CN114167255A - Integrated circuit salt spray corrosion reliability test device and control method - Google Patents
Integrated circuit salt spray corrosion reliability test device and control method Download PDFInfo
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- CN114167255A CN114167255A CN202111362355.1A CN202111362355A CN114167255A CN 114167255 A CN114167255 A CN 114167255A CN 202111362355 A CN202111362355 A CN 202111362355A CN 114167255 A CN114167255 A CN 114167255A
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- 238000012360 testing method Methods 0.000 title claims abstract description 81
- 150000003839 salts Chemical class 0.000 title claims abstract description 79
- 230000007797 corrosion Effects 0.000 title claims abstract description 63
- 238000005260 corrosion Methods 0.000 title claims abstract description 63
- 238000000034 method Methods 0.000 title claims abstract description 10
- 238000004891 communication Methods 0.000 claims abstract description 9
- 238000005507 spraying Methods 0.000 claims description 37
- 238000010438 heat treatment Methods 0.000 claims description 33
- 239000012267 brine Substances 0.000 claims description 22
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 claims description 22
- 239000007788 liquid Substances 0.000 claims description 21
- 230000005540 biological transmission Effects 0.000 claims description 14
- 239000003595 mist Substances 0.000 claims description 13
- 238000002474 experimental method Methods 0.000 claims description 11
- 239000000243 solution Substances 0.000 claims description 9
- 238000011144 upstream manufacturing Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 3
- 238000011160 research Methods 0.000 abstract description 4
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- 229920003023 plastic Polymers 0.000 description 11
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- 238000007789 sealing Methods 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical group [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
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- 230000001066 destructive effect Effects 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
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- 239000011257 shell material Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2881—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to environmental aspects other than temperature, e.g. humidity or vibrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
- G01N17/002—Test chambers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/12—Circuits for multi-testers, i.e. multimeters, e.g. for measuring voltage, current, or impedance at will
- G01R15/125—Circuits for multi-testers, i.e. multimeters, e.g. for measuring voltage, current, or impedance at will for digital multimeters
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- Chemical & Material Sciences (AREA)
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- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
Abstract
The invention provides an integrated circuit salt spray corrosion reliability test device and a control method. The laboratory cave is located to the plummer, is equipped with a plurality of chips on the plummer, and the laboratory cave is located to the signal acquisition box, and the up end of signal acquisition box is located to the plummer, is equipped with a plurality of universal meters in the signal acquisition box, and the universal meter is used for gathering the electrical signal of chip, and universal meter and display panel communication are connected, and display panel is used for showing electrical signal, and the shower nozzle is located the chip top that corresponds for spray the salt fog to the chip. According to the integrated circuit salt spray corrosion reliability test device, the multimeter is arranged to collect electrical signals of the chip, and the curve of the corrosion degree changing along with time can be obtained through real-time collection, so that more accurate salt spray test data can be obtained, and the salt spray corrosion reliability test research of the chip can be analyzed.
Description
Technical Field
The invention relates to the technical field of chips, in particular to a device for testing the salt spray corrosion reliability of an integrated circuit and a control method.
Background
Salt spray corrosion is the common and most destructive atmospheric corrosion. Salt mist falls on the surface of an object and dissolves in water, and can corrode semiconductor integrated circuit materials, structures and the like at ordinary temperatures, so that the surface and joints are roughened, thereby reducing the reliability of circuits. The salt spray corrosion reliability test is an environmental test for examining the corrosion resistance of products or metal materials by artificially simulating the salt spray environmental conditions created by the salt spray test equipment.
The integrated circuit is packaged by ceramic package, plastic package, glass package, metal package, etc. The ceramic sealing shell material has stable property and does not react with salt fog, so the salt fog does not influence the outer body of the ceramic, and the outer lead, the cover plate and the sealing ring are mainly metal or alloy and are easy to corrode under the salt fog. The sealing material in the glass package is 4J29 kovar alloy and molybdenum group glass, the inner lead is aluminum wire, the component of the outer lead is Fe-Ni, and a layer of tin is plated on the outer lead.
If the sealing performance is poor, salt mist can enter the inner part of the core cavity to corrode the chip. The materials for plastic package are divided into silicone plastics and epoxy plastics, and the silicone plastics have good salt spray resistance and the epoxy plastics have strong corrosion resistance. The lead frame for plastic package is mainly made of copper, the surface of the outer lead is plated with tin, and the inner lead is usually made of gold wire. The outer lead frame and the plastic package body are mechanically bonded. In the salt spray test, the permeation speed of the salt spray along the metal and plastic connecting interface is related to the shrinkage condition of the plastic around the metal frame. The larger the plastic package coverage, the less salt spray is easy to enter, thereby causing inaccurate salt spray test data of the chip.
Disclosure of Invention
The invention provides an integrated circuit salt spray corrosion reliability test device and a control method, which are used for solving the defect that the collected data of a salt spray experiment in the prior art is not accurate enough and achieving the purposes of easy acquisition of salt spray experiment data and accurate data.
The invention provides a device for testing the reliability of salt spray corrosion of an integrated circuit, which comprises:
the test box is provided with an operation panel and a display panel and is provided with an experiment cavity;
the bearing table is arranged in the experiment cavity and provided with a plurality of chips;
the signal acquisition box is arranged in the experimental cavity, the bearing table is arranged on the upper end face of the signal acquisition box, a plurality of universal meters are arranged in the signal acquisition box and used for acquiring electrical signals of the chip, the universal meters are in communication connection with the display panel, and the display panel is used for displaying the electrical signals;
the spraying assembly comprises a plurality of spray heads, the spray heads are in one-to-one correspondence with the chips, the spray heads are located above the corresponding chips and used for spraying salt mist to the chips, and the operating panel is in communication connection with the spraying assembly and used for controlling the spray heads to be opened or closed.
According to the integrated circuit salt spray corrosion reliability test device provided by the invention, the spraying assembly is movably arranged in the test box.
According to the integrated circuit salt spray corrosion reliability test device provided by the invention, the telescopic rod is arranged in the experiment cavity, and the telescopic rod is connected with the spraying assembly and used for driving the spraying assembly to move up and down.
According to the integrated circuit salt spray corrosion reliability test device provided by the invention, a straight rod track, a transmission gear and a driving motor are arranged in the test box, the straight rod track extends along the up-down direction, gear teeth distributed along the up-down direction are arranged on the straight rod track, the transmission gear is meshed with the gear teeth, the driving assembly is arranged on the spraying assembly, and the driving motor drives the transmission gear to rotate so as to enable the transmission gear to move up and down along the straight rod track.
According to the integrated circuit salt spray corrosion reliability test device provided by the invention, the spraying assembly comprises:
the pipeline support is formed by a plurality of sections of pipelines, the pipelines are communicated with the corresponding spray heads and used for supplying liquid to the spray heads, and the pipeline support is fixedly connected with the driving assembly;
a brine tank storing an etching solution;
and one end of the flexible pipe is communicated with the pipeline support, the other end of the flexible pipe is communicated with the brine tank, and when the driving assembly drives the pipeline support to move, the flexible pipe deforms.
The integrated circuit salt spray corrosion reliability test device provided by the invention further comprises:
the heating assembly is in communication connection with the operation panel and is arranged at the brine tank so as to heat the brine tank;
a temperature sensor for detecting a temperature of a liquid in the brine tank.
The integrated circuit salt spray corrosion reliability test device provided by the invention further comprises:
and the timing unit is used for metering the heating time of the heating assembly and the spraying time of the spraying assembly.
According to the integrated circuit salt spray corrosion reliability test device provided by the invention, the atomizer is arranged at the spray head and is arranged at the upstream of the spray head.
According to the integrated circuit salt spray corrosion reliability test device provided by the invention, the bottom of the test box is provided with the drainage hole.
The invention also provides a control method of the integrated circuit salt spray corrosion reliability test device, which comprises the following steps:
starting a main power supply;
placing a chip to be tested on a bearing table, and injecting corrosive liquid into a brine tank;
setting the heating time and the heating temperature of the heating assembly, and setting the spray radius, the spray angle and the spray time of the spray head;
starting a universal meter to collect electrical signals of the chip;
and starting a spraying assembly to spray the corrosive liquid to the chip.
According to the integrated circuit salt spray corrosion reliability test device, the multimeter is arranged to collect electrical signals of the chip, and the curve of the corrosion degree changing along with time can be obtained through real-time collection, so that more accurate salt spray test data can be obtained, and the salt spray corrosion reliability test research of the chip can be analyzed.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed for the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an integrated circuit salt spray corrosion reliability testing apparatus provided by the present invention;
FIG. 2 is a flow chart of a control method of the integrated circuit salt spray corrosion reliability testing device provided by the invention;
reference numerals:
an integrated circuit salt spray corrosion reliability test apparatus 100,
the carrier table 120 is provided with a plurality of supporting members,
the signal collection box 130, multimeter 131,
a spray assembly 140, a spray head 141, an atomizer 142, a conduit bracket 143, a brine tank 144, a flexible pipe 145,
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The integrated circuit salt spray corrosion reliability test apparatus 100 of the present invention is described below with reference to fig. 1-2. It should be noted that the corrosion resistance test is an important test for measuring the performance of the integrated circuit (e.g., chip 200).
Referring to fig. 1, an integrated circuit salt spray corrosion reliability testing apparatus 100 according to an embodiment of the present invention includes: test chamber 110, carrier table 120, signal collection chamber 130, and spray assembly 140.
The test chamber 110 is provided with an operation panel 111 and a display panel 112, and the test chamber 110 has a test chamber 113. The carrier 120 is disposed in the experimental chamber 113, and a plurality of chips 200 are disposed on the carrier 120. In order to stably place the chip 200 on the carrier 120, a plurality of positions in which the chip 200 is located may be disposed on the carrier 120. It will be appreciated that the chip 200 is captured in the card locations that define the chip 200.
The signal collection box 130 is arranged in the experiment cavity 113, and the bearing table 120 is arranged on the upper end face of the signal collection box 130. A plurality of multimeters 131 are arranged in the signal collection box 130, the multimeters 131 are used for collecting electrical signals of the chip 200, and for example, the multimeters 131 are electrically connected with the chip 200 through wires. Multimeter 131 is communicatively coupled to display panel 112, and display panel 112 is configured to display electrical signals. That is, multimeter 131 can detect electrical signals of chip 200, including current signals or resistance signals. The mode in which multimeter 131 collects chip 200 electrical signals can be continuous collection and interval collection. For convenience of control, each multimeter 131 can be controlled individually, and the information collected by each multimeter 131 can be displayed on display panel 112. Here, the display panel 112 may also display a threshold value of the collected electrical signal.
It should be noted that in the corrosion experiment, under different corrosion time conditions, the electrical signals fed back from the chip 200 are different, that is, the electrical signals and the time of the chip 200 can construct a curve of the corrosion degree changing with time, so as to obtain more accurate salt spray test data. Here, by providing the display panel 112, not only the corrosion data of the chip 200 can be obtained more intuitively, but also a curve of the corrosion degree with time can be presented on the display panel 112, which is more helpful for the research of the salt spray corrosion reliability test for analyzing the chip 200.
Referring to fig. 1, the spray assembly 140 includes a plurality of spray heads 141, the plurality of spray heads 141 correspond to the plurality of chips 200 one by one, the spray heads 141 are located above the corresponding chips 200 for spraying salt mist to the chips 200, and the operation panel 111 is in communication connection with the spray assembly 140 for controlling the spray heads 141 to be opened or closed. The operation panel 111 can be directly manually controlled to conveniently start or stop the spraying assembly 140, so that the spraying conditions can be adjusted according to conditions to obtain the corrosion information of the chip 200 in different environments.
Here, it should be noted that a plurality of injection mode buttons may be provided on the operation panel 111, and for example, the injection mode button may be a continuous injection button or a pulse injection button. When the continuous spraying button is triggered, the spraying assembly 140 continuously sprays salt fog to the chip 200, and the continuous spraying time of the spraying assembly 140 can be set according to experimental requirements; when the pulse spray button is triggered, the spray assembly 140 intermittently sprays the salt spray to the chip 200, for example, the pulse spray may have a unit time of 0-10 min.
The working principle of the integrated circuit salt spray corrosion reliability test device 100 is as follows:
referring to fig. 1, the spraying assembly 140 may spray salt mist into the experiment chamber 113, and the salt mist is sprayed from the salt mist spray head 141 and is sprayed onto the chip 200 to be tested below the spray head 141 to perform salt mist corrosion on the chip 200 to be tested. The chip 200 that awaits measuring is connected respectively with the both ends of the universal meter 131 in the signal acquisition box 130, and the current signal or the resistance signal through chip 200 will change among the salt spray corrosion process, and display panel 112 is fed back through the electrical signal of gathering the change to universal meter 131, can show the change curve of degree of corrosion along with time on the display panel 112.
According to the integrated circuit salt spray corrosion reliability test device 100 provided by the embodiment of the invention, the multimeter 131 is arranged for acquiring the electrical signals of the chip 200, and by real-time acquisition, a curve of the corrosion degree along with the change of time can be obtained, more accurate salt spray test data can be obtained, and the integrated circuit salt spray corrosion reliability test device is beneficial to analyzing the salt spray corrosion reliability test research of the chip 200.
According to some embodiments of the present invention, spray assembly 140 is removably mounted to test chamber 110. This allows for adjustment of the height between the spray assembly 140 and the chip 200. The lifting distance of the spray assembly 140 may be 0-50 cm. For example, when the chip 200 to be tested is sensitive to the impact force of the fluid, the spray assembly 140 may be raised, thereby attenuating the impact of the spray liquid on the chip 200. Furthermore, in order to adjust the height of the spraying assembly 140 conveniently, an expansion link may be disposed in the experimental cavity 113, and the expansion link is connected to the spraying assembly 140 to drive the spraying assembly 140 to move up and down. It should be noted that a button for controlling the movement of the shower assembly 140 may be disposed on the operation panel 111, and the button may also control the height of the shower assembly 140 ascending or descending.
In some embodiments, a straight rod track, a transmission gear and a driving motor are arranged in the test chamber 110, the straight rod track extends in the up-down direction, gear teeth arranged in the up-down direction are arranged on the straight rod track, the transmission gear is meshed with the gear teeth, the driving assembly is arranged on the spraying assembly 140, and the driving motor drives the transmission gear to rotate so that the transmission gear moves up and down along the straight rod track. It should be noted that the gear teeth are arranged along the up-and-down direction of the straight rod rail, so that a rack structure can be constructed, and the gear and the rack are engaged for transmission, so that the transmission stability and reliability can be improved.
Referring to fig. 1, according to some embodiments of the present invention, a spray assembly 140 includes: a line bracket 143, a brine tank 144 and a flexible tube 145. Among other things, the brine tank 144 stores brine. The pipe support 143 has a multi-sectional pipe structure, the pipe is connected to the corresponding head 141 for supplying the liquid to the head 141, and the pipe support 143 is fixedly connected to the driving unit. One end of the flexible tube 145 is communicated with the tube support 143, and the other end is communicated with the brine tank 144, and when the driving assembly drives the tube support 143 to move, the flexible tube 145 deforms. It is understood that the flexible pipe 145 may provide a pipe path change margin to the pipe bracket 143 when the pipe bracket 143 moves up and down, so that the pipe bracket 143 may be continuously communicated with the brine tank 144, and thus the showerhead 141 may be continuously supplied with the etching solution.
Here, it should be noted that the saline water tank 144 may contain corrosive liquids with different ph values, so as to provide environments with different ph values for the internal environment of the experiment chamber 113. For example, the integrated circuit salt spray corrosion reliability test device 100 of the present invention can provide an acidic, neutral and alkaline environment for the chip 200, and can obtain data information of the salt spray corrosion degree of the chip 200 under different environments by adjusting the concentration and temperature of the corrosive liquid, thereby expanding the application field of the chip 200.
According to some embodiments of the invention, the test device 100 further comprises a heating assembly and a temperature sensor for detecting the temperature of the liquid in the brine tank 144. Wherein, the heating component is connected with the operation panel 111 in a communication way, so that the operation panel 111 can directly control the on or off of the heating component. The heating assembly is provided at the brine tank 144 to heat the brine tank 144.
It should be noted that, in the salt spray corrosion test, the temperature of the corrosive liquid can be parameter information of the chip 200 corrosion test, and the temperature of the corrosive liquid can be accurately controlled by setting the heating component and the temperature sensor, so that the conditions of the chip 200 corrosion test can be improved, and further, the chip 200 corrosion data under the preset conditions can be obtained. On the other hand, by arranging the heating assembly and the temperature sensor, the testing conditions of the testing device 100 can be increased, the testing range of the chip 200 is expanded, and the application range of the testing device 100 is widened.
In some examples, the heating temperature of the heating assembly may be controlled between 30 ℃ and 250 ℃ and the ramp rate may be 10 ℃/min. It should be noted that the parameter settings related to the heating element can be set through the operation panel 111, such as the start and stop of the heating element, the heating time of the heating element, the temperature rise rate of the heating element, and the target temperature of the heating element. The operator can control the heating assembly through the operation panel 111. In addition, the temperature information detected by the temperature sensor can be displayed on the display panel 112 for the operator to know the internal condition of the experimental chamber 113.
In order to be able to control the test time accurately, the test device 100 further comprises a timing unit according to some embodiments of the present invention. Wherein, the timing unit is used for measuring the heating time of the heating assembly and the spraying time of the spraying assembly 140. For example, when the timing unit is used for measuring the working time of the heating assembly, the recording time of the timing unit can be set, for example, the time range can be 0-999 min. Here, a start key, a stop key, and a key for setting a time length to be measured of the time counting unit may be provided on the operation panel 111 for the operator to set.
Referring to fig. 1, in some embodiments, an atomizer 142 may be disposed at the spray head 141, and the atomizer 142 may atomize the corrosive liquid to form the salt fog. To enable a more even spraying of the salt spray, an atomiser 142 may be provided upstream of the spray head 141. "upstream" is understood here to mean: in the flow direction of the fluid, the position of the first flow is upstream, and the position of the second flow is downstream. Thus, since the atomizer 142 can be disposed at the upstream of the nozzle 141, the corrosive liquid is atomized by the atomizer 142 to form salt mist, the salt mist flows to the nozzle 141, and the salt mist can be sprayed to the chip 200 in the form of mist under the action of the nozzle 141.
The parameters of the atomizer 142 and the nozzle 141 are not limited as long as the test conditions can be satisfied, for example, the atomization pressure of the atomizer 142 is 2 to 20MPa, the equivalent gas outlet of the atomizer 142 is 0 to 5mL/s, the spray radius of the nozzle 141 is 0 to 20cm, and the spray angle of the nozzle 141 is 20 to 160 °.
Referring to fig. 1, after the salt spray test is finished, in order to facilitate the discharge of the excessive corrosive liquid, according to some embodiments of the present invention, the bottom of the test chamber 110 is provided with a drainage hole 114. The number, diameter, etc. of the drainage holes 114 are not limited as long as they can satisfy the discharge requirement of the corrosive liquid.
Referring to fig. 2, the method for controlling the integrated circuit salt spray corrosion reliability testing apparatus 100 according to the embodiment of the present invention includes:
s10: starting a main power supply, wherein after the main power supply is started, the display panel 112 is lightened, and the indicator lamp on the operation panel 111 is lightened;
s20: placing the chip 200 to be tested on the bearing table 120, and injecting corrosive liquid into the brine tank 144;
s30: setting the heating time and heating temperature of the heating assembly, setting the spray radius, spray angle and spray time of the spray head 141, where spray mode can also be selected, such as continuous spray or pulsed spray;
s40: starting the multimeter 131 to collect the electrical signals of the chip 200; in this step, the type of the electrical signal collected by the multimeter 131 can be selected, the current signal can be selected through the operation panel 111, the signal collection time can be set, the signal collection threshold value can be set, the signal collection mode (continuous collection or interval collection) can be set, and the like, and the parameter information can be displayed on the display panel 112;
s50: and starting the spraying assembly 140, spraying the corrosive liquid to the chip 200, and closing the main power supply after the test is finished.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. The utility model provides an integrated circuit salt fog corrosion reliability test device which characterized in that includes:
the test box is provided with an operation panel and a display panel and is provided with an experiment cavity;
the bearing table is arranged in the experimental cavity and is suitable for arranging a plurality of chips;
the signal acquisition box is arranged in the experimental cavity, the bearing table is arranged on the upper end face of the signal acquisition box, a plurality of universal meters are arranged in the signal acquisition box and used for acquiring electrical signals of the chip, the universal meters are in communication connection with the display panel, and the display panel is used for displaying the electrical signals;
the spraying assembly comprises a plurality of spray heads, the spray heads are in one-to-one correspondence with the chips, the spray heads are located above the corresponding chips and used for spraying salt mist to the chips, and the operating panel is in communication connection with the spraying assembly and used for controlling the spray heads to be opened or closed.
2. The apparatus of claim 1, wherein the spray assembly is movably disposed in the test chamber.
3. The integrated circuit salt spray corrosion reliability testing device of claim 2, wherein a telescopic rod is arranged in the experiment chamber, and the telescopic rod is connected with the spraying component and used for driving the spraying component to move up and down.
4. The integrated circuit salt spray corrosion reliability test device of claim 2, wherein a straight rod track, a transmission gear and a driving motor are arranged in the test chamber, the straight rod track extends along the vertical direction, gear teeth arranged along the vertical direction are arranged on the straight rod track, the transmission gear is meshed with the gear teeth, the driving assembly is arranged on the spraying assembly, and the driving motor drives the transmission gear to rotate so that the transmission gear moves up and down along the straight rod track.
5. The integrated circuit salt spray corrosion reliability testing device of claim 4, wherein the spray assembly comprises:
the pipeline support is formed by a plurality of sections of pipelines, the pipelines are communicated with the corresponding spray heads and used for supplying liquid to the spray heads, and the pipeline support is fixedly connected with the driving assembly;
a brine tank storing an etching solution;
and one end of the flexible pipe is communicated with the pipeline support, the other end of the flexible pipe is communicated with the brine tank, and when the driving assembly drives the pipeline support to move, the flexible pipe deforms.
6. The integrated circuit salt spray corrosion reliability testing apparatus of claim 5, further comprising:
the heating assembly is in communication connection with the operation panel and is arranged at the brine tank so as to heat the brine tank;
a temperature sensor for detecting a temperature of a liquid in the brine tank.
7. The integrated circuit salt spray corrosion reliability testing apparatus of claim 6, further comprising: and the timing unit is used for metering the heating time of the heating assembly and the spraying time of the spraying assembly.
8. The integrated circuit salt spray corrosion reliability testing device of claim 1, wherein an atomizer is arranged at the spray head, and the atomizer is arranged at the upstream of the spray head.
9. The integrated circuit salt spray corrosion reliability testing device of claim 1, wherein the bottom of the test box is provided with a drainage hole.
10. A control method of an integrated circuit salt spray corrosion reliability test device is characterized by comprising the following steps:
starting a main power supply;
placing a chip to be tested on a bearing table, and injecting corrosive liquid into a brine tank;
setting the heating time and the heating temperature of the heating assembly, and setting the spray radius, the spray angle and the spray time of the spray head;
starting a universal meter to collect electrical signals of the chip;
and starting a spraying assembly to spray the corrosive liquid to the chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111362355.1A CN114167255A (en) | 2021-11-17 | 2021-11-17 | Integrated circuit salt spray corrosion reliability test device and control method |
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| WO2024082185A1 (en) * | 2022-10-19 | 2024-04-25 | 中车工业研究院有限公司 | Measurement device for package stress of chip, and measurement method |
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