CN114325542B - Direct current signal calibration plate, calibration device and calibration method of integrated circuit test system - Google Patents

Direct current signal calibration plate, calibration device and calibration method of integrated circuit test system Download PDF

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Publication number
CN114325542B
CN114325542B CN202111393502.1A CN202111393502A CN114325542B CN 114325542 B CN114325542 B CN 114325542B CN 202111393502 A CN202111393502 A CN 202111393502A CN 114325542 B CN114325542 B CN 114325542B
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calibration
signal
integrated circuit
lead layer
test system
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CN114325542A (en
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罗锦晖
丁超
顾翼
王珩
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709th Research Institute of CSIC
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709th Research Institute of CSIC
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Abstract

The invention discloses a direct current signal calibration plate, a calibration device and a calibration method of an integrated circuit test system, wherein a signal butt joint end and a grounding butt joint end are arranged on the calibration plate, a signal lead layer and a grounding lead layer which are arranged in parallel up and down are arranged in the calibration plate, the signal butt joint ends are connected with the signal lead layer, the grounding butt joint ends are connected with the grounding lead layer, and the signal lead layer and the grounding lead layer respectively lead out a signal connecting wire and a grounding connecting wire. The signal ends and the ground ends of all channels in the test system are respectively connected to the same lead layer through the calibration plate, and are led out through the lead wires to be connected with loads, so that the connection with all the signal ends and the connection with all the ground ends are realized through a single lead wire, meanwhile, the signal channels of the integrated circuit test system are controlled to be conducted singly in sequence through the test control module by combining the calibration control module, and further, the efficient automatic calibration of the direct current parameters of the integrated circuit test system is realized, and the connection with the signal channels is not required to be replaced.

Description

Direct current signal calibration plate, calibration device and calibration method of integrated circuit test system
Technical Field
The invention relates to the technical field of integrated circuit test system metering, in particular to a direct current signal calibration plate, a calibration device and a calibration method of an integrated circuit test system.
Background
The calibration of the current integrated circuit test system is to calibrate the reference plates of all modules of the test system by using a calibration device, only the limited channels in the test system are calibrated, and the other channels are required to be compared with the input or output values of the reference plates in the test system to complete the calibration, so that the actual running conditions of all the channels of the test system can not be reflected. The number of the channels in the test system can reach thousands, if all the channels in the test system are manually calibrated, a calibrator needs to operate for a long time, and the test system is delayed to perform test work.
Disclosure of Invention
The invention provides a direct current signal calibration board of an integrated circuit test system, which overcomes the technical defects.
In order to achieve the technical purpose, the invention provides a direct current signal calibration plate of an integrated circuit test system, wherein a signal butt joint end and a grounding butt joint end are arranged on the calibration plate, a signal lead layer and a grounding lead layer which are arranged in parallel up and down are arranged in the calibration plate, the signal butt joint ends are connected with the signal lead layer, the grounding butt joint ends are connected with the grounding lead layer, and the signal lead layer and the grounding lead layer respectively lead out a signal connecting wire and a grounding connecting wire outwards.
The invention also provides a direct current signal calibration device of the integrated circuit test system, which comprises a test board of the integrated circuit test system, a calibration measuring instrument, a calibration control module, an adjustable load and the direct current signal calibration board of the integrated circuit test system, wherein the calibration control module is in communication connection with the test control module of the integrated circuit test system, the test board is in one-to-one butt joint with a signal channel of the calibration board, a signal connecting wire and a grounding connecting wire are respectively connected with two ends of the adjustable load, and the calibration measuring instrument is connected in parallel with two ends of the adjustable load and is used for measuring the voltage of the adjustable load.
The invention also provides a direct current signal calibration method of the integrated circuit test system, which comprises the following steps:
establishing communication connection between a calibration control module and a test control module of an integrated circuit test system;
the calibration control module controls signal channels of the integrated circuit test system to be sequentially and singly conducted through the test control module; namely, the current calibration signal channel is controlled to send out a current/voltage signal, and other signal channels are in a high-resistance state;
and comparing the measured value of the calibration measuring instrument with the measured value of the integrated circuit testing system to obtain the error of the testing system.
Compared with the prior art, the direct current signal calibration plate, the calibration device and the calibration method of the integrated circuit test system are characterized in that signal ends and ground ends of all channels in the test system are respectively connected to the same lead layer through the calibration plate, and are led out through wires to be connected with loads, so that connection with all the signal ends and connection with all the ground ends are realized through a single wire, meanwhile, the signal channels of the integrated circuit test system are controlled to be conducted singly in sequence through a test control module by combining a calibration control module, and further efficient automatic calibration of direct current parameters of the integrated circuit test system is realized, and connection with the signal channels is not needed to be replaced.
Drawings
FIG. 1 is a schematic diagram of a DC signal calibration apparatus for an integrated circuit test system according to an embodiment of the present invention;
fig. 2 is a flow chart of a method for calibrating a dc signal of an integrated circuit test system according to an embodiment of the invention.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Based on the foregoing, an embodiment of the present invention provides a calibration device for a dc signal of an integrated circuit test system, as shown in fig. 1, where the calibration device includes a dc signal calibration board 10 of the integrated circuit test system, a test board 20 of the integrated circuit test system, a calibration measurement instrument 30, and an adjustable load 40.
The calibration board 10 is provided with a signal butt joint end 11 and a grounding butt joint end 12, and the signal butt joint end 11 and the grounding butt joint end 12 are respectively arranged in one-to-one correspondence with a signal end 21 and a grounding end 22 on a test board 20 of the integrated circuit test system; the calibration board 10 is internally provided with a signal lead layer 101 and a ground lead layer 102 which are arranged in parallel up and down, the signal butt joint ends 11 on the calibration board 10 are all extended inwards to be connected with the signal lead layer 101, the ground butt joint ends 12 on the calibration board 10 are all extended inwards to be connected with the ground lead layer 102, and the signal lead layer 101 and the ground lead layer 102 respectively lead out a signal connection wire 103 and a ground connection wire 104 outwards. Preferably, an insulating plate 105 is disposed between the signal lead layer 101 and the ground lead layer 102.
Specifically as shown in fig. 1, on the calibration board 10, the signal lead layer 101 is relatively close to a side where the calibration board 10 is abutted against the test board 20 of the integrated circuit test system, the ground lead layer 102 is relatively far away from a side where the calibration board 10 is abutted against the test board 20 of the integrated circuit test system, the ground abutted end 12 sequentially passes through the signal lead layer 101 and the insulating board 105 to be connected with the ground lead layer 102, and the signal lead layer 101 and the ground lead layer 102 respectively lead out the signal connection wire 103 and the ground connection wire 104.
It may also be that, on the calibration board 10, the signal lead layer 101 is relatively far away from a side where the calibration board 10 is abutted against the test board 20 of the integrated circuit test system, the ground lead layer 102 is relatively close to a side where the calibration board 10 is abutted against the test board 20 of the integrated circuit test system, the signal abutting end 11 sequentially passes through the ground lead layer 102 and the insulating board 105 to be connected with the signal lead layer 101, and the signal lead layer 101 and the ground lead layer 102 respectively draw out the signal connection wire 103 and the ground connection wire 104.
As shown in fig. 1, the test board 20 is in one-to-one butt joint with the signal channels of the calibration board 10, the signal connection wires 103 and the ground connection wires 104 are respectively connected with two ends of the adjustable load 40, and the adjustable load 40 is used for adjusting the load resistance value according to the output of the test system; the calibration measurement meter 30 is connected in parallel to two ends of the adjustable load 40, and is used for measuring the voltage of the adjustable load 40.
Based on the above-mentioned direct current signal calibration device of the integrated circuit test system, the invention also provides a direct current signal calibration method of the integrated circuit test system, as shown in fig. 2, the direct current signal calibration method of the integrated circuit test system comprises the following steps:
s1, establishing communication connection between a calibration control module of a calibration board 10 and a test control module of an integrated circuit test system;
s2, the calibration control module controls signal channels of the integrated circuit test system to be sequentially and singly conducted through the test control module; namely, the current calibration signal channel is controlled to send out a current/voltage signal, and other signal channels are in a high-resistance state;
s3, comparing the measured value of the calibration measuring instrument 30 with the measured value of the integrated circuit testing system, and further obtaining the error of the testing system.
Specifically, firstly, a communication connection between a calibration control module and a test control module of an integrated circuit test system is established, and the calibration measurement instrument 30 and the adjustable load 40 are also in communication connection with the calibration control module; the calibration control module controls the current calibration signal channel of the integrated circuit test system to send out current/voltage signals through the test control module, and other signal channels are in a high-resistance state, wherein the high-resistance state can be regarded as a disconnection state, and only the current calibration signal channel is conducted at the moment to form a calibration loop with the adjustable load 40.
The calibration measuring instrument 30 measures the voltages at two ends of the adjustable load 40, and sends the measurement results to the calibration control module, when the calibration control module receives the measurement values of the calibration measuring instrument 30, the measurement values of the calibration measuring instrument 30 are compared with the measurement values of the integrated circuit test system, so as to obtain errors of the test system, and the calibration results are updated according to the errors.
And the calibration control module controls the integrated circuit test system to continuously calibrate the output current/voltage signals of different gears of the same channel through the test control module, and continuously calibrate the next channel until all the channels are calibrated after all the gears of the same channel are calibrated.
The invention relates to a direct current signal calibration board, a calibration device and a calibration method of an integrated circuit test system, which are characterized in that signal ends 21 and ground ends of all channels in the test system are respectively connected to the same lead layer through a calibration board 10, and are led out by using wires to be connected with loads, so that the connection with all the signal ends 21 and the connection with all the ground ends are realized through a single wire, and meanwhile, the signal channels of the integrated circuit test system are controlled to be sequentially and singly conducted through a test control module by combining a calibration control module, thereby realizing the efficient automatic calibration of direct current parameters of the integrated circuit test system without the need of replacing the signal channel connection.
It will be clearly understood by those skilled in the art that, for convenience and brevity of description, the specific working processes of the systems, apparatuses and modules described above may refer to the corresponding processes in the foregoing method embodiments, which are not repeated herein.
The above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (6)

1. The direct current signal calibration device of the integrated circuit test system comprises a test board, a calibration measuring instrument, an adjustable load and a calibration board of the integrated circuit test system, wherein the test board is in one-to-one butt joint with a signal channel of the calibration board, a signal butt joint end and a grounding butt joint end are arranged on the calibration board, a signal lead layer and a grounding lead layer which are arranged in parallel up and down are arranged in the calibration board, the signal butt joint ends are connected with the signal lead layer, the grounding butt joint ends are connected with the grounding lead layer, and the signal lead layer and the grounding lead layer respectively outwards lead out a signal connecting wire and a grounding connecting wire;
the signal connection lead and the grounding connection lead are respectively connected with two ends of the adjustable load, and the calibration measuring instrument is connected in parallel with two ends of the adjustable load and used for measuring the voltage of the adjustable load.
2. The device of claim 1, wherein an insulating plate is disposed between the signal lead layer and the ground lead layer.
3. The device of claim 1, wherein on the calibration plate, the signal lead layer is disposed relatively close to a side of the calibration plate where the calibration plate is abutted against a test plate of the integrated circuit test system, the ground lead layer is disposed relatively far from a side of the calibration plate where the calibration plate is abutted against the test plate of the integrated circuit test system, and the ground butt joint end is disposed sequentially through the signal lead layer and the insulating plate and connected to the ground lead layer.
4. The device of claim 1, wherein on the calibration plate, the signal lead layer is disposed relatively far from a side where the calibration plate is abutted against a test plate of the integrated circuit test system, the ground lead layer is disposed relatively close to a side where the calibration plate is abutted against the test plate of the integrated circuit test system, and the signal butt joint end is disposed sequentially through the ground lead layer and the insulating plate to be connected with the signal lead layer.
5. An integrated circuit test system dc signal calibration method using the integrated circuit test system dc signal calibration apparatus according to any one of claims 1 to 4, comprising the steps of:
establishing communication connection between a calibration control module of the calibration board and a test control module of the integrated circuit test system;
the calibration control module controls signal channels of the integrated circuit test system to be sequentially and singly conducted through the test control module; namely, the current calibration signal channel is controlled to send out a current/voltage signal, and other signal channels are in a high-resistance state;
and comparing the measured value of the calibration measuring instrument with the measured value of the integrated circuit testing system to obtain the error of the testing system.
6. The method of claim 5, wherein when the calibration control module reads the measured value of the calibration measuring instrument, the test control module controls the integrated circuit test system to send out the next current/voltage signal.
CN202111393502.1A 2021-11-23 2021-11-23 Direct current signal calibration plate, calibration device and calibration method of integrated circuit test system Active CN114325542B (en)

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