CN114150284A - Vacuum coating device applied to communication optical filter processing - Google Patents
Vacuum coating device applied to communication optical filter processing Download PDFInfo
- Publication number
- CN114150284A CN114150284A CN202111356185.6A CN202111356185A CN114150284A CN 114150284 A CN114150284 A CN 114150284A CN 202111356185 A CN202111356185 A CN 202111356185A CN 114150284 A CN114150284 A CN 114150284A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 32
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 23
- 238000012545 processing Methods 0.000 title claims abstract description 14
- 238000004891 communication Methods 0.000 title claims abstract description 12
- 239000011248 coating agent Substances 0.000 claims abstract description 16
- 238000000576 coating method Methods 0.000 claims abstract description 16
- 238000007789 sealing Methods 0.000 claims abstract description 10
- 239000002994 raw material Substances 0.000 claims abstract description 6
- 230000000149 penetrating effect Effects 0.000 claims abstract description 5
- 230000005540 biological transmission Effects 0.000 claims description 16
- 239000007921 spray Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 11
- 238000005485 electric heating Methods 0.000 claims description 6
- 241000883990 Flabellum Species 0.000 claims description 4
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims description 3
- 235000017491 Bambusa tulda Nutrition 0.000 claims description 3
- 241001330002 Bambuseae Species 0.000 claims description 3
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims description 3
- 239000011425 bamboo Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000012546 transfer Methods 0.000 abstract description 5
- 238000005096 rolling process Methods 0.000 description 5
- 238000007747 plating Methods 0.000 description 4
- 238000010030 laminating Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a vacuum coating device applied to processing a communication optical filter, which comprises: the top of the shell assembly is fixedly provided with a vacuum air pump, a pipeline of the vacuum air pump is fixedly arranged on the shell assembly in a penetrating way, the shell assembly consists of a box shell and a sealing door, and the sealing door is fixed on the box shell through a fastening bolt; further comprising: the storage barrel is arranged on the side of the shell assembly and used for storing coating raw materials, the top center of the storage barrel is connected with one end of the gas conveying pipe in a penetrating mode, the other end of the gas conveying pipe is arranged on the inner side of the shell assembly, and the gas conveying pipe penetrates through the side wall of the shell assembly horizontally. This be applied to vacuum coating device of communication light filter processing, its mass transfer structure who is provided with the light filter, the taking of light filter is more convenient, does not need repetitious operation to improve work efficiency, reduced intensity of labour.
Description
Technical Field
The invention relates to the technical field of optical filter processing, in particular to a vacuum coating device applied to processing of a communication optical filter.
Background
In the process of processing the communication optical filter, a coating device is needed to cover the coating raw material on the surface of the optical filter to form a protective layer or a functional layer, however, the existing vacuum coating device still has some problems.
For example, the optical filter evaporation coating device with publication number CN211522313U comprises a vacuum coating machine and a rotating plate, wherein the rotating plate is rotatably fixed inside the vacuum coating machine through a rotating rod, the rotating rod of the rotating plate is in transmission connection with a stepping motor fixed on the outer wall of the vacuum coating machine, and fixing plates … … are fixed on the upper end surface and the lower end surface of the rotating plate. A mass transfer structure of the optical filters is not arranged, and a user needs to take out a single optical filter through repeated operation for many times, so that the working efficiency is reduced, and the labor intensity is improved.
In order to solve the problems, innovative design is urgently needed on the basis of the original vacuum coating device.
Disclosure of Invention
The invention aims to provide a vacuum coating device applied to processing of communication optical filters, and aims to solve the problems that the existing vacuum coating device is not provided with a mass transfer structure for preparing the optical filters, and a user needs to take out a single optical filter through repeated operation for many times, so that the working efficiency is reduced, and the labor intensity is improved.
In order to achieve the purpose, the invention provides the following technical scheme: a vacuum coating device applied to processing of a communication optical filter comprises:
the top of the shell assembly is fixedly provided with a vacuum air pump, a pipeline of the vacuum air pump is fixedly arranged on the shell assembly in a penetrating way, the shell assembly consists of a box shell and a sealing door, and the sealing door is fixed on the box shell through a fastening bolt;
further comprising:
the storage barrel is arranged at the side of the shell assembly and used for storing coating raw materials, the center of the top of the storage barrel is in through connection with one end of a gas transmission pipe, the other end of the gas transmission pipe is arranged at the inner side of the shell assembly, the gas transmission pipe horizontally penetrates through the side wall of the shell assembly and is fixedly embedded with an electric heating plate used for heating coating materials at the bottom of the storage barrel;
the inlet pipe, its lower port through connection be in the lateral wall top of storage section of thick bamboo, threaded connection has the cock body that plays sealed effect on the upper port inner wall of inlet pipe, fixed mounting has first motor in the safety cover that sets up on the gas-supply pipe, and the output shaft of first motor rotate run through in the lateral wall setting of gas-supply pipe.
Preferably, the inner side of the gas pipe is coaxially provided with a fan blade, and the fan blade is fixedly arranged at the end part of the output shaft of the first motor and used for driving the plating material gas to move, so that the first motor can drive the fan blade to rotate.
Preferably, the lateral wall of gas-supply pipe is last through connection to have the spray tube of vertical setting, and the spray tube along gas-supply pipe equidistant distribution has 5 to the internal diameter of 5 spray tubes increases progressively in proper order towards the direction of flabellum, constitutes gas blowout structure.
Preferably, the mobile station is arranged at the bottom of the inner wall of the shell component in a laminating manner, long guide rails are symmetrically distributed on two sides of the mobile station, and the guide rails are fixedly installed on the inner wall of the shell component, so that the mobile station can move along the guide rails.
Preferably, the cross-section of guide rail is "L" shape structure, and the guide rail inlays and establishes constitute slip limit structure on the lateral wall of mobile station to fixed mounting has the second motor of vertical setting on the lateral wall of mobile station, makes the mobile station can with the synchronous motion of second motor.
Preferably, a power gear is fixedly mounted on an output shaft of the second motor, a toothed ring is arranged on the side of the power gear, the power gear and the toothed ring form a meshing transmission structure, the toothed ring is coaxially mounted on the side wall of the rotating disc, and a vertical shaft of the rotating disc is rotatably embedded on the moving table, so that the second motor can drive the toothed ring to rotate.
Preferably, the upper surface of rolling disc is provided with a carrying disc in a fitting manner, the carrying disc is provided with a round hole for placing the optical filter, a convex ring for supporting the optical filter is arranged in the round hole of the carrying disc, the edge of the bottom surface of the carrying disc is vertically provided with positioning columns distributed at equal angles, the positioning columns are inserted into the mounting holes formed in the top of the rolling disc in a sliding manner, and the center of the top of the carrying disc is provided with a pull rod in a T shape, so that the carrying disc can drive the positioning columns to move.
Compared with the prior art, the invention has the beneficial effects that: this be applied to vacuum coating device of communication light filter processing, it is provided with the big batch transfer structure who is equipped with the light filter, and taking of light filter is more convenient, does not need repetitious operation to improve work efficiency, reduced intensity of labour, its concrete content as follows:
1. a power gear is fixedly mounted on an output shaft of the second motor, a gear ring is arranged on the side of the power gear, the power gear and the gear ring form a meshing transmission structure, the gear ring is coaxially mounted on the side wall of the rotating disc, a vertical shaft of the rotating disc is rotatably embedded on the moving table, and when the second motor is started, the power gear drives the rotating disc to rotate on the moving table through the gear ring, so that the object carrying disc arranged above the rotating disc synchronously rotates;
2. the upper surface laminating of rolling disc is provided with carries the thing dish, carry and offer the round hole that is used for placing the light filter on the thing dish, be provided with the bulge loop that is used for supporting the light filter in the round hole, carry the bottom surface edge of thing dish and install the reference column that waits angular distribution perpendicularly, the reference column slides and inserts and establish in the mounting hole that the rolling disc top was seted up, the top center department that carries the thing dish is provided with the pull rod that is "T" font, it carries thing dish rebound to drive through the pull rod, make reference column and rolling disc separation, can lift the light filter on carrying the thing dish off in batches.
Drawings
FIG. 1 is a schematic view of the overall external structure of the present invention;
FIG. 2 is a schematic view showing an installation structure of a gas pipe according to the present invention;
FIG. 3 is a schematic view of the carrier tray mounting structure of the present invention;
FIG. 4 is a schematic view of an electric heating plate according to the present invention;
FIG. 5 is a schematic view of the power gear transmission of the present invention;
fig. 6 is a schematic view of a rotary disk mounting structure of the present invention.
In the figure: 1. a housing assembly; 2. a vacuum air pump; 3. a gas delivery pipe; 4. a storage cylinder; 5. an electric hot plate; 6. a feed pipe; 7. a plug body; 8. a first motor; 9. a fan blade; 10. a nozzle; 11. a mobile station; 12. a guide rail; 13. a second motor; 14. a power gear; 15. a toothed ring; 16. rotating the disc; 17. a carrying tray; 18. and a positioning column.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-6, the present invention provides a technical solution: a vacuum coating device applied to processing of a communication optical filter comprises:
the top of the shell component 1 is fixedly provided with a vacuum air pump 2, a pipeline of the vacuum air pump 2 is fixedly arranged on the shell component 1 in a penetrating way, the shell component 1 consists of a box shell and a sealing door, and the sealing door is fixed on the box shell through a fastening bolt;
further comprising:
the storage barrel 4 is arranged at the side of the shell component 1 and used for storing coating raw materials, the center of the top of the storage barrel 4 is in through connection with one end of the gas transmission pipe 3, the other end of the gas transmission pipe 3 is arranged at the inner side of the shell component 1, the gas transmission pipe 3 horizontally penetrates through the side wall of the shell component 1 and is arranged, and an electric heating plate 5 used for heating coating materials is fixedly embedded at the bottom of the storage barrel 4;
The inner side of the gas pipe 3 is coaxially provided with a fan blade 9, and the fan blade 9 is fixedly arranged at the end part of the output shaft of the first motor 8 and used for driving the plating material gas to move.
The lateral wall of the gas pipe 3 is connected with vertically arranged spray pipes 10 in a through way, 5 spray pipes 10 are distributed along the gas pipe 3 at equal intervals, the inner diameters of the 5 spray pipes 10 are sequentially increased in an increasing way towards the direction of fan blades 9, the bottom of the inner wall of the shell component 1 is provided with a mobile station 11 in an attaching way, long guide rails 12 are symmetrically distributed on two sides of the mobile station 11, the guide rails 12 are fixedly arranged on the inner wall of the shell component 1, the cross section of each guide rail 12 is of an L-shaped structure, the guide rails 12 are embedded on the lateral wall of the mobile station 11 to form a sliding limiting structure, a vertically arranged second motor 13 is fixedly arranged on the lateral wall of the mobile station 11, a power gear 14 is fixedly arranged on an output shaft of the second motor 13, a toothed ring 15 is arranged on the lateral side of the power gear 14, the two form a meshing transmission structure, the toothed ring 15 is coaxially arranged on the lateral wall of a rotating disc 16, and the vertical shaft of the rotating disc 16 is rotatably embedded on the mobile station 11, the second motor 13 is started, the power gear 14 installed on the output shaft of the second motor 13 starts to rotate, at this time, the power gear 14 drives the rotating disc 16 installed with the toothed ring 15 to rotate, the rotating disc 16 drives the object carrying disc 17 placed with the optical filter to rotate through the positioning column 18, and therefore the optical filter on the object carrying disc 17 is evenly coated.
The upper surface of the rotating disc 16 is provided with a carrier disc 17 in a fitting manner, a round hole for placing the optical filter is formed in the carrier disc 17, a convex ring for supporting the optical filter is arranged in the round hole of the carrier disc 17, positioning columns 18 which are distributed at equal angles are vertically arranged at the edge of the bottom surface of the carrier disc 17, the positioning columns 18 are inserted into mounting holes formed in the top of the rotating disc 16 in a sliding manner, a pull rod in a T shape is arranged at the center of the top of the carrier disc 17, the pull rod on the carrier disc 17 is pulled upwards, at the moment, the carrier disc 17 can drive all the optical filters to move upwards, and the positioning columns 18 can be separated from the mounting holes, so that the carrier disc 17 with the optical filter can be taken out.
The working principle is as follows: when the vacuum coating device applied to processing of the communication optical filter is used, firstly, referring to fig. 1-5, the vacuum air pump 2 is started, the air in the shell component 1 is pumped out by the vacuum air pump 2 to achieve a high vacuum processing environment, because one end of the air delivery pipe 3 is communicated with the inner side of the shell component 1 through the spray pipe 10, the other end of the air delivery pipe 3 is fixedly communicated with the top of the storage cylinder 4, and the port of the inlet pipe 6 is in threaded connection with the plug body 7 to form a sealing structure, at the moment, the inner space of the storage cylinder 4 is synchronously in a vacuum state, the electric heating plate 5 and the first motor 8 are started, the electric heating plate 5 heats the coating raw material in the storage cylinder 4, so that the coating material starts to be gasified, the gasified coating material enters the air delivery pipe 3, the first motor 8 drives the fan blade 9 to rotate, and the fan blade 9 drives the gaseous coating material to move towards the spray pipe 10, and is sprayed out from the spray pipe 10, the gaseous plating material is sprayed to the carrying disc 17 with the optical filter, the gaseous plating material is condensed and covered on the optical filter, and the film coating operation is started;
referring to fig. 1-6, following the above steps, the second motor 13 is started, the power gear 14 mounted on the output shaft of the second motor 13 starts to rotate, since the side of the power gear 14 is provided with the gear ring 15, the two constitute a meshing transmission structure, the gear ring 15 is coaxially mounted on the side wall of the rotating disc 16, and the vertical shaft of the rotating disc 16 is rotatably embedded on the moving table 11, and the edge of the bottom surface of the object carrying disc 17 is vertically provided with the positioning columns 18 with equal angular distribution, and meanwhile, the positioning columns 18 are slidably inserted into the mounting holes formed in the top of the rotating disc 16, at this time, the power gear 14 drives the rotating disc 16 provided with the gear ring 15 to rotate, the rotating disc 16 drives the object carrying disc 17 provided with the optical filter to rotate through the positioning columns 18, so that the optical filter on the object carrying disc 17 is uniformly coated, when a user needs to transfer the processed optical filter, the pressure difference between the inside and the outside of the housing assembly 1 is balanced by the vacuum air pump 2, rotate the fastening hand wheel on the shell subassembly 1 for the sealing door can be opened, stimulate the mobile station 11 and outwards remove along guide rail 12 after that, when carrying thing dish 17 and removing the external world, the pull rod on the thing dish 17 is carried in the pulling, because offer the round hole that is used for placing the light filter on carrying thing dish 17, and be provided with the bulge loop that is used for supporting the light filter in the round hole, carrying thing dish 17 this moment can drive all light filters rebound, can know by above-mentioned step, the reference column 18 can break away from in the mounting hole, can take out the thing dish 17 of carrying of placing the light filter.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the invention can be made, and equivalents and modifications of some features of the invention can be made without departing from the spirit and scope of the invention.
Claims (7)
1. A vacuum coating device applied to processing of a communication optical filter comprises:
the top of the shell assembly (1) is fixedly provided with a vacuum air pump (2), a pipeline of the vacuum air pump (2) is fixedly arranged on the shell assembly (1) in a penetrating mode, the shell assembly (1) is composed of a box shell and a sealing door, and the sealing door is fixed on the box shell through a fastening bolt;
it is characterized by also comprising:
the coating device comprises a storage barrel (4) which is arranged at the side of the shell component (1) and used for storing coating raw materials, wherein the center of the top of the storage barrel (4) is in through connection with one end of a gas transmission pipe (3), the other end of the gas transmission pipe (3) is arranged at the inner side of the shell component (1), the gas transmission pipe (3) horizontally penetrates through the side wall of the shell component (1) and is arranged, and an electric heating plate (5) used for heating coating materials is fixedly embedded at the bottom of the storage barrel (4);
inlet pipe (6), its lower port through connection be in the lateral wall top of storage section of thick bamboo (4), threaded connection has stopper body (7) that plays sealed effect on the last port inner wall of inlet pipe (6), fixed mounting has first motor (8) in the safety cover that sets up on gas-supply pipe (3), and the output shaft of first motor (8) rotate run through in the lateral wall setting of gas-supply pipe (3).
2. The vacuum coating apparatus according to claim 1, wherein: the inboard coaxial flabellum (9) that is provided with of gas-supply pipe (3), and flabellum (9) fixed mounting be in the output shaft tip of first motor (8) is used for driving the gaseous removal of coating material.
3. The vacuum coating apparatus according to claim 2, wherein: the lateral wall of gas-supply pipe (3) is gone up through the link joint and is had vertical spray tube (10) that set up, and spray tube (10) along gas-supply pipe (3) equidistant distribution has 5 to the internal diameter of 5 spray tubes (10) increases progressively in proper order towards the direction of flabellum (9).
4. The vacuum coating apparatus according to claim 1, wherein: the mobile platform (11) is arranged at the bottom of the inner wall of the shell component (1) in an attaching mode, long guide rails (12) are symmetrically distributed on two sides of the mobile platform (11), and the guide rails (12) are fixedly installed on the inner wall of the shell component (1).
5. The vacuum coating apparatus according to claim 4, wherein: the cross-section of guide rail (12) is "L" shape structure, and guide rail (12) inlay and establish constitute slip limit structure on the lateral wall of mobile station (11) to fixed mounting has vertical second motor (13) that sets up on the lateral wall of mobile station (11).
6. The vacuum coating apparatus according to claim 5, wherein: and a power gear (14) is fixedly mounted on an output shaft of the second motor (13), a toothed ring (15) is arranged on the side of the power gear (14), the power gear and the toothed ring form a meshing transmission structure, the toothed ring (15) is coaxially mounted on the side wall of the rotating disc (16), and the vertical shaft of the rotating disc (16) is rotatably embedded on the moving table (11).
7. The vacuum coating apparatus according to claim 6, wherein: the upper surface of the rotating disc (16) is provided with a carrier disc (17) in a fitting manner, a round hole for placing an optical filter is formed in the carrier disc (17), a convex ring for supporting the optical filter is arranged in the round hole of the carrier disc (17), positioning columns (18) which are distributed at equal angles are vertically installed at the edge of the bottom surface of the carrier disc (17), the positioning columns (18) are inserted in the mounting holes formed in the top of the rotating disc (16) in a sliding manner, and a pull rod in a T shape is arranged at the center of the top of the carrier disc (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111356185.6A CN114150284B (en) | 2021-11-16 | 2021-11-16 | Vacuum coating device applied to processing of communication optical filters |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111356185.6A CN114150284B (en) | 2021-11-16 | 2021-11-16 | Vacuum coating device applied to processing of communication optical filters |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114150284A true CN114150284A (en) | 2022-03-08 |
| CN114150284B CN114150284B (en) | 2024-01-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202111356185.6A Active CN114150284B (en) | 2021-11-16 | 2021-11-16 | Vacuum coating device applied to processing of communication optical filters |
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| Country | Link |
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| CN (1) | CN114150284B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115537758A (en) * | 2022-12-01 | 2022-12-30 | 苏州京浜光电科技股份有限公司 | Processing device for optical filter |
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| KR19990043718A (en) * | 1997-11-29 | 1999-06-15 | 구본준 | Photosensitive Curing Device of Photosensitive Agent Coating Equipment |
| CN202022975U (en) * | 2011-03-07 | 2011-11-02 | 苏州鼎旺科技有限公司 | Vacuum film coating mechanism for optical communication optical filters |
| CN208829757U (en) * | 2018-09-13 | 2019-05-07 | 青岛优百宇真空设备股份有限公司 | Automotive hub filming equipment |
| CN110453191A (en) * | 2019-08-28 | 2019-11-15 | 佛山市佛欣真空技术有限公司 | A kind of conducting system and vacuum coating equipment of vacuum coating equipment |
| CN210085573U (en) * | 2019-06-06 | 2020-02-18 | 肇庆市哈力化工有限公司 | Vacuum coating device |
| CN111593314A (en) * | 2020-05-25 | 2020-08-28 | 宁波大榭开发区佳洁锌铸件有限公司 | Vacuum coating process and device |
| CN113265639A (en) * | 2021-04-16 | 2021-08-17 | 布勒莱宝光学设备（北京）有限公司 | Coating film rotating mechanism with automatic swing planetary disc |
-
2021
- 2021-11-16 CN CN202111356185.6A patent/CN114150284B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990043718A (en) * | 1997-11-29 | 1999-06-15 | 구본준 | Photosensitive Curing Device of Photosensitive Agent Coating Equipment |
| CN202022975U (en) * | 2011-03-07 | 2011-11-02 | 苏州鼎旺科技有限公司 | Vacuum film coating mechanism for optical communication optical filters |
| CN208829757U (en) * | 2018-09-13 | 2019-05-07 | 青岛优百宇真空设备股份有限公司 | Automotive hub filming equipment |
| CN210085573U (en) * | 2019-06-06 | 2020-02-18 | 肇庆市哈力化工有限公司 | Vacuum coating device |
| CN110453191A (en) * | 2019-08-28 | 2019-11-15 | 佛山市佛欣真空技术有限公司 | A kind of conducting system and vacuum coating equipment of vacuum coating equipment |
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| CN113265639A (en) * | 2021-04-16 | 2021-08-17 | 布勒莱宝光学设备（北京）有限公司 | Coating film rotating mechanism with automatic swing planetary disc |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115537758A (en) * | 2022-12-01 | 2022-12-30 | 苏州京浜光电科技股份有限公司 | Processing device for optical filter |
| CN115537758B (en) * | 2022-12-01 | 2023-03-14 | 苏州京浜光电科技股份有限公司 | Processing device for optical filter |
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| Publication number | Publication date |
|---|---|
| CN114150284B (en) | 2024-01-19 |
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