CN114347278A - Polycrystalline silicon slice slicing equipment with recyclable waste materials - Google Patents
Polycrystalline silicon slice slicing equipment with recyclable waste materials Download PDFInfo
- Publication number
- CN114347278A CN114347278A CN202111660237.9A CN202111660237A CN114347278A CN 114347278 A CN114347278 A CN 114347278A CN 202111660237 A CN202111660237 A CN 202111660237A CN 114347278 A CN114347278 A CN 114347278A
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- polycrystalline silicon
- filter
- block
- unit
- recyclable
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 39
- 239000010819 recyclable waste Substances 0.000 title abstract description 7
- 239000000463 material Substances 0.000 title description 4
- 238000011084 recovery Methods 0.000 claims abstract description 26
- 239000002699 waste material Substances 0.000 claims abstract description 25
- 238000005520 cutting process Methods 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims abstract description 8
- 230000008569 process Effects 0.000 claims abstract description 7
- 238000003756 stirring Methods 0.000 claims abstract description 7
- 238000004064 recycling Methods 0.000 claims abstract description 6
- 229910003460 diamond Inorganic materials 0.000 claims description 5
- 239000010432 diamond Substances 0.000 claims description 5
- 229920005591 polysilicon Polymers 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 2
- 238000001914 filtration Methods 0.000 claims description 2
- 238000003754 machining Methods 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 abstract description 3
- 239000013078 crystal Substances 0.000 description 6
- 210000001503 joint Anatomy 0.000 description 4
- 230000004075 alteration Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention discloses a polycrystalline silicon slice device with recyclable waste, which belongs to the technical field of polycrystalline silicon slice processing and comprises a device shell, a slice unit and a recovery unit, wherein the slice unit is arranged in the device shell and comprises a backing plate, a polycrystalline silicon block is arranged at the bottom of the backing plate, and a T-shaped positioning block is arranged at the top of the backing plate; the waste materials generated in the slicing process are recycled through a recycling unit; according to the invention, the recovery unit is arranged to recover the waste materials generated during cutting of the polycrystalline silicon block in real time, the stirring block is driven to rotate to be in contact with the abutting block, the bottom bump drives the rectangular frame to move in the same direction, the telescopic supporting rods and the return springs on the two sides drive the rectangular frame to repeatedly move transversely along the concave seat, so that the filter plate can efficiently filter out the waste materials and cannot cause the problem of blockage, meanwhile, the filtered waste materials are synchronously recovered through the sliding table and the flared recovery cover which move along the upper part of the filter plate, and the filter plate can be pulled out subsequently, so that the utilization rate of raw materials is improved.
Description
Technical Field
The invention relates to the technical field of polycrystalline silicon chip processing, in particular to polycrystalline silicon chip slicing equipment with recyclable waste materials.
Background
The production process of the polycrystalline silicon slice comprises the steps of firstly carrying out ingot casting in an ingot furnace to form a crystal ingot, then carrying out crystal pulling, cutting and square cutting processes on the crystal ingot to form a polycrystalline silicon block, then bonding the polycrystalline silicon block on a crystal support, finally loading the crystal support loaded with the polycrystalline silicon block on a slicing machine to slice the crystal support to prepare the polycrystalline silicon slice, and finally carrying out degumming, cleaning and drying to obtain a finished polycrystalline silicon slice.
During the processing process of the polycrystalline silicon wafer, wire cutting waste materials are generated due to friction between the polycrystalline silicon wafer and the diamond wires, and the waste materials are generally discharged along with water flow during cutting, so that the waste materials cannot be recycled, the utilization rate of raw materials is reduced, and the processing cost is increased.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provides a polycrystalline silicon slice slicing device with recyclable waste materials.
The technical scheme is as follows: the polycrystalline silicon slice slicing device with recyclable waste comprises a device shell, a slicing unit and a recovery unit, wherein the slicing unit is arranged inside the device shell and comprises a base plate, a polycrystalline silicon block is arranged at the bottom of the base plate, a T-shaped positioning block is arranged at the top of the base plate and is mounted on a lifting table, wire guide rollers are arranged on two sides inside the device shell, and diamond wires are densely wound on the wire guide rollers; the recovery unit is arranged below the polycrystalline silicon block and used for recovering waste materials generated in the slicing process.
Furthermore, the recovery unit comprises a rectangular frame, a filter plate is arranged in the rectangular frame, waste materials generated in the slicing process are filtered out through the filter plate, and filter holes are uniformly formed in the filter plate; a bottom bump is arranged at the bottom of the rectangular frame, a butting block is arranged at the bottom of the bottom bump, the butting block is arranged on the concave seat, a strip-shaped opening for the butting block to slide back and forth is formed in the concave seat, and the butting block penetrates through the strip-shaped opening; the bottom lug is provided with telescopic struts at two ends, the end parts of the telescopic struts are connected with the concave seats, and reset springs are sleeved outside the telescopic struts.
Further, the concave seat surface is equipped with the set-square, be equipped with driving motor on the set-square surface, driving motor's output and stirring piece are connected, stirring piece surface has the promotion portion, stirring piece rotates under driving motor's drive and is intermittent type nature contact action with end lug.
Furthermore, turning plates are arranged on two sides of the top of the rectangular frame and are controlled to rotate through a rotator, and the turning plates rotate around one side of the top of the rectangular frame and are used for recycling the sputtered processing waste.
Furthermore, the two sides of the top of the rectangular frame are provided with guide rails, the guide rails are provided with movable sliding tables, the top of each sliding table is provided with a recovery box, one side of each recovery box is provided with a suction unit communicated with the recovery box, and the bottom of each sliding table is provided with a flared recovery cover positioned above the filter plate.
Further, rectangle frame one end is equipped with the bar dog, the bar dog is connected with filter one end, just the bar dog surface is equipped with the pull rod, filter and rectangle frame inner wall sliding connection.
Furthermore, the surface of the concave seat is symmetrically provided with connecting support rods, the end parts of the connecting support rods are provided with concave support rods, and the top ends of the concave support rods are connected with the surface of the lifting platform.
Further, the total length of the horizontal expansion of the filter plate and the overturning plate is more than 1.5 times of the width of the polysilicon block, and the overturning angle of the overturning plate ranges from 0 to 60 degrees.
Has the advantages that: according to the invention, the recovery unit is arranged to recover the waste materials generated during cutting of the polycrystalline silicon block in real time, the shifting block is driven to rotate to be in contact with the abutting block and pushed to one side along the concave seat, so that the bottom lug drives the rectangular frame to move in the same direction, the telescopic supporting rods on one side are compressed, and when the shifting block rotates to be separated from the abutting block, the telescopic supporting rods on the two sides and the reset spring drive the rectangular frame to move transversely along the concave seat repeatedly, so that the filter plate can efficiently filter out the waste materials and cannot cause blockage.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural diagram of a slicing unit according to the present invention;
FIG. 3 is a schematic view of the structure of the recovery unit according to the present invention;
FIG. 4 is an enlarged view of the structure at A in FIG. 3 according to the present invention.
In the figure: 100. an equipment housing; 200. a slicing unit; 201. a polycrystalline silicon block; 202. a base plate; 203. a T-shaped positioning block; 204. a lifting platform; 205. a wire guide roller; 206. a diamond wire; 300. a recovery unit; 301. a rectangular frame; 302. a filter plate; 303. a bottom bump; 304. a butting block; 305. a concave seat; 306. a strip-shaped opening; 307. a telescopic strut; 308. a return spring; 309. a set square; 310. a shifting block; 311. a drive motor; 312. connecting a support rod; 313. a concave strut; 314. a guide rail; 315. a sliding table; 316. a recycling bin; 317. a suction unit; 318. a flared recovery hood; 319. a strip-shaped stop block; 320. a pull rod; 321. turning the plate; 322. a rotator.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 and 2, the invention provides a polysilicon slice slicing device with recyclable waste, which comprises a device housing 100, a slicing unit 200 and a recycling unit 300, wherein the slicing unit 200 is arranged inside the device housing 100, the slicing unit 200 comprises a backing plate 202, a polysilicon block 201 is arranged at the bottom of the backing plate 202, a T-shaped positioning block 203 is arranged at the top of the backing plate 202, the T-shaped positioning block 203 is arranged on a lifting table 204, wire guide rollers 205 are arranged at two sides inside the device housing 100, and diamond wires 206 are densely wound on the wire guide rollers 205;
the recovery unit 300 is disposed below the polycrystalline silicon block 201, and waste materials generated in the slicing process are recovered by the recovery unit 300.
As shown in figure 3 and figure 4, the recovery unit 300 comprises a rectangular frame 301, a filter plate 302 is arranged in the rectangular frame 301, waste materials generated in the slicing process are filtered out through the filter plate 302, and filter holes are uniformly formed in the filter plate 302.
The bottom of the rectangular frame 301 is provided with a bottom bump 303, the bottom of the bottom bump 303 is provided with a butt joint block 304, the butt joint block 304 is arranged on the concave base 305, the concave base 305 is provided with a bar-shaped opening 306 for the butt joint block 304 to slide back and forth, and the butt joint block 304 passes through the bar-shaped opening 306.
The both ends of end lug boss 303 are equipped with telescopic strut 307, telescopic strut 307 tip is connected with concave type seat 305, and the outside cover of telescopic strut 307 is equipped with reset spring 308, it rotates and contacts with butt piece 304 to order to dial movable block 310, promote it to one side along concave type seat 305, make end lug boss 303 drive rectangular frame 301 syntropy and move, compress the telescopic strut 307 of one side, and when dialling movable block 310 and rotate and break away from with butt piece 304, the telescopic strut 307 and the reset spring 308 of both sides order to rectangle frame 301 and traverse along concave type seat 305 repeatedly, make the filter 302 can the efficient filter out the waste material and can not lead to the problem of jam.
The surface of the concave seat 305 is provided with a triangular plate 309, the surface of the triangular plate 309 is provided with a driving motor 311, the output end of the driving motor 311 is connected with a toggle block 310, the surface of the toggle block 310 is provided with a pushing part, the toggle block 310 is driven by the driving motor 311 to rotate and intermittently contact with the bottom bump 303, when the toggle block 310 rotates to be separated from the abutting block 304, the telescopic supporting rods 307 and the reset springs 308 on the two sides drive the rectangular frame 301 to repeatedly move transversely along the concave seat 305, and the filtering efficiency is improved.
As shown in fig. 3 and 4, turning plates 321 are disposed on two sides of the top of the rectangular frame 301, the turning plates 321 are controlled to rotate by the rotator 322, and the turning plates 321 rotate around a single side of the top of the rectangular frame 301 for recycling the sputtered processing waste.
The surface of the concave seat 305 is symmetrically provided with connecting support rods 312, the end part of the connecting support rod 312 is provided with a concave support rod 313, the top end of the concave support rod 313 is connected with the surface of the lifting table 204, the filter plate 302 moves along with the movement of the lifting table 204 through the connecting support rod 312 and the concave support rod 313, so that the filter plate 302 always keeps a constant distance from the polycrystalline silicon block 201, and the recovery efficiency of waste materials generated during cutting can be improved.
The total length of the horizontal expansion of the filter plate 302 and the flipping plate 321 is greater than 1.5 times the width of the polysilicon block 201, and the flipping angle of the flipping plate 321 ranges from 0 to 60 °.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The utility model provides a polycrystalline silicon chip section equipment that waste material is recoverable which characterized in that: the slicing device comprises an equipment shell (100), a slicing unit (200) and a recovery unit (300), wherein the slicing unit (200) is arranged inside the equipment shell (100), the slicing unit (200) comprises a base plate (202), a polycrystalline silicon block (201) is arranged at the bottom of the base plate (202), a T-shaped positioning block (203) is arranged at the top of the base plate (202), the T-shaped positioning block (203) is arranged on a lifting table (204), wire guide rollers (205) are arranged on two sides inside the equipment shell (100), and diamond wires (206) are densely wound on the wire guide rollers (205); the recovery unit (300) is arranged below the polycrystalline silicon block (201), and waste materials generated in the slicing process are recovered through the recovery unit (300).
2. The scrap-recyclable polycrystalline silicon wafer slicing apparatus according to claim 1, wherein: retrieve unit (300) and include rectangle frame (301), be equipped with filter (302) in rectangle frame (301), filter the waste material that the in-process produced of cutting into slices through filter (302) and filter out, the filtration pore has evenly been seted up on filter (302), rectangle frame (301) bottom is equipped with end lug (303), end lug (303) bottom is equipped with butt piece (304), butt piece (304) are located on concave seat (305), set up on concave seat (305) and supply to butt piece (304) bar mouth (306) of reciprocating sliding, butt piece (304) pass bar mouth (306) and set up, end lug (303) both ends are equipped with telescopic strut (307), telescopic strut (307) tip is connected with concave seat (305), just telescopic strut (307) outside cover is equipped with reset spring (308).
3. The scrap-recyclable polycrystalline silicon wafer slicing apparatus according to claim 2, wherein: concave type seat (305) surface is equipped with set-square (309), set-square (309) is equipped with driving motor (311) on the surface, the output and the stirring piece (310) of driving motor (311) are connected, stirring piece (310) surface has the promotion portion, stirring piece (310) rotate and do intermittent type nature contact action with end lug (303) under driving motor's (311) drive.
4. The scrap-recyclable polycrystalline silicon wafer slicing apparatus according to claim 2, wherein: turning plates (321) are arranged on two sides of the top of the rectangular frame (301), the turning plates (321) are controlled to rotate through rotating devices (322), and the turning plates (321) rotate around one side of the top of the rectangular frame (301) and are used for recycling sputtering machining waste.
5. The scrap-recyclable polycrystalline silicon wafer slicing apparatus according to claim 2, wherein: the improved filter plate is characterized in that guide rails (314) are arranged on two sides of the top of the rectangular frame (301), a movable sliding table (315) is arranged on the guide rails (314), a recovery box (316) is arranged at the top of the sliding table (315), a suction unit (317) communicated with the recovery box (316) is arranged on one side of the recovery box (316), and a flared recovery cover (318) located above the filter plate (302) is arranged at the bottom of the sliding table (315).
6. The scrap-recyclable polycrystalline silicon wafer slicing apparatus according to claim 2, wherein: rectangle frame (301) one end is equipped with bar dog (319), bar dog (319) are connected with filter (302) one end, just bar dog (319) surface is equipped with pull rod (320), filter (302) and rectangle frame (301) inner wall sliding connection.
7. The scrap-recyclable polycrystalline silicon wafer slicing apparatus according to claim 2, wherein: the surface of the concave seat (305) is symmetrically provided with connecting support rods (312), the end parts of the connecting support rods (312) are provided with concave support rods (313), and the top ends of the concave support rods (313) are connected with the surface of the lifting platform (204).
8. The scrap-recyclable polycrystalline silicon wafer slicing apparatus according to claim 4, wherein: the total length of the horizontal expansion of the filter plate (302) and the turning plate (321) is more than 1.5 times of the width of the polysilicon block (201), and the turning angle range of the turning plate (321) is 0-60 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111660237.9A CN114347278B (en) | 2021-12-30 | 2021-12-30 | Polycrystalline silicon wafer slicing equipment with recyclable waste |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111660237.9A CN114347278B (en) | 2021-12-30 | 2021-12-30 | Polycrystalline silicon wafer slicing equipment with recyclable waste |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114347278A true CN114347278A (en) | 2022-04-15 |
| CN114347278B CN114347278B (en) | 2024-02-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111660237.9A Active CN114347278B (en) | 2021-12-30 | 2021-12-30 | Polycrystalline silicon wafer slicing equipment with recyclable waste |
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| CN (1) | CN114347278B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012024866A (en) * | 2010-07-21 | 2012-02-09 | Sumco Corp | Method of collecting wire saw cutting sludge and device therefor |
| EP2955745A1 (en) * | 2014-06-11 | 2015-12-16 | Applied Materials Switzerland Sàrl | Wafer cleaning system |
| CN107030907A (en) * | 2017-03-17 | 2017-08-11 | 浙江好亚能源股份有限公司 | The processing method of polysilicon chip |
| CN206392413U (en) * | 2016-11-29 | 2017-08-11 | 扬州金辉光电科技有限公司 | A kind of waste material clean and reuse equipment of polysilicon |
| CN208052173U (en) * | 2018-04-10 | 2018-11-06 | 南安淘之然建材有限公司 | A kind of timber catcher |
| CN212312407U (en) * | 2020-05-19 | 2021-01-08 | 广州柏创机电设备有限公司 | Silicon crystal wire cutting device |
| CN215034588U (en) * | 2020-12-16 | 2021-12-07 | 苏州泰为精密机械有限公司 | Waste recovery device of laser cutting machine |
| CN113828509A (en) * | 2021-09-22 | 2021-12-24 | 江苏广晟健发再生资源股份有限公司 | Rare earth waste recycling and filtering system and filtering method thereof |
-
2021
- 2021-12-30 CN CN202111660237.9A patent/CN114347278B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012024866A (en) * | 2010-07-21 | 2012-02-09 | Sumco Corp | Method of collecting wire saw cutting sludge and device therefor |
| EP2955745A1 (en) * | 2014-06-11 | 2015-12-16 | Applied Materials Switzerland Sàrl | Wafer cleaning system |
| CN206392413U (en) * | 2016-11-29 | 2017-08-11 | 扬州金辉光电科技有限公司 | A kind of waste material clean and reuse equipment of polysilicon |
| CN107030907A (en) * | 2017-03-17 | 2017-08-11 | 浙江好亚能源股份有限公司 | The processing method of polysilicon chip |
| CN208052173U (en) * | 2018-04-10 | 2018-11-06 | 南安淘之然建材有限公司 | A kind of timber catcher |
| CN212312407U (en) * | 2020-05-19 | 2021-01-08 | 广州柏创机电设备有限公司 | Silicon crystal wire cutting device |
| CN215034588U (en) * | 2020-12-16 | 2021-12-07 | 苏州泰为精密机械有限公司 | Waste recovery device of laser cutting machine |
| CN113828509A (en) * | 2021-09-22 | 2021-12-24 | 江苏广晟健发再生资源股份有限公司 | Rare earth waste recycling and filtering system and filtering method thereof |
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| CN114347278B (en) | 2024-02-09 |
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