CN108346679B - The preparation method of typographical display device - Google Patents
The preparation method of typographical display device Download PDFInfo
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- CN108346679B CN108346679B CN201710710279.6A CN201710710279A CN108346679B CN 108346679 B CN108346679 B CN 108346679B CN 201710710279 A CN201710710279 A CN 201710710279A CN 108346679 B CN108346679 B CN 108346679B
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Abstract
The present invention discloses a kind of preparation method of typographical display device: in depositing first electrode layer on substrate；In preparation pixel defining layer in the first electrode layer and form Bank structure and pixel hole；The inkjet printing functional layer ink in the pixel is cheated, in the second solvent of the Bank structure top surface inkjet printing, second solvent is evaporated in sealing container, steam treatment is carried out to the functional layer ink with the steam of the second solvent of gained, the functional layer ink includes functional layer material and the first solvent；Device after steam treatment is placed in room temperature condition, is spontaneously dried under air environment or nitrogen environment；Then it is heat-treated again, forms functional layer；In depositing electron transfer layer and the second electrode lay in the functional layer, up to the typographical display device after encapsulation.The present invention improves the uniformity of film and the wellability of functional ink and pixel defining layer, ensure that ink is uniformly sprawled to play the effect of inhibiting leakage current to generate, simple and easy, and manufacture difficulty and cost of manufacture can be greatly lowered.
Description
Technical field
The present invention relates to display preparation technical field more particularly to a kind of preparation methods of typographical display device.
Background technique
Solution processing technology due to do not need expensive vacuum equipment, it can be achieved that OLED and QLED display low price,
Large area, scale, it is efficient production and have good development prospect.Wherein, inkjet printing technology passes through function is black
Water is selectively deposited in respective pixel, and the colorization of display screen is not only realized in the case where no exposure mask, but also is mentioned significantly
The high utilization rate of material, it is considered to be can most push large area flexible full color display industrialization is patterned to membrane technology.
But inkjet printing film needs one and removes solvent seasoning film forming procedure, and this process determines film quality.Under normal conditions,
Droplet drying process usually can be with the generation of " coffee ring phenomenon ", i.e., solvent volatilizees at drop edge contact line in drying process
Fast speed and form capillary flow from inside to outside, thus solute take at contact line precipitate and formed around film in thickness
Between thin phenomenon, as shown in Figure 1.Meanwhile when inkjet printing display, actual conditions such as Fig. 2 institute of solution evaporation above substrate
Show, the solvent strength at substrate center is greater than edge, and it is easier to volatilize close to edge solvent, and ink drying rate is fast；Base
Solvent volatilization is relatively difficult at plate center, and ink drying rate is slow, and solute in ink curing processes is caused to cause not to edge movement
With film morphology difference in area pixel.For photoelectric display device, the inhomogeneities of function film can not only reduce aobvious
Show device uniformity of luminance, and its service life can be seriously affected.Therefore, regulate and control the drying process of ink to improve the equal of printing thin film
The display that even property processes solution is particularly critical.
During practical inkjet printing prepares display, drop is to deposit drying and forming-film in pixel hole.Usually
In order to avoid the fusion of ink between the splashing and neighbor pixel of drop, pixel defining layer top half needs are in drop
Show lyophoby property to guarantee print resolution；In order to guarantee drop uniformly sprawling in pixel, needing will be under pixel defining layer
Half part carries out hydrophilic treated, improves wellability of the drop in pixel, reduces the leakage current of device.But it is this that there is subregion
The realization of the pixel defining layer of hydrophobe characteristic is generally required to carry out multiple material repeated multiple times contraposition, exposure, development and be carved
Etching technique, it is big to manufacture difficulty, complex process, and preparation cost is high.Meanwhile to the hydrophilic place of pixel defining layer bottom
Contact line aggravates the formation of " coffee ring " in the pinning effect at pixel defining layer edge during reason also will increase droplet drying,
The uniformity of film is difficult to be guaranteed in pixel.And in order to solve the uniform sex differernce of pixel in different zones in large area,
Often the solvent atmosphere at edge and center is balanced by increasing the test print area on effective light emitting region periphery.Although picture can be improved
Plain uniformity still increases the width that broadens of display screen, it is difficult to realize narrow frame demand.These problems limit to a certain extent
The Industrialization Progress that inkjet printing prepares display is made.Therefore, the prior art has much room for improvement and develops.
Summary of the invention
Based on this, it is necessary to which complicated, at high cost for film-forming process in the prior art, film uniformity, which is difficult to ensure, etc. asks
Topic, primary and foremost purpose of the invention are to provide that a kind of simple and easy, functional ink is good at film uniformity, it is aobvious to reduce the printing of leakage current
Show the preparation method of device.
The purpose of the present invention is what is be achieved through the following technical solutions:
The purpose of the present invention is to provide a kind of preparation methods of typographical display device, include the following steps:
S1, in depositing first electrode layer on substrate；
Pixel defining layer is prepared in S2, Yu Suoshu first electrode layer and forms Bank structure and pixel hole；
S3, Yu Suoshu pixel cheat in inkjet printing functional layer ink, the top surface inkjet printing of Yu Suoshu Bank structure the
Two solvents evaporate second solvent in sealing container, are carried out with the steam of the second solvent of gained to the functional layer ink
Steam treatment, the functional layer ink include functional layer material and the first solvent；
Device after steam treatment is placed in room temperature condition, is spontaneously dried under air environment or nitrogen environment；
Then it is heat-treated again, forms functional layer；
Electron transfer layer and the second electrode lay are deposited in S4, Yu Suoshu functional layer, up to the typographical display after encapsulation
Device.
In wherein some embodiments, the boiling point of first solvent is not less than 200 DEG C.
In wherein some embodiments, the boiling point of second solvent is not higher than 100 DEG C.
In wherein some embodiments, the surface tension of first solvent is greater than the surface tension of second solvent.
In wherein some embodiments, in the steam treatment, the steam of second solvent above functional layer ink
With a thickness of 1-3cm.
In wherein some embodiments, the air environment includes: that air humidity is 50-60%, and pressure is normal atmosphere
Pressure 106Pa；The nitrogen environment includes: that water, oxygen content are respectively less than 1ppm, nitrogen pressure 200-500Pa.
In wherein some embodiments, the functional material in the ink includes hole-injecting material, hole mobile material
Or luminescent material；The typographical display device is OLED or QLED.
In wherein some embodiments, the temperature of the heat treatment is greater than the boiling point of first solvent.
Another object of the present invention is to provide a kind of typographical display devices, are manufactured using above-mentioned preparation method.
Another object of the present invention is to provide a kind of e-machines, are equipped with above-mentioned typographical display device.
Compared with prior art, the present invention have it is following the utility model has the advantages that
The present invention printing function layer ink that ink-jet contains the first solvent in pixel is cheated, sprays in the top surface of Bank structure
Ink the second solvent of printing, the second solvent is evaporated in sealing container, is carried out with the steam of the second solvent of gained to functional layer ink
Steam treatment is volatilized by Bank structure the second solvent of top surface, is reduced on the ink in display base plate different zones pixel hole
Square solvent strength difference ensure that identical film morphology in different zones pixel bank.In addition, the top surface of Bank structure
The diffusion of low boiling point solvent functional ink into pixel hole, slows down the pinning of functional ink contact line on pixel defining layer inner wall
And the kalimeris brother Buddhist nun stream of ecto-entad is formed inside ink, it is suppressed that the formation of " coffee ring " in drying process improves picture
Element defines the uniformity of layer function film.Meanwhile the second steam of diffusion reduces the surface of functional ink at pixel edge
Power improves ink sprawling in pixel under the premise of not needing and carrying out lyophily processing to pixel defining layer lower half portion
Property, the leakage current of device is effectively reduced.
Further, there is also preferred embodiments by the present invention:
The application further defines the boiling point of the first solvent not less than 200 DEG C, and the boiling point of the second solvent is not higher than 100
℃；The boiling point of first solvent can guarantee the stability of ink jet printing process not less than 200 DEG C, and it is made to have lower volatilization
Rate ensure that abundant diffusion of second solvent to functional ink in steam drying process, adjust function ink to a certain extent
Water physics and play the role of improve at film uniformity；The boiling point of second solvent has it faster not higher than 100 DEG C
Rate of volatilization can guarantee that starting the second solvent vapo(u)r of dry preceding formation in functional ink shrouds functional ink in pixel hole, and
Realize the diffusion to functional ink；
The application can greatly reduce above ink also to the steam of the second solvent above ink with a thickness of 1-3cm
Steam difference guarantees into film uniformity.
Detailed description of the invention
Fig. 1 is the Principle of Process schematic diagram of " coffee ring " phenomenon；
Fig. 2 is to print solvent volatilization schematic diagram above metacoxal plate in the prior art；
Fig. 3 is based on typographical display device preparation method flow chart in the embodiment of the present invention；
Fig. 4 is the functional ink containing the first solvent and the second solvent ink-jet distribution schematic diagram in the embodiment of the present invention；
Fig. 5 is that functional ink is dropped in the schematic cross-section in the pixel hole of pixel defining layer in the embodiment of the present invention；
Fig. 6 is that the functional ink containing the first solvent carries out steam in the second solvent vapo(u)r atmosphere in the embodiment of the present invention
Processing and ink flow to schematic diagram；Wherein straight arrows represent the flow direction of the first solvent, and bending line arrow represents the second solvent
Flow direction；
Fig. 7 is that solute flows in ink natural drying process in pixel after steam treatment under ink dried mode of the present invention
Schematic diagram；
Fig. 8 forms the pattern schematic diagram of functional layer after being completely dried for functional ink in the embodiment of the present invention；
Fig. 9 is the display screen device structural schematic diagram prepared in the embodiment of the present invention；
Description of symbols: 1 it is TFT backplate (lining), 2 is ito anode (first electrode layer), 3 is pixel defining layer
(Bank), 4 it is functional ink, 5 be the second solvent, 6 be closed container, 7 be the second solvent vapo(u)r, 8 is hole injection layer/hole
Transport layer (HIL/HTL), 9 be luminescent layer (EML), 10 be electron transfer layer, 11 be cathode (second electrode), 12 be encapsulated layer.
Specific embodiment
Ink film build method of the invention and Organnic electroluminescent device production method are made below in conjunction with specific embodiment
Further details of explanation.
Embodiment
Fig. 3 is referred to, a kind of preparation method of typographical display device of the present embodiment includes the following steps:
S1, in depositing first electrode layer on substrate；
Pixel defining layer is prepared in S2, Yu Suoshu first electrode layer and forms Bank structure and pixel hole；The present embodiment
Pixel defining layer has lyophoby characteristic, and the structure for not needing pixel defining layer carries out hydrophilic treated and ensures that film forming in pixel
Uniformity；
S3, Yu Suoshu pixel cheat interior inkjet printing functional layer ink, Yu Suoshu Bank structure top surface inkjet printing second
Solvent evaporates second solvent in sealing container, is steamed with the steam of the second solvent of gained to the functional layer ink
Vapour processing, the functional layer ink includes functional layer material and the first solvent；
Device after steam treatment is placed in room temperature condition, is spontaneously dried under air environment or nitrogen environment；
Then it is heat-treated again, forms functional layer, the temperature of heat treatment should be higher than that the boiling point of the first solvent, by gained
The removal of remaining solvent is clean in film；
Electron transfer layer and the second electrode lay are deposited in S4, Yu Suoshu functional layer, up to the typographical display after encapsulation
Device.
In some embodiments, the boiling point of first solvent is not less than 200 DEG C.
In some embodiments, the boiling point of second solvent is not higher than 100 DEG C.
In some embodiments, the surface tension of first solvent is greater than the surface tension of second solvent.At this
In the embodiment of invention, the surface tension transition of functional layer ink is in 25-40mN/m, in the surface tension range described in satisfaction
Effect of the invention can be realized in the surface tension that the surface tension of first solvent is greater than the second table solvent.
In some embodiments, in the steam treatment, the thickness of the steam of second solvent above functional layer ink
Degree is 1-3cm.The time of steam treatment generally increases with the increase of the first solvent boiling point, in embodiments of the present invention, first
When the boiling point of solvent is not less than 200 DEG C, the time of steam treatment is generally no less than 30min.
In some embodiments, it is 50-60% that the air environment, which includes: air humidity, and pressure is standard atmospheric pressure
106Pa；The nitrogen environment includes: that water, oxygen content are respectively less than 1ppm, nitrogen pressure 200-500Pa.
In some embodiments, the functional material in the ink includes hole-injecting material, hole mobile material or hair
Luminescent material；The typographical display device is OLED or QLED.
In some embodiments, the temperature of the heat treatment is greater than the boiling point of first solvent.
Another object of the present invention is to provide a kind of typographical display devices, are manufactured using above-mentioned preparation method.
Another object of the present invention is to provide a kind of e-machines, are equipped with above-mentioned typographical display device.
In order to enable above-described embodiment content in further detail, specifically, be easy to understand, now to the preparation side of typographical display device
Method is exemplified below:
S1, in substrate (TFT backplate) deposit first electrode layer (ito anode)；
Pixel defining layer is prepared in S2, Yu Suoshu first electrode layer and forms Bank structure and pixel hole；
S3, control first spray head functional ink (such as Fig. 4, Fig. 5 institute that inkjet printing contains the first solvent in pixel is cheated
Show)；Second spray head is controlled in the second solvent of top surface inkjet printing of Bank structure (shown in such as Fig. 4, Fig. 5)；In closed standing
Under the conditions of evaporate Bank structure top surface the second solvent and with its steam to pixel cheat in functional ink carry out at steam
It manages (as shown in Figure 6)；
The sufficient device of steam treatment is placed in and is spontaneously dried under room temperature, film (as shown in Figure 7) is obtained；
It is heat-treated the film spontaneously dried, its is made fully crosslinked to be formed by curing functional layer (as shown in Figure 8, Figure 9).
Electron transfer layer and the second electrode lay are deposited in S4, Yu Suoshu functional layer, up to the typographical display after encapsulation
Device (as shown in Figure 8, Figure 9).
In step S3, in order to guarantee the stability of ink jet printing process, the first solvent is required to have in the implementation case
Boiling point not less than 200 DEG C.The rate of volatilization of first solvent also ensures abundant expansion of second solvent to ink in drying process
It dissipates, adjusts functional ink physics to a certain extent and play the role of improving into film uniformity.
In step S3, the second solvent is the good solvent of functional material contained by functional ink to be dried first, such second
It not will cause the precipitation of solute in solvent vapo(u)r diffusion process and accelerate the pinning of contact line；Secondly second solvent need have compared with
Low boiling point requires the second solvent to have the boiling point not higher than 100 DEG C in the implementation case, and further, described second is molten
The surface tension of agent has to be lower than the surface tension of the first solvent of functional ink, and the second solvent is to functional ink in the drying process
Diffusion is easy to form the surface tension of ecto-entad inside functional ink, is conducive to the uniform deposition of functional material.
In step S3, the substrate with pixel defining layer after the completion of the inkjet printing need to be placed in quiet in sealing device
It sets, it is desirable that sealing device length and width are identical as substrate size, highly within the scope of 1-3cm.In this way, low-boiling second solvent is quick
Volatilization, so that being full of the steam of the second solvent in closed container.In the steam atmosphere of the second solvent, pixel cheats interior functional ink
Top the second solvent atmosphere difference greatly reduces, and ensure that the uniformity that film is formed in not same district pixel bank；Continue to stand
Functional ink diffusion of second solvent vapo(u)r into pixel bank, changes the functional ink property in pixel bank.In order to ensure
Second solvent higher diffusion concentration in functional ink, time of general steam treatment increase with the boiling point of the first solvent and
Increase, in the implementation case, the complete device of inkjet printing is being placed in the first stage stood in obturator, due to Bank
The low volatilization of the second solvent boiling point of structure top surface quickly, forms the steam atmosphere of the second solvent in sealing device.So that entire
Device pixel region has roughly the same gas concentration, and the solvent evaporation rate in entire device pixel hole is roughly the same, from
And it is uneven to avoid the pixel as caused by solvent atmosphere is different above device.Continue to stand, the of Bank structure top surface
Two solvent vapo(u)rs start the functional ink diffusion into pixel hole, start steam treatment effect.As shown in fig. 6, ink is hydrophobic
Functional ink liquid level convex in pixel hole, the functional ink edge curvature radius r at pixel edge are greater than pixel center
Place.According to Kelvin equationThe vapour pressure of functional ink at pixel edge is bigger, i.e. functional ink
First solvent rate of volatilization at the pixel edge is greater than the solvent rate of volatilization at pixel center, and the in surrounding solvent atmosphere
Diffusion from two solvent vapo(u)rs to functional ink to be dried when diffusion rate at pixel edge be faster than at pixel center.In this way,
With the volatilization and diffusion of second solvent to functional ink of the first solvent, in functional ink to be dried the concentration of first solvent by
Decrescence small, the concentration of the second solvent increases, since pixel edge and solvent volatilization at center are different with the rate that steam is spread,
The concentration of the second solvent is greater than at pixel center at pixel edge, and the concentration of the second solvent is less than at center.Due to second molten
For the surface tension of agent less than the first solvent, the surface tension that pixel cheats functional ink liquid level at interior center is higher than edge, exists
Surface tension gradient, so that generating the kalimeris brother Buddhist nun flowed from from pixel edge to center flows (Marangoni flow), with function
Capillary flow in energy ink volatilization process forms a reflux, inhibits to slow down solute in the deposition of pixel edge
The formation of " coffee ring ".Meanwhile in steam treatment process, with the volatilization of the first solvent, the diffusion of the second solvent is to be dried
The surface of functional ink can gradually decrease, and improve the wellability of functional ink Yu pixel bank, assurance function ink is entire
Uniformly sprawling with pixel bank inner wall there is no gap in pixel, effectively inhibits the generation of leakage current.
In step S3, the substrate after steam treatment in closed container is placed in natural drying at room temperature under air or nitrogen.
Usual hole-injecting material ink need to be placed in air at room temperature natural drying, and hole mobile material, luminescent material etc. need to be placed in
Natural drying at room temperature under nitrogen environment.In order to guarantee the uniformity of solvent volatilization in spontaneously drying, need dry environment
Temperature, humidity, air pressure keep stablizing.In the implementation case, drying temperature is 25 DEG C: air humidity 50-60%, pressure are
Standard atmospheric pressure 106Pa。
In step S3, natural drying gained film is placed in heating plate and is heat-treated.Wherein, the temperature of heat treatment needs
Higher than the boiling point for selecting the first solvent, it is ensured that remove completely solvent remaining in film, obtain fully crosslinked cured film.
Step S1-S5 is repeated, inkjet printing prepares hole injection layer (HIL) and/or hole transmission layer in pixel is cheated
(HTL) 8, luminescent layer (EML) 9 (such as Fig. 8), finally carry out the step S6, successively steam on the organic function layer of inkjet printing
Electron transfer layer 10 and cathode 11 are plated, OLED device is formed and is packaged (encapsulated layer is 12 in Fig. 9), the system of display screen is completed
Standby (such as Fig. 9).
In this embodiment scheme, ink jet printing device includes first spray head and second spray head, by first spray head in picture
Element cheats the functional ink that interior inkjet printing contains the first solvent, and low in Bank structure top surface inkjet printing by second spray head
Second solvent of boiling point low-surface-energy.In the drying process, the volatilization of the second solvent of low boiling point is very fast, on the one hand can balance pixel circle
The edge as caused by function ink solvent volatilization in pixel hole and the solvent atmosphere difference at center, improve plain boundary above given layer
The uniformity of given layer different zones film forming；On the other hand, the second solvent meeting of Bank structure top surface low boiling point low surface tension
Ink diffusion into pixel hole, the steam diffusion rate of ink droplet edge is greater than drop centers, to be formed on ink droplet surface
Surface tension is poor, forms the kalimeris brother Buddhist nun stream from edge to center, effectively inhibits the formation of " coffee ring " in pixel；Meanwhile with
The diffusion of solvent vapo(u)r, the surface tension of functional ink ink droplet reduce, the infiltration of functional ink and pixel hole bottom can be improved
Property, so that homogeneous film formation of the functional ink in entire pixel region, effectively inhibits the generation of leakage current.The method of the present invention operation letter
It is single easy, under the premise of not needing optimization pixel defining layer and ink set, without increasing in the effective light emitting region of display screen
Add an examination of print zone, by dry environment control come improve in entire device pixel at film uniformity, effectively raise
The performance of display, while realizing the preparation of narrow frame display.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to protection of the invention
Range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.
Claims (10)
1. a kind of preparation method of typographical display device, which comprises the steps of:
S1, in depositing first electrode layer on substrate；
Pixel defining layer is prepared in S2, Yu Suoshu first electrode layer and forms Bank structure and pixel hole；
S3, Yu Suoshu pixel cheat interior inkjet printing functional layer ink, and the top surface inkjet printing second of Yu Suoshu Bank structure is molten
Second solvent is evaporated in agent in sealing container, carries out steam to the functional layer ink with the steam of the second solvent of gained
Processing, the functional layer ink includes functional layer material and the first solvent；
Device after steam treatment is placed in room temperature condition, is spontaneously dried under air environment or nitrogen environment；
Then it is heat-treated again, forms functional layer；
The boiling point of second solvent is lower than first solvent boiling point；
Electron transfer layer and the second electrode lay are deposited in S4, Yu Suoshu functional layer, up to the typographical display device after encapsulation.
2. the preparation method of typographical display device according to claim 1, which is characterized in that the boiling point of first solvent
Not less than 200 DEG C.
3. the preparation method of typographical display device according to claim 1, which is characterized in that the boiling point of second solvent
Not higher than 100 DEG C.
4. the preparation method of typographical display device according to claim 1, which is characterized in that the surface of first solvent
Tension is greater than the surface tension of second solvent.
5. the preparation method of typographical display device according to claim 1, which is characterized in that in the steam treatment, function
The steam of second solvent above ergosphere ink with a thickness of 1-3cm.
6. the preparation method of typographical display device according to any one of claims 1 to 5, which is characterized in that the air
Environment includes: that air humidity is 50-60%, and pressure is standard atmospheric pressure 106Pa；The nitrogen environment includes: water, oxygen content
Respectively less than 1ppm, nitrogen pressure 200-500Pa.
7. the preparation method of typographical display device according to any one of claims 1 to 5, which is characterized in that the ink
In functional material include hole-injecting material, hole mobile material or luminescent material；The typographical display device be OLED or
QLED。
8. the preparation method of typographical display device according to any one of claims 1 to 5, which is characterized in that at the heat
The temperature of reason is greater than the boiling point of first solvent.
9. a kind of typographical display device, which is characterized in that manufactured using the described in any item preparation methods of claim 1 to 8.
10. a kind of e-machine, which is characterized in that be equipped with typographical display device as claimed in claim 9.
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| CN110429103A (en) * | 2018-09-20 | 2019-11-08 | 广东聚华印刷显示技术有限公司 | Dot structure and display device |
| CN111384307B (en) * | 2018-12-29 | 2021-04-09 | Tcl科技集团股份有限公司 | Preparation method of quantum dot light-emitting diode |
| CN112319081A (en) * | 2019-12-12 | 2021-02-05 | 广东聚华印刷显示技术有限公司 | Ink jet printing method, ink jet printing apparatus, and light emitting device |
| CN111063816A (en) * | 2019-12-19 | 2020-04-24 | 深圳市华星光电半导体显示技术有限公司 | Organic light-emitting diode, preparation method and display device |
| CN111137013B (en) * | 2020-01-09 | 2020-12-25 | 深圳市华星光电半导体显示技术有限公司 | Inkjet printing method, inkjet printing apparatus, inkjet printing device, and computer-readable storage medium |
| CN111916560B (en) * | 2020-07-29 | 2023-06-06 | 广东聚华印刷显示技术有限公司 | Film preparation method and device |
| CN113823667B (en) * | 2021-09-15 | 2023-10-27 | 纳晶科技股份有限公司 | Display device manufacturing method |
| CN114122302B (en) * | 2021-11-15 | 2023-01-24 | 深圳市华星光电半导体显示技术有限公司 | Drying device |
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