CN114279496A - Gas optical isolation device and method thereof - Google Patents
Gas optical isolation device and method thereof Download PDFInfo
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- CN114279496A CN114279496A CN202111555698.XA CN202111555698A CN114279496A CN 114279496 A CN114279496 A CN 114279496A CN 202111555698 A CN202111555698 A CN 202111555698A CN 114279496 A CN114279496 A CN 114279496A
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Abstract
The invention provides a gas optical isolation device, which comprises an absorption cell for providing a working space for target gas, window mirrors for light conduction arranged at two sides of the absorption cell, a circulating gas path pipeline communicated with the absorption cell, a fan communicated with the circulating gas path pipeline and used for providing circulating power for the target gas, a heat exchange component communicated with the circulating gas path pipeline and used for controlling the temperature of the target gas, and an air extraction opening communicated with the circulating gas path pipeline and used for vacuumizing the circulating gas path pipeline, the device comprises a charging port, a monitoring component and a control component, wherein the charging port is communicated with a circulating gas path pipeline and used for providing target gas, the monitoring component is used for monitoring the gas state and the heat exchange component data in the circulating gas path pipeline, the control component is electrically connected with the monitoring component and used for electrical control, and the whole device has the advantages of good thermal stability, high damage threshold value, good long-time working performance and suitability for a high-power laser system. The invention also provides a gas optical isolation method.
Description
Technical Field
The invention relates to the field of optics, in particular to a gas optical isolation device and a method thereof.
Background
An Extreme Ultraviolet (EUV) lithography machine of 13.5nm based on Laser Produced Plasma (LPP) technology has higher lithography resolution than the previous generation 193nm deep uv excimer lithography machine, and is a core device for manufacturing a new generation of large-scale integrated circuits. Due to the urgent need of chip processing industry for improving productivity, the method can be used for high repetition frequency and short pulse CO in LPP-EUV system2Laser output power and stability are placing ever higher demands.
High repetition frequency, short pulse, high power CO2The laser cannot be directly generated by a single laser at the present stage, and a technical approach of a Master Oscillator Power-Amplifier (MOPA) is mainly adopted, that is, a high repetition frequency and short pulse seed laser passes through a multi-stage CO2The laser amplifier amplifies the power to obtain high-power laser. For a multistage amplification system, noise light generated by spontaneous emission light amplification, backward reflection and scattering of various optical devices in an optical path, light leakage and the like seriously influences the stability of the MOPA system, and corresponding measures are required to be used for isolating the noise light. The Faraday isolator has the advantages of small insertion loss, high isolation and the like, is a common isolator for visible light and near infrared bands, is limited by the performance of magneto-optical materials in a long-wave (10.6um) infrared band, and does not have a mature long-wave Faraday isolator suitable for a high-power MOPA system at present.
CO in the long-wave infrared2In the laser MOPA system, in order to ensure stable operation of the main oscillation laser and the amplifier, an inter-stage isolator must be used to eliminate or suppress noise light generated by Amplified Spontaneous Emission (ASE) in the MOPA system, back reflection of an optical element, and the like. SF6The gas is a commonly used long-wave laser absorbing gas, SF6The gas isolator has a high damage threshold, but has a problem of gas temperature rise when operated for a long time or applied to a high-power MOPA system. When the gas temperature deviates from the optimal working temperature, the service life of each vibration energy level particle is changed, the number density of each energy level particle in a stable state is correspondingly changed, a series of problems of reduction of absorption coefficient and the like are generated, the isolation degree of the isolator is reduced, and SF is finally influenced6Normal use of the isolation.
Disclosure of Invention
The invention provides a gas optical isolation device, which comprises an absorption cell for providing a working space for gas, window mirrors arranged at two sides of the absorption cell and used for transmitting light, a circulating gas path pipeline communicated with the absorption cell, a fan communicated with the circulating gas path pipeline and used for providing circulating power for the target gas, a heat exchange component communicated with the circulating gas path pipeline and used for controlling the temperature of the target gas, an air suction opening communicated with the circulating gas path pipeline and used for vacuumizing the circulating gas path pipeline, an air charging opening communicated with the circulating gas path pipeline and used for providing the target gas, a monitoring component used for monitoring the gas state in the circulating gas path pipeline and the data of the heat exchange component, and a control component electrically connected with the monitoring component and used for electrical control.
As an optional scheme, the absorption tank adopts a hollow cube structure, two window mirrors are symmetrically arranged on two opposite surfaces of the cube structure, air inlets and air outlets are respectively arranged on the vertical surfaces of the two window mirrors, and the air inlets and the air outlets are respectively communicated with the circulating air path pipeline.
As an alternative, the air inlet and the air outlet are symmetrically arranged on the absorption tank.
As an optional scheme, the window mirror is a ZnSe window mirror coated with an antireflection film.
As an optional scheme, the heat exchange assembly comprises at least one heat exchanger, a circulating water path communicated with the heat exchanger, and a water cooling machine communicated with the circulating water path and used for providing circulating power, the water cooling machine is electrically connected with the control assembly, and the heat exchanger is communicated with the air inlet side or the air outlet side of the fan.
As an optional scheme, the heat exchange assembly has two heat exchangers, and the two heat exchangers are respectively communicated with the air inlet side and the air outlet side of the fan.
As an optional scheme, the device comprises a vacuumizing assembly communicated with the air pumping port and an air storage assembly communicated with the air charging port, wherein the vacuumizing assembly comprises a vacuum pump and a first valve, the first valve is respectively communicated with the air pumping port and the vacuum pump, the air storage assembly comprises an air storage tank and a second valve, and the second valve is respectively communicated with the air charging port and the air storage tank.
As an alternative, the target gas is SF6Gas or containing SF6The mixed gas of (1).
As an optional scheme, the monitoring component includes an anemometer, a gas temperature sensor, a water flow meter and a water temperature sensor, when the water temperature is higher than a first target temperature threshold and the gas temperature is normal, the control component controls the heat exchange component to increase the heat exchange flow, when the water temperature is normal and the gas temperature is higher than a second target temperature threshold, the control component controls the fan to increase the gas flow, and when the air temperature is higher than the second target temperature threshold and the water temperature is higher than the first target temperature threshold, the control component controls the fan and the heat dissipation component to synchronously increase the flow.
Another aspect of the present invention provides a gas optical isolation method, wherein the method is applied to the gas optical isolation device.
The embodiment of the invention provides a gas optical isolation device, which comprises an absorption cell for providing a working space for target gas, window mirrors arranged at two sides of the absorption cell and used for transmitting light, a circulating gas path pipeline communicated with the absorption cell, a fan communicated with the circulating gas path pipeline and used for providing circulating power for the target gas, a heat exchange component communicated with the circulating gas path pipeline and used for controlling the temperature of the target gas, an air suction opening communicated with the circulating gas path pipeline and used for vacuumizing the circulating gas path pipeline, an air charging opening communicated with the circulating gas path pipeline and used for providing the target gas, a monitoring component used for monitoring the gas state in the circulating gas path pipeline and the data of the heat exchange component, and a control component electrically connected with the monitoring component and used for electrically controlling, wherein the whole device can be used for a long-wave infrared noise scene, and has good thermal stability, The laser has the advantages of high damage threshold, good long-time working performance and suitability for high-power laser systems, and can be suitable for MOPA systems of different systems by adjusting absorption gas and buffer gas, and a passive isolation mode is adopted without complex optical modulation elements and control systems.
Drawings
FIG. 1 is a schematic structural diagram of a gas optical isolation device provided in an embodiment of the present invention;
FIG. 2 is a diagram of SF in a gas optical isolation device according to an embodiment of the present invention6A molecular ground state absorption energy level structure schematic diagram;
FIG. 3 is a schematic flow chart of the operation of a gas optical isolation device provided in an embodiment of the present invention;
fig. 4 is a schematic control flow chart of a gas optical isolation device according to an embodiment of the present invention.
Reference numerals: circulating gas circuit pipeline 1, absorption cell 2, window mirror 3, emergent laser 4, monitoring component 5, control component 6, first valve 7, vacuum pump 8, incident laser 9, first heat exchanger 10, circulating water route 11, water-cooling machine 12, fan 13, second heat exchanger 14, second valve 15, gas holder 16
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The terms "first," "second," "third," "fourth," and the like in the description and in the claims, as well as in the drawings, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that the embodiments described herein may be practiced otherwise than as specifically illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Referring to fig. 1, in an embodiment of the present invention, a gas optical isolation device is provided, where the gas optical isolation device includes an absorption cell 2 for providing a working space for a target gas, window mirrors 3 for passing light, which are disposed at two sides of the absorption cell 2, a circulating gas path pipeline 1 communicated with the absorption cell 2, a fan 13 communicated with the circulating gas path pipeline 1 for providing circulating power for the target gas, a heat exchange assembly communicated with the circulating gas path pipeline 1 for performing temperature control on the target gas, an air exhaust opening communicated with the circulating gas path pipeline 1 for evacuating the circulating gas path pipeline 1, an air charging opening communicated with the circulating gas path pipeline 1 for providing the target gas, a monitoring assembly 5 for monitoring a gas state and heat exchange assembly data in the circulating gas path pipeline 1, and a control assembly 6 electrically connected with the monitoring assembly 5 for performing electrical control, and the whole device forms a closed gas path capable of gas circulation, before the whole device works, the circulating gas path pipeline 1 and the absorption pool 2 are pumped into a vacuum state through the pumping hole, and the target gas is supplemented for the gas path through the charging hole after the whole gas path enters the vacuum state. The absorption tank 2 is filled with target gas to play a role in absorbing and suppressing small-signal noise light, and the fan 13 is a power system of the whole device gas circuit, so that the target gas in the whole gas circuit stably flows to update and reduce the temperature of the target gas after bleaching and temperature rise. The monitoring component 5 plays a role in monitoring the state of the target gas, measures the pressure and the proportion of the target gas before the device operates, measures parameters such as the flow rate and the temperature of the gas after the device operates, and provides a basis for evaluating the isolation performance.
Alternatively, the circulating gas path pipeline 1 may be a solid pipeline or a corrugated pipe made of metal or the like, so as to provide a pipeline constraint for the flow of the target gas, and the structural design of the inner wall of the circulating gas path pipeline 1 should ensure the uniformity and stability of the flow of the target gas, if no obvious protrusion or narrowing occurs, and other structures, those skilled in the art should understand that the present disclosure is not limited herein.
In the embodiment, the absorption cell 2 adopts and has hollow square structure the symmetry sets up two window mirrors 3 on two of them opposite faces of square structure set up air inlet and gas outlet respectively on two window mirror 3 vertically faces, air inlet and gas outlet respectively with circulation gas circuit pipeline 1 intercommunication, further, air inlet and gas outlet can the symmetry set up on the absorption cell 2, can keep perpendicular with the circulation direction of target gas after the light source passes through window mirror 3 and gets into absorption cell 2 like this, can strengthen the absorption effect of target gas to a certain extent.
Optionally, the window mirror 3 may provide an airtight environment for the target gas, so as to ensure that the incident laser 9 passes through in a low-loss state, the incident laser 9 passes through the absorption cell, after filtering out small-signal noise light, the outgoing laser 4 passes through the window mirror on the other side, taking an application environment of 10.6 μm as an example, the window mirror 3 may be a ZnSe window mirror coated with an antireflection film, the antireflection film may improve light transmission efficiency, and ZnSe zinc selenide (ZnSe) is a chemically inert material, which has good transmission performance in a range of 0.5 to 22 μm, and has the characteristics of small optical transmission loss, high purity, strong environmental adaptability, easy processing, uniform refractive index, good consistency, and the like. It is understood that the material of the window mirror 3 can be flexibly selected according to different use environments, and is not limited thereto.
In this embodiment, the heat exchange assembly includes at least one heat exchanger, the circulation water route 11 that communicates with the heat exchanger, and the water cooling machine 12 that the circulation water route 11 communicates and is used for providing circulating power, the water cooling machine 12 includes compressor and water pump, the coolant adopts water, certainly can also select other coolant according to the demand, do not limit this, the water cooling machine 12 is connected with the control assembly 6 electricity, the heat exchanger communicates with the side of admitting air or giving vent to anger of fan 13, control assembly 6 then can control water cooling machine 12 to increase discharge when monitoring that the temperature of water is higher than first target temperature threshold value and has reached the purpose that reduces the temperature of water.
Further, the heat exchange assembly has two heat exchangers, specifically a first heat exchanger 10 and a second heat exchanger 14, and the two heat exchangers are respectively communicated with the air inlet side and the air outlet side of the fan 13. Specifically, the first heat exchanger 10 is communicated with the air outlet side of the fan 13, the second heat exchanger 14 is communicated with the air inlet side of the fan 13, the heated target gas is cooled by a water path, and meanwhile, the function of rectifying the target gas is achieved, and the temperature of the circulating gas is guaranteed.
In this embodiment, the blower 13 may be a roots blower or a turbo blower, and provides power for the circulation flow of the target gas, which may be selected according to the requirement, and is not limited thereto.
As a preferred scheme, the gas optical isolation device further comprises a gas storage component for supplying gas and a vacuumizing component for vacuumizing, the aforementioned device needs to be vacuumized before being used, the vacuumizing component is communicated with the circulating gas path pipeline 1 through a pumping hole, the vacuumizing component comprises a vacuum pump 8 and a first valve 7, the first valve 7 is respectively communicated with the pumping hole and the vacuum pump 8, when the vacuumizing is needed, the first valve 7 is opened, the vacuum pump 8 is started, and the first valve 7 and the vacuum pump 8 are closed after the circulating gas path pipeline 1 and the absorption cell 2 enter a vacuum state, so that the vacuumizing operation is completed. After the vacuumizing operation is completed, the target gas needs to be supplemented to the circulating gas path pipeline 1 and the absorption pool 2, the gas storage assembly is communicated with the circulating gas path pipeline 1 through the inflation inlet and comprises a gas storage tank 16 and a second valve 15, the second valve 15 is communicated with the inflation inlet and the gas storage tank 16 respectively, when the gas is supplemented, the second valve 15 is opened, the gas storage tank 16 inflates the circulating gas path pipeline 1, and when the circulating gas path pipeline 1 and the absorption pool 2 are inflated, the second valve 15 is closed.
The target gas mentioned in the scheme of the invention is used for isolating light and can be selected according to requirements, and the target gas is sulfur hexafluoride SF6Gas or containing SF6The mixed gas of (1) may be used for an optical isolator of other wavelength bands by replacing the target gas or adding another buffer gas such as: n is a radical of2、He、kr、Ar、CO2The target gas may be thermal CO for long-wave laser of 9-11 μm2A gas; for shorter wavelengths such as about 200nm, aromatic compounds such as acridine, nitrobenzene, etc. at 248nm can be used; acetylene gas is used for 1.5 μm, etc., and can be selected as required, which is not described herein.
Further, monitoring component 5 includes anemograph, gas temperature sensor, water flowmeter and temperature sensor, and when the temperature was higher than first target temperature threshold value and gas temperature was normal, the control group heat exchange component increase heat transfer flow, when the temperature was normal and gas temperature was higher than second target temperature threshold value, control component 6 control fan 13 increase gas flow, work as temperature is higher than second target temperature threshold value just when the temperature was higher than first target temperature threshold value, control component 6 control fan 13 with radiator unit increases the flow in step.
It should be noted that the monitoring component 5 can also be a pressure transmitter, a vacuum gauge, a temperature transmitter, a wind speed measuring instrument or a flow meter, etc., and is used for monitoring the state of the target gas, evaluating the working state and the isolation performance of the device, and simultaneously outputting a measuring signal to transmit to the control component 6. The control component 6 plays the roles of monitoring, controlling, coordinating and displaying in the whole device, and ensures that the whole device coordinates orderly and safely operation according to set parameters and flows. The sensors of the monitoring assembly 5 transmit signals to the information receiving device, the signals including: atmospheric pressure, ratio, gas velocity of flow, gas temperature, gas flow, temperature, discharge etc. control program transmits feedback signal for each executive component, includes: the system comprises a vacuum pump 8, a water cooling machine 12, a fan 13, a first valve 7 and a second valve.
Referring to FIG. 2, SF is used as the target gas6The working method provided by the invention is described by taking gas as an example.
SF6Having nonlinear absorption capability in the long-wave infrared band, ground state SF6Molecule (v)0) Absorbing long-wave infrared laser energy (e.g. 10.6 μm CO) by stimulated absorption2Laser), the stimulated absorption cross section is denoted by σ, and then relaxes to the ground state through the processes of V-V resonance energy transfer and V-T energy transfer. Passing through SF with lower loss when incident pulse power is higher6Gas, and small signal noise light between two incident pulses is in high loss state, almost totally SF6And (4) absorbing the gas. SF6The small signal absorption coefficient at a center wavelength of 10.6 μm is about 0.5cm-1torr-1That is, as long as the product pL of the pressure in the absorption cell 2 and the optical path is greater than 8.7torr cm, more than 99% of small signal noise light can be absorbed, the small signal noise component between two pulses is effectively eliminated, the isolation effect is achieved, and simultaneously, SF6The gas also inevitably causes a problem of temperature rise.
Taking an incident light power of 500W as an example, the wavelength is 10.6 μm, the repetition frequency is 50kHz, and SF6Noise optical isolator using SF6Mixed gas of He and SF respectively6: he ═ 1:35 ═ 100 Pa: 3500Pa, absorption of small signal noise light more than 90%, main pulse transmittance more than 85%, gas path inner diameter of 50mm, 10% power absorption, gas temperature increase, absorption capacity decrease, and absorption of circulation deviceAnd the gas in the pool is updated and cooled. The minimum gas flow rate v can be calculated according to the following formula:
in the above formula, k is the absorption rate of the gas to the incident laser, P is the incident laser power, c is the specific heat capacity of the mixed gas, ρ is the mixed gas density, s is the area of the radial cross section of the circulating gas path pipeline 1, Δ T is the gas temperature rise, and in order to keep the gas temperature constant, the gas flow rate needs to be greater than the calculated value of the above formula, and in this example, the gas flow rate can be set to 100 m/s.
At SF6Buffer gas such as He and N can be additionally added into the gas according to requirements2The SF can be effectively reduced by the equal gas6The upper level relaxation time makes the absorption gas more suitable for high repetition frequency MOPA applications. SF6Has a relatively slow V-T relaxation rate of about 122 μ sTorr, and uses a single SF when the repetition frequency of the incident laser is relatively high, e.g., greater than 100kHz6The gas can not ensure that the relaxation time of the upper energy level is shorter than the time interval of two pulses, at the moment, inert gas is required to be added as buffer gas, and after the buffer gas is added, SF6Excitation level (v)3Vibrational level) relaxation rate is calculated as follows:
wherein the superscript V-T represents the V-T relaxation process, V-V represents the V-V relaxation process, X represents the buffer gas type, additions such as He, N2The effect of the isobuffer gas on the relaxation rates of the various energy levels is detailed in table 1.
TABLE 1 SF6Relaxation rate with buffer gas
In addition, the addition of the buffer gas can be increased appropriatelySmall signal absorption coefficient, e.g. of small signal noise light absorption coefficient alpha by addition of He0Lifting to 0.71cm-1torr-1Addition of N2So that the absorption and absorption of small signal noise light is increased to 0.91cm- 1torr-1. The transmittance of the small-signal noise light can be calculated according to the following formula:
T＝exp(-α0pL)
with reference to FIG. 3, the following is a case of using SF6The specific use steps of the gas as a gas optical isolation device are as follows:
using step one, the gas reservoir 16 is filled with the target gas: before the whole gas optical isolation device works, the target gas, which can be single SF (sulfur hexafluoride), needs to be filled into the gas storage tank 156The gas may also contain SF6If a gas mixture is used, the ratio of the components of the insufflation gas is first measured and controlled. Specifically, the following method can be adopted: due to the introduction of the mixed gas of SF6The air pressure is generally lower in proportion, SF6The pressure difference between the buffer gas and the buffer gas is large, and pressure transmitters or vacuum gauges with two measuring ranges are required. First filling with SF6Gas, the charging pressure of which is measured by a small-range high-precision pressure transmitter, such as a low-power laser, and filled SF6Less and high precision requirement, and the vacuum gauge can be used for measuring air pressure; the filling of SF can be manually stopped after the target air pressure is reached6And the gas can also be automatically controlled, and the gas is stopped to be inflated by the electromagnetic valve after the detected gas pressure reaches the target gas pressure. Filling SF6After the gas is filled, the buffer gas is filled in the same step, in order to ensure the accuracy of the pressure intensity of the filled gas, the gas can be filled at a slower speed by using a flow meter and a control assembly 6, and the gas is stopped from being filled when the pressure intensity of the gas reaches a target value.
Using step two, the vacuum pump 8 is operated: closing the second valve 15 corresponding to the gas storage tank 16, opening the first valve 7, and starting the vacuum pump 8, wherein the type of the vacuum pump 8 can be determined by the pressure accuracy of the charging gas, for example, when charging a higher gas pressure, the requirement for the initial vacuum degree can be properly relaxed, for example, when charging a mixed gas of 20kPa, an oilless mechanical pump can be used (1)For example, 0.04Pa) of ultimate vacuum, if the pressure of the charged mixed gas is lower, a vacuum pump 8 with higher ultimate vacuum degree is used to obtain the initial high vacuum environment, for example, charging low pressure SF6For gases, molecular pumps may be used. In addition, in order to ensure the stability of gas type and pressure during long-time operation, each vacuum device and each adapter device need to be subjected to leakage prevention and leakage detection treatment, and the vacuum leakage rate can be determined according to the pressure intensity of the charged air pressure and the continuous working time, such as the SF charged with 5Pa6The gas and continuous working time is longer than 10 hours, and the vacuum leakage rate is better than 0.1 Pa/hour.
Using step three, inflating the circulating gas path pipeline 1: waiting for the vacuum pump 8 to reduce the circulating gas path pipeline 1 to a vacuum state, checking the vacuum degree by the monitoring assembly 5, wherein the vacuum degree requirement is related to the pressure of the charged working gas, the smaller the pressure of the charged working gas is, the higher the vacuum degree requirement is, and the general vacuum degree is better than 0.5 Pa. After the vacuum degree reaches the standard, the first valve 7 and the vacuum pump 8 are respectively closed, a method for manually opening and closing the valves can be used, and the control assembly 6 can also be used for controlling the starting and the stopping of the valves and the vacuum pump. And opening the second valve 15 until the air storage tank 16 charges the pressure in the air path to the working pressure, wherein the pressure value can be checked by the monitoring component, and at the moment, closing the second valve 15, wherein the closing mode can be a mode of manually closing a mechanical valve, and can also be a mode of controlling the closing of an electromagnetic valve according to a pressure signal 17 of a pressure transmitter of the monitoring component 5.
Using step four, the water cooling machine 12 works: the method comprises the following steps of starting a power supply of the water cooler 12, setting a target temperature, setting a target water flow, waiting for the circulating water temperature to be reduced to the target temperature, wherein the target water temperature is generally equal to the gas setting temperature, and in addition, enough exchange area and efficiency of a water path and a gas path need to be ensured, and the heat exchange capacity of the target water flow needs to be larger than the sum of the heat production capacity and the heat absorption capacity of the whole gas path.
Using step five, the fan 13 works: and starting the fan 13, and starting the circular flow of the target gas in the gas path. The blower 13 generally uses a vacuum blower, and utilizes compressed gas to drive gas to flow, so as to replace and update the gas in the absorption tank, the blower type can be a Roots blower or a turbine blower, and the lowest flow of the blower is greater than the lowest flow required by the gas circuit of the whole device. In the embodiment, the blower is a Roots blower, the maximum flow is 300L/s, the flow valve pressure difference is 58Hpa, the air inlet caliber is 150mm, and the air outlet caliber is 150 mm.
Using step six, monitoring water temperature and gas temperature: after working for a period of time, the monitoring function of the device is started, signals collected by the anemometer (or the flowmeter) of the monitoring component 5, the gas temperature transmitter, the flowmeter of the water cooler 12 and the water temperature sensor are transmitted to the control component 6, the control component 6 processes the signals, and the feedback signals are transmitted to the fan 13 and the water cooler 12. If the water temperature is higher than the target water temperature and the gas temperature is normal, the control assembly 6 transmits a feedback signal to the water cooling machine 12 at the moment, and the flow of the water cooling machine 12 is increased; if the water temperature is normal and the gas temperature is higher than the target temperature, the control assembly 6 transmits a feedback signal to the fan 13 at the moment, and the working frequency of the fan 13 is increased to increase the gas flow; if the water temperature and the gas temperature are both higher than the target temperature, the control assembly 6 transmits a feedback signal to the fan 13 and the water cooling machine 12 at the same time; if the water temperature and the gas temperature are normal, no signal is output, the detection is continued after a period of time, and the time interval can be set to 30 s.
The use step seven: and starting the seed light and each stage of amplifier of the MOPA system, wherein the gas optical isolation device starts to play a role in absorbing small-signal noise light, and plays a role in isolating the noise light.
As described in the above using steps, the start-stop and control operation parameters of each execution module, including each first valve 7 and each second valve 15, the fan 13, the water cooler 12, and the like, may be manually controlled, and may be automatically controlled by the control component 6.
Referring to fig. 4, according to the principle of automatic control of the control module 6, the monitoring module 5 transmits information (a gas pressure signal 17, a gas proportioning signal 18, a gas flow rate signal 19, a gas temperature signal 20, and a water temperature signal 21) to the control module 6, the control module 6 transmits a feedback signal to the execution module 22 according to a set program input signal, and the execution module includes the electromagnetic first valve 7, the water cooler 12, the fan 13, the vacuum pump 15, and the electromagnetic second valve 15. The gas pressure signal 17, measured by the pressure sensor of the monitoring module, is transmitted to the control assembly 6. The gas proportioning signal 18, measured by the pressure sensor of the monitoring module, is transmitted to the control unit 6. The gas flow rate signal 19, measured by the pressure sensor of the monitoring module, is transmitted to the control module 6. The gas temperature signal 20, measured by the pressure sensor of the monitoring module, is transmitted to the control assembly 6. The water temperature signal 21, measured by the pressure sensor of the monitoring module, is transmitted to the control unit 6.
The embodiment of the present invention further provides a gas optical isolation method, wherein the method is applied to the gas optical isolation device, and a specific operation manner can be introduced in the above embodiment, which is not described herein again.
It is clear to those skilled in the art that, for convenience and brevity of description, the specific working processes of the above-described systems, apparatuses and units may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.
In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other manners. For example, the above-described apparatus embodiments are merely illustrative, and for example, the division of the units is only one logical division, and other divisions may be realized in practice, for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, devices or units, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit. The integrated unit can be realized in a form of hardware, and can also be realized in a form of a software functional unit.
Those skilled in the art will appreciate that all or part of the steps in the methods of the above embodiments may be implemented by associated hardware instructed by a program, which may be stored in a computer-readable storage medium, and the storage medium may include: read Only Memory (ROM), Random Access Memory (RAM), magnetic or optical disks, and the like.
While the present invention has been described with reference to the drawings, it is to be understood that the same is by way of illustration and example only and is not to be taken by way of limitation, as the present invention is not limited to the details of construction and process steps set forth in the following description.
Claims (10)
1. The utility model provides a gaseous optical isolation device, its characterized in that is in including be used for providing working space's for the target gas absorption cell, setting the window mirror that is used for leading to light of absorption cell both sides, with the circulation gas circuit pipeline of absorption cell intercommunication, with circulation gas circuit pipeline even be used for doing the target gas provides the fan of circulation power, with circulation gas circuit pipeline intercommunication is used for right the target gas carries out temperature control's heat exchange assemblies, with be used for right of circulation gas circuit pipeline intercommunication the circulation gas circuit pipeline carries out the extraction opening of evacuation, with circulation gas circuit pipeline intercommunication is used for providing the inflation inlet of target gas, be used for the monitoring gas state in the circulation gas circuit pipeline with the monitoring subassembly of heat exchange assemblies data, with the monitoring subassembly electricity is connected and is used for carrying out electrical control's control subassembly.
2. The gas optical isolation device of claim 1, wherein the absorption cell is a hollow cube structure, two window mirrors are symmetrically arranged on two opposite surfaces of the cube structure, an air inlet and an air outlet are respectively arranged on the vertical surfaces of the two window mirrors, and the air inlet and the air outlet are respectively communicated with the circulating air path pipeline.
3. The gas optical isolation device of claim 2, wherein the gas inlet and the gas outlet are symmetrically disposed on the absorption cell.
4. The gas optical isolator device according to claim 1 or 2, wherein the window mirror is a ZnSe window mirror coated with an antireflection film.
5. The gas optical isolation device of claim 1, wherein the heat exchange component comprises at least one heat exchanger, a circulation water path communicated with the heat exchanger, and a water cooler communicated with the circulation water path and used for providing circulation power, the water cooler is electrically connected with the control component, and the heat exchanger is communicated with the air inlet side or the air outlet side of the fan.
6. The gas optical isolation device of claim 5, wherein the heat exchange assembly has two heat exchangers, the two heat exchangers being in communication with the air inlet side and the air outlet side of the blower, respectively.
7. The gas optical isolation device of claim 1, comprising an evacuation component in communication with the pumping port and a gas storage component in communication with the gas charging port, wherein the evacuation component comprises a vacuum pump and a first valve, the first valve is in communication with the pumping port and the vacuum pump respectively, the gas storage component comprises a gas storage tank and a second valve, and the second valve is in communication with the gas charging port and the gas storage tank respectively.
8. The gas optical isolation device of claim 1, wherein the target gas is SF6Gas orContaining SF6The mixed gas of (1).
9. The gas optical isolator device of claim 1, wherein the monitoring component comprises an anemometer, a gas temperature sensor, a water flow meter and a water temperature sensor, the heat exchange component is controlled to increase the heat exchange flow when the water temperature is higher than a first target temperature threshold and the gas temperature is normal, the fan is controlled to increase the gas flow when the water temperature is normal and the gas temperature is higher than a second target temperature threshold, and the fan and the heat dissipation component are controlled to increase the flow synchronously when the air temperature is higher than the second target temperature threshold and the water temperature is higher than the first target temperature threshold.
10. A gas optical isolation method, which is applied to the gas optical isolation apparatus as claimed in any one of claims 1 to 9.
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