CN114340799A - 一种用于半导体制造的洁净室系统及其电场除尘方法 - Google Patents
一种用于半导体制造的洁净室系统及其电场除尘方法 Download PDFInfo
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Abstract
一种用于半导体制造的洁净室系统(100)及其电场除尘方法，洁净室系统(100)包括洁净室(101)、电场除尘系统(102)；洁净室(101)包括气体入口；电场除尘系统(102)包括除尘系统出口、电场装置(1021)；洁净室(101)的气体入口与电场除尘系统(102)的除尘系统出口连通；电场装置(1021)的电场阴极(10142、4052、5081、3081)和电场阳极10141、4051、5082、3082)用于产生电离电场。
Description
PCT国内申请，说明书已公开。
Claims (19)
- PCT国内申请，权利要求书已公开。
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010322636.3A CN113522525A (zh) | 2020-04-22 | 2020-04-22 | 一种用于半导体制造的洁净室系统及其多级电场除尘方法 |
| CN202010323654.3A CN113522526A (zh) | 2020-04-22 | 2020-04-22 | 一种用于半导体制造的洁净室系统及其电场除尘方法 |
| CN2020103236543 | 2020-04-22 | ||
| CN2020103226363 | 2020-04-22 | ||
| PCT/CN2020/086851 WO2020216356A1 (zh) | 2019-04-25 | 2020-04-24 | 一种用于半导体制造的洁净室系统及其电场除尘方法 |
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| CN202080030939.6A Pending CN114340799A (zh) | 2020-04-22 | 2020-04-24 | 一种用于半导体制造的洁净室系统及其电场除尘方法 |
| CN202090000505.7U Active CN218742503U (zh) | 2020-04-22 | 2020-04-24 | 一种用于半导体制造的洁净室系统 |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57150457A (en) * | 1981-03-12 | 1982-09-17 | Hitachi Plant Eng & Constr Co Ltd | Purifier for air |
| US20020121352A1 (en) * | 2001-03-02 | 2002-09-05 | Lawson J. Alan | Electrical field apparatus and methods for fluid for decontamination and other purposes |
| JP2004057944A (ja) * | 2002-07-29 | 2004-02-26 | Nippon Testpanel Co Ltd | 排気ガス清浄化装置 |
| CN203108663U (zh) * | 2013-01-18 | 2013-08-07 | 上海永健仪器设备有限公司 | 蜂窝静电除尘灭菌模块 |
| CN205518205U (zh) * | 2016-03-31 | 2016-08-31 | 深圳市中科建设集团有限公司 | 一种带自动吹风功能的百级无尘车间 |
| CN106733194A (zh) * | 2017-03-31 | 2017-05-31 | 广东美的厨房电器制造有限公司 | 静电装置和油烟机 |
| CN107020202A (zh) * | 2016-01-29 | 2017-08-08 | 黄健伟 | 一种超净电除尘方法及装置 |
| CN206980986U (zh) * | 2017-07-18 | 2018-02-09 | 佛山市嘉名环保节能设备科技有限公司 | 一种静电除尘装置 |
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2020
- 2020-04-24 CN CN202090000508.0U patent/CN218132543U/zh active Active
- 2020-04-24 CN CN202080030939.6A patent/CN114340799A/zh active Pending
- 2020-04-24 CN CN202090000505.7U patent/CN218742503U/zh active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57150457A (en) * | 1981-03-12 | 1982-09-17 | Hitachi Plant Eng & Constr Co Ltd | Purifier for air |
| US20020121352A1 (en) * | 2001-03-02 | 2002-09-05 | Lawson J. Alan | Electrical field apparatus and methods for fluid for decontamination and other purposes |
| JP2004057944A (ja) * | 2002-07-29 | 2004-02-26 | Nippon Testpanel Co Ltd | 排気ガス清浄化装置 |
| CN203108663U (zh) * | 2013-01-18 | 2013-08-07 | 上海永健仪器设备有限公司 | 蜂窝静电除尘灭菌模块 |
| CN107020202A (zh) * | 2016-01-29 | 2017-08-08 | 黄健伟 | 一种超净电除尘方法及装置 |
| CN205518205U (zh) * | 2016-03-31 | 2016-08-31 | 深圳市中科建设集团有限公司 | 一种带自动吹风功能的百级无尘车间 |
| CN106733194A (zh) * | 2017-03-31 | 2017-05-31 | 广东美的厨房电器制造有限公司 | 静电装置和油烟机 |
| CN206980986U (zh) * | 2017-07-18 | 2018-02-09 | 佛山市嘉名环保节能设备科技有限公司 | 一种静电除尘装置 |
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| CN218742503U (zh) | 2023-03-28 |
| CN218132543U (zh) | 2022-12-27 |
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Application publication date: 20220412 |