CN114353930A - Micro-displacement detection device and method for enhancing self-mixing interference by intra-cavity interference - Google Patents
Micro-displacement detection device and method for enhancing self-mixing interference by intra-cavity interference Download PDFInfo
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- CN114353930A CN114353930A CN202111582444.7A CN202111582444A CN114353930A CN 114353930 A CN114353930 A CN 114353930A CN 202111582444 A CN202111582444 A CN 202111582444A CN 114353930 A CN114353930 A CN 114353930A
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 26
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- 239000004065 semiconductor Substances 0.000 claims abstract description 37
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Abstract
The invention discloses a micro-displacement detection device and a detection method for intracavity interference enhanced self-mixing interference, which comprises a semiconductor laser and a translation table, wherein a light beam collimation system and a beam splitter are sequentially arranged on an emergent light path of the semiconductor laser, a focusing lens and an object to be detected are sequentially arranged on one light path of the beam splitter, a reflector is arranged on the translation table, and the reflector is positioned on the other light path of the beam splitter; the semiconductor laser is connected with a photoelectric detection system and a computer in sequence, and the computer is connected with the translation table. Two paths of self-mixing interference signals form secondary interference in a semiconductor laser cavity, so that the signal-to-noise ratio of the self-mixing interference signals is improved, and the real-time detection of the micro-vibration information of the object with high signal-to-noise ratio is realized; the operation is simple, and the applicability is strong.
Description
Technical Field
The invention belongs to the technical field of laser detection equipment, relates to a micro-displacement detection device for intracavity interference enhanced self-mixing interference, and further relates to a detection method of the detection device.
Background
The semiconductor laser self-mixing interference technology has high test sensitivity and can realize long-distance and in-situ on-line measurement. Compared with other optical interference technologies, the semiconductor laser in the technology is used as a laser generator and a laser detector, and single-arm interference is formed inside the semiconductor laser; meanwhile, the semiconductor laser has the characteristic of small volume and is very easy to be integrated with a micro-nano manufacturing system for use. Meanwhile, the movement direction of the object to be measured can be distinguished according to the inclination direction of the self-mixing interference fringes of the semiconductor laser. However, in the self-mixing interferometry of the semiconductor laser, laser light is generally irradiated on a moving rough object surface, or the reflectivity of the object surface is fed back to the semiconductor laser along a primary path, and interference of scattered light occurs, so that the signal-to-noise ratio is low.
Disclosure of Invention
The invention aims to provide a micro-displacement detection device for enhancing self-mixing interference by intra-cavity interference, which solves the problem of low signal-to-noise ratio in the prior art.
The technical scheme adopted by the invention is that the intracavity interference enhanced self-mixing interference micro-displacement detection device comprises a semiconductor laser and a translation table, wherein a light beam collimation system and a beam splitter are sequentially arranged on an emergent light path of the semiconductor laser, a focusing lens and an object to be detected are sequentially arranged on one light path of the beam splitter, a reflector is arranged on the translation table, and the reflector is positioned on the other light path of the beam splitter; the semiconductor laser is connected with a photoelectric detection system and a computer in sequence, and the computer is connected with the translation table.
The invention is also characterized in that:
the photoelectric detection system comprises a photoelectric detector, the photoelectric detector is sequentially connected with a signal processing system and a data acquisition system, and the data acquisition system is connected with a computer.
The invention also aims to provide a micro-displacement detection method for intracavity interference enhanced self-mixing interference, which solves the problem of low signal-to-noise ratio in the prior art.
The invention adopts another technical scheme that the micro-displacement detection method for enhancing self-mixing interference by intracavity interference comprises the following steps:
step 1, placing a reflector on a translation table, collimating laser emitted by a semiconductor laser through a beam collimation system, and then, inputting the laser to a beam splitter to divide the laser into two paths of laser;
and 5, calculating the real-time movement displacement of the measured object by the computer according to the enhanced self-mixing interference signal voltage value change oscillogram.
The real-time motion displacement s of the measured object is as follows:
s＝(λ/2)×max{(npeak(s)-1)，(nGrain-1)}
In the above formula, λ is the wavelength of the irradiating laser, nPeak(s)Is the number of peaks, n, of the self-mixing interference signal in a cycleGrainIs the number of troughs of the self-mixing interference signal in one period.
The invention has the beneficial effects that:
according to the micro-displacement detection device for enhancing self-mixing interference by intra-cavity interference, secondary interference is formed in the cavity of the semiconductor laser by two paths of self-mixing interference signals, the signal-to-noise ratio of the self-mixing interference signals is improved, and real-time detection of micro-vibration information of an object with a high signal-to-noise ratio is realized. The micro-displacement detection method for the intra-cavity interference enhanced self-mixing interference is simple to operate and high in applicability.
Drawings
FIG. 1 is a schematic structural diagram of an intracavity interference-enhanced self-mixing interference micro-displacement detection device of the present invention;
FIG. 2 is a waveform diagram of voltage value variation of self-mixing interference signals obtained by the intra-cavity interference enhanced self-mixing interference micro-displacement detection method of the present invention.
In the figure, 1, a semiconductor laser, 2, a translation stage, 3, a light beam collimation system, 4, a beam splitter, 5, a focusing lens, 6, a reflector, 7, a photoelectric detector, 8, a signal processing system, 9, a data acquisition system and 10, a computer.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
The micro-displacement detection device for intra-cavity interference enhanced self-mixing interference, as shown in fig. 1, comprises a semiconductor laser 1 and a translation stage 2, wherein a light beam collimation system 3 and a beam splitter 4 are sequentially arranged on an emergent light path of the semiconductor laser 1, a focusing lens 5 and an object to be detected are sequentially arranged on a light path of the beam splitter 4, a reflector 6 is arranged on the translation stage 2, the reflector 6 and the semiconductor laser 1 form external cavity reflection, secondary self-mixing interference enhancement is generated in a cavity of the semiconductor laser 1, and the reflector 6 is positioned on the other light path of the beam splitter 4; the semiconductor laser 1 is connected with a photoelectric detection system and a computer 10 in sequence, the computer 10 is connected with the translation stage 2, and the translation stage 2 is adjusted according to self-mixing interference acquired by the photoelectric detection system so as to realize control of relative phases of two external cavities and achieve the purpose of secondary self-mixing interference coherence enhancement.
The photoelectric detection system comprises a photoelectric detector 7, the photoelectric detector 7 is sequentially connected with a signal processing system 8 and a data acquisition system 9, and the data acquisition system 9 is connected with a computer 10.
The micro-displacement detection method for the intracavity interference enhanced self-mixing interference comprises the following steps:
step 1, a reflector 6 is arranged on a translation table 2, laser emitted by a semiconductor laser 1 is collimated by a beam collimation system 3 and enters a beam splitter, and the laser is divided into two paths of laser;
s＝(λ/2)×max{(npeak(s)-1)，(nGrain-1)}
In the above formula, λ is the wavelength of the irradiating laser, nPeak(s)Is the number of peaks, n, of the self-mixing interference signal in a cycleGrainThe number of wave troughs of the self-mixing interference signal in one period;
through the mode, the micro-displacement detection device for intra-cavity interference enhanced self-mixing interference forms secondary interference in the cavity of the semiconductor laser through two paths of self-mixing interference signals, improves the signal-to-noise ratio of the self-mixing interference signals, and realizes real-time detection of micro-vibration information of an object with high signal-to-noise ratio. The micro-displacement detection method for the intra-cavity interference enhanced self-mixing interference is simple to operate and high in applicability.
Claims (4)
1. The micro-displacement detection device for the intracavity interference enhanced self-mixing interference is characterized by comprising a semiconductor laser (1) and a translation table (2), wherein a light beam collimation system (3) and a beam splitter (4) are sequentially arranged on an emergent light path of the semiconductor laser (1), a focusing lens (5) and an object to be detected are sequentially arranged on a light path of the beam splitter (4), a reflector (6) is arranged on the translation table (2), and the reflector (6) is positioned on the other light path of the beam splitter (4); the semiconductor laser (1) is connected with a photoelectric detection system and a computer (10) in sequence, and the computer (10) is connected with the translation table (2).
2. The intracavity interference-enhanced self-mixing interference micro-displacement detection device according to claim 1, wherein the photoelectric detection system comprises a photoelectric detector (7), the photoelectric detector (7) is sequentially connected with a signal processing system (8) and a data acquisition system (9), and the data acquisition system (9) is connected with a computer (10).
3. The micro-displacement detection method for enhancing self-mixing interference by intracavity interference is characterized by comprising the following steps of:
step 1, placing the reflector (6) on a translation table (2), collimating and injecting laser emitted by the semiconductor laser (1) to a beam splitter through a beam collimating system (3), and dividing the laser into two paths of laser;
step 2, irradiating one path of laser to the surface of a measured object through a focusing lens (5), returning partial light reflected by the surface of the measured object to the semiconductor laser (1) along an original light path, and forming self-mixing interference fringes in the cavity; the other path of laser light irradiates to a reflector (6), the laser light reflected by the reflector (6) returns to the semiconductor laser (1) along the original optical path, and self-mixing interference is formed in the cavity in the same way;
step 3, the photoelectric detector (7) collects the laser intensity emitted by the semiconductor laser (1) and sends the laser intensity to the computer (10) through the data collection system (9);
step 4, the computer (10) adjusts the front and back positions of the reflector (6) through the translation stage (2) according to the intra-cavity self-mixing interference signals to realize the control of the relative phases of the two external cavities, so as to achieve the purpose of enhancing the secondary self-mixing interference coherence and obtain a voltage value change waveform diagram of the enhanced self-mixing interference signals;
and 5, calculating the real-time movement displacement of the measured object by the computer (10) according to the enhanced voltage value change oscillogram of the self-mixing interference signal.
4. The intracavity interference-enhanced self-mixing interference micro-displacement detection method according to claim 3, wherein the real-time motion displacement s of the object to be detected is:
s＝(λ/2)×max{(npeak(s)-1)，(nGrain-1)}
In the above formula, λ is the wavelength of the irradiating laser, nPeak(s)Is the number of peaks, n, of the self-mixing interference signal in a cycleGrainIs the number of troughs of the self-mixing interference signal in one period.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101949685A (en) * | 2010-09-08 | 2011-01-19 | 南京师范大学 | Fiber laser self-mixing interferometer and measurement method thereof |
| WO2012049561A1 (en) * | 2010-10-15 | 2012-04-19 | Universitat Politècnica De Catalunya | A method of measuring a displacement-related parameter using a laser self-mixing measuring system, and a laser self-mixing measuring system |
| CN104713473A (en) * | 2015-03-17 | 2015-06-17 | 南京师范大学 | Laser self-blending grating interferometer and measuring method thereof |
| CN108709874A (en) * | 2018-05-03 | 2018-10-26 | 暨南大学 | Surface plasma resonance sensing equipment based on self-mixed interference and method |
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- 2021-12-22 CN CN202111582444.7A patent/CN114353930A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101949685A (en) * | 2010-09-08 | 2011-01-19 | 南京师范大学 | Fiber laser self-mixing interferometer and measurement method thereof |
| WO2012049561A1 (en) * | 2010-10-15 | 2012-04-19 | Universitat Politècnica De Catalunya | A method of measuring a displacement-related parameter using a laser self-mixing measuring system, and a laser self-mixing measuring system |
| CN104713473A (en) * | 2015-03-17 | 2015-06-17 | 南京师范大学 | Laser self-blending grating interferometer and measuring method thereof |
| CN108709874A (en) * | 2018-05-03 | 2018-10-26 | 暨南大学 | Surface plasma resonance sensing equipment based on self-mixed interference and method |
Non-Patent Citations (1)
| Title |
|---|
| 刘雨薇: "基于主频阶次的两路外腔激光自混合振动测量与信号处理", 《中国优秀硕士学位论文全文数据库基础科学辑》, no. 01, 15 January 2020 (2020-01-15), pages 20 - 22 * |
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