CN114347278B - Polycrystalline silicon wafer slicing equipment with recyclable waste - Google Patents
Polycrystalline silicon wafer slicing equipment with recyclable waste Download PDFInfo
- Publication number
- CN114347278B CN114347278B CN202111660237.9A CN202111660237A CN114347278B CN 114347278 B CN114347278 B CN 114347278B CN 202111660237 A CN202111660237 A CN 202111660237A CN 114347278 B CN114347278 B CN 114347278B
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- rectangular frame
- polycrystalline silicon
- block
- slicing
- waste
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 34
- 239000010819 recyclable waste Substances 0.000 title description 2
- 238000011084 recovery Methods 0.000 claims abstract description 36
- 239000002699 waste material Substances 0.000 claims abstract description 34
- 238000000034 method Methods 0.000 claims abstract description 7
- 238000003756 stirring Methods 0.000 claims description 13
- 238000004064 recycling Methods 0.000 claims description 7
- 229910003460 diamond Inorganic materials 0.000 claims description 5
- 239000010432 diamond Substances 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 abstract description 7
- 239000002994 raw material Substances 0.000 abstract description 4
- 239000013078 crystal Substances 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Abstract
The invention discloses a piece of polycrystalline silicon wafer slicing equipment with recoverable waste, which belongs to the technical field of polycrystalline silicon wafer processing and comprises an equipment shell, a slicing unit and a recovery unit, wherein the slicing unit is arranged in the equipment shell and comprises a base plate, polycrystalline silicon blocks are arranged at the bottom of the base plate, and a T-shaped positioning block is arranged at the top of the base plate; waste materials generated in the slicing process are recovered through a recovery unit; according to the invention, the recovery unit is arranged to recover the waste materials generated in the cutting process of the polycrystalline silicon blocks in real time, the poking block is driven to rotate and contact with the abutting block, so that the bottom convex block drives the rectangular frame to move in the same direction, the telescopic support rods and the reset springs at the two sides drive the rectangular frame to repeatedly move transversely along the concave seat, the filter plate can efficiently filter out the waste materials without causing the problem of blockage, meanwhile, the filtered out waste materials are synchronously recovered through the sliding table and the flaring recovery cover which move above the filter plate, the filter plate can be pulled out later, and the utilization rate of raw materials is improved.
Description
Technical Field
The invention relates to the technical field of polycrystalline silicon wafer processing, in particular to polycrystalline silicon wafer slicing equipment with recoverable waste.
Background
The production process of the polycrystalline silicon wafer comprises the steps of firstly casting ingot in an ingot furnace to form an ingot, then forming polycrystalline silicon blocks by pulling, cutting and cutting the ingot, then bonding the polycrystalline silicon blocks on a crystal support, finally loading the crystal support carrying the polycrystalline silicon blocks on a slicing machine to slice the crystal support to prepare the polycrystalline silicon wafer, and finally degumming, cleaning and drying to obtain a polycrystalline silicon wafer finished product.
In the processing process of the polycrystalline silicon chip, linear cutting waste materials are generated by friction with the diamond wire, and generally the waste materials are discharged along with water flow during cutting, so that the waste materials cannot be recycled, the utilization rate of raw materials is reduced, and the processing cost is increased.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provides a polycrystalline silicon wafer slicing device with recoverable waste.
The technical scheme is as follows: the slicing device comprises a device shell, slicing units and a recovery unit, wherein the slicing units are arranged in the device shell, each slicing unit comprises a base plate, polycrystalline silicon blocks are arranged at the bottoms of the base plates, T-shaped positioning blocks are arranged at the tops of the base plates, the T-shaped positioning blocks are arranged on a lifting table, wire guide rollers are arranged on two sides of the interior of the device shell, and diamond wires are densely wound on the wire guide rollers; the recovery unit is arranged below the polycrystalline silicon block, and waste materials generated in the slicing process are recovered through the recovery unit.
Further, the recovery unit comprises a rectangular frame, a filter plate is arranged in the rectangular frame, waste materials generated in the slicing process are filtered out through the filter plate, and filter holes are uniformly formed in the filter plate; the bottom of the rectangular frame is provided with an under bump, the bottom of the under bump is provided with an abutting block, the abutting block is arranged on a concave seat, a strip-shaped opening for the abutting block to slide back and forth is arranged on the concave seat, and the abutting block penetrates through the strip-shaped opening; the bottom convex block is characterized in that two ends of the bottom convex block are provided with telescopic supporting rods, the end parts of the telescopic supporting rods are connected with the concave seats, and reset springs are sleeved outside the telescopic supporting rods.
Further, the concave seat surface is provided with a triangle, the triangle surface is provided with a driving motor, the output end of the driving motor is connected with a stirring block, the stirring block surface is provided with a pushing part, and the stirring block rotates under the driving of the driving motor and intermittently contacts with the bottom bump.
Further, the two sides of the top of the rectangular frame are provided with turning plates, the turning plates are controlled to rotate through a rotator, and the turning plates rotate around one side of the top of the rectangular frame for recycling sputtered processing waste.
Further, guide rails are arranged on two sides of the top of the rectangular frame, a movable sliding table is arranged on the guide rails, a recovery box is arranged on the top of the sliding table, a suction unit communicated with the recovery box is arranged on one side of the recovery box, and a flaring recovery cover located above the filter plate is arranged at the bottom of the sliding table.
Further, one end of the rectangular frame is provided with a bar-shaped stop block, the bar-shaped stop block is connected with one end of the filter plate, the surface of the bar-shaped stop block is provided with a pull rod, and the filter plate is in sliding connection with the inner wall of the rectangular frame.
Further, the concave seat surface symmetry is equipped with the connection branch, the connection branch tip is equipped with concave branch, concave branch top and elevating platform surface connection.
Further, the horizontal unfolding total length of the filter plate and the turning plate is larger than 1.5 times of the width of the polycrystalline silicon block, and the turning angle range of the turning plate is 0-60 degrees.
The beneficial effects are that: according to the invention, the recycling unit is arranged to recycle the waste materials generated in the cutting process of the polycrystalline silicon blocks in real time, the poking block is driven to rotate and contact with the abutting block, the poking block is driven to push the poking block to one side along the concave seat, the rectangular frame is driven by the bottom convex block to move in the same direction, the telescopic support rods on one side are compressed, and when the poking block rotates and is separated from the abutting block, the rectangular frame is driven by the telescopic support rods on two sides and the reset spring to repeatedly move along the concave seat, so that the waste materials can be filtered out efficiently without causing the problem of blockage, meanwhile, the filtered waste materials can be recycled synchronously through the sliding table and the flaring type recycling cover which move above the filter plate, the filter plate can be pulled out later, the filter plate is cleaned further, and the utilization rate of raw materials is improved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic view of a slicing unit structure according to the present invention;
FIG. 3 is a schematic diagram of the recovery unit structure of the present invention;
fig. 4 is an enlarged schematic view of the structure a in fig. 3 according to the present invention.
In the figure: 100. an equipment housing; 200. a slicing unit; 201. a block of polysilicon; 202. a backing plate; 203. a T-shaped positioning block; 204. a lifting table; 205. a wire guide roller; 206. a diamond wire; 300. a recovery unit; 301. a rectangular frame; 302. a filter plate; 303. an under bump; 304. an abutment block; 305. a concave seat; 306. a strip-shaped opening; 307. a telescopic strut; 308. a return spring; 309. a triangle; 310. a poking block; 311. a driving motor; 312. a connecting strut; 313. a concave support rod; 314. a guide rail; 315. a sliding table; 316. a recovery box; 317. a suction unit; 318. a flared recovery hood; 319. a bar-shaped stop block; 320. a pull rod; 321. turning over the plate; 322. a rotator.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1 and 2, the invention provides a waste recyclable polysilicon slice slicing device, which comprises a device housing 100, a slicing unit 200 and a recycling unit 300, wherein the slicing unit 200 is arranged in the device housing 100, the slicing unit 200 comprises a backing plate 202, a polysilicon block 201 is arranged at the bottom of the backing plate 202, a T-shaped positioning block 203 is arranged at the top of the backing plate 202, the T-shaped positioning block 203 is arranged on a lifting table 204, two sides of the interior of the device housing 100 are provided with wire guide rollers 205, and diamond wires 206 are densely wound on the wire guide rollers 205;
the recovery unit 300 is disposed below the polycrystalline silicon chunk 201, and waste materials generated during slicing are recovered by the recovery unit 300.
The recycling unit 300 shown in fig. 3 and fig. 4 comprises a rectangular frame 301, a filter plate 302 is arranged in the rectangular frame 301, waste materials generated in the slicing process are filtered out through the filter plate 302, and filter holes are uniformly formed in the filter plate 302.
The bottom of the rectangular frame 301 is provided with a bottom bump 303, the bottom of the bottom bump 303 is provided with an abutting block 304, the abutting block 304 is arranged on a concave seat 305, a strip-shaped opening 306 for the abutting block 304 to slide reciprocally is arranged on the concave seat 305, and the abutting block 304 passes through the strip-shaped opening 306.
The bottom convex block 303 is provided with the telescopic supporting rods 307 at two ends, the end parts of the telescopic supporting rods 307 are connected with the concave seat 305, the reset springs 308 are sleeved outside the telescopic supporting rods 307, the stirring block 310 is driven to rotate and contact with the abutting block 304, the stirring block is pushed to one side along the concave seat 305, the bottom convex block 303 drives the rectangular frame 301 to move in the same direction, the telescopic supporting rods 307 at one side are compressed, and when the stirring block 310 rotates and is separated from the abutting block 304, the telescopic supporting rods 307 and the reset springs 308 at two sides drive the rectangular frame 301 to repeatedly move transversely along the concave seat 305, so that the filter plate 302 can filter waste efficiently and the problem of blockage cannot be caused.
The triangular plate 309 is arranged on the surface of the concave seat 305, the driving motor 311 is arranged on the surface of the triangular plate 309, the output end of the driving motor 311 is connected with the stirring block 310, the surface of the stirring block 310 is provided with a pushing part, the stirring block 310 rotates under the driving of the driving motor 311 and makes intermittent contact with the bottom bump 303, and when the stirring block 310 rotates to be separated from the abutting block 304, the telescopic support rods 307 and the reset springs 308 on two sides drive the rectangular frame 301 to repeatedly move transversely along the concave seat 305, so that the filtering efficiency is improved.
As shown in fig. 3 and 4, turning plates 321 are disposed on two sides of the top of the rectangular frame 301, the turning plates 321 are controlled to rotate by a rotator 322, and the turning plates 321 rotate around a single side of the top of the rectangular frame 301 for recycling sputtered processing waste.
The guide rails 314 are arranged on two sides of the top of the rectangular frame 301, the movable sliding table 315 is arranged on the guide rails 314, the recovery box 316 is arranged on the top of the sliding table 315, the pumping unit 317 communicated with the recovery box 316 is arranged on one side of the recovery box 316, the flaring recovery cover 318 arranged above the filter plate 302 is arranged at the bottom of the sliding table 315, filtered waste is synchronously recovered through the sliding table 315 moving above the filter plate 302 and the flaring recovery cover 318, attractive force is generated above the flaring recovery cover 318, filtered waste on the filter plate 302 is sucked into the recovery box through the pumping unit 317, and the recovery box 316 repeatedly moves above the filter plate 302 along with the sliding table 315, so that filtered waste can be continuously and timely recovered.
The rectangle frame 301 one end is equipped with bar dog 319, and bar dog 319 is connected with filter 302 one end, and bar dog 319 surface is equipped with pull rod 320, and filter 302 and rectangle frame 301 inner wall sliding connection still accessible pull rod 320 pulls out bar dog 319 and filter 302 at the follow-up, carries out further recovery to the waste material that remains on the filter 302, has improved the utilization ratio of raw materials.
The surface of the concave seat 305 is symmetrically provided with a connecting support rod 312, the end part of the connecting support rod 312 is provided with a concave support rod 313, the top end of the concave support rod 313 is connected with the surface of the lifting platform 204, and the filter plate 302 moves along with the movement of the lifting platform 204 through the connecting support rod 312 and the concave support rod 313, so that the filter plate 302 always keeps a constant distance from the polycrystalline silicon block 201, and the recovery efficiency of waste generated during cutting can be improved.
The horizontal unfolding total length of the filter plate 302 and the flip plate 321 is larger than 1.5 times of the width of the polycrystalline silicon block 201, and the flip angle of the flip plate 321 is in the range of 0-60 degrees.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides a recoverable polycrystalline silicon piece section equipment of waste material which characterized in that: the device comprises a device shell (100), a slicing unit (200) and a recovery unit (300), wherein the slicing unit (200) is arranged inside the device shell (100), the slicing unit (200) comprises a base plate (202), a polycrystalline silicon block (201) is arranged at the bottom of the base plate (202), a T-shaped positioning block (203) is arranged at the top of the base plate (202), the T-shaped positioning block (203) is arranged on a lifting table (204), wire guide rollers (205) are arranged on two sides inside the device shell (100), and diamond wires (206) are densely wound on the wire guide rollers (205); the recovery unit (300) is arranged below the polycrystalline silicon block (201), and waste materials generated in the slicing process are recovered through the recovery unit (300);
the recovery unit (300) comprises a rectangular frame (301), a filter plate (302) is arranged in the rectangular frame (301), waste materials generated in the slicing process are filtered out through the filter plate (302), filter holes are uniformly formed in the filter plate (302), an under bump (303) is arranged at the bottom of the rectangular frame (301), an abutting block (304) is arranged at the bottom of the under bump (303), the abutting block (304) is arranged on a concave seat (305), a strip-shaped opening (306) for the abutting block (304) to slide back and forth is formed in the concave seat (305), the abutting block (304) penetrates through the strip-shaped opening (306), telescopic struts (307) are arranged at two ends of the under bump (303), the end parts of the telescopic struts (307) are connected with the concave seat (305), and a reset spring (308) is sleeved outside the telescopic struts (307).
Guide rails (314) are arranged on two sides of the top of the rectangular frame (301), a movable sliding table (315) is arranged on the guide rails (314), a recovery box (316) is arranged on the top of the sliding table (315), a suction unit (317) communicated with the recovery box (316) is arranged on one side of the recovery box, and a flaring recovery cover (318) positioned above the filter plate (302) is arranged at the bottom of the sliding table (315);
the surface of the concave seat (305) is symmetrically provided with a connecting support rod (312), the end part of the connecting support rod (312) is provided with a concave support rod (313), and the top end of the concave support rod (313) is connected with the surface of the lifting platform (204).
2. A waste recyclable multicrystalline silicon wafer dicing apparatus as specified in claim 1, wherein: the concave seat (305) surface is equipped with set square (309), be equipped with driving motor (311) on set square (309) surface, driving motor (311) output is connected with stir piece (310), stir piece (310) surface and have the promotion portion, stir piece (310) and rotate under driving motor (311) drive and do intermittent type contact action with bottom lug (303).
3. A waste recyclable multicrystalline silicon wafer dicing apparatus as specified in claim 1, wherein: the device is characterized in that turning plates (321) are arranged on two sides of the top of the rectangular frame (301), the turning plates (321) are controlled to rotate through a rotator (322), and the turning plates (321) rotate around one side of the top of the rectangular frame (301) for recycling sputtered processing waste.
4. A waste recyclable multicrystalline silicon wafer dicing apparatus as specified in claim 1, wherein: the rectangular frame (301) one end is equipped with bar dog (319), bar dog (319) are connected with filter (302) one end, just bar dog (319) surface is equipped with pull rod (320), filter (302) and rectangular frame (301) inner wall sliding connection.
5. A waste recyclable multicrystalline silicon wafer dicing apparatus as specified in claim 3, wherein: the horizontal unfolding total length of the filter plate (302) and the turning plate (321) is larger than 1.5 times of the width of the polycrystalline silicon block (201), and the turning angle range of the turning plate (321) is 0-60 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111660237.9A CN114347278B (en) | 2021-12-30 | 2021-12-30 | Polycrystalline silicon wafer slicing equipment with recyclable waste |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111660237.9A CN114347278B (en) | 2021-12-30 | 2021-12-30 | Polycrystalline silicon wafer slicing equipment with recyclable waste |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114347278A CN114347278A (en) | 2022-04-15 |
| CN114347278B true CN114347278B (en) | 2024-02-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111660237.9A Active CN114347278B (en) | 2021-12-30 | 2021-12-30 | Polycrystalline silicon wafer slicing equipment with recyclable waste |
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| Country | Link |
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| CN (1) | CN114347278B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012024866A (en) * | 2010-07-21 | 2012-02-09 | Sumco Corp | Method of collecting wire saw cutting sludge and device therefor |
| EP2955745A1 (en) * | 2014-06-11 | 2015-12-16 | Applied Materials Switzerland Sàrl | Wafer cleaning system |
| CN107030907A (en) * | 2017-03-17 | 2017-08-11 | 浙江好亚能源股份有限公司 | The processing method of polysilicon chip |
| CN206392413U (en) * | 2016-11-29 | 2017-08-11 | 扬州金辉光电科技有限公司 | A kind of waste material clean and reuse equipment of polysilicon |
| CN208052173U (en) * | 2018-04-10 | 2018-11-06 | 南安淘之然建材有限公司 | A kind of timber catcher |
| CN212312407U (en) * | 2020-05-19 | 2021-01-08 | 广州柏创机电设备有限公司 | Silicon crystal wire cutting device |
| CN215034588U (en) * | 2020-12-16 | 2021-12-07 | 苏州泰为精密机械有限公司 | Waste recovery device of laser cutting machine |
| CN113828509A (en) * | 2021-09-22 | 2021-12-24 | 江苏广晟健发再生资源股份有限公司 | Rare earth waste recycling and filtering system and filtering method thereof |
-
2021
- 2021-12-30 CN CN202111660237.9A patent/CN114347278B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012024866A (en) * | 2010-07-21 | 2012-02-09 | Sumco Corp | Method of collecting wire saw cutting sludge and device therefor |
| EP2955745A1 (en) * | 2014-06-11 | 2015-12-16 | Applied Materials Switzerland Sàrl | Wafer cleaning system |
| CN206392413U (en) * | 2016-11-29 | 2017-08-11 | 扬州金辉光电科技有限公司 | A kind of waste material clean and reuse equipment of polysilicon |
| CN107030907A (en) * | 2017-03-17 | 2017-08-11 | 浙江好亚能源股份有限公司 | The processing method of polysilicon chip |
| CN208052173U (en) * | 2018-04-10 | 2018-11-06 | 南安淘之然建材有限公司 | A kind of timber catcher |
| CN212312407U (en) * | 2020-05-19 | 2021-01-08 | 广州柏创机电设备有限公司 | Silicon crystal wire cutting device |
| CN215034588U (en) * | 2020-12-16 | 2021-12-07 | 苏州泰为精密机械有限公司 | Waste recovery device of laser cutting machine |
| CN113828509A (en) * | 2021-09-22 | 2021-12-24 | 江苏广晟健发再生资源股份有限公司 | Rare earth waste recycling and filtering system and filtering method thereof |
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| CN114347278A (en) | 2022-04-15 |
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