CN114321423B - Vacuum valve for unmanned underwater vehicle and assembling and vacuumizing operation method thereof - Google Patents

Vacuum valve for unmanned underwater vehicle and assembling and vacuumizing operation method thereof Download PDF

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Publication number
CN114321423B
CN114321423B CN202111426794.4A CN202111426794A CN114321423B CN 114321423 B CN114321423 B CN 114321423B CN 202111426794 A CN202111426794 A CN 202111426794A CN 114321423 B CN114321423 B CN 114321423B
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valve
valve body
valve rod
vacuum
rod
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CN114321423A (en
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付佳杰
牛群峰
武雷
江国金
向万龙
韩峰
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Yichang Testing Technique Research Institute
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Yichang Testing Technique Research Institute
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Abstract

The invention discloses a vacuum valve for an unmanned submarine and an assembling and vacuumizing operation method thereof, wherein the vacuum valve comprises the following components: the valve comprises a valve body, a valve rod, a valve cover, a small sealing ring and a large sealing ring; the valve body is coaxially arranged in a preset through hole on the peripheral vacuum container, and the butt joint is sealed; the lower part of the large end of the valve body is provided with more than one through hole; the valve rod is coaxially arranged in the valve body, and a through hole penetrating through the axial direction is formed in the center of the valve rod; two circles of sealing grooves are respectively formed in the outer circumferential surfaces of the lower end and the middle lower end of the valve rod, small sealing rings and large sealing rings are respectively assembled, after vacuumizing, the lower end of the valve rod is abutted against the inner bottom surface of the valve body, and sealing between the valve rod and the valve body is achieved through the small sealing rings and the large sealing rings; the valve cover is matched with the external thread of the large end of the valve body, and the valve rod is tightly pressed on the inner bottom surface of the valve body through the inner bottom surface of the closed end of the valve cover; the vacuum valve assembly and vacuumizing operation method can vacuumize the compensation cabin on the unmanned submarine, and can reliably seal underwater for a long time.

Description

Vacuum valve for unmanned underwater vehicle and assembling and vacuumizing operation method thereof
Technical Field
The invention relates to the technical field of mechanical vacuum valves, in particular to a vacuum valve for an unmanned submarine and an assembling and vacuumizing operation method thereof.
Background
An important use of unmanned submarines is in the underwater stealth transport of various loads in the ocean. After the unmanned underwater vehicle loads the load, a balanced system is formed, the load is separated from the unmanned underwater vehicle after the unmanned underwater vehicle sails to a destination, the load generally has a certain negative buoyancy in the water, the unmanned underwater vehicle after the load is released needs to quickly compensate the buoyancy change, and the buoyancy of the unmanned underwater vehicle in the water is kept unchanged before and after the load is released. In general, unmanned underwater vehicles compensate for buoyancy changes caused by load release by providing compensation tanks for water inflow. In order to increase the water inlet speed of the compensation cabin and ensure that the compensation cabin can be filled with water, a vacuum valve is arranged on the compensation cabin to vacuumize the compensation cabin.
At present, the common vacuum valves are generally suitable for land, such as vacuum stop valves, vacuum solenoid valves, vacuum baffle valves, vacuum inflation valves and the like, and none of the vacuum valves is suitable for unmanned submarines working under water.
Disclosure of Invention
In view of the above, the invention provides a vacuum valve for an unmanned underwater vehicle and an assembling and vacuumizing operation method thereof, which can vacuumize a compensation cabin on the unmanned underwater vehicle and can be reliably sealed under water for a long time.
The technical scheme of the invention is as follows: a vacuum valve for an unmanned submersible vehicle, comprising: the valve comprises a valve body, a valve rod, a valve cover, a small sealing ring and a large sealing ring;
the valve body is of a cylindrical structure with an opening upper end and a closed lower end, the inside of the valve body is of a stepped shape, and the inner diameter of the upper end of the valve body is larger than that of the lower end of the valve body; the valve body is coaxially arranged in a preset through hole on the peripheral vacuum container, and the butt joint is sealed; the lower part of the large end of the valve body is provided with more than one through hole for realizing the communication between the valve body and the inside of the vacuum container;
the valve rod is a stepped rod piece with thin ends and thick middle parts, the valve rod piece is coaxially arranged in the valve body, and a through hole penetrating through the axial direction is formed in the center of the valve rod; two circles of sealing grooves are respectively formed in the outer circumferential surfaces of the lower end and the middle lower end of the valve rod, a small sealing ring is arranged in the sealing groove at the lower end, a large sealing ring is arranged in the sealing groove at the lower end of the middle, after vacuumizing, the lower end of the valve rod is abutted against the inner bottom surface of the valve body, and sealing between the valve rod and the valve body is achieved through the small sealing ring and the large sealing ring;
the valve cover is of a cylindrical structure with one end open and the other end closed, and the open end of the valve cover is provided with internal threads which are matched with external threads at the large end part of the valve body so as to connect the valve cover with the valve body in a threaded manner, and the valve rod is pressed on the inner bottom surface of the valve body through the inner bottom surface of the closed end of the valve cover.
Preferably, the lower part of the large end of the valve body is uniformly provided with more than two through holes along the circumferential direction, and the hole axial direction of each through hole is parallel to the radial direction of the valve body.
Preferably, the outer circumferential surface of the valve cover is provided with knurling.
Preferably, a connecting disc is arranged at the upper end of the valve rod and is used for realizing connection between the valve rod and an external vacuumizing system.
Preferably, a step is formed after the upper end of the middle part of the valve rod is cut for one circle along the circumferential direction, a sector boss with an angle of 120 degrees is reserved when the upper end of the middle part of the valve rod is cut, and a clamping groove is formed between the sector boss and the step.
Preferably, the operation tool of the vacuum valve is a threaded sleeve, the operation tool is of a cylindrical structure with two open ends, the lower end of the operation tool is provided with an internal thread matched with the external thread at the large end of the valve body, the upper end of the operation tool is provided with a fan-shaped step with an angle of 120 degrees inwards along the radial direction, and the fan-shaped step is matched with a clamping groove on the valve rod in a concave-convex manner and used for limiting the axial movement of the valve rod.
Preferably, the thickness of the fan-shaped step is smaller than the opening width of the clamping groove on the valve rod, and the inner diameter size of the fan-shaped step on the screw sleeve is larger than the inner diameter size of the clamping groove on the valve rod; the thickness direction of the fan-shaped step is parallel to the axial direction of the screw sleeve, and the direction of the opening width of the clamping groove is parallel to the axial direction of the valve rod.
Preferably, the outer circumferential surface of the screw sleeve is provided with knurling.
Preferably, the valve body, the valve rod and the valve cover are all made of stainless steel materials, and the small sealing ring and the large sealing ring are all standard O-shaped rubber sealing rings.
The vacuum valve assembly and vacuumizing operation method for the unmanned submarine comprises the following steps of:
step one, unscrewing a valve cover from a valve body;
step two, assembling the screw sleeve on the valve body;
step three, rotating the valve rod, so that a fan-shaped boss on the valve rod is staggered with a fan-shaped step on the screw sleeve, and axially and outwards extracting the valve rod until the step is contacted and limited by the lower end surface of the fan-shaped step on the screw sleeve;
step four, rotating the valve rod to enable the clamping groove on the valve rod to be in concave-convex fit with the fan-shaped step on the screw sleeve, so that the screw sleeve can axially limit the valve rod, and at the moment, the inside of the vacuum container is communicated with the outside through the through hole on the valve body;
step five, connecting the vacuum valve with an external vacuumizing system, vacuumizing a vacuum container, rotating a valve rod when the vacuum degree in the vacuum container reaches a preset requirement, enabling a clamping groove on the valve rod to be staggered with a fan-shaped step on a screw sleeve, at the moment, enabling the valve rod to move up and down to release limit, enabling the valve rod to enter the bottom of a valve body under the action of negative pressure suction in the vacuum container, and enabling a channel between the vacuum container and the outside to be sealed by a small sealing ring and a large sealing ring;
and step six, removing the vacuumizing system, unscrewing the screw sleeve, and assembling the valve cover on the valve body, so that the assembling and vacuumizing operation of the vacuum valve are completed.
The beneficial effects are that:
1. the vacuum valve controls the on and off of the vacuum valve through the up-and-down movement position of the valve rod in the valve body, has the advantages of simple composition, less component and easy operation, and simultaneously adopts a double-way sealing structure to improve the sealing reliability of long-time underwater operation; in addition, the vacuum valve can be connected with an external vacuumizing system through a standard interface so as to be used for vacuumizing the unmanned underwater vehicle compensation cabin.
2. According to the invention, the knurling of the reticulation is arranged on the outer circumferential surface of the valve sleeve, so that the friction force during manual operation can be increased, and the operation is convenient.
3. The upper step, the fan-shaped boss and the clamping groove of the valve rod are arranged and matched with the fan-shaped step arranged on the screw sleeve, so that the valve rod can be limited in axial movement, and the valve rod is prevented from moving up and down in the valve body in the vacuumizing process.
4. According to the invention, the valve body, the valve rod and the valve sleeve are all made of seawater corrosion resistant materials, so that the vacuum valve can be ensured to work in a seawater environment for a long time.
Drawings
Fig. 1 is a general structural sectional view of the vacuum valve of the present invention in a valve stem sealing state.
Fig. 2 is a general structural sectional view of the vacuum valve of the present invention in a vacuumized state.
Fig. 3 is a schematic structural view of a valve body according to the present invention.
Fig. 4 is a schematic view of the structure of the valve stem according to the present invention.
Fig. 5 is a schematic structural view of a valve cover according to the present invention.
Fig. 6 is a schematic structural view of the screw sleeve according to the present invention.
The valve comprises a 1-valve body, a 2-valve rod, a 3-valve cover, a 4-small sealing ring, a 5-large sealing ring, a 6-vacuum container, a 7-screw sleeve, a 1 a-through hole, a 2 a-clamping groove, a 2 b-connecting disc and a 2 c-step.
Detailed Description
The invention will now be described in detail by way of example with reference to the accompanying drawings.
The embodiment provides a vacuum valve for an unmanned underwater vehicle and an assembling and vacuumizing operation method thereof, which can be used for vacuumizing a compensation cabin on the unmanned underwater vehicle and can be reliably sealed underwater for a long time.
As shown in fig. 1 and 2, the vacuum valve includes: the valve comprises a valve body 1, a valve rod 2, a valve cover 3, a small sealing ring 4 and a large sealing ring 5; the peripheral equipment is provided with a vacuum container 6; the operator is provided with a screw sleeve 7.
As shown in fig. 1 and 3, the valve body 1 is a cylindrical structure with an opening upper end and a closed lower end, and is stepped inside and outside, and the inner diameter of the upper end of the valve body 1 is larger than that of the lower end, and the outer diameter of the upper end is larger than that of the lower end; the valve body 1 is coaxially arranged in a preset through hole on the vacuum container 6, the middle upper part of the large end of the valve body 1 is welded and fixed with the outer wall of the vacuum container 6 through an externally arranged flange on the valve body and sealed (the flange is coaxially fixed on the outer surface of the large end of the valve body 1, and the lower surface of the flange is fixed with the outer wall of the vacuum container 6); the lower part of the large end of the valve body 1 is provided with more than one through hole 1a (the number of the through holes 1a is determined by the vacuumizing speed, preferably more than two through holes 1a are uniformly arranged along the circumferential direction, more preferably six through holes 1a are uniformly arranged along the circumferential direction, and the hole axial direction of each through hole 1a is parallel to the radial direction of the valve body 1) for realizing the internal communication between the valve body 1 and the vacuum container 6;
as shown in fig. 1 and 5, the valve cover 3 has a cylindrical structure with one end open and the other end closed, and the outer circumferential surface of the valve cover is provided with knurled patterns, so that the friction force during manual operation can be increased; the inner circumferential surface of the open end of the valve cover 3 is provided with threads which are used for matching with the external threads of the large end part of the valve body 1 so as to connect the valve cover 3 with the valve body 1 in a threaded manner, and the valve rod 2 coaxially arranged in the valve body 1 is pressed in the valve body 1 through the inner bottom surface of the closed end of the valve cover 3;
as shown in fig. 1, 2 and 4, the valve rod 2 is a stepped rod piece with thin ends and thick middle, and a through hole penetrating through the axial direction is arranged in the center of the stepped rod piece; two circles of sealing grooves are respectively formed in the outer circumferential surfaces of the lower part and the lower end of the middle part of the valve rod 2, a small sealing ring 4 is assembled in the sealing groove at the lower end of the valve rod 2, a large sealing ring 5 is assembled in the sealing groove at the lower end of the middle part of the valve rod 2, the lower end of the valve rod 2 is abutted against the inner bottom surface of the valve body 1 after vacuumizing, and the sealing between the valve rod 2 and the valve body 1 is realized through the small sealing ring 4 and the large sealing ring 5; the upper end of the middle part of the valve rod 2 forms a step 2c after cutting for one circle along the circumferential direction, a sector boss with an angle of 120 degrees is reserved when the upper end of the middle part of the valve rod 2 is cut, and a clamping groove 2a is formed between the sector boss and the step 2 c; in addition, the upper end of the valve rod 2 is provided with a connecting disc 2b, and the connecting disc 2b adopts a GB 4982-2003 standard interface for realizing the connection between the valve rod 2 and an external vacuumizing system;
as shown in fig. 2 and 6, the threaded sleeve 7 is of a cylindrical structure with two open ends, the outer circumferential surface of the threaded sleeve is provided with knurled patterns, so that the friction force during manual operation can be increased, the lower end of the threaded sleeve is provided with an internal thread matched with the external thread at the large end of the valve body 1, the upper end of the threaded sleeve is radially inwards provided with a sector step with an angle of 120 degrees, the thickness (along the axial direction of the threaded sleeve 7) of the sector step is smaller than the opening width (parallel to the axial direction of the valve rod 2) of a clamping groove 2a corresponding to a sector boss with an angle of 120 degrees on the valve rod 2 by 0.5mm, and the threaded sleeve 7 can be smoothly clamped into the clamping groove 2a on the valve rod 2; the inner diameter of the fan-shaped step on the screw sleeve 7 is 0.5mm larger than the inner diameter of the clamping groove 2a on the valve rod 2, so that the screw sleeve 7 cannot generate excessive radial pressing force on the valve rod 2, and the valve rod 2 can still rotate relative to the screw sleeve 7 and the valve body 1 while ensuring that the fan-shaped step of the screw sleeve 7 limits the up-and-down movement of the valve rod 2 through the clamping groove 2a;
as shown in fig. 1, after vacuum pumping, the valve rod 2 is pushed into the bottom of the valve body 1, and the position of the through hole 1a is between two coaxial sealing grooves (respectively assembling the small sealing ring 4 and the large sealing ring 5) on the valve rod 2, so that the channel for communicating the inside with the outside of the vacuum container 6 is sealed by the small sealing ring 4 and the large sealing ring 5.
In the embodiment, the valve body 1, the valve rod 2 and the valve cover 3 are all made of seawater corrosion resistant stainless steel materials, and the small sealing ring 4 and the large sealing ring 5 are all O-shaped rubber sealing rings standard in GB 3452.1-2005.
In this embodiment, the operation method of assembling and vacuumizing the vacuum valve includes the following steps:
step one, in an initial state shown in fig. 1, unscrewing a valve cover 3 from a valve body 1;
step two, as shown in fig. 2, assembling the screw sleeve 7 on the valve body 1;
step three, rotating the valve rod 2 through the connecting disc 2b, so that a fan-shaped boss on the valve rod 2 is completely staggered with a fan-shaped step on the screw sleeve 7, and axially and outwards extracting the valve rod 2 until a step 2c of the valve rod is contacted and limited by the lower end face of the fan-shaped step on the screw sleeve 7;
step four, rotating the valve rod 2 to enable the clamping groove 2a on the valve rod 2 to be matched with the fan-shaped step on the screw sleeve 7 in a concave-convex mode, so that the screw sleeve 7 can limit the valve rod 2 axially, the valve rod 2 is prevented from moving up and down in the valve body 1 in the vacuumizing process, and at the moment, the inside of the vacuum container 6 is communicated with the outside through the through hole 1a on the valve body 1;
step five, connecting the vacuum valve with an external vacuumizing system through a connecting disc 2b on a valve rod 2, starting vacuumizing the vacuum container 6, rotating the valve rod 2 when the vacuum degree inside the vacuum container 6 reaches a preset requirement, enabling a clamping groove 2a on the valve rod to completely stagger a fan-shaped step on a screw sleeve 7, at the moment, releasing limit of the up-and-down movement of the valve rod 2, enabling the valve rod 2 to enter the bottom of the valve body 1 under the action of negative pressure suction inside the vacuum container 6, and sealing a channel between the vacuum container 6 and the outside by a small sealing ring 4 and a large sealing ring 5;
and step six, removing the connection between the vacuumizing system and the connecting disc 2b, unscrewing the threaded sleeve 7, and assembling the valve cover 3 on the valve body 1, so that the assembling and vacuumizing operation of the vacuum valve are completed.
In summary, the above embodiments are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (6)

1. A vacuum valve for an unmanned submersible vehicle, comprising: the valve comprises a valve body (1), a valve rod (2), a valve cover (3), a small sealing ring (4) and a large sealing ring (5);
the valve body (1) is of a cylindrical structure with an opening upper end and a closed lower end, the inside of the valve body is of a stepped shape, the inner diameter of the upper end of the valve body (1) is larger than that of the lower end, and the upper end of the valve body (1) is the large end of the valve body; the valve body (1) is coaxially arranged in a preset through hole on the peripheral vacuum container (6), and the butt joint is sealed; the lower part of the large end of the valve body (1) is provided with more than one through hole (1 a) for realizing the communication between the valve body (1) and the inside of the vacuum container (6);
the valve rod (2) is a stepped rod piece with thin two ends and thick middle, the stepped rod piece is coaxially arranged in the valve body (1), and a through hole penetrating through the axial direction is formed in the center of the valve rod (2); two rings of sealing grooves are respectively formed in the outer circumferential surfaces of the lower part and the lower end of the middle part of the valve rod (2), a small sealing ring (4) is assembled in the sealing groove at the lower end, a large sealing ring (5) is assembled in the sealing groove at the lower end of the middle part, after vacuumizing, the lower end of the valve rod (2) is abutted against the inner bottom surface of the valve body (1), and sealing between the valve rod (2) and the valve body (1) is realized through the small sealing ring (4) and the large sealing ring (5);
the valve cover (3) is of a cylindrical structure with one end open and the other end closed, the open end of the valve cover is provided with internal threads and is used for being matched with external threads at the large end part of the valve body (1) so as to connect the valve cover (3) with the valve body (1) in a threaded manner, and the valve rod (2) is pressed on the inner bottom surface of the valve body (1) through the inner bottom surface of the closed end of the valve cover (3);
the upper end of the valve rod (2) is provided with a connecting disc (2 b) which is used for realizing the connection between the valve rod (2) and an external vacuumizing system;
the upper end of the middle part of the valve rod (2) is cut for one circle along the circumferential direction to form a step (2 c), a sector boss with an angle of 120 degrees is reserved when the upper end of the middle part of the valve rod (2) is cut, and a clamping groove (2 a) is formed between the sector boss and the step (2 c);
the operating tool of the vacuum valve is a threaded sleeve (7), is of a cylindrical structure with two open ends, is provided with an internal thread matched with an external thread at the large end of the valve body (1) at the lower end, is provided with a sector step with an angle of 120 degrees inwards along the radial direction at the upper end, and is in concave-convex fit with a clamping groove (2 a) on the valve rod (2) to limit the valve rod (2) to move along the axial direction;
the thickness of the fan-shaped step is smaller than the opening width of the clamping groove (2 a) on the valve rod (2), and the inner diameter size of the fan-shaped step on the screw sleeve (7) is larger than the inner diameter size of the clamping groove (2 a) on the valve rod (2); the thickness direction of the fan-shaped step is parallel to the axial direction of the screw sleeve (7), and the direction in which the opening width of the clamping groove (2 a) is positioned is parallel to the axial direction of the valve rod (2).
2. The vacuum valve for the unmanned submersible vehicle according to claim 1, wherein the lower part of the large end of the valve body (1) is provided with more than two through holes (1 a) uniformly along the circumferential direction, and the hole axial direction of each through hole (1 a) is parallel to the radial direction of the valve body (1).
3. Vacuum valve for unmanned underwater vehicle according to claim 1, characterized in that the outer circumferential surface of the valve cap (3) is provided with knurled reticulation.
4. Vacuum valve for unmanned underwater vehicle according to claim 1, characterized in that the outer circumferential surface of the screw sleeve (7) is provided with knurling.
5. A vacuum valve for an unmanned submersible vehicle according to any one of claims 1 to 3, wherein the valve body (1), the valve rod (2) and the valve cover (3) are made of stainless steel materials, and the small sealing ring (4) and the large sealing ring (5) are standard O-shaped rubber sealing rings.
6. A method of assembling and evacuating a vacuum valve for an unmanned submersible vehicle, comprising the steps of:
step one, unscrewing a valve cover (3) from a valve body (1);
step two, assembling the screw sleeve (7) on the valve body (1);
step three, rotating the valve rod (2) to enable a fan-shaped boss on the valve rod (2) to be staggered with a fan-shaped step on the screw sleeve (7), and axially and outwards extracting the valve rod (2) until a step (2 c) of the valve rod is contacted and limited by the lower end face of the fan-shaped step on the screw sleeve (7);
step four, rotating the valve rod (2) to enable the clamping groove (2 a) on the valve rod to be matched with the fan-shaped step on the screw sleeve (7) in a concave-convex mode, so that the screw sleeve (7) can limit the valve rod (2) axially, and at the moment, the inside of the vacuum container (6) is communicated with the outside through a through hole (1 a) on the valve body (1);
step five, connecting the vacuum valve with an external vacuumizing system, vacuumizing the vacuum container (6), rotating the valve rod (2) when the vacuum degree inside the vacuum container (6) reaches a preset requirement, enabling the clamping groove (2 a) on the valve rod to stagger the fan-shaped step on the screw sleeve (7), at the moment, enabling the valve rod (2) to move up and down to release the limit, enabling the valve rod (2) to enter the bottom of the valve body (1) under the action of negative pressure suction inside the vacuum container (6), and enabling a channel between the vacuum container (6) and the outside to be sealed by the small sealing ring (4) and the large sealing ring (5);
and step six, removing the vacuumizing system, unscrewing the screw sleeve (7), and assembling the valve cover (3) on the valve body (1), so that the assembling and vacuumizing operation of the vacuum valve are completed.
CN202111426794.4A 2021-11-27 2021-11-27 Vacuum valve for unmanned underwater vehicle and assembling and vacuumizing operation method thereof Active CN114321423B (en)

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CN202111426794.4A CN114321423B (en) 2021-11-27 2021-11-27 Vacuum valve for unmanned underwater vehicle and assembling and vacuumizing operation method thereof

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Application Number Priority Date Filing Date Title
CN202111426794.4A CN114321423B (en) 2021-11-27 2021-11-27 Vacuum valve for unmanned underwater vehicle and assembling and vacuumizing operation method thereof

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CN114321423B true CN114321423B (en) 2023-10-17

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1159800A (en) * 1966-02-05 1969-07-30 Balzers Patent Beteilig Ag Improvements in and relating to High Vacuum Valves.
JPH11280931A (en) * 1998-01-22 1999-10-15 Robert Bosch Gmbh Switch valve
US6095180A (en) * 1998-05-20 2000-08-01 Smc Corporation High-vacuum valve
JP2001006501A (en) * 1999-06-23 2001-01-12 Toshiba Corp Vacuum valve
WO2010045845A1 (en) * 2008-10-20 2010-04-29 Wen Jinxuan Vacuum valve used in continuous vacuumizing equipment
CN101780706A (en) * 2010-01-29 2010-07-21 厦门大学 Initiative exhaust method for injection mould and vacuum valve device for injection mould
CN103240594A (en) * 2013-04-25 2013-08-14 无锡艾森保自动化装备有限公司 Automatic spring assembling device on motor vehicle vacuum booster
CN110319233A (en) * 2019-06-25 2019-10-11 浙江广播电视大学 A kind of shock proof vacuum interface valve
CN211550541U (en) * 2019-11-06 2020-09-22 富通集团(天津)超导技术应用有限公司 Vacuum pumping device
CN112923073A (en) * 2021-04-11 2021-06-08 张琳 Electric vacuum baffle valve and vacuum equipment with same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8453668B2 (en) * 2009-07-24 2013-06-04 Parata System, LLC Vacuum relief valve

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1159800A (en) * 1966-02-05 1969-07-30 Balzers Patent Beteilig Ag Improvements in and relating to High Vacuum Valves.
JPH11280931A (en) * 1998-01-22 1999-10-15 Robert Bosch Gmbh Switch valve
US6095180A (en) * 1998-05-20 2000-08-01 Smc Corporation High-vacuum valve
JP2001006501A (en) * 1999-06-23 2001-01-12 Toshiba Corp Vacuum valve
WO2010045845A1 (en) * 2008-10-20 2010-04-29 Wen Jinxuan Vacuum valve used in continuous vacuumizing equipment
CN101780706A (en) * 2010-01-29 2010-07-21 厦门大学 Initiative exhaust method for injection mould and vacuum valve device for injection mould
CN103240594A (en) * 2013-04-25 2013-08-14 无锡艾森保自动化装备有限公司 Automatic spring assembling device on motor vehicle vacuum booster
CN110319233A (en) * 2019-06-25 2019-10-11 浙江广播电视大学 A kind of shock proof vacuum interface valve
CN211550541U (en) * 2019-11-06 2020-09-22 富通集团(天津)超导技术应用有限公司 Vacuum pumping device
CN112923073A (en) * 2021-04-11 2021-06-08 张琳 Electric vacuum baffle valve and vacuum equipment with same

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