CN114263847A - Liquid nitrogen supply control device - Google Patents
Liquid nitrogen supply control device Download PDFInfo
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- CN114263847A CN114263847A CN202111603782.4A CN202111603782A CN114263847A CN 114263847 A CN114263847 A CN 114263847A CN 202111603782 A CN202111603782 A CN 202111603782A CN 114263847 A CN114263847 A CN 114263847A
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Abstract
The invention discloses a liquid nitrogen supply control device, which comprises: the system comprises an industrial personal computer, a liquid nitrogen tank, a liquid nitrogen pump heating rod, a liquid nitrogen pump controller, a liquid supplementing pipe, a first Dewar tank and a second Dewar tank; the liquid nitrogen pump controller is connected with the industrial personal computer and is configured to control the liquid nitrogen pump heating rod to heat the liquid nitrogen tank based on a liquid supplementing instruction of the industrial personal computer so as to improve the internal pressure of the liquid nitrogen tank; one end of the liquid supplementing pipe is connected into the liquid nitrogen tank, and the other end of the liquid supplementing pipe is connected into the first Dewar tank, so that liquid nitrogen in the liquid nitrogen tank is guided into the first Dewar tank under the action of the internal pressure of the liquid nitrogen tank in the liquid supplementing process; the first dewar tank is provided with a communicating vessel between the first dewar tank and the second dewar tank, so that the liquid level height of the first dewar tank is kept consistent with the liquid level height of the second dewar tank through the communicating vessel in the liquid supplementing process. The liquid nitrogen supply control device can replace manual liquid nitrogen filling, guarantee that the liquid nitrogen in the Dewar tank executing the test operation always submerges the chip, and improve the accuracy of chip testing.
Description
Technical Field
The invention relates to the technical field of chip testing, in particular to a liquid nitrogen supply control device.
Background
In the batch test process of the chips, a craft worker needs to carry out test work for a long time and prepare to fill liquid nitrogen into the Dewar tank at any time, so that the time and the labor are wasted, and the accuracy of the electrical performance test of the chips is easily influenced.
The electrical property of the chip is tested in a low-temperature environment, the probe mechanism needs to prick the current signal of the chip from the vertical direction to the chip in the liquid nitrogen Dewar tank to test the chip, so that the top of the Dewar tank cannot be sealed, liquid nitrogen in the Dewar tank can be volatilized continuously, the chip is immersed in the liquid nitrogen at any time, and the manual filling of the liquid nitrogen is low in efficiency and poor in safety. Therefore, a control device for automatic liquid nitrogen supply for chip testing needs to be designed.
Disclosure of Invention
The embodiment of the invention provides a liquid nitrogen supply control device which is used for replacing manual liquid nitrogen filling, ensuring that a chip is always immersed in liquid nitrogen in a Dewar tank for executing test operation, and improving the accuracy of chip test.
An embodiment of the present invention provides a liquid nitrogen replenishment control device, including: the system comprises an industrial personal computer, a liquid nitrogen tank, a liquid nitrogen pump heating rod, a liquid nitrogen pump controller, a liquid supplementing pipe, a first Dewar tank and a second Dewar tank;
the liquid nitrogen pump controller is connected with the industrial personal computer and is configured to control the liquid nitrogen pump heating rod to heat the liquid nitrogen tank based on a liquid supplementing instruction of the industrial personal computer so as to improve the internal pressure of the liquid nitrogen tank;
one end of the liquid supplementing pipe is connected into the liquid nitrogen tank, and the other end of the liquid supplementing pipe is connected into the first Dewar tank, so that liquid nitrogen in the liquid nitrogen tank is guided into the first Dewar tank under the action of the internal pressure of the liquid nitrogen tank in the liquid supplementing process;
the first dewar tank and the second dewar tank are provided with a communicating vessel therebetween, so that the liquid level of the first dewar tank is kept consistent with that of the second dewar tank through the communicating vessel in the liquid supplementing process;
the second Dewar flask is not sealed, is internally provided with a test platform for chip testing, and is connected with the first Dewar flask through the communicating vessel so as to keep the liquid level of the second Dewar flask at a target height in the process of liquid supplement.
In some embodiments, the liquid replenishing pipe extends into the bottom of the liquid nitrogen tank at one end and extends into the bottom of the first dewar tank at the other end.
In some embodiments, the liquid nitrogen pump heating rod is arranged in the liquid nitrogen tank, one end of the liquid nitrogen pump heating rod, which is close to the bottom of the liquid nitrogen tank, is provided with a first temperature sensor, and one end of the liquid nitrogen pump heating rod, which is far away from the bottom of the liquid nitrogen tank, is provided with a pressure sensor;
the liquid nitrogen pump controller is further configured to control to stop the liquid nitrogen pump heating rod based on the temperature value of the first temperature sensor and the pressure value of the pressure sensor under the condition that the obtained pressure value exceeds a first preset pressure threshold value, control to start the liquid nitrogen pump heating rod under the condition that the obtained pressure value is lower than a second preset pressure threshold value, and perform low liquid level alarm of the liquid nitrogen tank under the condition that the obtained temperature value exceeds the first preset temperature threshold value.
In some embodiments, further comprising: and the electromagnetic valve is arranged on a pipeline of the liquid supplementing pipe and is opened or closed according to the instruction of the liquid nitrogen pump controller so as to implement liquid supplementing or stop liquid supplementing.
In some embodiments, a second temperature sensor, a level gauge and a data acquisition module are further included:
the second temperature sensor and the liquid level meter are both arranged in the first Dewar tank;
the data acquisition module is used for acquiring the temperature and the liquid level of the first dewar tank based on the second temperature sensor and the liquid level meter and uploading the temperature and the liquid level to the industrial personal computer;
the industrial computer is further configured to send a liquid supplementing instruction to the liquid nitrogen pump controller under the condition that the obtained liquid level of the first Dewar tank is lower than a first liquid level threshold value, and send a liquid supplementing stopping instruction to the liquid nitrogen pump controller under the condition that the obtained liquid level of the first Dewar tank is higher than a second liquid level threshold value.
In some embodiments, the industrial personal computer is further configured to issue a spill alarm of the first dewar in a case where the acquired temperature of the first dewar is lower than a second preset temperature threshold.
According to the embodiment of the invention, the heating device is controlled by the liquid nitrogen pump controller to heat under the condition that liquid is required to be replenished, the liquid nitrogen is introduced into the first Dewar tank through the liquid replenishing pipe, and the liquid replenishing work of the second Dewar tank is further completed through the communicating device between the first Dewar tank and the second Dewar tank.
The foregoing description is only an overview of the technical solutions of the present invention, and the embodiments of the present invention are described below in order to make the technical means of the present invention more clearly understood and to make the above and other objects, features, and advantages of the present invention more clearly understandable.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
FIG. 1 is a schematic diagram of the basic structure of a liquid nitrogen replenishment control device of the present disclosure;
fig. 2 is a basic operation flow chart of the liquid nitrogen replenishment control device of the present disclosure.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
An embodiment of the present disclosure provides a liquid nitrogen replenishment control device, as shown in fig. 1, including: the device comprises an industrial personal computer 14, a liquid nitrogen tank 4, a liquid nitrogen pump heating rod 2, a liquid nitrogen pump controller 5, a liquid supplementing pipe 7, a first Dewar tank 11 and a second Dewar tank 13.
The liquid nitrogen pump controller 5 is connected with the industrial personal computer 14 and is configured to control the liquid nitrogen pump heating rod 2 to heat the liquid nitrogen tank 4 based on a liquid supplementing instruction of the industrial personal computer 14, so that the internal pressure of the liquid nitrogen tank 4 is improved. That is also under the condition that needs the fluid replacement, this liquid nitrogen replenishment controlling means of disclosure can send control command to liquid nitrogen pump controller 5 through industrial computer 14 to control liquid nitrogen pump heating rod 2 and heat liquid nitrogen container 4, liquid nitrogen container 4 forms internal pressure after being heated in liquid nitrogen container 4, thereby draws out liquid nitrogen container 4 through fluid replacement pipe 7.
One end of the liquid supplementing pipe 7 is connected into the liquid nitrogen tank 4, and the other end of the liquid supplementing pipe is connected into the first dewar tank 11, so that liquid nitrogen in the liquid nitrogen tank 4 is introduced into the first dewar tank 11 under the action of the internal pressure of the liquid nitrogen tank 4 in the liquid supplementing process.
And a communicating vessel 12 is arranged between the first dewar vessel 11 and the second dewar vessel 13, so that the liquid level of the first dewar vessel 11 is kept consistent with that of the second dewar vessel 13 through the communicating vessel 12 in the liquid supplementing process. First dewar jar 11 can seal through setting up the end cover in this disclosure, sets up the air vent simultaneously on the end cover, guarantees that first dewar jar 11's atmospheric pressure keeps unanimous with atmospheric pressure. The liquid nitrogen supply control device of this disclosure further sets up first dewar jar 11 thereby can be used for realizing the monitoring to the process of fluid infusion, can carry out the fluid infusion to second dewar jar 13 in through first dewar jar 11 to for second dewar jar 13 (operation dewar jar) fluid infusion, maintain its liquid level at predetermined height within range.
The second dewar 13 is not sealed, and a testing platform for chip testing is arranged in the second dewar 13, and is connected with the first dewar 11 through the communicating vessel 12, so that the liquid level of the second dewar 13 is maintained at a target height in the liquid supplementing process. The electrical performance of the chip is tested in a low-temperature environment, the probe mechanism needs to prick the chip in the liquid nitrogen Dewar tank from the vertical direction to test the current signal of the chip, so that the second Dewar tank 13 is not sealed, and the stability and smoothness of the liquid supplementing process are ensured through the communicating vessel 12 between the first Dewar tank 11 and the second Dewar tank 13.
According to the embodiment of the invention, the heating device is controlled by the liquid nitrogen pump controller to heat under the condition that liquid is required to be replenished, the liquid nitrogen is introduced into the first Dewar tank through the liquid replenishing pipe, and the liquid replenishing work of the second Dewar tank is further completed through the communicating device between the first Dewar tank and the second Dewar tank.
In some embodiments, the liquid replenishing pipe 7 extends into the bottom of the liquid nitrogen tank 4 at one end and into the bottom of the first dewar tank 11 at the other end. Considering the volatile characteristic of liquid nitrogen, stretch into the bottom of liquid nitrogen container 4 and the bottom that the other end stretched into first dewar jar 11 with fluid infusion pipe 7 in this disclosure to can reduce the volatilization of fluid nitrogen of fluid infusion in-process, improve fluid infusion efficiency.
In some embodiments, further comprising: and the electromagnetic valve 6 is arranged on a pipeline of the liquid supplementing pipe 7 and is opened or closed according to the instruction of the liquid nitrogen pump controller 5 so as to implement liquid supplementing or stop liquid supplementing. Liquid supplementing action can heat the back at liquid nitrogen pump heating rod 2 in this disclosure, opens through 5 control solenoid valves 6 of liquid nitrogen pump controller to accomplish the liquid supplementing action, and can further control the velocity of flow of the liquid nitrogen in liquid supplementing pipe 7 according to pressure sensor 3's pressure value, further guarantee that the liquid nitrogen speed that flows to first dewar jar 11 is steady.
In some embodiments, the liquid nitrogen pump heating rod 2 is disposed in the liquid nitrogen tank 4, and a first temperature sensor 1 is disposed at an end close to the bottom of the liquid nitrogen tank 4, and a pressure sensor 3 is disposed at an end far from the bottom of the liquid nitrogen tank 4.
The liquid nitrogen pump controller 5 is further configured to control to stop the liquid nitrogen pump heating rod 2 based on the temperature value of the first temperature sensor 1 and the pressure value of the pressure sensor 3, under the condition that the obtained pressure value exceeds a first preset pressure threshold value, control to start the liquid nitrogen pump heating rod 2 under the condition that the obtained pressure value is lower than a second preset pressure threshold value, and perform low liquid level alarm of the liquid nitrogen tank under the condition that the obtained temperature value exceeds the first preset temperature threshold value. The liquid nitrogen pump controller 5 and the industrial personal computer 14 that this liquid nitrogen replenishment controlling means of this disclosure included all can have data processing ability, can transmit the signal that first temperature sensor 1 and pressure sensor 3 gathered to industrial personal computer 14 through the industrial personal computer in this example, also can directly carry out signal processing at liquid nitrogen pump controller 5, and specific mode does not do the restriction one by one here. Because the upper portion of fluid infusion in-process liquid nitrogen container 4 is nitrogen gas, and well lower part is the liquid nitrogen, and liquid nitrogen pump heating rod 2 is close to at it in this application the one end of 4 bottoms of liquid nitrogen container is provided with first temperature sensor 1, and it keeps away from the one end of 4 bottoms of liquid nitrogen container is provided with pressure sensor 3 to corresponding pressure signal and temperature signal can conveniently be gathered. The utility model discloses in still provide and control opening of liquid nitrogen pump heating rod 2 through the pressure value in monitoring liquid nitrogen container 4 and stop to and confirm the liquid level of liquid nitrogen container through the temperature value in monitoring liquid nitrogen container 4, and not monitor through setting up level sensor, through the control pressure value, can effectively improve the stationarity of the velocity of flow of liquid nitrogen in the fluid infusion pipe, thereby continuously keep second dewar jar 13 can be in the within range of expectation, provide an ideal test environment for the chip test. The liquid level of the liquid nitrogen tank is determined by monitoring the temperature value in the liquid nitrogen tank 4 through the temperature sensor, so that the low liquid level alarm of the liquid nitrogen tank is generated under the condition that the temperature is higher than the preset temperature.
The replenishment process is further monitored in this example based on the first dewar tank 11. In some embodiments, a second temperature sensor 10, a level gauge 9 and a data acquisition module 8 are also included:
the second temperature sensor 10 and the level gauge 9 are both arranged in the first dewar tank 11, for example, the second temperature sensor 10 and the level gauge 9 may both be arranged on an end cover, and the level gauge 9 is arranged against the inner wall of the first dewar tank 11. And the second temperature sensor 10 is inserted into the first dewar tank 11.
And the data acquisition module 8 is used for acquiring the temperature and the liquid level of the first dewar tank based on the second temperature sensor 10 and the liquid level meter 9 and uploading the temperature and the liquid level to the industrial personal computer 14. That is, the first dewar tank 11 is monitored by the second temperature sensor 10 and the liquid level meter 9, and particularly in the case where the liquid level is higher than the low point of the second temperature sensor 10, the temperature value of the second temperature sensor 10 is lowered, so that it can be determined that the first dewar tank 11 may overflow. In some embodiments, the data collection module 8 may be a 08ADAM4117 data collection module. In some embodiments, the industrial personal computer 14 is configured to issue a spill alarm of the first dewar tank 11 if the acquired temperature of the first dewar tank 11 is lower than a second preset temperature threshold.
The industrial personal computer 14 is further configured to issue a liquid replenishment instruction to the liquid nitrogen pump controller 5 when the acquired liquid level of the first dewar tank 11 is lower than a first liquid level threshold value, and issue a liquid replenishment stopping instruction to the liquid nitrogen pump controller 5 when the acquired liquid level of the first dewar tank 11 is higher than a second liquid level threshold value.
The present disclosure further provides a work flow of the liquid nitrogen replenishment control device, as shown in fig. 2, including:
the automatic liquid supplementing instruction is sent to the liquid nitrogen pump controller 5 through the industrial personal computer 14, the electromagnetic valve 6 is opened, the liquid nitrogen pump heating rod 2 is started, liquid nitrogen in the liquid nitrogen tank 4 is heated through the liquid nitrogen pump heating rod 2 to be vaporized, the pressure in the liquid nitrogen tank 4 is increased, and the liquid nitrogen is introduced into the first Dewar tank 11 (the middle liquid supplementing Dewar tank) through the liquid supplementing pipe 7. When the liquid nitrogen in the intermediate liquid-supplementing Dewar tank 11 reaches a certain height, the liquid nitrogen level in the second Dewar tank 13 (operating Dewar tank) is consistent with the liquid nitrogen level of the intermediate liquid-supplementing Dewar tank through the communicating vessel 12.
In order to ensure the safety of the liquid nitrogen tank 4, the value of the pressure sensor 3 is read in real time, when the value of the liquid nitrogen pump pressure sensor 3 exceeds 10Kpa, the heating rod is controlled to stop working, and when the value of the pressure sensor 3 is lower than 10Kpa, the heating rod is controlled to start working.
In order to monitor the liquid level of the liquid nitrogen tank 4, the value of the first temperature sensor 1 is read in real time, and when the value of the first temperature sensor 1 is higher than-196 ℃, the low liquid level of the liquid nitrogen tank 4 alarms. Liquid level signals of the differential pressure type liquid level meter 9 are read through a 08ADAM4117 data acquisition module 8 to control the liquid level height of liquid nitrogen, and temperature signals of the second liquid temperature sensor 10 are read to prevent the liquid nitrogen from overflowing from the operating Dewar tank.
And monitoring a liquid level signal of the differential pressure type liquid level meter 9 in real time, and controlling to open the liquid electromagnetic valve 6 and open the liquid nitrogen pump heating rod 2 to start automatic liquid supplement to the intermediate liquid supplement Dewar tank when the liquid level is lower than a set threshold value. When the liquid level collected by the liquid level meter 9 is higher than a set threshold value, the liquid nitrogen pump heating rod 2 is stopped, the electromagnetic valve 6 is closed, and automatic liquid supplementing to the 11 middle liquid supplementing Dewar tank is stopped, so that automatic control of liquid nitrogen supplementing is realized, the liquid level of liquid nitrogen is guaranteed to be stable, and the test chip is always immersed in the liquid nitrogen.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The above-mentioned serial numbers of the embodiments of the present invention are merely for description and do not represent the merits of the embodiments.
Through the above description of the embodiments, those skilled in the art will clearly understand that the method of the above embodiments can be implemented by software plus a necessary general hardware platform, and certainly can also be implemented by hardware, but in many cases, the former is a better implementation manner. Based on such understanding, the technical solution of the present invention essentially or contributing to the prior art may be embodied in the form of a software product, which is stored in a storage medium (such as ROM/RAM, magnetic disk, optical disk) and includes several instructions for enabling a terminal (which may be a computer or a network device) to execute the method according to the embodiments of the present invention.
While the present invention has been described with reference to the embodiments shown in the drawings, the present invention is not limited to the embodiments, which are illustrative and not restrictive, and it will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (6)
1. A liquid nitrogen replenishment control device, comprising: the system comprises an industrial personal computer, a liquid nitrogen tank, a liquid nitrogen pump heating rod, a liquid nitrogen pump controller, a liquid supplementing pipe, a first Dewar tank and a second Dewar tank;
the liquid nitrogen pump controller is connected with the industrial personal computer and is configured to control the liquid nitrogen pump heating rod to heat the liquid nitrogen tank based on a liquid supplementing instruction of the industrial personal computer so as to improve the internal pressure of the liquid nitrogen tank;
one end of the liquid supplementing pipe is connected into the liquid nitrogen tank, and the other end of the liquid supplementing pipe is connected into the first Dewar tank, so that liquid nitrogen in the liquid nitrogen tank is guided into the first Dewar tank under the action of the internal pressure of the liquid nitrogen tank in the liquid supplementing process;
the first dewar tank and the second dewar tank are provided with a communicating vessel therebetween, so that the liquid level of the first dewar tank is kept consistent with that of the second dewar tank through the communicating vessel in the liquid supplementing process;
the second Dewar flask is not sealed, is internally provided with a test platform for chip testing, and is connected with the first Dewar flask through the communicating vessel so as to keep the liquid level of the second Dewar flask at a target height in the process of liquid supplement.
2. The liquid nitrogen replenishment control device of claim 1, wherein the replenishment pipe extends into the bottom of the liquid nitrogen tank at one end and into the bottom of the first dewar at the other end.
3. The liquid nitrogen replenishment control device according to claim 1,
the liquid nitrogen pump heating rod is arranged in the liquid nitrogen tank, a first temperature sensor is arranged at one end, close to the bottom of the liquid nitrogen tank, of the liquid nitrogen pump heating rod, and a pressure sensor is arranged at one end, far away from the bottom of the liquid nitrogen tank, of the liquid nitrogen pump heating rod;
the liquid nitrogen pump controller is further configured to control to stop the liquid nitrogen pump heating rod based on the temperature value of the first temperature sensor and the pressure value of the pressure sensor under the condition that the obtained pressure value exceeds a first preset pressure threshold value, control to start the liquid nitrogen pump heating rod under the condition that the obtained pressure value is lower than a second preset pressure threshold value, and perform low liquid level alarm of the liquid nitrogen tank under the condition that the obtained temperature value exceeds the first preset temperature threshold value.
4. The liquid nitrogen replenishment control device according to claim 1, further comprising:
and the electromagnetic valve is arranged on a pipeline of the liquid supplementing pipe and is opened or closed according to the instruction of the liquid nitrogen pump controller so as to implement liquid supplementing or stop liquid supplementing.
5. The liquid nitrogen replenishment control device of claim 4, further comprising a second temperature sensor, a level gauge and a data acquisition module:
the second temperature sensor and the liquid level meter are both arranged in the first Dewar tank;
the data acquisition module is used for acquiring the temperature and the liquid level of the first dewar tank based on the second temperature sensor and the liquid level meter and uploading the temperature and the liquid level to the industrial personal computer;
the industrial computer is further configured to send a liquid supplementing instruction to the liquid nitrogen pump controller under the condition that the obtained liquid level of the first Dewar tank is lower than a first liquid level threshold value, and send a liquid supplementing stopping instruction to the liquid nitrogen pump controller under the condition that the obtained liquid level of the first Dewar tank is higher than a second liquid level threshold value.
6. The liquid nitrogen replenishment control device according to claim 5,
the industrial personal computer is further configured to send out a liquid overflow alarm of the first dewar tank under the condition that the obtained temperature of the first dewar tank is lower than a second preset temperature threshold value.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111603782.4A CN114263847A (en) | 2021-12-24 | 2021-12-24 | Liquid nitrogen supply control device |
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| CN202111603782.4A CN114263847A (en) | 2021-12-24 | 2021-12-24 | Liquid nitrogen supply control device |
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Cited By (1)
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| CN115199943A (en) * | 2022-06-17 | 2022-10-18 | 华中科技大学苏州脑空间信息研究院 | Liquid nitrogen filling and recovery device and liquid nitrogen liquid level control system |
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