CN114226760B - Device and method for adjusting input light path of vibrating mirror of powder paving equipment for laser selective melting - Google Patents

Device and method for adjusting input light path of vibrating mirror of powder paving equipment for laser selective melting Download PDF

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CN114226760B
CN114226760B CN202111660436.XA CN202111660436A CN114226760B CN 114226760 B CN114226760 B CN 114226760B CN 202111660436 A CN202111660436 A CN 202111660436A CN 114226760 B CN114226760 B CN 114226760B
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beam expander
micrometer
cross
laser
optical fiber
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CN114226760A (en
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徐大潮
张雪妍
夏振宇
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Nanjing Zhongke Raycham Laser Technology Co Ltd
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Nanjing Zhongke Raycham Laser Technology Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/40—Radiation means
    • B22F12/41—Radiation means characterised by the type, e.g. laser or electron beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20—Direct sintering or melting
    • B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30—Process control
    • B22F10/31—Calibration of process steps or apparatus settings, e.g. before or during manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/80—Data acquisition or data processing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/90—Means for process control, e.g. cameras or sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention provides a device and a method for adjusting an input light path of a vibrating mirror of powder paving equipment for laser selective melting, wherein the adjusting device comprises the following components: a longitudinal guide rail; a first slider and a second slider arranged on the longitudinal guide rail and slidable along the guide rail; a support frame; a cross micrometer mounting rack and a cross micrometer; an optical system which is arranged on the supporting frame, and the light-emitting end of the optical system faces to the cross micrometer and is used for emitting laser beams; the beam expander assembly is arranged in a light-emitting light path of the optical system and is used for expanding and shaping laser beams emitted towards the cross micrometer; and the optical fine tuning system is arranged on the supporting frame and is used for adjusting the position of the beam expander assembly. According to the device for adjusting the input light path of the vibrating mirror of the powder paving equipment, the beam collimation and the corresponding adjusting mode are accurately calculated through the measurement of the central position and the diameter of a light spot after the beam expander, and the input light path at the front end of the vibrating mirror is adjusted and calibrated.

Description

Device and method for adjusting input light path of vibrating mirror of powder paving equipment for laser selective melting
Technical Field
The invention relates to the technical field of laser selective melting additive manufacturing, in particular to a vibrating mirror system calibration, and specifically relates to a vibrating mirror input light path adjusting device and method for powder paving equipment for laser selective melting.
Background
In the technical field of additive manufacturing, the laser selective melting process has better forming performance and extremely high forming precision. The laser selective melting system generally comprises a control system, a powder spreading system, an atmosphere protection system and a laser scanning system, so that the additive manufacturing function and the precision control are realized, and meanwhile, the additive manufacturing function and the precision control are main error sources affecting molding.
The laser beam emitted from the fiber is the first factor affecting the shaping effect, requiring good collimation, otherwise affecting the print quality, even burning out the optical elements and scattering heat generation in the equipment cavity. However, this problem is not addressed and solved, and the products on the market rely on the cooperation of machinery to collimate the laser light, and the error generated by the initial coarse adjustment is uncorrectable in the later galvanometer calibration.
Disclosure of Invention
The invention aims to provide a device and a method for adjusting an input light path of a vibrating mirror of powder paving equipment for laser selective melting, which solve the problems of complex operation process, inaccurate adjustment and lens burning in the light path adjustment and centering process of the existing powder paving equipment.
According to a first aspect of the present invention, there is provided a galvanometer input optical path adjusting device for a powder spreading apparatus for selective laser melting, comprising:
a longitudinal guide rail;
a first slider and a second slider arranged on the longitudinal guide rail and slidable along the guide rail;
the support frame is arranged on the first sliding block, and the support frame and the first sliding block are limited at one end of the longitudinal guide rail;
the cross micrometer is fixedly arranged on the cross micrometer mounting frame and can be arranged to adjust the position of the cross micrometer in a vertical plane through the cross micrometer mounting frame; the said
An optical system which is arranged on the supporting frame, and the light-emitting end of the optical system faces to the cross micrometer and is used for emitting laser beams; the optical fiber collimator comprises an optical fiber collimator head and an optical fiber head fixing sleeve;
the beam expander assembly is arranged in a light-emitting light path of the optical system and is used for expanding and shaping laser beams emitted towards the cross micrometer; and
and the optical fine tuning system is arranged on the supporting frame and used for adjusting the position of the beam expander assembly.
According to a second aspect of the present invention, a method for adjusting and calibrating an input optical path of a galvanometer is provided, comprising the following steps:
step 1: the galvanometer input light path adjustment calibration system is built, and comprises: step 1.1: the optical fiber alignment head passes through the optical fiber head fixing sleeve, and the optical fiber alignment head and the optical fiber head fixing sleeve are locked by using a jackscrew; step 1.2: the assembled component in the step 1.1 is in locking connection with the supporting frame; step 1.3: the assembled component in the step 1.2 is locked and connected with a beam expander mounting sleeve; step 1.4: installing and locking the assembly assembled in the step 1.3 on a first sliding block, wherein the first sliding block is locked and fixed with the longitudinal guide rail; the cross micrometer is arranged on a cross micrometer mounting frame of the second sliding block and locked, the second sliding block is moved to be close to the output end of the optical fiber alignment head, and then the second sliding block and the longitudinal guide rail are locked and fixed;
step 2, opening 532nm red visible light for indication through a laser control system, projecting a parallel light beam output through an optical fiber collimating head on a cross micrometer positioned at the front end of the parallel light beam, and reading out the readings of the laser spot boundary falling on the scale of the scale by the cross micrometer when the readings of the X, Y direction are respectively recorded as x R 、x L 、y R 、y L The position of the cross micrometer in the vertical plane is adjusted to enable: x is x R +x L ＝0，y R +y L =0, namely the intersection center of the scale line of the cross micrometer coincides with the center of the laser spot, and the system zeroing is completed;
step 3: closing a laser to indicate red visible light, locking the beam expander assembly and the beam expander thread sleeve by fine threads in a matching way, inserting the beam expander assembly and the beam expander thread sleeve into the beam expander mounting sleeve as a whole, and pre-tightening and fixing the beam expander assembly and the beam expander thread sleeve through jackscrews;
step 4: and (3) opening the red visible light for indication again, shaping the light beam by the beam expander assembly, projecting the output light beam onto a cross micrometer arranged at the front end, and calculating the diameter of a laser spot and relative position data according to scales on the cross micrometer to calibrate the beam expander assembly.
The specific implementation of the step 4 includes:
step 4.1: the front-view cross micrometer takes the edge of a red round laser spot as standard fine reading, reads out four scale values x in the X, Y direction R1 、x L1 、y R1 、y L1 And calculate the center position (x 1 ，y 1 ) Spot diameter D 1 ；
Adjusting jackscrews at the joint of the beam expander mounting sleeve and the beam expander thread sleeve, and moving the beam expander assembly on a vertical plane to enable x to be the same as the beam expander R1 +x L1 ＝0，y R1 +y L1 =0, i.e. the spot center coincides with the center produced by the intersection of the scales of the cross micrometer;
step 4.2: moving the cross micrometer to the most far end of the longitudinal guide rail, and reading out four scale values x in the X, Y direction again R2 、x L2 、y R2 、y L2 And calculate the center position (x 2 ，y 2 ) Spot diameter D 2 ；
Step 4.3: and (3) judging the offset and the beam expansion performance of the beam expander assembly based on the circle center position and the spot diameter calculated in the step 4.1 and the step 4.2 respectively.
According to the embodiment of the invention, the beam collimation and the corresponding adjustment mode are accurately calculated by using the measured data through the rapid measurement of the central position and the diameter of the light spot of the beam expander, so that the calibration with low cost, high efficiency and high precision is formed for the input light path at the front end of the vibrating mirror.
Drawings
FIG. 1 is a schematic diagram of a galvanometer input light path adjusting device of a powder spreading device for laser selective melting.
FIG. 2 is a schematic diagram of a cross micrometer used in the method for adjusting the input optical path of a vibrating mirror of powder paving equipment;
FIG. 3 is a workflow diagram of a method for adjusting the input optical path of a vibrating mirror of a powder paving device.
Detailed Description
For a better understanding of the technical content of the present invention, specific examples are set forth below, along with the accompanying drawings.
Aspects of the invention are described in this disclosure with reference to the drawings, in which are shown a number of illustrative embodiments. The embodiments of the present disclosure are not necessarily intended to include all aspects of the invention. It should be understood that the various concepts and embodiments described above, as well as those described in more detail below, may be implemented in any of a number of ways, as the disclosed concepts and embodiments are not limited to any implementation. Additionally, some aspects of the disclosure may be used alone or in any suitable combination with other aspects of the disclosure.
The device for adjusting the input optical path of the vibrating mirror of the powder spreading device for laser selective melting is combined with the device for adjusting the input optical path of the vibrating mirror of the powder spreading device for laser selective melting, and aims to accurately calculate the beam collimation and the corresponding adjusting mode by using the data obtained by measurement through measurement comparison of the central position and the diameter of a light spot after a beam expander, and calibrate the input optical path at the front end of the vibrating mirror with high efficiency and high precision.
The vibrating mirror input light path adjusting device of the powder paving equipment shown in the example in fig. 1 comprises a longitudinal guide rail 1, a first sliding block 2-1 and a second sliding block 2-2.
The first slider 2-1 and the second slider 2-2 are arranged on the longitudinal guide rail and can slide along the guide rail.
As shown in fig. 1, the supporting frame 7 is arranged on the first sliding block 2-1, and the supporting frame 7 and the first sliding block are limited at one end of the longitudinal guide rail and are positioned at the tail end.
A cross micrometer (not shown) for laser spot measurement is mounted on the cross micrometer mounting frame 3 and integrally mounted on the second slider 2-2 and is slidable synchronously with the second slider 2-2 on the longitudinal rail 1.
Wherein the cross micrometer can be rigidly and fixedly mounted on the cross micrometer mounting frame 3 through a fastener, and the position of the cross micrometer mounting frame 3 in a vertical plane can be adjusted, namely, the cross micrometer mounting frame moves up and down.
An optical system mounted on the support frame 7 with its light-emitting end directed toward the cross micrometer for emitting a laser beam. As shown in fig. 1, the optical system comprises an optical fiber alignment head 8 and an optical fiber head fixing sleeve 9, the optical fiber alignment head 8 is locked in the optical fiber fixing sleeve 9, and the optical fiber head fixing sleeve 9 is installed on a supporting frame 7.
Referring to fig. 1, a beam expander assembly 4 is disposed in an outgoing light path of the optical system, and is configured to expand and shape a laser beam emitted toward the cross micrometer.
And the optical fine tuning system is arranged on the support frame 7 and is used for adjusting the position of the beam expander assembly 4.
Referring to fig. 1, the optical fine tuning system includes a beam expander screw sleeve 5 and a beam expander mounting sleeve 6 with a common optical axis, the beam expander assembly 4 is screwed in the beam expander screw sleeve 5 and locked, the beam expander assembly 4 and the beam expander screw sleeve 5 are locked and then are integrated, inserted into the beam expander mounting sleeve and pre-fastened by a jackscrew, and the beam expander mounting sleeve 6 is mounted on the support frame 7.
The red visible light beam output by the optical system to be calibrated is projected onto the cross micrometer to form a circular light spot, the position of the edge of the light spot falling on the micrometer is measured by the cross micrometer (the graduation value is 0.1 mm), and the obtained measurement data are used for calculating the center position and the diameter of the light spot and judging whether the light spot is collimated or not. Meanwhile, the four-dimensional adjusting locking structure, such as a jackscrew structure respectively arranged in the X-axis direction and the Y-axis direction, can be finely adjusted according to the measurement parameters through a fine adjustment system to form a four-dimensional adjusting mechanism, so that fine calibration is realized.
Preferably, the cross micrometer adopts a flat plate structure, and is required to be a flat plate material with good flatness and difficult thermal expansion and contraction as a light spot information measuring device of the system, and the material has obvious color change after receiving the irradiation of an output light path of the optical system to be calibrated. Two strictly vertical scales are arranged on the cross micrometer, the measuring range of each scale is larger than the diameter of a light spot of an output light path, and the dividing value of each scale is 0.1mm, as shown in fig. 2.
With reference to the flow chart shown in fig. 3, the method for adjusting and calibrating the input optical path of the vibrating mirror provided by the invention comprises the following steps:
step 1: the galvanometer input light path adjustment calibration system is built, and comprises:
step 1.1: the optical fiber alignment head passes through the optical fiber head fixing sleeve, and the optical fiber alignment head and the optical fiber head fixing sleeve are locked by using a jackscrew;
step 1.2: the assembled component in the step 1.1 is in locking connection with the supporting frame;
step 1.3: the assembled component in the step 1.2 is locked and connected with a beam expander mounting sleeve;
step 1.4: installing and locking the assembly assembled in the step 1.3 on a first sliding block, wherein the first sliding block is locked and fixed with the longitudinal guide rail; the cross micrometer is arranged on a cross micrometer mounting frame of the second sliding block and locked, the second sliding block is moved to be close to the output end of the optical fiber alignment head, and then the second sliding block and the longitudinal guide rail are locked and fixed;
step 2, opening 532nm red visible light for indication through a laser control system, projecting a parallel light beam output through an optical fiber collimating head on a cross micrometer positioned at the front end of the parallel light beam, and reading out the readings of the laser spot boundary falling on the scale of the scale by the cross micrometer when the readings of the X, Y direction are respectively recorded as x R 、x L 、y R 、y L The position of the cross micrometer in the vertical plane is adjusted to enable: x is x R +x L ＝0，y R +y L =0, namely the intersection center of the scale line of the cross micrometer coincides with the center of the laser spot, and the system zeroing is completed;
step 3: closing a laser to indicate red visible light, locking the beam expander assembly and the beam expander thread sleeve by fine threads in a matching way, inserting the beam expander assembly and the beam expander thread sleeve into the beam expander mounting sleeve as a whole, and pre-tightening and fixing the beam expander assembly and the beam expander thread sleeve through jackscrews;
step 4: and (3) opening the red visible light for indication again, shaping the light beam by the beam expander assembly, projecting the output light beam onto a cross micrometer arranged at the front end, and calculating the diameter of a laser spot and relative position data according to scales on the cross micrometer to calibrate the beam expander assembly.
The specific implementation of the step 4 comprises the following steps:
step 4.1: the front-view cross micrometer takes the edge of a red round laser spot as standard fine reading, reads out four scale values x in the X, Y direction R1 、x L1 、y R1 、y L1 And calculate the center position (x 1 ，y 1 ) Spot diameter D 1 ；
Adjusting jackscrews at the joint of the beam expander mounting sleeve and the beam expander thread sleeve, and moving the beam expander assembly on a vertical plane to enable x to be the same as the beam expander R1 +x L1 ＝0，y R1 +y L1 =0, i.e. the spot center coincides with the center produced by the intersection of the scales of the cross micrometer;
step 4.2: moving the cross micrometer to the most far end of the longitudinal guide rail, and reading out four scale values x in the X, Y direction again R2 、x L2 、y R2 、y L2 And calculate the center position (x 2 ，y 2 ) Spot diameter D 2 ；
Step 4.3: and (3) judging the offset and the beam expansion performance of the beam expander assembly based on the circle center position and the spot diameter calculated in the step 4.1 and the step 4.2 respectively.
In step 4.3, the coordinates of the circle centers obtained in steps 4.1 and 4.2 are compared, if the circle center obtained in step 4.2 is shifted forward or backward towards the X axis, jackscrews on the beam expander mounting sleeve are adjusted, and the tail of the beam expander assembly is correspondingly shifted forward or backward towards the X axis.
In step 4.3, the diameters of the light spots obtained in steps 4.1 and 4.2 are compared, if the diameter of the light spot obtained in step 4.2 is changed, it is indicated that the beam expander assembly cannot expand the collimated light beam input by the laser into the collimated light beam with the required larger aperture in the beam shaping process, and the beam expander needs to be replaced to solve the problem.
While the invention has been described with reference to preferred embodiments, it is not intended to be limiting. Those skilled in the art will appreciate that various modifications and adaptations can be made without departing from the spirit and scope of the present invention. Accordingly, the scope of the invention is defined by the appended claims.

Claims (4)

1. The method for adjusting and calibrating the vibrating mirror input light path of the vibrating mirror input light path adjusting device of the powder paving equipment based on the laser selective melting is characterized in that the vibrating mirror input light path adjusting device of the powder paving equipment based on the laser selective melting comprises the following steps: a longitudinal guide rail; a first slider and a second slider arranged on the longitudinal guide rail and slidable along the guide rail; the support frame is arranged on the first sliding block, and the support frame and the first sliding block are limited at one end of the longitudinal guide rail; the cross micrometer is fixedly arranged on the cross micrometer mounting frame and can be arranged to adjust the position of the cross micrometer in a vertical plane through the cross micrometer mounting frame; the optical system is arranged on the support frame, the light-emitting end of the optical system faces the cross micrometer and is used for emitting laser beams, the optical system comprises an optical fiber collimating head and an optical fiber head fixing sleeve, the optical fiber collimating head is locked in the optical fiber fixing sleeve, and the optical fiber head fixing sleeve is arranged on the support frame; the beam expander assembly is arranged in a light-emitting light path of the optical system and is used for expanding and shaping laser beams emitted towards the cross micrometer; the optical fine tuning system is arranged on the supporting frame and is used for adjusting the position of the beam expander assembly; the optical fine adjustment system comprises a beam expander screw sleeve and a beam expander mounting sleeve which share an optical axis, wherein the beam expander assembly is in threaded connection with the inside of the beam expander screw sleeve and locked, and the beam expander screw sleeve is inserted into the beam expander mounting sleeve and is pre-fastened and fixed through a jackscrew;
the implementation of the galvanometer input light path adjustment and calibration method comprises the following steps:
step 1: the galvanometer input light path adjustment calibration system is built, and comprises:
step 1.1: the optical fiber alignment head passes through the optical fiber head fixing sleeve, and the optical fiber alignment head and the optical fiber head fixing sleeve are locked by using a jackscrew;
step 1.2: the assembled component in the step 1.1 is in locking connection with the supporting frame;
step 1.3: the assembled component in the step 1.2 is locked and connected with a beam expander mounting sleeve;
step 1.4: installing and locking the assembly assembled in the step 1.3 on a first sliding block, wherein the first sliding block is locked and fixed with the longitudinal guide rail; the cross micrometer is arranged on a cross micrometer mounting frame of the second sliding block and locked, the second sliding block is moved to be close to the output end of the optical fiber alignment head, and then the second sliding block and the longitudinal guide rail are locked and fixed;
step 2, a laser control system turns on 532nm red visible light for indication,the parallel light beams output by the optical fiber collimating head are projected on a cross micrometer positioned at the front end of the optical fiber collimating head, the front view cross micrometer reads out the readings of the laser spot boundary falling on the scale of the ruler, and the readings in the X, Y direction are respectively recorded as x R 、x L 、y R 、y L The position of the cross micrometer in the vertical plane is adjusted to enable: x is x R +x L ＝0，y R +y L =0, namely the intersection center of the scale line of the cross micrometer coincides with the center of the laser spot, and the system zeroing is completed;
step 3: closing a laser to indicate red visible light, locking the beam expander assembly and the beam expander thread sleeve by fine threads in a matching way, inserting the beam expander assembly and the beam expander thread sleeve into the beam expander mounting sleeve as a whole, and pre-tightening and fixing the beam expander assembly and the beam expander thread sleeve through jackscrews;
step 4: and (3) opening the red visible light for indication again, shaping the light beam by the beam expander assembly, projecting the output light beam onto a cross micrometer arranged at the front end, and calculating the diameter of a laser spot and relative position data according to scales on the cross micrometer to calibrate the beam expander assembly.
2. The method for adjusting and calibrating the input optical path of the vibrating mirror of the powder spreading device for selective laser melting according to claim 1, wherein the specific implementation of the step 4 comprises the following steps:
step 4.1: the front-view cross micrometer takes the edge of a red round laser spot as standard fine reading, reads out four scale values x in the X, Y direction R1 、y L1 、y R1 、y L1 And calculate the first center position (x 1 ，y 1 ) Spot diameter D 1 ；
Adjusting jackscrews at the joint of the beam expander mounting sleeve and the beam expander thread sleeve, and moving the beam expander assembly on a vertical plane to enable x to be the same as the beam expander R1 +x L1 ＝0，y R1 +y L1 =0, i.e. the spot center coincides with the center produced by the intersection of the scales of the cross micrometer;
step 4.2: moving the cross micrometer to the most far end of the longitudinal guide rail, and reading out four scale values x in the X, Y direction again R2 、x L2 、y R2 、y L2 And calculate the second center position (x 2 ，y 2 ) Spot diameter D 2 ；
Step 4.3: and (3) judging the offset and the beam expansion performance of the beam expander assembly based on the circle center position and the spot diameter calculated in the step 4.1 and the step 4.2 respectively.
3. The method for adjusting and calibrating the input optical path of the powder spreading device vibrating mirror for laser selective melting according to claim 2, wherein in the step 4.3, the coordinates of the circle centers obtained in the steps 4.1 and 4.2 are compared, if the circle center obtained in the step 4.2 is shifted forward or backward towards the X axis, a jackscrew on a beam expander mounting sleeve is adjusted, and the tail of the beam expander assembly is correspondingly shifted forward or backward towards the X axis.
4. The method for adjusting and calibrating the input optical path of the galvanometer of the powder spreading device for laser selective melting according to claim 2, wherein in the step 4.3, the diameters of the light spots obtained in the steps 4.1 and 4.2 are compared, if the diameter of the light spot obtained in the step 4.2 is changed, the beam expander assembly is indicated to be incapable of expanding the collimated light beam input by the laser into the collimated light beam with the required larger aperture in the process of shaping the light beam, and the beam expander is indicated to be replaced.
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