CN114087156A - Low energy consumption low temperature pump system - Google Patents
Low energy consumption low temperature pump system Download PDFInfo
- Publication number
- CN114087156A CN114087156A CN202111332508.8A CN202111332508A CN114087156A CN 114087156 A CN114087156 A CN 114087156A CN 202111332508 A CN202111332508 A CN 202111332508A CN 114087156 A CN114087156 A CN 114087156A
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- CN
- China
- Prior art keywords
- low
- temperature
- compressor
- refrigerator
- cold plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005265 energy consumption Methods 0.000 title claims abstract description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000001307 helium Substances 0.000 claims abstract description 22
- 229910052734 helium Inorganic materials 0.000 claims abstract description 22
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 22
- 238000010438 heat treatment Methods 0.000 claims description 14
- 238000010622 cold drawing Methods 0.000 claims description 11
- 238000012544 monitoring process Methods 0.000 claims description 8
- 238000005057 refrigeration Methods 0.000 abstract description 5
- 239000002699 waste material Substances 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/06—Cooling; Heating; Prevention of freezing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
- F04B39/123—Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/10—Other safety measures
Abstract
The invention relates to the technical field of manufacturing and application of refrigeration equipment, and discloses a low-energy-consumption cryogenic pump system, which comprises a compressor, a water cooler and at least two cryogenic pumps connected in parallel, wherein the lower end of the compressor is provided with a low-temperature water inlet and a high-temperature water outlet; the refrigerator is fixedly arranged at the lower end of the low-temperature pump; the upper end of the compressor is provided with a low-pressure air return port and a high-pressure air outlet, the refrigerator is provided with an air inlet and an air outlet, the low-pressure air return port is connected with the air outlet through a helium hose I, and the high-pressure air outlet is connected with the air inlet through a helium hose II. The invention controls the rotating speed of the refrigerator through the controller, thereby controlling the air input of the refrigerator in unit time, avoiding the waste of compressed air quantity and achieving the purpose of reducing energy consumption.
Description
Technical Field
The invention relates to the technical field of manufacturing and application of refrigeration equipment, in particular to a low-energy-consumption low-temperature pump system.
Background
There is known a refrigeration system including an ultra-low temperature refrigeration apparatus and a compressor for supplying a compressed gas to the refrigeration apparatus, in which a cryopump operates in a relatively wide temperature range, and a working gas temperature changes depending on an operating temperature of the cryopump. The cryopump and its compressor are generally connected by a closed working gas circuit, in which the quantity of working gas contained is constant. Therefore, if the working gas temperature becomes low, the operating pressure of the compressor also decreases, and if the cryopump cannot change the operating force corresponding to the compressor in time, the energy consumption increases.
Disclosure of Invention
The present invention addresses the above-mentioned shortcomings in the prior art by providing a low energy consumption cryogenic pump system.
In order to solve the technical problem, the invention is solved by the following technical scheme:
a low-energy-consumption cryogenic pump system comprises a compressor, a water cooler and at least two cryogenic pumps connected in parallel, wherein the lower end of the compressor is provided with a low-temperature water inlet and a high-temperature water outlet;
the refrigerator is fixedly arranged at the lower end of the low-temperature pump;
the upper end of the compressor is provided with a low-pressure air return port and a high-pressure air outlet, the refrigerator is provided with an air inlet and an air outlet, the low-pressure air return port is connected with the air outlet through a helium hose I, and the high-pressure air outlet is connected with the air inlet through a helium hose II.
Preferably, the number of the cryopumps is three, the cryopumps are all connected with the compressor, the air outlets of the cryopumps are connected to the first helium hose in parallel, and the air inlets of the cryopumps are connected to the second helium hose in parallel.
Preferably, a vertically arranged mounting seat is arranged in the cryogenic pump, a first-stage cold plate and a second-stage cold plate are fixedly mounted on the mounting seat, and the second-stage cold plate is arranged in the first-stage cold plate.
Preferably, the lower extreme of one-level cold drawing is equipped with the temperature sensor one that is used for monitoring one-level cold drawing, and temperature sensor one is connected with the one-level cold drawing, and the top of mount pad is equipped with the temperature sensor two that is used for monitoring the second grade cold drawing, and temperature sensor two is connected with the second grade cold drawing, and temperature sensor one all is connected with the controller with temperature sensor two.
Preferably, the cold-storage device further comprises a heating rod connected with the controller, the heating rod is fixedly arranged in the cryogenic pump, and the primary cold plate and the secondary cold plate are both connected with the heating rod.
Preferably, the compressor is a helium compressor.
Due to the adoption of the technical scheme, the invention has the remarkable technical effects that: the rotating speed of the refrigerator is controlled by the controller, so that the air inflow of the refrigerator in unit time is controlled, the waste of compressed air is avoided, and the purpose of reducing energy consumption is achieved.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a schematic diagram of the structure of the cryogenic pump.
The names of the parts indicated by the numerical references in the drawings are as follows: the device comprises a compressor 1, a water cooler 2, a cryopump 3, a cryopump 4, a cryopump low-temperature water inlet, a high-temperature water outlet 5, a water inlet 6, a water outlet 7, a refrigerator 8, a controller 9, a low-pressure air return port 10, a high-pressure air outlet 11, an air inlet 12, an air outlet 13, a helium hose I14, a helium hose II 15, a helium hose II 16, a mounting seat 17, a primary cooling plate 18, a secondary cooling plate 18, a temperature sensor I19, a temperature sensor II 20 and a heating rod 21.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Example 1
The utility model provides a low energy consumption low temperature pump system, as shown in fig. 1-2, compressor 1, cold water machine 2 and two at least parallel cryogenic pumps 3, compressor 1 is the frequency conversion helium gas compressor, compressor 1's lower extreme is equipped with low temperature water inlet 4 and high temperature delivery port 5, be equipped with water inlet 6 and delivery port 7 on the cold water machine 2, low temperature water inlet 4 is connected with delivery port 7, high temperature delivery port 5 is connected with water inlet 6, the high temperature high pressure gas after compressor 1 compression is cooled down through the recirculated cooling water of cold water machine 2, cool down the compressor pump oil of compressor 1 simultaneously, guarantee that compressor pump oil keeps reliable operating temperature, improve compressor 1 job stabilization nature and working life.
The low-temperature pump is characterized by further comprising a refrigerator 8 and a controller 9, the controller 9 is connected with the refrigerator 8 and controls operation of the refrigerator 8, the refrigerator 8 is fixedly arranged at the lower end of the low-temperature pump 3, and the rotating speed of the refrigerator 8 is controlled through the controller 9, so that air inflow of the refrigerator 8 in unit time is controlled, waste of compressed air is avoided, and the purpose of reducing energy consumption is achieved.
The upper end of the compressor 1 is provided with a low-pressure air return port 10 and a high-pressure air outlet 11, the refrigerator 8 is provided with an air inlet 12 and an air outlet 13, the low-pressure air return port 10 is connected with the air outlet 13 through a first helium hose 14, and the high-pressure air outlet 11 is connected with the air inlet 12 through a second helium hose 15. And a first helium hose 14 and a second helium hose 15 which are made of stainless steel are used for carrying out gas transmission between the compressor 1 and the cryopump 3, so that the gas transmission stability is improved.
Example 2
In a low energy consumption cryopump system, as shown in fig. 1 to 2, based on embodiment 1, three cryopumps 3 are respectively connected to a compressor 1, three controllers are respectively connected to the cryopumps 3, an air outlet 13 of each cryopump 3 is connected in parallel to a first helium hose 14, and an air inlet 12 of each cryopump 3 is connected in parallel to a second helium hose 15. The three cryopumps 3 are supplied with gas through the compressor 1, the working efficiency of the compressor 1 is improved, and the rotating speed of the refrigerator 8 is controlled through the controller 9, so that the working stability of the compressor 1 is ensured by controlling the air inflow, and the energy consumption is reduced.
Example 3
A low-energy-consumption low-temperature pump system is disclosed, as shown in fig. 1 to fig. 2, on the basis of embodiment 2, a vertically arranged mounting seat 16 is arranged in a low-temperature pump 3, a first-stage cold plate 17 and a second-stage cold plate 18 are fixedly arranged on the mounting seat 16, and the second-stage cold plate 18 is arranged in the first-stage cold plate 17. The lower extreme of one-level cold drawing 17 is equipped with the temperature sensor 19 that is used for monitoring one-level cold drawing 17, and temperature sensor 19 is connected with one-level cold drawing 17, and the top of mount pad 16 is equipped with the temperature sensor two 20 that are used for monitoring second grade cold drawing 18, and temperature sensor two 20 is connected with second grade cold drawing 18, and temperature sensor 19 and temperature sensor two 20 all are connected with controller 9. The first temperature sensor 19 is used for monitoring the temperature of the first-stage cold plate 17 in real time and transmitting the temperature data of the first-stage cold plate 17 to the controller 9, the second temperature sensor 20 is used for monitoring the temperature of the second-stage cold plate 18 in real time and transmitting the temperature data of the second-stage cold plate 18 to the controller 9, when the first-stage cold plate 17 and the second-stage cold plate 18 reach set temperatures, the controller 9 controls the refrigerator 8 to rotate at low frequency, so that the minimum compressed gas consumption is guaranteed, redundant compressed gas can be supplied to other cryogenic pumps 3, the first-stage cold plate 17 and the second-stage cold plate 18 of other cryogenic pumps 3 in the system reach set stability in the shortest time, the optimal working state is kept, and the overall energy consumption of the cryogenic pump 3 system is reduced.
The cold-storage device is characterized by further comprising a heating rod 21 connected with the controller 9, wherein the heating rod 21 is fixedly arranged in the cryopump 3, and the primary cold plate 17 and the secondary cold plate 18 are both connected with the heating rod 21. The controller 9 controls the heating rod 21 to heat the first-stage cold plate 17 and the second-stage cold plate 18, and controls the heating state and the heating time of the heating rod 21 according to data collected by the first temperature sensor 19 and the second temperature sensor 20, so that linkage control is realized, regeneration control of the cryopump 3 is achieved, and the overall energy consumption of the system is reduced.
Claims (6)
1. A low energy consumption cryogenic pump system characterized in that: the low-temperature pump comprises a compressor (1), a water cooler (2) and at least two low-temperature pumps (3) which are connected in parallel, wherein the lower end of the compressor (1) is provided with a low-temperature water inlet (4) and a high-temperature water outlet (5), the water cooler (2) is provided with a water inlet (6) and a water outlet (7), the low-temperature water inlet (4) is connected with the water outlet (7), and the high-temperature water outlet (5) is connected with the water inlet (6);
the refrigerator is characterized by further comprising a refrigerator (8) and a controller (9), wherein the controller (9) is connected with the refrigerator (8) and controls the operation of the refrigerator (8), and the refrigerator (8) is fixedly arranged at the lower end of the low-temperature pump (3);
the upper end of the compressor (1) is provided with a low-pressure air return port (10) and a high-pressure air outlet (11), the refrigerator (8) is provided with an air inlet (12) and an air outlet (13), the low-pressure air return port (10) is connected with the air outlet (13) through a helium hose I (14), and the high-pressure air outlet (11) is connected with the air inlet (12) through a helium hose II (15).
2. A low energy cryogenic pump system according to claim 1, wherein: the number of the cryogenic pumps (3) is three, the cryogenic pumps are connected with the compressor (1), the air outlets (13) of the cryogenic pumps (3) are connected to the helium hose I (14) in parallel, and the air inlets (12) of the cryogenic pumps (3) are connected to the helium hose II (15) in parallel.
3. A low energy cryogenic pump system according to claim 1, wherein: be equipped with vertical mount pad (16) that sets up in cryogenic pump (3), install one-level cold plate (17) and second grade cold drawing (18) on mount pad (16) fixedly, second grade cold plate (18) set up in one-level cold plate (17).
4. A low energy cryogenic pump system according to claim 3, wherein: the lower extreme of one-level cold plate (17) is equipped with temperature sensor (19) that are used for monitoring one-level cold plate (17), and temperature sensor (19) are connected with one-level cold plate (17), and the top of mount pad (16) is equipped with temperature sensor two (20) that are used for monitoring second grade cold plate (18), and temperature sensor two (20) are connected with second grade cold plate (18), and temperature sensor (19) all are connected with controller (9) with temperature sensor two (20).
5. A low energy cryogenic pump system according to claim 3, wherein: the low-temperature pump is characterized by further comprising a heating rod (21) connected with the controller (9), the heating rod (21) is fixedly arranged in the low-temperature pump (3), and the primary cold plate (17) and the secondary cold plate (18) are connected with the heating rod (21).
6. A low energy cryogenic pump system according to claim 1, wherein: the compressor (1) is a helium compressor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111332508.8A CN114087156A (en) | 2021-11-11 | 2021-11-11 | Low energy consumption low temperature pump system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111332508.8A CN114087156A (en) | 2021-11-11 | 2021-11-11 | Low energy consumption low temperature pump system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114087156A true CN114087156A (en) | 2022-02-25 |
Family
ID=80299980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111332508.8A Pending CN114087156A (en) | 2021-11-11 | 2021-11-11 | Low energy consumption low temperature pump system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114087156A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201779910U (en) * | 2010-05-25 | 2011-03-30 | 浙江大学 | Active air distribution system of compressor for low-temperature refrigerator |
| CN103306936A (en) * | 2012-03-07 | 2013-09-18 | 住友重机械工业株式会社 | Cryopump system, and method of operating the same, and compressor unit |
| CN104653434A (en) * | 2013-11-20 | 2015-05-27 | 住友重机械工业株式会社 | Cryopump system and method of operating cryopump system |
| KR101525560B1 (en) * | 2014-03-11 | 2015-06-03 | 주식회사 조인솔루션 | Power save apparatus of cryo pump system |
| CN111120255A (en) * | 2019-12-27 | 2020-05-08 | 浙江博开机电科技有限公司 | Built-in low-temperature pump |
| CN216518480U (en) * | 2021-11-11 | 2022-05-13 | 浙江博开机电科技有限公司 | Low energy consumption low temperature pump system |
-
2021
- 2021-11-11 CN CN202111332508.8A patent/CN114087156A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201779910U (en) * | 2010-05-25 | 2011-03-30 | 浙江大学 | Active air distribution system of compressor for low-temperature refrigerator |
| CN103306936A (en) * | 2012-03-07 | 2013-09-18 | 住友重机械工业株式会社 | Cryopump system, and method of operating the same, and compressor unit |
| CN104653434A (en) * | 2013-11-20 | 2015-05-27 | 住友重机械工业株式会社 | Cryopump system and method of operating cryopump system |
| KR101525560B1 (en) * | 2014-03-11 | 2015-06-03 | 주식회사 조인솔루션 | Power save apparatus of cryo pump system |
| CN111120255A (en) * | 2019-12-27 | 2020-05-08 | 浙江博开机电科技有限公司 | Built-in low-temperature pump |
| CN216518480U (en) * | 2021-11-11 | 2022-05-13 | 浙江博开机电科技有限公司 | Low energy consumption low temperature pump system |
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