CN114325897B - Medium metamaterial based on gradient period enhanced terahertz spectrum absorption - Google Patents
Medium metamaterial based on gradient period enhanced terahertz spectrum absorption Download PDFInfo
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Abstract
The invention discloses a medium metamaterial based on gradient period enhanced terahertz spectrum absorption, which comprises a substrate, a first substrate, a second substrate and a third substrate, wherein the first substrate is made of a material with a gradient period; tens of detection modules and substances to be detected uniformly conformal on the surfaces of the detection modules; each detection module consists of a lower grating layer and an upper waveguide layer; the lower grating layer and the upper waveguide layer are made of the same dielectric material; the lower grating layer is periodically and uniformly distributed on the upper waveguide layer; the substance to be detected is uniformly conformal on the surface of the upper waveguide layer. The structure is based on a guided mode resonance principle, when the metamaterial is used for carrying out fingerprint identification on a trace object to be detected, the absorption of a trace sample to terahertz is effectively enhanced, the problem that the traditional super surface needs to conformally load the sample on a microstructure with large undulation degree is solved, the surface treatment process of a sample wafer is simplified, the detection accuracy and the repeatability are further improved, and the broadband fingerprint enhancement detection of trace molecules is realized.
Description
Technical Field
The invention relates to the technical field of metamaterial and terahertz molecular fingerprint sensing enhancement, in particular to a medium metamaterial based on gradient period enhancement terahertz spectrum absorption.
Background
The terahertz photon energy is low, and harmful photoionization of biological cells or organic samples cannot be caused, so that the application of nondestructive sensing detection technology in the field of biological and sample detection is facilitated. Meanwhile, many complex molecules have intramolecular or intermolecular rotation or vibration modes at terahertz frequency, and the modes can be characterized by the significant characteristics of absorption spectra, so that the method has huge application prospects in biological and safety sensing applications. However, due to the limitation of light sources and the trace amount of samples, the conventional detection method cannot meet the requirement of trace amount detection, so that a super-structure surface is introduced to enhance the interaction between a substance to be detected and electromagnetic waves.
However, the conventional super-structured surface has certain problems, such as intrinsic damping loss of metal, parasitic loss of the sample on the patterned surface, and the like. Moreover, the conformal material of the relief surface is a difficult problem in engineering, especially for some materials that are inconvenient to be evaporated, the uniformity of material distribution is difficult to ensure, and the accuracy and stability of device detection are greatly reduced. The planarized surface has no dead angle which is difficult to touch, so that the method is quite friendly to the transfer coating of an absorption material and a sample to be detected, and has great significance for enhancing the detection of the terahertz fingerprint.
Disclosure of Invention
Technical problem to be solved
The invention aims to solve the technical problems that the metal microstructure has inherent defects of high damping loss and non-tunability of resonant frequency; meanwhile, the problem of conformal processing of samples is avoided, and the reliability and stability of the device for measuring the trace molecular fingerprint spectrum are improved.
In order to improve the efficiency of terahertz molecular fingerprint detection, the invention provides a medium metamaterial based on gradient period enhanced terahertz spectrum absorption. The use of an all-dielectric nanostructured surface effectively avoids metal loss. The scanning of the metamaterial units in the dozens of detection modules can obviously enhance the accurate detection of the trace samples, and effectively solve the problems.
(II) technical scheme
The invention provides a medium metamaterial based on gradient period enhanced terahertz spectrum absorption, the scheme is used for designing a medium grating, accurate detection of alpha-lactose and leucine is realized by a method for enhancing terahertz frequency band absorption fingerprints, and the medium metamaterial is simple to operate and high in flexibility.
In order to achieve the purpose, the invention provides the following technical scheme: a medium metamaterial based on gradient period enhanced terahertz spectrum absorption comprises a substrate, a first substrate, a second substrate and a third substrate, wherein the first substrate is provided with a first surface and a second surface;
tens of detection modules and substances to be detected uniformly conformal on the surfaces of the detection modules; in actual detection, the terahertz waves should be incident from the lower part of the structure.
Each detection module consists of a lower grating layer and an upper waveguide layer;
the lower grating layer and the upper waveguide layer are made of the same dielectric material;
the lower grating layer is periodically and uniformly distributed on the upper waveguide layer;
the substance to be detected is uniformly conformal on the surface of the upper waveguide layer.
Preferably, the lower grating layer and the upper waveguide layer form a metamaterial unit structure, dozens of units form a detection module, and unit structure parameters forming each module are different.
Preferably, the lower grating layer and the upper waveguide layer are made of the same material, namely silicon dioxide SiO 2 Silicon Si, sapphire Al 2 O 3 Silicon nitride Si 3 N 4 Any one of them.
Preferably, in the terahertz waveband range, the silicon dioxide SiO 2 Has a refractive index in the range of 1.95 to 2.1, has a refractive index in the range of 3.4 to 3.48, and has a refractive index of sapphire Al 2 O 3 Has a refractive index in the range of 3 to 3.08, said silicon nitride Si 3 N 4 Has a refractive index in the range of 2.6 to 2.65.
Preferably, the thickness t of the upper waveguide layer 1 Is 50-200 μm, and the thickness t of the lower grating layer 2 The duty ratio f of the lower grating layer is 0.3-0.7;
thickness t 1 Is 50-200 μm, and has a thickness t 2 10-100 μm, the period p is 50-300 μm, and the duty ratio f is 0.3-0.7;
the number of the detection modules is n2, the detection modules are arranged in the transverse direction and the longitudinal direction respectively, and the total number of the detection modules is n x n = n 2. The thickness t1 of the waveguide layer of the unit structure in each detection module, the thickness t2 of the grating layer and the duty ratio f of the grating layer are kept unchanged, and the period p is gradually changed in a certain range and is distributed in an equal difference mode.
Preferably, the number of the detection modules is 25, and the detection modules are respectively arranged in the transverse direction and the longitudinal direction and are 5, and the total number is 25; the thickness t1 of the unit structure waveguide layer, the thickness t2 of the grating layer and the duty ratio f in each detection module are kept unchanged, and the period p is gradually changed and distributed in an equal difference mode.
(III) advantageous effects
The invention provides a medium metamaterial based on gradient period enhanced terahertz spectrum absorption. The method has the following beneficial effects:
the structure is based on a guided mode resonance principle, when the metamaterial is used for carrying out fingerprint identification on a trace object to be detected, the absorption of a trace sample to terahertz is effectively enhanced, the problem that the traditional super surface needs to conformally load the sample on a microstructure with large undulation degree is solved, the surface treatment process of a sample wafer is simplified, the detection accuracy and the repeatability are further improved, and the broadband fingerprint enhancement detection of trace molecules is realized.
Drawings
Fig. 1a is a schematic structural diagram of a dielectric metamaterial based on gradient period enhanced terahertz spectrum absorption according to an embodiment of the present invention; b is a cross-sectional schematic diagram of one unit structure of the detection module, wherein 1 is a homogeneous inverted grating, and 2 is a conformal object to be detected;
FIG. 2a is a graph of n-k values of optical parameters of alpha-lactose conformal to a surface of a metamaterial according to an embodiment of the present invention; b is a reflectivity curve chart of the detection module provided by the embodiment of the invention under the incident angle of 30 degrees, wherein the surface of the detection module is not provided with a substance to be detected; c is a reflectivity curve graph obtained by applying conformal alpha-lactose at an incident angle of 30 degrees to the surfaces of 25 detection modules provided by the embodiment of the invention; d is an absorption peak envelope curve, a non-structural absorption curve and an absorption enhancement factor histogram obtained by comparing the alpha-lactose conformal front and back reflectivity curve graphs provided by the embodiment of the invention;
FIG. 3a is a graph showing n-k values of optical parameters of tyrosine conformal to the surface of a metamaterial according to an embodiment of the present invention; b is a reflectivity curve graph of a detection module without a substance to be detected placed on the surface under a 45-degree incident angle, which is provided by the embodiment of the invention; c is a reflectivity curve graph of the conformal leucine on the surfaces of 25 detection modules under the incident angle of 45 degrees, which is provided by the embodiment of the invention; d is an absorption peak envelope curve, a non-structural absorption curve and an absorption enhancement factor histogram obtained by comparing the reflectivity curves before and after the conformal operation of the tyrosine provided by the embodiment of the invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1-3, the present invention provides the technical solutions: a medium metamaterial based on gradient period enhanced terahertz spectrum absorption comprises a substrate, a first substrate, a second substrate and a third substrate, wherein the first substrate is provided with a first surface and a second surface;
tens of detection modules and substances to be detected uniformly conformal on the surfaces of the detection modules;
each detection module consists of a lower grating layer and an upper waveguide layer;
the lower grating layer and the upper waveguide layer are made of the same medium material;
the lower grating layer is periodically and uniformly distributed on the upper waveguide layer;
the substance to be detected is uniformly conformal on the surface of the upper waveguide layer.
Furthermore, the lower grating layer and the upper waveguide layer form a metamaterial unit structure, dozens of units form a detection module, and the unit structure parameters forming each module are different;
the detecting units have n in total 2 N, arranged in the transverse and longitudinal directions, for a total of n x n = n 2 And (4) respectively. The thickness t of the waveguide layer of each detection unit 1 Thickness t of grating layer 2 And the duty ratio f of the grating layer is kept unchanged, and the period p of the inverted grating sensor in each detection unit is gradually changed in a certain range and is distributed in an equal difference mode.
Furthermore, the lower grating layer and the upper waveguide layer are made of the same material and are made of silicon dioxide SiO 2 Silicon Si, sapphire Al 2 O 3 Silicon nitride Si 3 N 4 Any one of them.
Further, in the terahertz wave band range, the silicon dioxide SiO 2 Has a refractive index in the range of 1.95 to 2.1, has a refractive index in the range of 3.4 to 3.48, and has a refractive index in the range of 1.95 to 2.1, and has a refractive index in the range of 3.4 to 3.48Sapphire Al 2 O 3 Has a refractive index in the range of 3 to 3.08, said silicon nitride Si 3 N 4 Has a refractive index in the range of 2.6 to 2.65.
Further, the thickness t of the upper waveguide layer 1 Is 50-200 μm, and the thickness t of the lower grating layer 2 Is 10-100 μm, and the duty ratio f of the lower grating layer is 0.3-0.7.
A medium metamaterial based on gradient period enhanced terahertz spectrum absorption is on a homogeneous inverted grating and a sample to be detected is uniformly coated on the surface above a sensor. When the inverted grating sensor is used for trace detection, the absorption of a sample to terahertz waves can be enhanced, the process of uniform conformal coating on a patterned surface with large undulation and a complex micro-mechanical process are avoided, ten detection module metamaterial units are scanned by a light source at a fixed angle, and the broadband fingerprint enhanced detection of trace molecules is realized.
Example one
Referring to fig. 1, the medium metamaterial based on the gradual change period enhanced terahertz spectrum absorption comprises dozens of detection modules, wherein a unit structure 1 of the medium metamaterial comprises a homogeneous lower grating layer and an homogeneous upper waveguide layer, and a substance to be detected 2 is uniformly coated on the surfaces of the modules.
In the embodiment of the present invention, the incident angle of the fixed light source is 30 °.
As an embodiment of the present invention, the homogeneous inverted grating 1 constitutes a sub-wavelength grating unit structure; wherein, the homogeneous inverted grating 1 material is silicon (Si).
As an embodiment of the present invention, the refractive index of silicon (Si) is 3.4 in the terahertz band range.
As an embodiment of the present invention, the number of the detection modules is 25, and 5 detection modules are arranged in each of the horizontal direction and the vertical direction, and the total number is 5 × 5=25 detection modules. The thickness t1 of the unit structure waveguide layer is 160 μm, the thickness t2 of the grating layer is 10 μm, the duty ratio f of the grating layer is 0.45, the period p ranges from 141.05 μm to 178.25 μm, and the unit structure waveguide layer is in equal difference distribution by taking 1.55 μm as a step length.
In the embodiment of the invention, when terahertz waves are incident on metamaterial at an incident angle of 30 ° to scan each detection module, the resonance frequency of the terahertz waves is also shifted continuously due to different unit structure parameters in each detection module, so that a certain range of bandwidth is covered, evanescent waves which propagate along the boundary and are exponentially attenuated in the direction vertical to the interface are formed at the interface of the waveguide layer and the air layer of the detection module, and the surface electric field is significantly enhanced.
It can be understood that the guided mode resonance mode excites evanescent waves at the junction of air and the upper surface of the detection module, so that field enhancement is realized, and thus, in actual detection, a sample can be placed above the flat surface of the waveguide layer of the detection module, so that absorption of the sample on the terahertz waves is enhanced, and the method is used for perfect fingerprint specificity identification detection. The structure does not contain a metal material, so that background noise interference caused by inherent high damping loss of the metal material is avoided, the situation that a sample needs to be conformally loaded on a microstructure with large undulation degree and a complex micro-mechanical process on the traditional super surface is also avoided, the interaction between the sample to be detected and terahertz waves is effectively enhanced, and the fingerprint broadband detection accuracy is improved.
Example two
In the embodiment of the present invention, when the substance 2 to be detected uniformly coated on the upper surface of the waveguide layer of the detection module is α -lactose. As an embodiment of the present invention, the number of the detection modules is 25, and 5 detection modules are arranged in each of the horizontal direction and the vertical direction, and the total number is 5 × 5=25 detection modules. The thickness t1 of the unit structure waveguide layer is 160 μm, the thickness t2 of the grating layer is 10 μm, the duty ratio f of the grating layer is 0.45, the period p ranges from 141.05 μm to 178.25 μm, and the unit structure waveguide layer is in equal difference distribution by taking 1.55 μm as a step length.
The performance of the metamaterial detection module can be reflected through the graphs in fig. 2b and fig. 2c, dozens of detection module metamaterial units before and after being coated with alpha-lactose are scanned under an incident angle of 30 degrees, and the absorption peak envelope curves are obtained by comparing the difference values before and after two groups of reflectivity curves scanned by the units. Due to the field enhancement principle of evanescent waves, an absorption peak exists at the position of the envelope line of 0.53THz, the absorptivity fingerprint spectrum is consistent with the k value curve of the structural parameter of the super surface, the fingerprint spectrum of molecules is restored, and the broadband fingerprint detection is realized. Next, the absorption enhancement of the α -lactose sample in the terahertz broadband range was evaluated, and compared to a reference absorption of 1 μm α -lactose placed on an unpatterned substrate of the same thickness, it was found that the absorption enhancement factor can reach around 20 dB.
EXAMPLE III
In the embodiment of the present invention, when the substance 2 to be detected uniformly coated on the upper surface of the waveguide layer of the detection module is leucine. The number of the detection modules is 25, and the detection modules are arranged in the transverse direction and the longitudinal direction respectively, and 5 × 5=25 detection modules in total. The thickness t1 of the unit structure waveguide layer is 92.32 μm, the thickness t2 of the grating layer is 20 μm, the duty ratio f of the grating layer is 0.5, the period p ranges from 132.8 μm to 152 μm, and the unit structure waveguide layer is in equal difference distribution by taking 0.8 μm as a step length.
The performance of the metamaterial detection module can be reflected through the graphs in fig. 3b and 3c, dozens of detection module metamaterial units before and after being coated with the leucine are scanned under an incident angle of 30 degrees, and the absorption peak envelope curves are obtained by comparing the difference values before and after two groups of reflectivity curves scanned by the units. Due to the field enhancement principle of evanescent waves, an absorption peak exists at the position of the envelope line of 0.956THz, the absorptivity fingerprint spectrum is consistent with the k value curve of the structural parameter of the super surface, the fingerprint spectrum of molecules is reduced, and the broadband fingerprint detection is realized. Then, the absorption enhancement of the leucine sample in the terahertz broadband range is evaluated, and compared with the reference absorption of 1 μm leucine placed on a non-pattern substrate with the same thickness, the absorption enhancement factor can reach about 18 dB.
The summary by examples 1-3 is: when the performance of the metamaterial detection module is utilized to perform trace detection, the metamaterial unit structures in the detection modules are scanned by the light source at a fixed angle, so that the interaction between a sample and terahertz waves is enhanced, the problem that the traditional metamaterial surface needs to be conformally loaded with the sample on a microstructure with large undulation is solved, the surface treatment process of a sample wafer is simplified, the detection accuracy and repeatability are further improved, and the broadband fingerprint enhancement detection of trace molecules is realized.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising a … …" does not exclude the presence of another identical element in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (4)
1. A medium metamaterial based on gradient period enhanced terahertz spectrum absorption is characterized by comprising a substrate, a first substrate and a second substrate, wherein the first substrate is provided with a first surface and a second surface;
tens of detection modules and substances to be detected uniformly conformal on the surfaces of the detection modules;
each detection module consists of a lower grating layer and an upper waveguide layer;
the lower grating layer and the upper waveguide layer are made of the same dielectric material;
the lower grating layer is periodically and uniformly distributed on the upper waveguide layer;
the substance to be detected is uniformly conformal on the surface of the upper waveguide layer;
the detection modules have n in total 2 N, arranged in the transverse and longitudinal directions, for a total of n x n = n 2 A plurality of; the thickness t of the waveguide layer of the unit structure in each detection module 1 Thickness t of grating layer 2 The duty ratio f of the grating layer is kept unchanged, and the period p is gradually changed within a certain rangeA difference distribution;
the lower grating layer and the upper waveguide layer are made of the same material and are made of silicon dioxide SiO 2 Silicon Si, sapphire Al 2 O 3 Silicon nitride Si 3 N 4 Any one of the above;
thickness t of the upper waveguide layer 1 Is 50-200 μm, and the thickness t of the lower grating layer 2 Is 10-100 μm, and the duty ratio f of the lower grating layer is 0.3-0.7.
2. The medium metamaterial based on gradient period enhanced terahertz spectral absorption according to claim 1, wherein: the lower grating layer and the upper waveguide layer form a metamaterial unit structure, dozens of units form a detection module, and unit structure parameters forming each module are different.
3. The medium metamaterial based on gradient period enhanced terahertz spectral absorption according to claim 1, wherein: in the range of terahertz waveband, the silicon dioxide SiO 2 Has a refractive index in the range of 1.95 to 2.1, has a refractive index in the range of 3.4 to 3.48, and has a refractive index of sapphire Al 2 O 3 Has a refractive index in the range of 3 to 3.08, said silicon nitride Si 3 N 4 Has a refractive index in the range of 2.6 to 2.65.
4. The medium metamaterial based on gradient period enhanced terahertz spectral absorption according to claim 1, wherein: the number of the detection modules is 25, and the detection modules are respectively arranged in the transverse direction and the longitudinal direction and are 5, and the total number is 25; the thickness t of the unit structure waveguide layer in each detection module 1 Thickness t of grating layer 2 And the duty ratio f is kept unchanged, and p is set in a gradual change mode and is distributed in an equal difference mode.
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| CN207114429U (en) * | 2017-07-26 | 2018-03-16 | 福州大学 | Terahertz surface plasma resonance sensing equipment |
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