CN114243358A - Airtight metal packaging structure and manufacturing method - Google Patents

Airtight metal packaging structure and manufacturing method Download PDF

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Publication number
CN114243358A
CN114243358A CN202111556235.5A CN202111556235A CN114243358A CN 114243358 A CN114243358 A CN 114243358A CN 202111556235 A CN202111556235 A CN 202111556235A CN 114243358 A CN114243358 A CN 114243358A
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China
Prior art keywords
mounting hole
aluminum
silicon
aluminum alloy
box body
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CN202111556235.5A
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Chinese (zh)
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CN114243358B (en
Inventor
郭旭光
徐达
常青松
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CETC 13 Research Institute
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CETC 13 Research Institute
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/46Bases; Cases
    • H01R13/52Dustproof, splashproof, drip-proof, waterproof, or flameproof cases
    • H01R13/5202Sealing means between parts of housing or between housing part and a wall, e.g. sealing rings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/0008Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/14Preventing or minimising gas access, or using protective gases or vacuum during welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20Bonding
    • B23K26/21Bonding by welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/46Bases; Cases
    • H01R13/502Bases; Cases composed of different pieces
    • H01R13/504Bases; Cases composed of different pieces different pieces being moulded, cemented, welded, e.g. ultrasonic, or swaged together
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R43/00Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
    • H01R43/005Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for making dustproof, splashproof, drip-proof, waterproof, or flameproof connection, coupling, or casing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R43/00Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
    • H01R43/18Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for manufacturing bases or cases for contact members
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/08Non-ferrous metals or alloys
    • B23K2103/10Aluminium or alloys thereof

Abstract

The invention provides an air-tight metal packaging structure and a manufacturing method thereof, belonging to the technical field of metal packaging, and comprising an aluminum alloy box body, a silicon-aluminum sealing element and a multi-pin-core connector, wherein the side wall of the aluminum alloy box body is provided with a first mounting hole; the silicon-aluminum sealing piece is arranged in the first mounting hole, and a second mounting hole is formed in the silicon-aluminum sealing piece; the multi-pin core connector is arranged in the second mounting hole. According to the airtight metal packaging structure provided by the invention, the silicon-aluminum composite material is welded on the part of the aluminum alloy box body where the multi-pin-core connector is welded in a diffusion welding mode, and the multi-pin-core connector is welded to the position of the silicon-aluminum material, so that the problem that the thermal expansion coefficients of the aluminum alloy and the multi-pin-core connector are not matched is solved, meanwhile, the problem that the silicon-aluminum material is low in strength is solved because the main material is the aluminum alloy, and by adopting the structure, the airtightness of metal packaging is realized, the strength of the metal packaging is also ensured, and the airtight metal packaging structure has a huge application prospect in metal packaging.

Description

Airtight metal packaging structure and manufacturing method
Technical Field
The invention belongs to the technical field of metal packaging, and particularly relates to an air-tight metal packaging structure and a manufacturing method thereof.
Background
In metal packaging, it is often necessary to solder multi-pin connectors. The metal box is often made of 2-series or 6-series aluminum alloy with a coefficient of thermal expansion of 23, while the multi-pin connector is made of kovar alloy with a coefficient of thermal expansion of 5.2. After the multi-pin-core connector is welded to the aluminum alloy box body, the thermal expansion coefficients of the multi-pin-core connector and the aluminum alloy box body have large difference due to temperature reduction, and air tightness cannot be guaranteed. Even if the airtightness is good after welding, the airtightness still causes a problem after the temperature cycle environmental test.
At present, a solution is to replace aluminum alloy with silicon-aluminum alloy, the thermal expansion coefficient of the silicon-aluminum composite material is 7.2, the difference between the thermal expansion coefficient and kovar alloy is small, and the problem of air tightness can be solved, but the silicon-aluminum alloy has low strength and poor toughness, the phenomenon of box body fracture often occurs, and the price is high, so that the application of the silicon-aluminum alloy in metal packaging is limited.
Disclosure of Invention
The embodiment of the invention provides an airtight metal packaging structure, aiming at solving the problem of poor welding airtightness of the existing aluminum alloy box body.
In a first aspect, an embodiment of the present invention provides a hermetic metal package structure, including: the aluminum alloy box comprises an aluminum alloy box body, a silicon-aluminum sealing element and a multi-pin-core connector, wherein a first mounting hole is formed in the side wall of the aluminum alloy box body; the silicon-aluminum sealing element is arranged in the first mounting hole, and a second mounting hole is formed in the silicon-aluminum sealing element; and the multi-pin-core connector is arranged in the second mounting hole.
With reference to the first aspect, in a possible implementation manner, the silicon-aluminum sealing element is of a conical structure, and the silicon-aluminum sealing element is in interference fit with the first mounting hole.
With reference to the first aspect, in a possible implementation manner, a stepped hole is formed in the second mounting hole, and the multi-core connector is disposed in the stepped hole.
With reference to the first aspect, in a possible implementation manner, the bottom plate of the aluminum alloy box body is provided with an exhaust hole vertically communicated with the first mounting hole.
With reference to the first aspect, in a possible implementation manner, a supporting step is arranged at the opening of the aluminum alloy box body, and a box cover is arranged at the supporting step.
With reference to the first aspect, in one possible implementation manner, a nickel layer is electroplated in the second mounting hole.
In a second aspect, an embodiment of the present invention further provides a method for manufacturing the hermetic metal package structure, where the method includes:
arranging a first mounting hole on the side wall of the aluminum alloy box body, and arranging an exhaust hole communicated with the mounting hole on the aluminum alloy box body;
welding a silicon-aluminum sealing element in the first mounting hole;
processing a second mounting hole on the silicon-aluminum sealing element;
electroplating nickel and gold in the second mounting hole;
and welding the multi-pin-core connector in the second mounting hole.
With reference to the second aspect, in a possible implementation manner, the silicon-aluminum sealing element is welded in the first mounting hole by diffusion welding, and pressure is applied externally during welding.
With reference to the second aspect, in one possible implementation manner, the multi-pin core connector is welded in the second mounting hole by brazing.
With reference to the second aspect, in one possible implementation manner, the box cover of the aluminum alloy box body is packaged by using laser.
Compared with the prior art, the airtight metal packaging structure and the manufacturing method thereof provided by the invention have the beneficial effects that: the silicon-aluminum composite material is welded on the local part of the aluminum alloy box body, the multi-core connector is welded to the position of the silicon-aluminum material, and the thermal expansion coefficient of the silicon-aluminum composite material is 7.2, so that the silicon-aluminum composite material is close to Kovar alloy, the good air tightness after the welding and the environmental test can be ensured, the problem of air tightness after the metal packaging multi-pin core connector is welded is solved, and meanwhile, the metal packaging has high strength.
Drawings
Fig. 1 is a schematic structural diagram of an aluminum alloy case of a hermetic metal package structure according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an assembly process of an aluminum alloy box and a silicon-aluminum sealing element according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of an aluminum alloy box and a silicon-aluminum sealing element according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a second mounting hole provided in a silicon-aluminum sealing element according to an embodiment of the present invention;
FIG. 5 is another angled view of the silicon aluminum seal of FIG. 4 with a second mounting hole;
FIG. 6 is a schematic structural diagram of an aluminum alloy case and a multi-pin connector according to an embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a hermetic metal package structure according to an embodiment of the present invention;
description of reference numerals:
1. an aluminum alloy box body; 2. an exhaust hole; 3. a first mounting hole; 4. a silicon-aluminum seal; 5. a second mounting hole; 6. a multi-stylet connector; 7. supporting a step; 8. and (7) a box cover.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1 to 7, the hermetic metal package structure provided by the present invention will now be described. The airtight metal packaging structure comprises an aluminum alloy box body 1, a silicon-aluminum sealing element 4 and a multi-pin-core connector 6, wherein a first mounting hole 3 is formed in the side wall of the aluminum alloy box body 1; the silicon-aluminum sealing element 4 is arranged in the first mounting hole 3, and a second mounting hole 5 is formed in the silicon-aluminum sealing element 4; the multi-pin connector 6 is disposed in the second mounting hole 5.
Compared with the prior art, the airtight metal packaging structure provided by the embodiment has the advantages that the silicon-aluminum composite material is welded on the local part of the aluminum alloy box body 1, the multi-core connector is welded to the position of the silicon-aluminum material, and the silicon-aluminum composite material has a thermal expansion coefficient of 7.2 and is relatively close to kovar alloy, so that the airtightness after the welding is completed and after an environment test is good, the problem of airtightness after the welding of the metal packaging multi-pin-core connector 6 is solved, and meanwhile, the metal packaging has high strength.
As an embodiment of the silicon-aluminum seal 4 in this embodiment, referring to fig. 1 to 3, the silicon-aluminum seal 4 has a tapered structure, and the silicon-aluminum seal 4 is in interference fit with the first mounting hole 3. The silicon-aluminum sealing element 4 with the conical structure has a positioning effect, and is convenient for welding and fixing the silicon-aluminum sealing element 4.
In a modified embodiment of the silicon-aluminum seal 4 of the above feature, referring to fig. 4, a stepped hole is provided in the second mounting hole 5, and the multi-pin connector 6 is provided in the stepped hole. The step holes are arranged to facilitate the plugging of the electrical elements plugged with the multi-pin core connector 6.
Based on the above-mentioned silicon-aluminum seal 4, referring to fig. 1 to 3, as another modified embodiment of the aluminum alloy case 1, the bottom plate of the aluminum alloy case 1 is provided with the exhaust hole 2 vertically communicating with the first mounting hole 3. Through the exhaust hole 2 that sets up for the welding time is carminative, improves welding quality.
Based on the above-mentioned silicon-aluminum sealing element 4, referring to fig. 4 to 6, as another variant embodiment of the aluminum alloy box body 1, a supporting step 7 is provided at an opening of the aluminum alloy box body 1, and a box cover 8 is provided at the supporting step 7. On the one hand, the box cover 8 is positioned, and on the other hand, the box cover 8 is flush with the upper surface of the aluminum alloy box body 1.
And a nickel layer is electroplated in the second mounting hole 5 on the basis of the silicon-aluminum sealing element 4 and the aluminum alloy box body 1. To protect the multi-pin connector 6 and also facilitate welding.
Based on the same inventive concept, the embodiment of the present application further provides a manufacturing method of the airtight metal package structure, where the method includes:
step one, arranging a first mounting hole 3 on the side wall of an aluminum alloy box body 1, and arranging an exhaust hole 2 communicated with the mounting hole on the aluminum alloy box body 1; see fig. 1;
welding the silicon-aluminum sealing element 4 in the first mounting hole 3, and referring to fig. 2 and 3;
step three, processing a second mounting hole 5 on the silicon-aluminum sealing element 4, and referring to fig. 4 and 5;
electroplating nickel and gold in the second mounting hole 5;
and step five, welding the multi-pin-core connector 6 in the second mounting hole 5, and referring to fig. 6.
As a possible implementation manner of the second step, the silicon-aluminum sealing element 4 is welded in the first mounting hole 3 by diffusion welding, and pressure is applied externally during welding.
Compared with other welding methods, diffusion welding has the following advantages:
1) the diffusion welding can weld almost all metals or non-metals without reducing the performance of the welded materials because the matrix is not overheated and melted during the diffusion welding, and is particularly suitable for materials which are difficult to weld by fusion welding and other methods, such as active metals, heat-resistant alloys, ceramics, composite materials and the like. Diffusion welding is a suitable welding method for the same kind of materials with poor plasticity or high melting point and different kinds of materials which are not mutually soluble or generate brittle intermetallic compounds during welding.
2) The diffusion welding joint has good quality, the microstructure and the performance of the diffusion welding joint are close to or the same as those of a base metal, and the diffusion welding joint has no fusion welding defect and no overheated structure and heat affected zone in a welding seam. Welding parameters are easy to control accurately, and the quality and the performance of the joint are stable during batch production.
3) The weldment has high precision and small deformation. Because the pressure applied during welding is small, the workpieces are mostly heated integrally and cooled along with the furnace, so that the overall plastic deformation of the weldment is small, and the welded workpieces are not machined any more.
4) The pressure required for welding the large-section workpiece j I is not large, so the tonnage of equipment required for large-section welding is not high, and the large-section workpiece j I is easy to realize.
5) Workpieces with complex structures, difficult access of joints and large thickness difference can be welded, and a plurality of joints in the assembly can be welded simultaneously.
The disadvantages of diffusion welding are as follows:
1) the quality requirements of the preparation and the assembly of the surface of the weldment are high, and particularly the requirements on the joint surface are strict.
2) The welding heat cycle time is long, and the productivity is low. Each welding is several minutes fast and several tens of hours slow. For some metals, grain growth is induced.
3) The equipment investment is large at one time, and the size of the welding workpiece is limited by the equipment, so that continuous batch production cannot be carried out.
The diffusion welding is particularly suitable for small parts which require vacuum sealing, equal strength between a joint and a base material and no deformation. It is the only method of making vacuum tight, heat, vibration and non-deforming joints and is therefore widely used in industrial production. The welding of metals and non-metals in electric vacuum equipment and the welding of hard alloy, ceramics, high-speed steel and carbon steel in cutting tools all adopt a diffusion welding method.
As a possible implementation of step six, referring to fig. 6, the multi-pin connector 6 is soldered in the second mounting hole 5 by brazing.
Brazing, which is a welding method that after brazing filler metal lower than the melting point of a weldment and the weldment are heated to the melting temperature of the brazing filler metal at the same time, the liquid brazing filler metal is used for filling the gaps of solid workpieces to connect the metals. During brazing, an oxide film and oil stains on a contact surface of a base material are removed firstly, so that a capillary tube can play a role after the brazing filler metal is melted, and the wettability and the capillary fluidity of the brazing filler metal are improved. Brazing is divided into brazing and soldering according to the melting point of the brazing filler metal.
The brazing deformation is small, the joint is smooth and attractive, and the method is suitable for welding components which are precise, complex and composed of different materials, such as honeycomb structural plates, turbine blades, hard alloy cutters, printed circuit boards and the like. Before brazing, the workpiece must be carefully processed and strictly cleaned to remove oil stains and an excessively thick oxidation film, so that the assembly gap of the interface is ensured. The gap is generally required to be between 0.01 and 0.1 mm.
Compared with fusion welding, the base metal is not melted during brazing, and only the brazing filler metal is melted; compared with pressure welding, pressure is not applied to the weldment during brazing. The weld seam formed by brazing is called a braze seam. The filler metal used for brazing is called brazing filler metal.
The brazing process comprises the following steps: the cleaned workpieces are assembled together in a lap joint pattern with solder placed near or between the joint gaps. When the workpiece and the brazing filler metal are heated to a temperature slightly higher than the melting point of the brazing filler metal, the brazing filler metal is melted (the workpiece is not melted), and is sucked into and filled in gaps among the solid workpieces by virtue of capillary action, the liquid brazing filler metal and the workpiece metal are mutually diffused and dissolved, and a brazed joint is formed after condensation.
Vacuum diffusion welding and vacuum brazing are two completely different welding methods. The vacuum diffusion hammer is a welding method which is performed in vacuum, closely adheres welding pieces, and is maintained for a period of time at a proper temperature and pressure (workpiece adhering pressure) to perform interatomic diffusion between contact surfaces, thereby forming a joint. The vacuum diffusion barrier may be performed between metals or between metals and ceramics. Vacuum brazing: the method is characterized in that a metal material with liquidus temperature lower than that of a base metal is used as a brazing filler metal, a part and the brazing filler metal are heated until the brazing filler metal is molten, the liquid brazing filler metal is used for wetting the base metal, filling a joint gap and mutually dissolving and diffusing with the base metal, and then the liquid brazing filler metal is crystallized and solidified, so that the connection of the part is realized (a welded part is not molten, and only the brazing filler metal is molten). Both can be welded in vacuum or in a protective gas.
In this embodiment, referring to fig. 7, the box cover 8 of the aluminum alloy box body 1 is packaged by laser.
The invention provides an airtight metal packaging structure, which is characterized in that a silicon-aluminum composite material is welded on a part of an aluminum alloy box body 1 where a multi-pin-core connector 6 is welded in a diffusion welding mode, the multi-pin-core connector 6 is welded to the position of the silicon-aluminum material, the problem that the thermal expansion coefficients of the aluminum alloy and the multi-pin-core connector 6 are not matched is solved, meanwhile, the problem that the strength of the silicon-aluminum material is low is solved because the main material is the aluminum alloy, the airtight of metal packaging is realized, the strength of the metal packaging is ensured, and the airtight metal packaging structure has a huge application prospect in the metal packaging.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.

Claims (10)

1. A hermetic metal package structure, comprising:
the aluminum alloy box comprises an aluminum alloy box body (1), wherein a first mounting hole (3) is formed in the side wall of the aluminum alloy box body (1);
the silicon-aluminum sealing element (4) is arranged in the first mounting hole (3), and a second mounting hole (5) is formed in the silicon-aluminum sealing element (4); and
a multi-stylet connector (6) disposed within the second mounting hole (5).
2. The hermetic metal package structure according to claim 1, wherein the silicon-aluminum seal (4) is a tapered structure, and the silicon-aluminum seal (4) is in interference fit with the first mounting hole (3).
3. The hermetic metal package according to claim 1, wherein the second mounting hole (5) is provided therein with a stepped hole, and the multi-pin core connector (6) is provided in the stepped hole.
4. The hermetic metal sealing structure according to claim 1 or 2, wherein the bottom plate of the aluminum alloy case (1) is provided with an exhaust hole (2) vertically communicating with the first mounting hole (3).
5. The hermetic metal package structure of claim 1, wherein a support step (7) is provided at the opening of the aluminum alloy case body (1), and a case cover (8) is provided at the support step (7).
6. The hermetic metal package structure according to claim 1, wherein the second mounting hole (5) is plated with a nickel-gold layer.
7. A method of fabricating a hermetic metal package according to any one of claims 1-6, wherein the method comprises:
a first mounting hole (3) is formed in the side wall of the aluminum alloy box body (1), and an exhaust hole (2) communicated with the mounting hole is formed in the aluminum alloy box body (1);
welding a silicon-aluminum sealing element (4) in the first mounting hole (3);
processing a second mounting hole (5) on the silicon-aluminum sealing element (4);
electroplating nickel and gold in the second mounting hole (5);
and welding the multi-pin-core connector (6) in the second mounting hole (5).
8. The method of manufacturing a hermetic metal package structure according to claim 7, wherein the silicon-aluminum sealing member (4) is welded in the first mounting hole (3) by diffusion welding while applying an external pressure.
9. The method of fabricating a hermetic metal package structure according to claim 7, wherein the multi-pin connector (6) is soldered in the second mounting hole (5) by soldering.
10. The method of claim 7, wherein the lid (8) of the aluminum alloy case (1) is packaged by laser.
CN202111556235.5A 2021-12-17 2021-12-17 Air-tightness metal packaging structure and manufacturing method Active CN114243358B (en)

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Cited By (3)

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Publication number Priority date Publication date Assignee Title
CN114727531A (en) * 2022-04-29 2022-07-08 江苏华能节能科技有限公司 Silicon-aluminum alloy packaging box body and manufacturing method thereof
CN114743886A (en) * 2022-06-10 2022-07-12 四川斯艾普电子科技有限公司 Packaging cavity manufacturing method, packaging cavity and packaging structure
CN114918538A (en) * 2022-05-27 2022-08-19 无锡中微高科电子有限公司 Laser sealing welding method for high-reliability integrated circuit air tightness packaging

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