CN114300323B - Method for rapidly controlling on-off of electron beam through pulse width modulation pulse - Google Patents

Method for rapidly controlling on-off of electron beam through pulse width modulation pulse Download PDF

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CN114300323B
CN114300323B CN202111643721.0A CN202111643721A CN114300323B CN 114300323 B CN114300323 B CN 114300323B CN 202111643721 A CN202111643721 A CN 202111643721A CN 114300323 B CN114300323 B CN 114300323B
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circuit
electron beam
pulse
triode
optical fiber
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CN114300323A (en
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谈小虎
张帆
刘明远
曹祖国
张黛芳
李顺峰
孙智刚
马磊
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Research Institute of Physical and Chemical Engineering of Nuclear Industry
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Research Institute of Physical and Chemical Engineering of Nuclear Industry
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Abstract

The invention discloses a method for rapidly controlling the on-off of an electron beam through pulse width modulation pulses, which comprises an isolation transformer, a rectifying and filtering circuit, a pulse switching tube and a trigger driving circuit; pulse width modulation pulse is input from the primary side of the isolation transformer, the secondary side output of the isolation transformer passes through a rectifying and filtering circuit to form direct current output, and the output amplitude is regulated and controlled through pulse width modulation; the direct current output of the rectifying and filtering circuit forms an electron beam control pulse on the grid electrode of the electron gun by controlling the opening and closing of the pulse switching tube, and controls the closing and the conduction of the electron beam. The invention can rapidly control the on-off of the grid power supply of the electron beam through pulse width modulation pulse, and the reaction time is about microseconds, thereby realizing the rapid on-off of the grid power supply of the electron beam.

Description

Method for rapidly controlling on-off of electron beam through pulse width modulation pulse
Technical Field
The invention belongs to the technical field of electrical control, and particularly relates to a method for rapidly controlling on-off of an electron beam through pulse width modulation pulses, so that the rapid on-off of the electron beam is controlled.
Background
The current common control principle of the electron beam grid power supply mainly realizes the control of the electron beam grid power supply through the charge and discharge of a capacitor, and the reaction time of the control method is about ms. In the application occasions such as electron beam 3D printing which require fast on-off of electron beams, the common electron beam grid power supply control method has certain limitations. The patent provides a method for rapidly controlling the on-off of an electron beam through pulse width modulation pulses, which can realize the rapid on-off of a grid power supply of the electron beam.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a method for rapidly controlling the on-off of an electron beam through pulse width modulation pulse, which can realize the rapid on-off of a control grid power supply. The invention has the main advantages that the on-off of the grid power supply of the electron beam can be rapidly controlled through pulse width modulation pulse, the reaction time is about microseconds, and the rapid on-off of the grid power supply of the electron beam is realized, thereby realizing the rapid on-off of the electron beam.
The invention is realized by the following technical scheme:
a method for rapidly controlling the on-off of an electron beam through pulse width modulation pulse comprises an isolation transformer, a rectification filter circuit, a pulse switching tube and a trigger driving circuit;
the secondary output end of the isolation transformer is connected with a rectifying and filtering circuit, the negative output end of the rectifying and filtering circuit is connected to the source electrode of the pulse switching tube, the drain electrode of the pulse switching tube is connected to the grid electrode of the electron gun, and the positive output end of the rectifying and filtering circuit is connected to the cathode of the electron gun; the output end of the trigger driving circuit is connected with the grid electrode of the pulse switching tube and used for controlling the opening and closing of the pulse switching tube; pulse width modulation pulse is input from the primary side of the isolation transformer, the secondary side output of the isolation transformer passes through a rectifying and filtering circuit to form direct current output, and the output amplitude is regulated and controlled through pulse width modulation; the direct current output of the rectifying and filtering circuit forms an electron beam control pulse on the grid electrode of the electron gun by controlling the opening and closing of the pulse switching tube, and controls the closing and the conduction of the electron beam.
In the technical scheme, the rectifying and filtering circuit adopts conventional full-bridge rectification.
In the above technical scheme, the trigger driving circuit includes an optical fiber transmitting circuit, an optical fiber receiving circuit, a trigger amplifying circuit, an isolation driving circuit, and a current limiting resistor, wherein an output end of the optical fiber transmitting circuit is connected with an input end of the optical fiber receiving circuit through an optical fiber, and an output end of the optical fiber receiving circuit is connected with the trigger amplifying circuit for current amplification; the trigger signal is amplified by the current of the trigger amplifying circuit and then is input to the input end of the isolation driving circuit, and the output end of the isolation driving circuit is connected to the grid electrode of the pulse switching tube through the current limiting resistor.
In the above technical solution, the trigger amplifying circuit includes a transistor Q2, a transistor Q3, a resistor R1, a resistor R2, and a resistor R3, where a base stage of the transistor Q2 is connected to an output end of the optical fiber receiving circuit, and the base stage of the transistor Q2 is connected to a base stage of the transistor Q3 through the resistor R3, and a collector of the transistor Q2 is connected to a power supply through the resistor R1; the emitter of the triode Q2 is connected to the emitter of the triode Q3 through R2, and is used as the output of the trigger amplifying circuit and connected to the input end of the isolation driving circuit; the collector of the triode Q3 is connected with the negative voltage end of the optical fiber receiving circuit and is also connected with the negative voltage input end of the isolation driving circuit.
In the above technical solution, the fiber transmitting circuit adopts an HFBR-1528 module.
In the above technical solution, the fiber receiving circuit adopts an HFBR-2528 module.
In the above technical solution, the isolated driving circuit adopts a HCPL-3120 module.
In the above technical solution, the transistor Q2 is an NPN, and the transistor Q3 is a PNP.
In the above technical solution, the optical fiber receiving circuit and the trigger amplifying circuit share one power supply VCCA, and the drive output power supply of the isolation driving circuit adopts another power supply VCCB.
In the above technical solution, when the output of the optical fiber receiving circuit is high level, the driving triode Q2 is turned on, the triode Q3 is turned off, so that the isolation driving circuit inputs high level, and then the pulse switching tube is driven to be turned on, and the electron beam is turned off; when the output of the optical fiber receiving circuit is low level, the driving triode Q3 is conducted, the triode Q2 is closed, the trigger amplifying circuit outputs low level, the isolation driving circuit outputs low level, the pulse switching tube is further driven to be closed, and the electron beam is conducted.
The invention has the advantages and beneficial effects that:
the invention has the main advantages that the on-off of the grid power supply of the electron beam can be rapidly controlled through pulse width modulation pulse, the reaction time is about microseconds, and the rapid on-off of the grid power supply of the electron beam is realized, thereby realizing the rapid on-off of the electron beam.
Drawings
FIG. 1 is a schematic diagram of the present invention;
fig. 2 is a schematic diagram of a trigger driving circuit according to the present invention.
Other relevant drawings may be made by those of ordinary skill in the art from the above figures without undue burden.
Detailed Description
In order to make the person skilled in the art better understand the solution of the present invention, the following describes the solution of the present invention with reference to specific embodiments.
A method for rapidly controlling the on-off of an electron beam through Pulse Width Modulation (PWM) is shown in fig. 1, and comprises an isolation transformer T1, a rectifying and filtering circuit, a pulse switching tube Q1 and a trigger driving circuit.
The secondary output end of the isolation transformer T1 is connected with a rectifying and filtering circuit, the rectifying and filtering circuit adopts conventional full-bridge rectification, the negative output end of the rectifying and filtering circuit is connected to the source electrode of the pulse switching tube Q1, the drain electrode of the pulse switching tube Q1 is connected to the grid electrode of the electron gun, and the positive output end of the rectifying and filtering circuit is connected to the cathode of the electron gun; the output end of the trigger driving circuit is connected with the grid electrode of the pulse switching tube Q1 and used for controlling the opening and closing of the pulse switching tube Q1.
When the device works, pulse width modulation pulses are input from the primary side of the isolation transformer T1, the output of the secondary side of the isolation transformer passes through the rectifying and filtering circuit to form the highest-2 kV direct current output, and the output amplitude is regulated and controlled through pulse width modulation. The direct current output of the rectifying and filtering circuit forms an electron beam control pulse on the grid electrode of the electron gun by controlling the opening and closing of the pulse switching tube Q1, and controls the closing and the conduction of the electron beam.
Referring to fig. 2, the trigger driving circuit includes an optical fiber transmitting circuit U3, an optical fiber receiving circuit U2, a trigger amplifying circuit, an isolation driving circuit U1, and a current limiting resistor R4, wherein the optical fiber transmitting circuit U3 adopts an existing integrated module, such as an HFBR-1528 module, an output end of the optical fiber transmitting circuit U3 is connected with an input end of the optical fiber receiving circuit U2 through an optical fiber, the optical fiber receiving circuit U2 adopts an existing integrated module, such as an HFBR-2528 module, and an output end of the optical fiber receiving circuit U2 is connected with the trigger amplifying circuit for current amplification; specifically, the trigger amplifying circuit includes a triode Q2, a triode Q3, a resistor R1, a resistor R2 and a resistor R3, wherein the base of the triode Q2 is connected with the output end of the optical fiber receiving circuit U2, the base of the triode Q2 is connected to the base of the triode Q3 through the resistor R3, the triode Q2 is NPN type, the collector of the triode Q2 is connected to the power supply VCCA through the resistor R1, the emitter of the triode Q2 is connected to the emitter of the triode Q3 through the resistor R2, and is used as the output of the trigger amplifying circuit and connected to the input end a of the isolation driving circuit U1; the triode Q3 is PNP, the collector electrode of the triode Q3 is connected with the negative voltage end VEEA of the optical fiber receiving circuit U2, and the negative voltage input end C of the isolation driving circuit U1 is also connected.
The trigger signal is amplified by the current of the trigger amplifying circuit and then is input to the input end of the isolation driving circuit U1, the isolation driving circuit adopts an optical isolation integrated driving IC circuit, such as HCPL-3120, and the output end of the isolation driving circuit is connected to the grid electrode of the pulse switching tube Q1 through a current limiting resistor R4; the optical fiber receiving circuit U2 and the trigger amplifying circuit share one power supply VCCA, and the drive output power supply of the isolation drive circuit U1 adopts the other power supply VCCB to be isolated from the power supply VCCA.
When the output of the optical fiber receiving circuit U2 is high level, the driving triode Q2 is turned on, the triode Q3 is turned off, the input of the isolation driving circuit U1 is high level, the pulse switching tube Q1 is further driven to be turned on, and the electron beam is turned off; when the output of the optical fiber receiving circuit is low level, the driving triode Q3 is conducted, the triode Q2 is closed, the trigger amplifying circuit outputs low level, the isolation driving circuit outputs low level, the pulse switching tube Q1 is further driven to be closed, and the electron beam is conducted.
The foregoing has described exemplary embodiments of the invention, it being understood that any simple variations, modifications, or other equivalent arrangements which would not unduly obscure the invention may be made by those skilled in the art without departing from the spirit of the invention.

Claims (7)

1. A method for rapidly controlling the on-off of an electron beam by pulse width modulation pulse is characterized in that: the device comprises an isolation transformer, a rectifying and filtering circuit, a pulse switching tube and a trigger driving circuit;
the secondary output end of the isolation transformer is connected with a rectifying and filtering circuit, the negative output end of the rectifying and filtering circuit is connected to the source electrode of the pulse switching tube, the drain electrode of the pulse switching tube is connected to the grid electrode of the electron gun, and the positive output end of the rectifying and filtering circuit is connected to the cathode of the electron gun; the output end of the trigger driving circuit is connected with the grid electrode of the pulse switching tube and used for controlling the opening and closing of the pulse switching tube; pulse width modulation pulse is input from the primary side of the isolation transformer, the secondary side output of the isolation transformer passes through a rectifying and filtering circuit to form direct current output, and the output amplitude is regulated and controlled through pulse width modulation; the direct current output of the rectifying and filtering circuit forms an electron beam control pulse on the grid electrode of the electron gun by controlling the opening and closing of the pulse switching tube, and controls the closing and the conduction of the electron beam;
the trigger driving circuit comprises an optical fiber transmitting circuit, an optical fiber receiving circuit, a trigger amplifying circuit, an isolation driving circuit and a current limiting resistor, wherein the output end of the optical fiber transmitting circuit is connected with the input end of the optical fiber receiving circuit through an optical fiber, and the output end of the optical fiber receiving circuit is connected with the trigger amplifying circuit for current amplification; the trigger signal is amplified by the current of the trigger amplifying circuit and then is input to the input end of the isolation driving circuit, and the output end of the isolation driving circuit is connected to the grid electrode of the pulse switching tube through the current limiting resistor;
the trigger amplifying circuit comprises a triode Q2, a triode Q3, a resistor R1, a resistor R2 and a resistor R3, wherein the base level of the triode Q2 is connected with the output end of the optical fiber receiving circuit, the base level of the triode Q2 is connected to the base level of the triode Q3 through the resistor R3, and the collector of the triode Q2 is connected to a power supply through the resistor R1; the emitter of the triode Q2 is connected to the emitter of the triode Q3 through R2, and is used as the output of the trigger amplifying circuit and connected to the input end of the isolation driving circuit; the collector electrode of the triode Q3 is connected with the negative voltage end of the optical fiber receiving circuit and is also connected with the negative voltage input end of the isolation driving circuit;
when the output of the optical fiber receiving circuit is high level, the driving triode Q2 is turned on, the triode Q3 is turned off, the input of the isolation driving circuit is high level, the pulse switching tube is driven to be turned on, and the electron beam is turned off; when the output of the optical fiber receiving circuit is low level, the driving triode Q3 is conducted, the triode Q2 is closed, the trigger amplifying circuit outputs low level, the isolation driving circuit outputs low level, the pulse switching tube is further driven to be closed, and the electron beam is conducted.
2. The method for rapidly controlling the on-off of an electron beam by pulse width modulation according to claim 1, wherein: the rectifying and filtering circuit adopts conventional full-bridge rectification.
3. The method for rapidly controlling the on-off of an electron beam by pulse width modulation according to claim 1, wherein: the fiber optic transmit circuit employs an HFBR-1528 module.
4. The method for rapidly controlling the on-off of an electron beam by pulse width modulation according to claim 1, wherein: the optical fiber receiving circuit adopts an HFBR-2528 module.
5. The method for rapidly controlling the on-off of an electron beam by pulse width modulation according to claim 1, wherein: the isolated drive circuit employs a HCPL-3120 module.
6. The method for rapidly controlling the on-off of an electron beam by pulse width modulation according to claim 1, wherein: the triode Q2 is NPN type, and the triode Q3 is PNP type.
7. The method for rapidly controlling the on-off of an electron beam by pulse width modulation according to claim 1, wherein: the optical fiber receiving circuit and the trigger amplifying circuit share one power supply VCCA, and the drive output power supply of the isolation drive circuit adopts the other power supply VCCB.
CN202111643721.0A 2021-12-29 2021-12-29 Method for rapidly controlling on-off of electron beam through pulse width modulation pulse Active CN114300323B (en)

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4368409A (en) * 1980-06-10 1983-01-11 Thomson-Brandt Switching regulator power supply device combined with the horizontal deflection circuit of a television receiver which it supplies
CN1404649A (en) * 2000-02-17 2003-03-19 泰科电子有限公司 Start-up circuit for flyback converter having secondary pulse width modulation control
CN102244471A (en) * 2011-07-21 2011-11-16 核工业理化工程研究院 Power output circuit of electron gun
CN203251222U (en) * 2013-05-27 2013-10-23 山东蓝孚高能物理技术有限公司 High-voltage suspended type grid control power supply device of electron gun
KR101754780B1 (en) * 2016-04-19 2017-07-10 박찬원 Electron gun power supply and power supply method using thereof
CN108923653A (en) * 2018-07-06 2018-11-30 江苏海明医疗器械有限公司 A kind of medical electric rifle grid power supply
CN210123712U (en) * 2019-06-25 2020-03-03 成都利尼科医学技术发展有限公司 Electron gun injector
CN111088479A (en) * 2019-12-27 2020-05-01 云南北方奥雷德光电科技股份有限公司 E-shaped multi-electron beam evaporation device and electron gun circuit
CN113067553A (en) * 2021-03-17 2021-07-02 中国科学院近代物理研究所 Electronic cooling modulation method and device for feedback type pulse linear amplification

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100406572B1 (en) * 2001-05-04 2003-11-20 삼성전자주식회사 power supplying device for electron gun in CDT
EP3997966A1 (en) * 2019-07-09 2022-05-18 Varex Imaging Corporation Electron gun driver

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4368409A (en) * 1980-06-10 1983-01-11 Thomson-Brandt Switching regulator power supply device combined with the horizontal deflection circuit of a television receiver which it supplies
CN1404649A (en) * 2000-02-17 2003-03-19 泰科电子有限公司 Start-up circuit for flyback converter having secondary pulse width modulation control
CN102244471A (en) * 2011-07-21 2011-11-16 核工业理化工程研究院 Power output circuit of electron gun
CN203251222U (en) * 2013-05-27 2013-10-23 山东蓝孚高能物理技术有限公司 High-voltage suspended type grid control power supply device of electron gun
KR101754780B1 (en) * 2016-04-19 2017-07-10 박찬원 Electron gun power supply and power supply method using thereof
CN108923653A (en) * 2018-07-06 2018-11-30 江苏海明医疗器械有限公司 A kind of medical electric rifle grid power supply
CN210123712U (en) * 2019-06-25 2020-03-03 成都利尼科医学技术发展有限公司 Electron gun injector
CN111088479A (en) * 2019-12-27 2020-05-01 云南北方奥雷德光电科技股份有限公司 E-shaped multi-electron beam evaporation device and electron gun circuit
CN113067553A (en) * 2021-03-17 2021-07-02 中国科学院近代物理研究所 Electronic cooling modulation method and device for feedback type pulse linear amplification

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