CN114351242A - Cooling device of single crystal furnace - Google Patents
Cooling device of single crystal furnace Download PDFInfo
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- CN114351242A CN114351242A CN202210154035.5A CN202210154035A CN114351242A CN 114351242 A CN114351242 A CN 114351242A CN 202210154035 A CN202210154035 A CN 202210154035A CN 114351242 A CN114351242 A CN 114351242A
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- single crystal
- furnace
- seat
- crystal furnace
- support seat
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- 239000013078 crystal Substances 0.000 title claims abstract description 111
- 238000001816 cooling Methods 0.000 title claims abstract description 67
- 210000001503 joint Anatomy 0.000 claims abstract description 51
- 230000008093 supporting effect Effects 0.000 claims abstract description 46
- 238000003032 molecular docking Methods 0.000 claims description 28
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 21
- 230000001360 synchronised effect Effects 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- UQMRAFJOBWOFNS-UHFFFAOYSA-N butyl 2-(2,4-dichlorophenoxy)acetate Chemical compound CCCCOC(=O)COC1=CC=C(Cl)C=C1Cl UQMRAFJOBWOFNS-UHFFFAOYSA-N 0.000 description 11
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000002826 coolant Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 206010057071 Rectal tenesmus Diseases 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 208000012271 tenesmus Diseases 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a cooling device of a single crystal furnace, which comprises a mounting seat, a fixed supporting seat, a sliding supporting seat, a telescopic shell, a butt joint shell and a cooler, wherein: the fixed supporting seat is fixedly connected to the mounting seat; the sliding support seat is connected to the mounting seat in a sliding mode and can slide towards or away from the fixed support seat; the first end of the telescopic shell is connected to the sliding support seat, and the second end of the telescopic shell is connected to the fixed support seat; the first end of the butt joint shell is connected to the fixed supporting seat and communicated with the telescopic shell, and the second end of the butt joint shell is used for connecting a furnace mouth of the single crystal furnace; the first end of the cooler is connected to the sliding support seat and is located in the telescopic shell, and when the sliding support seat slides towards the fixed support seat, the second end of the cooler sequentially penetrates through the fixed support seat and the butt joint shell and penetrates into the single crystal furnace. The invention pushes the cooler into the furnace cavity of the single crystal furnace through the furnace mouth of the single crystal furnace, thereby implementing the rapid cooling of the single crystal furnace.
Description
Technical Field
The invention relates to the field of silicon rod production, in particular to a cooling device of a single crystal furnace.
Background
At present, a single crystal furnace is generally adopted to draw silicon rods, and after at least one silicon rod is drawn, or when the single crystal furnace is overhauled and maintained, a furnace chamber of the single crystal furnace needs to be cooled. The traditional cooling method is natural cooling, which consumes a great deal of time and seriously affects the production efficiency of the single crystal furnace.
Disclosure of Invention
In order to solve the technical problems, the invention provides a cooling device of a single crystal furnace, which comprises the following detailed technical scheme:
the utility model provides a single crystal growing furnace cooling device, includes mount pad, fixed bolster, sliding support seat, flexible casing, butt joint casing and cooler, wherein:
the fixed supporting seat is fixedly connected to the mounting seat;
the sliding support seat is connected to the mounting seat in a sliding mode and can slide towards or away from the fixed support seat;
the first end of the telescopic shell is connected to the sliding support seat, and the second end of the telescopic shell is connected to the fixed support seat;
the first end of the butt joint shell is connected to the fixed supporting seat and communicated with the telescopic shell, and the second end of the butt joint shell is used for connecting a furnace mouth of the single crystal furnace;
the first end of the cooler is connected to the sliding support seat and is located in the telescopic shell, and when the sliding support seat slides towards the fixed support seat, the second end of the cooler sequentially penetrates through the fixed support seat and the butt joint shell and penetrates into the single crystal furnace.
The cooling device of the single crystal furnace provided by the invention can realize butt joint with the furnace mouth of the single crystal furnace, and push the cooler into the furnace cavity of the single crystal furnace through the furnace mouth of the single crystal furnace, thereby implementing quick cooling of the single crystal furnace.
In some embodiments, the cooling device of the single crystal furnace further comprises a translation driving mechanism arranged on the mounting seat, and the translation driving mechanism is used for driving the sliding support seat to slide towards or away from the fixed support seat.
Through setting up translation actuating mechanism, realized the drive to sliding support seat for sliding support seat orientation or keeping away from fixed bolster and slide.
In some embodiments, the translation drive mechanism comprises a timing belt drive mechanism along the timing belt for supporting and driving the timing belt; the sliding support seat is connected with a side belt body of the synchronous belt, and the sliding support seat faces to or is far away from the fixed support seat to slide under the driving of the synchronous belt.
The translation driving mechanism is simple in structure and drives the sliding support seat to move towards or far away from the fixed support seat to slide through the synchronous belt.
In some embodiments, the first end of the telescopic housing is connected to the sliding support via a first connecting flange, and the second end of the telescopic housing is connected to the fixed support via a second connecting flange.
The connecting flanges are arranged at the two ends of the telescopic shell, so that the stable connection of the telescopic shell with the sliding support seat and the fixed support seat is ensured.
In some embodiments, the cooling apparatus for the single crystal furnace further comprises a telescopic housing supporting mechanism provided on the mount for supporting the telescopic housing.
Through setting up flexible casing supporting mechanism, realized the support to flexible casing, prevent that flexible casing from touching the cooler at the tenesmus.
In some embodiments, the telescoping shell support mechanism comprises a support frame and a clamp, wherein: the support frame is connected to the mounting seat in a sliding manner, and the clamp is connected to the support frame and clamped to the telescopic shell; when the telescopic shell is driven by the sliding support seat to stretch, the telescopic shell supporting mechanism slides on the mounting seat under the driving of the telescopic shell.
Through setting up flexible casing supporting mechanism, guaranteed the supporting effect of flexible casing supporting mechanism to flexible casing on the one hand, on the other hand has realized the follow-up of flexible casing supporting mechanism with flexible casing, prevents that flexible casing supporting mechanism from hindering the flexible of flexible casing.
In some embodiments, the first end of the docking shell is connected to the fixed support base through a third connecting flange, and the second end of the docking shell is provided with a fourth connecting flange for connecting a furnace mouth of the single crystal furnace.
The connecting flanges are arranged at the two ends of the butt joint shell, so that the stable connection of the butt joint shell, the fixed supporting seat and the furnace mouth of the single crystal furnace is ensured.
In some embodiments, the single crystal furnace cooler further comprises a docking enclosure support mechanism disposed on the mount for supporting the docking enclosure.
Through setting up butt joint casing supporting mechanism, realized the support to butt joint casing, prevent that butt joint casing from weighing down.
In some embodiments, the docking housing is retractable; the butt joint shell supporting mechanism comprises an air cylinder, a mounting plate and calipers, wherein the air cylinder is mounted on the mounting seat, the mounting plate is connected to a piston rod of the air cylinder, the calipers are mounted on the mounting plate, and the second end of the butt joint shell is buckled on the calipers in a buckling mode; when the air cylinder drives the calipers to move towards the furnace opening of the single crystal furnace, the second end of the butt joint shell is in butt joint with the furnace opening of the single crystal furnace under the driving of the calipers, and when the air cylinder drives the calipers to move away from the furnace opening of the single crystal furnace, the second end of the butt joint shell is separated from the furnace opening of the single crystal furnace under the driving of the calipers.
The butt joint shell is arranged to be of a telescopic structure, and the butt joint shell supporting mechanism is arranged, so that the distance between the butt joint shell and the furnace mouth of the single crystal furnace can be adjusted, and the butt joint of the butt joint shell to the furnace mouth of the single crystal furnace can be smoothly realized.
In some embodiments, the cooler is formed by a water-cooling pipeline which is bent by a plurality of turns, and both ends of the water-cooling pipeline penetrate through the fixed supporting seat to form a water inlet and a water outlet of the cooler.
Provides a cooler with simple structure and excellent cooling effect, which realizes the cooling of the single crystal furnace by circulating water.
In some embodiments, the sliding support seat or the fixed support seat is provided with an inflating nozzle, and the inflating nozzle is used for inflating argon into the single crystal furnace; the sliding support seat or the fixed support seat is provided with an air suction nozzle which is used for sucking air in the single crystal furnace.
The charging nozzle and the air exhaust nozzle are arranged on the sliding support seat or the fixed support seat, so that nitrogen charging or vacuum pumping treatment of the single crystal furnace chamber is realized, and air pollution to the internal environment of the single crystal furnace is prevented.
In some embodiments, the bottom of the mount is provided with a dowel assembly. The positioning pin assembly comprises a foot seat and a ground seat, wherein the foot seat is provided with a positioning pin, and the ground seat is provided with a positioning hole matched with the positioning pin.
The invention can be conveniently installed and positioned close to a cooling station of a single crystal furnace by arranging the positioning pin assembly at the bottom of the mounting seat.
In some embodiments, the cooling device of the single crystal furnace further comprises a furnace mouth switching mechanism, the furnace mouth switching mechanism comprises a switching pipeline, a gate valve and a water cooling jacket, wherein: the first end of the switching pipeline is connected to a furnace mouth of the single crystal furnace, and the second end of the switching pipeline is connected with the second end of the butt joint shell; the gate valve and the water cooling sleeve are arranged on the transfer pipeline, the gate valve is used for opening and closing the transfer pipeline, and the water cooling sleeve is used for cooling the transfer pipeline.
Through setting up fire door changeover mechanism, realized the quick butt joint of butt joint casing with single crystal growing furnace fire door.
Drawings
FIG. 1 is a schematic connection diagram of a heat exchange device of a single crystal furnace and the single crystal furnace according to an embodiment of the invention;
FIG. 2 is a schematic structural diagram of a heat exchange device of a single crystal furnace according to an embodiment of the present invention, without a telescopic shell;
FIG. 3 is a schematic structural view of the heat exchange device of the single crystal furnace of the present invention without the telescopic housing and the butt-joint housing;
FIG. 4 is a schematic structural diagram of the heat exchange device of the single crystal furnace of the present invention without the components of the telescopic shell, the butt joint shell, the fixed support seat, etc.;
FIG. 5 is a schematic structural diagram of a translation drive mechanism in an embodiment of the present invention;
fig. 1 to 5 include:
the device comprises a mounting seat 10, a fixed support seat 20, a sliding support seat 30, a telescopic shell 40, a butt joint shell 50, a cooler 60, a telescopic shell support mechanism 70, a butt joint shell support mechanism 80, a translation drive mechanism 90, a transfer pipeline 100, a gate valve 110, a water cooling jacket 120, a foot seat 11, a ground seat 12, a first connecting flange 41, a second connecting flange 42, a third connecting flange 51, a fourth connecting flange 52, a water inlet 61, a water outlet 62, a support frame 71, a hoop 72, a cylinder 81, a mounting plate 82, calipers 83, a synchronous belt drive mechanism 91 and a synchronous belt 92.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
The natural cooling of the single crystal furnace by adopting the traditional natural cooling mode needs to consume a large amount of time, and the production efficiency of the single crystal furnace is seriously influenced.
In view of the above, the present invention provides a cooling apparatus for a single crystal furnace capable of performing rapid cooling of the single crystal furnace, as shown in fig. 1 and 2, the cooling apparatus for a single crystal furnace according to an embodiment of the present invention includes a mounting base 10, a fixed support base 20, a sliding support base 30, a telescopic case 40, a butt-joint case 50, and a cooler 60, wherein:
the fixed support base 20 is fixedly connected to the installation base 10.
The slide bearing 30 is slidably connected to the mounting seat 10, and the slide bearing 30 is configured to be slidable toward or away from the fixed bearing 20.
The first end of the telescopic housing 40 is connected to the sliding support base 30, and the second end of the telescopic housing 40 is connected to the fixed support base 20.
The first end of the butt joint shell 50 is connected to the fixed support base 20 and is communicated with the telescopic shell, and the second end of the butt joint shell 50 is used for connecting a furnace mouth of the single crystal furnace.
The first end of the cooler 60 is connected to the sliding support 30 and located in the telescopic shell 40, and when the sliding support 30 slides towards the fixed support 20, the second end of the cooler sequentially passes through the fixed support 20 and the butt-joint shell 50 and penetrates into the single crystal furnace.
Alternatively, bellows may be used for the telescopic housing 40 and the docking housing 50.
The working process of the cooling device of the single crystal furnace in the embodiment of the invention is as follows:
in the initial state, the slide bearing 30 is located at the initial position away from the fixed bearing 20, the telescopic housing 40 is in the extended state, and the cooler 60 is completely located in the telescopic housing 40.
When cooling of the single crystal furnace is to be performed, the single crystal furnace cooling device is first installed at a cooling station near the furnace opening of the single crystal furnace, and then the second end of the docking case 50 is connected to the furnace opening of the single crystal furnace.
Then, the sliding support base 30 is controlled to move towards the fixed support base 20, the cooler 60 is driven by the sliding support base 30 to move synchronously, and the second end of the cooler passes through the fixed support base 20 and the butt joint shell 50 in sequence and finally penetrates into the furnace cavity of the single crystal furnace, so as to implement rapid cooling of the interior of the single crystal furnace. In this process, the telescopic housing 40 is continuously contracted by the pressing force of the slide bearing 30 until it assumes a fully contracted state.
After the cooling of the single crystal furnace is completed, the sliding support seat 30 is controlled to move away from the fixed support seat 20 until the sliding support seat 30 returns to the initial position away from the fixed support seat 20. In the process, the second end of the cooler 60 is withdrawn from the furnace chamber of the single crystal furnace and returned to the telescopic housing 40 again.
Finally, the second end of the adapter housing 50 is removed from the furnace opening of the single crystal furnace.
Optionally, the cooling device of the single crystal furnace in the embodiment of the invention further includes a translation driving mechanism 90 disposed on the mounting seat 10, and the translation driving mechanism 90 is configured to drive the sliding support seat 30 to slide towards or away from the fixed support seat 20.
As shown in fig. 5, the translation drive mechanism 90 may alternatively include a timing belt drive mechanism 91 along the timing belt 92 for supporting and driving the timing belt 92. The slide bearing 30 is connected to one side belt body (for example, the upper side belt body) of the synchronous belt 92, and when the synchronous belt drive mechanism 91 drives the synchronous belt 92 to move, the slide bearing 30 slides towards or away from the fixed bearing under the drive of the synchronous belt 92.
In order to ensure the stable connection of the telescopic shell 40 with the sliding support seat 30 and the fixed support seat 20. Optionally, as shown in fig. 1, a first connecting flange 41 is disposed on a first end of the telescopic shell 40, a second connecting flange 42 is disposed on a second end of the telescopic shell 40, and the first end and the second end of the telescopic shell 40 are connected to the sliding support 30 and the fixed support 20 through the first connecting flange 41 and the second connecting flange 42, respectively.
Similarly, in order to ensure the stable connection between the butt-joint shell 50 and the fixed supporting seat 20 and the furnace mouth of the single crystal furnace. Optionally, a third connecting flange 51 is disposed at the first end of the docking shell 50, a fourth connecting flange 52 is disposed at the second end of the docking shell 50, and the first end and the second end of the docking shell 50 are connected to the fixed support base 20 and the furnace mouth of the single crystal furnace through the third connecting flange 51 and the fourth connecting flange 52, respectively.
Since the telescopic housing 40 is made of a soft material, it falls down by gravity when it is contracted, and touches the cooler 60. In order to solve the problem, the cooling apparatus for a single crystal furnace in the embodiment of the present invention may further include a telescopic housing support mechanism 70 provided on the mount base 10.
The telescopic housing support mechanism 70 can support the telescopic housing 40, thereby preventing the telescopic housing 40 from dropping when it is contracted.
Optionally, as shown in fig. 1 to 3, the telescopic housing supporting mechanism 70 includes a supporting frame 71 and a clamping band 72, wherein: the support bracket 71 is slidably connected to the mounting base 10, and the clamp 72 is connected to the support bracket 71 and clamped to the telescopic housing 40.
When the telescopic housing 40 is driven by the sliding support base 30 to extend and retract, the telescopic housing support mechanism 70 is driven by the telescopic housing 40 to slide on the mounting base 10. With such an arrangement, on the one hand, the supporting effect of the telescopic shell supporting mechanism 70 on the telescopic shell 40 is ensured, and on the other hand, the telescopic shell supporting mechanism 70 and the telescopic shell 40 are moved along, so that the telescopic shell supporting mechanism 70 is prevented from obstructing the extension and retraction of the telescopic shell 40.
Optionally, as shown in fig. 1 to fig. 3, the cooling apparatus for a single crystal furnace in the embodiment of the present invention further includes a docking case supporting mechanism 80 disposed on the mounting base 10, and the docking case supporting mechanism 80 is configured to support the docking case 50.
Alternatively, the docking housing 50 may also be of a telescoping construction. The docking housing supporting mechanism 80 includes a cylinder 81, a mounting plate 82 and a caliper 83, wherein the cylinder 81 is mounted on the mounting seat 10, the mounting plate 82 is connected to a piston rod of the cylinder 81, the caliper 83 is mounted on the mounting plate 82, and the second end of the docking housing 50 is fastened to the caliper.
When the air cylinder 81 drives the calipers 83 to move towards the furnace mouth of the single crystal furnace, the second end of the butt joint shell 50 is in butt joint with the furnace mouth of the single crystal furnace under the driving of the calipers 83, and when the air cylinder 81 drives the calipers 83 to move away from the furnace mouth of the single crystal furnace, the second end of the butt joint shell 50 is separated from the furnace mouth of the single crystal furnace under the driving of the calipers 83.
It can be seen that by setting the docking housing 50 to be a telescopic structure and by setting the docking housing supporting mechanism 80, the flexible adjustment of the distance between the second end of the docking housing 50 and the furnace mouth of the single crystal furnace can be realized, thereby ensuring that the second end of the docking housing 50 realizes the smooth docking of the furnace mouth of the single crystal furnace.
As shown in fig. 4, optionally, the cooler 60 is formed by a water-cooled pipe through several turns, and both ends of the water-cooled pipe penetrate through the fixed support base 30 to form a water inlet 61 and a water outlet 62 of the cooler 60. After the second end of the cooler 60 is inserted into the furnace chamber of the single crystal furnace, a low temperature cooling medium (e.g., cooling water) flows into the cooler 60 through the water inlet 61 and slowly flows in the cooler 60, and during this process, the cooling medium exchanges heat with the high temperature air in the furnace chamber to cool the single crystal furnace. Finally, the high temperature cooling medium carrying heat flows out of the cooler 60 from the water outlet 62.
Optionally, the sliding support 30 or the fixed support 20 is provided with an air charging nozzle, and the air charging nozzle charges argon gas into the single crystal furnace through the telescopic shell 40 and the butt joint shell 50.
Optionally, the sliding support 30 or the fixed support 20 is provided with an air suction nozzle, and the air suction nozzle performs vacuum-pumping treatment on the single crystal furnace through the telescopic shell 40 and the butt joint shell 50.
In order to mount and position the cooling device of the single crystal furnace of the present invention at the cooling station, as shown in fig. 3, the cooling device of the single crystal furnace in the embodiment of the present invention may optionally further include a dowel assembly. Optionally, the positioning pin assembly includes a foot base 11 and a ground base 12, wherein the foot base 11 is provided with a positioning pin, and the ground base 12 is provided with a positioning hole matched with the positioning pin.
The foot mounts 11 are pre-assembled at the bottom of the housing 10 and the floor mounts 12 are pre-assembled on the floor at the cooling station. The installation and the positioning of the cooling device of the single crystal furnace can be finished by inserting the positioning pins on the foot seats 11 into the positioning pins on the ground seats 12. In the embodiment shown in fig. 3, the base 10 has four supporting columns, each supporting column is pre-installed with a foot seat 11 at the bottom, and correspondingly, four corresponding base seats 12 are also provided on the ground at the cooling station.
With continuing reference to fig. 1 and 2, in order to achieve the rapid docking of the docking housing 50 with the furnace mouth of the single crystal furnace, the cooling device of the single crystal furnace in the embodiment of the present invention may further include a furnace mouth adapter.
The fire door changeover mechanism comprises a changeover pipeline 100, a gate valve 110 and a water cooling jacket 120, wherein: the first end of the adapting pipe 100 is connected to the furnace mouth of the single crystal furnace, and the second end of the butt joint shell 50 is connected to the second end of the adapting pipe 100, so that the butt joint of the butt joint shell 50 and the furnace mouth of the single crystal furnace can be realized.
A gate valve 110 and a water jacket 120 are provided on the transit pipe 100, wherein the gate valve 110 is used to open and close the transit pipe 100, and the water jacket 120 is used to cool the transit pipe 100.
The invention has been described above with a certain degree of particularity. It will be understood by those of ordinary skill in the art that the description of the embodiments is merely exemplary and that all changes that come within the true spirit and scope of the invention are desired to be protected. The scope of the invention is defined by the appended claims rather than by the foregoing description of the embodiments.
Claims (13)
1. The utility model provides a single crystal growing furnace cooling device, its characterized in that single crystal growing furnace cooling device includes mount pad, fixed bolster, slip supporting seat, flexible casing, butt joint casing and cooler, wherein:
the fixed supporting seat is fixedly connected to the mounting seat;
the sliding support seat is connected to the mounting seat in a sliding mode, and the sliding support seat is configured to be capable of sliding towards or away from the fixed support seat;
the first end of the telescopic shell is connected to the sliding support seat, and the second end of the telescopic shell is connected to the fixed support seat;
the first end of the butt joint shell is connected to the fixed supporting seat and communicated with the telescopic shell, and the second end of the butt joint shell is used for connecting a furnace mouth of the single crystal furnace;
and the first end of the cooler is connected to the sliding support seat and is positioned in the telescopic shell, and when the sliding support seat slides towards the fixed support seat, the second end of the cooler sequentially penetrates through the fixed support seat and the butt joint shell and penetrates into the single crystal furnace.
2. The single crystal furnace cooling device of claim 1, further comprising a translation driving mechanism disposed on the mounting base, the translation driving mechanism being configured to drive the sliding support to slide toward or away from the fixed support.
3. A cooling apparatus for a single crystal furnace as claimed in claim 2, wherein the translation drive mechanism includes a timing belt drive mechanism along a timing belt for supporting and driving the timing belt;
the sliding support seat is connected with a side belt body of the synchronous belt, and the sliding support seat faces to or is far away from the fixed support seat under the driving of the synchronous belt to slide.
4. The cooling apparatus for a single crystal furnace according to claim 1, wherein a first end of the telescopic case is coupled to the slide bearing via a first coupling flange, and a second end of the telescopic case is coupled to the fixed bearing via a second coupling flange.
5. A cooling apparatus for a single crystal furnace as claimed in claim 1, wherein the cooling apparatus for a single crystal furnace further comprises a telescopic case supporting mechanism provided on the mount base for supporting the telescopic case.
6. A cooling apparatus for a single crystal growing furnace according to claim 5, wherein said telescopic housing support means includes a support frame and a clamp, wherein: the support frame is connected to the mounting seat in a sliding mode, and the hoop is connected to the support frame and hooped on the telescopic shell;
the telescopic shell is driven by the sliding support seat to stretch, and the telescopic shell supporting mechanism is driven by the telescopic shell to slide on the mounting seat.
7. The cooling device of a single crystal furnace as claimed in claim 1, wherein the first end of the docking housing is connected to the fixed support base through a third connecting flange, and the second end of the docking housing is provided with a fourth connecting flange for connecting a furnace mouth of the single crystal furnace.
8. The single crystal furnace cooling apparatus of claim 1, further comprising a docking case supporting mechanism provided on the mount for supporting the docking case.
9. The cooling apparatus of a single crystal furnace according to claim 8, wherein:
the docking housing is retractable;
the butt joint shell supporting mechanism comprises an air cylinder, a mounting plate and calipers, wherein the air cylinder is mounted on the mounting seat, the mounting plate is connected to a piston rod of the air cylinder, the calipers are mounted on the mounting plate, and the second end of the butt joint shell is buckled on the calipers in a buckling mode;
when the air cylinder drives the calipers to move towards the furnace opening of the single crystal furnace, the second end of the butt joint shell is in butt joint with the furnace opening of the single crystal furnace under the driving of the calipers, and when the air cylinder drives the calipers to move away from the furnace opening of the single crystal furnace, the second end of the butt joint shell is separated from the furnace opening of the single crystal furnace under the driving of the calipers.
10. The cooling device of a single crystal furnace as claimed in claim 1, wherein the cooler is formed by a water-cooling pipeline through a plurality of turns, and both ends of the water-cooling pipeline penetrate through the fixed support seat to form a water inlet and a water outlet of the cooler.
11. The cooling apparatus of a single crystal furnace according to claim 1, wherein:
the sliding support seat or the fixed support seat is provided with an inflating nozzle, and the inflating nozzle is used for inflating argon into the single crystal furnace;
and the sliding support seat or the fixed support seat is provided with an air suction nozzle, and the air suction nozzle is used for sucking air in the single crystal furnace.
12. The cooling device of a single crystal furnace as claimed in claim 1, wherein the bottom of the mounting seat is provided with a positioning pin assembly, the positioning pin assembly comprises a foot seat and a ground seat, wherein the foot seat is provided with a positioning pin, and the ground seat is provided with a positioning hole matched with the positioning pin.
13. The single crystal furnace cooling device of claim 1, further comprising a furnace mouth adapter mechanism, the furnace mouth adapter mechanism comprising an adapter pipeline, a gate valve and a water cooling jacket, wherein:
the first end of the adapter pipe is connected to a furnace mouth of the single crystal furnace, and the second end of the adapter pipe is connected to the second end of the butt joint shell;
the gate valve and the water cooling sleeve are arranged on the transfer pipeline, the gate valve is used for opening and closing the transfer pipeline, and the water cooling sleeve is used for cooling the transfer pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210154035.5A CN114351242A (en) | 2022-02-20 | 2022-02-20 | Cooling device of single crystal furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210154035.5A CN114351242A (en) | 2022-02-20 | 2022-02-20 | Cooling device of single crystal furnace |
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| CN114351242A true CN114351242A (en) | 2022-04-15 |
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| CN202210154035.5A Pending CN114351242A (en) | 2022-02-20 | 2022-02-20 | Cooling device of single crystal furnace |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010064837A (en) * | 1999-12-20 | 2001-07-11 | 이구택 | Movable type cooling apparatus for annealing furnace |
| CN205821512U (en) * | 2016-04-01 | 2016-12-21 | 银川隆基硅材料有限公司 | A kind of czochralski crystal growing furnace blowing out rapid cooling thermal field device |
| CN112064108A (en) * | 2020-09-11 | 2020-12-11 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Vacuum high-pressure single crystal furnace system for growing mercury telluride crystals and control method thereof |
| CN215713521U (en) * | 2021-09-10 | 2022-02-01 | 无锡松瓷机电有限公司 | Single crystal furnace charging system |
| CN114011816A (en) * | 2021-11-05 | 2022-02-08 | 双良硅材料(包头)有限公司 | Self-cleaning system and device for exhaust pipeline of single crystal furnace |
| CN216809011U (en) * | 2022-02-20 | 2022-06-24 | 无锡松瓷机电有限公司 | Cooling device of single crystal furnace |
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2022
- 2022-02-20 CN CN202210154035.5A patent/CN114351242A/en active Pending
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|---|---|---|---|---|
| KR20010064837A (en) * | 1999-12-20 | 2001-07-11 | 이구택 | Movable type cooling apparatus for annealing furnace |
| CN205821512U (en) * | 2016-04-01 | 2016-12-21 | 银川隆基硅材料有限公司 | A kind of czochralski crystal growing furnace blowing out rapid cooling thermal field device |
| CN112064108A (en) * | 2020-09-11 | 2020-12-11 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Vacuum high-pressure single crystal furnace system for growing mercury telluride crystals and control method thereof |
| CN215713521U (en) * | 2021-09-10 | 2022-02-01 | 无锡松瓷机电有限公司 | Single crystal furnace charging system |
| CN114011816A (en) * | 2021-11-05 | 2022-02-08 | 双良硅材料(包头)有限公司 | Self-cleaning system and device for exhaust pipeline of single crystal furnace |
| CN216809011U (en) * | 2022-02-20 | 2022-06-24 | 无锡松瓷机电有限公司 | Cooling device of single crystal furnace |
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