CN114341392B - Vacuum carburizing treatment method and manufacturing method of carburized parts - Google Patents
Vacuum carburizing treatment method and manufacturing method of carburized parts Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/06—Surface hardening
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/20—Carburising
- C23C8/22—Carburising of ferrous surfaces
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Abstract
Description
技术领域Technical field
本发明涉及真空渗碳处理方法和渗碳部件的制造方法。需要说明的是,本说明书中,将经渗碳处理的钢部件称为“渗碳部件”。The present invention relates to a vacuum carburizing treatment method and a manufacturing method of carburized parts. It should be noted that in this specification, a carburized steel part is called a "carburized part."
背景技术Background technique
谋求高的面疲劳强度的钢部件是对于钢材实施表面硬化处理来制造的。在表面硬化处理方法之一中具有真空渗碳处理方法。真空渗碳处理方法具备渗碳工序和扩散工序。渗碳工序中,导入作为烃气体的渗碳气体,提高加热至渗碳温度的钢材的表面的碳浓度。烃气体例如为乙炔、丙烷等。在扩散工序中,渗碳工序后,停止渗碳气体的导入,使碳向钢材的表层的深度方向扩散。通过调整渗碳工序以及扩散工序的时间等,从而可以控制钢材的表层的碳浓度。Steel parts requiring high surface fatigue strength are manufactured by subjecting steel materials to surface hardening treatment. One of the surface hardening treatment methods is a vacuum carburizing treatment method. The vacuum carburizing treatment method includes a carburizing process and a diffusion process. In the carburizing process, a carburizing gas which is a hydrocarbon gas is introduced to increase the carbon concentration on the surface of the steel material heated to the carburizing temperature. Examples of hydrocarbon gases include acetylene, propane, and the like. In the diffusion process, after the carburizing process, the introduction of the carburizing gas is stopped, and carbon is diffused in the depth direction of the surface layer of the steel material. By adjusting the time of the carburizing process and the diffusion process, etc., the carbon concentration in the surface layer of the steel material can be controlled.
然而,作为渗碳气体的烃气体在热力学上是不稳定的。因此,渗碳温度高的情况下,渗碳气体容易分解为碳以及氢等。渗碳温度高的情况下进而渗碳气体分子活跃地运动。由于活跃的运动,渗碳气体分子彼此以高速碰撞,渗碳气体分解。由于渗碳气体的分解,产生煤、焦油。此时,表面碳浓度以及渗碳深度分布不均。因此,不能将渗碳部件的表层保持为固定的品质。因此,谋求在真空渗碳处理方法中,抑制渗碳部件的表面的碳浓度的分布不均、以及表层的渗碳深度的分布不均。在以下的说明中,将渗碳部件中的表面的碳浓度的分布不均、以及渗碳部件的表层的渗碳深度的分布不均称为“渗碳分布不均”。However, hydrocarbon gas as carburizing gas is thermodynamically unstable. Therefore, when the carburizing temperature is high, the carburizing gas is easily decomposed into carbon, hydrogen, etc. When the carburizing temperature is high, the carburizing gas molecules move actively. Due to the active movement, carburizing gas molecules collide with each other at high speed, and the carburizing gas decomposes. Due to the decomposition of carburizing gas, coal and tar are produced. At this time, the surface carbon concentration and carburization depth are unevenly distributed. Therefore, the surface layer of the carburized component cannot be maintained at a constant quality. Therefore, in the vacuum carburizing treatment method, it is desired to suppress the uneven distribution of the carbon concentration on the surface of the carburized component and the uneven distribution of the carburization depth in the surface layer. In the following description, the uneven distribution of carbon concentration on the surface of the carburized component and the uneven distribution of the carburization depth in the surface layer of the carburized component will be referred to as "carburizing uneven distribution."
日本特开平8-325701号公报(专利文献1)、日本特开2016-148091号公报(专利文献2)、日本特开2002-173759号公报(专利文献3)、日本特开2005-350729号公报(专利文献4)和日本特开2012-7240号公报(专利文献5)中提出了抑制渗碳分布不均的技术。Japanese Patent Application Laid-Open No. 8-325701 (Patent Document 1), Japanese Patent Application Laid-Open No. 2016-148091 (Patent Document 2), Japanese Patent Application Laid-Open No. 2002-173759 (Patent Document 3), Japanese Patent Application Laid-Open No. 2005-350729 (Patent Document 4) and Japanese Patent Application Publication No. 2012-7240 (Patent Document 5) propose techniques for suppressing uneven distribution of carburization.
专利文献1中所记载的真空渗碳处理方法是将由钢材形成的工件在真空渗碳炉的加热室内进行真空加热,并且向加热室内供给渗碳气体来进行渗碳处理。在该真空渗碳处理方法中,作为渗碳气体使用气态的链式不饱和烃。并且,将加热室内设为1kPa以下的真空状态实施渗碳处理。专利文献1记载了,由此抑制煤的产生,并且可以均匀地渗碳。The vacuum carburizing treatment method described in Patent Document 1 vacuum-heats a workpiece made of steel in a heating chamber of a vacuum carburizing furnace, and supplies carburizing gas into the heating chamber to perform carburizing. In this vacuum carburizing treatment method, gaseous chain unsaturated hydrocarbons are used as the carburizing gas. Furthermore, the carburizing process is performed by setting the heating chamber to a vacuum state of 1 kPa or less. Patent Document 1 describes that this suppresses the generation of coal and enables uniform carburization.
在专利文献2中所记载的真空渗碳处理方法中,向进行了减压的气氛的渗碳室喷射渗碳气体,从而对在渗碳室中配置的被处理物进行渗碳。该真空渗碳处理方法中,基于被处理物的渗碳室中的装载状态下的容积、渗碳室的体积、被处理物的总表面积、以及基于渗碳气体的种类而设定的常数,从而算出向渗碳室喷射的渗碳气体的气体喷射量。并且,将所算出的气体喷射量的渗碳气体喷射到渗碳室中。专利文献2记载了,由此可以防止点状的过量渗碳产生。In the vacuum carburizing treatment method described in Patent Document 2, a carburizing gas is injected into a carburizing chamber in a reduced-pressure atmosphere to carburize the object to be processed placed in the carburizing chamber. In this vacuum carburizing treatment method, a constant is set based on the volume of the carburizing chamber in the loaded state of the object to be processed, the volume of the carburizing chamber, the total surface area of the object to be processed, and the type of carburizing gas. Thereby, the gas injection amount of the carburizing gas injected into the carburizing chamber is calculated. Then, the calculated gas injection amount of carburizing gas is injected into the carburizing chamber. Patent Document 2 describes that this can prevent point-like excessive carburization from occurring.
在专利文献3中所记载的真空渗碳气氛气体控制系统中,将丙烷气体设为渗碳气体。在该控制系统中,向设置有被渗碳处理材的真空渗碳炉内供给渗碳气体。并且,由于渗碳气体的热分解反应而产生的碳向被渗碳处理材中固溶以及扩散,从而进行被渗碳处理材的渗碳处理。在该控制系统中,通过对由于该热分解反应而产生的氢气的分压进行渗碳处理中实时测量。并且,基于其的测量值,在实时对供给到炉内的渗碳气体量进行调整控制。专利文献3记载了,由此可以稳定地产生高品质的渗碳钢。In the vacuum carburizing atmosphere gas control system described in Patent Document 3, propane gas is used as the carburizing gas. In this control system, carburizing gas is supplied into the vacuum carburizing furnace in which the material to be carburized is installed. In addition, the carbon generated by the thermal decomposition reaction of the carburizing gas is dissolved and diffused into the material to be carburized, and the carburizing treatment of the material to be carburized is performed. In this control system, the partial pressure of hydrogen generated due to the thermal decomposition reaction is measured in real time during the carburizing process. Furthermore, based on the measured value, the amount of carburizing gas supplied to the furnace is adjusted and controlled in real time. Patent Document 3 describes that high-quality carburized steel can be stably produced by this.
在专利文献4中所记载的真空渗碳处理方法中,通过渗碳深度和表面碳浓度,基于材料的内部扩散而算出渗碳处理所需要的渗碳气体的理论流量V与渗碳时间t的关系V=f(t)。并且,在渗碳工序的渗碳前期中,供给与理论流量V相比足够多并且不产生熏黑的渗碳时流量V1。进而,在接续渗碳前期的渗碳后期,供给与理论流量V相比少的扩散时流量V2。专利文献4记载了,由此可以防止煤的产生并且减少渗碳体的残留。In the vacuum carburizing method described in Patent Document 4, the theoretical flow rate V of the carburizing gas required for the carburizing process and the carburizing time t are calculated based on the carburizing depth and surface carbon concentration based on the internal diffusion of the material. The relationship V=f(t). Furthermore, in the early stage of carburization in the carburizing process, the carburizing flow rate V1 is supplied which is sufficiently larger than the theoretical flow rate V and does not cause blackening. Furthermore, in the later stage of carburization that follows the early stage of carburization, a diffusion-time flow rate V2 that is smaller than the theoretical flow rate V is supplied. Patent Document 4 describes that this can prevent the generation of coal and reduce the remaining cementite.
在专利文献5中记载的真空渗碳方法中,基于碳对被处理品内部的扩散,求出渗碳处理所需的渗碳气体的理论流量的时间变化。然后,基于理论流量的时间变化,将由理论流量下的渗碳反应产生的氢相对于处理室内的总压力的分压比定义为理论氢分压比。求出理论氢分压比的时间变化,比较理论氢分压比的时间变化与实际的渗碳处理时的相对于处理室内的总压力的氢分压比的时间变化。基于这些近似程度,判定同一操作批次内的渗碳品质的分布不均程度。专利文献5中记载了,由此可以提高渗碳部件的品质的重现性,降低渗碳部件的品质分布不均。In the vacuum carburizing method described in Patent Document 5, the temporal change in the theoretical flow rate of the carburizing gas required for the carburizing treatment is determined based on the diffusion of carbon into the interior of the workpiece. Then, based on the time change of the theoretical flow rate, the partial pressure ratio of the hydrogen produced by the carburizing reaction under the theoretical flow rate relative to the total pressure in the treatment chamber is defined as the theoretical hydrogen partial pressure ratio. The time change of the theoretical hydrogen partial pressure ratio is determined, and the time change of the theoretical hydrogen partial pressure ratio is compared with the time change of the hydrogen partial pressure ratio relative to the total pressure in the treatment chamber during the actual carburizing treatment. Based on these approximations, the degree of uneven distribution of carburizing quality within the same operation batch is determined. Patent Document 5 describes that this can improve the reproducibility of the quality of carburized parts and reduce uneven quality distribution of carburized parts.
现有技术文献existing technical documents
专利文献patent documents
专利文献1:日本特开平8-325701号公报Patent Document 1: Japanese Patent Application Publication No. 8-325701
专利文献2:日本特开2016-148091号公报Patent Document 2: Japanese Patent Application Publication No. 2016-148091
专利文献3:日本特开2002-173759号公报Patent Document 3: Japanese Patent Application Publication No. 2002-173759
专利文献4:日本特开2005-350729号公报Patent Document 4: Japanese Patent Application Publication No. 2005-350729
专利文献5:日本特开2012-7240号公报Patent Document 5: Japanese Patent Application Publication No. 2012-7240
然而,通过与专利文献1~专利文献5的真空渗碳处理方法不同的其他方法,也可以抑制渗碳分布不均。However, uneven carburization distribution can also be suppressed by a method different from the vacuum carburizing treatment methods of Patent Documents 1 to 5.
发明内容Contents of the invention
发明要解决的问题Invent the problem to be solved
本公开的目的在于,提供:能抑制渗碳分布不均的真空渗碳处理方法和渗碳部件的制造方法。An object of the present disclosure is to provide a vacuum carburizing treatment method and a method for manufacturing carburized parts that can suppress uneven carburization distribution.
用于解决问题的方案solutions to problems
基于本公开的真空渗碳处理方法为在真空渗碳炉内对钢材实施真空渗碳处理的真空渗碳处理方法,所述真空渗碳处理方法具备:The vacuum carburizing treatment method based on the present disclosure is a vacuum carburizing treatment method that performs vacuum carburizing treatment on steel in a vacuum carburizing furnace. The vacuum carburizing treatment method includes:
加热工序,将前述钢材加热至渗碳温度;The heating process is to heat the aforementioned steel to the carburizing temperature;
均热工序,在前述加热工序后,将前述钢材以前述渗碳温度进行均热;Soaking process: after the aforementioned heating process, the aforementioned steel material is soaked at the aforementioned carburizing temperature;
渗碳工序,在前述均热工序后,边将乙炔气体即渗碳气体供给到前述真空渗碳炉内,边以前述渗碳温度保持前述钢材;In the carburizing process, after the aforementioned soaking process, acetylene gas, that is, carburizing gas, is supplied into the aforementioned vacuum carburizing furnace while maintaining the aforementioned steel material at the aforementioned carburizing temperature;
扩散工序,在前述渗碳工序后,停止前述渗碳气体向前述真空渗碳炉内的供给,以前述渗碳温度保持前述钢材;和,In the diffusion process, after the aforementioned carburizing process, the supply of the aforementioned carburizing gas to the aforementioned vacuum carburizing furnace is stopped, and the aforementioned steel material is maintained at the aforementioned carburizing temperature; and,
淬火工序,对前述扩散工序后的前述钢材实施淬火,The quenching process is to quench the aforementioned steel material after the aforementioned diffusion process,
在前述渗碳工序中,In the aforementioned carburizing process,
将供给到前述真空渗碳炉内的前述渗碳气体的流量定义为实际渗碳气体流量,The flow rate of the carburizing gas supplied into the aforementioned vacuum carburizing furnace is defined as the actual carburizing gas flow rate,
将前述钢材的前述真空渗碳处理所需的前述渗碳气体的流量定义为理论渗碳气体流量,The flow rate of the aforementioned carburizing gas required for the aforementioned vacuum carburizing treatment of the aforementioned steel material is defined as the theoretical carburizing gas flow rate,
将前述渗碳工序的结束时间定义为ta,Define the end time of the aforementioned carburizing process as ta,
将前述渗碳工序开始后乙炔分压成为氢分压的0.8倍以上的最初的时间定义为t0时,Define the first time after the start of the carburizing process when the acetylene partial pressure becomes 0.8 times or more of the hydrogen partial pressure as t0,
前述渗碳工序包括:The aforementioned carburizing process includes:
持续地测定前述真空渗碳炉内的气氛中的前述氢分压和前述乙炔分压,确定前述时间t0的分压测定工序;Continuously measuring the hydrogen partial pressure and the acetylene partial pressure in the atmosphere in the vacuum carburizing furnace, and determining the partial pressure measurement process at the time t0;
从前述渗碳工序开始起至时间t0为止的前期渗碳工序;和,A preliminary carburizing step from the start of the aforementioned carburizing step to time t0; and,
从前述时间t0起至时间ta为止的后期渗碳工序,The post-carburizing process from the aforementioned time t0 to time ta,
在前述前期渗碳工序中,In the aforementioned early carburizing process,
使前述实际渗碳气体流量为时间ta/10时的前述理论渗碳气体流量以上且自前述渗碳工序开始起4秒时刻时的前述理论渗碳气体流量以下,The actual carburizing gas flow rate is set to be greater than the theoretical carburizing gas flow rate at time ta/10 and less than the theoretical carburizing gas flow rate at 4 seconds from the start of the carburizing process,
在前述后期渗碳工序中,In the aforementioned late carburizing process,
将前述前期渗碳工序的前述实际渗碳气体流量定义为FA,将自前述渗碳工序开始时起的时间定义为时间t时,When the actual carburizing gas flow rate in the early carburizing process is defined as FA, and the time from the start of the carburizing process is defined as time t,
使前述时间t0~时间4t0的期间的前述实际渗碳气体流量为FA√(t0/t)以上且FA以下,The actual carburizing gas flow rate during the time t0 to time 4t0 is set to be greater than FA√(t0/t) and less than FA,
使前述时间4t0~前述时间ta的前述实际渗碳气体流量为FA√(t0/t)以上且2FA√(t0/t)以下。The actual carburizing gas flow rate from the time 4t0 to the time ta is set to be FA√(t0/t) or more and 2FA√(t0/t) or less.
基于本公开的渗碳部件的制造方法具备对前述钢材实施上述真空渗碳处理方法的工序。The method for manufacturing a carburized component based on the present disclosure includes a step of subjecting the steel material to the vacuum carburizing treatment method.
发明的效果Effect of invention
本公开的真空渗碳处理方法可以抑制渗碳分布不均。本公开的渗碳部件的制造方法可以制造渗碳分布不均得到抑制的渗碳部件。The vacuum carburizing treatment method of the present disclosure can suppress uneven carburizing distribution. The method of manufacturing a carburized component of the present disclosure can manufacture a carburized component in which uneven carburization distribution is suppressed.
附图说明Description of the drawings
图1为示出通过由使用扩散方程的扩散模拟得到的钢材的表层的碳的扩散通量而算出的、理论渗碳气体流量与时间的关系的一个例子的图。FIG. 1 is a diagram showing an example of the relationship between the theoretical carburizing gas flow rate and time calculated from the diffusion flux of carbon in the surface layer of the steel material obtained by diffusion simulation using the diffusion equation.
图2为示出现有的渗碳工序中的实际渗碳气体流量的经时变化与理论渗碳气体流量的经时变化的图。FIG. 2 is a graph showing the time-dependent change of the actual carburizing gas flow rate and the time-dependent change of the theoretical carburizing gas flow rate in the conventional carburizing process.
图3为示出本实施方式的真空渗碳处理方法的渗碳工序中的、实际渗碳气体流量的经时变化(下图)、和渗碳工序中的真空渗碳炉的气氛中的乙炔分压和氢分压的经时变化(上图)的图。3 is a diagram illustrating changes over time in the actual carburizing gas flow rate in the carburizing step of the vacuum carburizing treatment method of the present embodiment (lower graph), and acetylene in the atmosphere of the vacuum carburizing furnace in the carburizing step. A graph showing the time-dependent changes in partial pressure and hydrogen partial pressure (above).
图4为示出本实施方式的真空渗碳处理方法的热模式的一例的图。FIG. 4 is a diagram showing an example of a thermal mode of the vacuum carburizing treatment method according to this embodiment.
图5为示出本实施方式的真空渗碳处理方法的前期渗碳工序中的气体流量设定值的一例的图。FIG. 5 is a diagram showing an example of a gas flow rate setting value in the preliminary carburizing step of the vacuum carburizing treatment method according to this embodiment.
图6为示出本实施方式的真空渗碳处理方法的气体流量设定值的一例的图。FIG. 6 is a diagram showing an example of a gas flow rate setting value in the vacuum carburizing treatment method of this embodiment.
图7为不同于图6的、示出本实施方式的真空渗碳处理方法的气体流量设定值的一例的图。FIG. 7 is a diagram different from FIG. 6 , showing an example of the gas flow rate setting value of the vacuum carburizing treatment method of this embodiment.
图8为不同于图6和图7的、示出本实施方式的真空渗碳处理方法的气体流量设定值的一例的图。FIG. 8 is a diagram different from FIGS. 6 and 7 , showing an example of a gas flow rate setting value in the vacuum carburizing treatment method of this embodiment.
图9为试验编号1、试验编号5、试验编号7~试验编号12的渗碳工序中的气体流量设定值与气体分析值的示意图。FIG. 9 is a schematic diagram showing gas flow setting values and gas analysis values in the carburizing processes of test numbers 1, 5, and 7 to 12.
图10为试验编号2~试验编号4、试验编号6的渗碳工序中的气体流量设定值与气体分析值的示意图。FIG. 10 is a schematic diagram of the gas flow rate setting value and the gas analysis value in the carburizing process of Test No. 2 to Test No. 4 and Test No. 6. FIG.
图11为试验编号13、试验编号14的渗碳工序中的气体流量设定值与气体分析值的示意图。FIG. 11 is a schematic diagram of the gas flow rate setting value and the gas analysis value in the carburizing process of Test No. 13 and Test No. 14.
图12为试验编号15~试验编号17的渗碳工序中的气体流量设定值与气体分析值的示意图。FIG. 12 is a schematic diagram of the gas flow rate setting value and the gas analysis value in the carburizing process of test numbers 15 to 17.
图13为试验编号18的渗碳工序中的气体流量设定值与气体分析值的示意图。FIG. 13 is a schematic diagram showing the gas flow rate setting value and the gas analysis value in the carburizing process of test number 18.
图14为试验编号19的渗碳工序中的气体流量设定值与气体分析值的示意图。FIG. 14 is a schematic diagram of the gas flow rate setting value and gas analysis value in the carburizing process of test number 19.
图15为试验编号20的渗碳工序中的气体流量设定值与气体分析值的示意图。FIG. 15 is a schematic diagram of the gas flow rate setting value and gas analysis value in the carburizing process of test number 20.
图16为试验编号21的渗碳工序中的气体流量设定值与气体分析值的示意图。FIG. 16 is a schematic diagram showing the gas flow rate setting value and the gas analysis value in the carburizing process of test number 21.
具体实施方式Detailed ways
本发明人等对于抑制真空渗碳处理方法中的渗碳部件中的渗碳分布不均的方法进行了研究。本发明人等最初着眼于存在虽然供给到真空渗碳炉内但是不引起渗碳反应而排气的渗碳气体。不引起渗碳反应的渗碳气体的一部分成为煤,附着于成为真空渗碳处理的对象的钢材。煤成为碳的供给源。因此,钢材中的煤附着的部分中,过剩地供给碳。因此,由于煤的附着而变得容易产生渗碳分布不均。另一方面,如果为了抑制煤的附着而过剩减少渗碳气体流量,则渗碳反应变得不充分。该情况下也变得容易产生渗碳分布不均。The present inventors studied a method of suppressing uneven carburization distribution in carburized parts in a vacuum carburizing treatment method. The present inventors initially focused on the existence of a carburizing gas that is exhausted without causing a carburizing reaction even though it is supplied into a vacuum carburizing furnace. A part of the carburizing gas that does not cause carburizing reaction becomes coal and adheres to the steel material to be subjected to vacuum carburizing treatment. Coal becomes a supply source of carbon. Therefore, carbon is excessively supplied to the portion where coal adheres to the steel material. Therefore, uneven carburization distribution becomes likely to occur due to coal adhesion. On the other hand, if the carburizing gas flow rate is excessively reduced in order to suppress coal adhesion, the carburizing reaction becomes insufficient. In this case, uneven distribution of carburization is also likely to occur.
基于以上的见解,本发明人等着眼于在理论上限定渗碳工序中从真空渗碳炉内的气氛侵入至钢材的表面的渗碳气体的流量。本说明书中,“理论渗碳气体流量”是指,使距离钢材的表面规定的深度位置处的碳浓度为期望浓度所需的渗碳气体流量,且为将全部渗碳气体用于渗碳反应作为前提的渗碳气体流量。本发明人等认为,基于事先限定的理论渗碳气体流量调整实际的真空渗碳处理中供给到真空渗碳炉的渗碳气体的流量(以下,记作实际渗碳气体流量),从而抑制不利于渗碳反应的渗碳气体的量,且可以使渗碳反应没有不足,其结果,可以抑制渗碳分布不均。Based on the above findings, the present inventors focused on theoretically limiting the flow rate of the carburizing gas that invades from the atmosphere in the vacuum carburizing furnace to the surface of the steel material in the carburizing process. In this specification, the "theoretical carburizing gas flow rate" refers to the carburizing gas flow rate required to make the carbon concentration at a predetermined depth position from the surface of the steel material a desired concentration, and refers to the carburizing gas flow rate required to use all the carburizing gas for the carburizing reaction. Carburizing gas flow rate as a prerequisite. The present inventors believe that by adjusting the flow rate of the carburizing gas supplied to the vacuum carburizing furnace during the actual vacuum carburizing process (hereinafter, referred to as the actual carburizing gas flow rate) based on the theoretical carburizing gas flow rate defined in advance, it is possible to suppress inaccuracies. The amount of carburizing gas is favorable for the carburizing reaction, and the carburizing reaction is not insufficient. As a result, uneven distribution of carburizing can be suppressed.
伴有真空渗碳处理的进行,碳浓度的梯度变得缓和,因此,从钢材表面侵入至钢材内部的碳的扩散通量减少。从炉内气氛侵入至钢材的渗碳气体流量随着时间的经过而减少。因此,理论渗碳气体流量成为伴有自渗碳气体的供给开始(渗碳工序开始)的时间经过而变动的函数。理论渗碳气体流量可以基于扩散模拟而求出,也可以根据实验而求出。以下,作为理论渗碳气体流量的确定方法的一例,对基于扩散模拟的理论渗碳气体流量的确定进行说明。但是,理论渗碳气体流量的确定方法如上述不限定于扩散模拟。As the vacuum carburizing process proceeds, the gradient of the carbon concentration becomes gentler, and therefore the diffusion flux of carbon that penetrates from the surface of the steel material into the interior of the steel material decreases. The flow rate of the carburizing gas that invades the steel material from the furnace atmosphere decreases with the passage of time. Therefore, the theoretical carburizing gas flow rate becomes a function that changes with the passage of time from the start of the supply of the carburizing gas (the start of the carburizing process). The theoretical carburizing gas flow rate can be determined based on diffusion simulation or experimentally. Hereinafter, as an example of a method of determining the theoretical carburizing gas flow rate, determination of the theoretical carburizing gas flow rate based on diffusion simulation will be described. However, the method for determining the theoretical carburizing gas flow rate is not limited to diffusion simulation as described above.
[关于理论渗碳气体流量][About theoretical carburizing gas flow rate]
本实施方式的真空渗碳处理方法中作为渗碳气体使用乙炔。乙炔的分解由于作为渗碳对象的钢材的表层处的碳扩散而被控速。亦即,从钢材表面侵入至钢材内部的碳的扩散通量越大,乙炔的分解量越多。需要说明的是,以乙炔以外的渗碳气体进行渗碳的情况下,如后述,设想渗碳反应以外的化学反应。因此,难以适用于本实施方式的真空渗碳处理方法。In the vacuum carburizing treatment method of this embodiment, acetylene is used as the carburizing gas. The decomposition of acetylene is controlled by carbon diffusion in the surface layer of the steel material to be carburized. That is, the greater the diffusion flux of carbon that penetrates from the surface of the steel material into the interior of the steel material, the greater the amount of acetylene decomposed. It should be noted that when carburizing is performed using a carburizing gas other than acetylene, a chemical reaction other than the carburizing reaction is assumed as will be described later. Therefore, it is difficult to apply the vacuum carburizing treatment method of this embodiment.
在真空渗碳处理中,碳在钢材中扩散,亦即,菲克的第1定律成立。将使通过真空渗碳处理距离钢材表面规定的深度位置处的碳浓度为期望浓度所需的渗碳气体(乙炔气体)的流量、且将全部渗碳气体用于渗碳反应作为前提的渗碳气体流量定义为理论渗碳气体流量FT(t)。此处,t为自渗碳工序开始时起的时间。渗碳工序开始时如后述是指,将渗碳气体开始供给到炉内时。FT(t)对应于将侵入至钢材表面的碳流量换算为乙炔气体流量的值。需要说明的是,以下的说明中,将理论气体流量也简记作“FT”。In the vacuum carburizing process, carbon diffuses in the steel, that is, Fick's first law holds true. The flow rate of the carburizing gas (acetylene gas) required to make the carbon concentration at a predetermined depth from the surface of the steel material through vacuum carburizing treatment reach the desired concentration, and the carburizing process is based on the premise that all the carburizing gas is used for the carburizing reaction. The gas flow rate is defined as the theoretical carburizing gas flow rate FT(t). Here, t is the time from the start of the carburizing process. As will be described later, the start of the carburizing process refers to the time when the carburizing gas starts to be supplied into the furnace. FT(t) corresponds to a value converted into an acetylene gas flow rate from the carbon flow rate that invades the steel surface. In addition, in the following description, the theoretical gas flow rate will also be abbreviated as "FT".
例如通过基于使用扩散方程的公知的扩散模拟而计算从钢材表面侵入的碳的扩散通量J(mm·质量%/s)与每单位时间的碳浓度的变化量从而可以算出理论渗碳气体流量FT。具体而言,理论渗碳气体流量可以利用以下的方法而求出。For example, the diffusion flux J (mm·mass %/s) of carbon that invades from the steel material surface and the change amount of carbon concentration per unit time are calculated by a well-known diffusion simulation using a diffusion equation. Thus, the theoretical carburizing gas flow rate FT can be calculated. Specifically, the theoretical carburizing gas flow rate can be obtained by the following method.
在扩散发生的情况(亦即,菲克的第1定律成立的情况)下,从钢材表面侵入的碳的扩散通量J由式(1)定义,每单位时间的碳浓度的变化量由式(2)定义。When diffusion occurs (that is, when Fick's first law holds true), the diffusion flux J of carbon that invades from the steel surface is defined by equation (1), and the change amount of carbon concentration per unit time It is defined by formula (2).
此处,D为钢材中的碳的扩散系数(mm2/s)。C为碳的质量浓度(质量%)。z为从钢材表面向深度方向的位移(mm)。t为从开始渗碳工序起的时间(秒)。为偏微分符号。Here, D is the diffusion coefficient of carbon in the steel material (mm 2 /s). C is the mass concentration of carbon (mass %). z is the displacement from the steel surface to the depth direction (mm). t is the time (seconds) from the start of the carburizing process. is the partial differential symbol.
若基于化学势的梯度而计算碳浓度的变化量,则可以严格地操控碳的扩散驱动力。该情况下,碳的扩散通量J(mm·mol%/s)由式(3)定义,碳浓度的时间变化由式(4)定义。If the change in carbon concentration is calculated based on the gradient of the chemical potential, the diffusion driving force of carbon can be tightly manipulated. In this case, the carbon diffusion flux J (mm·mol%/s) is defined by equation (3), and the time change of the carbon concentration is defined by equation (4).
此处m为碳的迁移率(mm2·mol/J·s)。x为碳的摩尔浓度(mol%)。μ为碳的化学势(J/mol)。z为向深度方向的位移(mm)。式(4)中的t为从开始渗碳工序起的时间(s)。为偏微分符号。Here m is the mobility of carbon (mm 2 ·mol/J·s). x is the molar concentration of carbon (mol%). μ is the chemical potential of carbon (J/mol). z is the displacement in the depth direction (mm). t in the formula (4) is the time (s) from the start of the carburizing process. is the partial differential symbol.
此处,碳的扩散驱动力为式(3)中的部分。此外,真空渗碳处理中的奥氏体(γ)中的碳浓度小至2%以下,摩尔浓度与质量浓度大致呈比例关系。因此,可以以质量浓度(质量%)表述式(3)。以质量%表述式(3)时,碳的扩散通量J(mm·质量%/s)由式(5)定义,碳浓度的时间变化由式(2)定义。Here, the diffusion driving force of carbon is in equation (3) part. In addition, the carbon concentration in the austenite (γ) in the vacuum carburizing process is as small as 2% or less, and the molar concentration and the mass concentration are approximately proportional. Therefore, equation (3) can be expressed in terms of mass concentration (mass %). When formula (3) is expressed in terms of mass %, the carbon diffusion flux J (mm·mass %/s) is defined by formula (5), and the time change of the carbon concentration is defined by formula (2).
式(5)中的C为碳浓度(质量%)。C in formula (5) is carbon concentration (mass %).
使用上述菲克的第1定律(式(1)、(3)以及式(5))、以及菲克的第2定律(式(2)以及式(4)),以如下的方法进行用于算出理论渗碳气体流量FT的扩散模拟。Using Fick's first law (Formula (1), (3) and Formula (5)) and Fick's second law (Formula (2) and Formula (4)) mentioned above, the following method is used for Diffusion simulation to calculate the theoretical carburizing gas flow rate FT.
在渗碳气体使用乙炔的真空渗碳处理中,在钢材的表面,由于渗碳气体的分解,碳从钢材的表面侵入至钢材。假定在渗碳工序时的钢材表面,钢材中的碳浓度上升至与石墨平衡为止。因此,将真空渗碳处理中的钢材表面的碳的扩散模拟中的边界条件定义为“钢材表面的碳浓度与石墨平衡”。以上述前提如下所述地实施扩散模拟。In the vacuum carburizing process using acetylene as the carburizing gas, carbon penetrates into the steel material from the surface of the steel material due to the decomposition of the carburizing gas. It is assumed that on the surface of the steel material during the carburizing process, the carbon concentration in the steel material rises until it is in equilibrium with the graphite. Therefore, the boundary condition in the diffusion simulation of carbon on the steel surface during vacuum carburization is defined as "the carbon concentration on the steel surface balances with graphite." Based on the above premise, diffusion simulation is performed as follows.
[扩散模拟中的计算方法][Calculation methods in diffusion simulation]
首先,制成以多个单元区分作为真空渗碳处理对象的钢材的表层的网格数据。各单元的尺寸为公知的尺寸即可。单元的尺寸例如为1~500μm。单元的尺寸也可以从钢材的表面向深度方向缓慢地扩大。此时,相邻的单元的尺寸之比为0.80~1.25,优选为0.90~1.10。其中,单元的尺寸并不限于此。进行扩散模拟的对象可以为一维。钢材的形状为圆棒或圆筒的情况下,通过将网格数据设为圆筒坐标系,从而可以作为一维来处理。进而,钢材(圆棒或圆筒)的直径若为钢中的碳的扩散距离的50倍以上,则可以与平面同样地进行处理。在此,所谓的扩散距离是指√Dt。扩散系数D根据钢材的碳浓度和渗碳温度来计算。时间t(秒)为渗碳时间(渗碳工序的实施时间)。例如,使用JIS G 4053(2008)所规定的SCM415作为钢材,在渗碳温度为950℃且渗碳时间为51分钟的情况下,扩散距离√Dt为0.20mm。此时,钢材的直径若为10mm以上,则可以与平面相同地进行处理。需要说明的是,使用JIS G 4053(2008)所规定的SCM420作为钢材,在渗碳温度为950℃且渗碳时间为51分钟的情况下,扩散距离√Dt为0.21mm。并且,设定扩散模拟的解析时间(阶跃时间)。阶跃时间没有特别限定,例如设为0.001~1.0秒。First, mesh data is created in which the surface layer of the steel material to be subjected to vacuum carburizing treatment is divided into a plurality of units. The size of each unit may be a known size. The size of the unit is, for example, 1 to 500 μm. The size of the unit can also be slowly expanded from the surface of the steel to the depth direction. At this time, the size ratio of adjacent units is 0.80 to 1.25, preferably 0.90 to 1.10. However, the size of the unit is not limited to this. Objects for diffusion simulation can be one-dimensional. When the shape of the steel material is a round bar or a cylinder, the grid data can be treated as one-dimensional by setting the cylindrical coordinate system. Furthermore, if the diameter of the steel material (round rod or cylinder) is 50 times or more the diffusion distance of carbon in the steel, it can be treated in the same manner as a flat surface. Here, the so-called diffusion distance refers to √Dt. The diffusion coefficient D is calculated based on the carbon concentration of the steel and the carburizing temperature. The time t (second) is the carburizing time (implementation time of the carburizing process). For example, when SCM415 specified in JIS G 4053 (2008) is used as the steel material, when the carburizing temperature is 950°C and the carburizing time is 51 minutes, the diffusion distance √Dt is 0.20 mm. At this time, if the diameter of the steel material is 10 mm or more, it can be treated in the same manner as a flat surface. It should be noted that when SCM420 specified in JIS G 4053 (2008) is used as the steel material, when the carburizing temperature is 950°C and the carburizing time is 51 minutes, the diffusion distance √Dt is 0.21 mm. Furthermore, the analysis time (step time) of the diffusion simulation is set. The step time is not particularly limited, but is set to 0.001 to 1.0 seconds, for example.
真空渗碳处理中,实施渗碳工序,之后,实施扩散工序。也有时多次实施渗碳工序和扩散工序的设置。例如,实施渗碳工序和扩散工序的设置2次的情况下,实施第1次的渗碳工序,在第1次的渗碳工序后实施第1次的扩散工序。进而,在第1次的扩散工序后实施第2次的渗碳工序,在第2次的渗碳工序后实施第2次的扩散工序。如此实施多次渗碳工序和扩散工序的情况下,每个各渗碳工序中,重新设置前次的渗碳工序中的理论渗碳气体流量,新设定下一个渗碳工序中的理论渗碳气体流量。In the vacuum carburizing process, a carburizing process is performed, and then a diffusion process is performed. Sometimes the carburizing process and the diffusion process are performed multiple times. For example, when the carburizing process and the diffusion process are performed twice, the first carburizing process is performed, and the first diffusion process is performed after the first carburizing process. Furthermore, a second carburizing process is performed after the first diffusion process, and a second diffusion process is performed after the second carburizing process. When performing multiple carburizing processes and diffusion processes in this way, in each carburizing process, the theoretical carburizing gas flow rate in the previous carburizing process is reset, and the theoretical carburizing gas flow rate in the next carburizing process is newly set. Carbon gas flow.
需要说明的是,实施第n次(n为1以上的自然数)的渗碳工序后,夹着低于第n次的渗碳工序时间的1/10的扩散工序实施第n+1次的渗碳工序的情况下,认为第n次的渗碳工序与第n+1次的渗碳工序是1次渗碳工序。亦即,该情况下、在不重新设置第n次的渗碳工序中设定的理论气体流量的情况下,直接用于第n+1次的渗碳工序。换言之,第n次的渗碳工序与第n+1次的渗碳工序之间的扩散工序时间如果为第n次的渗碳工序时间的1/10以上,则第n+1次的渗碳工序中,重新设置第n次的渗碳工序的理论渗碳气体流量,设定新的理论渗碳气体流量。It should be noted that after the nth carburizing process (n is a natural number of 1 or more) is performed, the n+1th carburizing process is performed while sandwiching a diffusion process that is less than 1/10 of the time of the nth carburizing process. In the case of the carbonization process, the nth carburizing process and the (n+1)th carburizing process are considered to be the primary carburizing process. That is, in this case, without resetting the theoretical gas flow rate set in the n-th carburizing process, it is directly used in the n+1-th carburizing process. In other words, if the diffusion process time between the nth carburizing process and the n+1th carburizing process is more than 1/10 of the nth carburizing process time, then the n+1th carburizing process will In the process, the theoretical carburizing gas flow rate of the nth carburizing process is reset, and a new theoretical carburizing gas flow rate is set.
如上所述,钢材表面的碳浓度设为与石墨的平衡状态。因此,基于作为真空渗碳处理对象的钢材的化学组成,通过公知的热力学计算而求出在渗碳温度下的与石墨平衡状态下的平衡相以及平衡组成。成为真空渗碳处理对象的钢材的化学组成在考虑到由于C浓度的增加而被稀释的情况下,使C浓度增加至石墨以平衡相的方式出现为止而进行热力学计算。例如,C浓度增加7质量%时,钢材自身的质量达到1.07倍。因此,除C以外的其它元素的浓度基于设为1/1.07倍的化学组成而进行热力学计算。根据通过热力学计算而求出的平衡相以及平衡组成,可以确定钢材中的C含量、C的化学势、以及在奥氏体中固溶的固溶C浓度。热力学计算中可以使用公知的热力学计算软件。公知的热力学计算软件是指例如商品名Pandat(商标)。As described above, the carbon concentration on the surface of the steel material is in equilibrium with graphite. Therefore, based on the chemical composition of the steel material to be subjected to vacuum carburizing treatment, the equilibrium phase and equilibrium composition in the equilibrium state with graphite at the carburizing temperature are determined by well-known thermodynamic calculations. The chemical composition of the steel material to be subjected to the vacuum carburizing treatment is thermodynamically calculated by increasing the C concentration until graphite appears as an equilibrium phase, taking into account dilution due to an increase in C concentration. For example, when the C concentration increases by 7% by mass, the mass of the steel itself reaches 1.07 times. Therefore, the thermodynamic calculation is performed based on the chemical composition set to 1/1.07 times for the concentration of elements other than C. Based on the equilibrium phase and equilibrium composition obtained through thermodynamic calculations, the C content in the steel material, the chemical potential of C, and the solid solution C concentration in austenite can be determined. Well-known thermodynamic calculation software can be used for thermodynamic calculations. Well-known thermodynamic calculation software is, for example, the trade name Pandat (trademark).
同样地,在除钢材表面以外的钢材内部,存在真空渗碳的情况、渗碳体(θ)析出的情况。此时,钢材中的碳(C)被分配到渗碳体和奥氏体中。因此,通过上述的热力学计算而求出渗碳温度下的除钢材表面以外的钢材内部的平衡相以及平衡组成。与钢材表面同样地,在钢材内部也可以确定平衡相、平衡组成、钢材中的C含量、C的化学势、以及在奥氏体中固溶的固溶C浓度。Similarly, vacuum carburization may occur and cementite (θ) may precipitate inside the steel material other than the steel surface. At this time, the carbon (C) in the steel is distributed into cementite and austenite. Therefore, the equilibrium phase and equilibrium composition inside the steel material except the surface of the steel material at the carburizing temperature are obtained through the above-mentioned thermodynamic calculation. Like the steel surface, the equilibrium phase, equilibrium composition, C content in the steel, chemical potential of C, and solid solution C concentration in austenite can also be determined inside the steel.
钢材中的奥氏体中的碳的扩散系数D可以利用使用成为真空渗碳处理对象的钢材而预先通过实验求出的数值,或可以使用作为实验数据而报告的数据。例如,作为奥氏体中的C的扩散系数D(m2/s),可以参考由Gray G.Tibbetts等所提倡的内容,使用以下的式子。The diffusion coefficient D of carbon in austenite in the steel material may be a numerical value determined in advance through experiments using the steel material to be subjected to vacuum carburizing treatment, or data reported as experimental data may be used. For example, as the diffusion coefficient D (m 2 /s) of C in austenite, the following formula can be used with reference to the content advocated by Gray G. Tibbetts et al.
D=4.7×10-5×exp(-1.6×C-(37000-6600×C)/1.987/T)D=4.7×10 -5 ×exp(-1.6×C-(37000-6600×C)/1.987/T)
此处,式中的“C”为奥氏体中的固溶C浓度(质量%),T为渗碳温度(K)。Here, "C" in the formula is the concentration of solid solution C in austenite (mass %), and T is the carburizing temperature (K).
钢材中的奥氏体中的碳的迁移率m(m2/s)可以根据扩散系数D和热力学计算来求出。将迁移率m公式化而成的式子为以下的式子。The mobility m (m 2 /s) of carbon in the austenite in the steel material can be determined based on the diffusion coefficient D and thermodynamic calculation. The formula formulating the mobility m is the following formula.
m=1.54×10-15exp(-1.61×C-(17300-2920×C)/T)m=1.54×10 -15 exp(-1.61×C-(17300-2920×C)/T)
此处,式中的“C”为奥氏体中的固溶C浓度(质量%),T为渗碳温度(K)。Here, "C" in the formula is the concentration of solid solution C in austenite (mass %), and T is the carburizing temperature (K).
接着,设定由真空渗碳处理而得到的表层的C浓度。具体而言,设定在最表面的单元的目标碳浓度与在规定深度的目标碳浓度。进而,作为初期值,设所有单元中的固溶C浓度=钢材(芯部)的化学组成的C浓度(C0),在所有单元中将渗碳体析出量设为0。Next, the C concentration of the surface layer obtained by the vacuum carburizing treatment is set. Specifically, the target carbon concentration in the most surface unit and the target carbon concentration in the predetermined depth are set. Furthermore, as the initial value, it is assumed that the solid solution C concentration in all units = the C concentration (C 0 ) of the chemical composition of the steel material (core part), and the cementite precipitation amount in all units is set to 0.
基于以上的前提条件,在每一阶跃时间实施以下的计算。Based on the above prerequisites, the following calculations are performed at each step time.
(A)基于各单元中的碳浓度和热力学计算结果,确定渗碳温度下的各单元中的奥氏体中的固溶C浓度(即,扩散的C的浓度)。此时,假定渗碳体中的C被固定,仅奥氏体中的固溶C扩散。(A) Based on the carbon concentration in each unit and the thermodynamic calculation results, determine the concentration of solid solution C in the austenite (that is, the concentration of diffused C) in each unit at the carburizing temperature. At this time, it is assumed that C in cementite is fixed and only solid solution C in austenite diffuses.
(B)在各单元中,基于确定的固溶C浓度,使用式(1)、式(3)或式(5),通过差分法,求出各单元中的扩散通量J。此时,如上所述,钢材表面的固溶碳浓度设为与石墨平衡状态时的固溶极限的固溶碳浓度(Csat)。基于来自钢材表面的扩散通量J0,将渗碳效率设为100%,求出乙炔流量。将求出的乙炔流量定义为该阶跃时间下的理论渗碳气体流量。(B) In each unit, based on the determined solid solution C concentration, use equation (1), equation (3), or equation (5) to calculate the diffusion flux J in each unit by the difference method. At this time, as mentioned above, the solid solution carbon concentration on the surface of the steel material is set to the solid solution carbon concentration (C sat ) at the solid solution limit in equilibrium with graphite. Based on the diffusion flux J 0 from the steel surface, the acetylene flow rate was obtained by setting the carburization efficiency to 100%. The calculated acetylene flow rate is defined as the theoretical carburizing gas flow rate under this step time.
(C)基于求出的各单元中的扩散通量J,确定在该阶跃时间经过时刻的各单元的C浓度。(C) Based on the calculated diffusion flux J in each unit, the C concentration of each unit at the time when the step time elapses is determined.
(D)基于热力学计算结果,作为平衡相,判断渗碳体是否生成。需要说明的是,无视渗碳体的生成所需要的时间(亦即,确定下一阶跃时间下的(A))。(D) Based on the thermodynamic calculation results, as an equilibrium phase, determine whether cementite is generated. It should be noted that the time required for the generation of cementite is ignored (that is, (A) at the next step time is determined).
(E)进行2次以上渗碳工序的情况下,进行渗碳工序之间的扩散工序的模拟,进行之后的渗碳工序的模拟。在扩散工序中,将来自钢材表面的扩散通量J0设为零,进行(A)~(D)的计算。(E) When the carburizing process is performed two or more times, a simulation of the diffusion process between the carburizing processes is performed, and a simulation of the subsequent carburizing process is performed. In the diffusion step, the diffusion flux J 0 from the steel material surface is set to zero, and calculations (A) to (D) are performed.
在每一阶跃时间求出以上的计算,求出渗碳工序时的钢材的每单位表面积的碳自钢材表面的扩散通量J0(t)。然后,将钢材的每单位表面积的扩散通量J0(t)换算为乙炔气体流量,进而,乘以成为真空渗碳处理的对象的钢材的表面积S(m2),求出时间t下的理论渗碳气体流量FT(t)。在将横轴设为从渗碳开始时起的经过时间(渗碳时间)、纵轴设为理论渗碳气体流量FT的图中,标绘各渗碳时间中的理论渗碳气体流量FT,从而可以以理论渗碳气体流量曲线的形式表示理论渗碳气体流量FT。图1为示出由上述的扩散模拟得到的钢材的表层的碳的扩散通量而算出的、理论渗碳气体流量与时间的关系的一个例子的图。图1中的●表示各时间下的理论渗碳气体流量FT。图1中的曲线C1.00表示理论渗碳气体流量曲线。The above calculation is performed at each step time to obtain the diffusion flux J 0 (t) of carbon from the surface of the steel material per unit surface area of the steel material during the carburizing process. Then, the diffusion flux J 0 (t) per unit surface area of the steel material is converted into an acetylene gas flow rate, and further multiplied by the surface area S (m 2 ) of the steel material to be subjected to the vacuum carburizing treatment to obtain the diffusion flux J 0 (t) at time t. Theoretical carburizing gas flow FT(t). In a figure in which the horizontal axis represents the elapsed time (carburizing time) from the start of carburization and the vertical axis represents the theoretical carburizing gas flow rate FT, the theoretical carburizing gas flow rate FT at each carburizing time is plotted. Therefore, the theoretical carburizing gas flow rate FT can be expressed in the form of a theoretical carburizing gas flow rate curve. FIG. 1 is a diagram showing an example of the relationship between the theoretical carburizing gas flow rate and time calculated from the diffusion flux of carbon in the surface layer of the steel material obtained by the above-mentioned diffusion simulation. ● in Figure 1 represents the theoretical carburizing gas flow rate FT at each time. Curve C 1.00 in Figure 1 represents the theoretical carburizing gas flow curve.
理论渗碳气体流量曲线C1.00的近似式可以由式(6)表示。The approximate formula of the theoretical carburizing gas flow curve C 1.00 can be expressed by formula (6).
FT=S×A/√t (6)FT=S×A/√t (6)
此处,FT为理论渗碳气体流量(NL/分钟)。式(6)中的A可以用式(7)表示。式(6)中的t为从渗碳工序开始时起的时间(分钟)。Here, FT is the theoretical carburizing gas flow rate (NL/min). A in formula (6) can be expressed by formula (7). t in the formula (6) is the time (minutes) from the start of the carburizing process.
A=a×T2+b×T+c (7)A=a×T 2 +b×T+c (7)
式(7)中的a、b和c为由钢材的化学组成确定的常数,T为渗碳温度(℃)。例如,钢材为JIS G 4053(2008)所规定的SCM420的情况下,由上述扩散模拟求出时,为a=8.52×10-5、b=-0.140、c=58.2。钢材为JIS G 4053(2008)所规定的SCM415的情况下,由上述扩散模拟求出时,为a=8.64×10-5、b=-0.141、c=59.0。a, b and c in formula (7) are constants determined by the chemical composition of the steel, and T is the carburizing temperature (°C). For example, when the steel material is SCM420 specified in JIS G 4053 (2008), a=8.52×10 -5 , b=-0.140, and c=58.2 are obtained by the above diffusion simulation. When the steel material is SCM415 specified in JIS G 4053 (2008), when calculated from the above diffusion simulation, a=8.64×10 -5 , b=-0.141, and c=59.0.
作为理论渗碳气体流量FT的近似式的式(6)在本说明书中也视为理论渗碳气体流量FT。亦即,基于式(6),可以求出实际的渗碳工序中各渗碳时间下的理论渗碳气体流量FT。Formula (6), which is an approximate expression of the theoretical carburizing gas flow rate FT, is also regarded as the theoretical carburizing gas flow rate FT in this specification. That is, based on equation (6), the theoretical carburizing gas flow rate FT at each carburizing time in the actual carburizing process can be obtained.
上述说明中,作为理论渗碳气体流量的确定方法的一例,基于使用扩散方程式的公知的扩散模拟,求出理论渗碳气体流量。然而,根据其他方法也可以确定理论渗碳气体流量。例如,也可以根据实验确定理论渗碳气体流量。In the above description, as an example of a method of determining the theoretical carburizing gas flow rate, the theoretical carburizing gas flow rate is obtained based on a known diffusion simulation using the diffusion equation. However, the theoretical carburizing gas flow rate can also be determined based on other methods. For example, the theoretical carburizing gas flow rate can also be determined based on experiments.
根据实验求出理论气体流量的方法例如如下所述。对于与实际进行真空渗碳处理的钢材等同的化学组成的钢材,实施真空渗碳处理。使供给到真空渗碳炉的渗碳气体流量为恒定,渗碳工序中,持续地测定真空渗碳炉内的乙炔分压和氢分压。然后,求出乙炔分压成为氢分压的0.8倍以上的最初的时间t0成为渗碳工序结束时间即时间ta(亦即,全渗碳工序时间)的1/10以下的渗碳气体流量的最小值FAmin。基于求出的渗碳气体流量FAmin,形成理论渗碳气体流量FT=FAmin√(t0/t)。A method for determining the theoretical gas flow rate from experiments is as follows, for example. Vacuum carburizing is performed on steel materials with the same chemical composition as the steel materials that are actually vacuum carburized. The flow rate of the carburizing gas supplied to the vacuum carburizing furnace is kept constant, and the acetylene partial pressure and hydrogen partial pressure in the vacuum carburizing furnace are continuously measured during the carburizing process. Then, the carburizing gas flow rate is determined so that the first time t0 when the acetylene partial pressure becomes 0.8 times or more of the hydrogen partial pressure becomes 1/10 or less of the time ta which is the end time of the carburizing process (that is, the full carburizing process time). Minimum value FAmin. Based on the calculated carburizing gas flow rate FAmin, the theoretical carburizing gas flow rate FT=FAmin√(t0/t) is formed.
需要说明的是,如上述,理论渗碳气体流量跟与钢材表面接触而用于渗碳反应的渗碳气体流量相等。因此,理论渗碳气体流量不受热处理炉的大小、形状的影响。It should be noted that, as mentioned above, the theoretical carburizing gas flow rate is equal to the carburizing gas flow rate used for the carburizing reaction in contact with the steel surface. Therefore, the theoretical carburizing gas flow rate is not affected by the size and shape of the heat treatment furnace.
[关于本实施方式的真空渗碳处理方法][About the vacuum carburizing treatment method of this embodiment]
将真空渗碳处理时的实际供给到真空渗碳炉的渗碳气体的流量定义为“实际渗碳气体流量”FR。本发明人等对于如图1所示的、假定使用大幅偏离渗碳时间下的理论渗碳气体流量FT关系的实际渗碳气体流量FR的情况的事项进行了调查以及研究。The flow rate of the carburizing gas actually supplied to the vacuum carburizing furnace during the vacuum carburizing process is defined as the "actual carburizing gas flow rate" FR. The inventors of the present invention investigated and studied a matter as shown in FIG. 1 assuming the use of an actual carburizing gas flow rate FR that greatly deviates from the theoretical carburizing gas flow rate FT relationship at carburizing time.
图2为示出现有的渗碳工序中的实际渗碳气体流量FR的经时变化与理论渗碳气体流量FT的经时变化的图。图2的纵轴表示渗碳气体流量(NL/分钟),横轴表示从渗碳工序开始起的时间(分钟)。图2的实线FR如上所述示出以往的渗碳工序中的实际渗碳气体流量FR。图2的虚线C1.00如上所述表示理论渗碳气体流量FT。FIG. 2 is a graph showing the time-dependent change of the actual carburizing gas flow rate FR and the time-dependent change of the theoretical carburizing gas flow rate FT in the conventional carburizing process. The vertical axis of Fig. 2 represents the carburizing gas flow rate (NL/minute), and the horizontal axis represents the time (minutes) from the start of the carburizing process. The solid line FR in FIG. 2 shows the actual carburizing gas flow rate FR in the conventional carburizing process as described above. The dotted line C 1.00 in Fig. 2 represents the theoretical carburizing gas flow rate FT as described above.
参照图2,将渗碳工序的开始时间定义为“0”、渗碳工序的结束时间定义为“ta”。亦即,渗碳工序从时间0起进行至时间ta为止。结束时间ta根据渗碳处理后的钢材的规定深度位置处的碳浓度的设定值而预先设定。另外,将实际渗碳气体流量FR最初变得与理论渗碳气体流量FT相等的时间定义为“te”。Referring to FIG. 2 , the start time of the carburizing process is defined as “0” and the end time of the carburizing process is defined as “ta”. That is, the carburizing process is performed from time 0 to time ta. The end time ta is set in advance based on the set value of the carbon concentration at a predetermined depth position of the carburized steel material. In addition, the time when the actual carburizing gas flow rate FR first becomes equal to the theoretical carburizing gas flow rate FT is defined as "te".
将从渗碳工序开始起至时间te为止的期间定义为期间S100。将从时间te起至时间ta为止的期间定义为期间S200。在期间S100中,实际渗碳气体流量FR低于理论渗碳气体流量FT(曲线C1.00)。因此,在现有的真空渗碳处理方法的渗碳工序中,期间S100中的实际渗碳气体流量FR不足。该情况下,在钢材表面,产生渗碳反应充分的部分和渗碳反应不充分的部分。因此,钢材表面的渗碳分布不均变大。另外,在钢材表层,也有时得不到期望的碳浓度。另一方面,在期间S200中,实际渗碳气体流量FR高于理论渗碳气体流量FT(曲线C1.00)。因此,在期间S200中,实际渗碳气体流量FR变得过剩,残留于真空渗碳炉内。其结果,在期间S200中,由于残留的渗碳气体而产生煤、焦油。该情况下,钢材表面的渗碳分布不均变大。The period from the start of the carburizing process to time te is defined as period S100. The period from time te to time ta is defined as period S200. In the period S100, the actual carburizing gas flow rate FR is lower than the theoretical carburizing gas flow rate FT (curve C 1.00 ). Therefore, in the carburizing process of the conventional vacuum carburizing treatment method, the actual carburizing gas flow rate FR in period S100 is insufficient. In this case, a part where the carburizing reaction is sufficient and a part where the carburizing reaction is insufficient occur on the surface of the steel material. Therefore, the carburization distribution on the steel surface becomes uneven. In addition, the desired carbon concentration may not be obtained in the surface layer of the steel material. On the other hand, in the period S200, the actual carburizing gas flow rate FR is higher than the theoretical carburizing gas flow rate FT (curve C 1.00 ). Therefore, in period S200, the actual carburizing gas flow rate FR becomes excessive and remains in the vacuum carburizing furnace. As a result, coal and tar are generated due to the remaining carburizing gas during period S200. In this case, the uneven distribution of carburization on the surface of the steel material becomes large.
基于以上的调查结果,本发明人等考虑在渗碳工序中结合理论渗碳气体流量曲线C1.00来控制实际渗碳气体流量FR。Based on the above investigation results, the present inventors considered controlling the actual carburizing gas flow rate FR in combination with the theoretical carburizing gas flow rate curve C 1.00 in the carburizing process.
然而,如图2所示,在渗碳工序初期的期间S100中,与之后的期间S200相比,理论渗碳气体流量曲线C1.00的斜率陡峭。因此可知,在实际操作的期间S100中,结合该理论渗碳气体流量曲线C1.00的斜率来调整实际渗碳气体流量FR非常困难。However, as shown in FIG. 2 , in the period S100 at the initial stage of the carburizing process, the slope of the theoretical carburizing gas flow rate curve C 1.00 is steeper than in the subsequent period S200 . Therefore, it can be seen that during the actual operation period S100, it is very difficult to adjust the actual carburizing gas flow rate FR based on the slope of the theoretical carburizing gas flow rate curve C 1.00 .
进而,在渗碳工序初期的期间S100中,在渗碳工序开始时(t=0),采用上述式(6)的情况下,理论渗碳气体流量FT成为无限大。因此,在实际的操作中,在期间S100的初期导入与理论渗碳气体流量FT相等的实际渗碳气体流量FR极困难。Furthermore, in the period S100 at the initial stage of the carburizing process, when the carburizing process starts (t=0), when the above-mentioned equation (6) is used, the theoretical carburizing gas flow rate FT becomes infinite. Therefore, in actual operation, it is extremely difficult to introduce an actual carburizing gas flow rate FR equal to the theoretical carburizing gas flow rate FT in the early stage of period S100.
因此,本发明人等认为作为控制实际渗碳气体流量的要素,不仅考虑了理论渗碳气体流量FT,还研究了其他要素。根据实际渗碳气体流量FR而真空渗碳炉内的气氛内的气体成分变化。该气体成分的变化引起渗碳分布不均、煤的产生。因此,本发明人等作为控制实际渗碳气体流量的要素,不仅着眼于理论渗碳气体流量FT还着眼于真空渗碳炉的气氛内的气体成分。Therefore, the present inventors considered that not only the theoretical carburizing gas flow rate FT but also other factors were considered as factors for controlling the actual carburizing gas flow rate. The gas composition in the atmosphere in the vacuum carburizing furnace changes depending on the actual carburizing gas flow rate FR. The change in gas composition causes uneven distribution of carburization and the generation of coal. Therefore, the present inventors focused not only on the theoretical carburizing gas flow rate FT but also on the gas components in the atmosphere of the vacuum carburizing furnace as factors for controlling the actual carburizing gas flow rate.
本发明人等着眼于真空渗碳炉内的气氛中的氢分压和乙炔分压。真空渗碳炉内的气氛中的氢分压和乙炔分压可以用公知的分析器测定。分析器例如为四级杆质谱仪。The present inventors focused on the hydrogen partial pressure and the acetylene partial pressure in the atmosphere in the vacuum carburizing furnace. The hydrogen partial pressure and the acetylene partial pressure in the atmosphere in the vacuum carburizing furnace can be measured using a known analyzer. The analyzer is, for example, a quadrupole mass spectrometer.
所分析的氢分压是根据基于以下的式子的反应在真空渗碳炉内产生的。The hydrogen partial pressure analyzed is generated in the vacuum carburizing furnace according to the reaction based on the following formula.
C2H2→2C+H2 C 2 H 2 →2C+H 2
氢分压成为渗碳工序中的渗碳反应量的指标。亦即,氢分压成为渗碳分布不均的抑制程度的指标。另一方面,乙炔分压是指,不引起渗碳反应的剩余气体量,成为煤和焦油的产生量的指标。The hydrogen partial pressure becomes an index of the carburizing reaction amount in the carburizing process. That is, the hydrogen partial pressure becomes an index of the degree of suppression of uneven carburization distribution. On the other hand, the acetylene partial pressure refers to the amount of remaining gas that does not cause carburization reaction, and is an indicator of the amount of coal and tar produced.
使用乙炔的真空渗碳处理中,渗碳工序刚刚开始后、亦即、刚刚开始乙炔向炉内的供给后的化学反应极迅速。亦即,渗碳工序刚刚开始后的碳向钢材表面的进入速度极迅速。因此,供给至炉内的乙炔流量(渗碳气体流量)如果少,则炉内气氛基本成为氢气体。其结果,炉内的氢分压变高,乙炔分压变低。另一方面,供给至炉内的乙炔气体流量(真空渗碳气体流量)如果多,则不引起渗碳反应的乙炔气体残留在炉内。该情况下,炉内的氢分压变低,乙炔分压变高。因此,通过监控炉内的氢分压和乙炔分压,从而可以推测钢材表面处的渗碳反应量。In the vacuum carburizing process using acetylene, the chemical reaction is extremely rapid just after the carburizing process is started, that is, just after the supply of acetylene into the furnace is started. That is, the carbon entering the surface of the steel material immediately after the carburizing process is extremely rapid. Therefore, if the acetylene flow rate (carburizing gas flow rate) supplied to the furnace is small, the atmosphere in the furnace will basically become hydrogen gas. As a result, the hydrogen partial pressure in the furnace becomes high and the acetylene partial pressure becomes low. On the other hand, if the acetylene gas flow rate (vacuum carburizing gas flow rate) supplied to the furnace is large, acetylene gas that does not cause carburizing reaction remains in the furnace. In this case, the hydrogen partial pressure in the furnace becomes low and the acetylene partial pressure becomes high. Therefore, by monitoring the hydrogen partial pressure and acetylene partial pressure in the furnace, the amount of carburizing reaction on the steel surface can be estimated.
本发明人等认为,如果基于理论渗碳气体流量FT、和真空渗碳炉内的气氛中的氢分压和乙炔分压可以控制实际渗碳气体流量FR,则真空渗碳处理中,可以抑制渗碳分布不均,且也可以抑制煤的产生。因此,本发明人等进一步进行了研究,获得了如下见解。The present inventors believe that if the actual carburizing gas flow rate FR can be controlled based on the theoretical carburizing gas flow rate FT and the hydrogen partial pressure and acetylene partial pressure in the atmosphere in the vacuum carburizing furnace, then the vacuum carburizing process can be suppressed. Carburization is unevenly distributed and can also inhibit coal production. Therefore, the present inventors conducted further studies and obtained the following findings.
(a)在渗碳工序的初期(期间S100附近),渗碳气体流量如果少,则渗碳反应量少。因此,乙炔分压上升的速度慢。其结果,渗碳分布不均变大,渗碳部件的表层的碳浓度也变低。(a) In the early stage of the carburizing process (near the period S100), if the carburizing gas flow rate is small, the carburizing reaction amount will be small. Therefore, the partial pressure of acetylene rises slowly. As a result, the carburization distribution becomes uneven and the carbon concentration in the surface layer of the carburized component becomes low.
(b)将渗碳工序的结束时间定义为ta。如上述,结束时间ta根据渗碳处理后的钢材的表面碳浓度和渗碳深度的设定值而预先设定。然后,将自渗碳工序的开始时间起结束时间ta的1/10的时间定义为ta/10。将时间ta/10时的理论渗碳气体流量定义为FTta/10。如果使渗碳工序初期时的实际渗碳气体流量FR为时间ta/10时的理论渗碳气体流量FTta/10以上,则真空渗碳炉内的气氛中的氢分压急速上升,但是早期减少,乙炔分压的上升速度变快。其结果,可以抑制渗碳工序初期时的渗碳反应量的不足,可以降低渗碳分布不均。(b) Define the end time of the carburizing process as ta. As described above, the end time ta is set in advance based on the set values of the surface carbon concentration and the carburization depth of the steel material after carburization. Then, a time that is 1/10 of the end time ta from the start time of the carburizing process is defined as ta/10. The theoretical carburizing gas flow rate at time ta/10 is defined as FT ta/10 . If the actual carburizing gas flow rate FR at the initial stage of the carburizing process is equal to or greater than the theoretical carburizing gas flow rate FT ta/10 at time ta/10 , the hydrogen partial pressure in the atmosphere in the vacuum carburizing furnace will rise rapidly, but in the early stage decreases, the acetylene partial pressure rises faster. As a result, insufficient carburizing reaction amount in the initial stage of the carburizing process can be suppressed, and uneven carburizing distribution can be reduced.
(c)另一方面,渗碳工序初期时的实际渗碳气体流量FR如果过多,则炉内的乙炔分压过剩地快速上升。该情况下,乙炔气体过剩残留于炉内。其结果,产生煤或焦油,发生渗碳分布不均。将自渗碳工序开始起4秒时刻时的理论渗碳气体流量定义为FT4。在渗碳工序初期,实际渗碳气体流量FR如果为FT4以下,则可以抑制炉内的实际渗碳气体流量FR过剩变多的情况。因此,可以抑制渗碳分布不均。(c) On the other hand, if the actual carburizing gas flow rate FR in the initial stage of the carburizing process is too high, the acetylene partial pressure in the furnace will rise excessively and rapidly. In this case, excess acetylene gas remains in the furnace. As a result, coal or tar is generated, and carburization becomes unevenly distributed. The theoretical carburizing gas flow rate at 4 seconds from the start of the carburizing process is defined as FT 4 . In the early stage of the carburizing process, if the actual carburizing gas flow rate FR is FT 4 or less, it can be suppressed that the actual carburizing gas flow rate FR in the furnace becomes excessive. Therefore, uneven distribution of carburization can be suppressed.
(d)如果将实际渗碳气体流量FR维持在多的水平不变,则乙炔分压缓慢地增加。因此,任意时刻时乙炔分压会大幅超过氢分压。该情况下,在真空渗碳炉内的气氛中,不引起渗碳反应的剩余气体变得过剩地存在。因此,产生源自剩余气体的煤,附着于渗碳部件的表面。其结果,渗碳分布不均变大。(d) If the actual carburizing gas flow rate FR is maintained at a high level, the acetylene partial pressure gradually increases. Therefore, the partial pressure of acetylene will greatly exceed the partial pressure of hydrogen at any time. In this case, excess gas that does not cause the carburizing reaction exists excessively in the atmosphere in the vacuum carburizing furnace. Therefore, coal derived from the remaining gas is generated and adheres to the surface of the carburized component. As a result, the carburization distribution becomes uneven.
(e)在渗碳工序中,乙炔分压成为氢分压的0.8倍以上时,如果维持或降低实际渗碳气体流量FR,则在真空渗碳炉内的气氛中,可以抑制剩余气体。因此,可以抑制渗碳分布不均。(e) In the carburizing process, when the acetylene partial pressure becomes 0.8 times or more of the hydrogen partial pressure, if the actual carburizing gas flow rate FR is maintained or reduced, the remaining gas can be suppressed in the atmosphere in the vacuum carburizing furnace. Therefore, uneven distribution of carburization can be suppressed.
基于以上的见解,本发明人等认为,如果如下述(I)~(III)调整渗碳工序中的实际渗碳气体流量FR,则在渗碳工序初期可以确保充分的渗碳反应量,且之后抑制剩余气体,抑制煤、焦油的产生,可以降低渗碳分布不均。Based on the above findings, the present inventors believe that if the actual carburizing gas flow rate FR in the carburizing process is adjusted as follows (I) to (III), a sufficient carburizing reaction amount can be ensured in the early stage of the carburizing process, and Afterwards, residual gas is suppressed, the production of coal and tar is suppressed, and the uneven distribution of carburization can be reduced.
此处,关于各术语,如下所定义。Here, each term is defined as follows.
时间ta:渗碳工序的结束时间Time ta: the end time of the carburizing process
时间t0:渗碳工序开始后、乙炔分压成为氢分压的0.8倍以上的最初的时间Time t0: The first time after the carburizing process starts that the acetylene partial pressure becomes more than 0.8 times the hydrogen partial pressure.
时间ta/10:自渗碳工序的开始时间起结束时间ta的1/10的时间Time ta/10: 1/10 of the end time ta from the start time of the carburizing process
时间4t0:渗碳工序开始后、从渗碳工序开始起至时间t0为止的期间的4倍的期间经过的时间Time 4t0: The elapsed time that is four times the period from the start of the carburizing process to time t0 after the carburizing process is started.
前期渗碳工序S1:从渗碳工序开始起至时间t0为止的期间Preliminary carburizing process S1: the period from the start of the carburizing process to time t0
后期渗碳工序S2:从时间t0起至时间ta为止的期间Post-carburizing process S2: period from time t0 to time ta
实际渗碳气体流量FR:实际供给到真空渗碳炉的渗碳气体(乙炔)流量Actual carburizing gas flow rate FR: Actual carburizing gas (acetylene) flow rate supplied to the vacuum carburizing furnace
理论渗碳气体流量FTta/10:时间ta/10时的理论渗碳气体流量Theoretical carburizing gas flow FT ta/10 : Theoretical carburizing gas flow at time ta/10
理论渗碳气体流量FT4:自渗碳工序开始起4秒时刻时的理论渗碳气体流量Theoretical carburizing gas flow rate FT 4 : Theoretical carburizing gas flow rate at 4 seconds from the start of the carburizing process
定义上述术语的情况下,如图3所示,如下述(I)~(III)调整实际渗碳气体流量FR。When the above terms are defined, as shown in Figure 3, the actual carburizing gas flow rate FR is adjusted as follows (I) to (III).
(I)在前期渗碳工序S1中,使实际渗碳气体流量FR为FTta/10以上且FT4以下。在前期渗碳工序S1中使实际渗碳气体流量FR恒定的情况下,将该值作为实际渗碳气体流量FA。(I) In the preliminary carburizing step S1, the actual carburizing gas flow rate FR is set to FT ta/10 or more and FT 4 or less. When the actual carburizing gas flow rate FR is made constant in the early carburizing step S1, this value is regarded as the actual carburizing gas flow rate FA.
(II)在后期渗碳工序S2中时间t0~4t0的期间,使实际渗碳气体流量FR为FA×√(t0/t)以上且FA以下。(II) During the period from time t0 to 4t0 in the late carburizing step S2, the actual carburizing gas flow rate FR is set to FA×√(t0/t) or more and FA or less.
(III)在后期渗碳工序S2中时间4t0~时间ta的期间,使实际渗碳气体流量FR为FA×√(t0/t)以上且2FA×√(t0/t)以下。(III) During the period from time 4t0 to time ta in the late carburizing step S2, the actual carburizing gas flow rate FR is set to FA×√(t0/t) or more and 2FA×√(t0/t) or less.
此处,t为自渗碳开始时起的时间。Here, t is the time from the start of carburization.
图3为示出本实施方式的真空渗碳处理方法的渗碳工序中的、实际渗碳气体流量的经时变化(下图)、和渗碳工序中的真空渗碳炉的气氛中的乙炔分压和氢分压的经时变化(上图)的图。参照图3,本实施方式中,在时间t0~时间ta的期间,将实际渗碳气体流量FR调整为图3中的阴影的区域的范围内。成为阴影区域的下限的曲线为渗碳气体流量=FA×√(t0/t)的曲线。阴影区域的上限为渗碳气体流量=2FA×√(t0/t)的曲线。FA×√(t0/t)和2FA×√(t0/t)均为与理论渗碳气体流量FT的式(6)成比例的式子。3 is a diagram illustrating changes over time in the actual carburizing gas flow rate in the carburizing step of the vacuum carburizing treatment method of the present embodiment (lower graph), and acetylene in the atmosphere of the vacuum carburizing furnace in the carburizing step. A graph showing the time-dependent changes in partial pressure and hydrogen partial pressure (above). Referring to FIG. 3 , in the present embodiment, the actual carburizing gas flow rate FR is adjusted to be within the range of the hatched area in FIG. 3 during the period from time t0 to time ta. The curve that becomes the lower limit of the hatched area is a curve of carburizing gas flow rate=FA×√(t0/t). The upper limit of the shaded area is the curve of carburizing gas flow rate=2FA×√(t0/t). FA×√(t0/t) and 2FA×√(t0/t) are both equations proportional to equation (6) of the theoretical carburizing gas flow rate FT.
需要说明的是,如上述,将时间t0设为渗碳工序开始后、乙炔分压成为氢分压的0.8倍以上的最初的时间。如图3所示,在前期渗碳工序S1的初期,氢分压比乙炔分压急速上升。这是由于,渗碳反应活跃地发生。氢分压急速上升后,比乙炔分压先开始下降。然后,氢分压下降,结果乙炔分压成为氢分压的0.8倍以上。将该时刻、亦即、渗碳工序开始后、乙炔分压成为氢分压的0.8倍以上的最初的时间定义为时间t0。需要说明的是,此处所谓“0.8”倍是舍去乙炔分压/氢分压的比的计算值的小数第2位的值。It should be noted that, as described above, time t0 is the first time after the carburization process is started when the acetylene partial pressure becomes 0.8 times or more of the hydrogen partial pressure. As shown in FIG. 3 , in the early stage of the preliminary carburizing step S1 , the hydrogen partial pressure rises rapidly compared to the acetylene partial pressure. This is because the carburizing reaction actively occurs. After the hydrogen partial pressure rises rapidly, it begins to decrease before the acetylene partial pressure. Then, the hydrogen partial pressure decreases, so that the acetylene partial pressure becomes more than 0.8 times the hydrogen partial pressure. This time, that is, the first time after the carburizing process is started when the acetylene partial pressure becomes 0.8 times or more of the hydrogen partial pressure, is defined as time t0. It should be noted that the “0.8” times referred to here is the value obtained by discarding the second decimal place of the calculated value of the ratio of acetylene partial pressure/hydrogen partial pressure.
基于以上的见解完成的本实施方式的真空渗碳处理方法具备如下构成。The vacuum carburizing method of this embodiment completed based on the above findings has the following configuration.
[1][1]
一种真空渗碳处理方法,其为在真空渗碳炉内对钢材实施真空渗碳处理的真空渗碳处理方法,所述真空渗碳处理方法具备:A vacuum carburizing treatment method, which is a vacuum carburizing treatment method for steel materials in a vacuum carburizing furnace. The vacuum carburizing treatment method has:
加热工序,将前述钢材加热至渗碳温度;The heating process is to heat the aforementioned steel to the carburizing temperature;
均热工序,在前述加热工序后,将前述钢材以前述渗碳温度进行均热;Soaking process: after the aforementioned heating process, the aforementioned steel material is soaked at the aforementioned carburizing temperature;
渗碳工序,在前述均热工序后,边将乙炔气体即渗碳气体供给到前述真空渗碳炉内,边以前述渗碳温度保持前述钢材;In the carburizing process, after the aforementioned soaking process, acetylene gas, that is, carburizing gas, is supplied into the aforementioned vacuum carburizing furnace while maintaining the aforementioned steel material at the aforementioned carburizing temperature;
扩散工序,在前述渗碳工序后,停止前述渗碳气体向前述真空渗碳炉内的供给,以前述渗碳温度保持前述钢材;和,In the diffusion process, after the aforementioned carburizing process, the supply of the aforementioned carburizing gas to the aforementioned vacuum carburizing furnace is stopped, and the aforementioned steel material is maintained at the aforementioned carburizing temperature; and,
淬火工序,对前述扩散工序后的前述钢材实施淬火,The quenching process is to quench the aforementioned steel material after the aforementioned diffusion process,
在前述渗碳工序中,In the aforementioned carburizing process,
将供给到前述真空渗碳炉内的前述渗碳气体的流量定义为实际渗碳气体流量,The flow rate of the carburizing gas supplied into the aforementioned vacuum carburizing furnace is defined as the actual carburizing gas flow rate,
将前述钢材的前述真空渗碳处理所需的前述渗碳气体的流量定义为理论渗碳气体流量,The flow rate of the aforementioned carburizing gas required for the aforementioned vacuum carburizing treatment of the aforementioned steel material is defined as the theoretical carburizing gas flow rate,
将前述渗碳工序的结束时间定义为ta,Define the end time of the aforementioned carburizing process as ta,
将前述渗碳工序开始后乙炔分压成为氢分压的0.8倍以上的最初的时间定义为t0时,The first time when the acetylene partial pressure becomes 0.8 times or more of the hydrogen partial pressure after the carburizing step is started is defined as t0.
前述渗碳工序包括:The aforementioned carburizing process includes:
持续地测定前述真空渗碳炉内的气氛中的前述氢分压和前述乙炔分压,确定前述时间t0的分压测定工序;Continuously measuring the hydrogen partial pressure and the acetylene partial pressure in the atmosphere in the vacuum carburizing furnace, and determining the partial pressure measurement process at the time t0;
从前述渗碳工序开始起至时间t0为止的前期渗碳工序;和,The early carburizing process from the start of the aforementioned carburizing process to time t0; and,
从前述时间t0起至时间ta为止的后期渗碳工序,The post-carburizing process from the aforementioned time t0 to time ta,
在前述前期渗碳工序中,In the aforementioned early carburizing process,
使前述实际渗碳气体流量为时间ta/10时的前述理论渗碳气体流量以上且自前述渗碳工序开始起4秒时刻时的前述理论渗碳气体流量以下,The actual carburizing gas flow rate is set to be greater than the theoretical carburizing gas flow rate at time ta/10 and less than the theoretical carburizing gas flow rate at 4 seconds from the start of the carburizing process,
在前述后期渗碳工序中,In the aforementioned late carburizing process,
将前述前期渗碳工序的前述实际渗碳气体流量定义为FA,将自前述渗碳工序开始时起的时间定义为时间t时,When the actual carburizing gas flow rate in the early carburizing process is defined as FA, and the time from the start of the carburizing process is defined as time t,
使前述时间t0~时间4t0的期间的前述实际渗碳气体流量为FA√(t0/t)以上且FA以下,The actual carburizing gas flow rate during the period from time t0 to time 4t0 is set to FA√(t0/t) or more and FA or less,
使前述时间4t0~前述时间ta的前述实际渗碳气体流量为FA√(t0/t)以上且2FA√(t0/t)以下。The actual carburizing gas flow rate from the time 4t0 to the time ta is set to be FA√(t0/t) or more and 2FA√(t0/t) or less.
[2][2]
根据[1]所述的真空渗碳处理方法,其中,The vacuum carburizing method according to [1], wherein:
在前述后期渗碳工序中,In the aforementioned late carburizing process,
在前述时间4t0~时间ta的期间,随着时间的经过,以(A)或(B)的方法降低前述实际渗碳气体流量。During the period from the aforementioned time 4t0 to the time ta, as time passes, the aforementioned actual carburizing gas flow rate is reduced by the method (A) or (B).
(A)重复前述实际渗碳气体流量的维持与降低,阶段性地降低前述实际渗碳气体流量,(A) Repeat the aforementioned maintenance and reduction of the actual carburizing gas flow rate, and gradually reduce the aforementioned actual carburizing gas flow rate,
(B)随着时间的经过逐渐减少前述实际渗碳气体流量。(B) The actual carburizing gas flow rate is gradually reduced as time passes.
[3][3]
根据[1]或[2]所述的真空渗碳处理方法,其中,The vacuum carburizing treatment method according to [1] or [2], wherein,
基于使用扩散方程式的扩散模拟确定前述理论渗碳气体流量。The aforementioned theoretical carburizing gas flow rate was determined based on diffusion simulation using the diffusion equation.
[4][4]
一种渗碳部件的制造方法,A method of manufacturing carburized parts,
其具备对前述钢材实施[1]~[3]中任一项所述的真空渗碳处理方法的工序。It includes the step of subjecting the steel material to the vacuum carburizing treatment method described in any one of [1] to [3].
以下,对于基于本实施方式的真空渗碳处理方法以及渗碳部件的制造方法进行详细地叙述。Hereinafter, the vacuum carburizing treatment method and the manufacturing method of carburized parts based on this embodiment will be described in detail.
[真空渗碳处理方法][Vacuum carburizing treatment method]
图4为示出本实施方式的真空渗碳处理方法的加热模式的一个例子的图。参照图4,本实施方式的真空渗碳处理方法具备:加热工序(S10);均热工序(S20);渗碳工序(S30);扩散工序(S40)和淬火工序(S50)。以下,说明各工序的详细情况。FIG. 4 is a diagram illustrating an example of the heating pattern of the vacuum carburizing method according to this embodiment. Referring to FIG. 4 , the vacuum carburizing treatment method of this embodiment includes a heating process (S10), a soaking process (S20), a carburizing process (S30), a diffusion process (S40), and a quenching process (S50). The details of each process will be described below.
[加热工序(S10)][Heating process (S10)]
在加热工序(S10)中,将钢材加热至渗碳温度。作为真空渗碳处理对象的钢材可以为由第三者提供的钢材,也可以为实施真空渗碳处理方法而制造的钢材。钢材的化学组成没有特别限定。使用实施了渗碳处理的公知的钢材即可。钢材为例如由JIS G 4053(2008)规定的机械结构用合金钢钢材。更具体而言,钢材例如为由JIS G 4053(2008)规定的SCr415、SCr420以及SCM415等。In the heating step (S10), the steel material is heated to the carburizing temperature. The steel material to be subjected to the vacuum carburizing treatment may be a steel material provided by a third party, or may be a steel material manufactured by performing a vacuum carburizing treatment method. The chemical composition of the steel material is not particularly limited. A known steel material that has been carburized may be used. The steel material is, for example, alloy steel for mechanical structures specified in JIS G 4053 (2008). More specifically, steel materials include SCr415, SCr420, SCM415, etc. specified in JIS G 4053 (2008), for example.
准备的钢材可以为被热加工的钢材,也可以为被冷加工的钢材。热加工例如为热轧、热挤压、热锻造等。冷加工例如为冷轧、冷拔、冷锻造等。钢材也可以为在被热加工或冷加工之后实施以切削加工为代表的机械加工的钢材。The prepared steel material may be hot-processed steel material or cold-processed steel material. Hot working includes, for example, hot rolling, hot extrusion, hot forging, etc. Examples of cold working include cold rolling, cold drawing, cold forging, etc. The steel material may be hot-worked or cold-worked and then subjected to mechanical processing such as cutting.
在加热工序(S10)中,将钢材装入到真空渗碳炉内,将钢材加热至渗碳温度Tc为止。加热工序(S10)为真空渗碳处理方法中公知的工序。渗碳温度Tc为公知的温度即可。渗碳温度Tc为Ac3相变点以上。渗碳温度Tc的优选的范围为900~1130℃。渗碳温度Tc若为900℃以上,则由于辐射导致的热传导变高,真空渗碳炉内的温度容易均匀。其结果,钢材的渗碳分布不均容易变小。渗碳温度若为1130℃以下,则可以防止钢材的晶粒直径变粗大,可以抑制钢材的强度降低。渗碳温度Tc进一步优选的下限为910℃,进一步优选为920℃。渗碳温度Tc进一步优选的上限为1100℃,进一步优选为1080℃。In the heating step (S10), the steel material is loaded into the vacuum carburizing furnace, and the steel material is heated to the carburizing temperature Tc. The heating step (S10) is a well-known step in the vacuum carburizing treatment method. The carburizing temperature Tc may be a known temperature. The carburizing temperature Tc is above the Ac3 transformation point. The preferred range of carburizing temperature Tc is 900 to 1130°C. If the carburizing temperature Tc is 900° C. or higher, heat conduction due to radiation becomes high, and the temperature in the vacuum carburizing furnace is likely to be uniform. As a result, the uneven carburization distribution of the steel material tends to become smaller. If the carburizing temperature is 1130°C or lower, the grain diameter of the steel material can be prevented from becoming coarse, and a decrease in the strength of the steel material can be suppressed. The lower limit of the carburization temperature Tc is more preferably 910°C, and further preferably 920°C. The upper limit of the carburization temperature Tc is more preferably 1100°C, and further preferably 1080°C.
[均热工序(S20)][Soaking process (S20)]
在均热工序(S20)中,以渗碳温度Tc将钢材保持规定时间。以下,将均热工序(S20)中的保持时间称为均热时间。均热工序(S20)为真空渗碳处理方法中公知的工序。均热时间可以根据钢材的形状和/或尺寸而适当调整。优选均热时间为10分钟以上。更具体而言,将与钢材的长度方向垂直的截面换算为圆的情况下,优选均热时间为每圆当量直径25mm为30分钟以上。例如,圆当量直径为30mm的情况下,均热时间优选为36分钟以上。均热时间的优选上限优选为120分钟,进一步优选为60分钟。In the soaking process (S20), the steel material is maintained at the carburizing temperature Tc for a predetermined time. Hereinafter, the holding time in the soaking step (S20) is called soaking time. The soaking step (S20) is a well-known step in the vacuum carburizing treatment method. The soaking time can be adjusted appropriately according to the shape and/or size of the steel. The preferred soaking time is 10 minutes or more. More specifically, when converting a cross section perpendicular to the longitudinal direction of the steel material into a circle, the soaking time is preferably 30 minutes or more per circle equivalent diameter of 25 mm. For example, when the equivalent circle diameter is 30 mm, the soaking time is preferably 36 minutes or more. The preferable upper limit of the soaking time is preferably 120 minutes, and more preferably 60 minutes.
加热工序(S10)以及均热工序(S20)中的炉内的压力没有特别限定。加热工序(S10)以及均热工序(S20)中的炉内的压力例如可以为100Pa以下。在加热工序(S10)和/或均热工序(S20)中,进行氮气的导入和基于真空泵的真空排气,可以为1000Pa以下的氮气气氛。在均热工序(S20)中,至少直至渗碳工序(S30)开始,使真空渗碳炉内为低压或真空。例如,在均热工序(S20)中,直至渗碳工序(S30)开始,使真空渗碳炉内为10Pa以下。The pressure in the furnace in the heating step (S10) and the soaking step (S20) is not particularly limited. The pressure in the furnace in the heating step (S10) and the soaking step (S20) may be, for example, 100 Pa or less. In the heating step (S10) and/or the soaking step (S20), nitrogen gas is introduced and vacuum exhaust is performed using a vacuum pump, and the nitrogen atmosphere may be 1000 Pa or less. In the soaking process (S20), at least until the carburizing process (S30) starts, the inside of the vacuum carburizing furnace is maintained at low pressure or vacuum. For example, in the soaking process (S20) until the carburizing process (S30) is started, the temperature inside the vacuum carburizing furnace is set to 10 Pa or less.
[渗碳工序(S30)][Carburizing process (S30)]
本说明书中,渗碳工序(S30)是指,在减压下或真空下的炉内供给渗碳气体的工序。亦即,均热工序(S20)后、向减压或真空下的炉内开始供给渗碳气体时为渗碳工序(S30)开始时。在渗碳工序(S30)中,边将炉内维持为低压,边向炉内供给渗碳气体。炉内为低压,因此,渗碳气体的分子彼此碰撞的频率变少。亦即,在炉内的气氛下渗碳气体分解的频率变少。因此,在低压下将渗碳气体供给至钢材表面,从而可以抑制煤、焦油的产生。其结果,可以使钢材的表面碳浓度迅速上升。在从渗碳开始起至渗碳结束(时间ta)为止的渗碳工序(S30)中,例如使炉内为1~1000Pa。但是,渗碳工序(S30)中的炉内压不限定于上述范围。In this specification, the carburizing step (S30) refers to a step of supplying carburizing gas in a furnace under reduced pressure or vacuum. That is, after the soaking process (S20), the carburizing process (S30) starts when the carburizing gas is started to be supplied into the furnace under reduced pressure or vacuum. In the carburizing step (S30), the carburizing gas is supplied into the furnace while maintaining the low pressure in the furnace. The pressure inside the furnace is low, so the frequency with which molecules of the carburizing gas collide with each other becomes less frequent. That is, the frequency of decomposition of carburizing gas in the atmosphere in the furnace becomes smaller. Therefore, carburizing gas is supplied to the steel surface at low pressure, thereby suppressing the generation of coal and tar. As a result, the surface carbon concentration of the steel material can be rapidly increased. In the carburizing process (S30) from the start of carburization to the end of carburization (time ta), the temperature inside the furnace is set to 1 to 1000 Pa, for example. However, the furnace pressure in the carburizing step (S30) is not limited to the above range.
在渗碳工序(S30)中,向真空渗碳炉内导入渗碳气体,在渗碳温度Tc下保持钢材规定时间。In the carburizing step (S30), carburizing gas is introduced into the vacuum carburizing furnace, and the steel material is maintained at the carburizing temperature Tc for a predetermined time.
[渗碳气体][Carburizing gas]
在本实施方式中,在真空渗碳处理方法的渗碳工序(S30)中使用的渗碳气体为乙炔气体。In this embodiment, the carburizing gas used in the carburizing step (S30) of the vacuum carburizing treatment method is acetylene gas.
在以往的真空渗碳处理中,大多使用丙烷气体。然而,丙烷气体除渗碳反应以外也会发生向甲烷、乙烯、乙炔、氢气等的分解反应。由于分解反应而产生的甲烷以及乙烯多的情况下,无助于渗碳反应,被从真空渗碳炉排气。因此,使用丙烷气体的情况下,利用通过扩散方程而求出的碳的扩散通量的扩散模拟,不能计算理论渗碳气体流量FT。另一方面,乙炔不易发生渗碳以外的反应。因此,利用通过扩散方程而求出的碳的扩散通量的扩散模拟,从而可以算出理论渗碳气体流量FT。In conventional vacuum carburizing treatments, propane gas was mostly used. However, in addition to the carburization reaction, propane gas also undergoes decomposition reactions into methane, ethylene, acetylene, hydrogen, etc. When a large amount of methane and ethylene are generated due to the decomposition reaction, they do not contribute to the carburizing reaction and are exhausted from the vacuum carburizing furnace. Therefore, when propane gas is used, the theoretical carburizing gas flow rate FT cannot be calculated using diffusion simulation of the diffusion flux of carbon obtained from the diffusion equation. On the other hand, acetylene is not prone to reactions other than carburization. Therefore, the theoretical carburizing gas flow rate FT can be calculated using diffusion simulation of the diffusion flux of carbon obtained from the diffusion equation.
在本实施方式中,作为渗碳气体的乙炔的纯度为98%以上即可。对于乙炔,例如可以将在丙酮中溶解的乙炔、在二甲基甲酰胺(DMF)中溶解的乙炔用作渗碳气体。优选作为渗碳气体使用在DMF中溶解的乙炔。该情况下,可以抑制溶剂向炉内气氛的混入。将向真空渗碳炉供给乙炔的供给源设为储气罐的情况下,从储气罐向真空渗碳炉内供给乙炔时的一次压力优选为0.5MPa以上。供给到真空渗碳炉的情况下,优选使用减压阀减压至0.20MPa以下进行供给。In this embodiment, the purity of acetylene as the carburizing gas may be 98% or more. For acetylene, for example, acetylene dissolved in acetone or acetylene dissolved in dimethylformamide (DMF) can be used as the carburizing gas. Acetylene dissolved in DMF is preferably used as the carburizing gas. In this case, mixing of the solvent into the furnace atmosphere can be suppressed. When the supply source of acetylene to the vacuum carburizing furnace is a gas tank, the primary pressure when supplying acetylene from the gas tank into the vacuum carburizing furnace is preferably 0.5 MPa or more. When supplying to a vacuum carburizing furnace, it is preferable to use a pressure reducing valve to reduce the pressure to 0.20 MPa or less before supplying.
[渗碳工序(S30)的详细][Details of the carburizing process (S30)]
渗碳工序(S30)包括:分压测定工序S0、前期渗碳工序S1和后期渗碳工序S2。以下,对各工序的详细进行说明。The carburizing process (S30) includes: a partial pressure measurement process S0, an early carburizing process S1, and a late carburizing process S2. The details of each process will be described below.
[事先准备][Prepare in advance]
在实施真空渗碳处理方法前,作为事先准备,事先确定符合成为对象的钢材的理论渗碳气体流量FT,事先求出图1所示的、渗碳工序(S30)的结束时间ta为止的理论渗碳气体流量FT的经时变化。理论渗碳气体流量FT可以基于扩散模拟而确定,也可以基于实验而确定。Before implementing the vacuum carburizing treatment method, as a preliminary preparation, the theoretical carburizing gas flow rate FT corresponding to the target steel material is determined in advance, and the theoretical carburizing gas flow rate FT shown in Figure 1 is determined in advance until the end time ta of the carburizing process (S30). Time-dependent changes in the carburizing gas flow rate FT. The theoretical carburizing gas flow rate FT can be determined based on diffusion simulation or based on experiments.
[分压测定工序S0][Partial pressure measurement step S0]
在分压测定工序S0中,在渗碳工序(S30)中,测定真空渗碳炉内的气氛中的氢分压和乙炔分压。具体而言,持续地测定真空渗碳炉内的气氛中的氢分压和乙炔分压。此处,“持续地”是指,经时地多次测定氢分压和乙炔分压。可以连续地测定氢分压和乙炔分压,也可以以规定的时间间隔测定氢分压和乙炔分压。测定用公知的分压测定器而进行。分压测定器例如为四级杆质谱仪。但是,作为分压测定器,也可以使用四级杆质谱仪以外的其他分压测定器。In the partial pressure measurement step S0, in the carburizing step (S30), the hydrogen partial pressure and the acetylene partial pressure in the atmosphere in the vacuum carburizing furnace are measured. Specifically, the hydrogen partial pressure and the acetylene partial pressure in the atmosphere in the vacuum carburizing furnace are continuously measured. Here, "continuously" means that the hydrogen partial pressure and the acetylene partial pressure are measured multiple times over time. The partial pressure of hydrogen and partial pressure of acetylene can be measured continuously or at specified time intervals. The measurement is performed using a known partial pressure measuring device. The partial pressure measuring device is, for example, a quadrupole mass spectrometer. However, as the partial pressure measuring device, a partial pressure measuring device other than a quadrupole mass spectrometer may be used.
在分压测定工序S0中,经时地测定真空渗碳炉内的气氛中的氢分压和乙炔分压。亦即,监控真空渗碳炉内的气氛中的氢分压和乙炔分压。基于经时地测得的氢分压和乙炔分压,确定时间t0(渗碳工序开始后、乙炔分压成为氢分压的0.8倍以上的最初的时间)。In the partial pressure measurement step S0, the hydrogen partial pressure and the acetylene partial pressure in the atmosphere in the vacuum carburizing furnace are measured over time. That is, the hydrogen partial pressure and the acetylene partial pressure in the atmosphere in the vacuum carburizing furnace are monitored. Based on the hydrogen partial pressure and the acetylene partial pressure measured over time, time t0 (the first time after the carburizing process is started when the acetylene partial pressure becomes 0.8 times or more of the hydrogen partial pressure) is determined.
使用四级杆质谱仪作为分压测定器的情况下,四级杆质谱仪依次测定各成分气体(氢、乙炔)。因此,氢分压的测定时间与乙炔的测定时间偏离。四级杆质谱仪的各成分(氢、乙炔)的分析时间优选0.2秒以上且2.0秒以下,分析间隔优选4.0秒以下。When a quadrupole mass spectrometer is used as a partial pressure measuring device, the quadrupole mass spectrometer sequentially measures each component gas (hydrogen, acetylene). Therefore, the measurement time of hydrogen partial pressure deviates from the measurement time of acetylene. The analysis time of each component (hydrogen, acetylene) of the quadrupole mass spectrometer is preferably 0.2 seconds or more and 2.0 seconds or less, and the analysis interval is preferably 4.0 seconds or less.
例如,使用四级杆质谱仪作为分压测定器的情况下,假定以0.5秒分析氢后,以0.5秒分析乙炔,自氢分析开始起2.0秒后,再次以0.5秒分析氢,然后,以0.5秒分析乙炔。该情况下,各成分(氢、乙炔)的分析时间为0.5秒,分析间隔为2.0秒。以下的说明中,将各成分的分析期间定义为“分析阶跃”。另外,将从测定阶跃的开始时间起至下一个测定阶跃的开始时间为止的期间定义为“分析间隔”。上述例子的情况下,分析阶跃为1.0秒(氢的分析时间0.5秒+乙炔的分析时间0.5秒),分析间隔为2.0秒。For example, when a quadrupole mass spectrometer is used as a partial pressure measuring device, it is assumed that after hydrogen is analyzed for 0.5 seconds, acetylene is analyzed for 0.5 seconds, and 2.0 seconds after the start of hydrogen analysis, hydrogen is analyzed again for 0.5 seconds, and then, Acetylene is analyzed in 0.5 seconds. In this case, the analysis time of each component (hydrogen, acetylene) is 0.5 seconds, and the analysis interval is 2.0 seconds. In the following description, the analysis period of each component is defined as an "analysis step." In addition, the period from the start time of the measurement step to the start time of the next measurement step is defined as the "analysis interval". In the case of the above example, the analysis step is 1.0 seconds (hydrogen analysis time 0.5 seconds + acetylene analysis time 0.5 seconds), and the analysis interval is 2.0 seconds.
使用四级杆质谱仪作为分压测定器的情况下,乙炔分压成为氢分压的0.8倍以上的时间、亦即、图3中的时间t0的判断以如下方法进行。使某个分析阶跃的开始时间为t1、该分析阶跃的结束时间为t2。在分析阶跃中,可以先测定氢分压,也可以先测定乙炔分压。进而,将下一个分析阶跃的开始时间定义为t3、该分析阶跃的结束时间定义为t4。此时,分析期间成为时间t1~时间t3之间的时间。When a quadrupole mass spectrometer is used as the partial pressure measuring device, the time required for the acetylene partial pressure to become 0.8 times or more of the hydrogen partial pressure, that is, the time t0 in FIG. 3 is determined as follows. Let the start time of an analysis step be t1 and the end time of the analysis step be t2. In the analysis step, the hydrogen partial pressure can be measured first, or the acetylene partial pressure can be measured first. Furthermore, the start time of the next analysis step is defined as t3, and the end time of the analysis step is defined as t4. At this time, the analysis period is the time between time t1 and time t3.
该情况下、时间t1~时间t2时的分析阶跃中得到的乙炔分压为相同的分析阶跃(亦即,时间t1~时间t2时的分析阶跃)中得到的氢分压的0.8倍以上、且经过分析间隔后的下一个时间t3~时间t4时的分析阶跃中得到的氢分压为时间t1~时间t2时的分析阶跃中得到的乙炔分压的1.25倍以下的情况下,将测定该乙炔分压的分析阶跃的结束时间t2定义为时间t0。In this case, the acetylene partial pressure obtained in the analysis step from time t1 to time t2 is 0.8 times the hydrogen partial pressure obtained in the same analysis step (that is, the analysis step from time t1 to time t2). above, and the hydrogen partial pressure obtained in the next analysis step from time t3 to time t4 after the analysis interval is 1.25 times or less the acetylene partial pressure obtained in the analysis step from time t1 to time t2 , the end time t2 of the analysis step for measuring the acetylene partial pressure is defined as time t0.
不仅乙炔分压为相同的分析阶跃中得到的氢分压的0.8倍以上、而且下一个分析阶跃中得到的氢分压为前1个分析阶跃中得到的乙炔分压的1.25倍以下也作为条件的理由如下所述。假定渗碳气体向炉内开始流动时为时间t1~时间t2的分析阶跃中、结束氢分压的测定后、且测定乙炔分压前的情况下,该分析阶跃中得到的氢分压成为0。因此,该分析阶跃中得到的乙炔分压必须成为氢分压的0.8倍以上。将该分析阶跃的结束时间认定为时间t0的情况下,实际上成为未充分向炉内导入乙炔气体。因此,必须不将这种情况认定为时间t0。上述情况时,经过分析间隔后的下一个分析阶跃(时间t3~时间t4)时测定的氢分压大幅超过前1个分析阶跃中得到的乙炔分压的1.25倍。这是由于,通过导入乙炔气体,从而氢分压急剧变高。Not only is the acetylene partial pressure more than 0.8 times the hydrogen partial pressure obtained in the same analysis step, but the hydrogen partial pressure obtained in the next analysis step is less than 1.25 times the acetylene partial pressure obtained in the previous analysis step. The reasons for the conditions are as follows. Assume that when the carburizing gas starts flowing into the furnace, it is in the analysis step from time t1 to time t2, after the measurement of the hydrogen partial pressure is completed, and before the acetylene partial pressure is measured, the hydrogen partial pressure obtained in this analysis step becomes 0. Therefore, the acetylene partial pressure obtained in this analysis step must be at least 0.8 times the hydrogen partial pressure. When the end time of this analysis step is determined as time t0, the acetylene gas is actually not fully introduced into the furnace. Therefore, this situation must not be recognized as time t0. In the above case, the hydrogen partial pressure measured at the next analysis step after the analysis interval (time t3 to time t4) greatly exceeds 1.25 times the acetylene partial pressure obtained in the previous analysis step. This is because the introduction of acetylene gas sharply increases the hydrogen partial pressure.
另一方面,向炉内充分导入渗碳气体,结果得到的乙炔分压成为相同的分析阶跃中得到的氢分压的0.8倍以上的的情况下,经过分析间隔后的下一个分析阶跃中得到的氢分压成为前次的分析阶跃中得到的乙炔分压的1.25倍以下。这是由于,如图3所示,向炉内充分导入渗碳气体的情况下,氢分压随着时间经过不增加反而减少。On the other hand, when carburizing gas is fully introduced into the furnace and the resulting acetylene partial pressure becomes 0.8 times or more of the hydrogen partial pressure obtained in the same analysis step, the next analysis step after the analysis interval The hydrogen partial pressure obtained in the previous analysis step is less than 1.25 times the acetylene partial pressure obtained in the previous analysis step. This is because, as shown in Fig. 3, when the carburizing gas is fully introduced into the furnace, the hydrogen partial pressure does not increase but decreases with the passage of time.
因此,使用四级杆质谱仪作为分压测定器的情况下,得到的乙炔分压为相同的分析阶跃中得到的氢分压的0.8倍以上、且经过分析间隔后的下一次分析阶跃中得到的氢分压为前1个分析阶跃中得到的乙炔分压的1.25倍以下的情况下,将测定该乙炔分压的分析阶跃的结束时间t2定义为时间t0。Therefore, when a quadrupole mass spectrometer is used as the partial pressure measuring device, the obtained acetylene partial pressure is more than 0.8 times the hydrogen partial pressure obtained in the same analysis step, and the next analysis step after the analysis interval has elapsed When the hydrogen partial pressure obtained in is 1.25 times or less the acetylene partial pressure obtained in the previous analysis step, the end time t2 of the analysis step for measuring the acetylene partial pressure is defined as time t0.
需要说明的是,炉内气体(氢、乙炔)可以在炉内进行分析,也可以提取到炉外进行分析。在炉内分析炉内气体的情况下,使用设置于炉内的分压测定器。分压测定器也可以为上述四级杆质谱仪以外的测定器。另外,也可以根据每个各成分气体,分开使用分压测定器。例如,可以用四级杆质谱仪分析乙炔分压,用其他分压测定器分析氢分压。It should be noted that the gas in the furnace (hydrogen, acetylene) can be analyzed inside the furnace, or it can be extracted outside the furnace for analysis. When analyzing the gas in the furnace, a partial pressure measuring device installed in the furnace is used. The partial pressure measuring device may be a measuring device other than the above-mentioned quadrupole mass spectrometer. Alternatively, separate partial pressure measuring devices can be used for each gas component. For example, a quadrupole mass spectrometer can be used to analyze the acetylene partial pressure and another partial pressure measurer can be used to analyze the hydrogen partial pressure.
渗碳工序(S30)在上述减压下供给渗碳气体。因此,渗碳气体在炉内整体中迅速地发生渗碳反应。因此,炉内气体的分压测定结果在炉内不易分布不均。亦即,炉内气体的分析结果可以视为在炉内基本均匀。In the carburizing step (S30), carburizing gas is supplied under the above-mentioned reduced pressure. Therefore, the carburizing gas rapidly causes carburizing reaction throughout the furnace. Therefore, the partial pressure measurement results of the gas in the furnace are less likely to be unevenly distributed in the furnace. That is, the analysis results of the gas in the furnace can be considered to be substantially uniform within the furnace.
[前期渗碳工序S1][Preliminary carburizing process S1]
如图3所示,将从渗碳工序(S30)开始起至乙炔分压成为氢分压的0.8倍以上的最初的时间t0为止的期间定义为前期渗碳工序S1。在前期渗碳工序S1中,以满足如下条件I的方式,调整实际渗碳气体流量FR。As shown in FIG. 3 , the period from the start of the carburizing process (S30) to the first time t0 when the acetylene partial pressure becomes 0.8 times or more of the hydrogen partial pressure is defined as the early carburizing process S1. In the preliminary carburizing step S1, the actual carburizing gas flow rate FR is adjusted so that the following condition I is satisfied.
(I)在前期渗碳工序S1中,使实际渗碳气体流量FR为理论渗碳气体流量FTta/10以上且理论渗碳气体流量FT4以下。(I) In the preliminary carburizing step S1, the actual carburizing gas flow rate FR is set to be not less than the theoretical carburizing gas flow rate FT ta/10 and not more than the theoretical carburizing gas flow rate FT 4 .
图5为示出本实施方式的真空渗碳处理方法的前期渗碳工序S1中的气体流量设定值的一例的图。在前期渗碳工序S1中,使实际渗碳气体流量FR为图5中的阴影区域的范围内(FTta/10以上且FT4以下)。FIG. 5 is a diagram showing an example of the gas flow rate setting value in the preliminary carburizing step S1 of the vacuum carburizing treatment method according to this embodiment. In the preliminary carburizing step S1, the actual carburizing gas flow rate FR is set within the range of the hatched area in FIG. 5 (FT ta/10 or more and FT 4 or less).
前期渗碳工序S1中的实际渗碳气体流量FR如果低于时间ta/10时的理论渗碳气体流量FTta/10,则在前期渗碳工序S1中,渗碳气体的供给过度不足。该情况下,实施了真空渗碳处理方法的钢材(渗碳部件)中,渗碳分布不均变大。另一方面,前期渗碳工序S1中的实际渗碳气体流量FR如果超过自渗碳工序开始起4秒时刻时的理论渗碳气体流量FT4,则实际渗碳气体流量FR过多。该情况下,经过时间t0后至时间4t0为止,将实际渗碳气体流量FR调整为FA×√(t0/t)以上且2FA√(t0/t)以下耗费时间。因此,剩余气体(乙炔气体)会过剩地残留于真空渗碳炉内,变得容易产生煤。其结果,在实施真空渗碳处理方法而制造的渗碳部件(钢材)中,渗碳分布不均变大。If the actual carburizing gas flow rate FR in the early carburizing step S1 is lower than the theoretical carburizing gas flow rate FT ta/10 at time ta/10 , the supply of the carburizing gas in the early carburizing step S1 is excessively insufficient. In this case, in the steel material (carburized component) subjected to the vacuum carburizing treatment method, the carburization distribution becomes uneven. On the other hand, if the actual carburizing gas flow rate FR in the early carburizing step S1 exceeds the theoretical carburizing gas flow rate FT 4 at 4 seconds from the start of the carburizing step, the actual carburizing gas flow rate FR is too much. In this case, it takes time to adjust the actual carburizing gas flow rate FR to FA×√(t0/t) or more and 2FA√(t0/t) or less until time 4t0 after time t0 has elapsed. Therefore, excess gas (acetylene gas) remains excessively in the vacuum carburizing furnace, and coal is easily generated. As a result, in the carburized parts (steel materials) manufactured by performing the vacuum carburizing treatment method, the carburization distribution becomes uneven.
如果使前期渗碳工序S1中实际渗碳气体流量FR为时间ta/10时的理论渗碳气体流量FTta/10以上且自渗碳工序开始起4秒时刻时的理论渗碳气体流量FT4以下,则将满足后述的后期渗碳工序S2中的实际渗碳气体流量FR的条件II和III作为前提,可以充分抑制真空渗碳处理后的渗碳部件(钢材)的渗碳分布不均。前期渗碳工序S1中的实际渗碳气体流量FR的调整可以用公知的方法。例如,可以由供给阀调整供给到真空渗碳炉的渗碳气体的流量,调整实际渗碳气体流量FR,也可以由其他公知的方法调整实际渗碳气体流量FR。实际渗碳气体流量FR的调整可以由真空渗碳炉的公知的控制装置实施。控制装置例如通过调整上述供给阀的开度而调整实际渗碳气体流量FR。If the actual carburizing gas flow rate FR in the early carburizing process S1 is the theoretical carburizing gas flow rate FT at time ta/10, it is not less than ta/10 and the theoretical carburizing gas flow rate FT 4 is 4 seconds from the start of the carburizing process. In the following, on the premise that the conditions II and III of the actual carburizing gas flow rate FR in the later-described post-carburizing step S2 are satisfied, uneven carburization distribution of the carburized parts (steel materials) after the vacuum carburizing treatment can be sufficiently suppressed. . The actual carburizing gas flow rate FR in the preliminary carburizing step S1 can be adjusted by a known method. For example, the supply valve can be used to adjust the flow rate of the carburizing gas supplied to the vacuum carburizing furnace to adjust the actual carburizing gas flow rate FR, or other known methods can be used to adjust the actual carburizing gas flow rate FR. The adjustment of the actual carburizing gas flow rate FR can be implemented by a known control device of the vacuum carburizing furnace. The control device adjusts the actual carburizing gas flow rate FR, for example, by adjusting the opening of the supply valve.
前期渗碳工序S1中的实际渗碳气体流量FR优选为恒定。实际渗碳气体流量FR如果为恒定,则可以精度高地测定炉中的氢分压和乙炔分压的变动。前期渗碳工序S1中的实际渗碳气体流量FR如果变动,则炉中的氢分压的变动与乙炔分压的变动受到实际渗碳气体流量FR的变动的影响。前期渗碳工序S1中的实际渗碳气体流量FR如果为恒定,则可以精度高地测定炉中的氢分压与乙炔分压的变动。因此,前期渗碳工序S1中的实际渗碳气体流量FR优选为恒定。例如如图3所示,前期渗碳工序S1中的实际渗碳气体流量FR优选为恒定。该情况下,通过前期渗碳工序S1为恒定的实际渗碳气体流量FR的值成为前期渗碳工序S1中的实际渗碳气体流量FA。然而,在实际操作中,实际渗碳气体流量未完全如设定值那样成为恒定,对于本领域技术人员来说公知的技术常识是:自设定值在某种程度的范围内波动。因此,使前期渗碳工序S1中的实际渗碳气体流量FR为恒定的情况下,实际渗碳气体流量FR允许设定值的±10%的余量。亦即,通过前期渗碳工序S1实际渗碳气体流量FR在确定的设定值的±10%内推移的情况下,使该设定值为前期渗碳工序中的实际渗碳气体流量FA的值。亦即,本说明书中,FA是指,前期渗碳工序S1中的设定值±10%的范围内的渗碳气体流量。优选FA为前期渗碳工序S1中的设定值±5%的范围内。It is preferable that the actual carburizing gas flow rate FR in the preliminary carburizing step S1 is constant. If the actual carburizing gas flow rate FR is constant, the changes in the hydrogen partial pressure and the acetylene partial pressure in the furnace can be measured with high accuracy. If the actual carburizing gas flow rate FR in the early carburizing step S1 fluctuates, the fluctuation of the hydrogen partial pressure and the acetylene partial pressure in the furnace will be affected by the fluctuation of the actual carburizing gas flow rate FR. If the actual carburizing gas flow rate FR in the preliminary carburizing step S1 is constant, the changes in the hydrogen partial pressure and the acetylene partial pressure in the furnace can be measured with high accuracy. Therefore, it is preferable that the actual carburizing gas flow rate FR in the preliminary carburizing step S1 is constant. For example, as shown in FIG. 3 , the actual carburizing gas flow rate FR in the preliminary carburizing step S1 is preferably constant. In this case, the value of the actual carburizing gas flow rate FR that is constant through the early carburizing step S1 becomes the actual carburizing gas flow rate FA in the early carburizing step S1. However, in actual operation, the actual carburizing gas flow rate is not completely constant as the set value. It is common technical knowledge for those skilled in the art that the set value fluctuates within a certain range. Therefore, when the actual carburizing gas flow rate FR in the early carburizing step S1 is made constant, a margin of ±10% of the set value is allowed for the actual carburizing gas flow rate FR. That is, when the actual carburizing gas flow rate FR changes within ±10% of the determined set value through the early carburizing step S1, the set value is set to the actual carburizing gas flow rate FA in the early carburizing step. value. That is, in this specification, FA refers to the carburizing gas flow rate within the range of ±10% of the setting value in the preliminary carburizing step S1. FA is preferably within the range of ±5% of the setting value in the early carburizing step S1.
[后期渗碳工序S2][Later carburizing process S2]
如图3所示,将从时间t0起至渗碳工序结束时间ta为止的期间定义为后期渗碳工序S2。在后期渗碳工序S2中,以满足如下条件II和III的方式,调整实际渗碳气体流量FR。As shown in FIG. 3 , the period from time t0 to the carburizing process end time ta is defined as the late carburizing process S2. In the post-carburizing step S2, the actual carburizing gas flow rate FR is adjusted so that the following conditions II and III are satisfied.
(II)在后期渗碳工序S2中时间t0~4t0的期间,使实际渗碳气体流量FR为FA×√(t0/t)以上且FA以下。(II) During the period from time t0 to 4t0 in the late carburizing step S2, the actual carburizing gas flow rate FR is set to FA×√(t0/t) or more and FA or less.
(III)在后期渗碳工序S2中时间4t0~时间ta的期间,使实际渗碳气体流量FR为FA×√(t0/t)以上且2FA×√(t0/t)以下。(III) During the period from time 4t0 to time ta in the late carburizing step S2, the actual carburizing gas flow rate FR is set to FA×√(t0/t) or more and 2FA×√(t0/t) or less.
此处,t为自开始渗碳时起的时间。Here, t is the time since carburizing started.
总之,在后期渗碳工序S2中,以成为图3中的阴影的范围内的方式调整实际渗碳气体流量FR。由此,在后期渗碳工序S2中,可以抑制过剩的渗碳气体残留于真空渗碳炉内的情况。其结果,可以降低煤、焦油的产生,可以抑制实施真空渗碳处理方法后的渗碳部件(钢材)的渗碳分布不均。In short, in the post-carburizing step S2, the actual carburizing gas flow rate FR is adjusted so that it falls within the hatched range in FIG. 3 . Thereby, in the post-carburizing step S2, excess carburizing gas can be suppressed from remaining in the vacuum carburizing furnace. As a result, the generation of coal and tar can be reduced, and uneven carburization distribution of the carburized parts (steel materials) after the vacuum carburizing treatment method is performed can be suppressed.
[关于条件II][About condition II]
在后期渗碳工序S2的时间t0~4t0的期间,实际渗碳气体流量如果低于FA×√(t0/t),则气体流量不足。该情况下,在真空渗碳炉内渗碳气体的分布产生分布不均。例如在渗碳气体的供给喷嘴附近,渗碳气体的浓度高,从供给喷嘴偏离的区域中,渗碳气体的浓度低。其结果,在真空渗碳处理工序后的钢材中,渗碳分布不均变大。During the period from time t0 to 4t0 in the late carburizing step S2, if the actual carburizing gas flow rate is lower than FA×√(t0/t), the gas flow rate is insufficient. In this case, the distribution of the carburizing gas in the vacuum carburizing furnace becomes uneven. For example, the concentration of the carburizing gas is high near the supply nozzle of the carburizing gas, and the concentration of the carburizing gas is low in the area deviated from the supply nozzle. As a result, the carburization distribution becomes uneven in the steel material after the vacuum carburizing process.
另一方面,在后期渗碳工序S2的时间t0~4t0的期间,实际渗碳气体流量如果超过FA,则过剩地供给渗碳气体。该情况下,由于该剩余气体而产生煤、焦油。其结果,真空渗碳处理后的渗碳部件(钢材)的渗碳分布不均变大。On the other hand, if the actual carburizing gas flow rate exceeds FA during the period from time t0 to 4t0 in the late carburizing step S2, the carburizing gas will be supplied excessively. In this case, coal and tar are generated due to the remaining gas. As a result, the carburization distribution unevenness of the carburized component (steel material) after the vacuum carburization process becomes large.
因此,在后期渗碳工序S2的时间t0~4t0的期间,使实际渗碳气体流量FR为FA×√(t0/t)以上且FA以下。该情况下,将满足条件I和条件III作为条件,可以充分确保渗碳反应所需的渗碳气体流量,且可以抑制煤、焦油的产生。其结果,可以抑制渗碳部件的渗碳分布不均的发生。需要说明的是,如上述,实际渗碳气体流量FR允许设定值的±10%的余量。因此,如上述,对于前期渗碳工序S1中的实际渗碳气体流量FA,也存在同样的余量。亦即,本说明书中,前期渗碳工序中的实际渗碳气体流量FA是指,前期渗碳工序S1中的实际渗碳气体FR的设定值±10%的范围内的渗碳气体流量。另外,可以直至后期渗碳工序S2的时间t0~4t0的期间的中途,接着前期渗碳工序S1,以FA维持实际渗碳气体流量FR,之后,调整实际渗碳气体流量为FA~FA×√(t0/t)的范围内。Therefore, during the period from time t0 to 4t0 in the late carburizing step S2, the actual carburizing gas flow rate FR is set to be FA×√(t0/t) or more and FA or less. In this case, by satisfying Condition I and Condition III, the carburizing gas flow rate required for the carburizing reaction can be sufficiently ensured, and the generation of coal and tar can be suppressed. As a result, the occurrence of uneven carburization distribution in the carburized component can be suppressed. It should be noted that, as mentioned above, the actual carburizing gas flow rate FR allows a margin of ±10% of the set value. Therefore, as described above, the same margin exists for the actual carburizing gas flow rate FA in the early carburizing step S1. That is, in this specification, the actual carburizing gas flow rate FA in the early carburizing process refers to the carburizing gas flow rate within the range of ±10% of the set value of the actual carburizing gas FR in the early carburizing process S1. In addition, in the middle of the period from time t0 to 4t0 in the late carburizing step S2, the actual carburizing gas flow rate FR may be maintained at FA, following the early carburizing step S1, and then the actual carburizing gas flow rate may be adjusted to FA~FA×√ within the range of (t0/t).
[关于条件III][About condition III]
在后期渗碳工序S2的时间4t0~ta的期间,实际渗碳气体流量如果低于FA×√(t0/t),则气体流量不足。该情况下,在真空渗碳炉内渗碳气体的分布产生分布不均。例如,在渗碳气体的供给喷嘴附近,渗碳气体的浓度高,从供给喷嘴偏离的区域中,渗碳气体的浓度低。其结果,在真空渗碳处理工序后的钢材中,渗碳分布不均变大。During the period from time 4t0 to ta in the late carburizing step S2, if the actual carburizing gas flow rate is lower than FA×√(t0/t), the gas flow rate is insufficient. In this case, the distribution of the carburizing gas in the vacuum carburizing furnace becomes uneven. For example, the concentration of the carburizing gas is high near the supply nozzle of the carburizing gas, and the concentration of the carburizing gas is low in the area deviated from the supply nozzle. As a result, the carburization distribution becomes uneven in the steel material after the vacuum carburizing process.
另一方面,在后期渗碳工序S2的时间4t0~ta的期间,实际渗碳气体流量如果超过2FA×√(t0/t),则过剩地供给渗碳气体。该情况下,由于该剩余气体而产生煤、焦油。其结果,真空渗碳处理后的渗碳部件(钢材)的渗碳分布不均变大。On the other hand, if the actual carburizing gas flow rate exceeds 2FA×√(t0/t) during the period from time 4t0 to ta in the late carburizing step S2, the carburizing gas will be supplied excessively. In this case, coal and tar are generated due to the remaining gas. As a result, the carburization distribution unevenness of the carburized component (steel material) after the vacuum carburization process becomes large.
因此,在后期渗碳工序S2的时间4t0~ta的期间,使实际渗碳气体流量FR为FA×√(t0/t)以上且2FA×√(t0/t)以下。该情况下,将满足条件I和条件II作为条件,可以充分确保渗碳反应所需的渗碳气体流量,且可以抑制煤、焦油的产生。其结果,可以抑制渗碳部件的渗碳分布不均的发生。Therefore, during the period from time 4t0 to ta in the late carburizing step S2, the actual carburizing gas flow rate FR is set to FA×√(t0/t) or more and 2FA×√(t0/t) or less. In this case, by satisfying Condition I and Condition II, the carburizing gas flow rate required for the carburizing reaction can be sufficiently ensured, and the generation of coal and tar can be suppressed. As a result, the occurrence of uneven carburization distribution in the carburized component can be suppressed.
在后期渗碳工序S2中,实际渗碳气体流量FR只要满足条件II和条件III就对实际渗碳气体流量FR的经时变化没有特别限定。例如,如图6所示,在后期渗碳工序S2的时间4t0~ta的期间内,可以开始实际渗碳气体流量FR的降低。In the post-carburizing step S2, as long as the actual carburizing gas flow rate FR satisfies Condition II and Condition III, there is no particular limitation on the time-dependent change of the actual carburizing gas flow rate FR. For example, as shown in FIG. 6 , the reduction of the actual carburizing gas flow rate FR may be started during the period from time 4t0 to ta in the post-carburizing step S2.
在后期渗碳工序S2中,如图6所示,可以随着时间经过,重复实际渗碳气体流量FR的维持与降低,阶段性地降低实际渗碳气体流量FR。另外,如图7所示,在后期渗碳工序S2中,可以随着时间经过逐渐减少实际渗碳气体流量FR。进而,如图8所示,可以随着时间经过逐渐减少实际渗碳气体流量FR后再上升。总之,在后期渗碳工序S2中,只要满足条件II和条件III就对实际渗碳气体流量FR的经时变动没有特别限定。In the post-carburizing step S2, as shown in Fig. 6, the actual carburizing gas flow rate FR can be maintained and reduced stepwise by repeating the maintenance and reduction of the actual carburizing gas flow rate FR as time passes. In addition, as shown in FIG. 7 , in the post-carburizing step S2 , the actual carburizing gas flow rate FR can be gradually reduced as time passes. Furthermore, as shown in FIG. 8 , the actual carburizing gas flow rate FR can be gradually reduced as time passes and then increased. In short, in the post-carburizing step S2, as long as the conditions II and III are satisfied, there is no particular limitation on the temporal variation of the actual carburizing gas flow rate FR.
[渗碳工序(S30)中的渗碳气压][Carburizing air pressure in the carburizing process (S30)]
渗碳工序(S30)中的渗碳气体的压力(渗碳气压)没有特别限定。优选使前期渗碳工序S1中的渗碳气压高于后期渗碳工序S2中的渗碳气压。该情况下,在后期渗碳工序S2中,可以进一步抑制煤的产生。进一步优选使后期渗碳工序S2中的渗碳气压随着时间的经过而降低。渗碳工序(S30)中的优选的渗碳气压为1kPa以下。The pressure of the carburizing gas (carburizing gas pressure) in the carburizing step (S30) is not particularly limited. It is preferable that the carburizing gas pressure in the early carburizing step S1 is higher than the carburizing gas pressure in the late carburizing step S2. In this case, in the post-carburizing step S2, the generation of coal can be further suppressed. It is further preferable to reduce the carburizing gas pressure with the passage of time in the post-carburizing step S2. The preferable carburizing gas pressure in the carburizing step (S30) is 1 kPa or less.
[渗碳工序(S30)的时间ta][Time ta of the carburizing process (S30)]
从渗碳工序(S30)开始(t=0)起至结束为止的时间即时间ta根据真空渗碳处理工序后的钢材的表层的目标碳浓度在真空渗碳处理开始前适宜设定。时间ta可以根据使用扩散方程的上述扩散模拟而确定。时间ta可以事先实施真空扩散处理试验由实验数据确定。时间ta优选长。时间ta长时,实际渗碳气体流量FR的调整变得容易。时间ta的优选下限为50秒,进一步优选为1分钟(60秒),进一步优选为3分钟(180秒)。时间ta的优选上限为120分钟,进一步优选为60分钟。The time ta, which is the time from the start (t=0) to the end of the carburizing process (S30), is appropriately set before starting the vacuum carburizing process based on the target carbon concentration of the surface layer of the steel material after the vacuum carburizing process. The time ta can be determined based on the above diffusion simulation using the diffusion equation. The time ta can be determined by performing a vacuum diffusion treatment test in advance and based on experimental data. The time ta is preferably long. When the time ta is long, the actual carburizing gas flow rate FR becomes easy to adjust. The preferable lower limit of the time ta is 50 seconds, more preferably 1 minute (60 seconds), and still more preferably 3 minutes (180 seconds). The preferable upper limit of time ta is 120 minutes, and more preferably, it is 60 minutes.
[扩散工序(S40)][Diffusion process (S40)]
扩散工序(S40)为真空渗碳处理方法中公知的工序。在扩散工序(S40)中,停止渗碳气体向真空渗碳炉的供给,以渗碳温度Tc将钢材保持规定时间。在扩散工序(S40)中,使由于渗碳工序(S30)而侵入到钢材的碳扩散到钢材内部。由此,渗碳工序(S30)中变高的表层的碳浓度降低,规定深度的碳浓度上升。在扩散工序(S40)中,在真空渗碳炉内进行氮气的导入和基于真空泵的真空排气,设为1000Pa以下的氮气气氛或设为真空。真空例如为10Pa以下。通过将真空渗碳炉内设为1000Pa以下的氮气气氛或真空状态,从而抑制碳从钢材表面的侵入以及脱离。The diffusion step (S40) is a well-known step in the vacuum carburizing treatment method. In the diffusion step (S40), the supply of the carburizing gas to the vacuum carburizing furnace is stopped, and the steel material is maintained at the carburizing temperature Tc for a predetermined time. In the diffusion step (S40), the carbon that has invaded the steel material in the carburizing step (S30) is diffused into the steel material. As a result, the carbon concentration in the surface layer that became high in the carburizing step (S30) decreases, and the carbon concentration in the predetermined depth increases. In the diffusion step (S40), nitrogen gas is introduced and vacuum exhaust is performed using a vacuum pump in the vacuum carburizing furnace, and the atmosphere is set to a nitrogen atmosphere of 1000 Pa or less or to a vacuum. The vacuum is, for example, 10 Pa or less. By setting the inside of the vacuum carburizing furnace to a nitrogen atmosphere or vacuum state of 1000 Pa or less, the intrusion and detachment of carbon from the surface of the steel material is suppressed.
需要说明的是,扩散工序(S40)中的保持时间根据真空渗碳处理工序后的钢材的表层的目标碳浓度而适当设定。因此,扩散工序(S40)中的保持时间没有特别限定。In addition, the holding time in the diffusion process (S40) is set appropriately based on the target carbon concentration of the surface layer of the steel material after the vacuum carburizing process. Therefore, the holding time in the diffusion step (S40) is not particularly limited.
[淬火工序(S50)][Quenching process (S50)]
在淬火工序(S50)中,以淬火温度(Ts)将结束了渗碳工序(S30)以及扩散工序(S40)的钢材保持规定时间,之后进行骤冷(淬火)。由此,C浓度高的钢材表层部分相变为马氏体而形成硬化层。淬火工序(S50)为真空渗碳处理方法中公知的工序。In the quenching process (S50), the steel material that has completed the carburizing process (S30) and the diffusion process (S40) is held at the quenching temperature (Ts) for a predetermined time, and then rapidly cooled (quenched). As a result, the surface layer portion of the steel material with a high C concentration transforms into martensite to form a hardened layer. The quenching step (S50) is a well-known step in the vacuum carburizing treatment method.
如图4所示,淬火温度Ts低于渗碳温度Tc的情况下,将扩散工序(S40)后的钢材冷却至淬火温度Ts为止。此时的冷却速度没有特别限定。若考虑真空渗碳处理工序的处理时间,冷却速度越快越优选。优选冷却速度为0.02~30.00℃/秒。在此所谓的冷却速度是指将渗碳温度Tc与淬火温度Ts的温度差除以冷却时间得到的值。As shown in FIG. 4 , when the quenching temperature Ts is lower than the carburizing temperature Tc, the steel material after the diffusion step (S40) is cooled to the quenching temperature Ts. The cooling rate at this time is not particularly limited. Considering the processing time of the vacuum carburizing process, a faster cooling rate is more preferable. The cooling rate is preferably 0.02 to 30.00°C/second. The cooling rate here refers to a value obtained by dividing the temperature difference between the carburizing temperature Tc and the quenching temperature Ts by the cooling time.
使淬火温度Ts低于渗碳温度Tc时的钢材的冷却方法使用公知的冷却方法即可。例如,可以在真空下将钢材放置冷却来进行冷却,或者也可以通过气体冷却来冷却钢材。对在真空下的钢材进行放置冷却的情况下,优选以100Pa以下的压力进行放置冷却。在冷却中使用气体冷却对钢材进行冷却的情况下,优选使用非活性气体作为冷却气体。作为非活性气体,例如优选使用氮气和/或氦气。作为非活性气体,特别是优选使用可以廉价获得的氮气。使用非活性气体作为冷却气体,从而可以抑制钢材的氧化。When the quenching temperature Ts is lower than the carburizing temperature Tc, a known cooling method may be used as the cooling method of the steel material. For example, the steel can be cooled by leaving it to cool under vacuum, or the steel can be cooled by gas cooling. When the steel material is left to cool under vacuum, it is preferably left to cool at a pressure of 100 Pa or less. When the steel material is cooled using gas cooling during cooling, it is preferable to use an inert gas as the cooling gas. As an inert gas, for example, nitrogen and/or helium are preferably used. As the inert gas, it is particularly preferable to use nitrogen which is available at low cost. Using an inert gas as a cooling gas suppresses oxidation of steel.
以淬火温度Ts将钢材保持规定时间之后,将钢材骤冷。淬火温度Ts若为A3相变点(Ar3相变点)以上则没有特别限定。淬火温度Ts的优选下限为800℃,进一步优选为820℃,进一步优选为850℃。淬火温度Ts的优选上限为1130℃,进一步优选为1100℃,进一步优选为950℃,进一步优选为900℃,进一步优选为880℃。After maintaining the steel material at the quenching temperature Ts for a prescribed time, the steel material is quenched. The quenching temperature Ts is not particularly limited as long as it is A 3 transformation point (A r3 transformation point) or higher. The preferable lower limit of the quenching temperature Ts is 800°C, more preferably 820°C, and still more preferably 850°C. The preferable upper limit of the quenching temperature Ts is 1130°C, more preferably 1100°C, still more preferably 950°C, still more preferably 900°C, still more preferably 880°C.
作为淬火工序(S50)中的骤冷方法使用公知的骤冷方法。骤冷方法例如为气冷、水冷、油冷。As the quenching method in the quenching step (S50), a known quenching method is used. The quenching method is, for example, air cooling, water cooling, or oil cooling.
实施以上的真空渗碳处理方法,将钢材制成渗碳部件。本实施方式的真空渗碳处理方法中,使用对成为真空渗碳处理的对象的钢材的、理论渗碳气体流量FT。并且,将渗碳工序(S30)以渗碳工序开始后乙炔分压成为氢分压的0.8倍以上的最初的时间分为前期渗碳工序S1和后期渗碳工序S2。并且,以在前期渗碳工序S1中满足条件I、且在后期渗碳工序S2中满足条件II和条件III的方式,调整实际渗碳气体流量FR。由此,在真空渗碳处理后的钢材中,可以抑制发生渗碳分布不均的情况。Implement the above vacuum carburizing treatment method to make steel into carburized parts. In the vacuum carburizing treatment method of this embodiment, the theoretical carburizing gas flow rate FT for the steel material to be subjected to the vacuum carburizing treatment is used. Furthermore, the carburizing process (S30) is divided into an early carburizing process S1 and a late carburizing process S2 at the first time after the carburizing process is started when the acetylene partial pressure becomes 0.8 times or more of the hydrogen partial pressure. Then, the actual carburizing gas flow rate FR is adjusted so that condition I is satisfied in the early carburizing step S1 and condition II and condition III are satisfied in the late carburizing step S2. This can suppress the occurrence of uneven carburization distribution in the steel material after vacuum carburization.
需要说明的是,本实施方式的真空渗碳处理方法可以还包括其他的工序。例如,真空渗碳处理方法也可以在淬火工序(S50)后包括回火工序。回火工序在公知的条件下实施即可。例如,在回火工序中,以Ac1相变点以下的温度将钢材保持规定时间,之后进行冷却。It should be noted that the vacuum carburizing treatment method of this embodiment may further include other steps. For example, the vacuum carburizing treatment method may include a tempering process after the quenching process (S50). The tempering process may be carried out under known conditions. For example, in the tempering process, the steel material is held at a temperature below the Ac1 transformation point for a predetermined time and then cooled.
另外,本实施方式的真空渗碳处理方法中,可以重复实施多次渗碳工序(S30)和扩散工序(S40)。该情况下,如上述,在每个各渗碳工序(S30)中,确定时间ta和理论渗碳气体流量FT。In addition, in the vacuum carburizing treatment method of this embodiment, the carburizing process (S30) and the diffusion process (S40) can be repeated multiple times. In this case, as described above, the time ta and the theoretical carburizing gas flow rate FT are determined for each carburizing step (S30).
[渗碳部件的制造方法][Manufacturing method of carburized parts]
本实施方式的渗碳部件的制造方法具备对钢材实施上述的真空渗碳处理方法来制造渗碳部件的工序。在通过以上的工序而制造的渗碳部件中,可以抑制渗碳分布不均。The method of manufacturing a carburized component according to this embodiment includes a step of subjecting a steel material to the above-mentioned vacuum carburizing treatment method to manufacture a carburized component. In the carburized parts manufactured through the above steps, uneven carburization distribution can be suppressed.
实施例Example
以下,利用实施例更具体地说明本实施方式的真空渗碳处理方法的效果。以下的实施例中的条件是为了确认本实施方式的真空渗碳处理方法的实施可能性以及效果而采用的一个条件例子。因此,本实施方式的真空渗碳处理方法并不限于该一个条件例子。Hereinafter, the effect of the vacuum carburizing treatment method of this embodiment will be demonstrated more specifically using an Example. The conditions in the following examples are an example of conditions adopted in order to confirm the implementation possibility and effect of the vacuum carburizing treatment method of this embodiment. Therefore, the vacuum carburizing treatment method of this embodiment is not limited to this one condition example.
准备具有相当于JIS G 4053(2008)所规定的SCM415的化学组成的机械结构用钢管(以下,称为钢管)、以及相当于SCM415的圆棒。各试验编号的钢管以及圆棒的C含量均为0.15质量%。钢管的直径为34mm,壁厚为4.5mm,长度为110mm。圆棒的直径为26mm,长度为70mm。真空渗碳处理的评价以圆棒来进行,钢管作为用于调查圆棒在真空渗碳炉内的配置位置所产生的渗碳分布不均的样材来使用。A mechanical structural steel pipe (hereinafter referred to as a steel pipe) having a chemical composition equivalent to SCM415 specified in JIS G 4053 (2008) and a round bar equivalent to SCM415 were prepared. The C content of the steel pipes and round bars of each test number was 0.15% by mass. The diameter of the steel pipe is 34mm, the wall thickness is 4.5mm, and the length is 110mm. The diameter of the round rod is 26mm and the length is 70mm. The evaluation of the vacuum carburizing treatment was performed using round bars, and the steel pipe was used as a sample for investigating the uneven carburization distribution caused by the arrangement position of the round bar in the vacuum carburizing furnace.
将以各试验编号进行真空渗碳处理而成的圆棒以及钢管的总表面积(m2)定义为钢材表面积(m2)。钢材表面积利用以下的式子而求出。The total surface area (m 2 ) of the round bar and steel pipe subjected to vacuum carburizing treatment for each test number is defined as the steel surface area (m 2 ). The surface area of the steel material is determined using the following formula.
钢材表面积=每1个钢管的表面积×钢管个数+每1个圆棒的表面积×圆棒个数Steel surface area = surface area of each steel pipe × number of steel pipes + surface area of each round bar × number of round bars
将得到的钢材表面积示于表1。试验编号1~5、10~13、15和16、18~21中,使用248根钢管和3根圆棒。试验编号6中,使用496根钢管和3根圆棒。试验编号7~9、14和17中,使用124根钢管和3根圆棒。The obtained steel material surface area is shown in Table 1. In test numbers 1 to 5, 10 to 13, 15 and 16, 18 to 21, 248 steel pipes and 3 round bars were used. In test number 6, 496 steel pipes and 3 round bars were used. In test numbers 7 to 9, 14 and 17, 124 steel pipes and 3 round bars were used.
[表1][Table 1]
首先,实施使用扩散方程的扩散模拟,求出理论渗碳气体流量。具体而言,在圆棒以及钢管的厚度方向区分为2μm以上的多个单元。此外,将扩散模拟中的阶跃时间设为0.002~0.02秒。在钢管以及圆棒的化学组成(SCM415)中,利用热力学计算求出渗碳温度下的表面处的与石墨的平衡状态下的平衡组成。进而,求出渗碳温度下的钢材内部的平衡组成、碳的化学势、以及碳的迁移率。热力学计算使用商品名Pandat(商标)。进而,数据库使用商品名PanFe(商标)。此外,碳的迁移率(m2/s)使用以下的式子。First, diffusion simulation using the diffusion equation is performed to obtain the theoretical carburizing gas flow rate. Specifically, the round rod and steel pipe are divided into a plurality of units of 2 μm or more in the thickness direction. In addition, the step time in the diffusion simulation was set to 0.002 to 0.02 seconds. In the chemical composition of steel pipes and round rods (SCM415), thermodynamic calculations are used to determine the equilibrium composition in equilibrium with graphite at the surface at the carburizing temperature. Furthermore, the equilibrium composition inside the steel material at the carburizing temperature, the chemical potential of carbon, and the mobility of carbon were determined. The trade name Pandat (trademark) was used for thermodynamic calculations. Furthermore, the database uses the trade name PanFe (trademark). In addition, the following formula is used for the mobility of carbon (m 2 /s).
m=1.54×10-15exp(-1.61×C-(17300-2920×C)/T)m=1.54×10 -15 exp(-1.61×C-(17300-2920×C)/T)
此处,式中的C为奥氏体中的固溶C浓度(质量%),T为渗碳温度(K)。Here, C in the formula is the concentration of solid solution C in austenite (mass %), and T is the carburizing temperature (K).
在钢管以及圆棒的表面的碳浓度的目标值设为0.70质量%,距表面深度1.0mm处的碳浓度的目标值设为0.40质量%。将以上作为前提条件,在每一阶跃时间实施上述的(A)~(D)的扩散模拟,求出每一阶跃时间各自的理论渗碳气体流量FT。The target value of the carbon concentration on the surface of the steel pipe and the round rod is 0.70 mass%, and the target value of the carbon concentration at a depth of 1.0 mm from the surface is 0.40 mass%. Taking the above as a prerequisite, the above-mentioned diffusion simulations (A) to (D) are performed at each step time to obtain the theoretical carburizing gas flow rate FT at each step time.
算出理论渗碳气体流量FT的结果为理论渗碳气体流量FT可以近似为以下的式子。The result of calculating the theoretical carburizing gas flow rate FT is that the theoretical carburizing gas flow rate FT can be approximated by the following formula.
FT=S×A/√t (6)FT=S×A/√t (6)
此处,A为由式(7)定义的每1m2的渗碳气体流量(NL/分钟),t表示从渗碳开始时起的时间(分钟)。另外,S表示钢材表面积(m2)。Here, A is the carburizing gas flow rate per 1 m 2 (NL/minute) defined by equation (7), and t represents the time (minutes) from the start of carburization. In addition, S represents the steel material surface area (m 2 ).
A=a×T2+b×T+c (7)A=a×T 2 +b×T+c (7)
本实施例(SCM415)的情况下,为a=8.64×10-5、b=-0.141、c=59.0。In the case of this example (SCM415), a=8.64×10 -5 , b=-0.141, and c=59.0.
算出理论渗碳气体流量FT之后,用以下的方法实施实际的真空渗碳处理。首先,准备由被充分地渗碳处理的不锈钢钢材(JIS G 4303(2012)中规定的SUS316)形成的笼。笼中以立起的状态使上述根数的钢管均匀地排列,进而将3个圆棒以立起的状态配置在笼中央、笼左前方、笼右后方。如上所述,将圆棒作为试验材,钢管作为用于确认圆棒的配置位置引起的渗碳分布不均的发生的样材。After calculating the theoretical carburizing gas flow rate FT, the actual vacuum carburizing process is performed using the following method. First, a cage formed of a fully carburized stainless steel material (SUS316 specified in JIS G 4303 (2012)) is prepared. Arrange the above number of steel pipes evenly in the cage in an upright state, and then arrange three round rods in an upright state in the center of the cage, the left front of the cage, and the right rear of the cage. As described above, the round bar was used as the test material and the steel pipe was used as the sample material for confirming the occurrence of uneven carburization distribution due to the arrangement position of the round bar.
将配置有钢材(钢管以及圆棒)的笼插入到真空渗碳炉中,实施真空渗碳处理。然后,得到试验编号1~21的渗碳部件。真空渗碳处理中的条件如表1所示。A cage in which steel materials (steel pipes and round bars) are arranged is inserted into a vacuum carburizing furnace, and vacuum carburizing treatment is performed. Then, carburized parts of test numbers 1 to 21 were obtained. The conditions in the vacuum carburizing treatment are shown in Table 1.
具体而言,在各试验编号中,如下地实施真空渗碳处理。各试验编号中的真空渗碳处理将炉内的压力保持在10Pa以下。在加热工序中,将各试验编号的圆棒加热至表1中示出的渗碳温度Tc。在加热工序后,实施均热工序。在均热工序中,以渗碳温度Tc将钢材(圆棒)保持60分钟。Specifically, in each test number, vacuum carburizing treatment was performed as follows. The vacuum carburizing treatment in each test number kept the pressure in the furnace below 10Pa. In the heating process, the round bar of each test number was heated to the carburizing temperature Tc shown in Table 1. After the heating process, a soaking process is performed. In the soaking process, the steel material (round bar) is maintained at the carburizing temperature Tc for 60 minutes.
在均热工序后,实施渗碳工序。在渗碳工序中,在真空渗碳炉内作为渗碳气体供给乙炔。渗碳工序中的渗碳气压保持在1kPa以下。渗碳工序的结束时间ta(分钟)如表1中记载所述。After the soaking process, a carburizing process is performed. In the carburizing process, acetylene is supplied as carburizing gas in the vacuum carburizing furnace. The carburizing gas pressure in the carburizing process is kept below 1kPa. The end time ta (minutes) of the carburizing process is as described in Table 1.
如上述,将圆棒的1.0mm深度处的碳浓度为0.40质量%作为目标,调整渗碳工序中的渗碳时间和扩散工序中的扩散时间。As described above, the carburizing time in the carburizing process and the diffusion time in the diffusion process are adjusted with the carbon concentration at a depth of 1.0 mm of the round rod being 0.40% by mass.
需要说明的是,在渗碳工序中,用四级杆质谱仪分析真空渗碳炉内的气氛中的气体,持续地测定氢分压和乙炔分压。将氢的质荷比(m/z)设为2、乙炔的质荷比设为26。分析时间为0.5秒,分析间隔为4秒。基于所求出的氢分压和乙炔分压,求出时间t0(乙炔分压成为氢分压的0.8倍以上的最初的时间)。In addition, in the carburizing process, the gas in the atmosphere in the vacuum carburizing furnace is analyzed with a quadrupole mass spectrometer, and the hydrogen partial pressure and the acetylene partial pressure are continuously measured. Let the mass-to-charge ratio (m/z) of hydrogen be 2 and the mass-charge ratio of acetylene be 26. The analysis time is 0.5 seconds and the analysis interval is 4 seconds. Based on the obtained hydrogen partial pressure and acetylene partial pressure, time t0 (the first time when the acetylene partial pressure becomes 0.8 times or more of the hydrogen partial pressure) is obtained.
各试验编号的实际渗碳气体流量的经时变化如图9~16所示。以下,对于试验编号1~21的实际渗碳气体流量FR的设定值,用图9~图16进行说明。The time-dependent changes in the actual carburizing gas flow rate for each test number are shown in Figures 9 to 16. Hereinafter, the set values of the actual carburizing gas flow rates FR for test numbers 1 to 21 will be explained using FIGS. 9 to 16 .
图9为示出试验编号1、5、7~12的渗碳工序中的、实际渗碳气体流量FR的经时变化的图。参照图9,试验编号1、5、7~12中,使渗碳工序开始时间(t=0)时的实际渗碳气体流量FR为FA。FA为FTta/10以上且FT4以下。超过时间t0且至达到时间4t0前的时间ts为止,使实际渗碳气体流量FR恒定为FA。时间ts后,以曲线C2(=FA×√(ts/t))逐渐减少实际渗碳气体流量。其结果,实际渗碳气体流量FR在前期渗碳工序S1中为FTta/10以上且FT4以下。另外,在后期渗碳工序S2中时间t0~时间4t0的期间的实际渗碳气体流量FR为FA√(t0/t)以上且FA以下。进而,时间4t0~时间ta的实际渗碳气体流量FR为FA√(t0/t)以上且2FA√(t0/t)以下。FIG. 9 is a graph showing changes over time in the actual carburizing gas flow rate FR in the carburizing steps of test numbers 1, 5, and 7 to 12. Referring to FIG. 9 , in test numbers 1, 5, and 7 to 12, the actual carburizing gas flow rate FR at the start time of the carburizing process (t=0) is set to FA. FA is FT ta/10 or more and FT 4 or less. After time t0 is exceeded and until time ts before time 4t0 is reached, the actual carburizing gas flow rate FR is kept constant at FA. After time ts, the actual carburizing gas flow rate is gradually reduced according to the curve C2 (=FA×√(ts/t)). As a result, the actual carburizing gas flow rate FR is FT ta/10 or more and FT 4 or less in the early carburizing step S1. In addition, in the post-carburizing step S2, the actual carburizing gas flow rate FR during the period from time t0 to time 4t0 is FA√(t0/t) or more and FA or less. Furthermore, the actual carburizing gas flow rate FR from time 4t0 to time ta is FA√(t0/t) or more and 2FA√(t0/t) or less.
图10为示出试验编号2~4、6的渗碳工序中的、实际渗碳气体流量FR的经时变化的图。参照图10,试验编号2~4、6中,使渗碳工序开始时间(t=0)时的实际渗碳气体流量FR为FA。FA为FTta/10以上且FT4以下。超过时间t0且至达到时间4t0前的时间ts为止,使实际渗碳气体流量FR恒定为FA。需要说明的是,图10的时间t0~时间4t0的期间的时间ts是比图9的时间t0~时间4t0的期间的时间ts还晚的时刻。时间ts后,实际渗碳气体流量FR以曲线C2(=FA×√(ts/t))逐渐减少。其结果,实际渗碳气体流量FR在前期渗碳工序S1中为FTta/10以上且FT4以下。另外,后期渗碳工序S2中时间t0~时间4t0的期间的实际渗碳气体流量FR为FA√(t0/t)以上且FA以下。进而,时间4t0~时间ta的实际渗碳气体流量FR为FA√(t0/t)以上且2FA√(t0/t)以下。FIG. 10 is a graph showing changes over time in the actual carburizing gas flow rate FR in the carburizing steps of test numbers 2 to 4 and 6. FIG. Referring to FIG. 10 , in test numbers 2 to 4 and 6, the actual carburizing gas flow rate FR at the start time of the carburizing process (t=0) is set to FA. FA is FT ta/10 or more and FT 4 or less. After time t0 is exceeded and until time ts before time 4t0 is reached, the actual carburizing gas flow rate FR is kept constant at FA. It should be noted that the time ts in the period from time t0 to time 4t0 in FIG. 10 is later than the time ts in the period from time t0 to time 4t0 in FIG. 9 . After time ts, the actual carburizing gas flow rate FR gradually decreases with curve C2 (=FA×√(ts/t)). As a result, the actual carburizing gas flow rate FR is FT ta/10 or more and FT 4 or less in the early carburizing step S1. In addition, the actual carburizing gas flow rate FR during the period from time t0 to time 4t0 in the post-carburizing step S2 is FA√(t0/t) or more and FA or less. Furthermore, the actual carburizing gas flow rate FR from time 4t0 to time ta is FA√(t0/t) or more and 2FA√(t0/t) or less.
图11为示出试验编号13和14的渗碳工序中的、实际渗碳气体流量FR的经时变化的图。参照图11,试验编号13和14中,渗碳工序开始时间(t=0)时的实际渗碳气体流量FR即FA低于FTta/10。并且,比时间ta/10还晚的时间ts时,与理论渗碳气体流量FT同样地逐渐减少实际渗碳气体流量FR。需要说明的是,在渗碳工序中,真空渗碳炉内的乙炔分压不成为氢分压的0.8倍以上。因此,在真空渗碳处理中,不确定t0。FIG. 11 is a graph showing changes over time in the actual carburizing gas flow rate FR in the carburizing steps of test numbers 13 and 14. Referring to Fig. 11, in test numbers 13 and 14, the actual carburizing gas flow rate FR at the start time of the carburizing process (t=0), that is, FA, is lower than FT ta/10 . Then, at time ts later than time ta/10, the actual carburizing gas flow rate FR is gradually reduced in the same manner as the theoretical carburizing gas flow rate FT. It should be noted that in the carburizing process, the acetylene partial pressure in the vacuum carburizing furnace does not become more than 0.8 times the hydrogen partial pressure. Therefore, in vacuum carburizing treatment, t0 is uncertain.
图12为示出试验编号15~17的渗碳工序中的、实际渗碳气体流量FR的经时变化的图。参照图12,试验编号15~17中,渗碳工序开始时间(t=0)时的实际渗碳气体流量FR即FA为FTta/10以上且FT4以下。然而,乙炔分压成为氢分压的0.8倍以上前的时间ts时,实际渗碳气体流量FR的逐渐减少开始,以实际渗碳气体流量FR成为FA×√(ts/t)的方式进行调整。因此,在渗碳工序中,真空渗碳炉内的乙炔分压不成为氢分压的0.8倍以上。因此,在真空渗碳处理中,不确定t0。FIG. 12 is a graph showing changes over time in the actual carburizing gas flow rate FR in the carburizing steps of test numbers 15 to 17. Referring to Fig. 12, in test numbers 15 to 17, the actual carburizing gas flow rate FR, that is, FA, at the carburizing process start time (t=0) is FT ta/10 or more and FT 4 or less. However, the actual carburizing gas flow rate FR begins to gradually decrease at the time ts before the acetylene partial pressure becomes 0.8 times or more of the hydrogen partial pressure, and the adjustment is made so that the actual carburizing gas flow rate FR becomes FA×√(ts/t). . Therefore, in the carburizing process, the acetylene partial pressure in the vacuum carburizing furnace does not become more than 0.8 times the hydrogen partial pressure. Therefore, in vacuum carburizing treatment, t0 is uncertain.
图13为示出试验编号18的渗碳工序中的、实际渗碳气体流量FR的经时变化的图。参照图13,试验编号18中,渗碳工序开始时间(t=0)时的实际渗碳气体流量FR即FA为FTta/10以上且FT4以下。并且,超过时间t0且至超过时间4t0的时间ts为止,使实际渗碳气体流量FR恒定为FA。时间ts后,以曲线C2(=FA×√(ts/t))逐渐减少实际渗碳气体流量FR。其结果,实际渗碳气体流量FR在前期渗碳工序S1中为FTta/10以上且FT4以下,在后期渗碳工序S2中时间t0~时间4t0的期间的实际渗碳气体流量FR为FA√(t0/t)以上且FA以下。然而,时间4t0~时间ta的实际渗碳气体流量FR超过2FA√(t0/t)。FIG. 13 is a graph showing the time-dependent change of the actual carburizing gas flow rate FR in the carburizing process of test number 18. FIG. Referring to FIG. 13 , in test number 18, the actual carburizing gas flow rate FR, that is, FA, at the time when the carburizing process starts (t=0) is FT ta/10 or more and FT 4 or less. Then, the actual carburizing gas flow rate FR is kept constant at FA until the time t0 exceeds the time t0 and the time ts exceeds the time 4t0. After time ts, the actual carburizing gas flow rate FR is gradually reduced according to the curve C2 (=FA×√(ts/t)). As a result, the actual carburizing gas flow rate FR is FT ta/10 or more and FT 4 or less in the early carburizing process S1, and the actual carburizing gas flow rate FR during the period from time t0 to time 4t0 in the late carburizing process S2 is FA. Above √(t0/t) and below FA. However, the actual carburizing gas flow rate FR from time 4t0 to time ta exceeds 2FA√(t0/t).
图14为示出试验编号19的渗碳工序中的、实际渗碳气体流量FR的经时变化的图。参照图14,试验编号19中,渗碳工序开始时间(t=0)时的实际渗碳气体流量FR即FA低于FTta/10。进而,使之后的实际渗碳气体流量FR恒定为FA。试验编号19中,在渗碳工序中,真空渗碳炉内的乙炔分压不成为氢分压的0.8倍以上。因此,在真空渗碳处理中,不确定t0。FIG. 14 is a graph showing the time-dependent change of the actual carburizing gas flow rate FR in the carburizing process of test number 19. FIG. Referring to Fig. 14 , in test number 19, the actual carburizing gas flow rate FR, that is, FA, at the time when the carburizing process starts (t=0) is lower than FT ta/10 . Furthermore, the subsequent actual carburizing gas flow rate FR is made constant to FA. In test number 19, in the carburizing process, the acetylene partial pressure in the vacuum carburizing furnace did not become more than 0.8 times the hydrogen partial pressure. Therefore, in vacuum carburizing treatment, t0 is uncertain.
图15为示出试验编号20的渗碳工序中的、实际渗碳气体流量FR的经时变化的图。参照图15,试验编号20中,渗碳工序开始时间(t=0)时的实际渗碳气体流量FR即FA为FTta/10以上且FT4以下。并且,超过时间t0且至低于时间4t0的时间ts为止,使实际渗碳气体流量FR恒定为FA。时间ts后,用低于时间ts时的理论渗碳气体流量FT的FB(参照图15),以曲线C2(=FB×√(ts/t))逐渐减少实际渗碳气体流量FR。其结果,对于实际渗碳气体流量FR,后期渗碳工序S2中实际渗碳气体流量FR低于FA√(t0/t)。FIG. 15 is a graph showing the time-dependent change of the actual carburizing gas flow rate FR in the carburizing process of test number 20. Referring to FIG. 15 , in test number 20, the actual carburizing gas flow rate FR, that is, FA, at the time when the carburizing process starts (t=0) is FT ta/10 or more and FT 4 or less. Then, the actual carburizing gas flow rate FR is kept constant at FA until time ts exceeds time t0 and is lower than time 4t0. After time ts, the actual carburizing gas flow rate FR is gradually reduced according to the curve C2 (=FB×√(ts/t)) using FB (refer to Figure 15) which is lower than the theoretical carburizing gas flow rate FT at time ts. As a result, the actual carburizing gas flow rate FR in the post-carburizing step S2 is lower than FA√(t0/t).
图16为示出试验编号21的渗碳工序中的、实际渗碳气体流量FR的经时变化的图。参照图16,试验编号21中,渗碳工序开始时间(t=0)时的实际渗碳气体流量FR即FA为FTta/10以上且FT4以下。并且,超过时间t0且至低于时间4t0的时间ts为止,使实际渗碳气体流量FR恒定为FA。时间ts后,降低实际渗碳气体流量FR。然而,从时间4t0至时间ta为止的期间,存在有实际渗碳气体流量FR超过2FA√(t0/t)的期间。FIG. 16 is a graph showing the time-dependent change of the actual carburizing gas flow rate FR in the carburizing process of test number 21. Referring to Fig. 16 , in test number 21, the actual carburizing gas flow rate FR, that is, FA, at the time when the carburizing process starts (t=0) is FT ta/10 or more and FT 4 or less. Then, the actual carburizing gas flow rate FR is kept constant at FA until time ts exceeds time t0 and is lower than time 4t0. After time ts, the actual carburizing gas flow rate FR is reduced. However, from time 4t0 to time ta, there is a period in which the actual carburizing gas flow rate FR exceeds 2FA√(t0/t).
需要说明的是,实际渗碳气体流量的调整以及测定使用流量计(Cofflock Co.,Ltd.制,商品名:Mass flow controller D3665)来实施。It should be noted that the actual carburizing gas flow rate is adjusted and measured using a flow meter (manufactured by Cofflock Co., Ltd., trade name: Mass flow controller D3665).
在渗碳工序后,以表1中示出的扩散时间(分钟)对圆棒实施扩散工序,使侵入到圆棒的碳扩散到圆棒中。在维持渗碳温度的状态下,以10Pa以下的炉内压力实施扩散工序。扩散时间(分钟)如表1所示。After the carburizing process, the round bar was subjected to a diffusion process for the diffusion time (minutes) shown in Table 1, so that the carbon that had invaded the round bar was diffused into the round bar. While maintaining the carburizing temperature, the diffusion process is performed at a furnace pressure of 10 Pa or less. Diffusion times (minutes) are shown in Table 1.
需要说明的是,表1中的“FTta/10”栏中记载的是,时间ta/10时的理论渗碳气体流量(NL/分钟)。“FT4”栏中记载的是,自渗碳工序开始4秒起时刻时的理论渗碳气体流量(NL/分钟)。“时间t0(分钟)”栏中记载的是,时间t0(分钟)。“时间4t0(分钟)”栏中记载的是,时间4t0(分钟)。“时间ts(分钟)”栏中记载的是,实际渗碳气体流量FR的逐渐减少开始的时间ts(分钟)。“FR≥FA×√(t0/t)?”栏中记载的是,在时间4t0~时间ta,实际渗碳气体流量是否为FA×√(t0/t)以上。为“是”的情况下,表示实际渗碳气体流量FR为FA×√(t0/t)以上。为“否”的情况下,表示实际渗碳气体流量FR低于FA×√(t0/t)。“FR≤2FA×√(t0/t)?”栏中记载的是,在时间4t0~时间ta,实际渗碳气体流量FR是否为2FA×√(t0/t)以下。为“是”的情况下,表示实际渗碳气体流量FR为2FA×√(t0/t)以下。为“否”的情况下,表示实际渗碳气体流量FR超过2FA×√(t0/t)。“扩散时间(分钟)”表示扩散工序中的扩散时间(分钟)。It should be noted that what is described in the "FT ta/10 " column in Table 1 is the theoretical carburizing gas flow rate (NL/min) at time ta/10. What is written in the "FT 4 " column is the theoretical carburizing gas flow rate (NL/min) at the time 4 seconds after the start of the carburizing process. What is written in the “time t0 (minute)” column is time t0 (minute). The "time 4t0 (minutes)" column describes the time 4t0 (minutes). The "time ts (minutes)" column describes the time ts (minutes) when the actual carburizing gas flow rate FR starts to gradually decrease. What is recorded in the "FR≥FA×√(t0/t)?" column is whether the actual carburizing gas flow rate is FA×√(t0/t) or more between time 4t0 and time ta. If "Yes", it means that the actual carburizing gas flow rate FR is FA×√(t0/t) or more. If it is "No", it means that the actual carburizing gas flow rate FR is lower than FA×√(t0/t). What is recorded in the "FR≤2FA×√(t0/t)?" column is whether the actual carburizing gas flow rate FR is 2FA×√(t0/t) or less between time 4t0 and time ta. If "Yes", it means that the actual carburizing gas flow rate FR is 2FA×√(t0/t) or less. If it is "No", it means that the actual carburizing gas flow rate FR exceeds 2FA×√(t0/t). "Diffusion time (minutes)" indicates the diffusion time (minutes) in the diffusion process.
在扩散工序后,将圆棒冷却至860℃为止。然后,以淬火温度(860℃)保持30分钟。保持之后,将圆棒浸渍于120℃的油中,实施油淬火。对于淬火后的圆棒实施回火。将回火温度设为170℃,将回火温度下的保持时间设为2小时。After the diffusion process, the round bar is cooled to 860°C. Then, it was held at the quenching temperature (860°C) for 30 minutes. After holding, the round bar was immersed in oil at 120°C and oil quenched. The quenched round bar is tempered. The tempering temperature was set to 170°C, and the holding time at the tempering temperature was set to 2 hours.
通过以上的制造工序,实施真空渗碳处理,制造渗碳部件(圆棒)。Through the above manufacturing process, a vacuum carburizing process is performed to manufacture a carburized component (round rod).
[评价试验][Evaluation test]
测定各试验编号的渗碳部件(圆棒)的表层的碳浓度和碳浓度达到0.40质量%的深度(以下,称为渗碳深度),评价渗碳分布不均。The carbon concentration and the depth at which the carbon concentration reaches 0.40 mass% (hereinafter referred to as the carburization depth) of the carburized parts (round rods) of each test number were measured to evaluate uneven carburization distribution.
[渗碳部件的表层的碳浓度测定试验][Carbon concentration measurement test on the surface layer of carburized parts]
对于插入到真空渗碳炉之中的状态的各试验编号的渗碳部件(圆棒),从上端面起在渗碳部件的长度方向截断20mm的范围、以及从下端面起在渗碳部件的长度方向截断5mm的范围。以下,将从上端面起20mm的范围称为“上端面试验片”,将从下端面起5mm范围的部分称为“下端部分”。For the carburized parts (round bars) of each test number that are inserted into the vacuum carburizing furnace, a range of 20 mm is cut from the upper end surface in the length direction of the carburized part, and a range of 20 mm is cut from the lower end surface of the carburized part. Cut off a range of 5mm in the length direction. Hereinafter, the range of 20 mm from the upper end surface will be referred to as the "upper end surface test piece", and the portion within the range of 5 mm from the lower end surface will be referred to as the "lower end portion".
对于上端面试验片以及下端部分被截断的剩余部分(以下,称为主体部分)的圆周面实施车削加工。在车削加工中,每0.05mm深度间距采取从圆棒的表面至0.30mm深度为止的表层部分的切粉。测定所采取的0.05mm间距的各深度位置处的切粉的碳浓度。通过以上工序,对于各试验编号的3个渗碳部件(笼的中央位置、笼的左前方位置、以及笼右后方位置)的从表面至0.30mm深度为止的表层区域中,求出0.05mm间距下的碳浓度。将配置在笼中央位置的渗碳部件的从表面至0.30mm为止的6个碳浓度从表面开始依次定义为碳浓度A1~A6(质量%)。将配置在笼左前方位置的渗碳部件的从表面至0.30mm为止的6个碳浓度从表面开始依次定义为碳浓度B1~B6(质量%)。将配置在笼右后方位置的渗碳部件的从表面至0.30mm为止的6个碳浓度从表面开始依次定义为碳浓度C1~C6(质量%)。并且,求出3个渗碳部件中在相同的深度位置所得到的碳浓度的最大值与最小值之差。具体而言,从表面至0.05mm深度位置为止的区域的碳浓度A1、B1、C1之中,选择最大值和最小值,将它们的碳浓度的差额值定义为Δ1。同样地,距表面0.05mm深度位置~距表面0.10mm深度位置的区域的碳浓度A2、B2、C2之中,选择最大值和最小值,将它们的碳浓度的差额值定义为Δ2。通过以上的工序,求出Δ1~Δ6,将Δ1~Δ6的算术平均值定义为“表层碳浓度差”(质量%)。将所得到的结果记载在表1的“表层碳浓度差(质量%)”栏中。Turning processing was performed on the circumferential surface of the upper end surface of the test piece and the remaining portion of the cut lower end portion (hereinafter referred to as the main body portion). In turning processing, the cutting powder is taken from the surface of the round bar to a depth of 0.30mm at every 0.05mm depth interval. The carbon concentration of the cut powder was measured at each depth position at a distance of 0.05 mm. Through the above process, the 0.05mm pitch was obtained in the surface area from the surface to the depth of 0.30mm for the three carburized parts of each test number (the center position of the cage, the left front position of the cage, and the cage right rear position). carbon concentration below. The six carbon concentrations from the surface to 0.30 mm of the carburized component arranged at the center of the cage are defined as carbon concentrations A1 to A6 (mass %) in order from the surface. The six carbon concentrations from the surface to 0.30 mm of the carburized component arranged at the left front position of the cage are defined as carbon concentrations B1 to B6 (mass %) in order from the surface. The six carbon concentrations from the surface to 0.30 mm of the carburized component arranged at the right rear position of the cage are defined as carbon concentrations C1 to C6 (mass %) in order from the surface. Furthermore, the difference between the maximum value and the minimum value of the carbon concentration obtained at the same depth position among the three carburized parts was determined. Specifically, the maximum value and the minimum value are selected among the carbon concentrations A1, B1, and C1 in the area from the surface to the 0.05 mm depth position, and the difference between these carbon concentrations is defined as Δ1. Similarly, among the carbon concentrations A2, B2, and C2 in the area from a depth position of 0.05 mm to a depth of 0.10 mm from the surface, the maximum value and the minimum value are selected, and the difference between these carbon concentrations is defined as Δ2. Through the above steps, Δ1 to Δ6 are obtained, and the arithmetic mean value of Δ1 to Δ6 is defined as the “surface layer carbon concentration difference” (mass %). The obtained results are described in the "Surface layer carbon concentration difference (mass %)" column of Table 1.
进而,将碳浓度A1~A6、B1~B6、C1~C6的全部算术平均值定义为表层平均碳浓度(质量%)。将所得到的结果记载在表1的“表层平均碳浓度(质量%)”栏中。Furthermore, the arithmetic mean value of all the carbon concentrations A1 to A6, B1 to B6, and C1 to C6 is defined as the surface layer average carbon concentration (mass %). The obtained results are described in the "surface layer average carbon concentration (mass %)" column of Table 1.
[渗碳深度测定试验][Carburization depth measurement test]
使用上述的上端面试验片,测定圆周面的表层部的碳浓度。具体而言,对于上端面试验片的距上端面20mm位置的横截面(与上端面试验片的长度方向垂直的截面)的碳浓度,从距表面2mm深度位置起朝向表面沿径向测定。具体而言,实施利用EPMA(电子射线显微分析仪)的线分析,测定径向(深度方向)的碳浓度。基于测定结果,分别对于3个上端面试验片,求出碳浓度达到0.40质量%以上的区域的深度(以下,称为渗碳深度)。将由各上端面试验片得到的渗碳深度的最大值与最小值之差的平均定义为“0.40质量%深度差”(mm)。将所得到的结果记载于表1的“0.40质量%深度差(mm)”栏中。Using the above-mentioned upper end surface test piece, the carbon concentration in the surface layer portion of the circumferential surface was measured. Specifically, the carbon concentration of the cross section of the upper end surface test piece at a position 20 mm from the upper end surface (a cross section perpendicular to the longitudinal direction of the upper end surface test piece) was measured in the radial direction toward the surface from a depth position of 2 mm from the surface. Specifically, line analysis using EPMA (electron beam microanalyzer) was performed to measure the carbon concentration in the radial direction (depth direction). Based on the measurement results, the depth of the region where the carbon concentration reaches 0.40 mass% or more (hereinafter referred to as the carburization depth) was determined for each of the three upper end surface test pieces. The average difference between the maximum value and the minimum value of the carburization depth obtained from each upper end surface test piece is defined as "0.40 mass% depth difference" (mm). The obtained results are described in the "0.40 mass% depth difference (mm)" column of Table 1.
[评价结果][Evaluation results]
参照表1,将表层碳浓度差为0.030质量%以下、并且0.40质量%深度差为0.05mm以下的情况作为渗碳分布不均小的真空渗碳处理方法评价为优异。Referring to Table 1, the case where the surface layer carbon concentration difference is 0.030 mass% or less and the 0.40 mass% depth difference is 0.05 mm or less is evaluated as excellent as a vacuum carburizing treatment method with small carburizing distribution unevenness.
参照表1,试验编号1~试验编号12中,在前期渗碳工序S1中,实际渗碳气体流量FR为FTta/10以上且FT4以下。进而,在后期渗碳工序S2中,在时间t0~4t0的期间,实际渗碳气体流量FR为FA×√(t0/t)以上且FA以下。进而,在后期渗碳工序S2中,在时间4t0~时间ta的期间,实际渗碳气体流量FR为FA×√(t0/t)以上且2FA×√(t0/t)以下。因此,表层的平均碳浓度为0.680质量%以上,表层碳浓度差为0.030质量%以下,且0.40质量%深度差为0.05mm以下。亦即,渗碳部件的渗碳分布不均小。Referring to Table 1, in test numbers 1 to 12, in the preliminary carburizing step S1, the actual carburizing gas flow rate FR is FT ta/10 or more and FT 4 or less. Furthermore, in the post-carburizing step S2, during the period from time t0 to 4t0, the actual carburizing gas flow rate FR is FA×√(t0/t) or more and FA or less. Furthermore, in the post-carburizing step S2, during the period from time 4t0 to time ta, the actual carburizing gas flow rate FR is FA×√(t0/t) or more and 2FA×√(t0/t) or less. Therefore, the average carbon concentration of the surface layer is 0.680 mass% or more, the surface carbon concentration difference is 0.030 mass% or less, and the 0.40 mass% depth difference is 0.05 mm or less. That is, the uneven carburization distribution of the carburized parts is small.
另一方面,试验编号13和14中,如图11和表1所示,前期渗碳工序中的实际渗碳气体流量(FA)低于FTta/10。因此,表层平均碳浓度低于0.680质量%,渗碳未充分进行。On the other hand, in test numbers 13 and 14, as shown in Figure 11 and Table 1, the actual carburizing gas flow rate (FA) in the early carburizing process was lower than FT ta/10 . Therefore, the average carbon concentration in the surface layer is less than 0.680% by mass, and carburization is not sufficiently performed.
试验编号15~17中,如图12和表1所示,渗碳开始时的实际渗碳气体流量(FA)为FTta/10以上且FT4以下,但是在乙炔分压成为氢分压的0.8倍以上前,逐渐减少实际渗碳气体流量FR。因此,表层平均碳浓度低于0.680质量%,渗碳未充分进行。In test numbers 15 to 17, as shown in Figure 12 and Table 1, the actual carburizing gas flow rate (FA) at the start of carburization is FT ta/10 or more and FT 4 or less, but the acetylene partial pressure becomes the hydrogen partial pressure. Before it exceeds 0.8 times, gradually reduce the actual carburizing gas flow rate FR. Therefore, the average carbon concentration in the surface layer is less than 0.680% by mass, and carburization is not sufficiently performed.
试验编号18中,如图13和表1所示,逐渐减少实际渗碳气体流量FR的时间ts比时间4t0还靠后。其结果,逐渐减少后的实际渗碳气体流量FR超过2FA×√(t0/t)。其结果,表层碳浓度差超过0.030质量%,渗碳部件的渗碳分布不均大。In test number 18, as shown in Figure 13 and Table 1, the time ts for gradually reducing the actual carburizing gas flow rate FR is later than the time 4t0. As a result, the actual carburizing gas flow rate FR after the gradual decrease exceeds 2FA×√(t0/t). As a result, the difference in carbon concentration in the surface layer exceeds 0.030% by mass, and the carburization distribution of the carburized parts is greatly uneven.
试验编号19中,如图14和表1所示,实际渗碳气体流量FR恒定至低于FTta/10的值FA。因此,0.40质量%深度差超过0.05mm,渗碳部件的渗碳分布不均大。In test number 19, as shown in Fig. 14 and Table 1, the actual carburizing gas flow rate FR was constant to a value FA lower than FT ta/10 . Therefore, if the depth difference of 0.40% by mass exceeds 0.05 mm, the carburization distribution of the carburized parts will be large and uneven.
试验编号20中,如图15和表1所示,渗碳开始时的实际渗碳气体流量的值FA为FTta/10以上且FT4以下,但是在时间4t0~时间ta的期间,存在有实际渗碳气体流量FR成为低于FA×√(t0/t)的期间。因此,表层平均碳浓度低于0.680质量%,渗碳未充分进行。进而,表层碳浓度差超过0.030质量%,0.40质量%深度差超过0.05mm,渗碳部件的渗碳分布不均大。In test number 20, as shown in Fig. 15 and Table 1, the actual carburizing gas flow rate FA at the start of carburization is FT ta/10 or more and FT 4 or less. However, during the period from time 4t0 to time ta, there is The period during which the actual carburizing gas flow rate FR becomes lower than FA×√(t0/t). Therefore, the average carbon concentration in the surface layer is less than 0.680% by mass, and carburization is not sufficiently performed. Furthermore, the difference in carbon concentration in the surface layer exceeds 0.030% by mass, and the difference in depth of 0.40% by mass exceeds 0.05 mm, resulting in large uneven carburization distribution of the carburized parts.
试验编号21中,如图16和表1所示,渗碳开始时的实际渗碳气体流量的值FA为FTta/10以上且FT4以下,但是在时间4t0~时间ta的期间,存在有实际渗碳气体流量FR超过2FA×√(t0/t)的期间。因此,表层碳浓度差超过0.030质量%,渗碳部件的渗碳分布不均大。In test number 21, as shown in Fig. 16 and Table 1, the actual carburizing gas flow rate FA at the start of carburization is FT ta/10 or more and FT 4 or less. However, during the period from time 4t0 to time ta, there is The period during which the actual carburizing gas flow rate FR exceeds 2FA×√(t0/t). Therefore, the difference in carbon concentration in the surface layer exceeds 0.030% by mass, and the carburization distribution of the carburized parts is greatly uneven.
以上,说明了本发明的实施方式。然而,上述的实施方式只是用于实施本发明的示例。因此,本发明并不受到上述实施方式的限定,只要在不脱离本发明宗旨的范围内,可将上述实施方式适当变更而实施。The embodiments of the present invention have been described above. However, the above-described embodiments are only examples for implementing the present invention. Therefore, the present invention is not limited to the above-described embodiments, and the above-described embodiments can be appropriately modified and implemented within the scope that does not deviate from the gist of the present invention.
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