CN114273143A - Glue spreading device for wafer mounting - Google Patents
Glue spreading device for wafer mounting Download PDFInfo
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- CN114273143A CN114273143A CN202111470826.0A CN202111470826A CN114273143A CN 114273143 A CN114273143 A CN 114273143A CN 202111470826 A CN202111470826 A CN 202111470826A CN 114273143 A CN114273143 A CN 114273143A
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- gluing
- transverse
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- inner sleeve
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention discloses a gluing device for wafer mounting, which comprises a table top for placing a silicon wafer and a gluing mechanism arranged above the table top, wherein the gluing mechanism comprises a gluing head, a gluing frame body, a transverse screw rod assembly, a longitudinal screw rod assembly and a rotating mechanism for driving the gluing head to rotate, the rotating axis of the gluing head is vertical to the table top, and the rotating mechanism comprises an outer sleeve and an inner sleeve which are connected through a pivot, a first motor which is fixedly arranged on the outer sleeve and is in transmission connection with the inner sleeve, an output shaft which is fixed on the axis of the inner sleeve, a first bearing which is connected between the outer peripheral surface of the inner sleeve and the inner peripheral surface of the outer sleeve and a grating graduator. Utilize the grating gradiometer of installing between interior sleeve pipe and outer tube to realize the accurate control of turned angle between interior sleeve pipe and the outer tube to realize the accurate control of rubber coating head rotation angle, and then guaranteed rubber coated homogeneity, the outer tube is located to motor and output shaft and the shared space of slewing mechanism has been saved to the same one side is effectual, makes whole structure more compact.
Description
Technical Field
The technology relates to wafer production equipment, in particular to a glue coating device for wafer mounting.
Background
The wafer loading machine is a key device in the wafer packaging process, the wafer is required to be accurately installed on the substrate, the error is required to be controlled below 10 microns, the precision requirement of the high installation precision on each step of the wafer loading machine is extremely high, and if the glue coating step is adopted, the thickness of glue at each position on the substrate needs to be controlled at high precision, so that the consistency of the thickness of the glue at each position is ensured. The existing gluing device is not accurate enough in the position of coating when needing coating due to insufficient action precision of the gluing head, and further the concave-convex of the gluing surface is more obvious.
Disclosure of Invention
The invention aims to provide a gluing device for wafer mounting, which is accurate in positioning and enables gluing to be more uniform.
In order to achieve the purpose, the invention adopts the technical scheme that: a gluing device for wafer mounting comprises a table top for placing a silicon wafer, a gluing mechanism arranged above the table top, wherein the gluing mechanism comprises a gluing head, a gluing frame body, a transverse screw rod assembly and a longitudinal screw rod assembly which are arranged in the gluing frame body and used for driving the gluing head to act on a plane parallel to the table top, and a rotating mechanism for driving the gluing head to rotate, the rotating axis of the gluing head is vertical to the table top, the rotating mechanism comprises an outer sleeve and an inner sleeve which are connected through a pivot, a first motor which is fixedly arranged on the outer sleeve and is in transmission connection with the inner sleeve, an output shaft fixed on the axis of the inner sleeve, a first bearing connected between the outer peripheral surface of the inner sleeve and the inner peripheral surface of the outer sleeve, and a grating scale.
In another preferred mode, the grating gradiometer comprises a grating ruler fixedly sleeved on the inner sleeve and a sensor for reading the rotation angle of the grating ruler, and the sensor is fixed on the inner circumferential surface of the outer sleeve and corresponds to the grating ruler.
In another preferred embodiment, a convex ring is formed on the inner circumferential surface of the outer sleeve, and the grating gradiometer is disposed between the inner circumferential surface of the convex ring and the outer circumferential surface of the inner sleeve.
In another preferred embodiment, a ring gear is formed on an inner peripheral surface of the inner tube, and the first motor is provided with a drive gear that meshes with the ring gear.
In another preferred mode, a mounting block extending downwards is formed on the lower end face of the outer sleeve, and the first motor is fixedly mounted on the mounting block.
In another preferred mode, a boss matched with the inner space of the outer sleeve above the convex ring is formed on the circumferential surface of the upper end part of the inner sleeve, the upper end surface of the convex ring is spliced with the lower end surface of the boss, and a second bearing is arranged between the upper end surface of the convex ring and the boss.
Another kind of preferred mode, the seal groove has been seted up on the up end of outer tube, be equipped with the screw thread in the seal groove, slewing mechanism still locates including the lid upper cover on outer tube and the interior sleeve pipe, be formed with on the lower terminal surface of upper cover with seal groove screw-thread fit's lower ring down, be equipped with the screw thread on the inner peripheral surface of lower ring down, be equipped with first sealing washer on the outer peripheral surface, the seal groove lean on being equipped with the second sealing washer on the global in the outside, first sealing washer and second sealing washer are made for hot melt material.
In another preferred mode, a third bearing is arranged on the end face, attached to the inner sleeve, of the upper cover.
In another preferred mode, the longitudinal screw rod assembly comprises a longitudinal guide rod fixed in the gluing frame, a longitudinal screw rod arranged in parallel with the longitudinal guide rod and rotatably connected with the gluing frame, a longitudinal nut in threaded connection with the longitudinal screw rod, a longitudinal slide block in sliding connection with the longitudinal guide rod, and a longitudinal motor in transmission connection with the longitudinal screw rod.
In another preferred mode, the transverse screw rod assembly comprises a transverse guide rod and a transverse screw rod which are fixed between the longitudinal nut and the longitudinal sliding block, a transverse sliding block which is connected to the transverse guide rod in a sliding mode, a transverse nut which is connected to the transverse sliding block in a rotating mode, and a transverse motor which is installed on the transverse sliding block and is in transmission connection with the transverse nut, and the rotating mechanism is fixed on the lower end face of the transverse sliding block.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages: the invention realizes the accurate control of the rotation angle between the inner sleeve and the outer sleeve by utilizing the grating gradiometer arranged between the inner sleeve and the outer sleeve, thereby realizing the accurate control of the rotation angle of the gluing head, further ensuring the uniformity of gluing, effectively saving the space occupied by the rotating mechanism by arranging the motor and the output shaft at the same side of the outer sleeve, and leading the whole structure to be more compact.
Drawings
FIG. 1 is a top view of the present invention;
FIG. 2 is a cross-sectional view A-A of FIG. 1;
FIG. 3 is a perspective view of the rotating mechanism;
FIG. 4 is a front view of the rotating mechanism;
FIG. 5 is a cross-sectional view B-B of FIG. 4;
fig. 6 is an exploded view of the rotating mechanism.
Detailed Description
The invention will be further described with reference to examples of embodiments shown in the drawings to which the invention is attached.
As shown in fig. 1-6, the glue spreading device for wafer mounting includes a table top 0 for placing a silicon wafer, and a glue spreading mechanism installed above the table top 0, wherein the glue spreading mechanism includes a glue spreading head 9, a glue spreading frame 8, a transverse screw rod assembly 7 and a longitudinal screw rod assembly 6 installed in the glue spreading frame 8 for driving the glue spreading head 9 to move on a plane parallel to the table top 0, and a rotating mechanism 1 for driving the glue spreading head 9 to rotate, and a rotating axis of the glue spreading head 9 is perpendicular to the table top 0 and is installed on a vision probe 91 for auxiliary positioning.
The rotating mechanism 1 comprises an outer sleeve 11 and an inner sleeve 12 which are connected through a pivot, a first motor 13 which is fixedly arranged on the outer sleeve 11 and is in transmission connection with the inner sleeve 12, an output shaft 14 which is fixed on the axis of the inner sleeve 12, a first bearing 15 which is connected between the outer peripheral surface of the inner sleeve 12 and the inner peripheral surface of the outer sleeve 11 and a grating gradiometer, wherein the lower port of the inner sleeve 12 is open, the upper port of the inner sleeve is sealed through an end cover plate 17, and the output shaft 14 is fixed on the end cover plate 17. The grating gradiometer comprises a grating ruler 161 which is fixedly sleeved on the inner sleeve 12 and is annular, and a sensor 162 for reading the rotation angle of the grating ruler 161, wherein the sensor 162 is fixed on the inner circumferential surface of the outer sleeve 11 and corresponds to the grating ruler 161. A convex ring 111 is formed on the inner peripheral surface of the outer sleeve 11, and a grating gradiometer is provided between the inner peripheral surface of the convex ring 111 and the outer peripheral surface of the inner sleeve 12. A ring gear 121 is formed on the inner peripheral surface of the inner sleeve 12, and a drive gear 131 that meshes with the ring gear 121 is provided on the first motor 13.
A mounting block 112 extending downward is formed on the lower end surface of the outer sleeve 11, and the first motor 13 is fixedly mounted on the mounting block 112. The upper end peripheral surface of the inner sleeve 12 is formed with a boss 122 matching with the inner space of the outer sleeve 11 above the convex ring 111, the upper end surface of the convex ring 111 is spliced with the lower end surface of the boss 122, and a second bearing 5 is arranged between the upper end peripheral surface and the boss 122. The upper end face of the outer sleeve 11 is provided with a seal groove 113, threads are arranged in the seal groove 113, the rotating mechanism 1 further comprises an upper cover 18 which is covered on the outer sleeve 11 and the inner sleeve 12, a lower extension ring 181 matched with the seal groove 113 in a threaded manner is formed on the lower end face of the upper cover 18, threads are arranged on the inner circumferential surface of the lower extension ring 181, a first seal ring 41 is arranged on the outer circumferential surface, a second seal ring 42 is arranged on the circumferential surface, close to the outer side, of the seal groove 113, the first seal ring 41 and the second seal ring 42 are made of hot-melt materials, and after the upper cover 18 is screwed, the outer periphery of the upper end of the outer sleeve is heated to enable the first seal ring 41 and the second seal ring 42 to form a whole body through hot melting. A third bearing 43 is provided on the end face of the upper cover 18 that abuts the inner sleeve 12.
The longitudinal screw rod assembly 6 comprises a longitudinal guide rod 61 fixed in the gluing frame body 8, a longitudinal screw rod 62 which is arranged in parallel with the longitudinal guide rod 61 and is rotationally connected with the gluing frame body 8, a longitudinal nut 63 which is in threaded connection with the longitudinal screw rod 62, a longitudinal slide block 64 which is in sliding connection with the longitudinal guide rod 62, and a longitudinal motor 65 which is in transmission connection with the longitudinal screw rod 62. The transverse screw rod assembly 7 comprises a transverse guide rod 71 and a transverse screw rod 72 which are fixed between the longitudinal nut 63 and the longitudinal slide block 64, a transverse slide block 73 which is connected on the transverse guide rod 71 in a sliding mode, a transverse nut 74 which is connected on the transverse slide block 73 in a rotating mode and is in threaded fit with the transverse screw rod 72, and a transverse motor 75 which is installed on the transverse slide block 73 and is in transmission connection with the transverse nut 74, wherein the rotating mechanism 1 is fixed on the lower end face of the transverse slide block.
Utilize the grating gradiometer of installing between interior sleeve pipe 12 and outer tube 11 to realize interior sleeve pipe 12 and the outer tube 11 between turned angle's accurate control to realize the accurate control of the first 9 rotation angles of gluing, and then guaranteed gummed homogeneity, motor and output shaft 14 locate outer tube 11 with the effectual shared space of slewing mechanism 1 of having saved of one side, make whole structure more compact.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (10)
1. The utility model provides a wafer is rubber coating device for chip bonding, its including the mesa that is used for placing the silicon chip, install in the rubber coating mechanism of mesa top, rubber coating mechanism include the gluing head, rubber coating framework, install in be used for in the rubber coating framework drive the gluing head is in a parallel with horizontal lead screw subassembly and vertical lead screw subassembly, the drive of action on the plane of mesa the first pivoted slewing mechanism of gluing, the rotation axis of gluing head is perpendicular the mesa, its characterized in that: the rotating mechanism comprises an outer sleeve and an inner sleeve which are connected through a pivot, a first motor which is fixedly arranged on the outer sleeve and is in transmission connection with the inner sleeve, an output shaft which is fixed on the axis of the inner sleeve, a first bearing which is connected between the outer peripheral surface of the inner sleeve and the inner peripheral surface of the outer sleeve, and a grating gradiometer.
2. The gluing device for wafer mounting as claimed in claim 1, wherein: the grating gradiometer comprises a grating ruler fixedly sleeved on the inner sleeve and a sensor used for reading the rotation angle of the grating ruler, and the sensor is fixed on the inner peripheral surface of the outer sleeve and corresponds to the grating ruler.
3. The gluing device for wafer mounting as claimed in claim 1, wherein: a convex ring is formed on the inner peripheral surface of the outer sleeve, and the grating gradiometer is arranged between the inner peripheral surface of the convex ring and the outer peripheral surface of the inner sleeve.
4. The gluing device for wafer mounting as claimed in claim 1, wherein: and a gear ring is formed on the inner peripheral surface of the inner sleeve, and a driving gear meshed with the gear ring is arranged on the first motor.
5. The gluing device for wafer mounting as claimed in claim 1, wherein: and a mounting block extending downwards is formed on the lower end face of the outer sleeve, and the first motor is fixedly mounted on the mounting block.
6. The gluing device for wafer mounting as claimed in claim 3, wherein: the upper end of the inner sleeve is provided with a boss matched with the inner space of the outer sleeve above the convex ring, the upper end face of the convex ring is spliced with the lower end face of the boss, and a second bearing is arranged between the upper end of the convex ring and the boss.
7. The gluing device for wafer mounting as claimed in claim 1, wherein: the sealing groove has been seted up on the up end of outer tube, be equipped with the screw thread in the sealing groove, slewing mechanism still locates including the lid upper cover on outer tube and the interior sleeve pipe, be formed with on the lower terminal surface of upper cover with sealing groove screw-thread fit's lower extension ring, be equipped with the screw thread on the inner peripheral surface of lower extension ring, be equipped with first sealing washer on the outer peripheral face, be equipped with the second sealing washer on the global that leans on the outside of sealing groove, first sealing washer and second sealing washer are made for hot melt material.
8. The gluing device for wafer mounting as claimed in claim 7, wherein: and a third bearing is arranged on the end face of the upper cover, which is attached to the inner sleeve.
9. The gluing device for wafer mounting as claimed in claim 1, wherein: the longitudinal screw rod assembly comprises a longitudinal guide rod fixed in the gluing frame, a longitudinal screw rod arranged in parallel with the longitudinal guide rod and rotatably connected with the gluing frame, a longitudinal nut in threaded connection with the longitudinal screw rod, a longitudinal slide block in sliding connection with the longitudinal guide rod, and a longitudinal motor in transmission connection with the longitudinal screw rod.
10. The gluing device for wafer mounting as claimed in claim 9, wherein: the transverse screw rod assembly comprises a transverse guide rod, a transverse screw rod, a transverse sliding block, a transverse nut and a transverse motor, the transverse guide rod and the transverse screw rod are fixed between the longitudinal nut and the longitudinal sliding block, the transverse sliding block is connected to the transverse guide rod in a sliding mode, the transverse nut is connected to the transverse sliding block in a rotating mode, the transverse motor is installed on the transverse sliding block and is in transmission connection with the transverse nut, and the rotating mechanism is fixed on the lower end face of the transverse sliding block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111470826.0A CN114273143B (en) | 2021-12-03 | 2021-12-03 | Glue spreading device for wafer mounting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111470826.0A CN114273143B (en) | 2021-12-03 | 2021-12-03 | Glue spreading device for wafer mounting |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114273143A true CN114273143A (en) | 2022-04-05 |
| CN114273143B CN114273143B (en) | 2023-02-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111470826.0A Active CN114273143B (en) | 2021-12-03 | 2021-12-03 | Glue spreading device for wafer mounting |
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| CN211726393U (en) * | 2020-03-02 | 2020-10-23 | 沈阳工学院 | Gluing device for electric automobile production |
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| CN113522651A (en) * | 2021-07-22 | 2021-10-22 | 智新科技股份有限公司 | Automatic gluing device and method for end face of flexible casing |
| CN214717947U (en) * | 2020-12-31 | 2021-11-16 | 南京泰迅光学仪器有限公司 | Automatic glue dispenser for processing optical lens |
| CN214812110U (en) * | 2021-01-04 | 2021-11-23 | 四川中宏瑞石油机械工程有限公司 | Oil drilling safety joint auxiliary device |
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2021
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| JP2004325087A (en) * | 2003-04-21 | 2004-11-18 | Seiko Epson Corp | Method and apparatus for evaluating liquid coating |
| TW201312079A (en) * | 2011-09-08 | 2013-03-16 | Wen-Fung Liu | Optical fiber grating rotational goniometer |
| WO2013083192A1 (en) * | 2011-12-07 | 2013-06-13 | Aktiebolaget Skf | Optical angle encoder |
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| CN103272734A (en) * | 2013-05-30 | 2013-09-04 | 中国科学院长春光学精密机械与物理研究所 | Meniscus gelatinizing device for single-sided gelatinizing of steel band tapes |
| CN204165528U (en) * | 2014-11-20 | 2015-02-18 | 成都铭天科技有限公司 | A kind of angle measurement equipment based on Circular gratings |
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| CN209968803U (en) * | 2019-04-22 | 2020-01-21 | 马鞍山市福明仪表制造有限公司 | Water meter glass cover bonding device |
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| CN214717947U (en) * | 2020-12-31 | 2021-11-16 | 南京泰迅光学仪器有限公司 | Automatic glue dispenser for processing optical lens |
| CN214812110U (en) * | 2021-01-04 | 2021-11-23 | 四川中宏瑞石油机械工程有限公司 | Oil drilling safety joint auxiliary device |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN114273143B (en) | 2023-02-10 |
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