CN114268729B - Large-area AOI line scanning camera mechanism - Google Patents
Large-area AOI line scanning camera mechanism Download PDFInfo
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- CN114268729B CN114268729B CN202210204329.4A CN202210204329A CN114268729B CN 114268729 B CN114268729 B CN 114268729B CN 202210204329 A CN202210204329 A CN 202210204329A CN 114268729 B CN114268729 B CN 114268729B
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Abstract
The invention relates to a large-area AOI line scanning camera mechanism, which can be used for finely adjusting an X, Y, Z shaft and simultaneously driving the whole body to rotate at any angle through a rotating shaft.
Description
Technical Field
The invention relates to the technical field of wafer manufacturing assistance, in particular to a large-area AOI line scanning camera mechanism.
Background
When a wafer is manufactured, a camera is needed to scan the whole manufacturing process to remove waste products in the manufacturing process, the existing camera is generally arranged at a fixed position and cannot be adjusted in position, or is fixed on a moving mechanism with three-dimensional movement, however, when the wafer is manufactured generally, the movement of an X \ Y \ Z axis is mainly micro-movement, but when the wafer is manufactured, a second camera is arranged to perform appearance detection on the wafer after the wafer is manufactured, and the purpose of really removing the waste products can be achieved.
Disclosure of Invention
Accordingly, the present invention is directed to a large area AOI line scan camera mechanism, which solves the above problems.
In order to achieve the purpose, the invention provides the following technical scheme:
a large area AOI line scan camera mechanism, comprising:
a lens mount having a lens mounting hole in a middle portion thereof for mounting a CCD lens;
a sliding rail surface is arranged on the lens seat;
a lens mount fixing hole fixed with the Z-axis adjusting plate is formed in the end face of the right side of the lens mount;
the upper end of the Z-axis adjusting plate is provided with a Z-axis fixing hole for fixing with the lens mount, and the upper part of the Z-axis fixing hole is provided with a Z-axis limiting hole with an open upper end;
an adjusting slide block is arranged in the middle of the Z-axis adjusting plate, and a plurality of groups of Z-axis adjusting holes with equal intervals are arranged at the lower part of the adjusting slide block;
a Z-axis boss surface is arranged on the upper part of the Z-axis adjusting plate and positioned on the left side of the Z-axis adjusting plate, the Z-axis fixing hole is arranged at the Z-axis boss surface, a Z-axis limiting surface is arranged on the lower part of the Z-axis boss surface, and a Z-axis matching surface of the Y-axis adjusting plate is arranged on the upper part of the Z-axis boss surface;
the right side of the lens seat is butted with the Z-axis boss surface, the Z-axis limiting surface is used for positioning the installation positions of the lens seat and the Z-axis adjusting plate, and the lens seat is fixed in the lens seat fixing hole after being butted through the Z-axis fixing hole by a lens seat screw;
the lower part of the Y-axis adjusting plate is provided with a groove surface, the groove surface is matched with the slide rail surface, and the Y-axis adjusting plate slides along the slide rail surface to adjust the Y-axis position of the Y-axis adjusting plate;
the middle part of the Y-axis adjusting plate is provided with a lens fixing seat;
an X-axis adjusting block fixing hole and a Z-axis position limiting hole of the Z-axis adjusting plate are formed in the right side end face of the Y-axis adjusting plate, the adjusting block is fixed on the Y-axis adjusting plate through an adjusting block screw by the X-axis adjusting block, the Z-axis matching surface is matched and butted with the right side end face of the Y-axis adjusting plate, and then the Z-axis limiting screw penetrates through the Z-axis position limiting hole and is fixed in the Z-axis position limiting hole;
the middle part of the X-axis adjusting block is provided with a U-shaped groove, and X-axis adjusting holes for adjusting the X-direction position of an X-axis adjusting plate are respectively arranged on adjusting arms at two sides of the U-shaped groove;
the middle part of the X-axis adjusting plate is provided with a cross-shaped camera seat mounting groove, a camera seat is fixed in the camera mounting groove, and the upper part of the X-axis adjusting plate is provided with an X-axis adjusting block;
the X-axis adjusting block is arranged in the U-shaped groove, and an X-axis adjusting screw penetrates through the X-axis adjusting hole to limit the position of the X-axis adjusting block in the U-shaped groove to adjust the X-direction of the X-axis adjusting plate;
the middle part of the left side panel of the arbitrary angle adjusting plate is provided with a Z-axis adjusting groove, and the lower part of the Z-axis adjusting groove is provided with an arbitrary angle adjusting plate fixing hole; the adjusting slide block is arranged in the Z-axis adjusting groove and passes through Z-axis adjusting holes at different positions through a Z-axis adjusting screw to be fixed in the fixing hole of the adjusting plate at any angle so as to achieve Z-direction adjustment of the Z-axis adjusting plate;
the lower part of the arbitrary angle adjusting plate is provided with an arbitrary angle adjusting block, an arbitrary angle adjusting through hole along the Y direction is arranged in the arbitrary angle adjusting block, and the rotating shaft penetrates into the arbitrary angle adjusting through hole and drives the whole body to rotate so as to achieve arbitrary angle adjustment.
Furthermore, the upper part of the CCD lens is provided with a threaded section, and the threaded section on the upper part of the CCD lens is screwed into the threaded section of the lens mount arranged in the lens mount fixing hole and extends into the lens fixing seat at the middle part of the Y-axis adjusting plate.
Further, be provided with a plurality of Y on the Y axle regulating plate to the regulating hole, Y is 3-30mm to the regulating hole pitch of regulating hole, is provided with Y on the lens mount to adjusting spacing hole, and Y penetrates to the regulating hole by Y to adjust spacing screw and fixes at Y to adjusting spacing downthehole portion, works as Y axle regulating plate is along Y when to the adjustment, Y axle regulating plate is followed slide rail surface slides, and Y is restricted its Y to the distance of removal to the regulating hole pitch restriction of regulating hole, and it is spacing by Y to adjusting spacing screw restriction to go on in the regulating hole pitch of injecing Y axle regulating plate is to position adjustment.
Further, the width distance of the U-shaped groove is 30-100mm, and the width of the X-axis adjusting block is 20 mm.
Further, X axle regulating block left side is provided with the regulating block boss department is provided with the regulating block fixed orifices that runs through the X axle regulating block, and the regulating block screw passes the regulating block fixed orifices and fixes in X axle regulating block fixed orifices, will X axle regulating block with Y axle regulating plate is fixed.
Furthermore, adjusting block limiting grooves are formed in the right side of the X-axis adjusting plate and located on two sides of the X-axis adjusting block, and the width of each adjusting block limiting groove is 30-100 mm.
Furthermore, on the arbitrary angle adjustment board and be located Z axle adjustment groove upper portion and be provided with the adjusting block gag lever post, the adjusting block gag lever post is located the adjusting block spacing inslot, just the diameter of adjusting block gag lever post is 20 mm.
Further, on the X axle regulating plate and be located cross camera seat mounting groove, the four corners that is located camera seat mounting groove is provided with the camera seat fixed orifices of fixed phase frame, the camera frame pass camera seat through-hole to the camera seat fixed orifices that set up on the camera frame by the camera seat screw make the camera frame with the X axle regulating plate is fixed, be provided with the camera on the camera frame.
Further, the camera and the CCD lens are on the same axis.
This application can be through when carrying out the fine setting to X, Y, Z axle, can also drive whole rotation that carries out arbitrary angle through the pivot, based on this setting, pass through the coupling joint with the pivot on servo motor, the rotation that comes control pivot through control servo motor's rotation is with the holistic rotation angle of control, can carry out whole pursuit to the manufacturing process of wafer, consequently only need a mechanism just can accomplish the whole process tracking detection of a wafer preparation point.
Because the wafer is manufactured in a production line mode, and each manufacturing point works synchronously, a plurality of camera mechanisms can be driven to work simultaneously through one rotating shaft.
Drawings
FIG. 1 is an exploded view of an AOI line scan camera mechanism according to the present invention;
FIG. 2 is a schematic diagram of a partially exploded view of an AOI line scan camera mechanism according to the present invention;
FIG. 3 is a schematic view of the mounting structure of the AOI line scan camera mechanism of the present invention;
fig. 4 is a schematic structural view of an arbitrary angle adjustment plate according to the present invention.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings, referring to fig. 1 to 4, wherein fig. 1 indicates the positional relationship and the axial coordinate relationship referred to by each component, and fig. 3 indicates the axial coordinate relationship.
The invention provides a large-area AOI line scanning camera mechanism, which comprises:
a lens mount 110 having a lens mounting hole in a middle portion of the lens mount 110, to which the CCD lens 100 is mounted;
a slide rail surface 111 is arranged on the lens seat 110;
a lens holder fixing hole 124 fixed with the Z-axis adjusting plate 102 is formed in the right end surface of the lens holder 110;
a Z-axis adjusting plate 102, wherein a Z-axis fixing hole 107 for fixing with the lens mount 110 is arranged at the upper end of the Z-axis adjusting plate 102, and a Z-axis limiting hole 106 with an open upper end is arranged at the upper part of the Z-axis fixing hole 107;
an adjusting slider 122 is arranged at the middle part of the Z-axis adjusting plate 102, and a plurality of groups of Z-axis adjusting holes 103 with equal intervals are arranged at the lower part of the adjusting slider 122;
a Z-axis boss surface 104 is arranged on the upper part of the Z-axis adjusting plate 102 and on the left side of the Z-axis adjusting plate 102, the Z-axis fixing hole 107 is arranged at the Z-axis boss surface 104, a Z-axis limiting surface 141 is arranged on the lower part of the Z-axis boss surface 104, and a Z-axis matching surface 105 of a Y-axis adjusting plate 115 is arranged on the upper part of the Z-axis boss surface 104;
the right side of the lens mount 110 is butted with the Z-axis boss surface 104, the Z-axis limiting surface 141 is used for positioning the mounting positions of the lens mount 110 and the Z-axis adjusting plate 102, and the butted lens mount screws penetrate through the Z-axis fixing holes 107 and are fixed in the lens mount fixing holes 124;
the lower part of the Y-axis adjusting plate 115 is provided with a groove surface 113, the groove surface 113 is installed in a matching manner with the slide rail surface 111, and the Y-axis adjusting plate 115 slides along the slide rail surface 111 to perform Y-position adjustment of the Y-axis adjusting plate 115;
a lens fixing seat 114 is arranged at the middle part of the Y-axis adjusting plate 115;
an X-axis adjusting block fixing hole 125 and a Z-axis position limiting hole 126 of the Z-axis adjusting plate 102 are formed in the right end face of the Y-axis adjusting plate 115, the X-axis adjusting block 118 fixes the X-axis adjusting block on the Y-axis adjusting plate 115 through adjusting block screws, the Z-axis matching surface 105 is in matched butt joint with the right end face of the Y-axis adjusting plate 115, and then a Z-axis limiting screw penetrates through the Z-axis limiting hole 106 and is fixed in the Z-axis position limiting hole 126;
the middle part of the X-axis adjusting block 118 is provided with a U-shaped groove 119, and adjusting arms at two sides of the U-shaped groove 119 are respectively provided with an X-axis adjusting hole 120 for adjusting the X-direction position of an X-axis adjusting plate 127;
an X-axis adjusting plate 127 having a cross-shaped camera mount mounting groove 135 at a middle portion of the X-axis adjusting plate 127, a camera mount fixed in the camera mount mounting groove 135, and an X-axis adjusting block 128 provided at an upper portion of the X-axis adjusting plate 127;
the X-axis adjusting block 128 is arranged in the U-shaped groove 119, and an X-axis adjusting screw penetrates through the X-axis adjusting hole 120 to limit the position of the X-axis adjusting block 128 in the U-shaped groove 119 to achieve X-direction adjustment of the X-axis adjusting plate 127;
an arbitrary angle adjusting plate 131, wherein a Z-axis adjusting groove 138 is formed in the middle of the left panel of the arbitrary angle adjusting plate 131, and an arbitrary angle adjusting plate fixing hole 139 is formed in the lower portion of the Z-axis adjusting groove 138; the adjusting slider 122 is installed in the Z-axis adjusting slot 138 and passes through the Z-axis adjusting holes 103 at different positions through a Z-axis adjusting screw to be fixed in any angle adjusting plate fixing hole 139 so as to achieve Z-direction adjustment of the Z-axis adjusting plate 102;
the lower part of the arbitrary angle adjusting plate 131 is provided with an arbitrary angle adjusting block 129, an arbitrary angle adjusting through hole along the Y direction is arranged inside the arbitrary angle adjusting block 129, and a rotating shaft 132 penetrates into the arbitrary angle adjusting through hole and is driven to rotate integrally by rotating the rotating shaft 132 so as to adjust an arbitrary angle.
In the above, the CCD lens 100 is provided with the screw thread 101, and the screw thread 101 of the CCD lens 100 is screwed into the lens holder screw thread 109 provided in the lens holder fixing hole 124 and extends into the lens fixing seat 114 at the middle portion of the Y-axis adjustment plate 115.
In the above, be provided with a plurality of Y on the Y axle regulating plate 115 to adjusting hole 116, the adjusting pitch of Y to adjusting hole 116 is 3-30mm, is provided with Y on lens mount 110 to adjusting spacing hole 136, and Y is fixed inside Y is adjusting spacing hole 136 to adjusting spacing screw by Y to adjusting hole 116 penetration, works as when Y axle regulating plate 115 is along Y to the adjustment, Y axle regulating plate 115 is followed slide rail surface 111 slides, and Y is to the adjusting pitch restriction of adjusting hole 116 its Y of its distance of removal to its spacing is adjusted spacing by Y to adjusting spacing screw restriction, carries out in the adjusting pitch of injecing Y axle regulating plate 115's Y is to position adjustment.
In the above, the width of the U-shaped groove 119 is 30-100mm, and the width of the X-axis adjusting block 128 is 20 mm.
In the foregoing, X-axis adjusting block 118 left side is provided with adjusting block boss 117 department is provided with adjusting block fixed orifices 121 that runs through X-axis adjusting block 118, and the adjusting block screw passes adjusting block fixed orifices 121 and fixes in X-axis adjusting block fixed orifices 125, will X-axis adjusting block 118 with Y-axis adjusting plate 115 is fixed.
In the above, the right side of the X-axis adjusting plate 127 and the two sides of the X-axis adjusting block 128 are provided with adjusting block limiting grooves 134, and the width of the adjusting block limiting grooves 134 is 30-100 mm.
In the above, an adjusting block limiting rod 140 is arranged on the arbitrary angle adjusting plate 131 and on the upper portion of the Z-axis adjusting groove 138, the adjusting block limiting rod 140 is located in the adjusting block limiting groove 134, and the diameter of the adjusting block limiting rod 140 is 20 mm.
In the foregoing, on the X-axis regulating plate 127 and be located cross camera mount mounting groove 135, the four corners that are located camera mount mounting groove 135 are provided with the camera mount fixed orifices 137 of fixed phase frame, the camera frame passes the camera mount through-hole that sets up on the camera frame by the camera mount screw to make the camera frame with X-axis regulating plate 127 is fixed in camera mount fixed orifices 137, be provided with camera 133 on the camera frame.
In the above, the camera and the CCD lens 100 are on the same axis.
When the installation is carried out,
the adjusting slider 122 is installed in the Z-axis adjusting slot 138 and passes through the Z-axis adjusting holes 103 at different positions through a Z-axis adjusting screw to be fixed in any angle adjusting plate fixing hole 139 so as to achieve Z-direction adjustment and fixation of the Z-axis adjusting plate 102;
the right side of the lens mount 110 is butted with the Z-axis boss surface 104, and the Z-axis limiting surface 141 is used for positioning the mounting positions of the lens mount 110 and the Z-axis adjusting plate 102;
the groove surface 113 is matched with the slide rail surface 111, and the Y-axis adjusting plate 115 slides along the slide rail surface 111 to perform Y-axis position adjustment of the Y-axis adjusting plate 115;
the X-axis adjusting block 118 fixes the adjusting block on the Y-axis adjusting plate 115 through an adjusting block screw, the Z-axis matching surface 105 is in matching butt joint with the right end surface of the Y-axis adjusting plate 115, and then a Z-axis limiting screw penetrates through the Z-axis limiting hole 106 and is fixed in the Z-axis position limiting hole 126;
the X-axis adjusting block 128 is arranged in the U-shaped groove 119, and an X-axis adjusting screw penetrates through the X-axis adjusting hole 120 to limit the position of the X-axis adjusting block 128 in the U-shaped groove 119 to adjust the X-axis adjusting plate 127 in the X direction;
the adjusting slider 122 is installed in the Z-axis adjusting slot 138 and passes through the Z-axis adjusting holes 103 at different positions through a Z-axis adjusting screw to be fixed in any angle adjusting plate fixing hole 139 so as to achieve Z-direction adjustment of the Z-axis adjusting plate 102;
the lower part of the arbitrary angle adjusting plate 131 is provided with an arbitrary angle adjusting block 129, an arbitrary angle adjusting through hole along the Y direction is arranged inside the arbitrary angle adjusting block 129, and a rotating shaft 132 penetrates into the arbitrary angle adjusting through hole and is driven to rotate integrally by rotating the rotating shaft 132 so as to adjust an arbitrary angle.
This application can be through when carrying out the fine setting to X, Y, Z axle, can also drive whole rotation of carrying out arbitrary angle through pivot 132, based on this setting, pass through coupling joint with pivot 132 on servo motor, the rotation that comes control pivot 132 through control servo motor's rotation is with the holistic rotation angle of control, can carry out whole pursuit to the manufacturing process of wafer, consequently only need a mechanism just can accomplish the whole process tracking detection of a wafer preparation point.
Since the wafer is manufactured in a pipeline manner and each manufacturing point is operated synchronously, a plurality of camera mechanisms of the present application can be driven to operate simultaneously by one rotating shaft 132.
The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts of the present invention. The foregoing is only a preferred embodiment of the present invention, and it should be noted that there are objectively infinite specific structures due to the limited character expressions, and it will be apparent to those skilled in the art that a plurality of modifications, decorations or changes may be made without departing from the principle of the present invention, and the technical features described above may be combined in a suitable manner; such modifications, variations, combinations, or adaptations of the invention using its spirit and scope, as defined by the claims, may be directed to other uses and embodiments.
Claims (9)
1. A large area AOI line scan camera mechanism, comprising:
a lens mount having a lens mounting hole in a middle portion thereof for mounting a CCD lens;
a sliding rail surface is arranged on the lens seat;
a lens mount fixing hole fixed with the Z-axis adjusting plate is formed in the end face of the right side of the lens mount;
the upper end of the Z-axis adjusting plate is provided with a Z-axis fixing hole for fixing with the lens mount, and the upper part of the Z-axis fixing hole is provided with a Z-axis limiting hole with an open upper end;
an adjusting slide block is arranged in the middle of the Z-axis adjusting plate, and a plurality of groups of Z-axis adjusting holes with equal intervals are arranged at the lower part of the adjusting slide block;
a Z-axis boss surface is arranged on the upper part of the Z-axis adjusting plate and positioned on the left side of the Z-axis adjusting plate, the Z-axis fixing hole is arranged at the Z-axis boss surface, a Z-axis limiting surface is arranged on the lower part of the Z-axis boss surface, and a Z-axis matching surface of the Y-axis adjusting plate is arranged on the upper part of the Z-axis boss surface;
the right side of the lens seat is butted with the Z-axis boss surface, the Z-axis limiting surface is used for positioning the installation positions of the lens seat and the Z-axis adjusting plate, and the lens seat is fixed in the lens seat fixing hole after being butted through the Z-axis fixing hole by a lens seat screw;
the lower part of the Y-axis adjusting plate is provided with a groove surface, the groove surface is matched with the slide rail surface, and the Y-axis adjusting plate slides along the slide rail surface to adjust the Y-axis position of the Y-axis adjusting plate;
the middle part of the Y-axis adjusting plate is provided with a lens fixing seat;
an X-axis adjusting block fixing hole and a Z-axis position limiting hole of the Z-axis adjusting plate are formed in the right side end face of the Y-axis adjusting plate, the adjusting block is fixed on the Y-axis adjusting plate through an adjusting block screw by the X-axis adjusting block, the Z-axis matching surface is matched and butted with the right side end face of the Y-axis adjusting plate, and then the Z-axis limiting screw penetrates through the Z-axis position limiting hole and is fixed in the Z-axis position limiting hole;
the middle part of the X-axis adjusting block is provided with a U-shaped groove, and X-axis adjusting holes for adjusting the X-direction position of an X-axis adjusting plate are respectively arranged on adjusting arms at two sides of the U-shaped groove;
the middle part of the X-axis adjusting plate is provided with a cross-shaped camera seat mounting groove, a camera seat is fixed in the camera mounting groove, and the upper part of the X-axis adjusting plate is provided with an X-axis adjusting block;
the X-axis adjusting block is arranged in the U-shaped groove, and an X-axis adjusting screw penetrates through the X-axis adjusting hole to limit the position of the X-axis adjusting block in the U-shaped groove to adjust the X-direction of the X-axis adjusting plate;
the middle part of the left side panel of the arbitrary angle adjusting plate is provided with a Z-axis adjusting groove, and the lower part of the Z-axis adjusting groove is provided with an arbitrary angle adjusting plate fixing hole; the adjusting slide block is arranged in the Z-axis adjusting groove and passes through Z-axis adjusting holes at different positions through a Z-axis adjusting screw to be fixed in the fixing hole of the adjusting plate at any angle so as to achieve Z-direction adjustment of the Z-axis adjusting plate;
the lower part of the arbitrary angle adjusting plate is provided with an arbitrary angle adjusting block, an arbitrary angle adjusting through hole along the Y direction is arranged in the arbitrary angle adjusting block, and the rotating shaft penetrates into the arbitrary angle adjusting through hole and drives the whole body to rotate so as to achieve arbitrary angle adjustment.
2. The large area AOI line scan camera mechanism of claim 1, wherein the CCD lens upper portion is provided with a threaded section that extends into the lens holder mounting at the middle portion of the Y-axis adjustment plate by threading the threaded section of the CCD lens upper portion into a threaded section of the lens holder mounting provided in the lens holder mounting hole.
3. The large area AOI line scan camera mechanism of claim 1, wherein a plurality of Y-direction adjusting holes are formed in the Y-axis adjusting plate, the distance between the Y-direction adjusting holes is 3-30mm, Y-direction adjusting limiting holes are formed in the lens mount, Y-direction adjusting limiting screws penetrate through the Y-direction adjusting holes and are fixed in the Y-direction adjusting limiting holes, when the Y-axis adjusting plate is adjusted in the Y direction, the Y-axis adjusting plate slides along the sliding rail surface, the distance between the Y-direction adjusting holes limits the Y-direction movement distance of the Y-direction adjusting holes, and the Y-direction adjusting limiting screws limit the Y-direction adjusting holes to adjust the Y-direction position of the Y-axis adjusting plate within the limited distance.
4. The large area AOI line scan camera mechanism of claim 1, wherein the U-shaped grooves have a width of 30-100mm and the X-axis adjustment block has a width of 20 mm.
5. The large area AOI line camera mechanism of claim 1, wherein the left side of the X-axis adjusting block is provided with an adjusting block boss, an adjusting block fixing hole penetrating the X-axis adjusting block is provided at the adjusting block boss, an adjusting block screw passes through the adjusting block fixing hole and is fixed in the X-axis adjusting block fixing hole, and the X-axis adjusting block and the Y-axis adjusting plate are fixed.
6. The large area AOI line scan camera mechanism of claim 1, wherein an adjusting block limiting groove is disposed on the right side of the X-axis adjusting plate and on both sides of the X-axis adjusting block, and the width of the adjusting block limiting groove is 30-100 mm.
7. The large area AOI line camera mechanism of claim 1, wherein an adjusting block limiting rod is disposed on the arbitrary angle adjusting plate and above the Z-axis adjusting groove, the adjusting block limiting rod is disposed in the adjusting block limiting groove, and the diameter of the adjusting block limiting rod is 20 mm.
8. The large area AOI line scan camera mechanism of claim 1, wherein the X-axis adjustment plate is located in a cross-shaped camera mount mounting slot, four corners of the camera mount mounting slot are provided with camera mount fixing holes for fixing the camera mount, the camera mount is fixed to the X-axis adjustment plate by a camera mount screw passing through a camera mount through-hole provided in the camera mount into the camera mount fixing hole, and the camera mount is provided with a camera.
9. The large area AOI line scan camera mechanism of claim 8, wherein the camera and CCD lens are on the same axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210204329.4A CN114268729B (en) | 2022-03-03 | 2022-03-03 | Large-area AOI line scanning camera mechanism |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210204329.4A CN114268729B (en) | 2022-03-03 | 2022-03-03 | Large-area AOI line scanning camera mechanism |
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| CN114268729A CN114268729A (en) | 2022-04-01 |
| CN114268729B true CN114268729B (en) | 2022-04-29 |
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| JP7119084B2 (en) * | 2017-11-30 | 2022-08-16 | ライカ バイオシステムズ イメージング インコーポレイテッド | Slide rack gripper device |
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| TWM479416U (en) * | 2014-01-28 | 2014-06-01 | Ching Chan Optical Technology Co Ltd | Apparatus for testing component |
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Address after: 519075 Floor 1-2, No. 366, Yongtian Road, Xiangzhou District, Zhuhai, Guangdong Patentee after: Tachikawa (Zhuhai) Intelligent Technology Equipment Co.,Ltd. Address before: 518103 Room 301, building 6, Fuqiao Fourth District, Qiaotou community, Fuhai street, Bao'an District, Shenzhen, Guangdong Province Patentee before: Lichuan (Shenzhen) Intelligent Technology Equipment Co.,Ltd. |