CN110160990A - Trace gas and its isotope real time on-line detection device - Google Patents

Trace gas and its isotope real time on-line detection device Download PDF

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Publication number
CN110160990A
CN110160990A CN201910460342.4A CN201910460342A CN110160990A CN 110160990 A CN110160990 A CN 110160990A CN 201910460342 A CN201910460342 A CN 201910460342A CN 110160990 A CN110160990 A CN 110160990A
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gas
light
laser
signal
photodetector
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汪磊
沈澄
查静云
梅教旭
李红军
马丽华
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Shenzhen Hualing Gas Technology Co Ltd
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Shenzhen Hualing Gas Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
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    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/11Filling or emptying of cuvettes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15Preventing contamination of the components of the optical system or obstruction of the light path
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0162Arrangements or apparatus for facilitating the optical investigation using microprocessors for control of a sequence of operations, e.g. test, powering, switching, processing
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    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15Preventing contamination of the components of the optical system or obstruction of the light path
    • G01N2021/151Gas blown
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N2021/3129Determining multicomponents by multiwavelength light
    • G01N2021/3133Determining multicomponents by multiwavelength light with selection of wavelengths before the sample
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    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/396Type of laser source
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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    • G01N2201/061Sources
    • G01N2201/06113Coherent sources; lasers
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    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract

The invention discloses a kind of trace gas and its isotope real time on-line detection devices, it is characterized by comprising optical path measurement part, air path part, control and signal processings, and wherein optical path measurement portion point includes laser, beam splitter, the first collimating optical fibre head, the second collimating optical fibre head, light gas absorption cell, the first photodetector, the second photodetector;Air path part includes air inlet gas circuit and outlet gas circuit;Control and signal processing include host computer, lock-in amplifier, difference amplifier, preamplifier, optical maser wavelength locking module, signal generator, current controller, temperature controller.The present invention can be achieved to detect the real-time online of trace gas and its isotope, can be realized laser stabilization output, and reduce interference of the external environment to laser.

Description

Trace gas and its isotope real time on-line detection device
Technical field
The present invention relates to trace gas optical detection apparatus field, specifically a kind of trace gas and its isotope exist in real time Line detector.
Background technique
Nitrogen, oxygen, argon, carbon dioxide account for the 99.997% of dry air in atmosphere, other gases only account for 0.003%, their contents Seldom, CO, N2O, SO2, O3, NO, NO2 such as in atmosphere, CH4, NH3, H2S, halide, organic compound, these are in sky The less gas of content belongs to trace gas in gas.Trace gas by various physics, chemistry, biology, earth process work With and participate in biogeochemical circulation, significant impact is caused to global atmosphere environment and ecology.Such as photochemical fog, Acid rain, greenhouse effects, depletion of the ozone layer etc..
A kind of atom that isotope refers to that atomic nucleus endoplasm subnumber is identical and neutron population is different is called isotope.Isotope is real-time On-line measurement has important research significance in fields such as geochemistry, paleontology, atmospheric physics chemistry, biomedicines.It surveys The content of Indium isotopes can effectively identify and analyze the source of isotope species.Such as to photosynthesis of plant, biology Metabolism, tracking, troposphere chemical process, the stratospheric ozone chemical process of global carbon emission etc. are studied.Equally, isotope It can also be used for the tracking to trace gas source.Therefore a kind of trace gas and its isotope of capable of quick and precisely detecting is needed Device.
Summary of the invention
The object of the present invention is to provide a kind of trace gas and its isotope real time on-line detection devices, to realize to trace The on-line checking of gas and its isotope.
In order to achieve the above object, the technical scheme adopted by the invention is as follows:
Trace gas and its isotope real time on-line detection device, it is characterised in that: including optical path measurement part, air path part, Control and signal processing, in which:
Optical path measurement portion point including laser, beam splitter, the first collimating optical fibre head, the second collimating optical fibre head, light gas absorption cell, First photodetector, the second photodetector, the entering light for going out light end and connecting beam splitter by optical fiber optics of the laser End, the first collimating optical fibre head, the second collimating optical fibre head pass through respectively optical fiber optics connection beam splitter it is different go out light end, described the One photodetector is set to the emitting light path of the first collimating optical fibre head, and the light inlet of the gas absorption cell is set to the second collimated light The emitting light path of fine head, second photodetector are set to the light-emitting window of gas absorption cell;
Air path part includes air inlet gas circuit and outlet gas circuit, and sample gas under study is accessed in air inlet gas circuit one end, the other end accesses institute The air inlet of gas absorption cell is stated, outlet optical path accesses the gas outlet of gas absorption cell;
Control and signal processing include host computer, lock-in amplifier, difference amplifier, preamplifier, optical maser wavelength lock Cover half block, signal generator, current controller, temperature controller, wherein signal generator output respectively with current controller, lock The input of phase amplifier is electrically connected, and the output of current controller, temperature controller is electrically connected with the laser respectively;Described One photodetector, the second photodetector are electrically connected with the input of preamplifier respectively, the output of preamplifier and poor The input electrical connection of point amplifier, the output of difference amplifier are electrically connected with the input of lock-in amplifier, lock-in amplifier it is defeated It is electrically connected out with the input of host computer, the output of host computer is electrically connected with the input of optical maser wavelength locking module, optical maser wavelength lock The output of cover half block is electrically connected with the input of current controller;
In air path part, sample gas under study enters gas absorption cell by air inlet gas circuit, the letter in control and signal processing Number generator loads preset modulating frequency information to current controller, and current controller is based on modulating frequency information to laser The driving current of respective frequencies is exported, to drive laser works to generate the emergent light of corresponding wavelength;
The emergent light of laser is divided into two-way light beam through beam splitter, wherein light beam is as reference light, another way light beam conduct all the way Light is measured, reference light reenters after the first collimating optical fibre head collimation and is incident upon the first photodetector, measures light through the second collimated light Enter gas absorption cell after fine head collimation, is finally gone out after multiple reflections in the gas absorption cell for being filled with sample gas under study It is incident upon the second photodetector;
Received optical signal is respectively converted into after electric signal by the first photodetector, the second photodetector is sent into preposition amplification Device is sent into difference amplifier after preamplifier amplifies, and eliminates the noise generated due to laser shake through difference amplifier After be sent into lock-in amplifier, lock-in amplifier is demodulated according to the corresponding electric signal of reference light electric signal corresponding with measurement light The harmonic signal of information is absorbed comprising under test gas, harmonic signal is sent into host computer by lock-in amplifier;
Host computer carries out data analysis after harmonic signal is converted to data, is missed with calculating under test gas information data and feedback Poor information data;Host computer is sent into optical maser wavelength locking mould after feedback error information data is converted to feedback error signal simultaneously Block, optical maser wavelength locking module will be loaded onto current controller after feedback error signal converted voltage, current controller will be electric Pressure, which is converted to, to be superimposed to current controller after electric current and exports to the driving current of laser, is realized to laser output light wavelength Feedback control.
The trace gas and its isotope real time on-line detection device, it is characterised in that: optical path measures in part, swashs Light device carries automatically controlled temperature-adjusting device, and the output of current controller and the current input terminal of laser connect, temperature controller The automatically controlled temperature-adjusting device that carries of output and laser connect.
The trace gas and its isotope real time on-line detection device, it is characterised in that: optical path measures in part, point The beam splitting ratio of beam device is 1:99, wherein 1% light beam enters the first collimating optical fibre head as reference light, 99% light beam is as survey It measures light and enters the second collimating optical fibre head.
The trace gas and its isotope real time on-line detection device, it is characterised in that: optical path measures in part, root The laser that wave band is corresponded to according to the wave band type selecting of under test gas determines the first photodetector, further according to the type selecting of laser Two photodetector type selectings.
The trace gas and its isotope real time on-line detection device, it is characterised in that: in air path part, air inlet gas Road includes injection port fast joint, drying tube, early gate, Teflon filter, thermoelectric module, U-tube, injection port fast joint one It terminates into sample gas under study, the injection port fast joint other end is connected to by pipeline with drying tube one end, and the drying tube other end is logical It crosses pipeline to be connected to early gate one end, the early gate other end passes through the inlet communication of pipeline and Teflon filter, Teflon mistake The outlet of filter is connected to by pipeline with U-tube one end, and the U-tube other end is connected by the air inlet of pipeline and gas absorption cell Logical, the thermoelectric module clamping contact U-tube forms heat exchange;
Outlet gas circuit includes late gate, vacuum pump, outlet fast joint, and late gate one end is gone out by pipeline and gas absorption cell Port connection, the late gate other end pass through the inlet communication of pipeline and vacuum pump, and the outlet of vacuum pump passes through pipeline and outlet The connection of fast joint one end.
The trace gas and its isotope real time on-line detection device, it is characterised in that: hot in the air inlet gas circuit Temperature sensor is equipped at electric cooling piece, pipeline is equipped with pressure biography between late gate and gas absorption cell in the outlet gas circuit Sensor, the host computer output respectively with the rear valve in early gate, thermoelectric module and the outlet gas circuit in air inlet gas circuit Door, vacuum pump electrical connection, host computer input respectively with the temperature sensor in air inlet gas circuit, the pressure sensing in outlet gas circuit Device electrical connection;
Host computer receives the signal of pressure sensor, and the switch of the control of the signal based on pressure sensor early gate, late gate And the work of vacuum pump, to realize air inlet and the outlet of gas absorption cell;
Host computer receive temperature sensor signal, and based on temperature sensor signal control thermoelectric module work, make into The under test gas for entering gas absorption cell reaches set temperature.
The trace gas and its isotope real time on-line detection device, it is characterised in that: control and signal processing part In point, host computer also with other external processing equipment communication connections.
Trace gas of the present invention for detection includes but is not limited to CH4, CO2、H20、CO、O2、O3、C2H6、CH2O、NO、 N2O、NO2、NH3、H2S、SO2Deng, for detection isotope be aforementioned trace gas in isotope.
In the present invention, the spectral region of laser covering is including but not limited to ultraviolet band, visible light wave range, near-infrared Wave band, middle infrared band etc..
Advantages of the present invention are as follows:
The present invention is based on laser absorption spectroscopies, are cooperated using laser and long-range gas absorption cell, realize to trace gas And its real-time online detection of isotope, and using the modulation and lock-in techniques of optical maser wavelength, it can be realized laser stabilization Output, and reduce interference of the external environment to laser.
Detailed description of the invention
Fig. 1 is overall structure schematic diagram of the present invention.
Fig. 2 is U-tube and thermoelectric cooling chip architecture constitutional diagram of the present invention.
Fig. 3 is gas absorption cell structural schematic diagram of the present invention.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
As shown in Figure 1 and Figure 2, trace gas and its isotope real time on-line detection device, including optical path measurement part, gas Road part, control and signal processing, in which:
Optical path measurement portion point includes laser 1, beam splitter 3, the first collimating optical fibre head 4a, the second collimating optical fibre head 4b, phosgene body The light end that goes out of absorption cell 5, the first photodetector 6a, the second photodetector 6b, laser 1 pass through the connection point of 2 optics of optical fiber The light inlet of beam device 3, the first collimating optical fibre head 4a, the second collimating optical fibre head 4b pass through optical fiber optics connection beam splitter 3 not respectively Same goes out light end, and the first photodetector 6a is set to the emitting light path of the first collimating optical fibre head 4a, the light inlet of gas absorption cell 5 Set on the emitting light path of the second collimating optical fibre head 4b, the second photodetector 6b is set to the light-emitting window of gas absorption cell 5;
Air path part includes air inlet gas circuit and outlet gas circuit, and sample gas under study is accessed in air inlet gas circuit one end, the other end accesses gas The air inlet of body absorption cell 5, outlet optical path access the gas outlet of gas absorption cell 5;
Control and signal processing include host computer 14, lock-in amplifier 9, difference amplifier 8, preamplifier 7, laser wave Long locking module 10, signal generator 13, current controller 12, temperature controller 11, the wherein output of signal generator 13 are distinguished Be electrically connected with the input of current controller 12, lock-in amplifier 9, current controller 12, temperature controller 11 output respectively with Laser 1 is electrically connected;First photodetector 6a, the second photodetector 6b are electrically connected with the input of preamplifier 7 respectively, The output of preamplifier 7 is electrically connected with the input of difference amplifier 8, and the output of difference amplifier 8 is defeated with lock-in amplifier 9 Enter electrical connection, the output of lock-in amplifier 9 is electrically connected with the input of host computer 14, and the output of host computer 14 and optical maser wavelength lock The input of module 10 is electrically connected, and the output of optical maser wavelength locking module 10 is electrically connected with the input of current controller 12;
In air path part, sample gas under study enters gas absorption cell 5 by air inlet gas circuit, the letter in control and signal processing Number generator 13 loads preset modulating frequency information to current controller 12, current controller 12 be based on modulating frequency information to Laser 1 exports the driving current of respective frequencies, to drive the work of laser 1 to generate the emergent light of corresponding wavelength;
The emergent light of laser 1 divides through beam splitter 3 for two-way light beam, wherein light beam is made as reference light, another way light beam all the way To measure light, reference light reenters after the first collimating optical fibre head 4a collimation and is incident upon the first photodetector 6a, measures light through second Enter gas absorption cell 5 after collimating optical fibre head 4b collimation, by repeatedly anti-in the gas absorption cell 5 for being filled with sample gas under study The second photodetector 6b is finally emitted to after penetrating;
First photodetector 6a, the second photodetector 6b received optical signal is respectively converted into after electric signal be sent into it is preposition Amplifier 7 is sent into difference amplifier 8 after the amplification of preamplifier 7, eliminates through difference amplifier 8 since laser shakes production Lock-in amplifier 9 is sent into after raw noise, lock-in amplifier 9 is according to the corresponding electric signal of reference light telecommunications corresponding with measurement light Number, the harmonic signal that information is absorbed comprising under test gas is demodulated, harmonic signal is sent into host computer 14 by lock-in amplifier 9;
Host computer 14 carries out data analysis after harmonic signal is converted to data, to calculate under test gas information data and feedback Control information data;Host computer 14 is sent into optical maser wavelength lock after feedback error information data is converted to feedback error signal simultaneously Cover half block 10, optical maser wavelength locking module 10 will be loaded onto current controller 12, electric current after feedback error signal converted voltage Controller 12 converts voltages into after electric current the driving current for being superimposed to the output of current controller 12 to laser 1, realizes to swashing The feedback control of 1 output light wavelength of light device.
Optical path measures in part, and laser 1 carries automatically controlled temperature-adjusting device, the output of current controller 12 and laser 1 current input terminal connection, the output of temperature controller 11 are connect with the automatically controlled temperature-adjusting device that laser 1 carries.
Optical path measures in part, and the beam splitting ratio of beam splitter 3 is 1:99, wherein 1% light beam enters first as reference light Collimating optical fibre head 4a, 99% light beam enter the second collimating optical fibre head 4b as measurement light.
Optical path measures in part, the laser 1 of wave band is corresponded to according to the wave band type selecting of under test gas, further according to laser 1 Type selecting determine the first photodetector 6a, the second photodetector 6b type selecting.
In air path part, air inlet gas circuit includes injection port fast joint 16, drying tube 17, early gate 18, Teflon filter 19, sample gas under study is accessed in thermoelectric module 20, U-tube 21,16 one end of injection port fast joint, and injection port fast joint 16 is another End is connected to by pipeline with 17 one end of drying tube, and 17 other end of drying tube is connected to by pipeline with 18 one end of early gate, early gate 18 other ends by the inlet communication of pipeline and Teflon filter 19, the outlet of Teflon filter 19 pass through pipeline with it is U-shaped The connection of 21 one end of pipe, 21 other end of U-tube are connected to by pipeline with the air inlet of gas absorption cell 5, and thermoelectric module 20 clamps It contacts U-tube 21 and forms heat exchange;
Outlet gas circuit includes late gate 23, vacuum pump 24, outlet fast joint 25, and 23 one end of late gate is inhaled by pipeline and gas The gas outlet of receives pond 5 is connected to, and 23 other end of late gate passes through the inlet communication of pipeline and vacuum pump 24, and the outlet of vacuum pump 24 is logical Pipeline is crossed to be connected to 25 one end of outlet fast joint.
Temperature sensor, late gate 23 and gas absorption cell in outlet gas circuit are equipped in air inlet gas circuit at thermoelectric module 20 Pipeline is equipped with pressure sensor 22 between 5, the output of host computer 14 respectively with the early gate 18 in air inlet gas circuit, thermoelectric cooling Late gate 23, vacuum pump 24 in piece 20 and outlet gas circuit are electrically connected, and the input of host computer 14 is respectively and in air inlet gas circuit Pressure sensor 22 in temperature sensor, outlet gas circuit is electrically connected;
Host computer 14 receives the signal of pressure sensor 22, and controls early gate 18, rear valve based on the signal of pressure sensor 22 The work of the switch and vacuum pump 24 of door 23, to realize air inlet and the outlet of gas absorption cell 5;
Host computer 14 receives the signal of temperature sensor, and the control thermoelectric module 20 of the signal based on temperature sensor works, The under test gas into gas absorption cell 5 is set to reach set temperature.
In control and signal processing, host computer 14 also with other external 15 communication connections of processing equipment.
In air path part of the invention, the pipeline in air inlet gas circuit and outlet gas circuit is high-boron-silicon glass pipe, air inlet gas Teflon filter 19 in road is Teflon granule phase substance filter.Thermoelectric module 20 is used in air inlet gas circuit, U-tube 21 is buried Among thermoelectric module 20, for realizing the heat treatment of cryogenic gas or the cooling treatment of high-temperature gas, and then realize pair The temperature of under test gas controls, and the influence of high temperature and low temperature to detection result is avoided, to realize high-precision isotope abundance Value measurement.Particularly, for there is gas (such as NH of characterization of adsorption3) can be achieved to purge gass (N2) high-temperature pre-heat is carried out, it is used to Elute the gas of absorption.
Early gate 18 and late gate 23 are solenoid valve, and vacuum pump 24 and solenoid valve can realize the fast sample of under test gas And sample out.Vacuum pump 24 can realize positive pressure >=0.2Mpa, negative pressure≤- 0.075Mpa, gas flow 12L/min, it is contemplated that gas The gas of 20 times/min most can be achieved in volume shared by absorption cell 5, gas circuit and solenoid valve and solenoid valve switching time, the present apparatus fastly Body varies frequency.
In optical path measurement of the invention part, the type selecting of laser 1 includes but is not limited to: Distributed Feedback Laser, ICL laser, QCL laser etc..The covering spectral region of laser 1 including but not limited to: ultraviolet band, visible light wave range, near infrared band, Middle infrared band etc..
The type selecting of first, second photodetector 6a, 6b including but not limited to: GaP photodetector (150-550nm), Si photodetector (200-1100nm), InGaAs photodetector (800-1700nm, 900-2600nm), Ge photodetector (800-1800nm), PbS photodetector (1.0-2.9 μm), PbSe photodetector (1.0-2.9 μm), HgCdTe (MCT) light Electric explorer (1.5-4.8 μm), photomultiplier tube PMT etc..
As shown in figure 3, gas absorption cell includes absorption cell stainless steel frame 56 and quartz glass cavity 55, quartz glass cavity 55 are connected in absorption cell stainless steel frame 56, and 55 axial ends of quartz glass cavity is respectively equipped with laser input window 53a(entering light Mouthful), laser output window 53b(light-emitting window), absorption cell stainless steel frame 56 is equipped with and is connected to inside quartz glass cavity 55 Air inlet 51, gas outlet 52, axial end positions are respectively equipped with reflecting mirror 54a, reflecting mirror 54b in quartz glass cavity.
The light being emitted from the second collimating optical fibre head 4b is repeatedly round-trip in gas absorption cell, can be under conditions of 20cm base is long Realize the light path of 25m.Gas absorption cell volume is only 400ml, greatly reduces under test gas sampling quantity.
In control and signal processing of the invention, current controller 12 can realize the electric current output of 0-2000ma, electricity ± 1 μ A of control precision of stream.Temperature controller 11 can realize that laser stablizes output under 0-60 DEG C of working environment, and control precision can Up to 10mK.
13 module of signal generator can realize 0.1Hz-40MHz waveform modulated (containing triangular wave and sine wave), according to sampling Frequency and the time of integration can determine the modulating frequency and carrier frequency of final actual detection.
Preamplifier 7 is used to realize the conversion of photosignal, the electricity that first, second photodetector 6a, 6b is converted Press signal amplification (current signal then amplifies after overcurrent turns voltage module)
Difference amplifier 8 is used to eliminate the noise that the own power shake of laser generates, to further increase photosignal Signal-to-noise ratio.
Lock-in amplifier 9 can extract signal amplitude and phase information in extremely strong noise circumstance.Lock-in amplifier 9 uses Homodyne detection method and low-pass filtering technique measure signal amplitude and phase relative to periodic reference signal.Locking phase measurement Signal in the extractable assigned frequency band centered on reference frequency of method, effectively filters out every other frequency component.Phase sensitivity inspection The output of wave device is filtered out by low-pass filter compression bandwidth, a large amount of broadband noise, has lock-in amplifier 9 very strong Inhibit noise immune.The passband width of lock-in amplifier 9 depends on the time constant of low-pass filter, and time constant is longer, band It is wide narrower, it is also higher to the improvement of signal-to-noise ratio.The improvement of signal-to-noise ratio is directly proportional to the square root of time constant (time of integration).
The feedback error signal that host computer 14 is calculated is converted voltage signal superposition by optical maser wavelength locking module 10 Adder is integrated in laser diode current controller 12(current controller 12 and voltage turns current module, is realized after superimposed current Control to output wavelength), to realize the feedback control exported to 1 wavelength of laser, stablize the output of 1 wavelength of laser.
The type selecting of host computer 14 is including but not limited to: MCU(8051 series monolithic, PIC series monolithic, STM32 series Single-chip microcontroller), DSP(TI series, ADI series, Microchip series), CPU(Intel series, AMD series) etc..Host computer is used for Realize signal acquisition, data analysis, feedback value signal output, the solenoid valve control, vacuum pump control, gas preheater of data The functions such as the setting of (cooling) module temperature, airline pressure monitor, data show and transmit.
The real-time online testing process of trace gas and its isotope of the present invention is as follows:
Early gate 18 is closed in the control of host computer 14, and host computer 14 opens late gate 23, and host computer 14 is opened vacuum pump 24, will be absorbed Residual gas extraction in pond 5 and gas channels, absorption cell 5 and gas channels form negative pressure.Sample gas under study via Gas circuit connects 16 access detection devices fastly.Host computer 14 opens early gate 18, negative pressure of the sample gas under study in 18 rear end of early gate Under the influence of and the swabbing action of vacuum pump 22 under, run through drying tube 17(to filter out the steam in sample to be tested) and Teflon filter 19(is to filter out granule phase substance and aerosol in sample to be tested), under test gas passes through two panels thermoelectric module It is heated or cooled to after the temperature of setting (as shown in Figure 2) after U-tube 21 among 20, quickly fills with absorption cell 5(such as Fig. 3 It is shown) and remaining gas channels.The real-time pressure in gas circuit is measured by the pressure sensor 22 being embedded in pipeline, until pressure After power meets measurement standard, host computer 14 simultaneously closes off early gate 18 and late gate 23.Device enters measurement pattern at this time.
The temperature controller 11 and current controller 12 of laser 1 are opened in the control of host computer 14, are previously written modulating frequency Information is injected into current controller 12 via signal generator 13 to realize the control to laser 1.1 output light of laser warp By optical fiber 2, into 1:99 beam splitter 3, light beam is divided into two-way.1% that pass through the first collimating optical fibre head 4a all the way and directly squeeze into function Rate detects detector 6a.99% that pass through the optical path entrance that the second collimating optical fibre head 4b enters absorption cell 5 all the way, which exists It is driven into the second photodetector 6b after absorption cell multiple reflections by the optical path outlet of absorption cell 5.First photodetection Device 6a and the second photodetector 6b converts optical signal into electric signal and send to pre-amplifier module 7, amplified signal warp By difference amplifier 8, optical power photoextinction (photoextinction is to eliminate the shake of laser itself optical power herein) is realized, thus Further improve the detectivity of system.Subsequent signal enters lock-in amplifier 9, demodulates and absorbs the humorous of information containing gas Wave signal (signal contains gas concentration information, gas absorption peak information and Wavelength stabilized error signal), the signal is subsequent It send to host computer 14.
Host computer 14 is responsible for signal acquisition, and signal acquisition includes acquiring harmonic signal, the acquisition pressure that lock-in amplifier 9 exports The pressure signal of the output of force snesor 22, the temperature sensor signal being embedded between thermoelectric module 20.
Host computer 14 is responsible for signal control, and signal control includes start and stop laser 1, opens, closes 18 late gate of early gate 23, start and stop vacuum pump 24.
Host computer 14 is responsible for the analysis of data, converts digital signal for collected each road analog signal, calculate to Survey concentration information, intensity signal, the absorption peak location information (under test gas identification) of gas, gas circuit pressure information, thermoelectric cooling The temperature information of piece.
Host computer 14 is responsible for feedback error signal, the feedback comprising wavelength locking error signal, temperature control signals it is anti- Feedback.To realize the locking of laser wavelength output and the stability contorting of gas path temperature.Its feedback principle is all based on PID control System.
The wave band of surveyed gas is determined by HITRAN database, thus the laser 1 of selected different-waveband, laser 1 Type selecting has determined the type selecting of detector 6a, 6b, and then 5 laser input window 53a of absorption cell, laser output window 53b has been determined Type selecting (typically seen light, near-infrared using K9 glass window, in it is infrared use calcirm-fluoride material window), window interface use Mode is connect fastly to design.Near-infrared and visible light use fiber coupling mode to inject absorption cell, and mid-infrared light source uses free space Coupled modes inject absorption cell.While according to the characteristic of laser scans width, achievable pure gas or multicomponent gas Detection (including isotope detection).
Any step described in this embodiment can be carried out in any sequence or be carried out simultaneously, unless otherwise indicated Or context demands.
All features disclosed in the present embodiment can be combined with any combination, in addition to this category feature and/or The combining form of at least some of step phase mutual repulsion.Specifically, preferred feature of the invention is suitable for the invention institute There is aspect and can use in any combination.Equally, feature described in nonessential combining form can be used alone (without combination).
The preferred embodiment of the present invention has been described in detail above.It should be appreciated that those skilled in the art without It needs creative work according to the present invention can conceive and makes many modifications and variations.Therefore, all technologies in the art Personnel are available by logical analysis, reasoning, or a limited experiment on the basis of existing technology under this invention's idea Technical solution, all should be within the scope of protection determined by the claims.

Claims (7)

1. trace gas and its isotope real time on-line detection device, it is characterised in that: including optical path measurement part, gas circuit portion Point, control and signal processing, in which:
Optical path measurement portion point including laser, beam splitter, the first collimating optical fibre head, the second collimating optical fibre head, light gas absorption cell, First photodetector, the second photodetector, the entering light for going out light end and connecting beam splitter by optical fiber optics of the laser End, the first collimating optical fibre head, the second collimating optical fibre head pass through respectively optical fiber optics connection beam splitter it is different go out light end, described the One photodetector is set to the emitting light path of the first collimating optical fibre head, and the light inlet of the gas absorption cell is set to the second collimated light The emitting light path of fine head, second photodetector are set to the light-emitting window of gas absorption cell;
Air path part includes air inlet gas circuit and outlet gas circuit, and sample gas under study is accessed in air inlet gas circuit one end, the other end accesses institute The air inlet of gas absorption cell is stated, outlet optical path accesses the gas outlet of gas absorption cell;
Control and signal processing include host computer, lock-in amplifier, difference amplifier, preamplifier, optical maser wavelength lock Cover half block, signal generator, current controller, temperature controller, wherein signal generator output respectively with current controller, lock The input of phase amplifier is electrically connected, and the output of current controller, temperature controller is electrically connected with the laser respectively;Described One photodetector, the second photodetector are electrically connected with the input of preamplifier respectively, the output of preamplifier and poor The input electrical connection of point amplifier, the output of difference amplifier are electrically connected with the input of lock-in amplifier, lock-in amplifier it is defeated It is electrically connected out with the input of host computer, the output of host computer is electrically connected with the input of optical maser wavelength locking module, optical maser wavelength lock The output of cover half block is electrically connected with the input of current controller;
In air path part, sample gas under study enters gas absorption cell by air inlet gas circuit, the letter in control and signal processing Number generator loads preset modulating frequency information to current controller, and current controller is based on modulating frequency information to laser The driving current of respective frequencies is exported, to drive laser works to generate the emergent light of corresponding wavelength;
The emergent light of laser is divided into two-way light beam through beam splitter, wherein light beam is as reference light, another way light beam conduct all the way Light is measured, reference light reenters after the first collimating optical fibre head collimation and is incident upon the first photodetector, measures light through the second collimated light Enter gas absorption cell after fine head collimation, is finally gone out after multiple reflections in the gas absorption cell for being filled with sample gas under study It is incident upon the second photodetector;
Received optical signal is respectively converted into after electric signal by the first photodetector, the second photodetector is sent into preposition amplification Device is sent into difference amplifier after preamplifier amplifies, and eliminates the noise generated due to laser shake through difference amplifier After be sent into lock-in amplifier, lock-in amplifier is demodulated according to the corresponding electric signal of reference light electric signal corresponding with measurement light The harmonic signal of information is absorbed comprising under test gas, harmonic signal is sent into host computer by lock-in amplifier;
Host computer carries out data analysis after harmonic signal is converted to data, is missed with calculating under test gas information data and feedback Poor information data;Host computer is sent into optical maser wavelength locking mould after feedback error information data is converted to feedback error signal simultaneously Block, optical maser wavelength locking module will be loaded onto current controller after feedback error signal converted voltage, current controller will be electric Pressure, which is converted to, to be superimposed to current controller after electric current and exports to the driving current of laser, is realized to laser output light wavelength Feedback control.
2. trace gas according to claim 1 and its isotope real time on-line detection device, it is characterised in that: optical path is surveyed It measures in part, laser carries automatically controlled temperature-adjusting device, and the output of current controller and the current input terminal of laser connect, The output of temperature controller is connect with the automatically controlled temperature-adjusting device that laser carries.
3. trace gas according to claim 1 and its isotope real time on-line detection device, it is characterised in that: optical path is surveyed Measure in part, the beam splitting ratio of beam splitter is 1:99, wherein 1% light beam as reference light into the first collimating optical fibre head, 99% Light beam as measurement light enter the second collimating optical fibre head.
4. trace gas according to claim 1 and its isotope real time on-line detection device, it is characterised in that: optical path is surveyed It measures in part, the laser of wave band is corresponded to according to the wave band type selecting of under test gas, determines the first light further according to the type selecting of laser Electric explorer, the second photodetector type selecting.
5. trace gas according to claim 1 and its isotope real time on-line detection device, it is characterised in that: gas circuit portion In point, air inlet gas circuit includes injection port fast joint, drying tube, early gate, Teflon filter, thermoelectric module, U-tube, into Sample gas under study is accessed in the outspoken connector one end of sample, and the injection port fast joint other end is connected to by pipeline with drying tube one end, does The dry pipe other end is connected to by pipeline with early gate one end, and the early gate other end is connected by the import of pipeline and Teflon filter Logical, the outlet of Teflon filter is connected to by pipeline with U-tube one end, and the U-tube other end passes through pipeline and gas absorption cell Air inlet connection, the thermoelectric module clamping contact U-tube forms heat exchange;
Outlet gas circuit includes late gate, vacuum pump, outlet fast joint, and late gate one end is gone out by pipeline and gas absorption cell Port connection, the late gate other end pass through the inlet communication of pipeline and vacuum pump, and the outlet of vacuum pump passes through pipeline and outlet The connection of fast joint one end.
6. trace gas according to claim 5 and its isotope real time on-line detection device, it is characterised in that: it is described into Temperature sensor is equipped in gas gas circuit at thermoelectric module, pipeline is pacified between late gate and gas absorption cell in the outlet gas circuit Equipped with pressure sensor, the host computer output respectively with early gate, thermoelectric module and the outlet gas in air inlet gas circuit Late gate in road, vacuum pump electrical connection, the input of host computer respectively in air inlet gas circuit temperature sensor, in outlet gas circuit Pressure sensor electrical connection;
Host computer receives the signal of pressure sensor, and the switch of the control of the signal based on pressure sensor early gate, late gate And the work of vacuum pump, to realize air inlet and the outlet of gas absorption cell;
Host computer receive temperature sensor signal, and based on temperature sensor signal control thermoelectric module work, make into The under test gas for entering gas absorption cell reaches set temperature.
7. trace gas according to claim 1 and its isotope real time on-line detection device, it is characterised in that: control and In signal processing, host computer also with other external processing equipment communication connections.
CN201910460342.4A 2019-05-30 2019-05-30 Trace gas and its isotope real time on-line detection device Pending CN110160990A (en)

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Application publication date: 20190823