CN114252209A - Device and method for testing leak rate of hemispherical resonator gyroscope kovar - Google Patents
Device and method for testing leak rate of hemispherical resonator gyroscope kovar Download PDFInfo
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- CN114252209A CN114252209A CN202111636491.5A CN202111636491A CN114252209A CN 114252209 A CN114252209 A CN 114252209A CN 202111636491 A CN202111636491 A CN 202111636491A CN 114252209 A CN114252209 A CN 114252209A
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- 238000012360 testing method Methods 0.000 title claims abstract description 107
- 229910000833 kovar Inorganic materials 0.000 title claims abstract description 78
- 238000000034 method Methods 0.000 title claims description 13
- 238000007789 sealing Methods 0.000 claims abstract description 85
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 55
- 239000000956 alloy Substances 0.000 claims abstract description 55
- 238000001514 detection method Methods 0.000 claims abstract description 37
- 239000001307 helium Substances 0.000 claims abstract description 16
- 229910052734 helium Inorganic materials 0.000 claims abstract description 16
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000004519 grease Substances 0.000 claims description 15
- 229920001296 polysiloxane Polymers 0.000 claims description 15
- 238000012856 packing Methods 0.000 claims description 12
- -1 polytetrafluoroethylene Polymers 0.000 claims description 11
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 11
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 11
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
Abstract
The invention relates to a leak rate testing device and a leak rate testing method for Kovar of a hemispherical resonator gyroscope, wherein the leak rate testing device comprises a tubular leak detection testing seat, the leak detection testing seat is provided with a connecting end and a testing end along the axial direction, the connecting end is in sealing connection with a vacuumizing interface of a leak detector, a coaxial rubber gasket is arranged on the testing end, one surface of the rubber gasket, facing the testing end, is in sealing fit with the end face of the testing end, and one surface of the rubber gasket, far away from the testing end, forms a working surface so as to place Kovar to be tested. The leak rate testing device is simple in structure, the testing method is carried out based on the leak rate testing device, the leak rate of the kovar alloy can be detected, the position of the leak hole can be determined by spraying helium at a fixed point, the operation is simple and reliable, the testing cost is low, the leak rate of the kovar alloy is tested simply and effectively by using the leak rate testing device, and the delivery quality of the hemispherical resonant gyroscope can be effectively improved.
Description
Technical Field
The invention belongs to the technical field of hemispherical resonator gyroscopes, and particularly relates to a hemispherical resonator gyroscope Kovar leakage rate testing device and method.
Background
The hemispherical resonance gyroscope belongs to the mechanical vibration gyroscope, has larger difference with a dynamic harmonic gyroscope, an optical gyroscope and the like in structure and principle, has the unique advantages of high precision, high reliability, long service life, strong nuclear radiation resistance and anti-interference capability and the like, can still continue to work within 15 minutes of power failure, and is highly valued by the international and domestic inertia technical field.
The head of the hemispherical resonator gyroscope is sealed into a sealed cavity by a metal shell and kovar alloy, the sealed cavity is vacuumized, and three parts of the hemispherical resonator gyroscope, namely an excitation cover, a base and a harmonic oscillator which are processed by high-quality fused quartz glass, are arranged in the sealed cavity; the performance of the harmonic oscillator is greatly related to the vacuum degree of the sealed cavity, and especially undamped vibration of the harmonic oscillator in a vacuum state is a basic guarantee for maintaining high precision, high reliability and long service life of the hemispherical resonant gyroscope.
At present, in order to improve the vacuum degree of a sealed cavity and the sealing performance of the sealed cavity for welding a metal shell and kovar alloy, Chinese patent CN201611003125.5 discloses a high-air-tightness laser sealing and welding method for a hemispherical resonator gyroscope sensitive head, the scheme can greatly reduce the size and the number of microcracks on a welding surface, greatly reduce the leakage rate of a cavity and obviously improve the sealing performance; the sealing performance of the metal shell and the kovar alloy is the basis for ensuring the welding sealing performance of the metal shell and the kovar alloy, the metal shell and the kovar alloy are generally subjected to separate leak detection before the metal shell and the kovar alloy are welded, and the leak detection of the metal shell is generally carried out by adopting a coloring method, a ventilation method, an ammonia gas or kerosene permeation method and the like so as to detect whether the metal shell has pores or microcrack defects and the like; the kovar alloy is disc-shaped and is formed by sintering insulation resistance glue, an exhaust pipe is vertically formed in the middle of one surface of the kovar alloy in a protruding mode, an air passage of the exhaust pipe penetrates through the kovar alloy, and a plurality of metal guide pins with glass insulators penetrate through the kovar alloy; the metal guide pin is used for transmitting an electric signal outside the sealed cavity to enable the harmonic oscillator to generate corresponding excitation, then transmitting a weak vibration signal inside the sealed cavity to the outside of the sealed cavity, and the exhaust pipe is externally connected with an air extractor and used for extracting gas inside the sealed cavity to maintain the vacuum degree of the sealed cavity; the kovar alloy is difficult to leak due to the structural particularity, the batch property of process manufacturing, the batch consistency and the like, generally only is checked through manufacturing process assurance or a visual inspection mode, the actual leak rate of the kovar alloy is not checked, the delivery quality of the kovar alloy is not effectively guaranteed, and the performance of the hemispherical resonator gyroscope is easily seriously influenced.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a kovar leakage rate testing device and method for a hemispherical resonator gyroscope, solve the problem that the leak detection of the kovar alloy is difficult at present, and achieve the effects of conveniently testing the kovar alloy leakage rate and improving the performance of the hemispherical resonator gyroscope.
In order to solve the technical problems, the invention adopts the following technical scheme:
the utility model provides a leak rate verifying attachment that hemisphere resonance top was felled, is including being pipy leak hunting test seat, and leak hunting test seat has link and test end along the axial, and the vacuum pumping interface sealing connection of link and leak detector is equipped with coaxial rubber packing ring on the test end, and rubber packing ring is towards the one side of test end and the sealed laminating of terminal surface of test end, and the one side that the test end was kept away from to the rubber packing ring forms the working face so that detect connect the kovar alloy that awaits measuring.
Furthermore, an annular sealing table is formed on the end face of the testing end along the axial direction in a protruding mode, the sealing table is coaxial with the leakage detection testing seat, the outer diameter of the sealing table is matched with the inner diameter of the rubber gasket, the inner wall of the rubber gasket is in sealing fit with the outer wall of the sealing table, and the thickness of the sealing table is smaller than that of the rubber gasket.
Further, the inner diameter of the sealing platform is larger than that of the leak detection test seat.
Furthermore, sealing silicone grease is uniformly arranged between one surface of the rubber gasket facing the testing end and the end face of the testing end, and sealing silicone grease is uniformly arranged between the inner wall of the rubber gasket and the outer wall of the sealing table.
Furthermore, a circle of connecting part is formed on the outer wall of the connecting end along the circumferential direction in a protruding mode, and the circle of connecting part is connected with a corresponding connecting part of a vacuumizing interface of the leak detector in a sealing mode through a barbell buckle.
Further, the leak detector is a helium mass spectrometer leak detector.
The invention also comprises a leak rate testing method of hemispherical resonator gyroscope kovar, which uses the leak rate testing device of hemispherical resonator gyroscope kovar, and comprises the following steps:
1) connecting the connecting end with a vacuumizing interface of the leak detector in a sealing way;
2) respectively smearing sealing silicone grease on the end face of the testing end and the outer wall of the sealing platform;
3) placing the rubber gasket on the testing end, so that one surface of the rubber gasket is in sealing fit with the end face of the testing end, and the inner wall of the rubber gasket is in sealing fit with the outer wall of the sealing table;
4) coaxially placing the kovar alloy to be detected on the working surface of the rubber gasket, wherein one surface, provided with the exhaust pipe, of the kovar alloy faces the direction far away from the rubber gasket, and the edge of one circle, facing the rubber gasket, of the kovar alloy is in sealing fit with the working surface of the rubber gasket;
5) sealing the end of the exhaust pipe;
6) starting a leak detector to pump the space in the leak detection test seat to a negative pressure value required by inspection;
7) and obtaining the leakage rate of the kovar alloy according to the change condition of the air pressure value within the set time.
Further, the leakage rate obtained in step 7) is unqualified;
continuously keeping the space in the leak detection test seat at negative pressure, and sequentially applying helium to the parts, which are possibly leaked, on the outer side of the kovar alloy through a nozzle;
when helium is applied to a part where leakage is likely to occur, if the leak detector detects helium, the part is determined to be a leakage part.
Further, before the step 4), a sealing silicone grease is coated on the working surface of the rubber gasket to ensure the sealing and jointing effect after the kovar alloy is coaxially placed.
Further, in the step 5), the tail end of the exhaust pipe is sealed by a polytetrafluoroethylene block; before plugging, sealing silicone grease is uniformly coated between the contact surfaces of the polytetrafluoroethylene block and the exhaust pipe.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the leakage rate detection device, the kovar alloy to be detected and the leak detector are connected through the tubular leak detection test seat, and the test end of the leak detection test seat is in sealing connection with the kovar alloy to be detected through the rubber gasket; the leak rate testing device is simple and effective in testing the leak rate of the kovar alloy, can effectively improve the delivery quality of the hemispherical resonator gyroscope, and can further improve the manufacturing process of the kovar alloy through the confirmation of the leak part.
2. The sealing platform is arranged to increase the contact surface between the rubber gasket and the testing end of the leak detection testing seat, so that the sealing property of the connection between the rubber gasket and the testing end of the leak detection testing seat is further improved; meanwhile, the rubber gasket is sleeved outside the sealing table, so that the rubber gasket is installed and positioned when the rubber gasket is used conveniently.
3. The detection method is carried out based on the leakage rate detection device, not only can detect the leakage rate of the kovar alloy, but also can determine the position of a leakage hole by spraying helium at a fixed point, and has the advantages of simple and reliable operation and low detection cost.
Drawings
FIG. 1 is a schematic structural diagram of a hemispherical resonator gyroscope Kovar leak rate testing device according to an embodiment;
FIG. 2 is a schematic view of the connection relationship of kovar alloys in a leak detection state;
FIG. 3 is a schematic diagram illustrating a use state of the hemispherical resonator gyroscope Kovar leak rate verifying device according to the embodiment;
the leakage detection device comprises a leakage detection test seat 1, a connecting part 11, a sealing table 12, a rubber gasket 2, a working surface 21, kovar alloy 3, an exhaust pipe 31, a metal guide pin 32 and a polytetrafluoroethylene block 4.
Detailed Description
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
Example (b):
please refer to fig. 1, a hemispherical resonator gyroscope kovar leakage rate testing apparatus, which comprises a tubular leak detection test seat 1, wherein the leak detection test seat 1 has a connection end and a test end along the axial direction, the connection end is connected with a vacuum pumping interface of a leak detector (not shown in the figure), a coaxial rubber gasket 2 is arranged on the test end, one surface of the rubber gasket 2 facing the test end is in sealing fit with the end surface of the test end, and one surface of the rubber gasket 2 far away from the test end forms a working surface 21 so as to place a kovar alloy 3 to be tested.
According to the leakage rate detection device, the tubular leak detection test seat 1 is used for connecting the kovar alloy 3 to be detected and a leak detector, and the test end of the leak detection test seat 1 is in sealing connection with the kovar alloy 3 to be detected through the rubber gasket 2; the leak rate testing device is simple and effective in testing the leak rate of the kovar alloy 3, and can effectively improve the delivery quality of the hemispherical resonator gyroscope.
In the embodiment, a circle of connecting part 11 is formed on the outer wall of the connecting end in a protruding manner along the circumferential direction, one surface of the connecting part 11 facing the rubber gasket 2 and the outer wall of the leak detection test seat 1 are in conical surface transition, and the connecting part 11 on the connecting end is in sealing connection with a vacuumizing interface of a leak detector through a barbell buckle (not shown in the figure); the leak detector is a helium mass spectrometer leak detector.
An annular sealing table 12 is formed on the end face of the testing end in a protruding mode along the axial direction, the sealing table 12 is coaxial with the leak detection testing seat 1, the outer diameter of the sealing table 12 is matched with the inner diameter of the rubber gasket 2, the inner wall of the rubber gasket 2 is in sealing fit with the outer wall of the sealing table 12, and the thickness of the sealing table 12 is smaller than that of the rubber gasket 2;
in this way, the sealing platform 12 is arranged to increase the contact surface between the rubber gasket 2 and the testing end of the leak detection testing seat 1, so that the sealing property of the connection between the rubber gasket 2 and the testing end of the leak detection testing seat 1 is further improved; meanwhile, the rubber gasket 2 is sleeved outside the sealing table 12, so that the rubber gasket 2 is installed and positioned when the rubber gasket is used conveniently.
In this embodiment, in order to further improve the sealing performance of the connection between the rubber gasket 2 and the testing end of the leak detection testing seat 1, sealing silicone grease (not shown in the figure) is uniformly arranged between one surface of the rubber gasket 2 facing the testing end and the end surface of the testing end, and sealing silicone grease is uniformly arranged between the inner wall of the rubber gasket 2 and the outer wall of the sealing table 12.
Further, the inner diameter of the sealing table 12 is larger than that of the leak detection test seat 1; like this, leak hunting test seat 1 and the inside syllogic step hole that increases in proper order of internal diameter extremely down from last that forms of rubber packing ring 2, in the use, to leak hunting test seat 1 and the inside evacuation of rubber packing ring 2 during, the gas flow is more steady, makes the leakproofness that leak hunting test seat 1 and rubber packing ring 2 are connected better.
Referring to fig. 2 and fig. 3, the invention further includes a hemispherical resonator kovar leakage rate test method, which uses the hemispherical resonator kovar leakage rate test apparatus as described above, and includes the following steps:
1) connecting the connecting end with a vacuumizing interface of the leak detector in a sealing way;
2) respectively smearing sealing silicone grease on the end face of the testing end and the outer wall of the sealing table 12;
3) placing the rubber gasket 2 on the testing end, and enabling one surface of the rubber gasket 2 to be in sealing fit with the end face of the testing end, wherein the inner wall of the rubber gasket 2 is in sealing fit with the outer wall of the sealing table 12;
4) coaxially placing the kovar alloy 3 to be detected on the working surface 21 of the rubber gasket 2, wherein one surface, provided with the exhaust pipe 31, of the kovar alloy 3 is far away from the rubber gasket 2, and the other surface of the kovar alloy 3 is in sealing fit with the working surface 21 of the rubber gasket 2;
the kovar alloy 3 is disc-shaped and is formed by sintering insulating resistor glue, an exhaust pipe 31 is vertically formed in the middle of one surface of the kovar alloy 3 in a protruding mode, an air passage of the exhaust pipe 31 penetrates through the kovar alloy 3, and a plurality of metal guide pins 32 with glass insulators penetrate through the kovar alloy 3;
5) sealing the end of the exhaust pipe 31;
6) starting a leak detector to pump the background leak rate to the level required by inspection; in this example, the background leak rate was extracted to 5X 10-11Pa·m3/s；
7) The leak detector detects the leak rate of the kovar alloy 3, and specifically, the leak rate of the kovar alloy can be obtained according to the air pressure readings and the change of the air pressure value in unit time.
Wherein, when carrying out step 6) before, can set up one on leak hunting test seat 1 or rubber packing ring 2 (including kovar alloy 3) and detain the cover, detain the cover and have entry and export, let in helium to detaining the cover through the entry, like this, in step 7) the process of leaking hunting, leak appearance detectable helium, the qualitative judgement has taken place the seepage.
Wherein, when the step 7) is carried out, if the obtained leakage rate is judged to be unqualified; the space in the leak detection test seat 1 can be kept at negative pressure, and helium is sequentially applied to the parts, possibly leaking, on the outer side of the kovar alloy 3 through the nozzles; when helium is applied to a part where leakage is likely to occur, if the leak detector detects helium, the part is determined to be a leakage part. Thus, by confirming the leak portion, the manufacturing process of kovar alloy 3 can be further feedback-improved.
In order to improve the sealing property of the kovar alloy 3 and the rubber gasket 2, before the step 4), the working surface 21 of the rubber gasket 2 is coated with sealing silicone grease.
In the step 5), a polytetrafluoroethylene block 4 which is columnar and has a diameter matched with the inner diameter of the exhaust pipe 31 is placed inside the tail end of the exhaust pipe 31 so as to seal the tail end of the exhaust pipe 31; before the polytetrafluoroethylene block 4 is placed, sealing silicone grease is coated on the contact surface between the polytetrafluoroethylene block 4 and the inner wall of the exhaust pipe 31, so that the sealing performance between the polytetrafluoroethylene block 4 and the inner wall of the exhaust pipe 31 is improved, and the phenomenon that gas enters from the exhaust pipe 31 to influence or interfere the inspection result during inspection is avoided.
In this embodiment, polytetrafluoroethylene piece 4 is two segmentation step shafts form, the direct and the internal diameter phase-match of blast pipe 31 of path section, and the path section is located blast pipe 31 and plugs up blast pipe 31, and outside the path section is located blast pipe 31, the step face and the terminal face butt of blast pipe 31 of path section and path section transition to avoid polytetrafluoroethylene piece 4 to fall into blast pipe 31 completely.
Finally, the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting, although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all of them should be covered in the claims of the present invention.
Claims (10)
1. The utility model provides a leak rate verifying attachment that hemisphere resonance top was felled which characterized in that: including being pipy leak hunting test seat, leak hunting test seat has link and test end along the axial, and the link is connected with the evacuation interface sealing of leak detector, is equipped with coaxial rubber packing ring on the test end, and the one side of rubber packing ring towards the test end and the terminal surface sealing laminating of test end, and the one side that the test end was kept away from to the rubber packing ring forms the working face so that detect connect the kovar alloy that awaits measuring.
2. The apparatus for testing the leak rate of hemispherical resonator gyroscope Kovar according to claim 1, wherein: an annular sealing table is formed on the end face of the testing end along the axial direction in a protruding mode, the sealing table is coaxial with the leakage detection testing seat, the outer diameter of the sealing table is matched with the inner diameter of the rubber gasket, the inner wall of the rubber gasket is in sealing fit with the outer wall of the sealing table, and the thickness of the sealing table is smaller than that of the rubber gasket.
3. The apparatus for testing the leak rate of hemispherical resonator gyroscope Kovar according to claim 2, wherein: the inner diameter of the sealing platform is larger than that of the leak detection test seat.
4. The apparatus for testing the leak rate of hemispherical resonator gyroscope Kovar according to claim 3, wherein: the rubber packing ring is evenly equipped with sealed silicone grease between the one side of test end and the terminal surface of test end, evenly is equipped with sealed silicone grease between the inner wall of rubber packing ring and the outer wall of seal platform.
5. The apparatus for testing the leak rate of hemispherical resonator gyroscope kovar according to any one of claims 1-4, wherein: the outer wall of the connecting end is provided with a circle of connecting part along the circumferential direction in a protruding mode, and the circle of connecting part is connected with a corresponding connecting part of a vacuumizing interface of the leak detector in a sealing mode through a barbell buckle.
6. The apparatus for testing the leak rate of hemispherical resonator gyroscope Kovar according to claim 4, wherein: the leak detector is a helium mass spectrometer leak detector.
7. A leak rate detection method of hemispherical resonance gyroscope Kovar is characterized by comprising the following steps: the leak rate test method using the leak rate test apparatus of hemispherical resonator gyro kovar as claimed in claim 6, comprising the steps of:
1) connecting the connecting end with a vacuumizing interface of the leak detector in a sealing way;
2) respectively smearing sealing silicone grease on the end face of the testing end and the outer wall of the sealing platform;
3) placing the rubber gasket on the testing end, so that one surface of the rubber gasket is in sealing fit with the end face of the testing end, and the inner wall of the rubber gasket is in sealing fit with the outer wall of the sealing table;
4) coaxially placing the kovar alloy to be detected on the working surface of the rubber gasket, wherein one surface, provided with the exhaust pipe, of the kovar alloy faces the direction far away from the rubber gasket, and the edge of one circle, facing the rubber gasket, of the kovar alloy is in sealing fit with the working surface of the rubber gasket;
5) sealing the end of the exhaust pipe;
6) starting a leak detector to pump the space in the leak detection test seat to a negative pressure value required by inspection;
7) and obtaining the leakage rate of the kovar alloy according to the change condition of the air pressure value within the set time.
8. The method for verifying the leak rate of hemispherical resonator gyroscope kovar as claimed in claim 7, wherein: unqualified leakage rate obtained in the step 7);
continuously keeping the space in the leak detection test seat at negative pressure, and sequentially applying helium to the parts, which are possibly leaked, on the outer side of the kovar alloy through a nozzle;
when helium is applied to a part where leakage is likely to occur, if the leak detector detects helium, the part is determined to be a leakage part.
9. The method for verifying the leak rate of hemispherical resonator gyroscope kovar as claimed in claim 7, wherein: before the step 4), coating sealing silicone grease on the working surface of the rubber gasket to ensure the sealing and jointing effect after the coaxial arrangement of the kovar alloy.
10. The method for verifying the leak rate of hemispherical resonator gyroscope kovar as claimed in claim 7, wherein: in the step 5), the tail end of the exhaust pipe is sealed by a polytetrafluoroethylene block; before plugging, sealing silicone grease is uniformly coated between the contact surfaces of the polytetrafluoroethylene block and the exhaust pipe.
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| CN213091094U (en) * | 2020-10-30 | 2021-04-30 | 中国工程物理研究院核物理与化学研究所 | Kovar structure vacuum leak detection tool |
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