CN114284143A

CN114284143A - Close frame and tear quick-witted centrifugal layer flash tank of glue

Info

Publication number: CN114284143A
Application number: CN202111561110.1A
Authority: CN
Inventors: 陈广顺; 孟强; 姜红涛
Original assignee: Jiangsu Union Semiconductor Co Ltd
Current assignee: Jiangsu Union Semiconductor Co Ltd
Priority date: 2021-12-15
Filing date: 2021-12-15
Publication date: 2022-04-05

Abstract

The invention belongs to the field of centrifugal layer flash tanks, in particular to a centrifugal layer flash tank of a frame-combining glue tearing machine, which aims at solving the problems that the prior centrifugal layer flash tank is inconvenient for positioning a wafer and quick and uniform drying of a corrosion inhibitor in the using process, thereby reducing the production efficiency of a silicon wafer, and the prior centrifugal layer flash tank comprises a shell, wherein a cover plate is hinged on the outer side of the shell, a drying box is fixedly arranged at the top of the shell through welding, a support is fixedly arranged on the inner wall of the bottom of the shell through welding, a rotating groove is arranged at the top of the support, a connecting plate is rotatably arranged in the rotating groove, a disc is fixedly arranged at the top of the connecting plate through welding, two symmetrical first sliding grooves are arranged on the disc, the invention can conveniently position the wafer in the using process, and is convenient for quickly and uniformly drying the corrosion inhibitor, thereby improving the production efficiency of the silicon wafer, simple structure and convenient use.

Description

Close frame and tear quick-witted centrifugal layer flash tank of glue

Technical Field

The invention relates to the technical field of centrifugal layer flash tanks, in particular to a centrifugal layer flash tank of a frame-closing glue tearing machine.

Background

The frame-combining glue tearing machine ionizes oxygen or other reaction gas by utilizing microwave plasma to form chemically active free radicals, then reacts with photoresist to generate volatile substances, and the volatile substances are pumped out of a cavity by a vacuum pump, so that the functions of etching and removing the photoresist are realized. The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; various circuit element structures can be processed on a silicon wafer to form an integrated circuit product with specific electrical functions. The silicon ingot is formed by melting the polycrystalline silicon, seeding the seed crystal in the melt, and then slowly pulling the seed crystal out to form a cylindrical monocrystalline silicon ingot, since the silicon ingot is formed by growing the seed crystal defined by the orientation of one crystal plane in the molten silicon starting material. The silicon crystal bar is cut, barreled, sliced, chamfered, polished, laser etched and packed to form the basic material of integrated circuit factory, i.e. silicon wafer. A spin-coating flash tank is a device used to apply resist to a wafer surface.

In the prior art, the centrifugal layer flash tank is inconvenient for positioning the wafer and for quickly and uniformly drying the corrosion inhibitor in the using process, so that the production efficiency of the silicon wafer is reduced, and the centrifugal layer flash tank of the frame-closing glue tearing machine is provided for solving the problems.

Disclosure of Invention

The invention aims to solve the defects that in the prior art, a centrifugal layer flash tank is inconvenient to position a wafer and quick and uniform drying of a corrosion inhibitor is inconvenient to carry out in the using process of the centrifugal layer flash tank, so that the production efficiency of a silicon wafer is reduced, and the centrifugal layer flash tank of a frame-combining and glue-tearing machine is provided.

In order to achieve the purpose, the invention adopts the following technical scheme:

a centrifugal layer flash tank of a frame-closing glue tearing machine comprises a shell, wherein a cover plate is hinged to the outer side of the shell, a drying box is fixedly installed at the top of the shell through welding, a support is fixedly installed on the inner wall of the bottom of the shell through welding, a rotary groove is formed in the top of the support, a connecting plate is rotatably installed in the rotary groove, a disc is fixedly installed at the top of the connecting plate through welding, two symmetrical first sliding grooves are formed in the disc, first sliding blocks are respectively installed in the two first sliding grooves in a sliding mode, positioning mechanisms are arranged on the two first sliding blocks, a first hollow groove is formed in the disc, a second hollow groove is formed in the support, a mounting hole is formed in the inner wall of the bottom of the drying box, a corrugated pipe is fixedly installed in the mounting hole, one end of the corrugated pipe is fixedly communicated with a gas outlet, a gas inlet is formed in the top of the drying box, a dust guard plate is fixedly installed in the gas inlet through a bolt, a third hollow groove and a fourth hollow groove are formed in the shell, the motor is fixedly installed on the inner wall of the bottom of the second empty groove through welding, the third through hole is formed in the inner wall of the bottom of the rotating groove and communicated with the second empty groove, the worm is rotatably installed in the third through hole, two ends of the worm are fixedly connected with the output shaft of the motor and the bottom of the connecting plate through welding respectively, and when the motor is started, the worm can drive the connecting plate to rotate.

Preferably, first through-holes have been seted up in the outside of disc, first through-hole communicates with each other with first dead slot, first pivot is installed to the first through-hole internal rotation, the one end of first pivot is through welded fastening installation hand wheel, the other end of first pivot is through welded fastening installation first bevel gear, the second through-hole has all been seted up to the both sides inner wall of first dead slot, two second through-holes communicate with each other with two first spouts respectively, threaded hole has all been seted up on two first sliders, same two-way lead screw is installed to two screw hole internal threads, the outside of two-way lead screw is equipped with the second bevel gear through the fixed cover of welding, the second bevel gear meshes with first bevel gear.

Preferably, positioning mechanism includes two fixed blocks, and the outside of two fixed blocks is respectively through welded fixed connection with the top of two first sliders, and the second spout has all been seted up to one side of two fixed blocks, and equal slidable mounting has the second slider in two second spouts, and the outside of two second sliders all is through welded fixed connection arc splint, and one side of two second sliders all is through welded fixed connection with compression spring, and one end of two compression springs passes through welded fixed connection with one side inner wall of two second spouts respectively.

Preferably, the inner walls of the two sides of the drying box are respectively provided with a fixed rod through welding and fixing, one end of each fixed rod is connected with the same fan through welding and fixing, and the drying box is internally and fixedly provided with a plurality of electric heating rods.

Preferably, the both sides of gas outlet all are through welded fastening connection with third pivot, and the fifth through-hole has been seted up to one side inner wall of third dead slot, the outside of third pivot and the inner wall sliding connection of fifth through-hole, and the one end of third pivot is through welded fastening installs the gear, gear and ratch meshing.

Preferably, a third chute is formed in the inner wall of the top of the fourth empty groove, the third chute is communicated with the third empty groove, a toothed bar is arranged in the third chute in a sliding mode, a rectangular bar is arranged in the fourth empty groove in a sliding mode, the top of the rectangular bar is fixedly connected with one end of the toothed bar in a welding mode, a waist-shaped groove is formed in the outer side of the rectangular bar, and the outer side of the connecting column is connected with the inner wall of the waist-shaped groove in a sliding mode.

Preferably, a fourth through hole is formed in the inner wall of one side of the second empty groove, the fourth through hole is communicated with the fourth empty groove, a second rotating shaft is rotatably installed in the fourth through hole, a worm wheel is fixedly installed at one end of the second rotating shaft through welding, the worm wheel is meshed with a worm, a turntable is fixedly installed at the other end of the second rotating shaft through welding, and a connecting column is fixedly connected to one side of the turntable through welding.

Compared with the prior art, the invention has the beneficial effects that:

1. when the hand wheel is rotated, the hand wheel drives the first rotating shaft to rotate, the first rotating shaft drives the first bevel gear to rotate, the first bevel gear drives the second bevel gear to rotate, the two-way screw rod drives the two first sliding blocks to be close to each other, the two fixing blocks respectively drive the two second sliding blocks and the two arc-shaped clamping plates to be close to each other, and therefore the two arc-shaped clamping plates can clamp and position the wafer.

2. When the motor is started, the motor drives the worm to rotate, the worm drives the connecting plate to rotate, the connecting plate drives the disc to rotate, and the disc drives the wafer to rotate, so that the resist on the surface of the wafer can be uniformly coated through the rotating centrifugal force.

3. When this scheme was opened fan and a plurality of electrical heating stick, the wind pressure that the fan produced can be discharged the heat that a plurality of electrical heating sticks produced through bellows and gas outlet to the discharged heat can be with the resist layer fast drying of coating.

The invention can conveniently position the wafer and quickly and uniformly dry the corrosion inhibitor in the using process, thereby improving the production efficiency of the silicon wafer, and having simple structure and convenient use.

Drawings

Fig. 1 is a schematic three-dimensional structure view of a centrifugal layer flash tank of a frame-closing glue tearing machine according to the present invention;

fig. 2 is a schematic structural diagram of a main view of a centrifugal layer flash tank of a frame-closing glue tearing machine according to the present invention;

fig. 3 is a schematic structural diagram of a cross-sectional view of a disk of a centrifugal layer flash tank of a frame-closing glue tearing machine according to the present invention;

fig. 4 is an enlarged schematic structural view of a portion a of the centrifugal layer flash tank of the frame-closing glue-tearing machine according to the present invention, shown in fig. 2;

fig. 5 is an enlarged schematic structural view of a portion B of the centrifugal layer flash tank of the frame-closing glue-tearing machine according to the present invention;

fig. 6 is an enlarged schematic structural diagram of a portion C in fig. 2 of a centrifugal layer flash tank of a frame-closing glue-tearing machine according to the present invention.

In the figure: 1. a housing; 2. a cover plate; 3. a drying box; 4. a support; 5. a connecting plate; 6. a disc; 7. a first chute; 8. a first slider; 9. a fixed block; 10. a second slider; 11. an arc-shaped splint; 12. a compression spring; 13. a bidirectional screw rod; 14. a first rotating shaft; 15. a hand wheel; 16. a first bevel gear; 17. a second bevel gear; 18. a second empty slot; 19. a motor; 20. a worm; 21. a second rotating shaft; 22. a worm gear; 23. a turntable; 24. connecting columns; 25. a rectangular bar; 26. a rack bar; 27. a third empty slot; 28. a third rotating shaft; 29. a gear; 30. an air outlet; 31. a bellows; 32. fixing the rod; 33. an electrical heating rod; 34. a fan; 35. a dust-proof plate; 36. and a guide block.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

Example one

Referring to fig. 1-6, a centrifugal layer flash tank of a frame-closing glue tearing machine comprises a shell 1, a cover plate 2 is hinged on the outer side of the shell 1, a drying box 3 is fixedly installed on the top of the shell 1 through welding, a support 4 is fixedly installed on the inner wall of the bottom of the shell 1 through welding, a rotating groove is formed on the top of the support 4, a connecting plate 5 is rotatably installed in the rotating groove, a disc 6 is fixedly installed on the top of the connecting plate 5 through welding, two symmetrical first sliding grooves 7 are formed in the disc 6, first sliding blocks 8 are respectively and slidably installed in the two first sliding grooves 7, positioning mechanisms are arranged on the two first sliding blocks 8, a first empty groove is formed in the disc 6, a second empty groove 18 is formed in the support 4, a mounting hole is formed in the inner wall of the bottom of the drying box 3, a corrugated pipe 31 is fixedly installed in the mounting hole, one end of the corrugated pipe 31 is fixedly communicated with a gas outlet 30, and a gas inlet is formed in the top of the drying box 3, there are dust guard 35 through bolt fixed mounting in the air inlet, seted up third dead slot 27 and fourth dead slot in the casing 1, the bottom inner wall of second dead slot 18 has motor 19 through welded fastening, the bottom inner wall of swivelling chute has seted up the third through-hole, the third through-hole communicates with each other with second dead slot 18, the worm 20 is installed to the rotation in the third through-hole, the both ends of worm 20 are respectively through welded fastening with the output shaft of motor 19 and the bottom of connecting plate 5, when opening motor 19, worm 20 can drive connecting plate 5 rotatory.

In this embodiment, a first through hole has been seted up in the outside of disc 6, the first through hole communicates with each other with first dead slot, first pivot 14 has been installed to the first through hole internal rotation, the hand wheel 15 has been installed through welded fastening to the one end of first pivot 14, the other end of first pivot 14 has first bevel gear 16 through welded fastening to install, the second through hole has all been seted up to the both sides inner wall of first dead slot, two second through holes communicate with each other with two first spouts 7 respectively, threaded hole has all been seted up on two first sliders 8, same two-way lead screw 13 is installed to two threaded hole internal threads, the outside of two-way lead screw 13 is equipped with second bevel gear 17 through the welded fastening cover, second bevel gear 17 meshes with first bevel gear 16, when first pivot 14 rotates, first bevel gear 16 can drive second bevel gear 17 and rotate.

In this embodiment, positioning mechanism includes two fixed blocks 9, the outside of two fixed blocks 9 is respectively through welded fastening connection with two first slider 8's top, the second spout has all been seted up to one side of two fixed blocks 9, equal slidable mounting has second slider 10 in two second spouts, the outside of two second sliders 10 is all through welded fastening connection arc splint 11, one side of two second sliders 10 is all through welded fastening connection compression spring 12, the one end of two compression spring 12 is respectively through welded fastening connection with one side inner wall of two second spouts, when two arc splint 11 centre gripping wafers, two compression spring 12 can play the effect of exerting force to two second sliders 10 and two arc splint 11 respectively.

In this embodiment, the both sides inner wall of stoving case 3 all has dead lever 32 through welded fastening, and the one end of two dead levers 32 is connected with same fan 34 through welded fastening, and stoving incasement 3 internal fixed mounting has a plurality of electrical heating rod 33, and when opening fan 34 and a plurality of electrical heating rod 33, the wind pressure that fan 34 produced can be with the heat discharge that a plurality of electrical heating rod 33 produced.

In this embodiment, the both sides of gas outlet 30 are all through welded fastening connected with third pivot 28, and the fifth through-hole has been seted up to one side inner wall of third dead slot 27, the outside of third pivot 28 and the inner wall sliding connection of fifth through-hole, and welded fastening installs gear 29 in the one end of third pivot 28, and gear 29 and rack 26 mesh, and when rack 26 vertical migration, rack 26 can drive gear 29 and rotate.

In this embodiment, the third spout has been seted up to the top inner wall of fourth dead slot, the third spout communicates with each other with third dead slot 27, slidable mounting has ratch 26 in the third spout, slidable mounting has rectangular pole 25 in the fourth dead slot, welded fastening is passed through with ratch 26's one end in the top of rectangular pole 25, waist type groove has been seted up in rectangular pole 25's the outside, the outside through spliced pole 24 and the inner wall sliding connection's in waist type groove setting, when spliced pole 24 is circular motion, spliced pole 24 can drive the vertical reciprocating motion of rectangular pole 25.

In this embodiment, a fourth through hole is formed in an inner wall of one side of the second empty groove 18, the fourth through hole is communicated with the fourth empty groove, the second rotating shaft 21 is rotatably installed in the fourth through hole, a worm wheel 22 is installed at one end of the second rotating shaft 21 through welding and fixing, the worm wheel 22 is meshed with the worm 20, a rotating disc 23 is installed at the other end of the second rotating shaft 21 through welding and fixing, a connecting column 24 is fixedly connected to one side of the rotating disc 23 through welding, and when the worm 20 rotates, the worm wheel 22 can drive the second rotating shaft 21 to rotate.

The working principle is that when the wafer coating machine is used, a wafer can be placed on the top of a disc 6, then a hand wheel 15 is rotated, the hand wheel 15 drives a first rotating shaft 14 to rotate, the first rotating shaft 14 drives a first bevel gear 16 to rotate, the first bevel gear 16 drives a second bevel gear 17 to rotate, the second bevel gear 17 drives a two-way screw 13 to rotate, the two-way screw 13 drives two first sliders 8 to approach each other, the two first sliders 8 respectively drive two fixed blocks 9 to approach each other, the two fixed blocks 9 respectively drive two second sliders 10 and two arc-shaped clamping plates 11 to approach each other, further the two arc-shaped clamping plates 11 can clamp and position the wafer, then an etching resist is coated on the surface of the wafer, a motor 19 and a fan 34 are started, the motor 19 drives a worm 20 to rotate, the worm 20 drives a connecting plate 5 to rotate, the connecting plate 5 drives the disc 6 to rotate, the disc 6 drives the wafer to rotate, further the etching resist on the surface of the wafer can be uniformly coated through the rotating centrifugal force, meanwhile, the fan 34 generates wind pressure, the plurality of electric heating rods 33 are opened to generate heat, the wind pressure generated by the fan 34 can discharge the heat generated by the plurality of electric heating rods 33 through the corrugated pipe 31 and the air outlet 30, and further the discharged heat can rapidly dry the coated resist, the worm 20 drives the worm wheel 22 to rotate, the worm wheel 22 drives the second rotating shaft 21 to rotate, the second rotating shaft 21 drives the rotating disc 23 to rotate, the rotating disc 23 drives the connecting column 24 to do circular motion, the connecting column 24 can drive the rectangular rod 25 to do vertical reciprocating motion through the arrangement of the sliding connection between the outer side of the connecting column 24 and the inner wall of the kidney-shaped groove, the rectangular rod 25 drives the toothed rod 26 to do vertical reciprocating motion, the toothed rod 26 drives the gear 29 to do reciprocating forward and reverse rotation, the gear 29 drives the third rotating shaft 28 and the air outlet 30 to do reciprocating rotation, and the air outlet 30 can uniformly discharge heat, so that the coated resist layer can be uniformly and rapidly dried, the production efficiency of the silicon wafer is improved.

Example two

The difference from the first embodiment is that: the outer side of the shell 1 is hinged with a cover plate 2, the top of the shell 1 is fixedly provided with a drying box 3 by welding, the inner wall of the bottom of the shell 1 is fixedly provided with a support 4 by welding, the top of the support 4 is provided with a rotating groove, the rotating groove is internally and rotatably provided with a connecting plate 5, the top of the connecting plate 5 is fixedly provided with a disc 6 by welding, the inner wall of the rotating groove is provided with an annular groove, the annular groove is internally and slidably provided with two guide blocks 36, the outer sides of the two guide blocks 36 are fixedly connected with the outer side of the connecting plate 5, the disc 6 is provided with two symmetrical first chutes 7, the two first chutes 7 are internally and slidably provided with first slide blocks 8, the two first slide blocks 8 are provided with positioning mechanisms, the disc 6 is internally provided with first empty grooves, the support 4 is internally provided with second empty grooves 18, the inner wall of the bottom of the drying box 3 is provided with mounting holes, and corrugated pipes 31 are fixedly arranged in the mounting holes, the fixed intercommunication gas outlet 30 of one end of bellows 31, the air inlet has been seted up at the top of stoving case 3, there is dust guard 35 through bolt fixed mounting in the air inlet, third dead slot 27 and fourth dead slot have been seted up in the casing 1, the bottom inner wall of second dead slot 18 has motor 19 through welded fastening installation, the third through-hole has been seted up to the bottom inner wall of swivelling chute, the third through-hole communicates with each other with second dead slot 18, worm 20 is installed in the rotation of third through-hole, the both ends of worm 20 are respectively through welded fastening connection with the output shaft of motor 19 and the bottom of connecting plate 5, when opening motor 19, worm 20 can drive connecting plate 5 rotatory.

In the working principle, when the wafer processing device is used, a wafer can be placed on the top of a disc 6, then a hand wheel 15 is rotated, the hand wheel 15 drives a first rotating shaft 14 to rotate, the first rotating shaft 14 drives a first bevel gear 16 to rotate, the first bevel gear 16 drives a second bevel gear 17 to rotate, the second bevel gear 17 drives a two-way screw 13 to rotate, the two-way screw 13 drives two first sliders 8 to approach each other, the two first sliders 8 respectively drive two fixed blocks 9 to approach each other, the two fixed blocks 9 respectively drive two second sliders 10 and two arc-shaped clamping plates 11 to approach each other, further the two arc-shaped clamping plates 11 can clamp and position the wafer, then an etching resist is coated on the surface of the wafer, a motor 19 and a fan 34 are started, the motor 19 drives a worm 20 to rotate, the worm 20 drives a connecting plate 5 to rotate, the two guide blocks 36 can play a role in stabilizing the rotation of the connecting plate 5, the connecting plate 5 drives the disc 6 to rotate, the disc 6 drives the wafer to rotate, and then resist on the surface of the wafer can be uniformly coated by a rotating centrifugal force, meanwhile, the fan 34 generates wind pressure, the plurality of electric heating rods 33 are opened to generate heat, the wind pressure generated by the fan 34 can discharge the heat generated by the plurality of electric heating rods 33 through the corrugated pipe 31 and the air outlet 30, and then the discharged heat can rapidly dry the coated resist, meanwhile, the worm 20 drives the worm wheel 22 to rotate, the worm wheel 22 drives the second rotating shaft 21 to rotate, the second rotating shaft 21 drives the rotating disc 23 to rotate, the rotating disc 23 drives the connecting column 24 to do circular motion, through the arrangement that the outer side of the connecting column 24 is in sliding connection with the inner wall of the kidney-shaped groove, the connecting column 24 can drive the rectangular rod 25 to vertically reciprocate, the rectangular rod 25 drives the toothed rod 26 to vertically reciprocate, the toothed rod 26 drives the gear 29 to reciprocate forward and backward, the gear 29 drives the third rotating shaft 28 and the air outlet 30 to reciprocate forward and backward, and the air outlet 30 can uniformly discharge heat, so that the coated resist layer can be uniformly and rapidly dried, and the production efficiency of the silicon wafer is improved.

The rest is the same as the first embodiment.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

Claims

1. The centrifugal layer flash tank of the frame-closing glue tearing machine comprises a shell (1) and is characterized in that a cover plate (2) is hinged to the outer side of the shell (1), a drying box (3) is fixedly installed at the top of the shell (1), a support (4) is fixedly installed on the inner wall of the bottom of the shell (1), a rotating groove is formed in the top of the support (4), a connecting plate (5) is rotatably installed in the rotating groove, a disc (6) is fixedly installed at the top of the connecting plate (5), two symmetrical first sliding grooves (7) are formed in the disc (6), first sliding blocks (8) are respectively and slidably installed in the two first sliding grooves (7), a positioning mechanism is arranged on the two first sliding blocks (8), a first empty groove is formed in the disc (6), a second empty groove (18) is formed in the support (4), a mounting hole is formed in the inner wall of the bottom of the drying box (3), a corrugated pipe (31) is fixedly installed in the mounting hole, the one end of bellows (31) is fixed intercommunication gas outlet (30), and the air inlet has been seted up at the top of stoving case (3), and fixed mounting has dust guard (35) in the air inlet, has seted up third dead slot (27) and fourth dead slot in casing (1).

2. The centrifugal layer flash tank of the frame-closing glue tearing machine according to claim 1, wherein the positioning mechanism comprises two fixing blocks (9), the outer sides of the two fixing blocks (9) are fixedly connected with the tops of the two first sliding blocks (8) respectively, a second sliding groove is formed in one side of each of the two fixing blocks (9), a second sliding block (10) is slidably mounted in each of the two second sliding grooves, an arc-shaped clamping plate (11) is fixedly connected to the outer sides of the two second sliding blocks (10), a compression spring (12) is fixedly connected to one side of each of the two second sliding blocks (10), and one end of each of the two compression springs (12) is fixedly connected with the inner wall of one side of each of the two second sliding grooves.

3. The centrifugal layer flash tank of the frame-closing glue tearing machine according to claim 1, wherein a first through hole is formed in the outer side of the disc (6), the first through hole is communicated with the first empty groove, a first rotating shaft (14) is rotatably installed in the first through hole, a hand wheel (15) is fixedly installed at one end of the first rotating shaft (14), a first bevel gear (16) is fixedly installed at the other end of the first rotating shaft (14), second through holes are formed in the inner walls of two sides of the first empty groove, the two second through holes are respectively communicated with the two first sliding grooves (7), threaded holes are formed in the two first sliding blocks (8), the same two-way screw rod (13) is installed in the two threaded holes, a second bevel gear (17) is fixedly sleeved on the outer side of the two-way screw rod (13), and the second bevel gear (17) is meshed with the first bevel gear (16).

4. The centrifugal layer flash tank of the frame-closing and glue-tearing machine according to claim 1, characterized in that a motor (19) is fixedly installed on the inner wall of the bottom of the second empty groove (18), a third through hole is formed on the inner wall of the bottom of the rotary groove, the third through hole is communicated with the second empty groove (18), a worm (20) is rotatably installed in the third through hole, and two ends of the worm (20) are respectively fixedly connected with an output shaft of the motor (19) and the bottom of the connecting plate (5).

5. The centrifugal layer flash tank of the frame-closing glue tearing machine according to claim 1, wherein a fourth through hole is formed in an inner wall of one side of the second hollow groove (18), the fourth through hole is communicated with the fourth hollow groove, a second rotating shaft (21) is rotatably installed in the fourth through hole, a worm wheel (22) is fixedly installed at one end of the second rotating shaft (21), the worm wheel (22) is meshed with the worm (20), a rotating disc (23) is fixedly installed at the other end of the second rotating shaft (21), and a connecting column (24) is fixedly connected to one side of the rotating disc (23).

6. The centrifugal layer flash tank of the frame-closing glue tearing machine according to claim 1, wherein a third chute is formed in the inner wall of the top of the fourth hollow groove, the third chute is communicated with the third hollow groove (27), a toothed bar (26) is slidably mounted in the third chute, a rectangular bar (25) is slidably mounted in the fourth hollow groove, the top of the rectangular bar (25) is fixedly connected with one end of the toothed bar (26), a waist-shaped groove is formed in the outer side of the rectangular bar (25), and the outer side of the connecting column (24) is slidably connected with the inner wall of the waist-shaped groove.

7. The centrifugal layer flash tank of the frame-closing glue tearing machine according to claim 1, wherein both sides of the air outlet (30) are fixedly connected with a third rotating shaft (28), a fifth through hole is formed in the inner wall of one side of the third empty groove (27), the outer side of the third rotating shaft (28) is slidably connected with the inner wall of the fifth through hole, a gear (29) is fixedly mounted at one end of the third rotating shaft (28), and the gear (29) is meshed with the rack (26).

8. The centrifugal layer flash tank of the frame-closing glue tearing machine according to claim 1, wherein fixing rods (32) are fixedly mounted on the inner walls of the two sides of the drying box (3), one end of each of the two fixing rods (32) is fixedly connected with the same fan (34), and a plurality of electric heating rods (33) are fixedly mounted in the drying box (3).