CN114243358B - Air-tightness metal packaging structure and manufacturing method - Google Patents

Air-tightness metal packaging structure and manufacturing method Download PDF

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Publication number
CN114243358B
CN114243358B CN202111556235.5A CN202111556235A CN114243358B CN 114243358 B CN114243358 B CN 114243358B CN 202111556235 A CN202111556235 A CN 202111556235A CN 114243358 B CN114243358 B CN 114243358B
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China
Prior art keywords
mounting hole
silicon
aluminum
aluminum alloy
metal packaging
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CN202111556235.5A
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CN114243358A (en
Inventor
郭旭光
徐达
常青松
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CETC 13 Research Institute
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CETC 13 Research Institute
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/46Bases; Cases
    • H01R13/52Dustproof, splashproof, drip-proof, waterproof, or flameproof cases
    • H01R13/5202Sealing means between parts of housing or between housing part and a wall, e.g. sealing rings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/0008Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/14Preventing or minimising gas access, or using protective gases or vacuum during welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20Bonding
    • B23K26/21Bonding by welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/46Bases; Cases
    • H01R13/502Bases; Cases composed of different pieces
    • H01R13/504Bases; Cases composed of different pieces different pieces being moulded, cemented, welded, e.g. ultrasonic, or swaged together
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R43/00Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
    • H01R43/005Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for making dustproof, splashproof, drip-proof, waterproof, or flameproof connection, coupling, or casing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R43/00Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
    • H01R43/18Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for manufacturing bases or cases for contact members
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/08Non-ferrous metals or alloys
    • B23K2103/10Aluminium or alloys thereof

Abstract

The invention provides an airtight metal packaging structure and a manufacturing method, which belong to the technical field of metal packaging and comprise an aluminum alloy box body, a silicon-aluminum sealing piece and a multi-needle core connector, wherein a first mounting hole is formed in the side wall of the aluminum alloy box body; the silicon-aluminum sealing piece is arranged in the first mounting hole, and a second mounting hole is formed in the silicon-aluminum sealing piece; the multi-needle core connector is arranged in the second mounting hole. According to the airtight metal packaging structure provided by the invention, the silicon-aluminum composite material is welded at the part of the aluminum alloy box body where the multi-pin connector is welded by utilizing the diffusion welding mode, and the multi-pin connector is welded to the silicon-aluminum material position, so that the problem that the thermal expansion coefficients of the aluminum alloy and the multi-pin connector are not matched is solved, meanwhile, as the main material is the aluminum alloy, the problem that the strength of the silicon-aluminum material is low is solved, the airtight performance of the metal packaging is realized by adopting the structure, the strength of the metal packaging is ensured, and the airtight metal packaging structure has a huge application prospect in the metal packaging.

Description

Air-tightness metal packaging structure and manufacturing method
Technical Field
The invention belongs to the technical field of metal packaging, and particularly relates to an airtight metal packaging structure and a manufacturing method of the airtight metal packaging structure.
Background
In metal packaging, it is often necessary to solder a multi-pin connector. The metal case is often made of a 2-series or 6-series aluminum alloy having a coefficient of thermal expansion of 23, while the multi-pin connector is made of a kovar alloy having a coefficient of thermal expansion of 5.2. After the multi-pin connector is welded to the aluminum alloy box body, the temperature is reduced, so that the thermal expansion coefficients of the multi-pin connector and the aluminum alloy box body are greatly different, and the air tightness cannot be ensured. Even after welding, the air tightness is good, but after the temperature cycle environment test, the air tightness problem still occurs.
At present, a solution is to replace aluminum alloy with silicon aluminum alloy, the thermal expansion coefficient of the silicon aluminum composite material is 7.2, the phase difference between the silicon aluminum composite material and kovar alloy is smaller, the problem of air tightness can be solved, but the silicon aluminum alloy has lower strength and poor toughness, the phenomenon of box body fracture often occurs, and the silicon aluminum alloy is high in price, so that the application of the silicon aluminum composite material in metal packaging is limited.
Disclosure of Invention
The embodiment of the invention provides an airtight metal packaging structure, which aims to solve the problem of poor welding air tightness of the existing aluminum alloy box body.
In a first aspect, an embodiment of the present invention provides an airtight metal packaging structure, including: the aluminum alloy box body, the silicon-aluminum sealing piece and the multi-needle core connector are arranged on the side wall of the aluminum alloy box body; the silicon-aluminum sealing piece is arranged in the first mounting hole, and a second mounting hole is formed in the silicon-aluminum sealing piece; the multi-needle core connector is arranged in the second mounting hole.
With reference to the first aspect, in one possible implementation manner, the silicon-aluminum sealing member is in a conical structure, and the silicon-aluminum sealing member is in interference fit with the first mounting hole.
With reference to the first aspect, in a possible implementation manner, a step hole is provided in the second mounting hole, and the multi-core connector is disposed in the step hole.
With reference to the first aspect, in a possible implementation manner, the bottom plate of the aluminum alloy box body is provided with an exhaust hole vertically communicated with the first mounting hole.
With reference to the first aspect, in one possible implementation manner, a supporting step is disposed at an opening of the aluminum alloy box body, and a box cover is disposed at the supporting step.
With reference to the first aspect, in a possible implementation manner, a nickel-gold layer is electroplated in the second mounting hole.
In a second aspect, an embodiment of the present invention further provides a method for manufacturing the airtight metal packaging structure, where the method includes:
a first mounting hole is formed in the side wall of the aluminum alloy box body, and an exhaust hole communicated with the mounting hole is formed in the aluminum alloy box body;
Welding a silicon-aluminum sealing element in the first mounting hole;
machining a second mounting hole in the silicon-aluminum sealing piece;
electroplating nickel gold in the second mounting hole;
and welding the multi-pin connector in the second mounting hole.
With reference to the second aspect, in a possible implementation manner, the silicon-aluminum sealing member is welded in the first mounting hole by using diffusion welding, and pressure is externally applied during welding.
With reference to the second aspect, in a possible implementation manner, the multi-pin core connector is soldered in the second mounting hole.
With reference to the second aspect, in one possible implementation manner, the box cover of the aluminum alloy box body is encapsulated by laser.
Compared with the prior art, the airtight metal packaging structure and the manufacturing method provided by the invention have the beneficial effects that: the aluminum alloy box body is welded with the aluminum silicon composite material locally, the multi-core connector is welded to the aluminum silicon material, and the thermal expansion coefficient of the aluminum silicon composite material is 7.2, so that the aluminum silicon composite material is relatively close to kovar alloy, and the aluminum silicon composite material can ensure good air tightness after welding and after environmental test, thereby solving the air tightness problem of the metal packaging multi-pin connector after welding, and ensuring that the metal packaging has higher strength.
Drawings
Fig. 1 is a schematic structural diagram of an aluminum alloy box body with an airtight metal packaging structure according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an aluminum alloy box and a silicon-aluminum sealing member assembly process according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of an aluminum alloy box and a silicon-aluminum sealing member assembled according to an embodiment of the present invention;
FIG. 4 is a schematic structural view of a second mounting hole formed in a silica-alumina seal member according to an embodiment of the present invention;
FIG. 5 is another angular view of the second mounting hole provided in the silica-alumina seal member provided in FIG. 4;
fig. 6 is a schematic structural diagram of a multi-core connector and an aluminum alloy box body after being installed according to an embodiment of the present invention;
Fig. 7 is a schematic structural diagram of an airtight metal package structure according to an embodiment of the present invention;
Reference numerals illustrate:
1. An aluminum alloy box body; 2. an exhaust hole; 3. a first mounting hole; 4. a silicon-aluminum seal; 5. a second mounting hole; 6. a multi-pin connector; 7. a support step; 8. and a box cover.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Referring to fig. 1 to 7 together, an airtight metal package structure provided by the present invention will now be described. The airtight metal packaging structure comprises an aluminum alloy box body 1, a silicon-aluminum sealing piece 4 and a multi-needle core connector 6, wherein a first mounting hole 3 is formed in the side wall of the aluminum alloy box body 1; the silicon-aluminum sealing piece 4 is arranged in the first mounting hole 3, and a second mounting hole 5 is formed in the silicon-aluminum sealing piece 4; the multi-pin connector 6 is disposed in the second mounting hole 5.
Compared with the prior art, the airtight metal packaging structure provided by the embodiment has the advantages that the aluminum alloy box body 1 is locally welded with the aluminum silicon composite material, the multi-core connector is welded to the aluminum silicon material, and the thermal expansion coefficient of the aluminum silicon composite material is 7.2 and is relatively close to that of the kovar alloy, so that the airtight performance after welding is finished and after an environmental test is ensured, the problem of the airtight performance of the metal packaging multi-core connector 6 after welding is solved, and meanwhile, the metal packaging has higher strength.
As an implementation manner of the aluminosilicate sealing element 4 in this embodiment, referring to fig. 1 to 3, the aluminosilicate sealing element 4 has a tapered structure, and the aluminosilicate sealing element 4 is in interference fit with the first mounting hole 3. The conical silicon-aluminum sealing piece 4 has a positioning function and is convenient for welding and fixing the silicon-aluminum sealing piece 4.
A variant embodiment of the above-mentioned characteristic aluminosilicate sealing element 4 is that, referring to fig. 4, a stepped hole is provided in the second mounting hole 5, and the multi-needle connector 6 is provided in the stepped hole. The electric elements which are spliced with the multi-needle core connector 6 are convenient to splice through the arranged step holes.
Based on the above-mentioned silicon aluminum sealing member 4, referring to fig. 1 to 3, as another modification of the aluminum alloy housing 1, a bottom plate of the aluminum alloy housing 1 is provided with an exhaust hole 2 vertically communicating with the first mounting hole 3. Through the exhaust hole 2 that sets up for exhaust when welding improves welding quality.
Based on the above-mentioned silicon aluminum sealing member 4, referring to fig. 4 to 6, as another variant embodiment of the aluminum alloy case 1, a supporting step 7 is provided at the opening of the aluminum alloy case 1, and a case cover 8 is provided at the supporting step 7. The box cover 8 is positioned on one hand, and on the other hand, the box cover 8 is flush with the upper surface of the aluminum alloy box body 1.
On the basis of the silicon aluminum sealing piece 4 and the aluminum alloy box body 1, a nickel-gold layer is electroplated in the second mounting hole 5. To protect the multi-pin connector 6 and also to facilitate soldering.
Based on the same inventive concept, the embodiment of the application also provides a manufacturing method of the airtight metal packaging structure, which comprises the following steps:
The method comprises the steps that firstly, a first mounting hole 3 is formed in the side wall of an aluminum alloy box body 1, and an exhaust hole 2 communicated with the mounting hole is formed in the aluminum alloy box body 1; see fig. 1;
Step two, welding a silicon-aluminum sealing element 4 in the first mounting hole 3, see fig. 2 and 3;
step three, processing a second mounting hole 5 on the silicon-aluminum sealing element 4, see fig. 4 and 5;
step four, electroplating nickel gold in the second mounting holes 5;
step five, the multi-pin connector 6 is soldered into the second mounting hole 5, see fig. 6.
As a possible implementation of the second step, the aluminosilicate sealing element 4 is welded in the first mounting hole 3 by diffusion welding, and pressure is externally applied during welding.
Compared with other welding methods, diffusion welding has the following advantages:
1) The diffusion welding can weld almost all metals or non-metals without reducing the performance of the welded materials because the matrix is not overheated or melted, and is particularly suitable for fusion welding and other materials which are difficult to weld by other methods, such as active metals, heat-resistant alloys, ceramics, composite materials and the like. Diffusion welding is a preferred welding method for the same materials with poor plasticity or high melting point, and for dissimilar materials that are not miscible or that can produce brittle intermetallic compounds during fusion welding.
2) The diffusion welding joint has good quality, the microstructure and the performance of the diffusion welding joint are close to or the same as those of a base material, no fusion welding defect exists in a welding line, and no overheat structure and no heat affected zone exist. The welding parameters are easy to control accurately, and the quality and performance of the joint are stable during mass production.
3) The weldment has high precision and small deformation. Because the pressure applied during welding is smaller, the workpiece is mostly heated integrally and cooled along with the furnace, so that the whole plastic deformation of the weldment is very small, and the welded workpiece is generally not machined any more.
4) The large-section workpiece j I can be welded with low pressure required by welding, so that the tonnage of equipment required by large-section welding is low, and the welding is easy to realize.
5) The welding device can be used for welding workpieces with complex structures, inaccessible joints and larger thickness differences, and can be used for simultaneously welding a plurality of joints in an assembly.
The disadvantages of diffusion welding are as follows:
1) The preparation and assembly quality requirements of the weldment surface are high, and in particular the requirements on the joint surface are strict.
2) The welding thermal cycle time is long and the productivity is low. Each weld was fast for a few minutes and slow for a few tens of hours. Grain growth is caused for some metals.
3) The equipment investment is large at one time, the size of the welding workpiece is limited by the equipment, and continuous batch production cannot be carried out.
Diffusion welding is particularly suitable for small parts requiring vacuum sealing, joint and base metal strength, and no deformation. It is the only method of making vacuum-tight, heat-resistant, vibration-resistant and non-deformable joints and therefore has found wide application in industrial production. In the welding of metals and non-metals in electric vacuum equipment, there are methods of diffusion welding in the welding of cemented carbide, ceramics, high-speed steel and carbon steel in cutting tools.
As a possible implementation of step six, see fig. 6, the multi-pin connector 6 is soldered in the second mounting hole 5.
Brazing refers to a welding method for connecting metals by filling gaps of solid workpieces with liquid brazing filler metal after the brazing filler metal below the melting point of a weldment and the weldment are heated to the melting temperature of the brazing filler metal at the same time. During brazing, firstly, an oxide film and oil stains on the contact surface of a base metal are removed, so that capillary tubes can play a role after the brazing filler metal is melted, and wettability and capillary mobility of the brazing filler metal are improved. Brazing is classified into brazing and soldering according to the melting point of the brazing filler metal.
The brazing deformation is small, the joint is smooth and attractive, and the welding tool is suitable for welding components which are precise and complex and are composed of different materials, such as honeycomb structure plates, turbine blades, hard alloy cutters, printed circuit boards and the like. Before brazing, the workpieces must be carefully machined and strictly cleaned, greasy dirt and excessively thick oxide films are removed, and interface assembly gaps are ensured. The gap is generally required to be between 0.01 and 0.1 mm.
Compared with fusion welding, the base metal is not melted during brazing, and only the brazing filler metal is melted; in contrast to pressure welding, no pressure is applied to the weld during brazing. The weld formed by brazing is called a braze joint. The filler metal used for brazing is called solder.
And (3) a brazing process: the surface cleaned workpieces are assembled together in a lap joint fashion and solder is placed adjacent to or between the joint gaps. When the workpiece and the brazing filler metal are heated to a temperature slightly higher than the melting point of the brazing filler metal, the brazing filler metal is melted (the workpiece is not melted), sucked and filled between the gaps of the solid workpiece by capillary action, the liquid brazing filler metal and the workpiece metal are mutually diffused and dissolved, and the brazing joint is formed after condensation.
Vacuum diffusion welding and vacuum brazing are two completely different welding methods. Vacuum diffusion hammer is a welding method in which welding members are tightly adhered to each other in vacuum, and the welding members are kept at a proper temperature and pressure (workpiece adhering pressure) for a certain period of time to cause interatomic diffusion between contact surfaces, thereby forming a joint. The vacuum diffusion may be performed between metals or between a metal and a ceramic. Vacuum brazing: the method is characterized in that a metal material with a liquidus temperature lower than the solidus temperature of a base metal is used as a brazing filler metal, the part and the brazing filler metal are heated until the brazing filler metal is melted, the base metal is wetted by the liquid brazing filler metal, a joint gap is filled, the liquid brazing filler metal and the base metal are mutually dissolved and diffused, and then the liquid brazing filler metal is crystallized and solidified, so that the connection of the part is realized (a welded part is not melted, and only the brazing filler metal is melted). Both may be welded in vacuum or in a protective gas.
In this embodiment, referring to fig. 7, the lid 8 of the aluminum alloy case 1 is laser-encapsulated.
The invention provides an airtight metal packaging structure, which is characterized in that a silicon-aluminum composite material is welded at the part of an aluminum alloy box body 1 where a multi-needle core connector 6 is welded by utilizing a diffusion welding mode, the multi-needle core connector 6 is welded to a silicon-aluminum material position, the problem that the thermal expansion coefficients of aluminum alloy and the multi-needle core connector 6 are not matched is solved, meanwhile, as a main material is aluminum alloy, the problem that the strength of the silicon-aluminum material is low is solved, the airtight metal packaging structure is adopted, the air tightness of the metal packaging is realized, the strength of the metal packaging is ensured, and the airtight metal packaging structure has a huge application prospect in the metal packaging.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.

Claims (7)

1. A method of fabricating an airtight metal package structure, the method comprising:
A first mounting hole (3) is formed in the side wall of the aluminum alloy box body (1), and an exhaust hole (2) communicated with the mounting hole is formed in the aluminum alloy box body (1);
welding a silicon-aluminum sealing piece (4) in the first mounting hole (3);
Machining a second mounting hole (5) in the silicon-aluminum sealing piece (4);
electroplating nickel-gold in the second mounting hole (5);
welding a multi-pin connector (6) in the second mounting hole (5);
The silicon-aluminum sealing piece (4) is welded in the first mounting hole (3) by adopting diffusion welding, and pressure is externally applied during welding;
the multi-needle core connector (6) is made of kovar alloy.
2. The method for manufacturing the airtight metal packaging structure according to claim 1, wherein the silicon-aluminum sealing member (4) is of a conical structure, and the silicon-aluminum sealing member (4) and the first mounting hole (3) are in interference fit.
3. The method for manufacturing the airtight metal packaging structure according to claim 1, wherein a step hole is formed in the second mounting hole (5), and the multi-pin connector (6) is disposed in the step hole.
4. The method for manufacturing the airtight metal packaging structure according to claim 1, wherein the bottom plate of the aluminum alloy box body (1) is provided with an exhaust hole (2) vertically communicated with the first mounting hole (3).
5. The method for manufacturing the airtight metal packaging structure according to claim 1, wherein a supporting step (7) is arranged at the opening of the aluminum alloy box body (1), and a box cover (8) is arranged at the supporting step (7).
6. The method of manufacturing a hermetic metal package structure according to claim 1, wherein the multi-pin connector (6) is soldered in the second mounting hole (5).
7. The method for manufacturing the airtight metal packaging structure according to claim 1, wherein the box cover (8) of the aluminum alloy box body (1) is packaged by laser.
CN202111556235.5A 2021-12-17 2021-12-17 Air-tightness metal packaging structure and manufacturing method Active CN114243358B (en)

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CN114727531B (en) * 2022-04-29 2024-02-27 江苏华能节能科技有限公司 Manufacturing method of silicon-aluminum alloy packaging box body
CN114743886A (en) * 2022-06-10 2022-07-12 四川斯艾普电子科技有限公司 Packaging cavity manufacturing method, packaging cavity and packaging structure

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