CN114108079A - Vacuum interconnection system and automatic transmission method thereof - Google Patents

Vacuum interconnection system and automatic transmission method thereof Download PDF

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Publication number
CN114108079A
CN114108079A CN202111189908.8A CN202111189908A CN114108079A CN 114108079 A CN114108079 A CN 114108079A CN 202111189908 A CN202111189908 A CN 202111189908A CN 114108079 A CN114108079 A CN 114108079A
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China
Prior art keywords
tray
mbe
mocvd
channel
transfer chamber
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CN202111189908.8A
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Chinese (zh)
Inventor
王新
陶章峰
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Aitman Suzhou Semiconductor Technology Co ltd
Gusu Laboratory of Materials
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Aitman Suzhou Semiconductor Technology Co ltd
Gusu Laboratory of Materials
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Priority to CN202111189908.8A priority Critical patent/CN114108079A/en
Publication of CN114108079A publication Critical patent/CN114108079A/en
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention discloses a vacuum interconnection system and an automatic transmission method thereof, wherein the vacuum interconnection system comprises a sample transfer chamber, an MOCVD (metal organic chemical vapor deposition) tray channel, an MBE (molecular beam epitaxy) tray channel and an automatic conveying channel, wherein the MOCVD tray channel is connected with the sample transfer chamber and is used for conveying an MOCVD tray which is used for carrying a sample and of the MOCVD system to the sample transfer chamber; the MBE tray channel is connected with the sample transfer chamber and used for conveying the MBE tray to the sample transfer chamber; the automatic conveying channel is connected with the sample transfer chamber and is used for transferring the sample on the MOCVD tray in the sample transfer chamber to the MBE tray and conveying the MBE tray carrying the sample to the MBE tray channel; the MBE tray lane is also used to transport the MBE tray carrying the sample to the MBE system. The invention realizes the direct interconnection of the MOCVD system and the MBE system and realizes the automatic transmission of the sample under the conditions of high temperature and vacuum environment.

Description

Vacuum interconnection system and automatic transmission method thereof
Technical Field
The invention belongs to the technical field of crystal growth, and particularly relates to a vacuum interconnection system and an automatic transmission method thereof.
Background
MOCVD (metal organic chemical vapor deposition) is a new vapor phase epitaxial growth technique developed on the basis of vapor phase epitaxial growth (VPE). MBE (molecular beam epitaxy) is a new technique for growing high quality crystalline thin films on crystalline substrates. Under the condition of ultrahigh vacuum, the molecular beam or atomic beam formed by heating vapour produced by furnace containing various required components and collimating by means of small hole is directly sprayed on the monocrystal substrate with proper temp., at the same time the molecular beam is controlled and scanned on the substrate, so that the molecules or atoms can be aligned according to crystal arrangement and grown layer by layer on the substrate to form film.
The existing MOCVD system and the MBE system are independent system devices, samples between the two systems are manually transmitted, and the samples need to be cooled and heated and exposed to the atmosphere in the transmission process, so that the defects of long time, low efficiency, material quality reduction caused by easy surface pollution and the like are overcome, and the advantages of the two systems cannot be fully exerted.
Therefore, how to provide an interconnection system for interconnecting the MOCVD system and the MBE system to solve the above existing disadvantages is an urgent problem to be solved.
Disclosure of Invention
It is a primary object of the present invention to provide a vacuum interconnection system that overcomes the deficiencies of the prior art.
Another object of the present invention is to provide an automatic transfer method of a vacuum interconnection system.
In order to achieve the purpose, the technical scheme adopted by the invention comprises the following steps: a vacuum interconnection system, comprising:
a sample transfer chamber;
the MOCVD tray channel is connected with the MOCVD system and the sample transfer chamber and is used for conveying the MOCVD tray which is loaded with the samples and is of the MOCVD system to the sample transfer chamber;
the MBE tray channel is connected with the MBE system and the sample transfer chamber and used for conveying the MBE tray to the sample transfer chamber;
the automatic conveying channel is connected with the sample transfer chamber and is used for transferring the sample on the MOCVD tray in the sample transfer chamber to the MBE tray and conveying the MBE tray carrying the sample to the MBE tray channel;
the MBE tray lane is also used to transport the MBE tray carrying the sample to the MBE system.
In a preferred embodiment, the sample transfer chamber, the MOCVD tray channel, the MBE tray channel and the automatic transport channel are isolated into mutually independent and closed spaces, and the MOCVD tray channel is isolated from or communicated with the MOCVD system, the MOCVD tray channel is isolated from the sample transfer chamber, the MBE tray channel is isolated from the MBE system, the MBE tray channel is isolated from the sample transfer chamber, and the automatic transport channel is isolated from or communicated with the sample transfer chamber through isolation valves.
In a preferred embodiment, the sample transfer chamber, MOCVD tray channel, MBE tray channel, and robotic transfer channel are under vacuum during operation.
In a preferred embodiment, the MOCVD tray channel and the MBE tray channel each comprise a transport system.
In a preferred embodiment, the sample transfer chamber further comprises a heating mount and an MBE mount for carrying the MOCVD tray and the MBE tray, respectively.
In a preferred embodiment, the automated transport corridor includes a robotic arm.
The embodiment of the invention also provides an automatic transmission method of the vacuum interconnection system, which comprises the following steps:
s100, conveying the MOCVD tray which is conveyed from the MOCVD system and is loaded with the sample to a sample transfer chamber;
s200, conveying the MBE tray to a sample transfer chamber;
s300, transferring the sample on the MOCVD tray in the sample transfer chamber to an MBE tray, and conveying the MBE tray carrying the sample to an MBE tray channel;
and S400, conveying the MBE tray carrying the sample to an MBE system.
In a preferred embodiment, the S100 includes:
s101, after the MOCVD tray carrying the samples leaves the MOCVD system, opening a first isolation valve between the MOCVD system and an MOCVD tray channel, and after the MOCVD tray enters the MOCVD tray channel, closing the first isolation valve;
s102, opening a second isolation valve between the MOCVD tray channel and the sample transfer chamber, transmitting the MOCVD tray to a heating support of the sample transfer chamber through a transmission system in the MOCVD tray channel, and closing the second isolation valve.
In a preferred embodiment, the S200 includes:
s201, after the MBE tray leaves the MBE system, a third isolation valve between the MBE system and an MBE tray channel is opened, and after the MBE tray enters the MBE tray channel, the third isolation valve is closed;
s202, respectively opening a fourth isolation valve between the MBE tray channel and the sample transfer chamber and a fifth isolation valve between the sample transfer chamber and the automatic conveying channel, conveying the MBE tray to the sample transfer chamber through a conveying system in the MBE tray channel, placing the MBE tray on an MBE support of the sample transfer chamber through the automatic conveying channel, and closing the fourth isolation valve.
In a preferred embodiment, the S300 includes:
s301, placing the sample on the MOCVD tray into a designated position of an MBE tray by an automatic conveying channel;
s302, opening the fourth isolation valve, sending the MBE tray carrying the sample to an MBE tray channel, and closing the fourth isolation valve and the fifth isolation valve.
In a preferred embodiment, the S400 includes:
s401, opening a third isolation valve between the MBE tray channel and the MBE system, and sending the MBE tray carrying the sample into the MBE system through a conveying system in the MBE tray channel;
s402, closing the third isolation valve.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention provides a vacuum interconnection system, which realizes the direct interconnection of an MOCVD system and an MBE system, can give full play to the respective technical advantages of the two systems, and realizes the advantage complementation between the devices.
2. The invention realizes the automatic transmission of the sample between the MOCVD system and the MBE system under the conditions of high temperature and vacuum.
3. Compared with the existing manual transmission, the automatic transmission of the sample has the advantages of short time, high efficiency and the like, and can be industrially operated.
4. The invention transmits the sample under the conditions of high temperature and vacuum environment, avoids the sample from being exposed in the atmosphere, thereby ensuring that the surface of the sample is not easy to be polluted and the quality of the material, especially the interface, can be improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic perspective view of a vacuum interconnect system according to an embodiment of the present invention;
FIG. 2 is a schematic top view of the structure of FIG. 1;
fig. 3 is a schematic flow chart of an automatic transfer method of a vacuum interconnection system according to an embodiment of the present invention.
Reference numerals:
1. MOCVD tray channel, 2, MBE tray channel, 3, sample transfer chamber, 4, automatic conveying channel, 5, first isolation valve, 6, sample, 7, MOCVD tray, 8, first conveying system, 9, second isolation valve, 10, MBE tray, 11, heating support, 12, MBE support, 13, third isolation valve, 14, second conveying system, 15, fourth isolation valve, 16, fifth isolation valve, 17, mechanical arm, 18 and sixth isolation valve.
Detailed Description
The present invention will be more fully understood from the following detailed description, which should be read in conjunction with the accompanying drawings. Detailed embodiments of the present invention are disclosed herein; however, it is to be understood that the disclosed embodiments are merely exemplary of the invention, which can be embodied in various forms. Therefore, specific functional details disclosed herein are not to be interpreted as limiting, but merely as a basis for the claims and as a representative basis for teaching one skilled in the art to variously employ the present invention in virtually any appropriately detailed embodiment.
As shown in fig. 1 and 2, a vacuum interconnection system according to an embodiment of the present invention is used for interconnection between an MOCVD system (not shown) and an MBE system (not shown). The method specifically comprises the following steps: the device comprises an MOCVD tray channel 1, an MBE tray channel 2, a sample transfer chamber 3 and an automatic conveying channel 4, wherein the MOCVD tray channel 1, the MBE tray channel 2 and the automatic conveying channel 4 are matched to convey a sample of the MOCVD system to the MBE system through the sample transfer chamber 3 under the conditions of vacuum and high temperature.
Specifically, the MOCVD tray channel 1, the MBE tray channel 2, the sample transfer chamber 3, and the automatic transfer channel 4 are isolated into mutually independent and closed spaces, and the MOCVD tray channel 1 and the MOCVD system, the MOCVD tray channel 1 and the sample transfer chamber 3, the MBE tray channel 2 and the MBE system, the MBE tray channel 2 and the sample transfer chamber 3, and the automatic transfer channel 4 and the sample transfer chamber 3 are isolated or communicated by isolation valves. The vacuum state of each channel and the sample transfer chamber 3 is ensured to be maintained under the condition of finishing vacuumizing.
Specifically, the MOCVD tray channel 1 is connected with the MOCVD system, the MOCVD tray channel and the MOCVD system are separated by the first isolation valve 5, and the MOCVD tray channel 1 is controlled to be separated from or communicated with the MOCVD system by the switch of the first isolation valve 5. After the MOCVD tray 7 carrying the sample 6 leaves the MOCVD system, the first isolation valve 5 is opened, and after the MOCVD tray 7 carrying the sample 6 completely enters the MOCVD tray channel 1, the first isolation valve 5 is closed. Preferably, the MOCVD tray channel 2 includes a first conveyance system 8, and after the MOCVD tray 7 carrying the sample 6 enters the MOCVD tray channel 1, the MOCVD tray channel 1 is conveyed to the sample transfer chamber 3 through the first conveyance system 8.
The sample transfer chamber 3 is connected with the MOCVD tray channel 1, the MOCVD tray channel 1 and the MOCVD tray channel are isolated by a second isolation valve 9, and the MOCVD tray channel 1 and the sample transfer chamber 3 are isolated or communicated by the switch of the second isolation valve 9. Preferably, sample-transfer chamber 3 includes a heating mount 11 and an MBE mount 12 for carrying MOCVD tray 7 and MBE tray 9, respectively. And opening the second isolation valve 9, conveying the MOCVD tray 7 carrying the sample 6 into the sample conveying chamber 3 by the first conveying system 8 of the MOCVD tray channel 1, specifically conveying the MOCVD tray 7 onto the heating support 11, and closing the second isolation valve 9. The heating holder 11 can ensure the constant temperature state of the MOCVD tray 7 and the sample 6 within the allowable temperature fluctuation range, and can also ensure the high temperature environment in the sample transfer chamber 3.
The MBE tray channel 2 is connected with the MBE system, the MBE tray channel and the MBE system are isolated by a third isolation valve 13, and the isolation or communication between the MBE tray channel 2 and the MBE system is controlled by the switch of the third isolation valve 13. After the MBE tray 10 leaves the MBE system, the third isolation valve 13 is opened, and after the MBE tray 10 completely enters the MBE tray passage 2, the third isolation valve 13 is closed. Preferably, the MBE tray lane 2 includes a second transport system 14, and after the MBE tray 10 enters the MBE tray lane 2, it is transported by the MBE tray lane 2 to the sample transfer chamber 3 through the second transport system 14.
The MBE tray channel 2 is connected with the sample transfer chamber 3, the MBE tray channel 2 and the sample transfer chamber 3 are isolated by a fourth isolation valve 15, and the isolation or communication between the MBE tray channel 2 and the sample transfer chamber 3 is controlled by the switch of the fourth isolation valve 15. The fourth isolation valve 15 is opened, the MBE tray 10 is fed into the sample transfer chamber 3, specifically the MBE tray 10 is fed onto the MBE holder 12, through the second transport system 14 of the MBE tray lane 2, and the fourth isolation valve 15 is closed.
The automatic conveying channel 4 is connected with the sample transfer chamber 3, the automatic conveying channel and the sample transfer chamber 3 are isolated by a fifth isolation valve 16, and the isolation or the communication between the automatic conveying channel 4 and the sample transfer chamber 3 is controlled by the switch of the fifth isolation valve 16. Preferably, the automatic conveying path 4 comprises a robot arm 17. The fifth isolation valve 16 is opened and the automated transport path 4 assists in securing the MBE pallet 10 to the MBE support 12 with the robotic arm 17. In addition, the automatic transfer path 4 sequentially picks up the samples 6 on the MOCVD trays 7 in the sample transfer chamber 3 by the robot arm 17, places the samples 6 at the designated positions of the MBE trays 10, opens the fourth isolation valve 15, transfers the MBE trays 10 and the samples 6 to the second drive system 14 in the MBE tray path 2 by the robot arm 17, and then closes the fifth isolation valve 16 and the fourth isolation valve 15. And opening a third isolation valve 13, feeding the MBE tray 10 and the sample 6 into the MBE system through a second transmission system 14, and closing the gate valve third isolation valve 13.
The automatic transfer passage 4 is controlled by a sixth isolation valve 18 from the atmosphere, and when the sixth isolation valve 18 is closed, the automatic transfer passage 4 is isolated as an independent area. Preferably, the first to sixth isolation valves may be implemented by gate valves.
As shown in fig. 3, an automatic transmission method of a vacuum interconnection system according to an embodiment of the present invention includes the following steps:
s100, the MOCVD pallet 7 on which the sample 6 is carried, which is transported from the MOCVD system, is transported to the sample transfer chamber 3.
Wherein the S100 includes:
s101, after the MOCVD tray 7 carrying the sample 6 leaves the MOCVD system, opening a first isolation valve 5 between the MOCVD system and the MOCVD tray channel 1, and after the MOCVD tray 7 enters the MOCVD tray channel 1, closing the first isolation valve 5;
s102, opening a second isolation valve 9 between the MOCVD tray channel 1 and the sample transfer chamber 3, transmitting the MOCVD tray 7 to a heating support 11 of the sample transfer chamber 3 through a first transmission system 8 in the MOCVD tray channel 1, and closing the second isolation valve 9.
S200, the MBE tray 10 is transported to the sample transfer chamber 3.
Wherein the S200 comprises:
s201, after the MBE tray 10 leaves the MBE system, opening a third isolation valve 13 between the MBE system and the MBE tray channel 2, and after the MBE tray 10 enters the MBE tray channel 2, closing the third isolation valve 13;
s202, respectively opening the fourth isolation valve 15 between the MBE tray channel 2 and the sample transfer chamber 3 and the fifth isolation valve 16 between the sample transfer chamber 3 and the automatic transfer channel 4, transferring the MBE tray 10 to the sample transfer chamber 3 through the second transfer system 14 in the MBE tray channel 2, placing the MBE tray 10 on the MBE seat 12 of the sample transfer chamber 3 through the automatic transfer channel 4, and closing the fourth isolation valve 15.
S300, the sample 6 on the MOCVD tray 7 in the sample transfer chamber 3 is transferred onto the MBE tray 7, and the MBE tray 7 on which the sample 6 is carried is conveyed to the MBE tray lane 2.
Wherein the S300 includes:
s301, the automatic conveying channel 4 puts the sample 6 on the MOCVD tray 7 into a designated position of the MBE tray 10;
and S302, opening the fourth isolation valve 15, sending the MBE tray 10 carrying the sample 6 to the MBE tray channel 2, and closing the fourth isolation valve 15 and the fifth isolation valve 16.
S400, the MBE tray 10 carrying the sample 6 is transported to the MBE system.
Wherein the S400 includes:
s401, opening a third isolation valve 13 between the MBE tray channel 2 and the MBE system, and sending the MBE tray 10 carrying the sample 6 into the MBE system through a second conveying system 14 in the MBE tray channel 2;
s402, closing the third isolation valve 13.
And S500, repeating the steps S100-S400 to realize the automatic multi-sample transmission process of the MOCVD system and the MBE system.
The invention has the following advantages: 1. the invention provides a vacuum interconnection system, which realizes the direct interconnection of an MOCVD system and an MBE system, can give full play to the respective technical advantages of the two systems, and realizes the advantage complementation between the devices. 2. The invention realizes the automatic transmission of the sample between the MOCVD system and the MBE system under the conditions of high temperature and vacuum. 3. Compared with the existing manual transmission, the automatic transmission of the sample has the advantages of short time, high efficiency and the like, and can be industrially operated. 4. The invention transmits the sample under the conditions of high temperature and vacuum environment, avoids the sample from being exposed in the atmosphere, thereby ensuring that the surface of the sample is not easy to be polluted and the quality of the material, especially the interface, can be improved.
The aspects, embodiments, features and examples of the present invention should be considered as illustrative in all respects and not intended to be limiting of the invention, the scope of which is defined only by the claims. Other embodiments, modifications, and uses will be apparent to those skilled in the art without departing from the spirit and scope of the claimed invention.

Claims (10)

1. A vacuum interconnect system, the system comprising:
a sample transfer chamber;
the MOCVD tray channel is connected with the MOCVD system and the sample transfer chamber and is used for conveying the MOCVD tray which is loaded with the samples and is of the MOCVD system to the sample transfer chamber;
the MBE tray channel is connected with the MBE system and the sample transfer chamber and used for conveying the MBE tray to the sample transfer chamber;
the automatic conveying channel is connected with the sample transfer chamber and is used for transferring the sample on the MOCVD tray in the sample transfer chamber to the MBE tray and conveying the MBE tray carrying the sample to the MBE tray channel;
the MBE tray lane is also used to transport the MBE tray carrying the sample to the MBE system.
2. A vacuum interconnect system in accordance with claim 1, wherein: the sample transfer chamber, the MOCVD tray channel, the MBE tray channel and the automatic conveying channel are all isolated into mutually independent and closed spaces, and the MOCVD tray channel is isolated or communicated with the MOCVD system, the MOCVD tray channel is isolated from the sample transfer chamber, the MBE tray channel is isolated from the MBE system, the MBE tray channel is isolated from the sample transfer chamber, and the automatic conveying channel is isolated from the sample transfer chamber through an isolation valve.
3. A vacuum interconnect system in accordance with claim 2, wherein: the sample transfer chamber, the MOCVD tray channel, the MBE tray channel and the automatic conveying channel are in a vacuum state during working.
4. A vacuum interconnect system in accordance with claim 1, wherein: the MOCVD tray channel and the MBE tray channel both comprise a conveying system.
5. A vacuum interconnect system in accordance with claim 1, wherein: the sample transfer chamber also includes a heating mount and an MBE mount for carrying the MOCVD tray and the MBE tray, respectively.
6. An automatic conveying method based on the vacuum interconnection system of any one of claims 1 to 5, characterized in that the method comprises:
s100, conveying the MOCVD tray which is conveyed from the MOCVD system and is loaded with the sample to a sample transfer chamber;
s200, conveying the MBE tray to a sample transfer chamber;
s300, transferring the sample on the MOCVD tray in the sample transfer chamber to an MBE tray, and conveying the MBE tray carrying the sample to an MBE tray channel;
and S400, conveying the MBE tray carrying the sample to an MBE system.
7. The method according to claim 6, wherein the step S100 comprises:
s101, after the MOCVD tray carrying the samples leaves the MOCVD system, opening a first isolation valve between the MOCVD system and an MOCVD tray channel, and after the MOCVD tray enters the MOCVD tray channel, closing the first isolation valve;
s102, opening a second isolation valve between the MOCVD tray channel and the sample transfer chamber, transmitting the MOCVD tray to a heating support of the sample transfer chamber through a transmission system in the MOCVD tray channel, and closing the second isolation valve.
8. The method according to claim 6, wherein the step S200 comprises:
s201, after the MBE tray leaves the MBE system, a third isolation valve between the MBE system and an MBE tray channel is opened, and after the MBE tray enters the MBE tray channel, the third isolation valve is closed;
s202, respectively opening a fourth isolation valve between the MBE tray channel and the sample transfer chamber and a fifth isolation valve between the sample transfer chamber and the automatic conveying channel, conveying the MBE tray to the sample transfer chamber through a conveying system in the MBE tray channel, placing the MBE tray on an MBE support of the sample transfer chamber through the automatic conveying channel, and closing the fourth isolation valve.
9. The method according to claim 8, wherein the step S300 comprises:
s301, placing the sample on the MOCVD tray into a designated position of an MBE tray by an automatic conveying channel;
s302, opening the fourth isolation valve, sending the MBE tray carrying the sample to an MBE tray channel, and closing the fourth isolation valve and the fifth isolation valve.
10. The method according to claim 8, wherein the S400 comprises:
s401, opening a third isolation valve between the MBE tray channel and the MBE system, and sending the MBE tray carrying the sample into the MBE system through a conveying system in the MBE tray channel;
s402, closing the third isolation valve.
CN202111189908.8A 2021-10-12 2021-10-12 Vacuum interconnection system and automatic transmission method thereof Pending CN114108079A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116377572A (en) * 2023-06-07 2023-07-04 苏州焜原光电有限公司 Vacuum interconnection sample transmission system and sample transmission method thereof

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Publication number Priority date Publication date Assignee Title
US5903037A (en) * 1997-02-24 1999-05-11 Lucent Technologies Inc. GaAs-based MOSFET, and method of making same
CN201901699U (en) * 2010-09-17 2011-07-20 中微半导体设备(上海)有限公司 MOCVD (metal-organic chemical vapor deposition) processing system for automatic substrate conveying and in-situ substrate test
CN102751389A (en) * 2012-07-19 2012-10-24 厦门市三安光电科技有限公司 Preparation method of efficient multi-junction solar cell
CN106498366A (en) * 2015-09-03 2017-03-15 维易科仪器有限公司 Multicell chemical gas-phase deposition system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5903037A (en) * 1997-02-24 1999-05-11 Lucent Technologies Inc. GaAs-based MOSFET, and method of making same
CN201901699U (en) * 2010-09-17 2011-07-20 中微半导体设备(上海)有限公司 MOCVD (metal-organic chemical vapor deposition) processing system for automatic substrate conveying and in-situ substrate test
CN102751389A (en) * 2012-07-19 2012-10-24 厦门市三安光电科技有限公司 Preparation method of efficient multi-junction solar cell
CN106498366A (en) * 2015-09-03 2017-03-15 维易科仪器有限公司 Multicell chemical gas-phase deposition system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116377572A (en) * 2023-06-07 2023-07-04 苏州焜原光电有限公司 Vacuum interconnection sample transmission system and sample transmission method thereof
CN116377572B (en) * 2023-06-07 2023-09-15 苏州焜原光电有限公司 Vacuum interconnection sample transmission system and sample transmission method thereof

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Application publication date: 20220301