CN114321423A - Vacuum valve for unmanned underwater vehicle and assembling and vacuumizing operation method thereof - Google Patents

Vacuum valve for unmanned underwater vehicle and assembling and vacuumizing operation method thereof Download PDF

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Publication number
CN114321423A
CN114321423A CN202111426794.4A CN202111426794A CN114321423A CN 114321423 A CN114321423 A CN 114321423A CN 202111426794 A CN202111426794 A CN 202111426794A CN 114321423 A CN114321423 A CN 114321423A
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valve
vacuum
valve rod
valve body
rod
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CN202111426794.4A
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CN114321423B (en
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付佳杰
牛群峰
武雷
江国金
向万龙
韩峰
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Yichang Testing Technique Research Institute
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Yichang Testing Technique Research Institute
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Abstract

The invention discloses a vacuum valve for an unmanned underwater vehicle and an assembling and vacuumizing operation method thereof, wherein the vacuum valve comprises the following components: the valve comprises a valve body, a valve rod, a valve cover, a small sealing ring and a large sealing ring; the valve body is coaxially arranged in a through hole preset on the peripheral vacuum container, and the butt joint part is sealed; more than one through hole is arranged at the lower part of the large end of the valve body; the valve rod is coaxially arranged in the valve body, and a through hole penetrating through the axial direction is formed in the center of the valve rod; two circles of sealing grooves are respectively arranged on the outer circumferential surfaces of the lower end of the valve rod and the lower end of the middle part of the valve rod, small sealing rings and large sealing rings are respectively assembled, after vacuum pumping is carried out, the lower end of the valve rod is abutted against the inner bottom surface of the valve body, and sealing between the valve rod and the valve body is realized through the small sealing rings and the large sealing rings; the valve cover is matched with the external thread of the large end of the valve body, and the valve rod is tightly pressed on the inner bottom surface of the valve body through the inner bottom surface of the closed end of the valve cover; the assembling and vacuumizing operation method of the vacuum valve can vacuumize the compensation cabin on the unmanned underwater vehicle and can reliably seal the compensation cabin underwater for a long time.

Description

Vacuum valve for unmanned underwater vehicle and assembling and vacuumizing operation method thereof
Technical Field
The invention relates to the technical field of mechanical vacuum valves, in particular to a vacuum valve for an unmanned underwater vehicle and an assembling and vacuumizing operation method thereof.
Background
One important use of unmanned vehicles is to transport various loads under sea water in a concealed manner. After the unmanned underwater vehicle loads the load, the unmanned underwater vehicle forms a balanced system to sail in water, the load is separated from the unmanned underwater vehicle after sailing to a destination, the load generally has certain negative buoyancy in the water, the unmanned underwater vehicle after releasing the load needs to quickly compensate the buoyancy change, and the buoyancy of the unmanned underwater vehicle in the water is kept unchanged before and after releasing the load. Generally, the unmanned underwater vehicle compensates buoyancy change caused by load release by arranging compensation cabin water inflow. In order to increase the water inlet speed of the compensation cabin and ensure that the compensation cabin can be filled with water, a vacuum valve is arranged on the compensation cabin to vacuumize the compensation cabin.
At present, the commonly used vacuum valves are generally suitable for land, such as a vacuum stop valve, a vacuum electromagnetic valve, a vacuum baffle valve, a vacuum inflation valve and the like, and the vacuum valves are not suitable for unmanned underwater vehicles working under water.
Disclosure of Invention
In view of the above, the invention provides a vacuum valve for an unmanned underwater vehicle and an assembling and vacuumizing operation method thereof, which can vacuumize a compensation cabin on the unmanned underwater vehicle and can reliably seal the compensation cabin underwater for a long time.
The technical scheme of the invention is as follows: a vacuum valve for an unmanned submersible vehicle, comprising: the valve comprises a valve body, a valve rod, a valve cover, a small sealing ring and a large sealing ring;
the valve body is of a cylindrical structure with an opening at the upper end, a closed lower end and a stepped interior, and the inner diameter of the upper end of the valve body is larger than that of the lower end; the valve body is coaxially arranged in a through hole preset on the peripheral vacuum container, and the butt joint part is sealed; the lower part of the large end of the valve body is provided with more than one through hole for realizing the communication between the valve body and the inside of the vacuum container;
the valve rod is a step-shaped rod piece with two thin ends and a thick middle part, and is coaxially arranged in the valve body, and the center of the valve rod is provided with a through hole penetrating through the axial direction; two circles of sealing grooves are respectively arranged on the outer circumferential surfaces of the lower end of the valve rod and the lower end of the middle part of the valve rod, a small sealing ring is assembled in the sealing groove at the lower end of the valve rod, a large sealing ring is assembled in the sealing groove at the lower end of the middle part of the valve rod, after the valve rod is vacuumized, the lower end of the valve rod is abutted against the inner bottom surface of the valve body, and the sealing between the valve rod and the valve body is realized through the small sealing ring and the large sealing ring;
the valve cover is of a cylindrical structure with one open end and the other closed end, and the open end of the valve cover is provided with internal threads and is matched with the external threads at the end part of the large end of the valve body so as to connect the valve cover with the valve body in a threaded manner and tightly press the valve rod on the inner bottom surface of the valve body through the inner bottom surface of the closed end of the valve cover.
Preferably, the lower part of the large end of the valve body is uniformly provided with more than two through holes along the circumferential direction, and the axial direction of each through hole is parallel to the radial direction of the valve body.
Preferably, the outer circumferential surface of the valve cover is provided with a knurled pattern.
Preferably, the upper end of the valve rod is provided with a connecting disc which is used for realizing the connection of the valve rod and an external vacuum-pumping system.
Preferably, the upper end of the middle part of the valve rod is cut for a circle along the circumferential direction to form a step, a 120-degree fan-shaped boss is reserved at the upper end of the middle part of the valve rod during cutting, and a clamping groove is formed between the fan-shaped boss and the step.
Preferably, the operation frock of vacuum valve is the swivel nut, and it is both ends open-ended drum structure, and the lower extreme is equipped with the internal thread that matches with the big end external screw thread of valve body, and the upper end is equipped with the fan-shaped step of a 120 jiaos along radial inside, fan-shaped step and the draw-in groove concave-convex cooperation on the valve rod for it is spacing to valve rod along axial displacement.
Preferably, the thickness of the fan-shaped step is smaller than the opening width of the clamping groove in the valve rod, and the inner diameter of the fan-shaped step in the threaded sleeve is larger than that of the clamping groove in the valve rod; the thickness direction of the fan-shaped step is parallel to the axial direction of the threaded sleeve, and the direction of the opening width of the clamping groove is parallel to the axial direction of the valve rod.
Preferably, the outer circumferential surface of the screw sleeve is provided with a knurled pattern.
Preferably, the valve body, the valve rod and the valve cover are all made of stainless steel materials, and the small sealing ring and the large sealing ring are all standard O-shaped rubber sealing rings.
An assembling and vacuumizing operation method of a vacuum valve for an unmanned underwater vehicle comprises the following steps:
step one, unscrewing a valve cover from a valve body;
assembling the threaded sleeve on the valve body;
thirdly, rotating the valve rod to enable the fan-shaped boss on the valve rod to be staggered with the fan-shaped step on the threaded sleeve, and drawing the valve rod outwards along the axial direction until the step is limited by the lower end face of the fan-shaped step on the threaded sleeve in a contact manner;
step four, rotating the valve rod to enable a clamping groove on the valve rod to be in concave-convex fit with a fan-shaped step on the threaded sleeve, so that the threaded sleeve can axially limit the valve rod, and at the moment, the interior of the vacuum container is communicated with the outside through a through hole in the valve body;
step five, connecting the vacuum valve with an external vacuum pumping system, vacuumizing the vacuum container, rotating the valve rod when the vacuum degree inside the vacuum container reaches a preset requirement, enabling the clamping groove on the valve rod to be staggered with the fan-shaped step on the threaded sleeve, releasing the limit of the up-and-down movement of the valve rod at the moment, enabling the valve rod to enter the bottom of the valve body under the action of negative pressure suction inside the vacuum container, and sealing a channel between the vacuum container and the outside by a small sealing ring and a large sealing ring;
and step six, dismantling the vacuum-pumping system, unscrewing the screw sleeve, and assembling the valve cover on the valve body, so that the assembling and vacuum-pumping operations of the vacuum valve are completed.
Has the advantages that:
1. the vacuum valve controls the on and off of the vacuum valve by the up-and-down movement of the valve rod in the valve body, has the advantages of simple composition, few component compositions and easy operation, and simultaneously adopts a double-channel sealing structure to improve the sealing reliability of long-time underwater work; in addition, the vacuum valve can be connected with an external vacuumizing system through a standard interface so as to be used for vacuumizing the unmanned underwater vehicle compensation cabin.
2. The reticulate pattern knurl arranged on the outer circumferential surface of the valve sleeve can increase the friction force during manual operation, thereby facilitating the operation.
3. According to the invention, the arrangement of the upper step of the valve rod, the fan-shaped boss and the clamping groove is matched with the fan-shaped step arranged on the threaded sleeve, so that the axial movement of the valve rod can be limited, and the valve rod is prevented from moving up and down in the valve body in the vacuumizing process.
4. The valve body, the valve rod and the valve sleeve are all made of seawater corrosion resistant materials, and the vacuum valve can work in a seawater environment for a long time.
Drawings
Fig. 1 is a general structural sectional view of a vacuum valve of the present invention in a state where a valve stem is sealed.
Fig. 2 is a general structural sectional view of the vacuum valve of the present invention in a vacuum state.
Fig. 3 is a schematic structural view of the valve body of the present invention.
Fig. 4 is a schematic view of the valve stem of the present invention.
Fig. 5 is a schematic structural view of the valve cover of the present invention.
Fig. 6 is a schematic structural view of the insert of the present invention.
The valve comprises a valve body 1, a valve rod 2, a valve cover 3, a small sealing ring 4, a large sealing ring 5, a vacuum container 6, a threaded sleeve 7, a through hole 1a, a clamping groove 2a, a connecting disc 2b and a step 2 c.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
The embodiment provides a vacuum valve for an unmanned underwater vehicle and an assembling and vacuumizing operation method thereof, which can vacuumize a compensation cabin on the unmanned underwater vehicle and can reliably seal the compensation cabin underwater for a long time.
As shown in fig. 1 and 2, the vacuum valve includes: the valve comprises a valve body 1, a valve rod 2, a valve cover 3, a small sealing ring 4 and a large sealing ring 5; the peripheral equipment comprises a vacuum container 6; the operator is provided with a screw sleeve 7.
As shown in fig. 1 and 3, the valve body 1 is a cylindrical structure with an open upper end, a closed lower end and stepped inner and outer portions, and the inner diameter of the upper end of the valve body 1 is larger than the inner diameter of the lower end, and the outer diameter of the upper end is larger than the outer diameter of the lower end; the valve body 1 is coaxially arranged in a through hole preset on the vacuum container 6, the middle upper part of the large end of the valve body 1 is welded and fixed with the outer wall of the vacuum container 6 through a flange arranged outside the valve body 1 and sealed (the flange is coaxially fixed on the outer surface of the large end of the valve body 1, and the lower surface of the flange is fixed with the outer wall of the vacuum container 6); the lower part of the large end of the valve body 1 is provided with more than one through hole 1a (the number of the through holes 1a is determined by the vacuumizing speed, preferably more than two through holes 1a are uniformly formed along the circumferential direction, more preferably six through holes 1a are uniformly formed along the circumferential direction, and the hole axial direction of each through hole 1a is parallel to the radial direction of the valve body 1) for realizing the internal communication between the valve body 1 and the vacuum container 6;
as shown in fig. 1 and 5, the valve cover 3 is a cylindrical structure with one open end and the other closed end, and the outer circumferential surface of the valve cover is provided with knurled knurls, so that the friction force during manual operation can be increased; the inner circumferential surface of the opening end of the valve cover 3 is provided with threads which are matched with the external threads at the end part of the large end of the valve body 1 so as to connect the valve cover 3 with the valve body 1 in a threaded manner, and the valve rod 2 coaxially arranged in the valve body 1 is tightly pressed in the valve body 1 through the inner bottom surface of the closed end of the valve cover 3;
as shown in fig. 1, 2 and 4, the valve rod 2 is a step-shaped rod with two thin ends and a thick middle part, and a through hole penetrating through the axial direction is formed in the center; two circles of sealing grooves are respectively arranged on the outer circumferential surfaces of the lower part and the lower end of the middle part of the valve rod 2, a small sealing ring 4 is assembled in the sealing groove at the lower end of the valve rod 2, a large sealing ring 5 is assembled in the sealing groove at the lower end of the middle part of the valve rod 2, after vacuum pumping, the lower end of the valve rod 2 is abutted against the inner bottom surface of the valve body 1, and sealing between the valve rod 2 and the valve body 1 is realized through the small sealing ring 4 and the large sealing ring 5; the upper end of the middle part of the valve rod 2 is cut for a circle along the circumferential direction to form a step 2c, a 120-degree fan-shaped boss is reserved when the upper end of the middle part of the valve rod 2 is cut, and a clamping groove 2a is formed between the fan-shaped boss and the step 2 c; in addition, the upper end of the valve rod 2 is provided with a connecting disc 2b, and the connecting disc 2b adopts a GB 4982 and 2003 standard interface for realizing the connection of the valve rod 2 and an external vacuum-pumping system;
as shown in fig. 2 and 6, the threaded sleeve 7 is a cylindrical structure with openings at two ends, and has a cross-hatched knurl on the outer circumferential surface thereof, so that the friction force during manual operation can be increased, the lower end is provided with an internal thread matched with the external thread at the large end of the valve body 1, the upper end is provided with a 120-degree sector step inwards along the radial direction, the thickness of the sector step (along the axial direction of the threaded sleeve 7) is 0.5mm smaller than the opening width (parallel to the axial direction of the valve rod 2) of the clamping groove 2a corresponding to the 120-degree sector boss on the valve rod 2, so that the threaded sleeve 7 can be smoothly clamped into the clamping groove 2a on the valve rod 2; the inner diameter of the fan-shaped step on the threaded sleeve 7 is 0.5mm larger than that of the clamping groove 2a on the valve rod 2, so that excessive radial pressing force cannot be generated on the valve rod 2 by the threaded sleeve 7, the fan-shaped step on the threaded sleeve 7 is ensured to limit the up-and-down movement of the valve rod 2 through the clamping groove 2a, and the valve rod 2 can still rotate relative to the threaded sleeve 7 and the valve body 1;
as shown in fig. 1, after vacuum pumping, the valve rod 2 is pushed into the bottom of the valve body 1, and the position of the through hole 1a is between two coaxial sealing grooves (respectively assembled with a small sealing ring 4 and a large sealing ring 5) on the valve rod 2, so as to ensure that the passage for communicating the inside and the outside of the vacuum container 6 is sealed by the small sealing ring 4 and the large sealing ring 5.
In the embodiment, the valve body 1, the valve rod 2 and the valve cover 3 are all made of seawater corrosion resistant stainless steel materials, and the small sealing ring 4 and the large sealing ring 5 are all O-shaped rubber sealing rings in GB 3452.1-2005.
In this embodiment, the operation method for assembling and vacuumizing the vacuum valve includes the following steps:
step one, as shown in an initial state in figure 1, unscrewing a valve cover 3 from a valve body 1;
step two, as shown in fig. 2, assembling the screw sleeve 7 on the valve body 1;
step three, the valve rod 2 is rotated through the connecting disc 2b, so that the fan-shaped boss on the valve rod 2 is completely staggered with the fan-shaped step on the threaded sleeve 7, and the valve rod 2 is axially and outwards drawn out until the step 2c is limited by the lower end face of the fan-shaped step on the threaded sleeve 7 in a contact manner;
step four, rotating the valve rod 2 to enable a clamping groove 2a on the valve rod to be in concave-convex fit with a fan-shaped step on a threaded sleeve 7, so that the threaded sleeve 7 can axially limit the valve rod 2, the valve rod 2 is prevented from moving up and down in the valve body 1 in the vacuumizing process, and the interior of the vacuum container 6 is communicated with the outside through a through hole 1a in the valve body 1;
step five, connecting the vacuum valve with an external vacuum-pumping system through a connecting disc 2b on the valve rod 2, starting to vacuum-pump the vacuum container 6, when the vacuum degree in the vacuum container 6 reaches a preset requirement, rotating the valve rod 2 to enable a clamping groove 2a on the valve rod to be completely staggered with a fan-shaped step on a threaded sleeve 7, at the moment, moving up and down the valve rod 2 to relieve the limit, enabling the valve rod 2 to enter the bottom of the valve body 1 under the action of negative pressure suction force in the vacuum container 6, and sealing a channel between the vacuum container 6 and the outside by a small sealing ring 4 and a large sealing ring 5;
and step six, removing the connection between the vacuum-pumping system and the connecting disc 2b, unscrewing the threaded sleeve 7, and assembling the valve cover 3 on the valve body 1, so that the assembling and vacuum-pumping operations of the vacuum valve are completed.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A vacuum valve for an unmanned underwater vehicle is characterized by comprising: the valve comprises a valve body (1), a valve rod (2), a valve cover (3), a small sealing ring (4) and a large sealing ring (5);
the valve body (1) is of a cylindrical structure with an opening at the upper end, a closed lower end and a stepped interior, and the inner diameter of the upper end of the valve body (1) is larger than that of the lower end; the valve body (1) is coaxially arranged in a through hole which is preset on a peripheral vacuum container (6), and the butt joint part is sealed; the lower part of the large end of the valve body (1) is provided with more than one through hole (1a) for realizing the communication between the valve body (1) and the interior of the vacuum container (6);
the valve rod (2) is a step-shaped rod piece with two thin ends and a thick middle part, and is coaxially arranged in the valve body (1), and a through hole penetrating through the axial direction is formed in the center of the valve rod (2); two circles of sealing grooves are respectively arranged on the outer circumferential surfaces of the lower part and the lower end of the middle part of the valve rod (2), a small sealing ring (4) is assembled in the sealing groove at the lower end of the lower end, a large sealing ring (5) is assembled in the sealing groove at the lower end of the middle part, after the valve rod (2) is vacuumized, the lower end of the valve rod is abutted against the inner bottom surface of the valve body (1), and the sealing between the valve rod (2) and the valve body (1) is realized through the small sealing ring (4) and the large sealing ring (5);
the valve cover (3) is of a cylinder structure with one open end and the other closed end, the open end of the valve cover is provided with internal threads and is matched with external threads at the end part of the large end of the valve body (1) to connect the valve cover (3) with the valve body (1) in a threaded manner, and the valve rod (2) is tightly pressed on the inner bottom surface of the valve body (1) through the inner bottom surface of the closed end of the valve cover (3).
2. The vacuum valve for the unmanned underwater vehicle as claimed in claim 1, wherein the lower portion of the large end of the valve body (1) is uniformly provided with more than two through holes (1a) along the circumferential direction, and the hole axial direction of each through hole (1a) is parallel to the radial direction of the valve body (1).
3. The vacuum valve for unmanned underwater vehicles according to claim 1, wherein the valve cover (3) is provided with a knurled pattern on the outer circumferential surface.
4. The vacuum valve for the unmanned submersible vehicle as claimed in claim 1, wherein the valve stem (2) is provided at an upper end thereof with a connection plate (2b) for connecting the valve stem (2) to an external vacuum system.
5. The vacuum valve for the unmanned submersible vehicle according to any one of claims 1 to 4, wherein the upper end of the middle part of the valve rod (2) is cut for one circle along the circumferential direction to form a step (2c), a 120-degree fan-shaped boss is left when the upper end of the middle part of the valve rod (2) is cut, and a clamping groove (2a) is formed between the fan-shaped boss and the step (2 c).
6. The vacuum valve for the unmanned underwater vehicle as claimed in claim 5, wherein the operating tool of the vacuum valve is a threaded sleeve (7) which is of a cylindrical structure with two open ends, the lower end of the vacuum valve is provided with an internal thread matched with the external thread at the large end of the valve body (1), the upper end of the vacuum valve is provided with a fan-shaped step with an angle of 120 degrees along the radial direction, and the fan-shaped step is in concave-convex fit with a clamping groove (2a) on the valve rod (2) and is used for limiting the axial movement of the valve rod (2).
7. The vacuum valve for the unmanned submersible vehicle according to claim 6, wherein the thickness of the fan-shaped step is smaller than the opening width of the slot (2a) on the valve stem (2), and the inner diameter of the fan-shaped step on the screw sleeve (7) is larger than the inner diameter of the slot (2a) on the valve stem (2); the thickness direction of the fan-shaped step is parallel to the axial direction of the threaded sleeve (7), and the direction of the opening width of the clamping groove (2a) is parallel to the axial direction of the valve rod (2).
8. The vacuum valve for unmanned submersible vehicle according to claim 6, wherein the screw sleeve (7) is provided with a knurled pattern on the outer circumferential surface.
9. The vacuum valve for the unmanned underwater vehicle as claimed in any one of claims 1 to 4, wherein the valve body (1), the valve rod (2) and the valve cover (3) are all made of stainless steel materials, and the small sealing ring (4) and the large sealing ring (5) are all standard O-shaped rubber sealing rings.
10. A method for assembling and vacuumizing a vacuum valve for an unmanned underwater vehicle, which uses the vacuum valve according to claim 6, comprising the steps of:
step one, unscrewing a valve cover (3) from a valve body (1);
step two, assembling the threaded sleeve (7) on the valve body (1);
thirdly, rotating the valve rod (2) to enable the fan-shaped boss on the valve rod (2) to be staggered with the fan-shaped step on the threaded sleeve (7), and drawing the valve rod (2) outwards along the axial direction until the step (2c) is limited by the lower end face of the fan-shaped step on the threaded sleeve (7) in a contact manner;
fourthly, rotating the valve rod (2) to enable a clamping groove (2a) on the valve rod to be in concave-convex fit with a fan-shaped step on the threaded sleeve (7) to realize axial limiting of the threaded sleeve (7) on the valve rod (2), and at the moment, the interior of the vacuum container (6) is communicated with the outside through a through hole (1a) on the valve body (1);
fifthly, connecting the vacuum valve with an external vacuum pumping system, vacuumizing the vacuum container (6), rotating the valve rod (2) when the vacuum degree inside the vacuum container (6) meets a preset requirement, enabling the clamping groove (2a) on the valve rod to stagger the fan-shaped step on the threaded sleeve (7), enabling the valve rod (2) to move up and down to be relieved of limiting, enabling the valve rod (2) to enter the bottom of the valve body (1) under the action of negative pressure suction inside the vacuum container (6), and sealing a channel between the vacuum container (6) and the outside by a small sealing ring (4) and a large sealing ring (5);
and sixthly, dismantling the vacuum-pumping system, unscrewing the screw sleeve (7), and assembling the valve cover (3) on the valve body (1), so that the assembling and vacuum-pumping operations of the vacuum valve are completed.
CN202111426794.4A 2021-11-27 2021-11-27 Vacuum valve for unmanned underwater vehicle and assembling and vacuumizing operation method thereof Active CN114321423B (en)

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CN202111426794.4A CN114321423B (en) 2021-11-27 2021-11-27 Vacuum valve for unmanned underwater vehicle and assembling and vacuumizing operation method thereof

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Application Number Priority Date Filing Date Title
CN202111426794.4A CN114321423B (en) 2021-11-27 2021-11-27 Vacuum valve for unmanned underwater vehicle and assembling and vacuumizing operation method thereof

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CN114321423B CN114321423B (en) 2023-10-17

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Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1159800A (en) * 1966-02-05 1969-07-30 Balzers Patent Beteilig Ag Improvements in and relating to High Vacuum Valves.
JPH11280931A (en) * 1998-01-22 1999-10-15 Robert Bosch Gmbh Switch valve
US6095180A (en) * 1998-05-20 2000-08-01 Smc Corporation High-vacuum valve
JP2001006501A (en) * 1999-06-23 2001-01-12 Toshiba Corp Vacuum valve
WO2010045845A1 (en) * 2008-10-20 2010-04-29 Wen Jinxuan Vacuum valve used in continuous vacuumizing equipment
CN101780706A (en) * 2010-01-29 2010-07-21 厦门大学 Initiative exhaust method for injection mould and vacuum valve device for injection mould
US20110094605A1 (en) * 2009-07-24 2011-04-28 Michelli Richard D Vacuum Relief Valve
CN103240594A (en) * 2013-04-25 2013-08-14 无锡艾森保自动化装备有限公司 Automatic spring assembling device on motor vehicle vacuum booster
CN110319233A (en) * 2019-06-25 2019-10-11 浙江广播电视大学 A kind of shock proof vacuum interface valve
CN211550541U (en) * 2019-11-06 2020-09-22 富通集团(天津)超导技术应用有限公司 Vacuum pumping device
CN112923073A (en) * 2021-04-11 2021-06-08 张琳 Electric vacuum baffle valve and vacuum equipment with same

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1159800A (en) * 1966-02-05 1969-07-30 Balzers Patent Beteilig Ag Improvements in and relating to High Vacuum Valves.
JPH11280931A (en) * 1998-01-22 1999-10-15 Robert Bosch Gmbh Switch valve
US6095180A (en) * 1998-05-20 2000-08-01 Smc Corporation High-vacuum valve
JP2001006501A (en) * 1999-06-23 2001-01-12 Toshiba Corp Vacuum valve
WO2010045845A1 (en) * 2008-10-20 2010-04-29 Wen Jinxuan Vacuum valve used in continuous vacuumizing equipment
US20110094605A1 (en) * 2009-07-24 2011-04-28 Michelli Richard D Vacuum Relief Valve
CN101780706A (en) * 2010-01-29 2010-07-21 厦门大学 Initiative exhaust method for injection mould and vacuum valve device for injection mould
CN103240594A (en) * 2013-04-25 2013-08-14 无锡艾森保自动化装备有限公司 Automatic spring assembling device on motor vehicle vacuum booster
CN110319233A (en) * 2019-06-25 2019-10-11 浙江广播电视大学 A kind of shock proof vacuum interface valve
CN211550541U (en) * 2019-11-06 2020-09-22 富通集团(天津)超导技术应用有限公司 Vacuum pumping device
CN112923073A (en) * 2021-04-11 2021-06-08 张琳 Electric vacuum baffle valve and vacuum equipment with same

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