CN112319081A - Ink jet printing method, ink jet printing apparatus, and light emitting device - Google Patents
Ink jet printing method, ink jet printing apparatus, and light emitting device Download PDFInfo
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- CN112319081A CN112319081A CN201911273236.1A CN201911273236A CN112319081A CN 112319081 A CN112319081 A CN 112319081A CN 201911273236 A CN201911273236 A CN 201911273236A CN 112319081 A CN112319081 A CN 112319081A
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- 238000007641 inkjet printing Methods 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 81
- 239000002904 solvent Substances 0.000 claims abstract description 78
- 239000002346 layers by function Substances 0.000 claims abstract description 68
- 238000007639 printing Methods 0.000 claims abstract description 45
- 239000010410 layer Substances 0.000 claims abstract description 35
- 238000009210 therapy by ultrasound Methods 0.000 claims abstract description 9
- 230000007246 mechanism Effects 0.000 claims description 43
- 238000002604 ultrasonography Methods 0.000 claims description 10
- 230000001276 controlling effect Effects 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 239000000976 ink Substances 0.000 claims 22
- 230000008569 process Effects 0.000 abstract description 13
- 230000000694 effects Effects 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000005525 hole transport Effects 0.000 description 9
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000007723 transport mechanism Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/0041—Digital printing on surfaces other than ordinary paper
- B41M5/0047—Digital printing on surfaces other than ordinary paper by ink-jet printing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
- B01F31/80—Mixing by means of high-frequency vibrations above one kHz, e.g. ultrasonic vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/44—Typewriters or selective printing mechanisms having dual functions or combined with, or coupled to, apparatus performing other functions
- B41J3/445—Printers integrated in other types of apparatus, e.g. printers integrated in cameras
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The invention relates to an ink-jet printing method, an ink-jet printing device and a light-emitting device, wherein the ink-jet printing method comprises the following steps: providing a substrate with pixel pits; printing an ink solvent in pixel pits of the substrate; printing functional layer ink in pixel pits of the substrate; and carrying out ultrasonic treatment on the ink solvent and the functional layer ink on the substrate so as to uniformly mix the ink solvent and the functional layer ink. The ink-jet printing method can effectively solve the deweting problem in the ink-jet printing process, and after the substrate is dried to enable the printed functional layer ink to be dried and formed into a film, the thickness and the appearance of the film layer are intact, so that the inconsistency of the display effect between pixels is avoided. Meanwhile, the possibility of leakage current is reduced, and the production yield is improved.
Description
Technical Field
The present invention relates to the field of display technologies, and in particular, to an inkjet printing method, an inkjet printing apparatus, and a light emitting device.
Background
The Organic Light Emitting Diode (OLED) display screen is produced by using an inkjet printing technology, the material utilization rate can reach 90%, and the OLED display screen is lower than an OLED panel prepared by using an evaporation method in the aspect of equipment and consumable cost control, and is a research hotspot of the current OLED panel production process. However, the current ink-jet printing technology still has some problems to be solved.
Dewetting (dewetting or dewetting) is one of the processes that occur at solid-liquid, solid-solid, or liquid-liquid interfaces in fluid mechanics. Generally, dewetting describes a process in which a liquid is forced to cover from a non-wettable surface. The reverse process, i.e. spreading of the liquid over the substrate, is called wetting. In a general inkjet printing method, deweting is very easy to occur, so that a pixel pit cannot be completely filled with printed functional layer ink in a pixel pit, and after the printed functional layer ink is dried and formed into a film, the thickness of the film layer is inconsistent, the appearance is uneven, so that the display effect between pixels is inconsistent, leakage current is seriously generated even, and finally a light-emitting device is burnt.
Disclosure of Invention
In view of the above, there is a need for an inkjet printing method capable of improving the thickness uniformity and the morphology flatness of a functional film layer.
A method of inkjet printing comprising the steps of:
providing a substrate with pixel pits;
printing an ink solvent in pixel pits of the substrate;
printing functional layer ink in pixel pits of the substrate;
and carrying out ultrasonic treatment on the ink solvent and the functional layer ink on the substrate so as to uniformly mix the ink solvent and the functional layer ink.
In one embodiment, the volume of ink solvent printed is at least one layer of pixel pits capable of tiling, and the ink solvent is at least one of the solvents of the functional layer ink.
In one embodiment, the volume of the ink solvent printed in each pixel pit is controlled to be 10pL to 100 pL.
In one embodiment, the temperature of the substrate is controlled to be in the range of 4 ℃ to 30 ℃ during printing.
In one embodiment, the temperature of the substrate is controlled to be in the range of 4 ℃ to 10 ℃ during printing.
In one embodiment, the frequency of the ultrasonic wave is 20 KHz-0.8 MHz, and the power of the ultrasonic wave is 0.1W/cm 2-10W/cm 2.
In one embodiment, in the ultrasonic process, an ultrasonic mechanism used for the ultrasonic is positioned above the substrate, and the distance between the ultrasonic mechanism and the substrate is 0 cm-20 cm.
The present invention also provides an inkjet printing apparatus comprising:
the objective table is used for bearing the substrate;
the temperature control mechanism is used for regulating and controlling the temperature of the substrate;
a solvent printing mechanism for printing an ink solvent in pixel pits of the substrate;
an ink printing mechanism for printing functional layer ink in the pixel pits of the substrate; and
and the ultrasonic mechanism is used for carrying out ultrasonic treatment on the ink solvent and the functional layer ink on the substrate.
In one embodiment, the volume of the printed ink solvent can be at least one layer of pixel pits, the ink solvent is at least one of solvents of the functional layer ink, the solvent printing mechanism is provided with a plurality of solvent accommodating cavities for accommodating different types of ink solvents, and the ink printing mechanism is provided with a plurality of ink accommodating cavities for accommodating different types of functional layer ink.
The invention also provides a light-emitting device which comprises a functional layer, wherein the functional layer is prepared by adopting the ink-jet printing method or the ink-jet printing device.
According to the ink-jet printing method, before the functional layer ink is printed, the ink solvent is printed in the pixel pits of the substrate, the ink solvent is made to be spread on one layer of the pixel pits, then the functional layer ink is printed in the pixel pits of the substrate, and the substrate is subjected to ultrasonic treatment, so that the printed functional layer ink and the printed ink solvent are fully mixed and are fully spread in the pixel pits. Because the viscosity and the spreadability of the solvent are superior to those of the ink, the solvent with a certain volume can be better spread in the pixel pits after being printed, the functional layer ink is printed, and the solvent and the functional layer ink are uniformly mixed under the action of ultrasound, so that the dewetting problem in the ink-jet printing process can be effectively solved. After the substrate is dried to enable the printed functional layer ink to be dried and formed into a film, the thickness and the appearance of the film layer are intact, and the inconsistency of display effects among pixels is avoided. Meanwhile, the possibility of leakage current is reduced, and the production yield is improved. Moreover, since the ink solvent is printed and removed in the subsequent drying process, the thickness of the film formed by the ink of the functional layer is not affected.
Drawings
FIG. 1 is a schematic flow chart of an inkjet printing method according to an embodiment;
FIG. 2 is a schematic structural diagram of an inkjet printing apparatus according to an embodiment;
FIG. 3 is a diagram showing how ink spreads in pixel pits of a substrate after printing functional layer ink in example 1;
fig. 4 is a graph showing spreading of ink in pixel pits of the substrate after printing of the functional layer ink in comparative example 1.
Detailed Description
In order that the invention may be more fully understood, a more particular description of the invention will now be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
As shown in fig. 1, the inkjet printing method according to an embodiment of the present invention includes the following steps S1 to S4.
And S1, providing the substrate with the pixel pits.
And S2, printing the ink solvent in the pixel pits of the substrate.
And S3, printing the functional layer ink in the pixel pits of the substrate.
And S4, performing ultrasonic treatment on the ink solvent and the functional layer ink on the substrate to uniformly mix the ink solvent and the functional layer ink.
According to the ink-jet printing method, before the functional layer ink is printed, the ink solvent is printed in the pixel pits of the substrate, the ink solvent is made to be spread on one layer of the pixel pits, then the functional layer ink is printed in the pixel pits of the substrate, and the substrate is subjected to ultrasonic treatment, so that the printed functional layer ink and the printed ink solvent are fully mixed and are fully spread in the pixel pits. Because the viscosity and the spreadability of the solvent are superior to those of the ink, the solvent with a certain volume can be better spread in the pixel pits after being printed, the functional layer ink is printed, and the solvent and the functional layer ink are uniformly mixed under the action of ultrasound, so that the dewetting problem in the ink-jet printing process can be effectively solved. After the substrate is dried to enable the printed functional layer ink to be dried and formed into a film, the thickness and the appearance of the film layer are intact, and the inconsistency of display effects among pixels is avoided. Meanwhile, the possibility of leakage current is reduced, and the production yield is improved. Moreover, since the ink solvent is printed and removed in the subsequent drying process, the thickness of the film formed by the ink of the functional layer is not affected.
In one particular example, the volume of ink solvent printed is capable of tiling at least one layer of pixel wells, and the ink solvent is at least one of the solvents of the functional layer ink. It is to be understood that the functional layer ink may be an anode ink, a cathode ink, an electron transport layer ink, an electron injection layer ink, a hole blocking layer ink, a hole transport layer ink, a hole injection layer ink, an electron blocking layer ink, and the like, without being limited thereto. Preferably, the ink solvent is identical to the solvent in the corresponding functional layer ink.
In one specific example, the volume of ink solvent printed in each pixel pit is controlled to be 10pL to 100 pL. It is understood that the printing volume of the ink solvent is not limited thereto, and may be within a range that the pixel pits can accommodate without affecting the thickness of the functional film layer.
In one specific example, the temperature of the substrate during printing is controlled to be in the range of 4 ℃ to 30 ℃. Thus, the temperature of the substrate is controlled in a lower range, so that volatilization of the ink solvent in the pixel pit can be reduced. Preferably, the temperature of the substrate is controlled within a range of 4 to 10 ℃, so that the volatilization of the ink solvent can be more effectively reduced.
In a specific example, the frequency of the ultrasound is 20 KHz-0.8 MHz, and the power of the ultrasound is 0.1W/cm2～10W/cm2The ink solvent and the functional layer ink can be well mixed.
In a specific example, in the process of ultrasound, an ultrasonic mechanism used for ultrasound is positioned above the substrate, and the distance between the ultrasonic mechanism and the substrate is 0 cm-20 cm.
As shown in fig. 2, an inkjet printing apparatus 100 according to an embodiment of the present invention includes a stage 10, a temperature control mechanism 20, a solvent printing mechanism 30, an ink printing mechanism 40, and an ultrasonic mechanism 50. The object stage 10 is used for bearing a substrate 200 to be printed, the temperature control mechanism 20 is used for regulating and controlling the temperature of the substrate 200, the solvent printing mechanism 30 is used for printing an ink solvent in a pixel pit of the substrate 200, the ink printing mechanism 40 is used for printing a functional layer ink in the pixel pit of the substrate 200, and the ultrasonic mechanism 50 is used for performing ultrasonic treatment on the ink solvent and the functional layer ink on the substrate 200.
In use, the inkjet printing apparatus 100 of the present invention first places the substrate 200 on the stage 10, and then controls the temperature of the substrate 200 to a low range by the temperature control mechanism 20 while printing the aqueous ink in the pixel pits of the substrate 200 by the solvent printing mechanism 30. The functional layer ink is then printed in the pixel wells of the substrate 200 by the ink printing mechanism 40, and the substrate 200 is subjected to ultrasound by the ultrasound mechanism 50, so that the printed functional layer ink is sufficiently mixed with the previously printed ink solvent and completely fills the pixel wells. Therefore, the dewetting problem in the ink-jet printing process can be effectively solved, the thickness and the appearance of the film layer are good after the substrate 200 is dried to enable the printed functional layer ink to be dried and formed into a film, and the inconsistency of the display effect between the pixels is avoided. Meanwhile, the possibility of leakage current is reduced, and the production yield is improved.
In a specific example, a fixing mechanism 60 is further disposed on the stage 10, and the fixing mechanism 60 is used for fixing the substrate 200 on the stage 10 to prevent the position thereof from shifting during the inkjet printing process.
In a specific example, the volume of the printed ink solvent can be at least one layer of the pixel pits, the ink solvent is at least one of the solvents of the functional layer ink, the solvent printing mechanism 30 has a plurality of solvent accommodating chambers for accommodating different kinds of ink solvents, and the ink printing mechanism 40 has a plurality of ink accommodating chambers for accommodating different kinds of functional layer ink.
In one embodiment, the temperature control mechanism 20 is embedded in the stage 10, so as to control the temperature of the substrate 200 more efficiently and conveniently.
In one specific example, the inkjet printing apparatus 100 further includes a transport mechanism 70, and the transport mechanism 70 is used for transporting the substrate to be printed onto the stage 10 and transporting the printed substrate to other processing positions.
The light-emitting device according to an embodiment of the present invention includes a functional layer, and the functional layer is prepared by the inkjet printing method or the inkjet printing apparatus 100. Because the inkjet printing method or the inkjet printing device 100 solves the deweting problem in the inkjet printing process, the thickness consistency and the shape smoothness of the functional film layer of the luminescent device are better, the inconsistency of the display effect between pixels is avoided, and the display effect and quality are improved.
The following are specific examples.
Example 1
This example prints a HTL (hole transport layer) functional layer ink on a HIL (hole injection layer). The transport mechanism 70 places the HIL (hole injection layer) printed and dried on the stage 10, and the fixing mechanism 60 on the stage 10 fixes the substrate to prevent the substrate from being shifted in position during the inkjet printing process. Before printing HTL (hole transport layer) functional layer ink, the temperature parameter of the temperature control mechanism 20 is set, so that the temperature of the substrate on the objective table 10 is kept within 4-5 ℃, and the volatilization of the solvent in the pixel pits during printing is reduced. Then, 15pl of an ink solvent a having a composition of an HTL (hole transport layer) functional layer ink containing no HTL (hole transport layer) material was printed in each pixel pit on the substrate by a solvent printing mechanism 30. A target volume of HTL (hole transport layer) functional layer ink is then printed in the pixel pits on the substrate by the ink printing mechanism 40. Then, the ultrasonic device 50 was moved above the substrate, and the relative distance from the substrate in the vertical direction was set to 10cm, and the ultrasonic frequency and power were set to 28kHz and 0.5W/cm, respectively2The substrate on stage 10 is sonicated to thoroughly mix the printed HTL functional layer ink with the previously printed ink solvent a and completely fill the pixel wells. As shown in FIG. 3, the functional layer ink spreads well in the pixel pits, and the deweting problem does not occur. And then the substrate is conveyed into a vacuum drying device through a conveying mechanism 70 to be dried and formed into a film, the thickness and the appearance of the film layer are better, and the substrate continues to print the next functional layer.
Comparative example 1
This example prints a HTL (hole transport layer) functional layer ink on a HIL (hole injection layer). The transport mechanism places the substrate with the printed and dried HIL (hole injection layer) on the objective table, and the fixing mechanism on the objective table can fix the substrate to prevent the substrate from shifting in the ink-jet printing process. Before printing HTL (hole transport layer) functional layer ink, setting temperature parameters of a temperature control mechanism to keep the temperature of a substrate on an objective table within 4-5 ℃. A target volume of HTL (hole transport layer) functional layer ink is then printed in the pixel pits on the substrate by an ink printing mechanism. As a result, as shown in FIG. 4, the functional layer ink was poorly spread in the pixel pits, and deweting was very likely to occur.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. A method of inkjet printing comprising the steps of:
providing a substrate with pixel pits;
printing an ink solvent in pixel pits of the substrate;
printing functional layer ink in pixel pits of the substrate;
and carrying out ultrasonic treatment on the ink solvent and the functional layer ink on the substrate so as to uniformly mix the ink solvent and the functional layer ink.
2. A method of inkjet printing according to claim 1 wherein the volume of ink solvent printed is at least one layer of pixel wells capable of being tiled and the ink solvent is at least one of the solvents of the functional layer ink.
3. The inkjet printing method according to claim 2, wherein the volume of the ink solvent printed in each pixel pit is controlled to be 10pL to 100 pL.
4. The method of inkjet printing according to claim 1 wherein the temperature of the substrate is controlled to be in the range of 4 ℃ to 30 ℃ during printing.
5. The method of inkjet printing according to claim 4 wherein the temperature of the substrate is controlled to be in the range of 4 ℃ to 10 ℃ during printing.
6. The inkjet printing method of claim 1, wherein the frequency of the ultrasound is 20KHz to 0.8MHz, and the power of the ultrasound is 0.1W/cm2～10W/cm2。
7. The inkjet printing method according to any one of claims 1 to 6, wherein an ultrasonic mechanism used for the ultrasonic is located above the substrate during the ultrasonic, and the distance between the ultrasonic mechanism and the substrate is 0cm to 20 cm.
8. An inkjet printing apparatus, comprising:
the objective table is used for bearing the substrate;
the temperature control mechanism is used for regulating and controlling the temperature of the substrate;
a solvent printing mechanism for printing an ink solvent in pixel pits of the substrate;
an ink printing mechanism for printing functional layer ink in the pixel pits of the substrate; and
and the ultrasonic mechanism is used for carrying out ultrasonic treatment on the ink solvent and the functional layer ink on the substrate.
9. The inkjet printing apparatus of claim 8 wherein the volume of ink solvent printed is at least one layer of pixel wells and the ink solvent is at least one of the solvents of the functional layer inks, the solvent printing mechanism having a plurality of solvent receiving chambers for receiving different types of ink solvents, the ink printing mechanism having a plurality of ink receiving chambers for receiving different types of functional layer inks.
10. A light-emitting device comprising a functional layer produced by the inkjet printing method according to any one of claims 1 to 7 or the inkjet printing apparatus according to any one of claims 8 to 9.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911273236.1A CN112319081A (en) | 2019-12-12 | 2019-12-12 | Ink jet printing method, ink jet printing apparatus, and light emitting device |
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| CN201911273236.1A CN112319081A (en) | 2019-12-12 | 2019-12-12 | Ink jet printing method, ink jet printing apparatus, and light emitting device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113823667A (en) * | 2021-09-15 | 2021-12-21 | 纳晶科技股份有限公司 | Display device manufacturing method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113823667A (en) * | 2021-09-15 | 2021-12-21 | 纳晶科技股份有限公司 | Display device manufacturing method |
| CN113823667B (en) * | 2021-09-15 | 2023-10-27 | 纳晶科技股份有限公司 | Display device manufacturing method |
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