CN114364116B - Power supply device for electron gun - Google Patents
Power supply device for electron gun Download PDFInfo
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- CN114364116B CN114364116B CN202210002832.1A CN202210002832A CN114364116B CN 114364116 B CN114364116 B CN 114364116B CN 202210002832 A CN202210002832 A CN 202210002832A CN 114364116 B CN114364116 B CN 114364116B
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- 230000008878 coupling Effects 0.000 claims abstract description 52
- 238000010168 coupling process Methods 0.000 claims abstract description 52
- 238000005859 coupling reaction Methods 0.000 claims abstract description 52
- 238000010894 electron beam technology Methods 0.000 claims abstract description 42
- 230000005669 field effect Effects 0.000 claims description 51
- 229910044991 metal oxide Inorganic materials 0.000 claims description 51
- 150000004706 metal oxides Chemical class 0.000 claims description 51
- 239000004065 semiconductor Substances 0.000 claims description 51
- 239000007787 solid Substances 0.000 claims description 28
- 238000002955 isolation Methods 0.000 claims description 27
- 238000004146 energy storage Methods 0.000 claims description 21
- 230000003068 static effect Effects 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 13
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 24
- 230000000087 stabilizing effect Effects 0.000 description 15
- 239000003990 capacitor Substances 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 238000010146 3D printing Methods 0.000 description 1
- 230000005355 Hall effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
The embodiment of the invention discloses a power supply device of an electron gun. The high-voltage power supply comprises a filament power supply, a grid control power supply and a high-voltage power supply; the filament power supply is respectively connected with two ends of the filament, and the high-voltage power supply is respectively connected with the cathode of the electron gun and the anode of the electron gun; the grid-control power supply comprises a fixed voltage power supply, an adjustable voltage power supply and a switch coupling module; the negative electrode of the filament power supply, the negative electrode of the high-voltage power supply, the negative electrode of the fixed-voltage power supply and the negative electrode of the adjustable-voltage power supply are electrically connected; the positive pole of the fixed voltage power supply is connected with the first input end of the switch coupling module, the positive pole of the adjustable voltage power supply is connected with the second input end of the switch coupling module, and the output end of the switch coupling module is connected with the grid electrode of the electron gun. The scheme can output the pulse signal with variable amplitude in real time, and can quickly adjust the size of the electron beam emitted by the electron gun through the amplitude of the pulse signal, thereby realizing the accurate adjustment of the electron beam emitted by the electron gun.
Description
Technical Field
The embodiment of the invention relates to the technical field of electronics, in particular to a power supply device of an electron gun.
Background
The electron beam current emitted by the electron gun used by the current medical electron accelerator is controlled by a filament power supply, and the electron beam current emitted by the electron gun used by the electron beam welding is controlled by a grid voltage power supply. The electron beam emitted by the electron gun of the two devices has slower flowing speed, and the common electron gun power supply device can meet the use function and performance, however, the current of the electron gun needs to be controlled at a high speed in real time in the metal electron beam 3D printer, the common electron gun power supply device cannot meet the power supply requirement of the metal electron beam 3D printer on the electron gun, the metal electron beam 3D printer cannot enable the electron gun to emit the electron beam to quickly change, and the accurate adjustment of the electron gun to emit the electron beam cannot be realized, so that the application requirement of the electron gun in the metal electron beam 3D printing cannot be met.
Disclosure of Invention
The embodiment of the invention provides an electron gun power supply device which can control electron gun emission electron beam current to change rapidly so as to realize accurate adjustment of electron gun emission electron beam current.
The embodiment of the invention provides a power supply device of an electron gun, which comprises a filament power supply, a grid control power supply and a high-voltage power supply;
the filament power supply is respectively connected with two ends of the filament, and the high-voltage power supply is respectively connected with the cathode of the electron gun and the anode of the electron gun;
the grid-control power supply comprises a fixed voltage power supply, an adjustable voltage power supply and a switch coupling module; the negative electrode of the filament power supply, the negative electrode of the high-voltage power supply, the negative electrode of the fixed-voltage power supply and the negative electrode of the adjustable-voltage power supply are electrically connected;
the positive electrode of the fixed voltage power supply is connected with the first input end of the switch coupling module, the positive electrode of the adjustable voltage power supply is connected with the second input end of the switch coupling module, and the output end of the switch coupling module is connected with the grid electrode of the electron gun;
the fixed voltage power supply is used for outputting fixed voltage, the adjustable voltage power supply is used for outputting variable voltage, the switch coupling module is used for generating pulse signals according to the fixed voltage and the variable voltage, and the pulse signals are used for controlling the size of electron beam current.
Optionally, the gate control power supply further comprises a gate control module;
the switch coupling module comprises a logic control unit, a first control switch, a second control switch, a first amplifying unit and a second amplifying unit;
the gate control module is connected with the input end of the logic control unit, the first output end of the logic control unit is connected with the input end of the first amplifying unit, the output end of the first amplifying unit is connected with the control end of the first control switch, the first end of the first control switch is used as the first input end of the switch coupling module, the second end of the first control switch is used as the output end of the switch coupling module, the second output end of the logic control unit is connected with the input end of the second amplifying unit, the output end of the second amplifying unit is connected with the control end of the second control switch, the first end of the second control switch is used as the second input end of the switch coupling module, and the second end of the second control switch is used as the output end of the switch coupling module;
the grid control module is used for generating a synchronous signal, the logic control unit is used for controlling the first output end or the second output end of the logic control unit to output a control signal according to the synchronous signal, and the first control switch or the second control switch is used for being conducted according to the control signal.
Optionally, the first control switch comprises a first metal-oxide semiconductor field effect transistor; the second control switch includes a second metal-oxide semiconductor field effect transistor;
the control terminal of the first metal-oxide semiconductor field effect transistor is used as the control terminal of the first control switch, the first pole of the first metal-oxide semiconductor field effect transistor is used as the first terminal of the first control switch, and the second pole of the first metal-oxide semiconductor field effect transistor is used as the second terminal of the first control switch; the control terminal of the second metal-oxide semiconductor field effect transistor is used as the control terminal of the second control switch, the first pole of the second metal-oxide semiconductor field effect transistor is used as the first terminal of the second control switch, and the second pole of the second metal-oxide semiconductor field effect transistor is used as the second terminal of the second control switch.
Optionally, the switch coupling module further includes a first isolation module and a second isolation module;
the first end of the first isolation module is connected with the output end of the first amplifying unit, and the second end of the first isolation module is connected with the control end of the first control switch; the first end of the second isolation module is connected with the output end of the second amplifying unit, and the second end of the second isolation module is connected with the control end of the second control switch.
Optionally, the filament power supply comprises a filament control module, a steady flow module and a feedback module;
the feedback end of the filament control module is connected with the output end of the feedback module, the output end of the filament control module is connected with the control end of the steady flow module, and the output end of the steady flow module is connected with the input end of the feedback module;
the feedback module is used for collecting the constant current generated by the steady flow module; the filament control module is used for carrying out signal processing on the constant current to obtain an adjusting signal; the steady flow module is used for generating constant current according to the adjusting signal.
Optionally, the high-voltage power supply comprises a high-voltage control module, at least one solid-state switch, at least one voltage equalizing unit, and at least one driving unit;
the solid-state switches, the voltage equalizing units and the driving units are consistent in number;
the high-voltage control module is connected with each driving unit, each driving unit is connected with a solid-state switch, and each solid-state switch is connected with a voltage equalizing unit;
the high-voltage control module is used for providing a driving signal for the driving unit, the driving unit is used for controlling the solid-state switch to be conducted according to the driving signal, and the voltage equalizing unit is used for voltage division.
Optionally, the drive unit comprises a drive subunit and an energy storage subunit;
the input end of the driving subunit is connected with the high-voltage control module, the second end of the driving subunit is connected with the first end of the energy storage subunit and the control end of the solid-state switch, and the third end of the driving subunit is connected with the second end of the energy storage subunit and the first end of the solid-state switch;
the driving subunit is used for controlling the solid-state switch to be turned on according to the driving signal, and the energy storage subunit is used for maintaining the voltage of the control end of the solid-state switch.
Optionally, the voltage equalizing unit comprises a static voltage equalizing subunit and a dynamic voltage equalizing subunit;
the first end of the static voltage equalizing subunit is connected with the first end of the dynamic voltage equalizing subunit, the second end of the solid-state switch and an external power supply, and the second end of the static voltage equalizing subunit is connected with the second end of the dynamic voltage equalizing subunit and the first end of the solid-state switch;
the static voltage equalizing subunit is used for dividing the stable voltage, and the dynamic voltage equalizing subunit is used for dividing the variable voltage.
Optionally, the high voltage power supply further comprises a detection unit;
the detection unit is connected with the electron gun and is connected with the high-voltage control module;
the detection unit is used for detecting the current of the electron gun, and the high-voltage control module is used for providing a driving signal for the driving unit according to the current of the electron gun.
Optionally, the detection unit comprises a current transformer; the solid state switch includes a third metal-oxide semiconductor field effect transistor;
the control terminal of the third metal-oxide semiconductor field effect transistor is used as the control terminal of the solid state switch, the first pole of the third metal-oxide semiconductor field effect transistor is used as the first terminal of the solid state switch, and the second pole of the third metal-oxide semiconductor field effect transistor is used as the second terminal of the solid state switch.
According to the embodiment of the invention, electrons overflow from the filament is controlled by the filament power supply, the grid-control power supply is used for generating the pulse signal for controlling the size of the electron beam, and the size of the electron beam is quickly adjusted by the pulse signal, so that the accurate adjustment of the electron beam is realized. The high-voltage power supply is used for generating a speed signal for controlling the movement of electrons, and the speed signal is used for controlling the speed of the electron beam current moving from the cathode of the electron gun to the anode of the electron gun. In addition, the grid control power supply of the scheme adopts a fixed voltage power supply capable of outputting fixed voltage, an adjustable voltage power supply capable of outputting variable voltage and a switch coupling module capable of generating pulse signals according to the fixed voltage and the variable voltage, and can output the pulse signals with variable amplitude in real time under the cooperative cooperation of the fixed voltage power supply, the adjustable voltage power supply and the switch coupling module. Compared with the prior art, the scheme can quickly adjust the size of the electron beam emitted by the electron gun through the amplitude of the pulse signal, and further realize the accurate adjustment of the electron beam emitted by the electron gun.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, a brief description will be given below of the drawings required for the embodiments or the description of the prior art, and it is obvious that although the drawings in the following description are specific embodiments of the present invention, it is obvious to those skilled in the art that the basic concepts of the device structure, the driving method and the manufacturing method, which are disclosed and suggested according to the various embodiments of the present invention, are extended and extended to other structures and drawings, and it is needless to say that these should be within the scope of the claims of the present invention.
Fig. 1 is a schematic structural diagram of an electron gun power supply device according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of another power supply device for an electron gun according to an embodiment of the present invention;
fig. 3 is a schematic circuit diagram of a gate control power supply according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of another power supply device for an electron gun according to an embodiment of the present invention;
fig. 5 is a schematic circuit diagram of an isolation module according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of another power supply device for an electron gun according to an embodiment of the present invention;
fig. 7 is a schematic circuit diagram of a filament power supply according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a high-voltage power supply according to an embodiment of the present invention;
fig. 9 is a schematic circuit diagram of a driving unit according to an embodiment of the present invention;
fig. 10 is a schematic diagram of a driving unit integrating a plurality of narrow pulse driving signals according to an embodiment of the present invention;
fig. 11 is a schematic circuit diagram of a voltage equalizing unit according to an embodiment of the present invention;
fig. 12 is a schematic structural diagram of another high-voltage power supply according to an embodiment of the present invention.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The embodiment of the invention provides an electron gun power supply device, and fig. 1 is a schematic structural diagram of the electron gun power supply device provided by the embodiment of the invention. As shown in fig. 1, the electron gun power supply device includes a filament power supply 110, a grid control power supply 120, and a high voltage power supply 130; the filament power supply 110 is respectively connected with two ends of the filament 200, and the high-voltage power supply 130 is respectively connected with the electron gun cathode 310 and the electron gun anode 320; the gate control power supply 120 comprises a fixed voltage power supply 121, an adjustable voltage power supply 122 and a switch coupling module 123; the negative electrode of the filament power supply 110, the negative electrode of the high-voltage power supply 130, the negative electrode of the fixed voltage power supply 121 and the negative electrode of the adjustable voltage power supply 122 are electrically connected; the positive pole of the fixed voltage power supply 121 is connected with the first input end of the switch coupling module 123, the positive pole of the adjustable voltage power supply 122 is connected with the second input end of the switch coupling module 123, and the output end of the switch coupling module 123 is connected with the electron gun grid 330; the fixed voltage power supply 121 is used for outputting a fixed voltage, the adjustable voltage power supply 122 is used for outputting a variable voltage, the switch coupling module 123 is used for generating a pulse signal according to the fixed voltage and the variable voltage, and the pulse signal is used for controlling the size of the electron beam current.
The filament power supply 110 can control the filament 200 to overflow electrons, and provide electron beam current source for electron gun. The grid control power supply 120 can generate a pulse signal for controlling the size of the electron beam, and can also quickly adjust the size of the electron beam by the pulse signal, thereby realizing accurate adjustment of the electron beam. The high voltage power supply 130 may generate a speed signal that controls the movement of electrons and, through the speed signal, controls the amount of speed at which the electron beam current moves from the electron gun cathode 310 to the electron gun anode 320. In addition, the gate-controlled power source 120 includes a fixed voltage power source 121 that may output a fixed voltage, an adjustable voltage power source 122 that may output a variable voltage, and a switch coupling module 123 that may generate a pulse signal according to the fixed voltage and the variable voltage. The grid control power supply 120 can output pulse signals required by the electron gun in real time under cooperative coordination through the fixed voltage power supply 121, the adjustable voltage power supply 122 and the switch coupling module 123, and the electron beam current can be adjusted in real time.
Specifically, the positive electrode of the filament power supply 110 is connected to the first end of the filament 200, and the negative electrode of the filament power supply 110 is connected to the second end of the filament 200, so that the filament power supply 110 is connected in series with the filament 200, and the filament power supply 110 can supply a stable current to the filament 200, thereby controlling the filament 200 to overflow electrons and forming an electron beam. A second end of filament 200 is connected to gun cathode 310, and filament 200 provides continuous electrons to gun cathode 310 in the energized state. The cathode of the high voltage power supply 130 is connected to the electron gun cathode 310, the anode of the high voltage power supply 130 is connected to the electron gun anode 320, and the high voltage power supply 130 can supply power to the electron gun anode 320 and the cathode 310, so that an electric field is formed between the electron gun cathode 310 and the anode 320. Wherein the intensity of the electric field formed between the electron gun cathode 310 and the anode 320 can be adjusted by adjusting the voltage supplied to the electron gun cathode 310 and the anode 320 by the high voltage power supply 130. Since the electron beam may move in the electric field, and the moving speed of the electron beam may vary with the strength of the electric field formed between the electron gun cathode 310 and the anode 320, i.e., the stronger the strength of the electric field formed between the electron gun cathode 310 and the anode 320, the faster the moving speed of the electron beam. The moving speed of the electron beam current can thus be adjusted by adjusting the voltages supplied to the cathode 310 and the anode 320 of the electron gun by the high voltage power supply 130. The positive pole of the fixed voltage power supply 121 is connected with the first input end of the switch coupling module 123, the positive pole of the adjustable voltage power supply 122 is connected with the second input end of the switch coupling module 123, and the output end of the switch coupling module 123 is connected with the electron gun grid 330, so that the electron gun grid 330 can output pulse signals generated in real time by the fixed voltage power supply 121, the adjustable voltage power supply 122 and the switch coupling module 123 under cooperative coordination. Since the electron gun grid 330 can adjust the size of the electron beam emitted by the electron gun according to the amplitude of the pulse signal, the amplitude of the pulse signal output to the electron gun grid 330 can be quickly changed by quickly adjusting the fixed voltage power supply 121, the adjustable voltage power supply 122 and the switch coupling module 123, so that the size of the electron beam emitted by the electron gun can be quickly and accurately changed.
According to the embodiment of the invention, electrons overflow from the filament is controlled by the filament power supply, the grid-control power supply is used for generating the pulse signal for controlling the size of the electron beam, and the size of the electron beam is quickly adjusted by the pulse signal, so that the accurate adjustment of the electron beam is realized. The high-voltage power supply is used for generating a speed signal for controlling the movement of electrons, and the speed signal is used for controlling the speed of the electron beam current moving from the cathode of the electron gun to the anode of the electron gun. In addition, the grid control power supply of the scheme adopts a fixed voltage power supply capable of outputting fixed voltage, an adjustable voltage power supply capable of outputting variable voltage and a switch coupling module capable of generating pulse signals according to the fixed voltage and the variable voltage, and can output the pulse signals with variable amplitude in real time under the cooperative cooperation of the fixed voltage power supply, the adjustable voltage power supply and the switch coupling module. Compared with the prior art, the scheme can quickly adjust the size of the electron beam emitted by the electron gun through the amplitude of the pulse signal, and further realize the accurate adjustment of the electron beam emitted by the electron gun. Fig. 2 is a schematic structural diagram of another power supply device for an electron gun according to an embodiment of the present invention, as shown in fig. 2, the grid control power supply 120 further includes a grid control module 124; the switch coupling module 123 includes a logic control unit 1231, a first control switch 1232, a second control switch 1233, a first amplifying unit 1234, and a second amplifying unit 1235; the gate control module 124 is connected to an input end of the logic control unit 1231, a first output end of the logic control unit 1231 is connected to an input end of the first amplifying unit 1234, an output end of the first amplifying unit 1234 is connected to a control end of the first control switch 1232, a first end of the first control switch 1232 is used as a first input end of the switch coupling module 123, a second end of the first control switch 1232 is used as an output end of the switch coupling module 123, a second output end of the logic control unit 1231 is connected to an input end of the second amplifying unit 1235, an output end of the second amplifying unit 1235 is connected to a control end of the second control switch 1233, a first end of the second control switch 1233 is used as a second input end of the switch coupling module 123, and a second end of the second control switch 1233 is used as an output end of the switch coupling module 123; the gate control module 124 is configured to generate a synchronization signal, the logic control unit 1231 is configured to control the first output terminal or the second output terminal of the logic control unit 1231 to output a control signal according to the synchronization signal, and the first control switch 1232 or the second control switch 1233 is configured to be turned on according to the control signal.
The gate control module 124 may generate a synchronization signal. The logic control unit 1231 may control the first output terminal or the second output terminal of the logic control unit 1231 to output a control signal according to the synchronization signal. Wherein the logic control unit 1231 controls the first output terminal or the second output terminal of the logic control unit 1231 according to the level polarity of the synchronization signal. Illustratively, when the synchronization signal is a high level signal, the first output terminal of the logic control unit 1231 outputs a control signal; when the synchronization signal is a low level signal, the second output terminal of the logic control unit 1231 outputs a control signal. The first control switch 1232 and the second control switch 1233 may be turned on according to a control signal. The first amplifying unit 1234 and the second amplifying unit 1235 may amplify the control signal.
Specifically, the gate control module 124 is connected to an input terminal of the logic control unit 1231, and the gate control module 124 may transmit a synchronization signal to the logic control unit 1231, and the logic control unit 1231 may generate a control signal according to the synchronization signal and select whether the control signal is output from a first output terminal of the logic control unit 1231 or a second output terminal of the logic control unit 1231 according to the synchronization signal. The first output terminal of the logic control unit 1231 is connected to the input terminal of the first amplifying unit 1234, and the output terminal of the first amplifying unit 1234 is connected to the control terminal of the first control switch 1232. When the first output terminal of the logic control unit 1231 outputs the control signal to the first amplifying unit 1234, the control signal is amplified by the first amplifying unit 1234 and then transmitted to the control terminal of the first control switch 1232, and the control terminal of the first control switch 1232 receives the control signal and then controls the first terminal and the second terminal of the first control switch 1232 to be turned on. The first end of the first control switch 1232 is used as the first input end of the switch coupling module 123, that is, the first end of the first control switch 1232 is connected to the fixed voltage power supply 121, and the second end of the first control switch 1232 is used as the output end of the switch coupling module 123, that is, the second end of the first control switch 1232 is connected to the gun gate 330. The fixed voltage power supply 121 is used to provide a pulse signal to the gun gate 330 when the first and second terminals of the first control switch 1232 are turned on. A second output terminal of the logic control unit 1231 is connected to an input terminal of the second amplifying unit 1235, and an output terminal of the second amplifying unit 1235 is connected to a control terminal of the second control switch 1233. When the second output end of the logic control unit 1231 outputs the control signal to the second amplifying unit 1235, the second amplifying unit 1235 amplifies the control signal and transmits the amplified control signal to the control end of the second control switch 1233, and the control end of the second control switch 1233 receives the control signal and controls the first end and the second end of the second control switch 1233 to be turned on. The first end of the second control switch 1233 is used as the second input end of the switch coupling module 123, that is, the first end of the second control switch 1233 is connected to the adjustable voltage power supply 122, and the second end of the second control switch 1233 is used as the output end of the switch coupling module 123; i.e., the second terminal of the second control switch 1233 is connected to the gun gate 330. The adjustable voltage power supply 122 is configured to provide a pulsed signal to the gun gate 330 when the first and second terminals of the second control switch 1233 are turned on.
Fig. 3 is a schematic circuit diagram of a gate-controlled power supply according to an embodiment of the present invention, as shown in fig. 3, in which the gate control module 124 transmits a synchronization signal to the logic control unit 1231, the logic control unit 1231 may control the first output terminal or the second output terminal of the logic control unit 1231 to output a control signal according to the synchronization signal, and the first control switch 1232 or the second control switch 1233 may be turned on according to the control signal.
Specifically, with continued reference to fig. 3, the first control switch 1232 includes a first metal-oxide semiconductor field effect transistor M1; the second control switch 1323 includes a second metal-oxide semiconductor field effect transistor M2; the control terminal of the first metal-oxide semiconductor field effect transistor M1 is used as the control terminal of the first control switch 1232, the first pole of the first metal-oxide semiconductor field effect transistor M1 is used as the first terminal of the first control switch 1232, and the second pole of the first metal-oxide semiconductor field effect transistor M1 is used as the second terminal of the first control switch 1232; the control terminal of the second metal-oxide semiconductor field effect transistor M2 is used as the control terminal of the second control switch 1233, the first pole of the second metal-oxide semiconductor field effect transistor M2 is used as the first terminal of the second control switch 1233, and the second pole of the second metal-oxide semiconductor field effect transistor M2 is used as the second terminal of the second control switch 1233.
Wherein the control terminal of the metal-oxide semiconductor field effect transistor can control the conduction state of the first pole and the second pole. Thus the first control switch 1232 may employ a first metal-oxide semiconductor field effect transistor M1 and the second control switch 1233 may employ a second metal-oxide semiconductor field effect transistor M2. Specifically, the control terminal of the first metal-oxide semiconductor field effect transistor M1 is connected to the first amplifying unit 1234, the first pole of the first metal-oxide semiconductor field effect transistor M1 is connected to the fixed voltage power supply 121, the control terminal of the second metal-oxide semiconductor field effect transistor M2 is connected to the second amplifying unit 1235, the first pole of the second metal-oxide semiconductor field effect transistor M2 is connected to the adjustable voltage power supply 122, and the second pole of the first metal-oxide semiconductor field effect transistor M1 and the second pole of the second metal-oxide semiconductor field effect transistor M2 are both connected to the gun gate.
Fig. 4 is a schematic structural diagram of another power supply device for an electron gun according to an embodiment of the present invention, as shown in fig. 4, the switch coupling module 123 further includes a first isolation module 1236 and a second isolation module 1237; a first end of the first isolation module 1236 is connected to the output end of the first amplifying unit 1234, and a second end of the first isolation module 1236 is connected to the control end of the first control switch 1232; the first end of the second isolation module 1237 is connected to the output end of the second amplifying unit 1235, and the second end of the second isolation module 1237 is connected to the control end of the second control switch 1233.
The first isolation module 1236 may isolate the control signal from directly flowing into the control end of the first control switch 1232, so as to prevent the control signal from burning the first control switch 1232 excessively. The second isolation module 1237 may isolate the control signal from flowing directly into the control terminal of the second control switch 1233, preventing the control signal from burning the second control switch 1233 too much.
Fig. 5 is a schematic circuit diagram of an isolation module according to an embodiment of the present invention, as shown in fig. 5, where a first isolation module has the same circuit structure as a second isolation module. The first isolation module and the second isolation module both adopt an optocoupler isolation chip U1 to isolate an input control signal from a first control switch (a first metal-oxide semiconductor field effect transistor M1) or a second control switch (a second metal-oxide semiconductor field effect transistor M2) so as to prevent the first control switch or the second control switch from being burnt out due to overlarge control signal. Fig. 6 is a schematic structural diagram of another power supply device for an electron gun according to an embodiment of the present invention, and as shown in fig. 6, a filament power supply 110 includes a filament control module 111, a current stabilizing module 112, and a feedback module 113; the feedback end of the filament control module 111 is connected with the output end of the feedback module 113, the output end of the filament control module 111 is connected with the control end of the steady flow module 112, and the output end of the steady flow module 112 is connected with the input end of the feedback module 113; the feedback module 113 is used for collecting the constant current generated by the steady flow module 112; the filament control module 111 is used for performing signal processing on the constant current to obtain an adjustment signal; the steady flow module 112 is used for generating constant current according to the adjusting signal.
The feedback module 113 may collect the constant current generated by the current stabilizing module 112. The filament control module 111 may perform signal processing on the constant current to obtain the adjustment signal. The steady flow module 112 may generate a constant current based on the adjustment signal. Specifically, the feedback end of the filament control module 111 is connected to the output end of the feedback module 113, the output end of the filament control module 111 is connected to the control end of the steady flow module 112, and the output end of the steady flow module 112 is connected to the input end of the feedback module 113. Therefore, after the feedback module 113 collects the constant current generated by the current stabilizing module 112, the collected constant current can be transmitted to the filament control module 111, the filament control module 111 compares the constant current value collected by the feedback module 113 with a preset current value, and generates an adjusting signal (e.g. PWM signal) according to the comparison result to transmit to the current stabilizing module 112, and the current stabilizing module 112 can adjust the current output to the filament 200 according to the adjusting signal. In summary, the filament control module 111, the current stabilizing module 112 and the feedback module 113 form a circuit, which can monitor and adjust the output current of the current stabilizing module 112 in real time, so as to ensure the stability of the output current of the filament power supply 110. In addition, since the amount of electrons overflowed from the filament 200 is related to the current provided to the filament 200 by the filament power supply 110, the current level of the current flowing from the current stabilizing module 112 to the filament 200 can be adjusted by the closed loop circuit formed by the filament control module 111, the current stabilizing module 112 and the feedback module 113, so as to control the amount of electrons overflowed from the filament 200.
Fig. 7 is a schematic circuit diagram of a filament power supply according to an embodiment of the present invention, as shown in fig. 7, in which the feedback module 113 employs a current sensor 1131, and the current sensor 1131 measures the output current of the current stabilizing module 112 by using the hall effect and the closed-loop compensation control principle. When the feedback module 113 collects the constant current generated by the current stabilizing module 112, the constant current is transmitted to the first pin 1 of the controller 1111 of the filament control module 111, the preset current value can be input through the second pin 2 of the controller 1111, the controller 1111 performs PID closed-loop control operation processing on the preset current value and the constant current collected by the feedback module 113 to generate an adjustment signal (PWM signal), and the adjustment signal is output to the current stabilizing module 112 through the third pin 3 of the controller 1111. The duty ratio of the on-off time of the switching tube Q1 can determine the magnitude of the output current of the back-stage circuit of the current stabilizing module 112, so that the switching tube Q1 in the current stabilizing module 112 can be turned on according to the adjusting signal, and further the current output by the current stabilizing module 112 is adjusted.
Fig. 8 is a schematic structural diagram of a high-voltage power supply according to an embodiment of the present invention, as shown in fig. 8, the high-voltage power supply includes a high-voltage control module 131, at least one solid-state switch 132, at least one voltage equalizing unit 133, and at least one driving unit 134; the number of the solid-state switches 132, the voltage equalizing units 133 and the driving units 134 is consistent; the high voltage control module 131 is connected with each driving unit 134, each driving unit 134 is connected with a solid state switch 132, and each solid state switch 132 is connected with a voltage equalizing unit 133; the high voltage control module 131 is used for providing a driving signal for the driving unit 134, the driving unit 134 is used for controlling the solid state switch 132 to be turned on according to the driving signal, and the voltage equalizing unit 133 is used for voltage division.
Specifically, the number of solid-state switches 132, voltage equalizing units 133, and driving units 134 is the same; the high voltage control module 131 is connected to each of the driving units 134, whereby the high voltage control module 131 can transmit a driving signal to the driving units 134. Each driving unit 134 is connected to a solid-state switch 132, so that the driving unit 134 can control the solid-state switch 132 to be turned on according to the driving signal. Each solid state switch 132 is connected to a voltage equalizing unit 133, whereby the voltage equalizing unit 133 can equalize the external input voltage such that the voltage between the first pole and the second pole of each solid state switch 132 is equal.
Fig. 9 is a schematic circuit diagram of a driving unit according to an embodiment of the present invention, and as shown in fig. 9, the driving unit 134 includes a driving subunit 1341 and an energy storage subunit 1342; an input end of the driving subunit 1341 is connected with the high-voltage control module, a second end of the driving subunit 1341 is connected with a first end of the energy storage subunit 1342 and a control end of the solid-state switch 132, and a third end of the driving subunit 1341 is connected with a second end of the energy storage subunit 1342 and a first end of the solid-state switch 132; the driving subunit 1341 is configured to control the solid-state switch 132 to be turned on according to the driving signal, and the energy storage subunit 1342 is configured to maintain the control terminal voltage of the solid-state switch 132.
The energy storage subunit 1342 is equivalent to the capacitor C1 in the circuit, and can integrate a plurality of narrow pulse signals into a wide pulse signal to realize continuous pulse output. Specifically, an input terminal of the driving sub-unit 1341 is connected to the high voltage control module, a second terminal of the driving sub-unit 1341 is connected to a first terminal of the energy storage sub-unit 1342 and a control terminal of the solid state switch 132, and a third terminal of the driving sub-unit 1341 is connected to a second terminal of the energy storage sub-unit 1342 and a first terminal of the solid state switch 132. Thus, when the high voltage control module sends a plurality of narrow pulse driving signals to the driving subunit 1341, the energy storage subunit 1342 can integrate the plurality of narrow pulse driving signals into a wide pulse driving signal to control the solid-state switch 132 to be turned on. Fig. 10 is a schematic diagram of integrating a plurality of narrow pulse driving signals by the driving unit according to the embodiment of the present invention, referring to fig. 9-10, wherein a signal 001 is a plurality of narrow pulse driving signals, and a signal 002 is a signal generated by integrating a plurality of narrow pulse driving signals by the driving unit 134. The driving unit 134 operates on the following principle: in the initial stage of the high voltage module sending a plurality of forward narrow pulse driving signals to the driving subunit 1341, the potential at point a is positive, the diode D1, the diode D3 and the triode P2 are conducted, the forward pulse driving signals form a loop through the diode D1, the resistor Rl, the diode D3 and the triode P2, at this time, the forward pulse driving signals forward charge the energy storage subunit 1342, so that the voltage of the control end of the solid-state switch 132 is raised, and the first end and the second end of the solid-state switch 132 are controlled to be conducted; during the period that the high-voltage control module continuously sends a driving signal with a forward narrow pulse to the driving subunit 1341, the voltage of the control terminal of the solid-state switch 132 is maintained within a certain range due to the existence of the energy storage subunit 1342, so that the first terminal and the second terminal of the solid-state switch 132 are continuously conducted; when the high voltage control module stops sending the narrow pulse driving signal to the driving subunit 1341, the high voltage control module sends a reverse pulse driving signal to the driving subunit 1341, so that the point a potential is negative, the diode D2, the diode D4 and the triode P1 are turned on, the reverse pulse driving signal forms a loop through the diode D2, the resistor Rl, the diode D4 and the triode P1, and at this time, the reverse pulse driving signal reversely charges the energy storage subunit 1342, so that the voltage of the control end of the solid-state switch 132 is raised and lowered, and the first end and the second end of the solid-state switch 132 are controlled to be disconnected. In addition, the butted voltage regulators VSl and VS2 are provided to protect the solid state switch 132 from spike voltage breakdown.
Fig. 11 is a schematic circuit diagram of a voltage equalizing unit according to an embodiment of the present invention, and as shown in fig. 11, the voltage equalizing unit 133 includes a static voltage equalizing subunit 1331 and a dynamic voltage equalizing subunit 1332; the first end of the static voltage equalizing sub-unit 1331 is connected with the first end of the dynamic voltage equalizing sub-unit 1332, the second end of the solid state switch 132 and the external power supply 400, and the second end of the static voltage equalizing sub-unit 1331 is connected with the second end of the dynamic voltage equalizing sub-unit 1332 and the first end of the solid state switch 132; the static equalizer 1331 unit is used for dividing a stable voltage, and the dynamic equalizer 1332 unit is used for dividing a variable voltage.
Specifically, the static voltage equalizing sub-unit 1331 includes a resistor R3, a first end of the resistor R3 is used as a first end of the static voltage equalizing sub-unit 1331, a second end of the resistor R3 is used as a second end of the static voltage equalizing sub-unit 1331, and the resistor R3 can divide a stable voltage. The dynamic voltage equalizing subunit 1332 includes a diode D5, a resistor R2, and a capacitor C2. The positive electrode of the diode D5 is connected to the first end of the resistor R2, the positive electrode of the diode D5 and the first end of the resistor R2 are both used as the first end of the dynamic voltage equalizing subunit 1332, the negative electrode of the diode D5 is connected to the second end of the resistor R2 and the first end of the capacitor, and the second end of the capacitor is used as the second end of the dynamic voltage equalizing subunit 1332. The dynamic voltage equalizing subunit 1332 composed of the diode D5, the resistor R2 and the capacitor C2 can divide the variable voltage.
Fig. 12 is a schematic structural diagram of another high-voltage power supply according to an embodiment of the present invention, as shown in fig. 12, the high-voltage power supply further includes a detection unit 135; the detection unit 135 is connected with the electron gun 300, and the detection unit 135 is connected with the high-voltage control module 131; the detection unit 135 is used for detecting the current of the electron gun 300, and the high voltage control module 131 is used for providing a driving signal to the driving unit 134 according to the current of the electron gun 300.
The detecting unit 135 may detect the current of the electron gun, and when the detecting unit 135 detects the current of the electron gun, the current is transmitted to the high voltage control module 131, the high voltage control module 131 compares the current of the electron gun detected by the detecting unit 135 with a preset current, and if the current of the electron gun detected by the detecting unit 135 is greater than the preset current, the high voltage control module 131 stops providing the driving unit 134 with a driving signal, so that the driving unit 134 cannot control the solid switch 132 to be turned on, i.e., the driving unit 134 rapidly turns off the solid switch 132, thereby preventing the solid switch 132 from being burned due to excessive current. For example, when the circuit in which the electron gun is located is ignited, the current of the electron gun is very large at this time, the current of the electron gun detected by the detecting unit 135 is larger than the preset current, and after the detecting unit 135 transmits the detected current of the electron gun to the high voltage control module 131, the high voltage control module 131 rapidly stops providing the driving signal to the driving unit 134, so that the driving unit 134 rapidly turns off the solid switch 132, thereby preventing the solid switch 132 from being burned due to the excessive current.
Optionally, the detection unit includes a current transformer; the solid state switch includes a third metal-oxide semiconductor field effect transistor; the control terminal of the third metal-oxide semiconductor field effect transistor is used as the control terminal of the solid state switch, the first pole of the third metal-oxide semiconductor field effect transistor is used as the first terminal of the solid state switch, and the second pole of the third metal-oxide semiconductor field effect transistor is used as the second terminal of the solid state switch.
Specifically, the current transformer can rapidly detect the current in the loop in which the current transformer is located. The control end of the third metal-oxide semiconductor field effect transistor is used as the control end of the solid-state switch, namely the control end of the third metal-oxide semiconductor field effect transistor is connected with the second end of the driving subunit and the first end of the energy storage subunit; the first electrode of the third metal-oxide semiconductor field effect transistor is used as the first end of the solid-state switch, namely, the first electrode of the third metal-oxide semiconductor field effect transistor is respectively connected with the third end of the driving subunit, the second end of the energy storage subunit, the second end of the static voltage equalizing subunit and the second end of the dynamic voltage equalizing subunit; the second pole of the third mosfet is connected to the first terminal of the static voltage equalizing subunit 1331 and the first terminal of the dynamic voltage equalizing subunit, respectively, as the second terminal of the solid-state switch, i.e. the second pole of the third mosfet.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (9)
1. The power supply device of the electron gun is characterized by comprising a filament power supply, a grid control power supply and a high-voltage power supply;
the filament power supply is respectively connected with two ends of the filament, and the high-voltage power supply is respectively connected with the cathode of the electron gun and the anode of the electron gun;
the grid-control power supply comprises a fixed voltage power supply, an adjustable voltage power supply and a switch coupling module; the negative electrode of the filament power supply, the negative electrode of the high-voltage power supply and the negative electrode of the fixed-voltage power supply are electrically connected;
the grid control power supply further comprises a grid control module;
the switch coupling module comprises a logic control unit, a first control switch, a second control switch, a first amplifying unit and a second amplifying unit;
the grid control module is connected with the input end of the logic control unit, the first output end of the logic control unit is connected with the input end of the first amplifying unit, the output end of the first amplifying unit is connected with the control end of the first control switch, the first end of the first control switch is used as the first input end of the switch coupling module, the second end of the first control switch is used as the output end of the switch coupling module, the second output end of the logic control unit is connected with the input end of the second amplifying unit, the output end of the second amplifying unit is connected with the control end of the second control switch, the first end of the second control switch is used as the second input end of the switch coupling module, and the second end of the second control switch is used as the output end of the switch coupling module;
the grid control module is used for generating a synchronous signal, the logic control unit is used for controlling a first output end or a second output end of the logic control unit to output a control signal according to the synchronous signal, and the first control switch or the second control switch is used for being conducted according to the control signal;
the positive electrode of the fixed voltage power supply is connected with the first input end of the switch coupling module, the positive electrode of the adjustable voltage power supply is connected with the second input end of the switch coupling module, and the output end of the switch coupling module is connected with the grid electrode of the electron gun;
the fixed voltage power supply is used for outputting fixed voltage, the adjustable voltage power supply is used for outputting variable voltage, the switch coupling module is used for generating pulse signals according to the fixed voltage and the variable voltage, and the pulse signals are used for controlling the size of electron beam current.
2. The electron gun power supply apparatus according to claim 1, wherein the first control switch comprises a first metal-oxide semiconductor field effect transistor; the second control switch includes a second metal-oxide semiconductor field effect transistor;
the control terminal of the first metal-oxide semiconductor field effect transistor is used as the control terminal of the first control switch, the first pole of the first metal-oxide semiconductor field effect transistor is used as the first terminal of the first control switch, and the second pole of the first metal-oxide semiconductor field effect transistor is used as the second terminal of the first control switch; the control terminal of the second metal-oxide semiconductor field effect transistor is used as the control terminal of the second control switch, the first electrode of the second metal-oxide semiconductor field effect transistor is used as the first terminal of the second control switch, and the second electrode of the second metal-oxide semiconductor field effect transistor is used as the second terminal of the second control switch.
3. The electron gun power supply apparatus of claim 1 wherein said switch coupling module further comprises a first isolation module and a second isolation module;
the first end of the first isolation module is connected with the output end of the first amplifying unit, and the second end of the first isolation module is connected with the control end of the first control switch; the first end of the second isolation module is connected with the output end of the second amplifying unit, and the second end of the second isolation module is connected with the control end of the second control switch.
4. The electron gun power supply apparatus according to claim 1, wherein the filament power supply includes a filament control module, a steady flow module, and a feedback module;
the feedback end of the filament control module is connected with the output end of the feedback module, the output end of the filament control module is connected with the control end of the steady flow module, and the output end of the steady flow module is connected with the input end of the feedback module;
the feedback module is used for collecting constant current generated by the steady flow module; the filament control module is used for carrying out signal processing on the constant current to obtain an adjusting signal; the steady flow module is used for generating the constant flow according to the adjusting signal.
5. The electron gun power supply apparatus according to claim 1, wherein the high voltage power supply comprises a high voltage control module, at least one solid state switch, at least one voltage equalizing unit, at least one driving unit;
the solid-state switches, the voltage equalizing units and the driving units are consistent in number;
the high-voltage control module is connected with each driving unit, each driving unit is connected with one solid-state switch, and each solid-state switch is connected with one voltage equalizing unit;
the high-voltage control module is used for providing a driving signal for the driving unit, the driving unit is used for controlling the solid-state switch to be conducted according to the driving signal, and the voltage equalizing unit is used for voltage division.
6. The electron gun power supply apparatus according to claim 5, wherein the driving unit comprises a driving sub-unit and an energy storage sub-unit;
the input end of the driving subunit is connected with the high-voltage control module, the second end of the driving subunit is connected with the first end of the energy storage subunit and the control end of the solid-state switch, and the third end of the driving subunit is connected with the second end of the energy storage subunit and the first end of the solid-state switch;
the driving subunit is used for controlling the solid-state switch to be conducted according to the driving signal, and the energy storage subunit is used for maintaining the voltage of the control end of the solid-state switch.
7. The electron gun power supply apparatus according to claim 5, wherein the voltage equalizing unit comprises a static voltage equalizing subunit and a dynamic voltage equalizing subunit;
the first end of the static voltage equalizing subunit is connected with the first end of the dynamic voltage equalizing subunit, the second end of the solid-state switch and an external power supply, and the second end of the static voltage equalizing subunit is connected with the second end of the dynamic voltage equalizing subunit and the first end of the solid-state switch;
the static voltage equalizing subunit is used for dividing the stable voltage, and the dynamic voltage equalizing subunit is used for dividing the variable voltage.
8. The electron gun power supply apparatus according to claim 5, wherein the high voltage power supply further comprises a detection unit;
the detection unit is connected with the electron gun and is connected with the high-voltage control module;
the detection unit is used for detecting the current of the electron gun, and the high-voltage control module is used for providing a driving signal for the driving unit according to the current of the electron gun.
9. The electron gun power supply apparatus according to claim 8, wherein the detection unit includes a current transformer; the solid state switch includes a third metal-oxide semiconductor field effect transistor;
the control terminal of the third metal-oxide semiconductor field effect transistor is used as the control terminal of the solid state switch, the first pole of the third metal-oxide semiconductor field effect transistor is used as the first terminal of the solid state switch, and the second pole of the third metal-oxide semiconductor field effect transistor is used as the second terminal of the solid state switch.
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