CN114280800B - Space-time shaping device, space-time shaping system and method - Google Patents
Space-time shaping device, space-time shaping system and method Download PDFInfo
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- CN114280800B CN114280800B CN202111592795.6A CN202111592795A CN114280800B CN 114280800 B CN114280800 B CN 114280800B CN 202111592795 A CN202111592795 A CN 202111592795A CN 114280800 B CN114280800 B CN 114280800B
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Abstract
The invention discloses a space-time shaping device, a space-time shaping system and a method, which solve the problems of the prior laser shaping and addingThe technical scheme cannot simultaneously consider the problems of time domain shaping and space domain shaping, and the space-time shaping device comprises a spectroscope and an SLM; an antireflection film is plated on the front surface of the spectroscope, and a spectroscopic film is plated on the rear surface of the spectroscope; the SLM is arranged behind the spectroscope, and the distance between the front surface of the SLM and the rear surface of the spectroscope is delta L; loading a reflection hologram on the SLM, or loading the reflection hologram and a airspace shaping hologram simultaneously; after the original laser pulse is subjected to space-time shaping treatment by a spectroscope and an SLM, a plurality of sub-pulses are generated, and the time delay between every two adjacent sub-pulses is delta t; Δt=n 0 X 2 DeltaL/c; wherein n is 0 The refractive index of the environment where the space-time shaping device is located, and c is the light speed.
Description
Technical Field
The invention belongs to the technical field of laser processing, and particularly relates to a space-time shaping device, a space-time shaping system and a space-time shaping method
Background
Laser is a further important invention of human beings after atomic energy, computers and semiconductors, has ultra-high power, ultra-wide frequency spectrum and ultra-short time characteristics, and is one of the most serious inventions of physics in the 20 th century.
The world's first titanium gem femtosecond laser gives the unprecedented high time resolution of laser and extreme physical conditions of strong electric field/strong magnetic field/high pressure and high temperature. However, some application fields require not only the femtosecond pulse with short duration and high peak power, but also the time domain waveform of the femtosecond pulse and the spatial distribution of the femtosecond pulse, and thus, the time domain shaping and the spatial domain shaping of the femtosecond laser pulse are required.
The time domain shaping is to modulate the spectrum intensity distribution and the spectrum phase distribution of the femtosecond pulse so as to realize the control of the time domain waveform of the femtosecond laser pulse, shape one laser pulse into a plurality of sub-pulses, and shape the time delay among the sub-pulses, the number of the sub-pulses and the energy of the sub-pulses according to the actual needs.
Representative of these are pulse shaping systems based on liquid crystal spatial light modulators, acousto-optic programmable dispersion filters (AOPDFs), micro-electromechanical mirrors (MEMMs) and micro-mechanical deformable mirrors (MMDMs), which are controlled by computer programs to effect pulse shaping. The system mainly comprises a 4f line zero dispersion femtosecond pulse shaping system, a 4f line femtosecond pulse waveform shaping system, an acousto-optic crystal-based acousto-optic programmable dispersion filtering (AOPDF) shaping system and an optical fiber dispersion modulation-based femtosecond pulse shaping system. The principle of the zero dispersion 4f line femtosecond pulse time domain waveform shaping system is shown in fig. 1:
wherein G1 and G2 represent grating pairs with identical parameter structures, L1 and L2 represent two Fourier lenses, and the focal lengths of the two Fourier lenses are identical; SLM1 and SLM2 represent an amplitude-type liquid crystal spatial light modulator and a phase-type liquid crystal spatial light modulator, respectively, FP represents the fourier plane, and H, M, L represents the high, medium and low frequency components of the pulse, respectively.
The airspace shaping is to change the ray tracing direction by the principle of geometrical optics or diffraction optics, thereby changing the energy distribution of laser to the space, changing the laser beam with Gaussian distribution into the required light distribution, and most commonly shaping into a flat-top beam with uniform distribution of intensity in a certain range. Fig. 2 is a light intensity cross-sectional view of an ideal gaussian beam, and fig. 3 is a light intensity cross-sectional view of an ideal flat-top beam.
Current beam shaping techniques are mainly implemented using physical optics or geometrical optics principles. The lens comprises an aspheric lens method and a birefringent lens group method which utilize refraction or transmission principles in geometrical optics, and belongs to the category of geometrical optics; and a microlens array method, a diffraction optical element method, and a liquid crystal spatial light modulator shaping method based on diffraction theory, belonging to the category of physical optics.
The femtosecond laser pulse of time domain shaping and space domain shaping can deeply influence the processes of material phase change and the like due to the flexible and changeable characteristics, and the method provides greater convenience for realizing high-precision, high-quality and high-efficiency processing in material processing. In particular, the method has obvious advantages (such as glass and silicon wafer cutting) in precision drilling, scribing, cutting or marking, and in addition, laser shaping has become one of the most important research subjects in the field of ultrafast laser research, and has been widely applied to the application fields of data processing, information optical storage, laser radar, nonlinear optics, atomic optics, material science and the like.
For example: the space flat-top beam is also widely applied to the fields of optical communication, electronic acceleration, material processing and the like at present, the time domain shaping of the femtosecond pulse can improve harmonic efficiency in nonlinear optics, the space shaping can also improve higher harmonic generation efficiency, the control aspect of the distribution of the femtosecond pulse space wavefront optical field can effectively control the distribution of the femtosecond wavefront optical field to generate the femtosecond flat-top pulse, excite a gas medium to obtain 220as ultra-short pulse, and the hollow beam has great application value for optical trapping, laser guiding, atomic etching (optical tweezers or optical pincers) control biological cells, medium particles and the like.
In summary, the femtosecond laser shaping plays an important role in the application field of the femtosecond laser as a technical approach for effectively changing the time domain waveform and the spatial light field distribution of the femtosecond laser pulse beam, but the technology capable of simultaneously realizing the time domain shaping and the space domain shaping is not found to be disclosed at present, so that a processing method and a processing device capable of simultaneously realizing the time domain shaping and the space domain shaping need to be provided so as to expand the laser processing capability and the application field thereof.
Disclosure of Invention
The invention provides a space-time shaping device, a space-time shaping system and a space-time shaping method, which are used for solving the problem that the existing laser shaping processing technology cannot simultaneously consider time domain shaping and space domain shaping.
The specific technical scheme of the invention is as follows:
a space-time shaping device comprises a spectroscope and an SLM;
an antireflection film is plated on the front surface of the spectroscope, and a spectroscopic film is plated on the rear surface of the spectroscope;
the SLM is arranged behind the spectroscope, and the distance between the front surface of the SLM and the rear surface of the spectroscope is delta L;
loading a reflection hologram on the SLM, or loading the reflection hologram and a airspace shaping hologram simultaneously;
after the original laser pulse is subjected to space-time shaping treatment by a spectroscope and an SLM, a plurality of sub-pulses are generated, and the time delay between every two adjacent sub-pulses is delta t;
△t=n 0 ×2△L/c；
wherein n is 0 Is provided with a space-time shaping deviceThe refractive index of the environment, c is the speed of light.
Further, the SLM may be loaded with a time delay hologram for increasing the duration of the time delay.
Further, the anti-reflection rate of the anti-reflection film in the spectroscope is more than or equal to 98%, and the spectroscope ratio of the spectroscope is 1:1.
Further, the spacing between the front surface of the SLM and the back surface of the beam splitter is adjustable.
The invention also provides a space-time shaping system, which comprises a laser, a semi-transparent semi-reflecting mirror, a light collecting box and the space-time shaping device;
the laser is used for emitting initial laser;
the half-mirror splits the initial laser pulse into a beam of reflected light and transmitted light, wherein the reflected light is absorbed by the light collecting box, and the transmitted light enters the space-time shaping device to carry out time domain shaping and space domain shaping, so that a plurality of sub-pulses are generated, and the time delay between every two adjacent sub-pulses is delta t;
△t=n 0 ×2△L/c；
wherein: n is n 0 The refractive index of the environment where the space-time shaping device is located, and c is the light speed.
In addition, the invention also provides a space-time shaping method of the space-time shaping system, which comprises the following implementation steps:
step 1: the initial laser pulse emitted by the laser is divided into a beam of reflected light and a beam of transmitted light after passing through the half-mirror, the reflected light is absorbed by the light collecting box, and the transmitted light is transmitted to the space-time shaping device;
step 2: the transmitted light is transmitted through the front surface of the spectroscope, and is divided into two beams on the rear surface of the spectroscope, one beam is directly reflected to serve as a first sub-pulse, the other beam is transmitted to the SLM, the SLM is reflected back to the rear surface of the spectroscope after being subjected to primary airspace shaping, the rear surface of the spectroscope is divided into two beams again, one part of the transmitted light is transmitted to form a second sub-pulse, and the other part of the transmitted light is reflected to the SLM again, so that the time domain and airspace shaping of the primary laser pulse are realized;
step 3: in the step 2, part of the light beam reflected to the SLM again is reflected to the rear surface of the spectroscope after the second airspace shaping, part of the light beam is transmitted to form a third sub-pulse, and part of the light beam is reflected to the SLM;
step 4: continuously repeating the process of the step 3, and finally generating a plurality of sub-pulses, wherein the time delay between every two adjacent sub-pulses is delta t;
△t=n 0 ×2△L/c；
wherein: n is n 0 The refractive index of the environment where the space-time shaping device is located, and c is the light speed.
Further, the method further comprises step 5: and detecting the shaped sub-pulse time interval by adopting an autocorrelation instrument, and if the shaped sub-pulse time interval has an error delta, feeding the error back to the SLM, superposing an optical path difference phase diagram on the surface of the SLM, and compensating the delay error.
The invention has the beneficial effects that:
1. the invention adopts the spectroscope with the front surface plated with the antireflection film and the rear surface plated with the spectroscope and forms a space-time shaping device by recording different holograms on the SLM, and can realize the space and time shaping device at the same time, thereby greatly widening the laser processing capability and the application field thereof.
2. The space-time shaping device solves the problems that the beam combination difficulty of two sub-pulses of the traditional Michelson optical path is high, the requirement on the installation precision of a beam combining lens is extremely high, the debugging is difficult, and the shaping failure is caused by the fact that the two sub-pulses cannot be combined easily.
3. The shaping mode of the sub-pulse common-path can generate a plurality of sub-pulses before energy failure to form a sub-pulse train, and the time delay between the sub-pulse trains can be flexibly regulated and controlled by adjusting the interval between the SLM and the spectroscope according to actual requirements.
4. The space shaping function of the invention is strong: the laser light spot can be shaped into flat-top lights such as a circle, a rectangle, a triangle, a pentagon and the like; in addition, the space-time shaping device can also realize the adjustment of other parameters between the sub-pulses, such as the regulation and control of polarization states (linear polarization, circular polarization, angular polarization and radial polarization).
Drawings
Fig. 1 is a schematic diagram of a zero dispersion 4f line femtosecond pulse time domain waveform shaping system.
Fig. 2 is a light intensity cross-sectional view of an ideal gaussian beam.
Fig. 3 is a light intensity cross-sectional view of an ideal flat-top beam.
Fig. 4 is a schematic diagram of a shaping system according to the present invention.
The reference numerals are as follows:
1-laser, 2-semi-transparent semi-reflecting mirror, 3-light collecting box, 4-spectroscope and 5-SLM.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The embodiment discloses a space-time shaping device, which solves the problem of the lack of the existing means for simultaneously realizing time domain shaping and space domain shaping, and specifically comprises a spectroscope and an SLM (spatial light modulator);
an antireflection film is plated on the front surface of the spectroscope, and a spectroscopic film is plated on the rear surface of the spectroscope; the SLM is arranged behind the spectroscope, and the distance between the front surface of the SLM and the rear surface of the spectroscope is delta L; loading a reflection hologram on the SLM, or loading the reflection hologram and a airspace shaping hologram simultaneously; after the original laser pulse is subjected to space-time shaping treatment by a spectroscope and an SLM, a plurality of sub-pulses are generated, and the time delay between every two adjacent sub-pulses is delta t; Δt=n 0 ×2△L/c；
Wherein n is 0 The refractive index of the environment where the space-time shaping device is located, and c is the light speed.
Based on the above-mentioned space-time shaping device, this embodiment also provides a set of space-time shaping system, as shown in fig. 4, which is composed of a laser 1, a half mirror 2, a light collecting box 3, and a space-time shaping device,
the laser 1 is used for emitting initial laser light; the half mirror 2 splits the initial laser pulse into a beam of reflected light and a transmitted light, wherein the reflected light is absorbed by the light collecting box 3, and the transmitted light enters the space-time shaping device for time domain shaping and space domain shaping.
The specific process of adopting the device to carry out shaping is as follows:
s1: the original laser is divided into a beam of reflected light and a beam of transmitted light after passing through the half-mirror 2, the reflected light is absorbed by the light collecting box 3, and the transmitted light is transmitted to the space-time shaping device;
s2: the transmitted light is divided into two beams on the rear surface of the spectroscope 4 after being transmitted through the front surface of the spectroscope 4, one beam is directly reflected to serve as a first sub-pulse, the other beam is transmitted to the SLM5, the SLM5 is reflected back to the rear surface of the spectroscope 4 after being subjected to first airspace shaping, the other beam is divided into two beams again on the rear surface of the spectroscope 4, a part of the transmitted light forms a second sub-pulse, and the other part of the transmitted light is reflected to the SLM5 again, so that the time domain and airspace shaping of the first laser pulse are realized;
s3: in step S2, a part of the light beam reflected to the SLM5 again is reflected back to the rear surface of the beam splitter 4 after the second spatial domain shaping in the SLM5, a part of the light beam is transmitted to form a third sub-pulse, and a part of the light beam is still reflected back to the SLM5;
s4: continuously repeating the process of the step S3, and finally generating a plurality of sub-pulses, wherein the time delay between every two adjacent sub-pulses is delta t; Δt=n 0 ×2△L/c；
Wherein: n is n 0 The refractive index of the environment where the space-time shaping device is located, and c is the light speed;
s5: and detecting the shaped sub-pulse time interval by adopting an autocorrelation instrument and other instruments, if the shaped sub-pulse time interval has an error delta, feeding the error back to the SLM, and compensating the delay error by superposing an optical path difference phase diagram on the surface of the SLM.
Also to be described is:
in this embodiment, the light splitting ratio of the half mirror 2 is 1:1, and the reason for this is to strictly ensure that the laser is perpendicular to the light beam incident on the space-time shaping device, so that accurate beam combination between sub-pulses can be ensured;
in this embodiment, the anti-reflection film on the front surface of the spectroscope 4 has an anti-reflection ratio of not less than 98%, and the rear surface of the spectroscope has a transmission/reflection ratio of 1:1, so that a plurality of sub-pulse neutron pulses 1: sub-pulse 2: the energy ratio of the sub-pulse 3 is 1:0.5:0.25.
In this embodiment, the beam splitter 4 and the SLM5 are controlled by a one-dimensional linear guide, and the interval Δl between them can be adjusted, so as to implement different time delays Δt;
in this embodiment, the SLM5 has two modes of operation, the first mode of operation being: only realizing the time domain shaping, the SLM only loads the reflection hologram, the function is a reflector, if the adjustment interval of the one-dimensional linear guide rail is limited, the time delay hologram Deltal can be loaded on the SLM, and the time delay between the sub-pulses can be changed as follows: Δt=n 0 X (Δl+ +Δl)/c; the second mode is: and meanwhile, the airspace shaping is realized, and then the airspace shaping hologram is overlapped on the basis of the reflection hologram, so that flat top light is realized.
Claims (4)
1. A space-time shaping system, characterized by: the device comprises a laser, a semi-transparent semi-reflecting mirror, a light collecting box and a time-space shaping device;
the laser is used for emitting initial laser;
the space-time shaping device comprises a spectroscope and a Spatial Light Modulator (SLM); an antireflection film is plated on the front surface of the spectroscope, and a spectroscopic film is plated on the rear surface of the spectroscope; the Spatial Light Modulator (SLM) is arranged behind the spectroscope, and the distance between the front surface of the SLM and the rear surface of the spectroscope is delta L;
the spatial light modulator SLM has two modes of operation, the first mode being: only realizing time domain shaping, loading a reflection hologram on a Spatial Light Modulator (SLM), and functioning as a reflector; the second mode is: realizing time domain shaping and space domain shaping, and loading a reflection hologram and a space domain shaping hologram on a Spatial Light Modulator (SLM) at the same time;
the half-mirror splits the initial laser pulse into a beam of reflected light and transmitted light, wherein the reflected light is absorbed by the light collecting box, the transmitted light enters the space-time shaping device to carry out time domain shaping and space domain shaping, and a plurality of sub-pulses are generated after the time domain shaping and the space domain shaping of the spectroscope and the spatial light modulator SLM, and the time delay between every two adjacent sub-pulses is delta t;
△t＝n 0 ×2△L/c；
wherein: n is n 0 The refractive index of the environment where the space-time shaping device is located, and c is the light speed;
the split ratio of the semi-transparent semi-reflecting mirror is 1:1;
the space-time shaping method of the space-time shaping system comprises the following steps:
step 1: the initial laser pulse emitted by the laser is divided into a beam of reflected light and a beam of transmitted light after passing through the half-mirror, the reflected light is absorbed by the light collecting box, and the transmitted light is transmitted to the space-time shaping device;
step 2: the transmitted light is transmitted through the front surface of the spectroscope, and then is divided into two beams on the rear surface of the spectroscope, one beam is directly reflected to serve as a first sub-pulse, the other beam is transmitted to the Spatial Light Modulator (SLM), the Spatial Light Modulator (SLM) is reflected back to the rear surface of the spectroscope after being subjected to first time domain and space domain shaping, the rear surface of the spectroscope is divided into two beams again, a part of the two beams are transmitted to form a second sub-pulse, and the other part of the two beams are reflected to the Spatial Light Modulator (SLM) again, so that the time domain and space domain shaping of the first laser pulse is realized;
step 3: in the step 2, part of the light beam reflected to the spatial light modulator SLM again is reflected to the rear surface of the spectroscope after being subjected to the second time domain and space domain shaping, part of the light beam is transmitted to form a third sub-pulse, and part of the light beam is reflected to the spatial light modulator SLM;
step 4: continuously repeating the process of the step 3, and finally generating a plurality of sub-pulses, wherein the time delay between every two adjacent sub-pulses is delta t;
step 5: and detecting the shaped sub-pulse time interval by adopting an autocorrelation instrument, and if an error delta exists in the shaped sub-pulse time interval, feeding back the error delta to a Spatial Light Modulator (SLM), and superposing an optical path difference phase diagram on the surface of the Spatial Light Modulator (SLM) to compensate the delay error.
2. A space-time shaping system according to claim 1, characterized in that: the spatial light modulator SLM is loaded with a time delay hologram for increasing the duration of the time delay.
3. A space-time shaping system according to claim 2, characterized in that: the anti-reflection rate of the anti-reflection film in the spectroscope is more than or equal to 98%, and the spectroscope ratio of the spectroscope is 1:1.
4. A space-time shaping system according to claim 3, characterized in that: the spacing between the front surface of the spatial light modulator SLM and the back surface of the beam splitter is adjustable.
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