CN114249109A - Automatic mounting device for display substrate - Google Patents

Automatic mounting device for display substrate Download PDF

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Publication number
CN114249109A
CN114249109A CN202011000368.XA CN202011000368A CN114249109A CN 114249109 A CN114249109 A CN 114249109A CN 202011000368 A CN202011000368 A CN 202011000368A CN 114249109 A CN114249109 A CN 114249109A
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CN
China
Prior art keywords
display substrate
positioning
assembly
platform
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011000368.XA
Other languages
Chinese (zh)
Inventor
陈圣洲
李斌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Transcend Optronics Technology Yangzhou Co ltd
Original Assignee
Transcend Optronics Technology Yangzhou Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Transcend Optronics Technology Yangzhou Co ltd filed Critical Transcend Optronics Technology Yangzhou Co ltd
Priority to CN202011000368.XA priority Critical patent/CN114249109A/en
Publication of CN114249109A publication Critical patent/CN114249109A/en
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04—Detection means
    • B65G2203/042—Sensors

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Liquid Crystal (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The application discloses automatic loading device of display substrates, it includes feeding agencies, positioning mechanism, moving mechanism and clean mechanism. The material taking mechanism is used for taking the display substrate. The positioning mechanism is arranged on one side of the material taking mechanism, and the material taking mechanism places the display substrate on the positioning mechanism. The moving mechanism is provided with a track, and the positioning mechanism is movably arranged on the track. The cleaning mechanism is located on the track, and the positioning mechanism moves along the track to pass below the cleaning mechanism. The automatic mounting device of display substrate of this application can not only save a large amount of human costs through automatic get the piece, put the piece and automatic clean mode, also can promote display substrate's finished product yield.

Description

Automatic mounting device for display substrate
Technical Field
The application relates to the technical field of display substrates, in particular to an automatic sheet loading device of a display substrate.
Background
In the prior art, the manufacturing process of the display substrate mounting requires a lot of manpower, and the manufacturing process of the display substrate mounting requires manual operations of picking up and placing the display substrate and cleaning the display substrate. In the manufacturing process of the display substrate, a large amount of manpower is wasted, the positioning precision of manual piece placing is poor, the effect of manual cleaning is poor, the yield of finished products of the display substrate cannot be guaranteed, and the requirement of production cannot be met.
Disclosure of Invention
The embodiment of the application provides an automatic mounting device of display substrates, can effectively solve and need consume a large amount of manpowers at present and make, problem that the finished product yield is not high
In order to solve the technical problem, the present application is implemented as follows:
the utility model provides an automatic loading device of display substrates, it includes feeding agencies, positioning mechanism, moving mechanism and clean mechanism. The material taking mechanism is used for taking and taking the display substrate and comprises a driving piece, a mechanical arm and a material taking piece, the driving piece drives the mechanical arm to rotate, and the material taking piece is arranged at one end of the mechanical arm; the positioning mechanism is arranged on one side of the material taking mechanism, the material taking mechanism places the display substrate on the positioning mechanism, the positioning mechanism comprises a platform and a supporting component, and the supporting component is arranged on the platform; the moving mechanism is provided with a track, a driving motor and a moving platform, the moving platform is movably arranged on the track, the driving motor drives the moving platform to move on the track, and the positioning mechanism is arranged on the moving platform; and the cleaning mechanism is positioned on the path of the track, and the moving mechanism bears the display substrate and moves through the cleaning mechanism along the track.
In the embodiment of the application, the automatic loading device of the display substrate is automated through the mechanisms of the material taking mechanism, the positioning mechanism, the moving mechanism and the cleaning mechanism so as to replace a large number of manual modes. The automatic mounting device of the display substrate can not only save a large amount of labor cost, but also improve the yield of finished products of the display substrate through automatic sheet taking, sheet placing and automatic cleaning modes.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:
fig. 1 is a perspective view of an automatic sheet mounting apparatus for a display substrate according to the present application;
FIG. 2 is an electrical connection diagram of a take-out mechanism of the present application;
FIG. 3 is a first view illustrating the operation of the material taking mechanism and the positioning mechanism of the present application;
fig. 4 is a second operation state diagram of the material taking mechanism and the positioning mechanism of the present application;
fig. 5 is a third actuation state diagram of the material taking mechanism and the positioning mechanism of the present application;
FIG. 6 is an electrical connection diagram of the positioning mechanism of the present application;
FIG. 7 is a first diagram illustrating the operation of the positioning mechanism of the present application;
FIG. 8 is a second operational view of the positioning mechanism of the present application;
FIG. 9 is a first diagram illustrating the operation states of the positioning mechanism, the moving mechanism and the cleaning mechanism according to the present application; and
fig. 10 is a second operation state diagram of the positioning mechanism, the moving mechanism and the cleaning mechanism according to the present application.
Detailed Description
Embodiments of the present application are illustrated in the drawings and, for purposes of clarity, numerous implementation details are set forth in the following description. It should be understood, however, that these implementation details should not be used to limit the application. That is, in some embodiments of the present application, details of these implementations are not necessary. In addition, some conventional structures and components are shown in simplified schematic form in the drawings. In the following embodiments, the same or similar components will be denoted by the same reference numerals.
Fig. 1 is a perspective view of an automatic sheet loading device for a display substrate according to the present application. As shown in the drawing, the automatic sheet loading apparatus 1 for a display substrate according to the present embodiment includes a material taking mechanism 11, a positioning mechanism 13, a moving mechanism 15, and a cleaning mechanism 17. The material taking mechanism 11 is used for taking the display substrate 100. The positioning mechanism 13 is disposed on one side of the material taking mechanism 11, and the material taking mechanism 11 places the display substrate 100 on the positioning mechanism 13. The moving mechanism 15 has a rail 151, and the positioning mechanism 13 is movably provided on the rail 151. The cleaning mechanism 17 is located on the rail 151, and the positioning mechanism 13 moves along the rail 151 past under the cleaning mechanism 17.
Fig. 2 and fig. 5 are an electrical connection diagram of the material taking mechanism and operation state diagrams of the material taking mechanism and the positioning mechanism according to the present application, i.e., a first diagram to a third diagram. As shown in the figure, the material taking mechanism 11 includes a driving member 111, a robot 113 and a material taking member 115, the driving member 111 drives one end of the robot 113 to rotate, and the material taking member 115 is disposed at the other end of the robot 113. In this embodiment, the material taking mechanism 11 is a multi-axial mechanical material taking mechanism.
As mentioned above, the driving member 111 includes the first driving member 1111, the second driving member 1112, the third driving member 1113 and the fourth driving member 1114. The robot 113 includes a first robot 1131, a second robot 1132, and a third robot 1133. The first driving unit 1111 is connected to one end of the first robot 1131 and drives the one end of the first robot 1131 to rotate, and the second driving unit 1112 is disposed at the other end of the first robot 1131. The second driving element 1112 is connected to one end of the second robot 1132, and drives the one end of the second robot 1132 to rotate, and the third driving element 1113 and the fourth driving element 1114 are disposed at the other end of the second robot 1132. The third driving member 1113 is connected to the third mechanical arm 1133 and drives the third mechanical arm 1133 to rotate. The fourth driver 1114 is connected to the third robot 1133 and drives the third robot 1133 to move up and down. One end of the third mechanical arm 1133 is connected to the material taking member 115, and the material taking member 115 can rotate or/and lift by the third mechanical arm 1133.
The material-fetching unit 115 includes a fork 1151 and a plurality of adsorption heads 1153, the fork 1151 is disposed at the other end of the robot arm 113 (i.e., the third robot arm 1133), and the plurality of adsorption heads 1153 are disposed on the fork 1151. In this embodiment, the display substrate 100 is taken out by the plurality of suction heads 1153 of the forks 1151.
In this embodiment, the material taking mechanism 11 drives the robot 113 to move through the driving component 111, so that the tooth fork 1151 at one end of the robot 113 is transferred into a storage device box (not shown) for loading the display substrate 100, wherein the top surface of the display substrate 100 has a circuit layer, and the circuit layer is not suitable for being touched to avoid affecting the circuit layer, so that the tooth fork 1151 corresponds to the bottom surface of the display substrate 100 in the storage device box, and after the absorption head 1153 on the tooth fork 1151 absorbs the bottom surface of the display substrate 100, the driving tooth fork 1151 of the robot 113 is driven to take out the display substrate 100 from the storage device box.
Please refer to fig. 6, which is an electrical connection diagram of the positioning mechanism of the present application. As shown in the figure, in the present embodiment, the positioning mechanism 13 includes a platform 131 and a supporting component 133, the supporting component 133 is disposed on the platform 131, the fork 1151 drives the display substrate 100 to the platform 131, and the supporting component 133 supports and lifts the bottom of the display substrate 100, so that the display substrate 100 is separated from the fork 1151. In this embodiment, the display substrate 100 is taken off from the fork 1151 by the supporting member 133, and the display substrate 100 is placed on the stage 131.
As mentioned above, the supporting assembly 133 has a plurality of supporting posts 1331 and a supporting driving member 1333, and the supporting posts 1331 are received in the platform 131 when the supporting posts 1331 are not used. When the robot 113 controls the fork 1151 of the workpiece 115 to move to the platform 131 for placing the display substrate 100, the fork 1151 moves between the supporting pillars 1331.
The positioning mechanism 13 further includes a sensor 137 and a controller 139, the sensor 137 is disposed on the platform 131, the controller 139 is electrically connected to the sensor 137, the sensor 137 senses the fork 1151, the sensor 137 sends a sensing signal to the controller 139, and the controller 139 controls the supporting component 133 to lift and support the display substrate 100. The supporting driving unit 1333 drives the supporting columns 1331 to ascend, the supporting columns 1331 ascend from two sides of the fork 1151 to jack up the bottom surface of the display substrate 100, so that the display substrate 100 is separated from the fork 1151, and the robot 113 controls the fork 1151 of the material acquiring part 115 to be pulled out from the lower side of the display substrate 100.
Please refer to fig. 7 and fig. 8, which are first and second operation state diagrams of the positioning mechanism of the present application. As shown in the figure, in the present embodiment, after the robot 113 controls the fork 1151 of the material preparing member 115 to be pulled away, the sensor 137 senses that the fork 1151 is pulled away from the platform, the sensor 137 sends a sensing signal to the controller 139 again, and the controller 139 controls the plurality of supports 1331 of the supporting element 133 to descend, so that the display substrate 100 is placed on the platform 131 (as shown in fig. 7).
Furthermore, the positioning mechanism 13 further includes a positioning assembly 135, the positioning assembly 135 is movably disposed on the platform 131 and located at one side of the supporting assembly 133, the positioning assembly 135 can be used for adjusting the position of the display substrate 100, and the positioning assembly 135 includes a first direction positioning assembly and a second direction positioning assembly. The first direction positioning assembly is located on one side of the support assembly 133 and the second direction positioning assembly is located on the other side of the support assembly 133. Wherein the first direction positioning assembly comprises a first direction positioning member 1351, a first positioning driving member 1352 and a first direction hole slot 1353, an opening of the first direction hole slot 1353 extends toward the direction of the support assembly 133, the first direction positioning member 1351 passes through the first direction hole slot 1353, and the first positioning driving member 1352 drives the first direction positioning member 1351 to move along the first direction hole slot 1353. The second direction positioning member includes a second direction positioning member 1354, a second positioning driving member 1355 and a second direction hole groove 1356, an opening of the second direction hole groove 1356 extends toward the direction of the support member 133, the second direction positioning member 1354 passes through the second direction hole groove 1356, and the second positioning driving member 1355 drives the second direction positioning member 1354 to move along the second direction hole groove 1356.
In this embodiment, there are a plurality of first direction positioning members 1351 and a plurality of second direction positioning members 1354, and a plurality of first direction hole slots 1353 and a plurality of second direction hole slots 1356. A plurality of first direction hole grooves 1353 and a plurality of second direction hole grooves 1356 are respectively arranged on the stage 131. The user can adjust a plurality of first direction holes 1353 and a plurality of second direction holes 1356 of the first direction positioning members 1351 and the second direction positioning members 1354 according to the display substrate 100. Thus, the moving paths of the first direction positioning elements 1351 and the second direction positioning elements 1354 can correspond to the sides of the display substrate 100.
As mentioned above, the sensor 137 of the positioning mechanism 13 corresponds to the display substrate 100, and the sensor 137 can be used for sensing that the display substrate 100 is disposed above the platform 131. When the sensor 137 senses that the display substrate 100 is disposed on the platform 131, the sensor 137 sends a sensing signal to the controller 139, and the controller 139 can operate the first direction positioning element 1351 to push the side of the display substrate 100 and the second direction positioning element 1354 to push the other side of the display substrate 100. The display substrate 100 is adjusted to move to a predetermined position. In addition, the platform 131 of the positioning mechanism 13 further includes a suction hole 1311, and the controller 139 can control the suction hole 1311 to suck and fix the position of the display substrate 100.
Please refer to fig. 9 and fig. 10, which are first and second operation state diagrams of the positioning mechanism of the present application. As shown in the figure, in the present embodiment, the moving mechanism 15 further includes a driving motor 153 and a moving stage 155, the moving stage 155 is movably disposed on the rail 151, the driving motor 153 drives the moving stage 155 to move on the rail 151, and the positioning mechanism 13 is disposed on the moving stage 155. The moving stage 155 of the moving mechanism 15 moves the positioning mechanism 13 through the cleaning mechanism 17.
In this embodiment, the cleaning mechanism 17 is a negative pressure suction mechanism, the cleaning mechanism 17 includes an air inlet 171, the air inlet 171 corresponds to the display substrate 100 carried by the positioning mechanism 13, the display substrate 100 passes through the lower portion of the air inlet 171, and the air inlet 171 can be used for cleaning the surface of the display substrate 100, so as to remove the glass debris, floating dust and other impurities left by the TFT substrate of the display substrate 100 due to the cutting and slicing. When the positioning mechanism 13 moves through the cleaning mechanism 17 and the display substrate 100 on the positioning mechanism 13 is located below the air inlet 171 of the cleaning mechanism 17, the height H between the air inlet 171 and the display substrate 100 is between 5mm and 10 mm.
In this embodiment, the automatic mounting apparatus 1 for display substrates can automatically take out the display substrate 100 through the material taking mechanism 11 and automatically place the display substrate 100 on the positioning mechanism 13, and the positioning mechanism 13 can automatically fix the display substrate 100 and automatically adjust and correct the position of the display substrate 100. The positioning mechanism 13 automatically drives the display substrate 100 to pass through the cleaning mechanism 17. The cleaning mechanism 17 automatically performs vacuum suction to clean the display substrate 100. The automatic mounting apparatus 1 for display substrates cleans the display substrate 100 in an automated manner, so that not only a large amount of labor cost can be saved, but also the yield of the display substrate 100 can be improved.
To sum up, the application provides an automatic loading device of display substrates, through the mechanism automation of extracting mechanism, positioning mechanism, moving mechanism and clean mechanism to replace a large amount of manual modes. The automatic mounting device of the display substrate can not only save a large amount of labor cost, but also improve the yield of finished products of the display substrate through automatic sheet taking, sheet placing and automatic cleaning modes.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The foregoing description shows and describes several preferred embodiments of the present application, but as before, it is to be understood that the application is not limited to the forms disclosed herein, but is not to be construed as excluding other embodiments and is capable of use in various other combinations, modifications, and environments and is capable of changes within the scope of the inventive concept as expressed herein, commensurate with the above teachings, or the skill or knowledge of the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the application, which is to be protected by the claims appended hereto.

Claims (11)

1. An automatic mounting device for a display substrate, comprising:
the material taking mechanism is used for taking the display substrate and comprises a driving piece, a mechanical arm and a material taking piece, the driving piece drives the mechanical arm to rotate, and the material taking piece is arranged at one end of the mechanical arm;
the positioning mechanism is arranged on one side of the material taking mechanism, the material taking mechanism is used for placing the display substrate on the positioning mechanism, the positioning mechanism comprises a platform and a supporting component, and the supporting component is arranged on the platform;
the moving mechanism is provided with a track, a driving motor and a moving table, the moving table is movably arranged on the track, the driving motor drives the moving table to move on the track, and the positioning mechanism is arranged on the moving table; and
the cleaning mechanism is positioned on the path of the rail, and the moving mechanism carries the display substrate to move along the rail and pass through the cleaning mechanism.
2. The apparatus of claim 1, wherein the pick-up device comprises a fork and a plurality of suction heads, the fork is disposed at the other end of the robot arm, the plurality of suction heads are disposed on the fork, and a bottom surface of the display substrate is disposed on the plurality of suction heads.
3. The apparatus of claim 2, wherein the fork carries the display substrate to the platform, and the support assembly supports and lifts a bottom of the display substrate to separate the display substrate from the fork.
4. The apparatus of claim 3, wherein the positioning mechanism further comprises a sensor and a controller, the sensor is disposed on the platform, the controller is electrically connected to the sensor, the sensor senses the fork and sends a sensing signal to the controller, and the controller controls the supporting member to lift up to support the display substrate.
5. The apparatus of claim 1, wherein the positioning mechanism further comprises a positioning assembly movably disposed on the platform and located at one side of the supporting assembly, and the positioning assembly is configured to adjust the position of the display substrate.
6. The apparatus of claim 5, wherein the positioning assembly comprises a first direction positioning assembly and a second direction positioning assembly, the first direction positioning assembly is located on one side of the support assembly, and the second direction positioning assembly is located on the other side of the support assembly.
7. The automatic loading device of claim 6, wherein the first direction positioning assembly comprises a first direction positioning element, a first positioning driving element and a first direction slot, the opening of the first direction slot extends toward the support assembly, the first direction positioning element passes through the first direction slot, the first positioning driving element drives the first direction positioning element to move along the first direction slot, the second direction positioning assembly comprises a second direction positioning element, a second positioning driving element and a second direction slot, the opening of the second direction slot extends toward the support assembly, the second direction positioning element passes through the second direction slot, and the second positioning driving element drives the second direction positioning element to move along the second direction slot.
8. The apparatus of claim 5, wherein the positioning mechanism further comprises a sensor and a controller, the sensor is disposed on the platform and corresponds to the display substrate, the controller is electrically connected to the sensor, wherein the sensor senses that the display substrate is disposed on the platform, the sensor sends a sensing signal to the controller, and the controller controls the positioning assembly to push the side of the display substrate.
9. The automatic sheet loading apparatus for a display substrate according to claim 1, wherein the stage of the positioning mechanism further comprises an adsorption hole for adsorbing and fixing the display substrate.
10. The automatic sheet loading apparatus for display substrates of claim 1, wherein the cleaning mechanism includes a suction port corresponding to the display substrate carried by the positioning mechanism, the display substrate passing below the suction port, the suction port cleaning the surface of the display substrate.
11. The apparatus of claim 10, wherein the positioning mechanism moves through the cleaning mechanism, and the height of the gap between the suction opening and the display substrate is between 5mm and 10mm when the display substrate is located under the suction opening.
CN202011000368.XA 2020-09-22 2020-09-22 Automatic mounting device for display substrate Pending CN114249109A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011000368.XA CN114249109A (en) 2020-09-22 2020-09-22 Automatic mounting device for display substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011000368.XA CN114249109A (en) 2020-09-22 2020-09-22 Automatic mounting device for display substrate

Publications (1)

Publication Number Publication Date
CN114249109A true CN114249109A (en) 2022-03-29

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JPH069844U (en) * 1992-07-13 1994-02-08 大日本スクリーン製造株式会社 Substrate transfer stage and roll coater using the same
US20030000075A1 (en) * 2000-06-29 2003-01-02 Shinichi Ogimoto Apparatus and method for carrying substrate
JP2002270661A (en) * 2001-03-07 2002-09-20 Hitachi Electronics Eng Co Ltd Substrate-stacking apparatus
JP2009018917A (en) * 2007-07-12 2009-01-29 Tokyo Ohka Kogyo Co Ltd Application device, substrate delivery method and application method
JP2009043846A (en) * 2007-08-07 2009-02-26 Micronics Japan Co Ltd Substrate conveying device
CN101815659A (en) * 2007-11-13 2010-08-25 株式会社爱发科 Movable element and processing stage
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CN111153222A (en) * 2020-01-14 2020-05-15 东莞市马越实业有限公司 Full-automatic frame inserting machine for glass cover plate

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