CN114126760A - 微流控芯片及其加液方法、微流控系统 - Google Patents

微流控芯片及其加液方法、微流控系统 Download PDF

Info

Publication number
CN114126760A
CN114126760A CN202080000724.XA CN202080000724A CN114126760A CN 114126760 A CN114126760 A CN 114126760A CN 202080000724 A CN202080000724 A CN 202080000724A CN 114126760 A CN114126760 A CN 114126760A
Authority
CN
China
Prior art keywords
substrate
liquid
liquid inlet
layer
inlet hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080000724.XA
Other languages
English (en)
Inventor
李月
姚文亮
赵楠
高涌佳
古乐
廖辉
樊博麟
赵莹莹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Beijing BOE Sensor Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Beijing BOE Sensor Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd, Beijing BOE Sensor Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Publication of CN114126760A publication Critical patent/CN114126760A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
    • B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
    • B01L3/502792—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics for moving individual droplets on a plate, e.g. by locally altering surface tension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0089—Chemical or biological characteristics, e.g. layer which makes a surface chemically active
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/02—Adapting objects or devices to another
    • B01L2200/026—Fluid interfacing between devices or objects, e.g. connectors, inlet details
    • B01L2200/027—Fluid interfacing between devices or objects, e.g. connectors, inlet details for microfluidic devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0642—Filling fluids into wells by specific techniques
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0689—Sealing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/16—Surface properties and coatings
    • B01L2300/161—Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
    • B01L2400/0427—Electrowetting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/057—Micropipets, dropformers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0323—Grooves
    • B81B2203/033—Trenches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0353—Holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Clinical Laboratory Science (AREA)
  • Hematology (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)

Abstract

一种微流控芯片，包括对盒设置的第一基板(110)和第二基板(120)，第一基板(110)和第二基板(120)之间形成有容液腔A，第一基板(110)上形成有沿厚度方向贯穿第一基板(110)的进液孔B，第一基板(110)包括沿第一基板(110)的厚度方向依次设置的第一电极层(113)和疏水层(111)，第一电极层(113)设置在疏水层(111)背离第二基板(120)的表面上；第二基板(120)包括沿第二基板(120)的厚度方向依次设置的调节层(121)和第二电极层(122)，第二电极层(122)位于调节层(121)背离第一基板(110)的一侧。一种微流控系统和一种微流控芯片的控制方法。

Description

PCT国内申请，说明书已公开。

Claims (20)

  1. PCT国内申请，权利要求书已公开。
CN202080000724.XA 2020-05-13 2020-05-13 微流控芯片及其加液方法、微流控系统 Pending CN114126760A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2020/090005 WO2021226871A1 (zh) 2020-05-13 2020-05-13 微流控芯片及其加液方法、微流控系统

Publications (1)

Publication Number Publication Date
CN114126760A true CN114126760A (zh) 2022-03-01

Family

ID=78526147

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202080000724.XA Pending CN114126760A (zh) 2020-05-13 2020-05-13 微流控芯片及其加液方法、微流控系统
CN202180000102.1A Pending CN113939366A (zh) 2020-05-13 2021-01-29 微流控芯片

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202180000102.1A Pending CN113939366A (zh) 2020-05-13 2021-01-29 微流控芯片

Country Status (5)

Country Link
US (2) US20220126287A1 (zh)
EP (1) EP4112176A4 (zh)
JP (1) JP2023524187A (zh)
CN (2) CN114126760A (zh)
WO (2) WO2021226871A1 (zh)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110300034A1 (en) * 2006-06-19 2011-12-08 The Regents Of The University Of California Disposable, High Pressure Microfluidic Chips
CN104492508A (zh) * 2014-11-13 2015-04-08 浙江大学 一种基于液体残留的超微量液滴操控装置及方法
WO2015137694A1 (ko) * 2014-03-11 2015-09-17 포항공과대학교 산학협력단 표준물첨가법을 이용한 흐름셀을 갖는 미세유체칩과 이를 포함하는 흡광 검출 장치
CN106622414A (zh) * 2017-01-23 2017-05-10 广东顺德工业设计研究院(广东顺德创新设计研究院) 微流控芯片
CN108393105A (zh) * 2018-04-20 2018-08-14 华南师范大学 一种微流控芯片及其控制系统、控制方法
CN108465491A (zh) * 2018-03-12 2018-08-31 京东方科技集团股份有限公司 微流控芯片、生物检测装置和方法
CN109248722A (zh) * 2018-11-20 2019-01-22 京东方科技集团股份有限公司 一种盖板结构、微流控装置及盖板结构的制备方法
CN109261233A (zh) * 2018-11-19 2019-01-25 京东方科技集团股份有限公司 微流控芯片
US20190099756A1 (en) * 2017-09-29 2019-04-04 Boe Technology Group Co., Ltd. Micro-fluidic chip, driving method thereof, micro-fluidic element and biosensor
CN109772480A (zh) * 2017-11-15 2019-05-21 中国科学院青岛生物能源与过程研究所 单个微粒包裹液滴在微流控芯片中形成并分别导出的方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006058031A (ja) * 2004-08-17 2006-03-02 Hitachi High-Technologies Corp 化学分析装置
TWI262309B (en) * 2004-12-31 2006-09-21 Ind Tech Res Inst Droplet controlling apparatus, manufacturing method, controlling method and digital flow inspection apparatus
AU2008345138B2 (en) * 2007-12-23 2014-05-29 Advanced Liquid Logic, Inc. Droplet actuator configurations and methods of conducting droplet operations
WO2009137415A2 (en) * 2008-05-03 2009-11-12 Advanced Liquid Logic, Inc. Reagent and sample preparation, loading, and storage
KR101882018B1 (ko) * 2012-04-17 2018-08-24 리쿠아비스타 비.브이. 전기 습윤 장치
US10124351B2 (en) * 2013-08-13 2018-11-13 Advanced Liquid Logic, Inc. Methods of improving accuracy and precision of droplet metering using an on-actuator reservoir as the fluid input
JP6641274B2 (ja) * 2013-11-22 2020-02-05 リーアニクス・インコーポレイテッドＲｈｅｏｎｉｘ， Ｉｎｃ． チャネルレスポンプ、方法およびその利用
US10137450B2 (en) * 2014-07-18 2018-11-27 Tecan Trading Ag Microfluidics cartridge with pipetting guide
WO2017164253A1 (ja) * 2016-03-24 2017-09-28 シャープ株式会社 エレクトロウェッティング装置及びエレクトロウェッティング装置の製造方法
WO2017181069A1 (en) * 2016-04-15 2017-10-19 University Of Maryland, College Park Integrated thermoplastic chip for rapid pcr and hrma
WO2018190336A1 (ja) * 2017-04-10 2018-10-18 古河電気工業株式会社 送液デバイス及び送液方法
CN107118955B (zh) * 2017-05-12 2020-03-10 京东方科技集团股份有限公司 基因测序芯片及基因测序方法
EP3710277A4 (en) * 2017-11-14 2021-08-04 Illumina, Inc. DISTRIBUTION OF DROPS
US11779926B2 (en) * 2017-11-14 2023-10-10 Illumina, Inc. Digital fluidic cartridge with inlet gap height larger than outlet gap height
CN108405004B (zh) * 2018-04-23 2024-03-26 深圳市国华光电科技有限公司 一种液滴生成控制方法及其系统
CN109765178B (zh) * 2018-05-30 2020-04-21 京东方科技集团股份有限公司 一种微流控器件、驱动方法及微流控检测系统
CN109603939B (zh) * 2019-01-04 2021-08-31 京东方科技集团股份有限公司 极板及微流控芯片
CN109557149A (zh) * 2019-01-14 2019-04-02 大连大学 基于pcb板的数字微流控芯片及病原体免疫检测方法
JP7120063B2 (ja) * 2019-02-08 2022-08-17 株式会社島津製作所 マイクロチップ電気泳動装置及びマイクロチップ電気泳動方法
CN109759153A (zh) * 2019-02-28 2019-05-17 南京理工大学 一种用于毛细作用微流控芯片的电润湿阀门及其控制方法
CN109894167B (zh) * 2019-03-25 2021-09-28 上海天马微电子有限公司 微流控芯片
US11442264B2 (en) * 2019-03-27 2022-09-13 Sharp Kabushiki Kaisha Electrowetting device

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110300034A1 (en) * 2006-06-19 2011-12-08 The Regents Of The University Of California Disposable, High Pressure Microfluidic Chips
WO2015137694A1 (ko) * 2014-03-11 2015-09-17 포항공과대학교 산학협력단 표준물첨가법을 이용한 흐름셀을 갖는 미세유체칩과 이를 포함하는 흡광 검출 장치
CN104492508A (zh) * 2014-11-13 2015-04-08 浙江大学 一种基于液体残留的超微量液滴操控装置及方法
CN106622414A (zh) * 2017-01-23 2017-05-10 广东顺德工业设计研究院(广东顺德创新设计研究院) 微流控芯片
US20190099756A1 (en) * 2017-09-29 2019-04-04 Boe Technology Group Co., Ltd. Micro-fluidic chip, driving method thereof, micro-fluidic element and biosensor
CN109772480A (zh) * 2017-11-15 2019-05-21 中国科学院青岛生物能源与过程研究所 单个微粒包裹液滴在微流控芯片中形成并分别导出的方法
CN108465491A (zh) * 2018-03-12 2018-08-31 京东方科技集团股份有限公司 微流控芯片、生物检测装置和方法
CN108393105A (zh) * 2018-04-20 2018-08-14 华南师范大学 一种微流控芯片及其控制系统、控制方法
CN109261233A (zh) * 2018-11-19 2019-01-25 京东方科技集团股份有限公司 微流控芯片
CN109248722A (zh) * 2018-11-20 2019-01-22 京东方科技集团股份有限公司 一种盖板结构、微流控装置及盖板结构的制备方法

Also Published As

Publication number Publication date
CN113939366A (zh) 2022-01-14
US20220314217A1 (en) 2022-10-06
US20220126287A1 (en) 2022-04-28
JP2023524187A (ja) 2023-06-09
WO2021226871A1 (zh) 2021-11-18
WO2021227567A1 (zh) 2021-11-18
EP4112176A1 (en) 2023-01-04
EP4112176A4 (en) 2023-10-18

Similar Documents

Publication Publication Date Title
JP5104548B2 (ja) 液体供給システムおよびその製造方法
JP4632300B2 (ja) 送液装置
US8172375B2 (en) Valve and actuator employing capillary electrowetting phenomenon
US20090126813A1 (en) Liquid-Transport Device and System
JP2010005956A (ja) 液体収容容器の製造方法、液体収容容器
US7960183B2 (en) Biochip manufacturing method and biochip manufacturing device
CN107966808B (zh) 将流体装载至微流体设备中
WO2017078059A1 (ja) エレクトロウェッティング装置およびその製造方法並びに液滴注入方法
EP2103436A2 (en) Liquid delivery system and manufacturing method for the same
TW201006679A (en) Liquid delivery system and manufacturing method for the same
CN111065521B (zh) 液滴分配
JP5056589B2 (ja) 液体収容体
JP6636686B2 (ja) 流体取扱装置の取扱方法
CN114126760A (zh) 微流控芯片及其加液方法、微流控系统
EP3460485B1 (en) Fluid handling device
JP2008076275A (ja) 分注装置
JP5206118B2 (ja) 液体収容体
US11764514B2 (en) Method for sealing a plug pin in a housing, and housing device
US20090123297A1 (en) Microfluidic osmotic pump
US20230256434A1 (en) Cartridge and liquid handling device
JP2023177785A (ja) 液体収容容器の製造方法
WO2011102804A1 (en) An electro-fluidic interface to a multi-well plate
JP2015192945A (ja) 液体供給方法およびマイクロ流路デバイス
US9283558B2 (en) Fluid handling device
JP4720638B2 (ja) 細胞電気生理センサおよびそれを用いた細胞電気生理現象の測定方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination