rotating mechanism 10 through the support 20; the pitching rotating mechanism 30 is movably connected with the support 20, so that the pitching rotating mechanism 30 can pitch and rotate on a vertical plane; the mirror 100 is fixed to the tilt mechanism 30.
The specific working principle is as follows: the azimuth rotating mechanism 10 rotates around the central shaft, so that the reflector 100 can rotate 360 degrees relative to the horizontal plane; the pitching rotation of the pitching rotation mechanism 30 in the vertical plane will cause the mirror 100 to perform pitching rotation.
In the scheme, referring to fig. 2-3, the azimuth rotating mechanism 10 comprises an azimuth seat 11, an azimuth shaft 12 and a torque motor 13; the azimuth base 11 comprises a mandrel 111, an outer shaft 113 and a chassis 112, the azimuth shaft 12 described above is sleeved on the mandrel 111, and the azimuth shaft 12 is rotatably connected with the mandrel 111 relatively through an azimuth contact bearing 14; the outer shaft 113 is arranged at intervals with the mandrel 111 through the chassis 112; the spacing arrangement here forms a spaced space in which the torque motor 13 is placed; the torque motor 13 here is mainly used to provide a rotational force; specifically, the torque motor 13 is located between the azimuth axis 12 and the outer axis 113; the rotor of the torque motor 13 is fixed with the azimuth shaft 12; the stator of the torque motor 13 is fixed to the outer shaft 113.
At this time, the azimuth base 11 will be kept still by the torque motor 13, and the torque motor 13 drives the azimuth shaft 12 to rotate.
In the scheme, a motor shaft end pressing ring 131 is arranged on the bottom surface of the azimuth shaft 12, and the motor shaft end pressing ring 131 restrains the rotor of the torque motor 13 in the axial direction; meanwhile, a bearing pressing ring 141 is further installed at the upper end of the azimuth shaft 12, and the bearing pressing ring 141 is used for limiting the axial positioning of the azimuth contact bearing 14.
Optionally, in order to ensure the stability of the installation of the torque motor 13, a stop screw is installed in the radial direction of the outer shaft 113, and the stop screw is used for fixing the stator of the torque motor 13 and circumferentially constraining the stator of the torque motor 13.
In this embodiment, the azimuth rotating mechanism 10 further includes a grating disk 15, the grating disk 15 is disposed on top of the torque motor 13, the grating disk 15 disposed here can be used to fix and mount the azimuth grating 151, and meanwhile, the mandrel 111, the chassis 112, the outer shaft 113 and the grating disk 15 together form an accommodation space, and the torque motor 13 described above is located in the accommodation space; an effective protection of the torque motor 13 can be provided by the grating disk 15.
In the scheme, the side wall of the outer shaft 113 is also provided with a mounting seat 161, and the mounting seat 161 is fixedly mounted with the outer shaft 113 through a bracket; the mounting base 161 is fixedly provided with a mounting plate 162, and the mounting plate 162 is used for mounting the orientation reading head 163.
In the scheme, a freely rotatable slip ring 121 is further fixedly mounted in the azimuth axis 12, the slip ring 121 is of a hollow structure, and the slip ring 121 extends into the support 20; here, the slip ring 121 is provided on the azimuth axis 12, so that the required lead-out wire in the pitching mechanism 30 can be led out to the bottom of the azimuth base 11 through the slip ring 121; the wire outlet hole at the bottom of the orientation seat 11 is connected with the outside; of course, the outgoing line of the torque motor 13 also needs to be led out through the outgoing line hole at the bottom of the azimuth seat 11; through the design, 360-degree rotation of the azimuth rotating mechanism is guaranteed.
In the present embodiment, referring to fig. 4-6, the support 20 is mainly used to implement the installation of the reflector 100, and is also used to be switched with the azimuth rotating mechanism 10 to implement the rotation of the reflector 100; the support 20 here specifically includes a base 21 and left and right ring seats 22 and 23 provided at both left and right ends of the base 21.
A switching hole 211 for the slip ring 121 to pass through is formed in the center of the base 21; namely, the base 21 is nested with the slip ring 121 through the switching hole 211; mounting holes are formed in the left ring seat 22 and the right ring seat 23, and the two mounting holes are coaxially arranged; both sides of the reflecting mirror 100 are movably installed in the installation holes, respectively, and the tilting is realized by the tilting mechanism 30.
In the scheme, a motor shaft 101 is installed on the left side of a reflector 100; a grating shaft 102 is arranged on the right side of the reflector 100, and glue injection holes are formed in the motor shaft 101 and the grating shaft 102; the motor shaft 101, the grating shaft 102 and the reflector 100 are flexibly connected by a glue injection mode.
Optionally, the mirror 100 here is a titanium alloy mirror; the back of the reflector 100 is provided with lightening holes, so that the gravity center of the reflector 100 is positioned on an axis formed by a motor shaft and a grating shaft together, and the error is kept to be not more than 0.1 mm.
The pitching rotation mechanism 30 is used for realizing pitching rotation of the reflector 100 on a vertical plane, and specifically, the pitching rotation mechanism 30 comprises a driving component 31 arranged on the left ring seat 22 and an auxiliary component 32 arranged on the right ring seat 23; the driving component 31 comprises a pitch angular contact bearing 311, a bearing pressing ring 312, a motor adapter 313, a pitch motor 314, a motor pressing ring 315 and a bearing pressing ring 316 which are arranged in sequence; the auxiliary assembly 32 comprises a pitch angular contact bearing 321, a bearing pressing ring 322, a grating adapter 323, a pitch reading head 324, a pitch circular grating 325 and a grating cover 326 which are arranged in sequence.
The pitching motor 314 is in transmission connection with the motor shaft 101 on the left side of the reflecting mirror 100; the pitch circular grating 325 is connected with the grating shaft 102 on the right side of the reflector 100;
optionally, in order to make the pitch angle of the mirror 100 controllable, the support 20 is further provided with a limiting block, and the limiting block is used to limit the rotation angle of the mirror 100, so that the rotation range of the mirror 100 is controlled to be-20 ° and +70 °.
On the basis of the above scheme, the further technical scheme is as follows:
the gratings (including azimuth grating and pitching circular grating) and the reading head are mainly used for realizing the angle measurement function of the shafting.
The provided angular contact bearings all adopt the precision of P4, the shafting precision is ensured, and a reasonable installation pre-tightening mode is adopted according to the bearing characteristics, so that the deformation of the pitch shaft is not influenced.
The motor shaft, the grating shaft, the left bearing pressing ring, the right bearing pressing ring, the pitching seat left arm and the pitching seat right arm are all made of titanium alloy TA5, and the influence of high-low temperature deformation of related structural parts on the titanium alloy reflector surface type is reduced.
Meanwhile, the installation and precision requirements of the reflecting mirror are considered, and a combined processing mode is adopted with the pitching rotating structure.
The technology adopts a mode that the integrated titanium alloy reflector is arranged on the pitching axis, so that the problem of surface type variation of the reflector in high and low temperature environments is effectively solved; the flexible connection of the motor shaft, the grating shaft and the titanium alloy reflector is realized by adopting a glue injection mode of the glue injection hole, so that the problems of complex gluing process and difficult control of the optical element and the mirror bracket are effectively solved; the titanium alloy reflector adopts a lightweight design, so that the rotational inertia of the reflector group is effectively reduced, the bandwidth is high, and the response speed is high.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A two-dimensional mirror assembly comprising
An azimuth rotation mechanism (10) having a central axis; the azimuth rotating mechanism (10) is fixed on the integrated optical frequency equipment and can rotate on the horizontal plane along the central shaft;
the pitching rotating mechanism (30) is fixed on the azimuth rotating mechanism (10) through a support (20); the pitching rotating mechanism (30) is movably connected with the support (20) so that the pitching rotating mechanism (30) can pitch and rotate on a vertical plane; and
and a mirror (100) fixed to the tilting mechanism (30).
2. A two-dimensional mirror assembly according to claim 1, wherein the azimuth rotating mechanism (10) comprises an azimuth base (11), an azimuth shaft (12) and a torque motor (13);
the azimuth seat (11) comprises a mandrel (111), an outer shaft (113) and a chassis (112), wherein the outer shaft (113) and the mandrel (111) are arranged at intervals through the chassis (112);
the azimuth axis (12) is sleeved on the mandrel (111), and the azimuth axis (12) is rotatably connected relative to the mandrel (111) through an azimuth contact bearing (14);
the torque motor (13) is located between the azimuth axis (12) and the outer axis (113); the rotor of the torque motor (13) is fixed with the azimuth shaft (12); the stator of the torque motor (13) is fixed to the outer shaft (113).
3. A two-dimensional mirror assembly according to claim 2, wherein the underside of the azimuth axis (12) is fitted with a motor shaft end clamping ring (131), the motor shaft end clamping ring (131) constraining the rotor of the torque motor (13) in the axial direction; and a stop screw is arranged on the outer shaft (113) in the radial direction and used for fixing the stator of the torque motor (13).
4. A two-dimensional mirror assembly according to claim 3, wherein the azimuth rotation mechanism (10) further comprises a grating disk (15), the grating disk (15) is disposed on top of the torque motor (13), the spindle (111), the base (112), the outer shaft (113) and the grating disk (15) together define a receiving space, and the torque motor (13) is located in the receiving space; and an azimuth grating (151) is fixedly arranged on the grating disk (15).
5. A two-dimensional mirror assembly according to claim 4, wherein a bearing retainer (141) is further mounted to the upper end of the azimuth axis (12), the bearing retainer (141) being adapted to restrain the azimuth contact bearing (14).
6. A two-dimensional mirror assembly according to claim 4, wherein the outer shaft (113) is further provided with a mounting seat (161) on a side wall thereof, the mounting seat (161) is fixedly mounted with the outer shaft (113) by a bracket; the mounting base (161) is fixedly provided with a mounting plate (162), and the mounting plate (162) is used for mounting the azimuth reading head (163).
7. A two-dimensional mirror assembly according to any of claims 4-6, wherein a freely rotatable slip ring (121) is further fixedly mounted in the azimuth axis (12), the slip ring (121) having a hollow structure and the slip ring (121) extending into the mount (20).
8. A two-dimensional mirror assembly according to claim 7, wherein said mount (20) comprises a base (21) and left and right ring mounts (22, 23) disposed at left and right ends of said base (21);
a transfer hole (211) through which the slip ring (121) passes is formed in the center of the base (21);
mounting holes are formed in the left ring seat (22) and the right ring seat (23), and the two mounting holes are coaxially arranged; two sides of the reflector (100) are respectively movably installed in the installation holes and realize pitching rotation through the pitching rotation mechanism (30).
9. A two-dimensional mirror assembly according to claim 8, wherein said pitch mechanism (30) comprises a drive assembly (31) provided on said left ring mount (22) and an auxiliary assembly (32) provided on said right ring mount (23);
the driving assembly (31) comprises a pitch angular contact bearing, a bearing pressing ring (141), a motor adapter, a pitch motor, a motor pressing ring and a bearing pressing ring (141) which are arranged in sequence;
the auxiliary assembly (32) comprises a pitching angular contact bearing, a bearing pressing ring (141), a grating adapter, a pitching reading head, a pitching circular grating and a grating cover which are sequentially arranged.
10. A two-dimensional mirror assembly according to claim 9, wherein the mirror (100) is provided with a motor shaft fitted to the tilt motor on the left side; a grating shaft matched with the pitching circular grating is installed on the right side of the reflector (100), and glue injection holes are formed in the motor shaft and the grating shaft;
the back of the reflector (100) is provided with lightening holes, so that the gravity center of the reflector (100) is positioned on an axis formed by the motor shaft and the grating shaft together.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111518806.6A CN114355555A (en) | 2021-12-09 | 2021-12-09 | Two-dimensional reflector component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111518806.6A CN114355555A (en) | 2021-12-09 | 2021-12-09 | Two-dimensional reflector component |
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| Publication Number | Publication Date |
|---|---|
| CN114355555A true CN114355555A (en) | 2022-04-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111518806.6A Pending CN114355555A (en) | 2021-12-09 | 2021-12-09 | Two-dimensional reflector component |
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| CN (1) | CN114355555A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2669181Y (en) * | 2003-11-19 | 2005-01-05 | 中国科学院长春光学精密机械与物理研究所 | Rotay target mark capable of changing analogue object space angle |
| CN101482643A (en) * | 2009-02-23 | 2009-07-15 | 中国科学院光电技术研究所 | Bidimensional large-diameter fast control reflection mirror |
| CN106208938A (en) * | 2015-04-30 | 2016-12-07 | 中海阳能源集团股份有限公司 | A kind of Reflecting mirror support means and installation method thereof |
| CN206055982U (en) * | 2016-09-27 | 2017-03-29 | 佛山职业技术学院 | A kind of solar heat power generation system with slot-type optical collector |
| CN213777044U (en) * | 2020-06-16 | 2021-07-23 | 南京智真电子科技股份有限公司 | Triaxial stable form photoelectric platform |
-
2021
- 2021-12-09 CN CN202111518806.6A patent/CN114355555A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2669181Y (en) * | 2003-11-19 | 2005-01-05 | 中国科学院长春光学精密机械与物理研究所 | Rotay target mark capable of changing analogue object space angle |
| CN101482643A (en) * | 2009-02-23 | 2009-07-15 | 中国科学院光电技术研究所 | Bidimensional large-diameter fast control reflection mirror |
| CN106208938A (en) * | 2015-04-30 | 2016-12-07 | 中海阳能源集团股份有限公司 | A kind of Reflecting mirror support means and installation method thereof |
| CN206055982U (en) * | 2016-09-27 | 2017-03-29 | 佛山职业技术学院 | A kind of solar heat power generation system with slot-type optical collector |
| CN213777044U (en) * | 2020-06-16 | 2021-07-23 | 南京智真电子科技股份有限公司 | Triaxial stable form photoelectric platform |
Non-Patent Citations (1)
| Title |
|---|
| 于夫男等: ""应用于Φ３００ｍｍ平面反射镜的精密二维转台轴系设计"", 《光学精密工程》, vol. 28, no. 5, pages 1075 - 1082 * |
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