CN114113966A - High-performance and high-efficiency wafer test probe station - Google Patents
High-performance and high-efficiency wafer test probe station Download PDFInfo
- Publication number
- CN114113966A CN114113966A CN202111430005.4A CN202111430005A CN114113966A CN 114113966 A CN114113966 A CN 114113966A CN 202111430005 A CN202111430005 A CN 202111430005A CN 114113966 A CN114113966 A CN 114113966A
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- mounting
- rod
- test probe
- upper portion
- probe station
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- 239000000523 sample Substances 0.000 title claims abstract description 26
- 238000009434 installation Methods 0.000 claims description 14
- 238000003860 storage Methods 0.000 claims description 12
- 235000012431 wafers Nutrition 0.000 description 44
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 230000002337 anti-port Effects 0.000 description 4
- 241000251468 Actinopterygii Species 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a high-performance and high-efficiency wafer test probe station which comprises a first mounting table, wherein a transverse longitudinal adjusting table is arranged on the first mounting table, a workbench is arranged on the transverse longitudinal adjusting table, a rear support is arranged at the rear side of the workbench, an observation lens barrel is arranged on the rear support, side lower mounting pipes are arranged at the two sides of the workbench on the first mounting table, an inner movable rod is arranged in each side lower mounting pipe, a side upper mounting column is arranged at the upper end of each inner movable rod, and a lower mounting plate is arranged between the side lower mounting pipes. The invention discloses a high-performance and high-efficiency wafer test probe station, which belongs to the field of wafer processing.
Description
Technical Field
The invention relates to the field of probe stations, in particular to a wafer test probe station with high performance and high efficiency.
Background
The wafer is a silicon wafer used for manufacturing a silicon semiconductor circuit, the raw material of the wafer is silicon, high-purity polycrystalline silicon is dissolved and then doped into a silicon crystal seed crystal, the silicon crystal seed crystal is slowly pulled out to form cylindrical monocrystalline silicon, a silicon crystal bar is ground, polished and sliced to form a silicon wafer, namely the wafer, a domestic wafer production line mainly takes 8 inches and 12 inches, the main processing modes of the wafer are wafer processing and batch processing, namely 1 or more wafers are processed simultaneously, along with the fact that the characteristic size of a semiconductor is smaller and smaller, the processing and measuring equipment is more and more advanced, new data characteristics appear in wafer processing, in the wafer processing process, a high-performance and high-efficiency wafer test probe platform is required to be used for detecting the wafer through the structure, but in the using process of the traditional test probe platform, because the side mounting platforms on two sides are fixed, can not adjust, use inconvenience, when placing wafer slice on middle part workstation and detect, because the wafer presents the slice-shape, easy and the workstation laminating at middle part leads to when needing to take out the wafer, and is more troublesome, if promote the wafer to the side, leads to wafer and workstation to take place the friction fish tail easily.
Disclosure of Invention
The invention mainly aims to provide a wafer test probe station with high performance and high efficiency, which can effectively solve the problems in the background technology.
In order to achieve the purpose, the invention adopts the technical scheme that:
a wafer test probe station with high performance and high efficiency comprises a mounting table, wherein a transverse longitudinal adjusting table is arranged on the mounting table, a workbench is arranged on the transverse longitudinal adjusting table, a rear support is arranged at the rear side of the workbench, an observation lens cone is arranged on the rear support, side lower mounting tubes are arranged at two side positions of the workbench on the mounting table, an inner movable rod is arranged in the side lower mounting tubes, side upper mounting columns are arranged at the upper end position of the inner movable rod, a lower mounting plate is arranged between the side lower mounting tubes, a first screw rod is arranged on the lower mounting plate, a first moving body is movably mounted on the first screw rod, an upper mounting plate is arranged between the side upper mounting columns, a second rotating rod is arranged at the middle position of the upper mounting plate, an inclined support plate is arranged between the upper mounting plate and the lower mounting plate, two upper sliding rods are arranged between the side upper mounting columns at the upper position of the upper mounting plate, a movable middle moving block is arranged on the upper sliding rods, a side mounting table is arranged at the upper end position of the middle moving block, V-shaped sliding strips are arranged on the bottom surface of the side mounting table at two sides of the middle moving block, a side accommodating groove is arranged at the side position of the workbench, a side accommodating box is arranged at the side position of the side accommodating groove on the workbench, folding type supporting rods are arranged in the side accommodating box, an upper connecting rod is arranged between the folding type supporting rods, a lower connecting rod is arranged below the upper connecting rod between the folding type supporting rods, and an eccentric rod is arranged at the upper position of the upper connecting rod in the side accommodating box, an eccentric wheel is arranged on the eccentric rod.
Preferably, the number of the side upper mounting columns arranged on the bottom surface of the side mounting table is two, upper sliding grooves are formed in the upper end positions of the side upper mounting columns, and the side mounting table is movably mounted with the upper sliding grooves of the side upper mounting columns through V-shaped sliding strips.
Preferably, the second screw rod is located between the upper sliding rods, two side rotating plates are arranged on the second screw rod, the side rotating plates are located on the inner sides of the side upper mounting columns, and an upper adjusting head is arranged at the outer end of the second screw rod.
Preferably, be provided with two side support plates No. one on the lower part mounting panel, be provided with a bearing even No. one on the screw rod, a screw rod is through side support plate and side support plate movable mounting No. one, the outer end position of a screw rod is provided with the lower part and adjusts the head.
Preferably, a screw hole is formed in the middle movable block corresponding to the second screw rod, a screw hole is also formed in the first movable block corresponding to the first screw rod, and a through hole is formed in the middle movable block corresponding to the upper sliding rod.
Preferably, the upper end position and the lower end position of the inclined support plate are provided with a rotating pipe body, and the inclined support plate is movably mounted on a first rotating rod and a second rotating rod respectively through the rotating pipe body.
Preferably, two side support plates are arranged at two ends of the second rotating rod and are fixedly installed with the upper installation plate through the second side support plates.
Preferably, the quantity of the pole is held up to the book type is two, and movable mounting accomodates the inslot in the side, the position that the side receiver both sides correspond the eccentric bar is provided with the through-hole, eccentric bar movable mounting is in passing through of side receiver, the outer end position of eccentric bar is provided with the side and adjusts the head.
Preferably, the lower connecting rod is located below the side storage box, and the folding type lifting rod is provided with an inner spring located below the upper connecting rod, and the inner spring is located in the side storage box.
Compared with the prior art, the invention has the following beneficial effects: through the structures such as the first screw rod, the lower moving body can move through the rotation of the first screw rod, so that the lower end of the inclined supporting plate is pushed to move, the upper end of the inclined supporting plate pushes the upper mounting plate to move upwards, the side mounting table is adjusted vertically, and the height of the side mounting table can be adjusted vertically conveniently;
through the structures such as the second screw rod, the middle moving block can move horizontally, so that the side mounting table 22 can be driven by the middle moving block to move horizontally, and the horizontal position of the side mounting table can be adjusted conveniently;
through the folding type supporting rod isotructure that sets up, after the wafer was placed and is detected the completion on the workstation, through rotating the eccentric wheel for the folding type supported the pole rebound, thereby held up one side of wafer, and the staff of being convenient for takes out the wafer.
Drawings
FIG. 1 is a schematic diagram of an overall structure of a wafer test probe station with high performance and high efficiency according to the present invention;
FIG. 2 is a schematic structural diagram of a side lower mounting tube and a side upper mounting post of a wafer test probe station with high performance and high efficiency according to the present invention;
FIG. 3 is a schematic structural diagram of an upper mounting plate of a wafer test probe station with high performance and high efficiency according to the present invention;
FIG. 4 is a schematic diagram of a side mounting stage of a wafer test probe station with high performance and high efficiency according to the present invention;
FIG. 5 is a schematic diagram of a side storage box of a wafer test probe station with high performance and high efficiency according to the present invention;
FIG. 6 is a schematic diagram of a folding type lifting bar of a wafer test probe station with high performance and high efficiency according to the present invention.
In the figure: 1. a first mounting table; 2. a transverse and longitudinal adjusting table; 3. a work table; 4. a rear bracket; 5. an observation lens barrel; 6. a pipe is arranged at the lower part of the side surface; 7. a column is arranged on the upper part of the side surface; 8. an inner movable bar; 9. an upper chute; 10. an upper slide bar; 11. a lower mounting plate; 12. a first side support plate; 13. a first bearing; 14. a first screw rod; 15. a first mobile body; 16. a first rotating rod; 17. an upper mounting plate; 18. a second side support plate; 19. a second rotating rod; 20. an oblique support plate; 21. rotating the tube body; 22. a side mounting table; 23. a V-shaped slide bar; 24. a middle movable block; 25. a second screw; 26. a side rotating plate; 27. an upper adjustment head; 28. a side receiving groove; 29. a lateral storage box; 30. a folding lifting rod; 31. an upper connecting rod; 32. a lower connecting rod; 33. an inner spring; 34. an eccentric rod; 35. a side adjusting head; 36. an eccentric wheel; 37. a lower adjusting head.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
As shown in fig. 1-6, a wafer test probe station with high performance and high efficiency comprises a first mounting table 1, a transverse longitudinal adjusting table 2 is arranged on the first mounting table 1, a workbench 3 is arranged on the transverse longitudinal adjusting table 2, a rear support 4 is arranged at the rear side of the workbench 3, an observation lens cone 5 is arranged on the rear support 4, side lower mounting tubes 6 are arranged at the two sides of the workbench 3 on the first mounting table 1, inner movable rods 8 are arranged in the side lower mounting tubes 6, side upper mounting columns 7 are arranged at the upper ends of the inner movable rods 8, lower mounting plates 11 are arranged between the side lower mounting tubes 6, a first screw 14 is arranged on the lower mounting plates 11, a first moving body 15 is movably mounted on the first screw 14, an upper mounting plate 17 is arranged between the side upper mounting columns 7, a second rotating rod 19 is arranged at the middle position of the upper mounting plate 17, an inclined support plate 20 is arranged between an upper mounting plate 17 and a lower mounting plate 11, two upper sliding rods 10 are arranged between side upper mounting columns 7 at positions above the upper mounting plate 17, a middle movable block 24 is movably arranged on the upper sliding rods 10, a side mounting table 22 is arranged at the upper end position of the middle movable block 24, V-shaped sliding strips 23 are arranged at two sides of the middle movable block 24 on the bottom surface of the side mounting table 22, a side accommodating groove 28 is arranged at the side position of a workbench 3, a side accommodating box 29 is arranged at the side position of the side accommodating groove 28 on the workbench 3, folding type supporting rods 30 are arranged in the side accommodating box 29, upper connecting rods 31 are arranged between the folding type supporting rods 30, lower connecting rods 32 are arranged at positions below the upper connecting rods 31 between the folding type supporting rods 30, eccentric rods 34 are arranged at positions above the upper connecting rods 31 in the side accommodating box 29, the eccentric rod 34 is provided with an eccentric wheel 36.
In the present invention, in order to facilitate the front and rear position support of the side mounting tables 22 and prevent the side mounting tables 22 from deflecting by the V-shaped slide 23, the number of the side upper mounting posts 7 provided on the bottom surfaces of the side mounting tables 22 is two, the upper sliding grooves 9 are provided on the upper end positions of the side upper mounting posts 7, and the side mounting tables 22 are movably mounted with the upper sliding grooves 9 of the side upper mounting posts 7 by the V-shaped slide 23.
In the invention, in order to facilitate the operation of the second screw 25 and prevent the second screw 25 from falling off, the second screw 25 is positioned between the upper sliding rods 10, two side rotating plates 26 are arranged on the second screw 25, the side rotating plates 26 are positioned at the inner side positions of the side upper mounting columns 7, and the outer end positions of the second screw 25 are provided with upper adjusting heads 27.
In the invention, in order to install the first screw 14, the lower installation plate 11 is provided with two first side support plates 12, the first screw 14 is provided with a first bearing 13, the first screw 14 is movably installed with the first side support plates 12 through the first side support plates 12, and the outer end position of the first screw 14 is provided with a lower adjusting head 37.
In the present invention, in order to facilitate the movement of the middle movable block 24 and the first movable block 15, a screw hole is provided at a position corresponding to the second screw 25 on the middle movable block 24, a screw hole is also provided at a position corresponding to the first screw 14 on the first movable block 15, and a through hole is provided at a position corresponding to the upper slide bar 10 on the middle movable block 24.
In the present invention, in order to facilitate the support connection between the upper mounting plate 17 and the lower mounting plate 11, the inclined support plate 20 is provided at upper and lower end positions thereof with a rotating tube 21, and the inclined support plate 20 is movably mounted on the first rotating rod 16 and the second rotating rod 19 through the rotating tube 21.
In the present invention, in order to facilitate the installation of the second rotating rod 19, the second side support plates 18 are disposed at two ends of the second rotating rod 19, and are fixedly installed with the upper installation plate 17 through the second side support plates 18.
In the present invention, in order to facilitate the storage of the folding-type lifting rods 30, the number of the folding-type lifting rods 30 is two, and the folding-type lifting rods 30 are movably mounted in the side storage groove 28, through holes are provided at both sides of the side storage box 29 corresponding to the positions of the eccentric rods 34, the eccentric rods 34 are movably mounted in the through holes of the side storage box 29, and the outer end positions of the eccentric rods 34 are provided with side adjustment heads 35.
The lower connecting rod 32 is located below the side storage case 29, the inner spring 33 is provided on the fold-up lever 30 below the upper connecting rod 31, and the inner spring 33 is located in the side storage case 29 to facilitate the upward lifting of the fold-up lever 30.
It should be noted that, when a user needs to adjust the height of the side mounting table 22, the lower adjusting head 37 is rotated to rotate the lower adjusting head 37, so that the first screw 14 is driven by the lower adjusting head 37 to rotate, the first screw 14 is driven by the first bearing 13 to rotate in the first side supporting plate 12, so that the first moving body 15 is influenced by the first screw 14 to drive the first moving body 15 to move, when the first moving body 15 moves, the first rotating rod 16 is synchronously driven to move along with the first rotating rod 16, so that the lower end of the inclined supporting plate 20 can move horizontally, when the lower end of the inclined supporting plate 20 moves to the middle position, the upper end of the inclined supporting plate 20 rises upwards, when the lower end of the inclined supporting plate 20 moves to the side position, the upper end of the slant support plate 20 moves downwards, so that the second rotating rod 19 can move up and down, so as to drive the upper mounting plate 17 to move up and down, along with the up and down movement of the upper mounting plate 17, the side upper mounting column 7 drives the inner movable rod 8 to move up and down in the side lower mounting tube 6, so as to adjust the height of the side mounting table 22, when the side mounting table 22 needs to be horizontally adjusted, the upper adjusting head 27 is rotated, two side rotating plates 26 are arranged on the second screw 25, the side rotating plates are arranged at the inner side positions of the side upper mounting columns 7, so as to prevent the second screw 25 from separating from the side upper mounting columns 7, when the second screw 25 can movably rotate, the middle movable block 24 is influenced by the second screw 25, so that the middle movable block 24 can move back and forth on the second screw 25, the side mounting table 22 moves in the upper sliding groove 9 of the side upper mounting columns 7 through the V-shaped sliding strip 23, thereby facilitating the adjustment of the horizontal position of the side mounting table 22, when a user cuts the wafer into pieces and places the wafer on the middle working table 3, since the piece-shaped wafer and the working table 3 are easily attached to each other, after the detection is finished, the wafer is taken down or taken out relatively inconveniently, by the arrangement of the folding type supporting rods 30 and the like, when the wafer is placed, the side adjusting head 35 is rotated to enable the eccentric rod 34 to rotate, along with the rotation of the eccentric rod 34, the eccentric rod 36 starts to rotate downwards, thereby gradually pressing the upper connecting rod 31 downwards, and enabling the folding type supporting rods 30 at the two ends of the upper connecting rod 31 to move downwards, thereby gradually pressing the inner spring 33, so that the upper end of the folding type supporting rod 30 moves downwards and is movably installed in the side accommodating groove 28, thereby the wafer placing working table 3 can be detected, since the folding type supporting rod 30 is located in the side accommodating groove 28, therefore the wafer can the level be placed on workstation 3, after detecting, adjust head 35 antiport with the side, make eccentric rod 34 can antiport, thereby drive eccentric wheel 36 antiport, thereby make eccentric wheel 36 antiport, make eccentric wheel 36 upwards rotate gradually, make inside spring 33 can be along with eccentric wheel 36's rotation, resume gradually and open, make promotion upper portion connecting rod 31 rebound, thereby make the type of rolling over hold up pole 30 and can accomodate the groove 28 from the side and rise gradually, thereby lift one side of wafer, the staff of being convenient for takes off the wafer, avoid promoting the wafer, thereby avoid taking place the friction fish tail between wafer and workstation 3, thereby it is more convenient to make and take off or take off the wafer.
The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (9)
1. A wafer test probe station with high performance and high efficiency is characterized in that: comprises a first installation platform (1), a transverse longitudinal adjusting platform (2) is arranged on the first installation platform (1), a workbench (3) is arranged on the transverse longitudinal adjusting platform (2), a rear support (4) is arranged at the rear side of the workbench (3), an observation lens cone (5) is arranged on the rear support (4), side lower installation pipes (6) are arranged at the two sides of the workbench (3) on the first installation platform (1), an inner movable rod (8) is arranged in the side lower installation pipe (6), a side upper installation column (7) is arranged at the upper end of the inner movable rod (8), a lower installation plate (11) is arranged between the side lower installation pipes (6), a first screw rod (14) is arranged on the lower installation plate (11), and a first moving body (15) is movably installed on the first screw rod (14), be provided with upper portion mounting panel (17) between side upper portion erection column (7), the middle part position of upper portion mounting panel (17) is provided with dwang (19) No. two, be provided with slant backup pad (20) between upper portion mounting panel (17) and lower part mounting panel (11), be provided with two upper portion slide bars (10) in the top position that is located upper portion mounting panel (17) between side upper portion erection column (7), be provided with movable mounting on upper portion slide bar (10) middle part movable block (24), the upper end position of middle part movable block (24) is provided with side mount table (22), the bottom surface of side mount table (22) is provided with V-arrangement draw runner (23) in the both sides that are located middle part movable block (24), the side position of workstation (3) is provided with side and accomodates groove (28), side receiver (29) are provided with in the side position that is located side and accomodates groove (28) on workstation (3), be provided with a roll over type in side receiver (29) and hold up pole (30), it holds up and is provided with upper portion connecting rod (31) between pole (30) to roll over the type, it is provided with lower part connecting rod (32) to roll over the type to hold up the below position that is located upper portion connecting rod (31) between pole (30), the top position that is located upper portion connecting rod (31) in side receiver (29) is provided with eccentric lever (34), be provided with eccentric wheel (36) on eccentric lever (34).
2. The wafer test probe station with high performance and high efficiency as claimed in claim 1, wherein: the side mounting table is characterized in that the number of the side upper mounting columns (7) arranged on the bottom surface of the side mounting table (22) is two, the upper sliding grooves (9) are formed in the upper end positions of the side upper mounting columns (7), and the side mounting table (22) is movably mounted with the upper sliding grooves (9) of the side upper mounting columns (7) through V-shaped sliding strips (23).
3. The wafer test probe station with high performance and high efficiency as claimed in claim 1, wherein: no. two screw rods (25) are located between the upper sliding rods (10), two side rotating plates (26) are arranged on the No. two screw rods (25), the side rotating plates (26) are located at the inner side positions of the side upper portion mounting columns (7), and upper portion adjusting heads (27) are arranged at the outer end positions of the No. two screw rods (25).
4. The wafer test probe station with high performance and high efficiency as claimed in claim 1, wherein: be provided with side support plate (12) No. two on lower part mounting panel (11), be provided with bearing (13) No. one even on screw rod (14), screw rod (14) are through side support plate (12) and side support plate (12) movable mounting No. one, the outer end position of screw rod (14) is provided with lower part regulation head (37).
5. The wafer test probe station with high performance and high efficiency as claimed in claim 1, wherein: the middle movable block (24) is provided with a screw hole corresponding to the second screw rod (25), the first movable block (15) is also provided with a screw hole corresponding to the first screw rod (14), and the middle movable block (24) is provided with a through hole corresponding to the upper sliding rod (10).
6. The wafer test probe station with high performance and high efficiency as claimed in claim 1, wherein: the upper and lower end position of slant backup pad (20) is provided with rotates body (21), slant backup pad (20) are respectively in a dwang (16), No. two dwang (19) movable mounting through rotating body (21).
7. The wafer test probe station with high performance and high efficiency as claimed in claim 1, wherein: two side support plates (18) are arranged at two ends of the second rotating rod (19), and the second rotating rod is fixedly installed with the upper installation plate (17) through the second side support plates (18).
8. The wafer test probe station with high performance and high efficiency as claimed in claim 1, wherein: the quantity of roll over type support pole (30) is two, and movable mounting accomodates groove (28) in the side, the position that side receiver (29) both sides correspond eccentric bar (34) is provided with the through-hole, eccentric bar (34) movable mounting is in passing through of side receiver (29), the outer end position of eccentric bar (34) is provided with side regulation head (35).
9. The wafer test probe station with high performance and high efficiency as claimed in claim 1, wherein: the lower connecting rod (32) is located at the lower position of the side storage box (29), an inner spring (33) is arranged on the folding type supporting rod (30) below the upper connecting rod (31), and the inner spring (33) is located in the side storage box (29).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111430005.4A CN114113966A (en) | 2021-11-29 | 2021-11-29 | High-performance and high-efficiency wafer test probe station |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111430005.4A CN114113966A (en) | 2021-11-29 | 2021-11-29 | High-performance and high-efficiency wafer test probe station |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114113966A true CN114113966A (en) | 2022-03-01 |
Family
ID=80371111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111430005.4A Pending CN114113966A (en) | 2021-11-29 | 2021-11-29 | High-performance and high-efficiency wafer test probe station |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114113966A (en) |
-
2021
- 2021-11-29 CN CN202111430005.4A patent/CN114113966A/en active Pending
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Application publication date: 20220301 |
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