CN114323362B - Flexible conformal electrode based on living insect surface prepared by laser, preparation method and application thereof - Google Patents
Flexible conformal electrode based on living insect surface prepared by laser, preparation method and application thereof Download PDFInfo
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Abstract
The invention discloses a flexible conformal electrode based on a living insect surface prepared by laser, a preparation method and application thereof, and belongs to the technical field of flexible conformal electrodes; the flexible conductive layer is adhered on the surface of the living insect in a conformal way through physical adsorption, a laser direct writing technology is utilized to act on the surface of the living insect, the gold foil on the surface of which the flexible conductive layer is adsorbed, the photo-thermal effect of the laser enables the gold foil on the laser acting part to be removed, and a complementary gold electrode with an interdigital structure is left; the flexible gold electrode has the same shape and curvature as the insect surface to which it is attached, and is thus referred to as a flexible conformal electrode; air is used as a dielectric layer, so that the pressure sensor based on the flexible conformal electrode is obtained, and ultrasensitive detection of two modes when a tiny object is touched and a finger is close can be realized; the method can realize rapid processing of arbitrary patterning of the curved flexible conductive layer, and breaks through the strict limitation of laser processing on the surface flatness of the substrate.
Description
Technical Field
The invention belongs to the technical field of flexible conformal electrodes, and particularly relates to a flexible conformal electrode based on a living insect surface prepared by laser, a preparation method and application thereof.
Background
The insect has the characteristics of small volume, fine structure, complete functions and the like, and is widely focused by people, so that the insect has wide application prospect in the field of living insect surface integrated devices so as to realize the related perception of external environment information.
The traditional method for manufacturing the conformal electrode, such as a photoetching method and a nano-imprinting method, is only suitable for processing on a planar substrate, and meanwhile, the problems of complex process, difficult manufacturing of an imprinting template, complex alignment and the like are faced. The femtosecond laser processing technology has the advantages of high precision, patternability and the like, but has higher curvature requirement on a processed substrate, and is only suitable for a flat substrate. The screen printing technology and the 3D ink-jet printing technology can realize conformal electrode processing of curved surfaces, but have the defects of high printing cost, long processing time and the like. In addition, living insects are used as a substrate, the effect of a processing technology on the insects is considered, and as the surface of the insect shell is generally in a streamline shape, the processing technology can damage the insect shell in the action process, so that no method for rapidly and nondestructively integrating the electrode conformally on the surface of the living insects is available at present, meanwhile, the damage to the surface of the insects is avoided, and a flexible conformal electrode device based on the surface of the living insects has important significance for sensing information of the external environment.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to solve the problems that: and preparing the flexible conformal electrode on the surface of the living insect by using a laser processing technology. The laser direct writing technology is utilized to act on the surface of the living insect with the gold foil of the flexible conductive layer adsorbed on the surface, the gold foil of the laser acting part is removed by the photo-thermal effect of the laser, and a gold electrode with an interdigital structure is left, which is complementary, and the flexible gold electrode has the same shape and curvature as the surface of the insect attached to the gold electrode, so that the gold electrode is called as a flexible conformal electrode; air is used as a dielectric layer, so that the pressure sensor based on the flexible conformal electrode is obtained, and ultrasensitive detection of two modes when a tiny object is touched and a finger is approaching can be realized.
The main detection principle of the sensor is as follows: (1) For the contact mode, the formula is given by a capacitive parallel plate capacitor(Wherein d is the relative distance between the upper and lower plates of the parallel plate capacitor, epsilon 0 is the vacuum dielectric constant, epsilon r is the dielectric constant of the dielectric layer in the parallel plate capacitor, A is the relative area between the upper and lower plates), when an object contacts the sensor, the dielectric layer between the interdigital electrodes is changed from air with smaller dielectric constant to air and an object with larger dielectric constant, so that the dielectric constant epsilon r of the medium is increased, and therefore, under certain pressure, the capacitance value of the sensor is changed, and the sensor has higher sensitivity; (2) For the non-contact mode, based on the fringe electric field effect of the parallel plate capacitor, the electric field lines of the fringe area of the parallel plate capacitor can be expanded to the external space, and when fingers approach, the fingers intercept the fringe electric field lines of the electrodes, so that the electric field intensity between the interdigital electrodes is reduced to reduce the capacitance value; the sensor is thus more sensitive to the proximity of the finger.
The invention is realized by the following technical scheme:
The flexible conformal electrode on the surface of the living insect is obtained by conformally adsorbing gold foil on the surface of the living insect through physical adsorption, and then performing patterning processing on the gold foil by using a femtosecond laser direct writing technology.
In a second aspect, the invention provides a method for preparing a flexible conformal electrode on the surface of a living insect based on laser, which comprises the following specific steps:
Step (1): adsorption of the conductive substrate on the insect surface;
Cutting the conductive substrate, and fixing the conductive substrate on the surface of a living insect through physical adsorption, so as to obtain a flexible conductive substrate conformal with the surface of the insect;
Step (2): processing a conductive substrate by using a laser direct writing technology to prepare a flexible conformal electrode on the surface of a living insect;
Specifically, fixing living insects attached with a flexible conductive substrate on a flat substrate, ensuring the surface of the flexible conductive substrate to be flat, placing the substrate on an optical platform for laser processing, fixing the periphery of the substrate by using a fixing device, and adjusting the relative positions of laser light spots and the insect surface so that laser is focused on the insect surface; and inputting a pre-processed pattern complementary with the interdigital electrode pattern and corresponding processing parameters at a program control interface of the laser, and then carrying out laser processing to obtain the flexible conformal electrode based on the surface of the living insect.
Further, the specific steps of the step (1) are as follows:
cutting a conductive substrate with the thickness of 0.1-0.3 mu m into a rectangle with the size of 4mm 2mm-12mm 6mm by using scissors or other cutting tools, dipping deionized water or other volatile liquids such as ethanol by using a brush pen brush or other dipping devices, and coating the rectangle on the surface part of the living insect to be attached; the conductive substrate is conformally attracted to the surface of the living insect using physical attraction using forceps or other grasping means.
Further, the conductive substrate in the step (1) is gold foil, silver foil or aluminum foil, and the insects are scarab beetles, ladybug or crayfish.
Further, the conformal adsorption in the step (1) refers to adsorption in which the adsorbed material has the same curvature and shape characteristics as the adsorption body.
Further, the step of adding the tool body in the step (2) is as follows:
Fixing living insects adsorbed with a flexible conductive substrate on a glass slide by using double-sided adhesive tape, fixing four corners of the glass slide on an optical platform of a laser by using 3M adhesive tape, setting the area of a processing area to be 4mm x 2mm-6mm x 12mm, adjusting the distance between a laser head and the insect surface to be 8-15cm, and ensuring that a laser focus is positioned on the insect surface; opening computer control software connected with a laser, adjusting related parameters such as line spacing, processing speed, laser power, laser frequency and the like, inputting a pre-processed complementary interdigital electrode pattern, wherein the area is 4mm x 2mm-6mm x 12mm, adjusting an initial processing position, and ensuring that a processing area is positioned on insects adsorbed with a flexible conductive substrate; and removing the complementary region of the interdigital electrode under the action of laser, and processing to obtain the flexible conformal interdigital electrode with the area size of 4mm x 2mm-6mm x 12mm on the surface of the living insect, wherein the flexible conformal interdigital electrode is prepared by using a laser direct writing technology.
Further, in the control software connected with the laser, the laser wavelength is 1064nm, the laser power parameter is set to 5% -15%, the line spacing is 0.001-0.01mm, the scanning speed is 100-300mm/s, and the processing frequency is 20-50kHZ, so that the living insect surface conformal interdigital electrode is obtained.
Further, the length of each interdigital electrode is 1mm-2mm, the width of each interdigital electrode is 0.05-0.25mm, the distance between adjacent interdigital electrodes is 0.1-0.3mm, and the overall size of each interdigital electrode is 3mm x 1.5mm-6mm x 3mm.
In a third aspect, the invention provides an application of a flexible conformal electrode on a living insect surface based on laser preparation in pressure detection, specifically, a conductive copper tape with a thickness of 0.03-0.1mm is cut into a rectangle with a thickness of 0.2-0.1 mm-0.8-1.6 mm by using scissors or other cutting tools, and then silver wires are fixed at the tail ends of the interdigital electrodes through the conductive copper tape, so that the flexible conformal electrode-based pressure sensor on the living insect surface can be successfully prepared;
Then two leads of the insect surface flexible conformal electrode base pressure sensor are connected to an LCR-6200 digital bridge tester, and one layer of hard paper sheet with the mass of 0.01-0.03g and two layers of hard paper sheets with the mass of 0.02-0.06g are alternately placed on the insect surface flexible conformal electrode base pressure sensor, wherein the relative change (delta C/C 0) of the capacitance of the sensor ranges from 0.03 to 0.035 (one layer of hard paper sheet) and from 0.045 to 0.055 (two layers of hard paper sheets); when an object (hard paper sheet) touches the sensor, the formula is given by a parallel plate capacitor The dielectric layer between the interdigital electrodes is changed from air with smaller dielectric constant to air and an object (a hard paper sheet) with larger dielectric constant under the action of certain pressure, so that the dielectric constant epsilon r of the medium is increased, the capacitance value of the sensor is increased, and the flexible conformal electrode-based pressure sensor on the surface of the living insect can realize ultrasensitive detection on slight pressure.
In a fourth aspect, the invention provides an application of a flexible conformal electrode of a living insect surface prepared based on laser in finger proximity detection, in particular to an LCR-6200 digital bridge tester, wherein two wires of the flexible conformal electrode-based pressure sensor of the insect surface are connected to the digital bridge tester, and when the distance between a finger and the flexible conformal interdigital electrode surface is 0.1 cm to 1cm, the capacitance change value (delta C/C 0) of the flexible conformal electrode-based pressure sensor of the insect surface is 0.3 to 0.5; because of the fringe electric field effect of the parallel plate capacitor, the electric field lines in the fringe area can be expanded to the external space, when the finger approaches, the finger can intercept the fringe electric field lines sent by the electrodes, the electric field intensity between the electrodes is reduced, and the capacitance value is reduced, so that when the finger approaches, the capacitance of the flexible conformal electrode-based pressure sensor on the surface of the living insect is changed, and the sensor is very sensitive to the approach of the finger.
Compared with the prior art, the invention has the following advantages:
(1) The flexible conformal electrode on the surface of the living insect is prepared by adopting the laser direct writing technology, so that the electrode on the surface of the living insect can be rapidly processed, and meanwhile, the damage to the surface of a shell layer of the insect and the death of the insect can be avoided;
(2) The flexible conformal electrode on the surface of the living insect is prepared by adopting a laser direct writing technology, so that the random patterning rapid processing of the curved flexible conductive layer can be realized, and the strict limitation of laser processing on the flatness of the surface of the substrate is broken through;
(3) The scarab beetle and the conductive gold foil are used as raw materials, so that the method has the advantages of easiness in acquisition, low cost and the like;
(4) The prepared flexible conformal electrode on the surface of the living insect is formed by adhering gold foil on the living insect shell layer in a conformal way through physical adsorption, and simultaneously, the conformal electrode is formed by rapid action by using a laser direct writing technology, so that the flexible conformal electrode has the advantages of simplicity in operation, low time cost and the like;
(5) The flexible conformal electrode-based pressure sensor on the surface of the living insect is prepared by adopting a laser direct writing technology, and detection of two modes of object contact (hard paper sheet) and non-contact (finger approach) can be realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. Like elements or portions are generally identified by like reference numerals throughout the several figures. In the drawings, elements or portions thereof are not necessarily drawn to scale.
FIG. 1 is a schematic diagram of a process for preparing a flexible conformal electrode-based pressure sensor for preparing a living insect surface based on a laser;
FIG. 2 is an electron micrograph of an electrode material gold foil in a flexible conformal electrode-based pressure sensor for preparing a living insect surface based on a laser according to the present invention;
FIG. 3 is a pictorial view of a flexible conformal electrode-based pressure sensor of the present invention prepared in steps for preparing a living insect surface based on a laser;
Wherein, (a) is a physical photo diagram of a flexible conformal electrode on the surface of the living insect, which is obtained after the laser acts on the flexible conformal conductive layer; (b) A physical photo diagram of the flexible conformal electrode on the surface of the living insect is obtained after the unnecessary gold foil around the flexible conformal electrode is removed by brushing with a brush pen dipped with deionized water; (c) In order to fix two silver wires on two sides of an interdigital electrode respectively by using a conductive copper adhesive tape, a physical photo diagram of the flexible conformal electrode-based pressure sensor on the surface of the living insect prepared based on laser is obtained;
FIG. 4 is an image of the relative change in capacitance of a flexible conformal electrode-based pressure sensor of the present invention for laser-based preparation of a living insect surface as a function of pressure;
fig. 5 is an image of the relative change in capacitance of a flexible conformal electrode-based pressure sensor of the present invention based on a laser produced living insect surface as the finger is successively moved away.
Detailed Description
The following embodiments of the present invention will be described in detail with reference to the accompanying drawings, which are only used to more clearly illustrate the technical solution of the present invention, and therefore are only used as examples, and are not to be construed as limiting the scope of the present invention.
It is noted that unless otherwise indicated, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this application belongs.
Example 1
Example 1
The flexible conformal electrode on the surface of the living insect is prepared based on laser, firstly, gold foil is conformally adsorbed on the surface of the living insect through physical adsorption, and then, the gold foil is subjected to patterning processing by utilizing a femtosecond laser direct writing technology.
As shown in fig. 1 and 2, a method for preparing a flexible conformal electrode on the surface of a living insect based on laser comprises the following specific steps:
(1) Adsorption of the conductive substrate on the surface of the living insect;
firstly, cutting a conductive substrate, and fixing the conductive substrate on the surface of a living insect through physical adsorption, so as to obtain a flexible conductive substrate conformal with the surface of the living insect;
Specifically, a gold foil with the thickness of 0.12 mu m is cut into a rectangle with the size of 23mm x 10mm by using scissors, deionized water is dipped by using a brush to enable the tip of the brush to be completely wetted, and the surface part of the insect to be attached is gently wiped by using the brush head of the brush; clamping the gold foil by using tweezers, and conformally adsorbing the flexible gold foil on the surface of the insect by using physical adsorption; the gold foil is formed by forming gold particles through finance and then performing patting deposition, and the gold foil surface is formed by gold particle assembly deposition according to an electron microscope photograph of the gold foil;
(2) Processing the conductive substrate by using a laser direct writing technology to prepare a flexible conformal electrode on the surface of the living insect;
The optical fiber laser with the laser wavelength of 1064nm has high adjustability in laser power, scanning speed, processing frequency and line spacing; fixing living insects adsorbed with a flexible conductive substrate on a glass slide by using double-sided adhesive tape, fixing four corners of the glass slide on an optical platform of a laser by using 3M adhesive tape, setting the area of a processing area to be 5mm x 2mm, adjusting the distance between a laser head and the insect surface to be 10.3cm, and ensuring that a laser focus is positioned on the insect surface; opening computer control software connected with a laser, adjusting related parameters such as line spacing, processing speed, laser power, laser frequency and the like, inputting a pre-processed complementary interdigital electrode pattern with an area of 5 mm-2 mm, adjusting an initial processing position, and ensuring that a processing area is positioned on insects adsorbed with a flexible conductive substrate; after processing, the flexible conformal interdigital electrode with the area size of 5 mm-2 mm is obtained, and the living insect surface is prepared by utilizing a laser direct writing technology; finally, the brush pen dipped with deionized water is used for wiping the gold foil around the interdigital electrode; in the control software connected with the laser, the laser wavelength is 1064nm, the laser power parameter is set to 8%, the line spacing is 0.01mm, the scanning speed is 200mm/s, and the processing frequency is 30kHZ, so that the living insect surface conformal interdigital electrode is obtained; wherein the length of each finger is 1.689mm, the width of each finger is 0.10135mm, the distance between adjacent fingers is 0.1689mm, and the overall size of the finger electrode is 4.08mm by 1.62mm.
FIG. 1 is a schematic diagram of the preparation process of the invention, from which the preparation process and the operation process are simple, and the processing is fast and highly accurate;
FIG. 2 is an electron micrograph of a gold foil used in the process of the present invention from which it can be seen that the gold foil is formed by assembled deposition of gold particles;
fig. 3 is a photograph of a flexible conformal electrode-based pressure sensor prepared at each step based on a living insect surface prepared by laser, and it can be seen from the figure that a conductive gold foil is conformally attached to the surface of a chafer shell layer, and meanwhile, the patterned interdigital electrode obtained after the laser action still has good conformality;
Example 2
The embodiment provides an application of a living insect surface flexible conformal interdigital electrode prepared by a laser processing and physical adsorption method in the aspect of pressure detection, which comprises the following specific steps:
Firstly, cutting a conductive copper adhesive tape with the thickness of 0.06mm into a rectangle with the thickness of 0.5 mm by using scissors, and then fixing a silver wire at the tail end of an interdigital electrode through the conductive copper adhesive tape, so as to prepare the flexible conformal electrode-based pressure sensor on the surface of the living insect. Two wires of the living insect surface flexible conformal electrode based pressure sensor were then connected to an LCR-6200 digital bridge tester, and by repeatedly placing one hard paper sheet with a mass of 0.02g and two hard paper sheets with a mass of 0.04g alternately on the insect surface flexible conformal electrode based pressure sensor, the relative change in the sensor capacitance (Δc/C 0) ranged from 0.03 (one hard paper sheet) to 0.05 (two hard paper sheets); when an object (hard paper sheet) touches the sensor, the formula is given by a parallel plate capacitor The dielectric layer between the interdigital electrodes is changed from air with smaller dielectric constant to air and an object (a hard paper sheet) with larger dielectric constant under the action of certain pressure, so that the dielectric constant epsilon r of the medium is increased, the capacitance value of the sensor is increased, and the flexible conformal electrode-based pressure sensor on the surface of the living insect can realize ultrasensitive detection on slight pressure.
FIG. 4 is a laser-based flexible conformal electrode-based pressure sensor of a living insect surface with greater applied pressure and greater capacitance variation;
Example 3
The embodiment provides an application of a living insect surface flexible conformal interdigital electrode prepared by a laser processing and physical adsorption method in finger proximity detection, which comprises the following specific steps:
Firstly, cutting a conductive copper adhesive tape with the thickness of 0.06mm into a rectangle with the thickness of 0.5 mm by using scissors, and then fixing a silver wire at the tail end of an interdigital electrode through the conductive copper adhesive tape, so as to prepare the flexible conformal electrode-based pressure sensor on the surface of the living insect. Then two leads of the living insect surface flexible conformal electrode base pressure sensor are connected to an LCR-6200 digital bridge tester, and when the distance between a finger and the surface of the flexible conformal interdigital electrode is 0.2cm, the capacitance change value (delta C/C 0) of the living insect surface flexible conformal electrode base pressure sensor is 0.4; because of the fringe electric field effect of the parallel plate capacitor, the electric field lines in the fringe area can be expanded to the external space, when the finger approaches, the finger can intercept the fringe electric field lines sent by the electrodes, the electric field intensity between the electrodes is reduced, and the capacitance value is reduced, so that when the finger approaches, the capacitance of the flexible conformal electrode-based pressure sensor on the surface of the living insect is changed, and the sensor is very sensitive to the approach of the finger.
FIG. 5 is a schematic illustration of a laser-based, flexible, conformal electrode-based pressure sensor for preparing a living insect surface, wherein the capacitance of the sensor varies substantially from an initial capacitance when a finger is positioned adjacent the sensor;
The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the specific details of the above embodiments, and various simple modifications can be made to the technical solution of the present invention within the scope of the technical concept of the present invention, and all the simple modifications belong to the protection scope of the present invention.
In addition, the specific features described in the above embodiments may be combined in any suitable manner, and in order to avoid unnecessary repetition, various possible combinations are not described further.
Moreover, any combination of the various embodiments of the invention can be made without departing from the spirit of the invention, which should also be considered as disclosed herein.
Claims (6)
1. The flexible conformal electrode is characterized in that the flexible conformal electrode is obtained by conformally adsorbing gold foil on the surface of the living insect through physical adsorption, and then performing patterning processing on the gold foil by using a femtosecond laser direct writing technology;
the flexible conformal electrode based on the living insect surface prepared by the laser is prepared by the following method, and the specific steps are as follows:
Step (1): adsorption of the conductive substrate on the insect surface;
Firstly, cutting a conductive substrate, and fixing the conductive substrate on the surface of a living insect through physical adsorption, so as to obtain a flexible conductive substrate conformal with the surface of the insect;
Step (2): processing a conductive substrate by using a laser direct writing technology to prepare a flexible conformal electrode on the surface of a living insect;
specifically, fixing living insects attached with a flexible conductive substrate on a flat substrate, ensuring the surface of the flexible conductive substrate to be flat, placing the substrate on an optical platform for laser processing, fixing the periphery of the substrate by using a fixing device, and adjusting the relative positions of laser light spots and the insect surface so that laser is focused on the insect surface; inputting a pre-processed pattern complementary with the interdigital electrode pattern and corresponding processing parameters at a program control interface of the laser, and then carrying out laser processing to obtain a flexible conformal electrode based on the surface of the living insect;
the specific steps of the step (1) are as follows:
Cutting a conductive substrate with the thickness of 0.1-0.3 mu m into a rectangle with the size of 4mm 2mm-12mm 6mm by using scissors, and then dipping deionized water or ethanol liquid by using a brush pen to coat the rectangle on the surface of the living insect to be attached; using tweezers to conformally adsorb a conductive substrate on the surface of a living insect by physical adsorption;
The conformal adsorption in the step (1) refers to adsorption in which the adsorbed substance has the same curvature and shape characteristics as the adsorption body.
2. The laser-based flexible conformal electrode for a living insect surface according to claim 1, wherein the tool body adding step in step (2) is as follows:
Fixing living insects adsorbed with a flexible conductive substrate on a glass slide by using double-sided adhesive tape, fixing four corners of the glass slide on an optical platform of a laser by using 3M adhesive tape, setting the area of a processing area to be 4mm x 2mm-6mm x 12mm, adjusting the distance between a laser head and the insect surface to be 8-15cm, and ensuring that a laser focus is positioned on the insect surface; opening computer control software connected with a laser, adjusting related parameters of line spacing, processing speed, laser power and laser frequency, inputting a pre-processed complementary interdigital electrode pattern, wherein the area is 4mm x 2mm-6mm x 12mm, adjusting an initial processing position, and ensuring that a processing area is positioned on insects adsorbed with a flexible conductive substrate; and removing the complementary region of the interdigital electrode under the action of laser, and processing to obtain the flexible conformal interdigital electrode with the area size of 4mm x 2mm-6mm x 12mm on the surface of the living insect, wherein the flexible conformal interdigital electrode is prepared by using a laser direct writing technology.
3. The flexible conformal electrode for the surface of the living insect prepared based on the laser according to claim 2, wherein the laser wavelength is 1064nm, the laser power parameter is set to be 5% -15%, the line spacing is 0.001-0.01mm, the scanning speed is 100-300mm/s, and the processing frequency is 20-50kHZ in control software connected with the laser, so that the conformal interdigital electrode for the surface of the living insect is obtained.
4. A flexible conformable electrode for a surface of a living insect prepared on the basis of a laser according to claim 1 wherein each finger has a length of 1mm to 2mm, a width of 0.05 to 0.25mm, a distance between adjacent fingers of 0.1 to 0.3mm, and an overall dimension of the electrode of 3mm x 1.5mm to 6mm x 3mm.
5. The application of the flexible conformal electrode based on the surface of the living insect prepared by the laser according to the claim 1 in the aspect of pressure detection, wherein the conductive copper adhesive tape with the thickness of 0.03-0.1mm is cut into a rectangle with the thickness of 0.2 x 0.1mm-0.8 x 1.6mm by using scissors, and then silver wires are fixed at the tail ends of the interdigital electrodes by the conductive copper adhesive tape, so that the flexible conformal electrode based pressure sensor on the surface of the living insect is successfully prepared; then two leads of the insect surface flexible conformal electrode-based pressure sensor are connected to an LCR-6200 digital bridge tester, and one layer of hard paper sheet with the mass of 0.01-0.03g and two layers of hard paper sheets with the mass of 0.02-0.06g are alternately placed on the insect surface flexible conformal electrode-based pressure sensor, wherein the relative change range of the capacitance of the sensor is 0.03-0.035 and the relative change range of the capacitance of the sensor is 0.045-0.055; when the hard paper sheet touches the sensor, the formula is formed by a parallel plate capacitorThe dielectric layer between the interdigital electrodes is changed from air with smaller dielectric constant to air and a hard paper sheet with larger dielectric constant under the action of certain pressure, so that the dielectric constant epsilon r of the medium is increased, and the capacitance value of the sensor is increased, so that the living insect surface flexible conformal electrode-based pressure sensor can realize ultrasensitive detection of slight pressure.
6. The application of the flexible conformal electrode based on the living insect surface prepared by the laser according to the claim 1 in finger proximity detection, wherein the conductive copper adhesive tape with the thickness of 0.03-0.1mm is cut into a rectangle with the thickness of 0.2-0.1 mm-0.8-1.6 mm by using scissors, and then silver wires are fixed at the tail ends of the interdigital electrodes by the conductive copper adhesive tape, so that the flexible conformal electrode based pressure sensor on the living insect surface is successfully prepared; connecting two wires of the insect surface flexible conformal electrode base pressure sensor to an LCR-6200 digital bridge tester, wherein when the distance between a finger and the surface of the flexible conformal interdigital electrode is 0.1-1cm, the capacitance change value of the insect surface flexible conformal electrode base pressure sensor is 0.3-0.5; because of the fringe electric field effect of the parallel plate capacitor, the electric field lines in the fringe area can be expanded to the external space, when the finger approaches, the finger can intercept the fringe electric field lines sent by the electrodes, the electric field intensity between the electrodes is reduced, and the capacitance value is reduced, so that when the finger approaches, the capacitance of the flexible conformal electrode-based pressure sensor on the surface of the living insect is changed, and the sensor is very sensitive to the approach of the finger.
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