CN114308865A - Be used for abluent rotatory basket of flowers of silicon core - Google Patents

Be used for abluent rotatory basket of flowers of silicon core Download PDF

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Publication number
CN114308865A
CN114308865A CN202111616645.4A CN202111616645A CN114308865A CN 114308865 A CN114308865 A CN 114308865A CN 202111616645 A CN202111616645 A CN 202111616645A CN 114308865 A CN114308865 A CN 114308865A
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fixed
fixing
silicon core
disc
cleaning
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CN202111616645.4A
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CN114308865B (en
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管选伟
孙国浩
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Jiangsu Inst Semiconductor Technology Co ltd
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Jiangsu Inst Semiconductor Technology Co ltd
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Abstract

The invention discloses a rotary flower basket for cleaning silicon cores, which structurally comprises a rotating shaft and a plurality of fixed disks, wherein two ends of the rotating shaft are divided into symmetrical fixed areas, a station area is arranged between the two fixed areas, a rotatable adjusting ring is arranged at the central position of each fixed disk, the adjusting ring is in threaded connection with external threads, the positions of the fixed disks can be freely adjusted along the length direction of the rotating shaft, a plurality of detachable fixed grooves are arranged on the circular surfaces of the fixed disks, the caliber of each fixed groove is larger than that of a silicon core, an indexing positioning piece is arranged at the joint of each fixed disk and the corresponding adjusting ring, two ends of each adjusting ring are provided with symmetrical fixed pipes, the diameter of each fixed pipe is larger than that of the rotating shaft, a connecting piece is arranged between every two adjacent fixed pipes, the adjusting rings are connected into a whole through the connecting piece, and each fixed area is provided with a fixing piece connected with the corresponding fixed pipe, the invention realizes the non-contact cleaning of the silicon core and improves the cleaning effect of the silicon core.

Description

Be used for abluent rotatory basket of flowers of silicon core
The technical field is as follows:
the invention relates to the technical field of production of silicon material processing equipment, in particular to a rotary flower basket for cleaning silicon cores.
Background art:
in the prior art, the silicon chip cleaning flower basket is mainly divided into a static cleaning flower basket and a rotating flower basket, wherein the static flower basket has more contact points when cleaning the silicon chip, which results in poor cleaning effect of the silicon chip, while the rotating flower basket is in a dynamic process when cleaning the silicon chip, the silicon chip can be fully contacted with a pickling solution, the contact points of the silicon chip are less, which can greatly improve the cleaning effect of the silicon chip, however, in the rotating process of the rotating flower basket, in order to ensure that the silicon chip is kept stable during dynamic rotation, the end part of the silicon chip needs to be fixed, and the end part of the silicon chip can be covered by a fixed position on the rotating flower basket, which results in a cleaning blind area at a fixed point of the end part of the silicon chip, which also affects the cleaning effect of the silicon chip, and in order to fix the silicon chip on the rotating flower basket conveniently, the same rotating flower basket can only be fixed for the silicon chips of the same specification, the fixing mode with a single specification also has certain limitation in the actual silicon chip cleaning.
The invention content is as follows:
the present invention aims to provide a rotating flower basket for silicon core cleaning, which solves one or more of the above-mentioned problems of the prior art.
In order to solve the technical problem, the invention provides a rotary flower basket for cleaning silicon cores, which structurally comprises a rotary shaft, and is characterized in that: the structure of the silicon chip scale-free rotary table further comprises a plurality of fixed discs, symmetrical fixed areas are divided at two ends of the rotary shaft, a station area is arranged between the two fixed areas, external threads are arranged on the rotary shaft along the length direction and are positioned inside the station area, a rotatable adjusting ring is arranged at the central position of each fixed disc, the adjusting ring is in threaded connection with the external threads, the positions of the fixed discs can be freely adjusted along the length direction of the rotary shaft, a plurality of detachable fixed grooves are arranged on the circular surface of each fixed disc, the caliber of each fixed groove is larger than that of a silicon chip, and an indexing positioning piece is arranged at the joint of each fixed disc and the corresponding adjusting ring and enables the fixed grooves to be on the same horizontal line from left to right;
the both ends of regulation circle are equipped with the fixed pipe of symmetry, and the diameter of fixed pipe is greater than the diameter of rotation axis, are equipped with the connecting piece between two adjacent fixed pipes, and the connecting piece makes a plurality of regulation circles even as an organic whole, and the fixed area all is equipped with the mounting with fixed union coupling.
Furthermore, be cut into a plurality of arc surfaces and dysmorphism dish on the above-mentioned fixed disc, a plurality of arc surfaces detachable connects on the dysmorphism dish, and a plurality of fixed slots form in the junction of arc surface and dysmorphism dish.
Furthermore, a plurality of fixed slots are distributed at the joint of the arc surface and the special-shaped disc in a wave shape.
Furthermore, above-mentioned graduation setting element is including setting up the locating hole on fixed disc and setting up the pointer on adjusting the circle, and the tip of pointer outwards extends has the locating lever, and the tip of locating lever is equipped with the location arch towards fixed disc, and the location arch is aimed at embedding locating hole and is made a plurality of fixed slots all on same water flat line from left to right.
Furthermore, the connecting piece comprises two first telescopic rods and connecting hoops symmetrically arranged between the two first telescopic rods, and the connecting hoops are used for clamping the fixed pipe.
Furthermore, the fixing piece comprises a limiting disc and a clamping hoop which are arranged in the fixing area, two symmetrical second telescopic rods are arranged on the limiting disc, the extending direction of the second telescopic rods faces towards the fixing disc, the clamping hoop is fixed between the second telescopic rods, and the clamping hoop is used for clamping and fixing the fixing pipe.
The invention has the beneficial effects that:
1. the invention provides a rotary flower basket for cleaning silicon cores, which is characterized in that an adjusting ring is rotated according to the specification of the silicon cores, a plurality of fixed disks are connected to a station area in a threaded manner, wherein the distance between every two adjacent fixed disks corresponds to the fixation of the silicon cores with one specification length.
2. The invention provides a rotary flower basket for cleaning a silicon core, wherein when the silicon core is clamped on a fixed groove, the positions of two adjacent fixed disks are strengthened and fixed, so that the position between the two adjacent fixed disks cannot be changed, and meanwhile, in the rotating process of a rotating shaft, the rotating acting force of the rotating shaft enables the silicon core to have an outward centrifugal force on the fixed disks, and the outward centrifugal force can prevent the silicon core from moving left and right in the fixed groove.
3. The invention provides a rotary flower basket for cleaning silicon cores, wherein fixed disks are distributed in a wave shape, so that the silicon cores are also distributed between two adjacent fixed disks in a wave shape, a plurality of silicon cores can be kept in cross distribution between the two adjacent fixed disks, and the influence on the cleaning effect of the silicon cores due to the fact that the silicon cores are too close to each other is avoided.
Description of the drawings:
fig. 1 is a schematic side view of the present invention.
FIG. 2 is a cross-sectional view of the surface of the stationary disk of the present invention.
The specific implementation mode is as follows:
for the purpose of enhancing the understanding of the present invention, the present invention will be further described in detail with reference to the following examples and the accompanying drawings, which are only used for explaining the present invention and are not to be construed as limiting the scope of the present invention.
As shown in fig. 1 to 2, which are specific embodiments of the present invention, the structure of the present invention includes a rotating shaft 1, and further includes a plurality of fixed disks 2, two ends of the rotating shaft 1 are divided into symmetrical fixed regions 101, a station region 102 is disposed between the two fixed regions 101, the rotating shaft 1 is provided with an external thread 11 along a length direction, the external thread 11 is located inside the station region 102, a rotatable adjusting ring 3 is disposed at a central position of the fixed disk 2, the adjusting ring 3 is screwed onto the external thread 11 and enables positions of the plurality of fixed disks 2 to be freely adjusted along the length direction of the rotating shaft 1, a plurality of detachable fixed slots 103 are disposed on a circular surface of the fixed disk 2, a diameter of the fixed slots 103 is greater than a diameter of a silicon core, an indexing positioning element 4 is disposed at a joint of the fixed disk 2 and the adjusting ring 3, and the indexing positioning element 4 enables the plurality of fixed slots 103 to be on a same horizontal line from left to right;
the both ends of regulation circle 3 are equipped with the fixed pipe 31 of symmetry, and the diameter of fixed pipe 31 is greater than the diameter of rotation axis 1, is equipped with connecting piece 5 between two adjacent fixed pipes 31, and connecting piece 5 makes a plurality of regulation circles 3 even as an organic whole, and fixed area 101 all is equipped with the mounting 6 of being connected with fixed pipe 31.
In the invention, the process of silicon core installation is as follows: according to the specification of the silicon chip, the adjusting ring 3 is rotated to connect a plurality of fixed disks 2 on the station area 102 in a threaded manner, wherein the distance between two adjacent fixed disks 2 corresponds to the fixation of the silicon chip with one specification length, in view of this, the silicon chips with different specification lengths can be fixed on the whole station area 102, then, the fixing pipe 31 between the adjacent fixed disks 2 is fixed by the connecting piece 5, so that all the adjusting rings 3 are connected into a whole, then, the fixing piece 6 is used to fix two fixing pipes 31 close to the fixed area 101, the fixing makes the adjusting rings 3 connected into a whole strengthened and fixed, thereby ensuring the fixation of the fixed disks 2 on the station area 102 to be stable, ensuring the length between the adjacent fixed disks 2 to be stable, when the silicon chip is fixed between the two adjacent fixed disks 2, the plurality of fixing grooves 103 are firstly adjusted to be on the same horizontal plane by the indexing positioning piece 4, the fixing groove 103 is detached, the silicon core with the corresponding specification is clamped inside the fixing groove 103, the fixing groove 103 is fixed again, the silicon core is clamped between the two adjacent fixing discs 2, after the silicon core is fixed, the rotating shaft 1 is driven to rotate through external power, the silicon core on the station area 102 is cleaned in the rotating process, and the cleaning effect of the silicon core is improved.
In the invention, when the silicon core is clamped on the fixing groove 103, the positions of two adjacent fixing disks 2 are strengthened and fixed, so that the position between the two adjacent fixing disks 2 cannot be changed, meanwhile, in the rotating process of the rotating shaft 1, the rotating acting force of the rotating shaft 1 enables the silicon core to have an outward centrifugal force on the fixing disks 2, and the outward centrifugal force can prevent the silicon core from moving left and right in the fixing groove 103.
In the present invention, it is preferable that the fixed disk 2 is divided into a plurality of arc surfaces 21 and a special-shaped disk 22, the plurality of arc surfaces 21 are detachably connected to the special-shaped disk 22, and a plurality of fixed grooves 103 are formed at a connection portion between the arc surfaces 21 and the special-shaped disk 22.
In the invention, when the silicon core is clamped between two adjacent fixed disks 2, the arc surface 21 is detached from the special-shaped disk 22, at the moment, the fixed slot 103 is opened, so that two ends of the silicon core are conveniently placed on the special-shaped disk 22, and finally, the arc surface 21 is fixed on the special-shaped disk 22 again, so that the end part of the silicon core is clamped inside the fixed slot 103.
In the present invention, preferably, the plurality of fixing grooves 103 are distributed in a wave shape at the connection position of the arc surface 21 and the special-shaped disc 22.
In the invention, the fixed disks are distributed in a wave shape, so that the silicon cores are also distributed in a wave shape between two adjacent fixed disks 2, and a plurality of silicon cores can be maintained to be distributed in a cross way between two adjacent fixed disks 2, thereby avoiding the influence on the cleaning effect of the silicon cores caused by the over-close of the silicon cores.
In the present invention, as a preferable scheme, the indexing positioning element 4 includes a positioning hole 41 disposed on the fixed disk 2 and a pointer 42 disposed on the adjusting ring 3, an end of the pointer 42 extends outward to form a positioning rod 421, an end of the positioning rod 421 is provided with a positioning protrusion 422 facing the fixed disk 2, and the positioning protrusion 422 is aligned with the positioning hole 41 so that the plurality of fixing slots 103 are all on the same horizontal line from left to right.
In the invention, when the position of the fixing groove 103 is specifically adjusted, the fixing disc 2 is rotated on the adjusting ring 3, and in the rotating process of the fixing disc 2, the positioning protrusions 422 on the pointer 42 are embedded into the positioning holes 41, so that the positions of the fixing grooves 103 on all the fixing discs 2 are kept consistent, all the fixing grooves 103 are adjusted to be on the same horizontal line, and the silicon core is conveniently clamped in the fixing grooves 103 in the follow-up process.
In the present invention, the connection member 5 preferably comprises two first telescopic rods 51 and a connection hoop 52 symmetrically disposed between the two first telescopic rods 51, wherein the connection hoop 52 is used for clamping the fixing tube 31.
In the present invention, when all the adjusting rings 3 are connected together, the first telescopic rod 51 is extended and contracted to a suitable length according to the length between the adjacent two fixed disks 2, and then the connecting hoop 52 is clamped on the fixed tube 31, thereby enabling the fixed tubes 31 between the adjacent fixed disks 2 to be connected together.
In the present invention, preferably, the fixing member 6 includes a limiting disc 61 disposed in the fixing region 101 and a clamping hoop 62, the limiting disc 61 is provided with two symmetrical second telescopic rods 611, the extending direction of the second telescopic rods 611 faces the fixing disc 2, the clamping hoop 62 is fixed between the two second telescopic rods 611, and the clamping hoop 62 is used for clamping and fixing the fixing tube 31.
In the invention, when the fixing tube 31 close to the fixing area 101 is fixed, the second telescopic rod 611 is extended to a proper length according to the distance between the fixing tube 31 and the limiting disc 61, and the fixing tube 31 is clamped and fixed on the fixing tube 31 by the clamping hoop 62, so that the fixing tube 31 and the limiting disc 61 are fixed, the adjusting ring 3 connected into a whole is strengthened and fixed on the limiting disc 61, and the condition that the adjusting ring 3 moves on the external thread 11 when the subsequent rotating shaft 1 rotates, so that the distance between two adjacent fixing discs 2 changes, and once the distance between two adjacent fixing discs 2 changes, the silicon core loosely fixed on the fixing groove 103 is easily dropped, and the cleaning of the silicon core is influenced is avoided.
It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (6)

1. The utility model provides a be used for abluent rotatory basket of flowers of silicon core, its structure includes rotation axis (1), its characterized in that: the structure of the silicon chip fixing device comprises a plurality of fixing discs (2), symmetrical fixing areas (101) are arranged at two ends of a rotating shaft (1), a station area (102) is arranged between the two fixing areas (101), external threads (11) are arranged on the rotating shaft (1) along the length direction, the external threads (11) are located inside the station area (102), a rotatable adjusting ring (3) is arranged at the center of each fixing disc (2), the adjusting ring (3) is in threaded connection with the external threads (11) and enables the positions of the fixing discs (2) to be freely adjusted along the length direction of the rotating shaft (1), a plurality of detachable fixing grooves (103) are arranged on the circular surface of each fixing disc (2), the calibers of the fixing grooves (103) are larger than the calibers of silicon cores, and indexing positioning pieces (4) are arranged at the joints of the fixing discs (2) and the adjusting ring (3), the indexing positioning piece (4) enables the plurality of fixing grooves (103) to be on the same horizontal line from left to right;
the both ends of regulation circle (3) are equipped with fixed pipe (31) of symmetry, the diameter of fixed pipe (31) is greater than the diameter of rotation axis (1), adjacent two be equipped with connecting piece (5) between fixed pipe (31), connecting piece (5) make a plurality of regulation circle (3) are even as an organic whole, fixed area (101) all be equipped with mounting (6) that fixed pipe (31) are connected.
2. The rotary flower basket for cleaning the silicon core according to claim 1, wherein: fixed disc (2) go up to be cut into a plurality of arc surface (21) and dysmorphism dish (22), and is a plurality of arc surface (21) detachable connects on dysmorphism dish (22), and is a plurality of fixed slot (103) form arc surface (21) with the junction of dysmorphism dish (22).
3. The rotary flower basket for cleaning the silicon core as claimed in claim 2, wherein: the fixing grooves (103) are distributed at the joint of the arc surface (21) and the special-shaped disc (22) in a wave shape.
4. The rotary flower basket for cleaning the silicon core according to claim 1, wherein: indexing positioning element (4) are including setting up locating hole (41) and the setting on fixed disc (2) are in pointer (42) on adjusting ring (3), the outside extension of tip of pointer (42) has locating lever (421), the tip of locating lever (421) is equipped with the orientation the protruding (422) in location of fixed disc (2), the embedding is aimed at in protruding (422) in location locating hole (41) makes a plurality of fixed slots (103) all from left to right on same water flat line.
5. The rotary flower basket for cleaning the silicon core according to claim 1, wherein: the connecting piece (5) comprises two first telescopic rods (51) and a connecting hoop (52) symmetrically arranged between the two first telescopic rods (51), wherein the connecting hoop (52) is used for clamping the fixed pipe (31).
6. The rotary flower basket for cleaning the silicon core according to claim 1, wherein: the fixing part (6) comprises a limiting disc (61) and a clamping hoop (62) which are arranged in the fixing area (101), two symmetrical second telescopic rods (611) are arranged on the limiting disc (61), the extending direction of the second telescopic rods (611) faces to the fixing disc (2), the clamping hoop (62) is fixed between the two second telescopic rods (611), and the clamping hoop (62) is used for clamping and fixing the fixing pipe (31).
CN202111616645.4A 2021-12-28 2021-12-28 Be used for abluent rotatory basket of flowers of silicon core Active CN114308865B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114985363A (en) * 2022-06-06 2022-09-02 江苏鑫华半导体科技股份有限公司 Silicon core cleaning equipment for electronic grade polysilicon

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1188057B (en) * 1962-06-18 1965-03-04 Siemens Ag Process for cleaning silicon rods
CN201378590Y (en) * 2009-02-27 2010-01-06 深圳市捷佳创精密设备有限公司 Silica core containing device
CN201470630U (en) * 2009-06-10 2010-05-19 耿彪 Silica core rotating device
CN202042466U (en) * 2011-05-20 2011-11-16 国电宁夏太阳能有限公司 Rotating basket for cleaning polycrystalline silicon block
CN202157145U (en) * 2011-05-05 2012-03-07 国电宁夏太阳能有限公司 Containing device for silicon core master batches
CN207547226U (en) * 2017-11-21 2018-06-29 都江堰宁江宗汇精密小型蜗杆有限责任公司 A kind of rack for cleaning for improving hole class worm screw cleaning efficiency
CN212733309U (en) * 2020-04-24 2021-03-19 江苏芯梦半导体设备有限公司 Silicon core material stick location fixture
CN214378343U (en) * 2021-01-20 2021-10-08 浙江众晶电子有限公司 Silicon chip washs uses basket of flowers fixing device
CN214371497U (en) * 2020-12-01 2021-10-08 开化晶芯电子有限公司 Drying device for cleaning silicon wafer
CN113731909A (en) * 2021-08-30 2021-12-03 深圳市沁鼎源科技有限公司 Multi-stage pickling equipment for monocrystalline silicon rod for new energy battery production and operation method

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1188057B (en) * 1962-06-18 1965-03-04 Siemens Ag Process for cleaning silicon rods
CN201378590Y (en) * 2009-02-27 2010-01-06 深圳市捷佳创精密设备有限公司 Silica core containing device
CN201470630U (en) * 2009-06-10 2010-05-19 耿彪 Silica core rotating device
CN202157145U (en) * 2011-05-05 2012-03-07 国电宁夏太阳能有限公司 Containing device for silicon core master batches
CN202042466U (en) * 2011-05-20 2011-11-16 国电宁夏太阳能有限公司 Rotating basket for cleaning polycrystalline silicon block
CN207547226U (en) * 2017-11-21 2018-06-29 都江堰宁江宗汇精密小型蜗杆有限责任公司 A kind of rack for cleaning for improving hole class worm screw cleaning efficiency
CN212733309U (en) * 2020-04-24 2021-03-19 江苏芯梦半导体设备有限公司 Silicon core material stick location fixture
CN214371497U (en) * 2020-12-01 2021-10-08 开化晶芯电子有限公司 Drying device for cleaning silicon wafer
CN214378343U (en) * 2021-01-20 2021-10-08 浙江众晶电子有限公司 Silicon chip washs uses basket of flowers fixing device
CN113731909A (en) * 2021-08-30 2021-12-03 深圳市沁鼎源科技有限公司 Multi-stage pickling equipment for monocrystalline silicon rod for new energy battery production and operation method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114985363A (en) * 2022-06-06 2022-09-02 江苏鑫华半导体科技股份有限公司 Silicon core cleaning equipment for electronic grade polysilicon

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