CN114122302A - Drying device - Google Patents

Drying device Download PDF

Info

Publication number
CN114122302A
CN114122302A CN202111345665.2A CN202111345665A CN114122302A CN 114122302 A CN114122302 A CN 114122302A CN 202111345665 A CN202111345665 A CN 202111345665A CN 114122302 A CN114122302 A CN 114122302A
Authority
CN
China
Prior art keywords
fluid
temperature control
control plate
temperature
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202111345665.2A
Other languages
Chinese (zh)
Other versions
CN114122302B (en
Inventor
邴一飞
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Original Assignee
Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority to CN202111345665.2A priority Critical patent/CN114122302B/en
Publication of CN114122302A publication Critical patent/CN114122302A/en
Application granted granted Critical
Publication of CN114122302B publication Critical patent/CN114122302B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/0015Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
    • B41J11/002Curing or drying the ink on the copy materials, e.g. by heating or irradiating
    • B41J11/0024Curing or drying the ink on the copy materials, e.g. by heating or irradiating using conduction means, e.g. by using a heated platen
    • B41J11/00242Controlling the temperature of the conduction means
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40Thermal treatment, e.g. annealing in the presence of a solvent vapour

Abstract

The embodiment of the application provides a drying device; the drying device comprises a box body and a cooling assembly, wherein the cooling assembly is positioned in the box body and comprises a temperature control plate for bearing a display panel, and the temperature of the central area of the temperature control plate is higher than that of the edge area of the temperature control plate; the drying device regulates and controls the temperature of the periphery and the center of the solution in the film layer prepared by ink-jet printing in the display panel in the drying process by regulating the temperature of the temperature control plate in different areas, which is in contact with the display panel, so as to control the air extraction rate, so that the evaporation rate of the solution in each position in the volatilization process is kept consistent, and the uniformity of the thickness of the film layer formed by ink-jet printing after volatilization is ensured.

Description

Drying device
Technical Field
The application relates to the field of display, concretely relates to drying device.
Background
Ink Jet Printing (IJP) is a new process technology that can directly perform patterned thin film deposition, so that currently, each functional layer in an Organic Light-Emitting Display (OLED) device, such as a hole transport layer, an Organic Light-Emitting layer, and an electron transport layer, is usually formed into a specific pattern by using an ink jet printing technology.
The ink jet printing process generally comprises: an inkjet printing (IJP) process, a vacuum drying (VCD) process, and a baking (Bake) process. Among them, the influence of the vacuum drying process on the final morphology of the film is most important. The existing vacuum drying equipment is equipment for drying a target solution at low temperature and low pressure, the solution is gasified and volatilized mainly through extremely low pressure, and the gasified solution is pumped out through an air pumping pipeline to finally form a dry solid film layer. However, the evaporation rate of the solution at different positions during evaporation is different, which leads to coffee ring effect and uneven film thickness of the ink-jet printing layer.
Therefore, a drying device is needed to solve the above technical problems.
Disclosure of Invention
The embodiment of the application provides a drying device, can improve the uneven technical problem of display device film-forming thickness that current inkjet printing technology prepared.
The embodiment of the application provides a drying device, which is applied to a display panel and comprises a box body and a cooling assembly, wherein the cooling assembly is positioned in the box body and comprises a temperature control plate for bearing the display panel;
wherein the temperature of the central area of the temperature control plate is higher than the temperature of the edge area of the temperature control plate.
Optionally, in some embodiments of the present application, the cooling assembly further includes a first cooling plate and a second cooling plate disposed on the first cooling plate, the second cooling plate being disposed between the first cooling plate and the temperature control plate;
the first cooling plate is internally provided with a first fluid pipeline, the second cooling plate is internally provided with a second fluid pipeline, and fluid medium circularly flows in the first fluid pipeline and the second fluid pipeline.
Optionally, in some embodiments of the present application, an orthographic projection of the first fluid pipeline on the temperature control plate is located in a central region of the temperature control plate, and an orthographic projection of the second fluid pipeline on the temperature control plate is located in an edge region of the temperature control plate.
Optionally, in some embodiments of the present application, the material of the fluid medium in the first fluid line is the same as the material of the fluid medium in the second fluid line; the flow rate of the fluid medium in the first fluid line is less than the flow rate of the fluid medium in the second fluid line.
Optionally, in some embodiments of the present application, the edge region includes a first sub-edge region and a second sub-edge region adjacent to the first sub-edge region, the first sub-edge region corresponds to four right-angle regions of the temperature control plate, and the second sub-edge region corresponds to four side regions of the temperature control plate;
wherein the temperature of the second sub-edge region of the temperature control plate is greater than the temperature of the first sub-edge region of the temperature control plate.
Optionally, in some embodiments of the present application, the cooling assembly further includes a third cooling plate disposed between the second cooling plate and the temperature control plate, a third fluid pipeline is disposed in the third cooling plate, and the fluid medium circulates in the third fluid pipeline;
the orthographic projection of the second fluid pipeline on the temperature control plate is located in the second sub-edge region of the temperature control plate, and the orthographic projection of the third fluid pipeline on the temperature control plate is located in the first sub-edge region of the temperature control plate.
Optionally, in some embodiments of the present application, the second fluid circuit includes four second fluid branches, an orthographic projection of each of the second fluid branches on the temperature control plate is located in a corresponding one of the side edge regions, and each of the second fluid branches is communicated with another one of the second fluid branches; the third fluid pipeline comprises four third fluid branches, the orthographic projection of each third fluid branch on the temperature control plate is positioned in one corresponding right-angle area, and each third fluid branch is communicated with the other third fluid branch.
Optionally, in some embodiments of the present application, each of the first fluid line, the second fluid line and the third fluid line is provided with one outer fluid line and one inner fluid line;
wherein the flow direction of the fluid medium in the outer fluid line is opposite to the flow direction of the fluid medium in the inner fluid line.
Optionally, in some embodiments of the present application, the temperature of the central region of the temperature control plate is greater than 20 ℃, the temperature of the second sub-edge region of the temperature control plate ranges from 10 ℃ to 20 ℃, and the temperature of the first sub-edge region of the temperature control plate ranges from 5 ℃ to 10 ℃.
Optionally, in some embodiments of the present application, the drying device further includes a vacuum pumping assembly, the vacuum pumping assembly is connected to the box body, and the vacuum pumping assembly is configured to exhaust gas in the box body.
The embodiment of the application provides a drying device; the drying device comprises a box body and a cooling assembly, wherein the cooling assembly is positioned in the box body and comprises a temperature control plate for bearing the display panel, and the temperature of the central area of the temperature control plate is higher than that of the edge area of the temperature control plate; the drying device regulates and controls the temperature of the periphery and the center of the solution in the film layer prepared by ink-jet printing in the display panel in the drying process by regulating the temperature of the temperature control plate in different areas, which is in contact with the display panel, so as to control the air extraction rate, so that the evaporation rate of the solution in each position is kept consistent in the volatilization process, and the uniformity of the thickness of the film layer formed by ink-jet printing after volatilization is ensured.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic cross-sectional structural view of a drying apparatus according to a first embodiment of the present disclosure;
fig. 2 is a schematic plan view illustrating a temperature control plate in a drying apparatus according to a first embodiment of the present disclosure;
fig. 3 is a schematic structural diagram of a liquid inlet and a liquid outlet of a cooling assembly in a drying apparatus according to a first embodiment of the present disclosure;
fig. 4 is a schematic plan view of a first cooling plate in a drying apparatus according to a first embodiment of the present application;
fig. 5 is a schematic cross-sectional structure view of a drying device according to a second embodiment of the present application;
fig. 6 is a schematic plan view illustrating a temperature control plate in a drying apparatus according to a second embodiment of the present disclosure;
fig. 7 is a flowchart of a drying method for a display panel according to an embodiment of the present disclosure.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application. Furthermore, it should be understood that the detailed description and specific examples, while indicating exemplary embodiments of the invention, are given by way of illustration and explanation only, and are not intended to limit the scope of the invention. In the present application, unless indicated to the contrary, the use of the directional terms "upper" and "lower" generally refer to the upper and lower positions of the device in actual use or operation, and more particularly to the orientation of the figures of the drawings; while "inner" and "outer" are with respect to the outline of the device.
The embodiment of the application aims at the technical problem that the film forming thickness of the display device prepared by the current ink-jet printing process is uneven, and the embodiment of the application can improve the technical problem.
The technical solution of the present application will now be described with reference to specific embodiments.
Referring to fig. 1 to 6, an embodiment of the present application provides a drying apparatus 100 applied to a display panel 30, including a box 10 and a cooling module 20, where the cooling module 20 is located in the box 10, and the cooling module 20 includes a temperature control plate 203 for carrying the display panel 30;
wherein the temperature of the central region A1 of the temperature control plate 203 is higher than the temperature of the edge region A2 of the temperature control plate 203.
The drying device 100 provided by the embodiment of the present application adjusts and controls the temperature of the periphery and the center of the solution in the film layer prepared by inkjet printing in the display panel 30 in the drying process by adjusting the temperature of the temperature control plate 203 in different areas, which is in contact with the display panel 30, so as to control the air exhaust rate, so that the evaporation rate of the solution in each position in the volatilization process is kept consistent, thereby ensuring the uniformity of the film thickness of the film layer printed by inkjet after volatilization.
The technical solution of the present application will now be described with reference to specific embodiments.
Example one
Fig. 1 is a schematic cross-sectional view of a drying apparatus 100 according to a first embodiment of the present disclosure; the drying device 100 is applied to a film layer prepared by inkjet printing in a display panel 30, the drying device 100 includes a box 10 and a cooling assembly 20, the cooling assembly 20 is located in the box 10, and the cooling assembly 20 includes a temperature control plate 203 for bearing the display panel 30;
wherein the temperature of the central region A1 of the temperature control plate 203 is higher than the temperature of the edge region A2 of the temperature control plate 203.
In the embodiment of the present application, the drying apparatus 100 is a device for drying a target solution at a low temperature and a low pressure, and vaporizes and volatilizes the solution by an extremely low pressure, and extracts the vaporized solution through an air extraction line, thereby finally forming a dry solid film layer.
In the embodiment of the present application, the display panel 30 includes a substrate 301 and an inkjet printing layer 302 disposed on the substrate 301, and the inkjet printing layer 302 is preferably an organic light emitting functional layer.
In the embodiment of the present application, the cooling assembly 20 further includes a first cooling plate 201 and a second cooling plate 202 disposed on the first cooling plate 201, the second cooling plate 202 is disposed between the first cooling plate 201 and the temperature control plate 203, and the first cooling plate 201 and the second cooling plate 202 are disposed opposite to the temperature control plate 203 respectively.
Further, a first fluid pipeline is disposed in the first cooling plate 201, a second fluid pipeline is disposed in the second cooling plate 202, and a fluid medium circulates in the first fluid pipeline and the second fluid pipeline.
As shown in fig. 2, a schematic plan area division diagram of a temperature control plate 203 in a drying device 100 according to a first embodiment of the present application is provided; wherein the temperature control plate 203 comprises a central region a1 and an edge region a2 disposed around the central region a 1.
Further, the orthographic projection of the first fluid pipeline on the temperature control plate 203 is located in a central area a1 of the temperature control plate 203, and the orthographic projection of the second fluid pipeline on the temperature control plate 203 is located in an edge area a2 of the temperature control plate 203. The first fluid pipeline and the second fluid pipeline are independent fluid pipelines and are not communicated with each other. This ensures that the first fluid line is used only for cooling the central region a1 of the temperature control plate 203 and the second fluid line is used only for cooling the edge region a2 of the temperature control plate 203.
Fig. 3 is a schematic structural diagram of a liquid inlet 204 and a liquid outlet 205 of a cooling assembly 20 in the drying apparatus 100 according to the first embodiment of the present disclosure; the first cooling plate 201 and the second cooling plate 202 in the cooling assembly 20 share an inlet 204 and an outlet 205 respectively.
Fig. 4 is a schematic plan view illustrating a first cooling plate 201 of the drying device 100 according to the first embodiment of the present application; wherein the planar structure of the second cooling plate 202 is the same as that of the first cooling plate 201, and will not be discussed here.
In the present embodiment, a first fluid line is disposed in the first cooling plate 201, and the first fluid line includes a first inner fluid line 2012 and a first outer fluid line 2011 disposed around the first inner fluid line 2012. The fluid medium in the first outside fluid line 2011 flows along the outside of the first cooling plate 201 toward the inside of the first cooling plate 201, and the fluid medium in the first inside fluid line 2012 flows along the inside of the first cooling plate 201 toward the outside of the first cooling plate 201 (the solid line arrow in fig. 4 indicates a liquid inlet direction, and the dotted line arrow indicates a liquid outlet direction).
In the present embodiment, the first outside fluid line 2011 and the first inside fluid line 2012 are both S-shaped lines. The above design can ensure that the cooling rate of each point in the central area a1 of the temperature control plate 203 corresponding to the first fluid pipeline is kept consistent.
In the embodiment of the present application, the temperature of the central region a1 of the temperature control plate 203 is greater than 20 ℃, and the temperature of the edge region a2 of the temperature control plate 203 ranges from 10 ℃ to 20 ℃. Thus, the temperature of the central area A1 of the temperature control plate 203 and the temperature of the edge area A2 of the temperature control plate 203 are designed differently, so that the consistent volatilization rate of the liquid in the ink-jet printing layer 302 on the temperature control plate 203 is ensured.
In the embodiment of the present application, the drying device 100 further includes a vacuum pumping assembly, which is connected to the box 10 and is used for exhausting the gas in the box 10 so as to provide a high vacuum environment to the drying device 100; the term "high degree of vacuum" specifically means a degree of vacuum of more than 1X 10-3Pa。
Further, the vacuum pumping assembly comprises a plurality of suction valves, and the suction valves are arranged at the bottom of the box body 10; the number of the air suction valves can be, but is not limited to, 6 to 8, and the air suction valves are distributed at equal intervals.
In the embodiment of the present application, the valve hole diameter of the suction valve ranges from 10 mm to 100 mm, and preferably from 10 mm to 50 mm.
In the embodiment of the present application, the inside of the box 10 is in a vacuum state, and the size of the box 10 may be, but is not limited to: a length ranging from 1 to 2 meters, a width ranging from 1 to 2 meters, and a height ranging from 0.2 to 0.5 meters. The material inside the box 10 is thick-plated hot-dip galvanized sheet, the main purpose of galvanizing is to protect the base metal from corrosion, and the service life of the device is directly related to the galvanizing thickness.
In the embodiment of the present application, the material of the first cooling plate 201 and the second cooling plate 202 may be, but is not limited to, stainless steel, ceramic material, polymer composite material, and the like.
In the embodiment of the present application, the fluid medium may be cooling water, cooling liquid, cooling gas, and the like, and may be one or a combination of several of them.
Since the material of the fluid medium in the first fluid line is the same as the material of the fluid medium in the second fluid line, and the flow rate of the fluid medium in the first fluid line is smaller than the flow rate of the fluid medium in the second fluid line. In addition, the second cooling plate 202 is closer to the temperature control plate 203 than the first cooling plate 201. Combining the above factors, the cooling rate of the edge region a2 of the temperature control plate 203 can be greater than the cooling rate of the central region a1 of the temperature control plate 203, so that the temperature of the edge region a2 of the temperature control plate 203 is greater than the temperature of the central region a1 of the temperature control plate 203.
Since the evaporation rate of the liquid in the edge area a2 of the temperature control plate 203 is greater than the evaporation rate of the liquid in the central area a1 of the temperature control plate 203 during the drying process of the film layer prepared by ink-jet printing in the display panel 30; meanwhile, the volatilization rates of the liquid at different temperatures are different, and the volatilization rate of the liquid in a high-temperature environment is greater than that of the liquid in a low-temperature environment. Therefore, when the temperature of the edge area a2 of the temperature control plate 203 is lower than the temperature of the central area a1 of the temperature control plate 203, the volatilization rates of the liquid in different areas of the film layer prepared by inkjet printing in the display panel 30 during the drying process are kept consistent, thereby ensuring the film formation uniformity and consistency of the solid film layer after the film layer prepared by inkjet printing in the display panel 30 volatilizes.
Aiming at the technical problem of uneven film thickness of a display device prepared by the current ink jet printing process, the embodiment of the present application provides a drying apparatus 100, the drying apparatus 100 includes a box 10 and a cooling module 20, the cooling module 20 is located in the box 10, the cooling module 20 includes a temperature control plate 203 for carrying the display panel 30, wherein the temperature of a central area a1 of the temperature control plate 203 is higher than the temperature of an edge area a2 of the temperature control plate 203; the drying device 100 adjusts the temperature of the temperature control plate 203 in different areas, which is in contact with the display panel 30, so that the temperature of the central area a1 of the temperature control plate 203 is higher than the temperature of the edge area a2 of the temperature control plate 203, so as to regulate and control the temperature of the edge area a2 and the central area a1 of the solution in the film layer prepared by ink-jet printing in the display panel 30 during the drying process, and further control the air extraction rate, so that the evaporation rate of the solution at each position during the volatilization process is consistent, thereby ensuring the uniformity of the film thickness of the film layer formed by ink-jet printing after volatilization.
Example two
Fig. 5 is a schematic cross-sectional view of a drying apparatus 100 according to a second embodiment of the present application; the structure of the drying apparatus 100 in the second embodiment of the present application is the same as or similar to the structure of the drying apparatus 100 in the first embodiment of the present application, except that the cooling assembly 20 further includes a third cooling plate 206 disposed between the second cooling plate 202 and the temperature control plate 203, and a third fluid pipeline is disposed in the third cooling plate 206, and the fluid medium circulates in the third fluid pipeline.
As shown in fig. 6, a schematic plan area division diagram of a temperature control plate 203 in a drying device 100 according to a second embodiment of the present application is provided; wherein the temperature control plate 203 comprises a central region a1 and an edge region a2 disposed around the central region a1, the edge region a2 comprises a first sub-edge region a21 and a second sub-edge region a22 adjacent to the first sub-edge region a21, the first sub-edge region a21 corresponds to four right-angle regions of the temperature control plate 203, and the second sub-edge region a22 corresponds to four side regions of the temperature control plate 203.
In the embodiment of the present application, the orthographic projection of the first fluid conduit on the temperature control plate 203 is located in the central area a1 of the temperature control plate 203, the orthographic projection of the second fluid conduit on the temperature control plate 203 is located in the second sub-edge area a22 of the temperature control plate 203, and the orthographic projection of the third fluid conduit on the temperature control plate 203 is located in the first sub-edge area a21 of the temperature control plate 203. Wherein the first fluid line, the second fluid line and the third fluid line are independent fluid lines and are not communicated with each other. This ensures that the first fluid line is used only for cooling the central region a1 of the temperature control plate 203, the second fluid line is used only for cooling the second sub-edge region a22 of the temperature control plate 203, and the third fluid line is used only for cooling the first sub-edge region a21 of the temperature control plate 203.
In the embodiment of the present application, the second fluid circuit includes four second fluid branches, an orthographic projection of each of the second fluid branches on the temperature control plate 203 is located in a corresponding one of the side areas, and each of the second fluid branches is communicated with another second fluid branch bypassing the area outside the second cooling plate 202; the design can ensure that the temperature of the 4 right-angle areas corresponding to the first sub-edge area A21 of the temperature control plate 203 is kept consistent.
Wherein each of the second fluid branches is provided with an outer fluid pipeline and an inner fluid pipeline, and the flow direction of the fluid medium in the outer fluid pipeline is opposite to the flow direction of the fluid medium in the inner fluid pipeline.
Further, the third fluid circuit comprises four third fluid branches, an orthographic projection of each third fluid branch on the temperature control plate 203 is located in a corresponding one of the right-angle regions, and each third fluid branch is communicated with another region of the third fluid branch except for the region bypassing the third cooling plate 206. The design can ensure that the temperature of the 4 side edge regions corresponding to the second sub-edge region a22 of the temperature control plate 203 is kept consistent.
Wherein each of the third fluid branches is provided with an outer fluid line and an inner fluid line, respectively, and the flow direction of the fluid medium in the outer fluid line is opposite to the flow direction of the fluid medium in the inner fluid line.
In the embodiment of the present application, the temperature of the central region a1 of the temperature control plate 203 is greater than 20 ℃, the temperature of the second sub-edge region a22 of the temperature control plate 203 ranges from 10 ℃ to 20 ℃, and the temperature of the first sub-edge region a21 of the temperature control plate 203 ranges from 5 ℃ to 10 ℃. Thus, the temperature of the central area A1 of the temperature control plate 203, the first sub-edge area A21 of the temperature control plate 203 and the second sub-edge area A22 of the temperature control plate 203 are designed differently, so that the uniform volatilization rate of the liquid in the ink jet printing layer 302 on the temperature control plate 203 is ensured.
Since the material of the fluid medium in the third fluid line is the same as the material of the fluid medium in the second fluid line, and the flow rate of the fluid medium in the second fluid line is smaller than the flow rate of the fluid medium in the third fluid line. In addition, the third cooling plate 206 is closer to the temperature control plate 203 than the second cooling plate 202. Combining the above factors, the cooling rate of the second sub-edge region a22 of the temperature control plate 203 can be greater than the cooling rate of the first sub-edge region a21 of the temperature control plate 203, so that the temperature of the second sub-edge region a22 of the temperature control plate 203 is greater than the temperature of the first sub-edge region a21 of the temperature control plate 203.
Since the evaporation rate of the liquid in the first sub-edge area a21 of the temperature control plate 203 is greater than the evaporation rate of the liquid in the second sub-edge area a22 of the temperature control plate 203 during the drying process of the film layer prepared by ink-jet printing in the display panel 30; meanwhile, the volatilization rates of the liquid at different temperatures are different, and the volatilization rate of the liquid in a high-temperature environment is greater than that of the liquid in a low-temperature environment. Therefore, when the temperature of the second sub-edge area a22 of the temperature control plate 203 is higher than the temperature of the first sub-edge area a21 of the temperature control plate 203, the volatilization rates of the liquid in different areas of the film layer prepared by inkjet printing in the display panel 30 during the drying process are kept consistent, thereby ensuring the uniformity of the formed film of the solid film layer after the film layer prepared by inkjet printing in the display panel 30 is volatilized.
Aiming at the technical problem of uneven film thickness of a display device prepared by the current ink jet printing process, the embodiment of the present application provides a drying apparatus 100, the drying apparatus 100 includes a box 10 and a cooling module 20, the cooling module 20 is located in the box 10, the cooling module 20 includes a temperature control plate 203 for carrying the display panel 30, wherein the temperature of a central area a1 of the temperature control plate 203 is higher than the temperature of an edge area a2 of the temperature control plate 203; the above-mentioned drying apparatus 100 adjusts the temperature of the temperature control plate 203 in contact with the display panel 30 in different regions, so that the temperature of the central region a1 of the temperature-controlled plate 203 is greater than the temperature of the second sub-edge region a22 of the temperature-controlled plate 203, and the temperature of the second sub-edge area A22 of the temperature control plate 203 is made to be higher than the temperature of the first sub-edge area A21 of the temperature control plate 203, to regulate the temperature of the solution in the edge area a2 and the central area a1 of the film layer prepared by ink-jet printing in the display panel 30 during the drying process, further controlling the air extraction rate to be consistent in the volatilization process, preventing the membrane layer prepared by ink-jet printing in the display panel 30 from generating the coffee ring effect, therefore, the uniformity of the formed film of the solid film layer after the film layer prepared by ink-jet printing in the display panel 30 is volatilized is ensured, and the display effect of the display panel 30 is further improved.
Compared with the first embodiment of the present application, the second embodiment of the present application divides the temperature on the temperature control plate 203 more finely, and can more accurately regulate and control the temperature of the edge area a2 and the central area a1 of the solution in the film layer prepared by inkjet printing in the display panel 30 during the drying process, thereby controlling the air exhaust rate to be consistent during the volatilization process.
As shown in fig. 7, a method for drying a display panel 30 according to an embodiment of the present application, using the drying apparatus 100, includes the following steps:
s10, opening the door of the drying device 100, and placing the drying device into the display panel 30, such that the temperature control plate 203 in the drying device 100 faces to a side close to the display panel 30;
s20, opening the air extraction valve to maintain the low-temperature vacuum state in the box body 10, and performing a drying process;
s30, adjusting the temperature of the temperature control plate 203 in different areas, so that the volatilization rates of the liquid in the film layer prepared by inkjet printing in the display panel 30 corresponding to the different areas of the temperature control plate 203 are the same.
The embodiment of the present application provides a drying apparatus 100; the drying device 100 comprises a box body 10 and a cooling assembly 20, wherein the cooling assembly 20 is positioned in the box body 10, the cooling assembly 20 comprises a temperature control plate 203 for bearing the display panel 30, and the temperature of a central area A1 of the temperature control plate 203 is higher than that of an edge area A2 of the temperature control plate 203; the drying device 100 adjusts the temperatures of the periphery and the center of the solution in the film layer prepared by ink-jet printing in the display panel 30 in the drying process by adjusting the temperatures of the temperature control plate 203 in different areas, which is in contact with the display panel 30, so as to control the air extraction rate, so that the evaporation rates of the solution in various positions in the volatilization process are kept consistent, and the uniformity of the thickness of the film layer formed by ink-jet printing after volatilization is ensured.
The above detailed description is provided for a drying device 100 provided in the embodiments of the present application, and the principles and embodiments of the present application are explained herein by applying specific examples, and the above description of the embodiments is only used to help understanding the method and the core idea of the present application; meanwhile, for those skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.

Claims (10)

1. A drying device applied to a display panel, comprising:
a box body; and
the cooling assembly is positioned in the box body and comprises a temperature control plate for bearing the display panel;
wherein the temperature of the central area of the temperature control plate is higher than the temperature of the edge area of the temperature control plate.
2. The drying apparatus of claim 1, wherein the cooling assembly further comprises a first cooling plate and a second cooling plate disposed on the first cooling plate, the second cooling plate being disposed between the first cooling plate and the temperature control plate;
the first cooling plate is internally provided with a first fluid pipeline, the second cooling plate is internally provided with a second fluid pipeline, and fluid medium circularly flows in the first fluid pipeline and the second fluid pipeline.
3. The drying apparatus according to claim 2, wherein an orthographic projection of the first fluid conduit on the temperature control plate is located in a central region of the temperature control plate, and an orthographic projection of the second fluid conduit on the temperature control plate is located in an edge region of the temperature control plate.
4. Drying apparatus according to claim 2, in which the material of the fluid medium in the first fluid line is the same as the material of the fluid medium in the second fluid line; the flow rate of the fluid medium in the first fluid line is less than the flow rate of the fluid medium in the second fluid line.
5. The drying apparatus of claim 2, wherein the edge region includes a first sub-edge region corresponding to four right-angle regions of the temperature control plate and a second sub-edge region adjacent to the first sub-edge region corresponding to four side-edge regions of the temperature control plate;
wherein the temperature of the second sub-edge region of the temperature control plate is greater than the temperature of the first sub-edge region of the temperature control plate.
6. The drying apparatus of claim 5, wherein the cooling assembly further comprises a third cooling plate disposed between the second cooling plate and the temperature control plate, a third fluid conduit disposed within the third cooling plate, the fluid medium circulating within the third fluid conduit;
the orthographic projection of the second fluid pipeline on the temperature control plate is located in the second sub-edge region of the temperature control plate, and the orthographic projection of the third fluid pipeline on the temperature control plate is located in the first sub-edge region of the temperature control plate.
7. The drying apparatus according to claim 6, wherein said second fluid circuit comprises four second fluid branches, an orthographic projection of each of said second fluid branches on said temperature-controlled plate being located in a corresponding one of said side regions, each of said second fluid branches communicating with another of said second fluid branches; the third fluid pipeline comprises four third fluid branches, the orthographic projection of each third fluid branch on the temperature control plate is positioned in one corresponding right-angle area, and each third fluid branch is communicated with the other third fluid branch.
8. Drying apparatus according to claim 6, wherein the first fluid line, the second fluid line and the third fluid line are each provided with one outer fluid line and one inner fluid line;
wherein the flow direction of the fluid medium in the outer fluid line is opposite to the flow direction of the fluid medium in the inner fluid line.
9. The drying apparatus of claim 6, wherein the temperature of the central region of the temperature-controlled plate is greater than 20 ℃, the temperature of the second sub-edge region of the temperature-controlled plate ranges from 10 ℃ to 20 ℃, and the temperature of the first sub-edge region of the temperature-controlled plate ranges from 5 ℃ to 10 ℃.
10. The drying apparatus of claim 1, further comprising a vacuum evacuation assembly coupled to the cabinet for evacuating gas from the cabinet.
CN202111345665.2A 2021-11-15 2021-11-15 Drying device Active CN114122302B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111345665.2A CN114122302B (en) 2021-11-15 2021-11-15 Drying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111345665.2A CN114122302B (en) 2021-11-15 2021-11-15 Drying device

Publications (2)

Publication Number Publication Date
CN114122302A true CN114122302A (en) 2022-03-01
CN114122302B CN114122302B (en) 2023-01-24

Family

ID=80396127

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111345665.2A Active CN114122302B (en) 2021-11-15 2021-11-15 Drying device

Country Status (1)

Country Link
CN (1) CN114122302B (en)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11329926A (en) * 1998-05-11 1999-11-30 Dainippon Screen Mfg Co Ltd Device and method for cooling substrate
CN107403824A (en) * 2016-12-19 2017-11-28 广东聚华印刷显示技术有限公司 The preparation method of typographical display device
CN108346679A (en) * 2017-08-18 2018-07-31 广东聚华印刷显示技术有限公司 The preparation method of typographical display device
CN109823061A (en) * 2019-03-15 2019-05-31 深圳市华星光电技术有限公司 A kind of inkjet-printing device
CN110116559A (en) * 2019-04-23 2019-08-13 深圳市华星光电半导体显示技术有限公司 Vacuum dryer
CN110228293A (en) * 2019-06-24 2019-09-13 深圳市华星光电技术有限公司 Inkjet-printing device
CN210425778U (en) * 2019-07-25 2020-04-28 苏州星烁纳米科技有限公司 Vacuum drying device
CN213228043U (en) * 2020-07-14 2021-05-18 苏州星烁纳米科技有限公司 Vacuum drying device
CN112848701A (en) * 2021-01-07 2021-05-28 深圳市华星光电半导体显示技术有限公司 Vacuum drying device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11329926A (en) * 1998-05-11 1999-11-30 Dainippon Screen Mfg Co Ltd Device and method for cooling substrate
CN107403824A (en) * 2016-12-19 2017-11-28 广东聚华印刷显示技术有限公司 The preparation method of typographical display device
CN108346679A (en) * 2017-08-18 2018-07-31 广东聚华印刷显示技术有限公司 The preparation method of typographical display device
CN109823061A (en) * 2019-03-15 2019-05-31 深圳市华星光电技术有限公司 A kind of inkjet-printing device
CN110116559A (en) * 2019-04-23 2019-08-13 深圳市华星光电半导体显示技术有限公司 Vacuum dryer
CN110228293A (en) * 2019-06-24 2019-09-13 深圳市华星光电技术有限公司 Inkjet-printing device
CN210425778U (en) * 2019-07-25 2020-04-28 苏州星烁纳米科技有限公司 Vacuum drying device
CN213228043U (en) * 2020-07-14 2021-05-18 苏州星烁纳米科技有限公司 Vacuum drying device
CN112848701A (en) * 2021-01-07 2021-05-28 深圳市华星光电半导体显示技术有限公司 Vacuum drying device

Also Published As

Publication number Publication date
CN114122302B (en) 2023-01-24

Similar Documents

Publication Publication Date Title
KR101321807B1 (en) Deposition head and film forming apparatus
JP4952610B2 (en) Substrate processing apparatus, substrate processing method, and storage medium
KR20080007110A (en) Deposition apparatus
CN108346679B (en) The preparation method of typographical display device
KR20170095371A (en) Material deposition arrangement, a vacuum deposition system and method for depositing material
US11239451B2 (en) Condensing plate, vacuum drying device and vacuum drying method
WO2017173875A1 (en) Linear evaporation source, evaporation source system and vapour deposition device
CN108344254B (en) Vacuum drying device
KR20220123336A (en) Nozzle for a distribution assembly of a material deposition source arrangement, material deposition source arrangement, vacuum deposition system and method for depositing material
US20170104186A1 (en) Evaporation Mask and Evaporation Device
KR20160112293A (en) Evaporation source and Deposition apparatus including the same
WO2016101397A1 (en) Crucible capable of preventing evaporation material from splashing and plugging holes
WO2020215512A1 (en) Vacuum drying device
KR20140090488A (en) Apparatus for Coating Graphene Film Using Cold Spray
JP2008261048A (en) Evaporation tube and evaporation apparatus with adapted evaporation characteristic
JP6069979B2 (en) Can roll with gas release mechanism, long substrate processing apparatus equipped with the same, and long substrate processing method using the same
CN114122302B (en) Drying device
KR20180133007A (en) Heat treatment apparatus and method of manufacturing film using the same
WO2019076553A1 (en) Method and apparatus for treating a substrate
KR102270549B1 (en) Placement apparatus and processing apparatus
CN106893988A (en) A kind of gas-distributing system for vacuum coating
CN113463034B (en) Evaporation device and evaporation method
US20130068160A1 (en) Evaporation device and evaporation apparatus
CN112838180A (en) Vacuum drying device
TWI607103B (en) Deposition source and deposition apparatus having the same

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant