CN104034078A - Cryogenic refrigeration apparatus and method of controlling cryogenic refrigeration apparatus - Google Patents
Cryogenic refrigeration apparatus and method of controlling cryogenic refrigeration apparatus Download PDFInfo
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- CN104034078A CN104034078A CN201410067853.7A CN201410067853A CN104034078A CN 104034078 A CN104034078 A CN 104034078A CN 201410067853 A CN201410067853 A CN 201410067853A CN 104034078 A CN104034078 A CN 104034078A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/20—Disposition of valves, e.g. of on-off valves or flow control valves
- F25B41/26—Disposition of valves, e.g. of on-off valves or flow control valves of fluid flow reversing valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/40—Fluid line arrangements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B49/00—Arrangement or mounting of control or safety devices
- F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D3/00—Devices using other cold materials; Devices using cold-storage bodies
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/002—Gas cycle refrigeration machines with parallel working cold producing expansion devices in one circuit
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2700/00—Sensing or detecting of parameters; Sensors therefor
- F25B2700/21—Temperatures
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/10—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point with several cooling stages
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S62/00—Refrigeration
Abstract
The present invention provides a cryogenic refrigeration apparatus and a method of controlling cryogenic refrigeration apparatus. The method of controlling cryogenic refrigeration apparatus is capable of carrying out adjustment for refrigeration ability of a plurality of refrigerators in various operating cryogenic refrigeration apparatus. The cryogenic refrigeration apparatus (10) includes a compressor (12), a plurality of refrigerators (14), and a gas line (16) configured to connect the plurality of refrigerators (14) to the compressor (12) in parallel so as to circulate a working gas between each of the plurality of refrigerators (14) and the compressor (12). The gas line (16) may include a flow rate control valve capable of individually controlling a pressure drop of a flow of working gas in a corresponding one of the plurality of refrigerators. The flow rate control valve (54) may be provided in series with the corresponding refrigerator (14).
Description
The application advocates the priority of No. 2013-041438th, Japanese patent application based on March 4th, 2013 application.All the elements of this application are by reference to being applied in this description.
Technical field
The present invention relates to the control method of a kind of ultra-low temperature refrigerating device and ultra-low temperature refrigerating device.
Background technology
Known have a kind of cold storage Leng Installed processed to put, it is configured to refrigeration machine and supplies with the high-pressure helium compressing by compressor, and make in refrigeration machine to expand and the low pressure helium of pressure drop returns to compressor, wherein, at refrigeration pusher side set temperature sensor, and the bypass path that possesses the flow control valve of being controlled by the signal producing based on this temperature sensor is set, and by controlling the pressure differential between high-pressure side and the low-pressure side of working gas, thereby the temperature of refrigeration machine can be controlled.
Patent documentation 1: Japanese kokai publication hei 11-281181 communique
In above-mentioned refrigerating plant, be provided with 1 refrigeration machine with respect to 1 compressor.Recently, for energy-conservation and reduce costs, instead have with respect to 1 compressor and be provided with many refrigeration machines.Many refrigeration machines are for example installed on a kind of many places of large-scale plant, or are installed on each in multiple devices of the same race.In this ultra-low temperature refrigerating device, move many refrigeration machines with its common compressor simultaneously, carry out so-called multiple operation.
Summary of the invention
One of exemplary purpose of a kind of mode of the present invention is, in the ultra-low temperature refrigerating device of multiple operation, the refrigerating capacity of multiple refrigeration machines adjusted respectively can carry out.
According to a kind of mode of the present invention, a kind of ultra-low temperature refrigerating device is provided, wherein, possess: working gas source; Multiple refrigeration machines; And gas piping, described multiple refrigeration machines are connected in parallel in described working gas source by it, so that circulate between each and the described working gas source of working gas in described multiple refrigeration machines, described gas piping possesses control important document, this control important document can be controlled respectively the mobile pressure loss of working gas of refrigeration machine corresponding in described multiple refrigeration machines, and described control important document series connection is arranged on the refrigeration machine of described correspondence.
According to a kind of mode of the present invention, a kind of control method of ultra-low temperature refrigerating device is provided, it possesses: with move multiple refrigeration machines in common working gas source simultaneously, and the mobile pressure loss of the working gas between described working gas source and described multiple refrigeration machine is controlled respectively.
In addition, any combination of above constitutive requirements and to constitutive requirements of the present invention and performance is replaced each other also still effective as mode of the present invention between method, Apparatus and system etc.
Invention effect
According to the present invention, can in the ultra-low temperature refrigerating device of multiple operation, the refrigerating capacity of multiple refrigeration machines be adjusted respectively can carry out.
Brief description of the drawings
Fig. 1 is the overall structure figure that roughly represents the related ultra-low temperature refrigerating device of one embodiment of the present invention.
Fig. 2 is the flow chart of the control method for the related ultra-low temperature refrigerating device of one embodiment of the present invention is described.
In figure: 10-ultra-low temperature refrigerating device, 12-compressor, 14-refrigeration machine, 16-gas piping, the main high press fit pipe of 42-, the indivedual pipe arrangements of 46-high pressure, 48-primary low pipe arrangement, the indivedual pipe arrangements of 52-low pressure, 54-flow control valve, 58-compressor control portion, 62-temperature control part.
Detailed description of the invention
Fig. 1 is the overall structure figure that roughly represents the related ultra-low temperature refrigerating device of one embodiment of the present invention 10.In this embodiment, ultra-low temperature refrigerating device 10 is for example arranged on the device 2 that possesses superconducting apparatus or other cooled objects 1.This device 2 is for example nuclear magnetic resonance image device, and now cooled object 1 is superconducting magnet.Device 2 also can be cryogenic pump, and now cooled object 1 is cryopanel.
Ultra-low temperature refrigerating device 10 possesses working gas source and multiple refrigeration machine 14 with compressor 12.And ultra-low temperature refrigerating device 10 possesses the gas piping 16 that multiple refrigeration machines 14 is connected in parallel in to compressor 12.Gas piping 16 is configured to and makes working gas circulation between each and compressor 12 of multiple refrigeration machines 14.Working gas is for example helium.
Compressor 12 possesses: inhalation port 18, for receiving operating on low voltage gas from gas piping 16; And the port 20 that spues, for exporting high-pressure working gas to gas piping 16.Compressor 12 possesses: compressor main body (not shown), for compression work gas; And compressor motor 21, for drive compression owner body.Compressor 12 possesses: the 1st pressure sensor 22, for measuring the pressure of operating on low voltage gas; And the 2nd pressure sensor 24, for measuring high-pressure working gas.These pressure sensors also can be arranged at the suitable position of gas piping 16.
Refrigeration machine 14 is for example Ji Fude-McMahon formula refrigeration machine (so-called GM refrigeration machine) or this cold storage ultra-low temperature refrigerating device of pulse tube refrigerating machine.Refrigeration machine 14 possesses: high pressure port 26, for receiving high-pressure working gas from gas piping 16; And low-pressure port 28, for exporting operating on low voltage gas to gas piping 16.Refrigeration machine 14 possesses at least 1 temperature sensor of the chilling temperature for measuring refrigeration machine 14.Refrigeration machine 14 is for example two-stage type refrigeration machine, and now refrigeration machine 14 possesses: the 1st temperature sensor 30, for measuring the temperature of the 1st grade low-temp end; And the 2nd temperature sensor 32, for measuring the temperature of low-temperature end of the 2nd grade.
Refrigeration machine 14 possesses the expanding chamber 34 of working gas.In expanding chamber 34, accommodate regenerator (not shown).Refrigeration machine 14 possesses the drive division 36 for carry out thermal cycle with certain frequency.Drive division 36 is configured to constant thermal cycle frequency running refrigerating machine 14.In this thermal cycle, the working gas of high pressure is supplied to expanding chamber 34 from high pressure port 26 via regenerator, expands also cooling in expanding chamber 34, and the working gas that its result is depressurized is discharged to low-pressure port 28 via regenerator from expanding chamber 34.
When refrigeration machine 14 is for example GM refrigeration machine, drive division 36 possesses displacer mechanism, stream switching mechanism and drive source.Displacer mechanism is configured to and makes high-pressure working gas be supplied in expanding chamber 34 via regenerator, and operating on low voltage gas is discharged from expanding chamber 34 via regenerator.Regenerator is installed on displacer mechanism.Stream switching mechanism is configured to the junction of expanding chamber 34 is switched in high pressure port 26 and low-pressure port 28.For realizing thermal cycle (being GM circulation), drive source is configured to synchronous driving displacer mechanism and stream switching mechanism.
Gas piping 16 possesses: pressure duct 38, for supplying with high-pressure working gas from compressor 12 to multiple refrigeration machines 14; And low pressure line 40, for operating on low voltage gas being recovered to compressor 12 from multiple refrigeration machines 14.Pressure duct 38 connects the high pressure port 26 of spue port 20 and the refrigeration machine 14 of compressor 12.Low pressure line 40 connects the inhalation port 18 of compressor 12 and the low-pressure port 28 of refrigeration machine 14.
Pressure duct 38 possesses the indivedual pipe arrangements 46 of main high press fit pipe 42, high pressure branching portion 44 and multiple high pressure.The port 20 that spues of compressor 12 is connected in high pressure branching portion 44 by main high press fit pipe 42.High pressure branching portion 44 by main high press fit pipe 42 to the indivedual pipe arrangement of multiple high pressure 46 branches.Each of the indivedual pipe arrangements 46 of multiple high pressure is connected in high pressure branching portion 44 high pressure port 26 of corresponding refrigeration machine 14.
Similarly, low pressure line 40 possesses the indivedual pipe arrangements 52 of primary low pipe arrangement 48, low pressure branching portion 50 and multiple low pressure.The inhalation port of compressor 12 18 is connected in low pressure branching portion 50 by primary low pipe arrangement 48.Low pressure branching portion 50 by primary low pipe arrangement 48 to the indivedual pipe arrangement of multiple low pressure 52 branches.Each of the indivedual pipe arrangements 52 of multiple low pressure is connected in low pressure branching portion 50 low-pressure port 28 of corresponding refrigeration machine 14.
So, main high press fit pipe 42 and primary low pipe arrangement 48 form the primary flow path of gas piping 16, and the indivedual pipe arrangements 46 of high pressure and the indivedual pipe arrangements 52 of low pressure form the single stream of gas piping 16.In primary flow path, dispose compressor 12.On multiple single streams, dispose respectively corresponding refrigeration machine 14.Refrigeration machine 14 is connected in primary flow path by each single stream.By primary flow path and single stream, form the circulation stream of the working gas between compressor 12 and each refrigeration machine 14.
Gas piping 16 possesses the flow control valve 54 of multiple refrigeration machines 14 and equal number.Each flow control valve 54 is connected respectively and is arranged at corresponding refrigeration machine 14.Flow control valve 54 is disposed at the indivedual pipe arrangements 46 of high pressure, and is adjacent to the outside of the high pressure port 26 of refrigeration machine 14.So, multiple flow control valve 54 with refrigeration machine 14 and flow control valve 54 one to one corresponding mode be configured in gas piping 16.
Flow control valve 54 is configured to and regulates its aperture to adjust the pressure loss Δ P1 of the indivedual pipe arrangements 46 of high pressure, and controls thus the working gas flow of the indivedual pipe arrangements 46 of high pressure.Flow control valve 54 for example carries out so-called Cv value and controls.Each flow control valve 54 is arranged at respectively the single stream of gas piping 16, and the mobile pressure loss Δ P1 of supply gas that therefore can the corresponding refrigeration machine 14 of subtend controls respectively.
Flow control valve 54 is arranged on the indivedual pipe arrangements 46 of high pressure, may be more favourable when being arranged on the indivedual pipe arrangements 52 of low pressure.Pressure loss Δ P1 produces in the high-pressure side of refrigeration machine 14, therefore can make the operating pressure of refrigeration machine 14 decline.Its result, the impact of the pressure loss of inside that can reduce refrigeration machine 14 on refrigerating capacity.
In addition, flow control valve 54 also can be installed on refrigeration machine 14 and the refrigerator unit being integrally formed.Or flow control valve 54 can be also the pressure loss control important document that is connected in the split of refrigeration machine 14 by pipe arrangement.
Ultra-low temperature refrigerating device 10 possesses compressor unit 56.Compressor unit 56 possesses compressor 12 and for controlling the compressor control portion 58 of compressor 12.Compressor control portion 58 possesses the compressor variable frequency device 60 of the running frequency for changing compressor motor 21.Compressor control portion 58 is configured to the running frequency of controlling compressor motor 21 according to the mensuration pressure of the 1st pressure sensor 22 and/or the 2nd pressure sensor 24.
Compressor control portion 58 is for example goal pressure by the differential pressure control of the high pressure of compressor 12 and low pressure.Below be referred to as differential pressure constant control.Compressor control portion 58 controls the running frequency of compressor 12 for differential pressure constant control.In addition, can in the implementation of differential pressure constant control, change as required the desired value of differential pressure.
In differential pressure constant control, compressor control portion 58 obtains the differential pressure of the mensuration pressure of the 1st pressure sensor 22 and the mensuration pressure of the 2nd pressure sensor 24.Compressor control portion 58 determines the running frequency of compressor motor 21, so that this differential pressure is consistent with desired value Δ P.Compressor control portion 58 controls compressor variable frequency device 60 and realizes its running frequency.
And ultra-low temperature refrigerating device 10 possesses the temperature control part 62 of the chilling temperature for controlling multiple refrigeration machines 14.Temperature control part 62 is configured to according to the mensuration temperature of the 1st temperature sensor 30 of multiple refrigeration machines 14 and/or the 2nd temperature sensor 32, and multiple flow control valves 54 are controlled respectively.
The chilling temperature of the 1st grade of refrigeration machine 14 (or the 2nd grade) is controlled to target temperature by temperature control part 62.Temperature control part 62 so that the mensuration temperature mode consistent with target temperature of the 1st temperature sensor 30 of certain refrigeration machine 14 wherein the aperture of the flow control valve corresponding with this refrigeration machine 14 54 is regulated.Target temperature can be constant in the time that refrigeration machine 14 moves, and also can change.This temperature control example is as the stable execution cooling in service at refrigeration machine 14.
Or temperature control part 62 also can be controlled flow control valve 54, so that the chilling temperature of refrigeration machine 14 the 1st grade (or the 2nd grade) changes.Temperature control part 62 also can be controlled the flow control valve corresponding with this refrigeration machine 14 54 according to the running status of certain refrigeration machine 14 wherein.For example, in the time that refrigeration machine 14 starts operation, flow control valve 54 is opened for certain and sets aperture (for example standard-sized sheet), starting in the follow-up stable operation of operation, also flow control valve 54 can be controlled as than its little aperture.
Action to ultra-low temperature refrigerating device 10 describes.By the operation of compressor 12, between the main high press fit pipe 42 of gas piping 16 and primary low pipe arrangement 48, be applied with the differential pressure that is equivalent to target differential pressure Δ P.,, when the suction pressure of compressor 12 is expressed as to P, the pressure representative that spues of compressor 12 is P+ Δ P.Therefore the high-pressure working gas that, has pressure P+Δ P exports pressure duct 38 to from compressor 12.High-pressure working gas is dispensed to high pressure indivedual pipe arrangements 46 by main high press fit pipe 42 by high pressure branching portion 44 from compressor 12.When the expanding chamber 34 of refrigeration machine 14 is connected in the indivedual pipe arrangement 46 of high pressure, high-pressure working gas is supplied to expanding chamber 34 from pressure duct 38.
Now, high-pressure working gas is supplied with corresponding refrigeration machine 14 by the flow control valve 54 of the indivedual pipe arrangements 46 of high pressure.Flow control valve 54 flows to exert pressure to the working gas of the indivedual pipe arrangements 46 of high pressure and loses Δ P1.Therefore, in the expanding chamber 34 of refrigeration machine 14, supply with and have the working gas with pressure P+Δ P-Δ P1.
When expanding chamber 34 is connected in the indivedual pipe arrangement 52 of low pressure, expands and carry out PV acting at expanding chamber 34 mesohigh working gas, in refrigeration machine 14, producing cold energy.Working gas is decompressed to pressure P from pressure P+Δ P-Δ P1.Be that the pressure of inspiration(Pi) of expanding chamber 34 and the differential pressure of pressure at expulsion are Δ P-Δ P1, this be shown Δ P2(in following table, Δ P2=Δ P-Δ P1).
Operating on low voltage gas is discharged to low pressure line 40 from expanding chamber 34.Operating on low voltage gas collaborates at low pressure branching portion 50 by the indivedual pipe arrangements 52 of low pressure from refrigeration machine 14.Operating on low voltage gas turns back to compressor 12 by primary low pipe arrangement 48.So, the operating on low voltage gas that has a pressure P is recovered to compressor 12 from low pressure line 40.The working gas of compressor 12 pressure recoveries, and boost to pressure P+Δ P.The high-pressure working gas so obtaining is supplied to refrigeration machine 14 from compressor 12 again.
Conventionally, the refrigerating capacity of refrigeration machine and the differential pressure of the pressure of inspiration(Pi) of expanding chamber and pressure at expulsion and the volume of expanding chamber are long-pending, i.e. PV acting relevant (ideal case is consistent).In typical refrigeration machine, can control refrigerating capacity and regulate chilling temperature by changing thermal cycle frequency.This adjusts expanding chamber volume V in conceptive being equivalent in the PV of refrigeration machine acting.
On the other hand, the design of present embodiment based on adjust differential pressure P in the PV of refrigeration machine 14 acting.The refrigerating capacity of refrigeration machine 14 is relevant with the long-pending Δ P2V of the volume V of the pressure of inspiration(Pi) of expanding chamber 34 and the differential pressure Δ P2 of pressure at expulsion and expanding chamber 34.The differential pressure Δ P2 of expanding chamber 34, as above-mentioned, determines according to the pressure loss Δ P1 of the differential pressure Δ P of compressor 12 and flow control valve 54.Therefore,, by changing pressure loss Δ P1, can control the refrigerating capacity of refrigeration machine 14 and regulate chilling temperature.
If reduce the aperture of certain flow control valve 54, pressure loss Δ P1 becomes large.Thus, the differential pressure Δ P2(=Δ P-Δ P1 of the expanding chamber 34 of the refrigeration machine 14 corresponding with this flow control valve 54) diminish with complimentary fashion, the PV acting of this refrigeration machine 14 reduces.Therefore, the refrigerating capacity of refrigeration machine 14 diminishes, and refrigeration machine 14 heats up.On the contrary, if the aperture of enlargement discharge control valve 54, pressure loss Δ P1 diminishes.Thus, the differential pressure Δ P2 of expanding chamber 34 becomes large with complimentary fashion, and the PV acting of refrigeration machine 14 increases.Therefore, it is large that the refrigerating capacity of refrigeration machine 14 becomes, and refrigeration machine 14 is lowered the temperature.
Compressor 12 is common gas source in multiple refrigeration machines 14, and therefore the differential pressure Δ P of compressor 12 is also common in multiple refrigeration machines 14.Therefore, the adjustment of compressor differential pressure can't realize other temperature control of refrigeration machine 14.But, according to present embodiment, can, by the pressure loss Δ P1 of the flow control valve of each refrigeration machine 14 54, therefore can control respectively the refrigerating capacity of multiple refrigeration machines 14.
According to present embodiment, can provide a kind of new temperature to regulate control mode to replace to change this existing temperature adjusting control mode of thermal cycle frequency of refrigeration machine.This new mode can realize so that this simple structure of flow control valve 54 to be set on gas piping 16, therefore may be favourable aspect cost compared with existing mode.
And, according to present embodiment, without the thermal cycle frequency that changes refrigeration machine 14, therefore can provide a kind of ultra-low temperature refrigerating device 10 of the refrigeration machine 14 that does not possess frequency converter.Refrigeration machine 14 does not have frequency converter, thus the noise not causing because of frequency converter.Therefore, ultra-low temperature refrigerating device 10 is suitable for requirement and falls low noise device, and for example nuclear magnetic resonance image device is cooling.
In present embodiment, the differential pressure constant control of the flow-control of gas piping 16 and compressor is used in conjunction with.This plays the effect of the energy-efficient performance that improves ultra-low temperature refrigerating device 10.Hour, working gas becomes and is difficult to flow through gas piping 16 aperture of flow control valve 54, and therefore the differential pressure of compressor 12 increases.Thus, the running frequency of compressor 12 declines, so that differential pressure is returned to desired value.So can reduce the power consumption of compressor 12.Thus, while reducing flow control valve 54 in order to reduce the remaining refrigerating capacity of refrigeration machine 14, can suppress the power consumption of compressor 12.On the contrary, open as required flow control valve 54, can strengthen thus the refrigerating capacity of refrigeration machine 14, and improve the running frequency of compressor 12.Compared with when compressor 12 is stably moved with high-frequency, can reduce the power consumption of compressor 12.
While bypass passageways being set between the high-pressure side of compressor and low-pressure side, the energy consuming for compressive flow crosses the gases at high pressure of bypass passageways can't contribute to the refrigerating capacity of refrigeration machine.On the other hand, according to present embodiment, ultra-low temperature refrigerating device 10 does not have this bypass passageways, does not exist the energy being produced by bypass passageways to consume.This is also conducive to energy-conservation.
Fig. 2 is the flow chart of the control method for the related ultra-low temperature refrigerating device of one embodiment of the present invention 10 is described.The method is for example carried out by temperature control part 62.As shown, start the operation (S10) of ultra-low temperature refrigerating device 10.Use common compressor 12, multiple refrigeration machines 14 move simultaneously.
This control method possesses the entirety control (S12) of multiple refrigeration machines 14 and the unit control (S14) of refrigeration machine 14.Entirety is controlled and is comprised the chilling temperature of monitoring respectively multiple refrigeration machines 14, for example, approaches from initial temperature (room temperature) to target temperature simultaneously.In entirety control, flow control valve 54 is all set as certain aperture (for example standard-sized sheet).When arbitrary refrigeration machine 14 reaches target temperature, temperature control part 62 finishes entirety control and is converted to unit control.Unit control comprise to multiple refrigeration machines 14 respectively the pressure loss of corresponding single stream control respectively.In unit control, flow control valve 54 is controlled.That is to say that it is rough temperature adjustment that entirety is controlled, unit control is accurate temperature adjustment.In addition, temperature control part 62 also can be carried out unit control when bringing into operation ultra-low temperature refrigerating device 10.
For example, entirety control in any of multiple refrigeration machines 14 be cooled to below target temperature.When the refrigeration machine 14 of the highest temperature is cooled to target temperature, temperature control part 62 finishes entirety control and is converted to unit control.Now, other refrigeration machines 14 are cooled than more low temperature of target temperature.In unit control, by reducing the aperture of flow control valve 54, the chilling temperature of corresponding refrigeration machine 14 is warming up to target temperature.So, multiple refrigeration machines 14 can be cooled to respectively to target temperature.
Because of the main causes such as the position relationship between individual difference and compressor 12 and the refrigeration machine 14 of refrigeration machine 14, the deviation that likely produces in service of refrigeration machine 14.For example, likely, between refrigeration machine 14, on chilling temperature, produce difference.By the unit control of refrigeration machine 14, can alleviate the deviation of this operation.
Above, describe the present invention based on embodiment.But the present invention is not limited to above-mentioned embodiment, can carry out various design changes, can implement various variation, and such variation is also within the scope of the present invention, this is understandable to those skilled in the art.
In above-mentioned embodiment, ultra-low temperature refrigerating device 10 possesses 1 compressor 12.But ultra-low temperature refrigerating device 10 also can possess the working gas source with multiple compressors 12.Now, multiple compressors 12 also can be connected in parallel with respect to multiple refrigeration machines 14., gas piping 16 also can be configured to multiple compressors 12 and be connected in parallel in arbitrary refrigeration machine in multiple refrigeration machines 14.For example, gas piping 16 can possess main high press fit pipe 42 and primary low pipe arrangement 48 in each compressor 12, and main high press fit pipe 42 and primary low pipe arrangement 48 are connected with high pressure branching portion 44 and low pressure branching portion 50 respectively.Therefore, gas piping 16 also can possess multiple main high press fit pipes 42 and primary low pipe arrangement 48, high pressure branching portion 44 and low pressure branching portion 50 and the indivedual pipe arrangements 46 of multiple high pressure and the indivedual pipe arrangements 52 of low pressure.
In above-mentioned embodiment, gas piping 16 possesses flow control valve 54 in order to control the mobile pressure loss of working gas.But the mobile pressure loss control important document of working gas is not limited to flow control valve 54.Gas piping 16 also can possess for example open and close valve or the flow control mechanism as this in variable throttler for controlling working gas flow, or possesses other pressure loss control important documents.Variable throttler for example comprises flow control valve 54, variable orifice.
This pressure loss control important document also can be arranged at any part (the indivedual pipe arrangements 52 of for example low pressure) of the single stream of gas piping 16, also can be arranged in refrigeration machine 14.Multiple pressure loss control important documents also can be arranged in 1 refrigeration machine.For example, multiple flow control valves 54 or variable throttler also can be connected and be arranged on the indivedual pipe arrangements 46 of high pressure and/or the indivedual pipe arrangements 52 of low pressure.
Pressure loss control important document can possess multiple branches stream.For example, pressure loss control important document possess the single stream that forms gas piping 16 a part the 1st branch's stream and be set up in parallel the 2nd branch's stream on the 1st branch's stream.The 1st branch's stream is opened, and is provided with the variable throttlers such as flow control valve on the 2nd branch's stream.Thus, can guarantee flowing in single stream by the 1st branch's stream.Can change as required the flow of the 2nd branch's stream, and control the flow in single stream.
And ultra-low temperature refrigerating device 10 also can possess than refrigeration machine 14 quantity pressure loss control important document still less.Now, in multiple refrigeration machines 14, part refrigeration machine 14 also can be corresponding with pressure loss control important document one to one.Working pressure damage control important document is controlled the refrigerating capacity of these part refrigeration machines 14, working pressure damage control important document not in other refrigeration machine 14.In these other refrigeration machine 14, also can carry out thermal cycle FREQUENCY CONTROL or other refrigerating capacity control.
Or, also multiple refrigeration machines 14 can be divided into several groups, in each group, be provided with 1 pressure loss control important document, control the refrigerating capacity of the refrigeration machine 14 of respective sets with this pressure loss control important document.
In above-mentioned embodiment, the drive division 36 of refrigeration machine 14 is configured to constant thermal cycle frequency running refrigerating machine 14.But drive division 36 also can be configured to and can change thermal cycle frequency.By being used in conjunction with the thermal cycle FREQUENCY CONTROL of refrigeration machine 14 and the flow-control of gas piping 16, thereby can expand the control range of the refrigerating capacity of refrigeration machine 14.
Refrigeration machine 14 can possess heater.Now, in order to make refrigeration machine 14 heat up, also can use heater in unit control.
Claims (7)
1. a ultra-low temperature refrigerating device, is characterized in that, possesses:
Working gas source;
Multiple refrigeration machines; And
Gas piping, described multiple refrigeration machines are connected in parallel in described working gas source by it, so that circulate between each and the described working gas source of working gas in described multiple refrigeration machines,
Described gas piping possesses control important document, and this control important document can be controlled respectively the mobile pressure loss of working gas of refrigeration machine corresponding in described multiple refrigeration machines,
Described control important document series connection is arranged on the refrigeration machine of described correspondence.
2. ultra-low temperature refrigerating device according to claim 1, is characterized in that,
Described working gas source possesses at least 1 compressor,
Described ultra-low temperature refrigerating device also possesses compressor control portion, and this compressor control portion is for controlling the running frequency of described compressor, to be goal pressure by the differential pressure control of the high pressure of described compressor and low pressure.
3. ultra-low temperature refrigerating device according to claim 1 and 2, is characterized in that,
Described ultra-low temperature refrigerating device also possesses temperature control part, and this temperature control part is used for controlling described control important document, to be target temperature by the chilling temperature control of the refrigeration machine of described correspondence.
4. according to the ultra-low temperature refrigerating device described in any one in claims 1 to 3, it is characterized in that,
Described gas piping possesses the primary flow path that is connected in described working gas source, and for the refrigeration machine of described correspondence being connected in to the single stream of described primary flow path,
Described control important document possesses the variable throttler that is arranged at described single stream.
5. a cryogenic pump, is characterized in that,
Described cryogenic pump possesses the ultra-low temperature refrigerating device described in any one in claim 1 to 4.
6. a nuclear magnetic resonance image device, is characterized in that,
Described nuclear magnetic resonance image device possesses the ultra-low temperature refrigerating device described in any one in claim 1 to 4.
7. a control method for ultra-low temperature refrigerating device, is characterized in that, possesses:
With move multiple refrigeration machines in common working gas source simultaneously, and
The pressure loss that working gas between described working gas source and described multiple refrigeration machine is mobile is controlled respectively.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013041438A JP6067423B2 (en) | 2013-03-04 | 2013-03-04 | Cryogenic refrigerator, cryopump, nuclear magnetic resonance imaging apparatus, and control method for cryogenic refrigerator |
| JP2013-041438 | 2013-03-04 |
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| CN104034078A true CN104034078A (en) | 2014-09-10 |
| CN104034078B CN104034078B (en) | 2017-03-22 |
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| CN201410067853.7A Active CN104034078B (en) | 2013-03-04 | 2014-02-26 | Cryogenic refrigeration apparatus and method of controlling cryogenic refrigeration apparatus |
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| US (1) | US9470436B2 (en) |
| JP (1) | JP6067423B2 (en) |
| KR (2) | KR20140109249A (en) |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108885032A (en) * | 2016-03-16 | 2018-11-23 | 住友重机械工业株式会社 | Movable stage cooling device and movable stage cooling system |
| CN111656108A (en) * | 2018-01-29 | 2020-09-11 | 住友重机械工业株式会社 | Ultra-low temperature cooling system |
| CN111788439A (en) * | 2018-03-07 | 2020-10-16 | 住友重机械工业株式会社 | Cryogenic refrigerator and piping system for cryogenic refrigerator |
| CN112334655A (en) * | 2018-07-10 | 2021-02-05 | 住友重机械工业株式会社 | Cryopump system and method for operating cryopump system |
| CN112728821A (en) * | 2019-10-14 | 2021-04-30 | 广东芬尼克兹节能设备有限公司 | Compressor ultralow-temperature safe operation control method, device, equipment and storage medium |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9927152B2 (en) * | 2014-11-04 | 2018-03-27 | Goodrich Corporation | Multi-dewar cooling system |
| JP2016142468A (en) * | 2015-02-03 | 2016-08-08 | 大陽日酸株式会社 | Dilution refrigeration device |
| KR102347055B1 (en) | 2017-10-29 | 2022-01-03 | 스미토모 크라이어제닉스 오브 아메리카 인코포레이티드 | Universal controller for integrating cryogenic equipment requiring different control mechanisms into a single operating platform |
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| US20220397322A1 (en) * | 2021-06-15 | 2022-12-15 | Applied Materials, Inc. | Cryogenic Cooling System |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09229503A (en) * | 1996-02-20 | 1997-09-05 | Daikin Ind Ltd | Cryogenic freezer device |
| JP2001248927A (en) * | 2000-03-07 | 2001-09-14 | Sumitomo Heavy Ind Ltd | Low-temperature device using pulse tube refrigeration unit |
| US6308520B1 (en) * | 1998-11-30 | 2001-10-30 | Aisin Seiki Kabushiki Kaisha | Multi-type pulse-tube refrigerating system |
| CN1405521A (en) * | 2001-08-03 | 2003-03-26 | 住友重机械工业株式会社 | Operation method of multi-system refrigerator, apparatus thereof and refrigerating apparatus |
| JP2003090639A (en) * | 2001-09-17 | 2003-03-28 | Sumitomo Heavy Ind Ltd | Operating system of a plurality of cryogenic refrigerating machine |
| JP2004085048A (en) * | 2002-08-26 | 2004-03-18 | Sumitomo Heavy Ind Ltd | Cryogenic freezing device and its operation method |
| CN1675505A (en) * | 2002-08-20 | 2005-09-28 | 住友重机械工业株式会社 | Cryogenic refrigerator |
| CN102165192A (en) * | 2008-09-30 | 2011-08-24 | 佳能安内华股份有限公司 | Vacuum pumping system, operating method of vacuum pumping system, refrigerator, vacuum pump, operating method of refrigerator, operation control method of two-stage type refrigerator, operation control method of cryopump, two-stage type refrigerator, cryopump, substrate processing apparatus, and manufacturing method of electronic device |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3640082A (en) * | 1970-06-08 | 1972-02-08 | Hughes Aircraft Co | Cryogenic refrigerator cycle |
| US4471625A (en) * | 1982-12-07 | 1984-09-18 | Kabushiki Kaisha Suzuki Shokan | Gas cycle refrigerator |
| JP2926853B2 (en) * | 1989-03-30 | 1999-07-28 | アイシン精機株式会社 | Multi-head cryopump |
| JPH0315676A (en) * | 1989-06-13 | 1991-01-24 | Daikin Ind Ltd | Multiple type cryogenic refrigerator |
| JP2927064B2 (en) * | 1991-08-08 | 1999-07-28 | ダイキン工業株式会社 | Multi-type cryogenic refrigerator |
| JPH11281181A (en) | 1998-03-31 | 1999-10-15 | Sumitomo Heavy Ind Ltd | Cold storage chiller |
| US7127901B2 (en) * | 2001-07-20 | 2006-10-31 | Brooks Automation, Inc. | Helium management control system |
| JP2007303815A (en) | 2002-04-18 | 2007-11-22 | Sumitomo Heavy Ind Ltd | Operating method for cryogenic refrigerator |
| DE502004007169D1 (en) * | 2003-08-20 | 2008-06-26 | Oerlikon Leybold Vacuum Gmbh | VACUUM DEVICE |
| TWI338768B (en) * | 2007-11-14 | 2011-03-11 | Ind Tech Res Inst | Frequency conversion control method and device thereof |
-
2013
- 2013-03-04 JP JP2013041438A patent/JP6067423B2/en active Active
-
2014
- 2014-01-08 TW TW103100653A patent/TWI583903B/en active
- 2014-01-15 KR KR1020140005085A patent/KR20140109249A/en active Search and Examination
- 2014-02-26 CN CN201410067853.7A patent/CN104034078B/en active Active
- 2014-03-04 US US14/196,853 patent/US9470436B2/en active Active
-
2016
- 2016-04-25 KR KR1020160050176A patent/KR101990519B1/en active IP Right Grant
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09229503A (en) * | 1996-02-20 | 1997-09-05 | Daikin Ind Ltd | Cryogenic freezer device |
| US6308520B1 (en) * | 1998-11-30 | 2001-10-30 | Aisin Seiki Kabushiki Kaisha | Multi-type pulse-tube refrigerating system |
| JP2001248927A (en) * | 2000-03-07 | 2001-09-14 | Sumitomo Heavy Ind Ltd | Low-temperature device using pulse tube refrigeration unit |
| CN1405521A (en) * | 2001-08-03 | 2003-03-26 | 住友重机械工业株式会社 | Operation method of multi-system refrigerator, apparatus thereof and refrigerating apparatus |
| JP2003090639A (en) * | 2001-09-17 | 2003-03-28 | Sumitomo Heavy Ind Ltd | Operating system of a plurality of cryogenic refrigerating machine |
| CN1675505A (en) * | 2002-08-20 | 2005-09-28 | 住友重机械工业株式会社 | Cryogenic refrigerator |
| JP2004085048A (en) * | 2002-08-26 | 2004-03-18 | Sumitomo Heavy Ind Ltd | Cryogenic freezing device and its operation method |
| CN102165192A (en) * | 2008-09-30 | 2011-08-24 | 佳能安内华股份有限公司 | Vacuum pumping system, operating method of vacuum pumping system, refrigerator, vacuum pump, operating method of refrigerator, operation control method of two-stage type refrigerator, operation control method of cryopump, two-stage type refrigerator, cryopump, substrate processing apparatus, and manufacturing method of electronic device |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108885032B (en) * | 2016-03-16 | 2020-08-25 | 住友重机械工业株式会社 | Movable table cooling device and movable table cooling system |
| CN108885032A (en) * | 2016-03-16 | 2018-11-23 | 住友重机械工业株式会社 | Movable stage cooling device and movable stage cooling system |
| CN111656108B (en) * | 2018-01-29 | 2021-10-12 | 住友重机械工业株式会社 | Ultra-low temperature cooling system |
| CN111656108A (en) * | 2018-01-29 | 2020-09-11 | 住友重机械工业株式会社 | Ultra-low temperature cooling system |
| CN111788439B (en) * | 2018-03-07 | 2022-02-08 | 住友重机械工业株式会社 | Cryogenic refrigerator and piping system for cryogenic refrigerator |
| CN111788439A (en) * | 2018-03-07 | 2020-10-16 | 住友重机械工业株式会社 | Cryogenic refrigerator and piping system for cryogenic refrigerator |
| CN112334655A (en) * | 2018-07-10 | 2021-02-05 | 住友重机械工业株式会社 | Cryopump system and method for operating cryopump system |
| CN113302439A (en) * | 2019-01-15 | 2021-08-24 | 住友重机械工业株式会社 | Starting method of cryogenic refrigerator and cryogenic refrigerator |
| CN113302439B (en) * | 2019-01-15 | 2022-09-09 | 住友重机械工业株式会社 | Starting method of cryogenic refrigerator and cryogenic refrigerator |
| CN112728821A (en) * | 2019-10-14 | 2021-04-30 | 广东芬尼克兹节能设备有限公司 | Compressor ultralow-temperature safe operation control method, device, equipment and storage medium |
| CN112728821B (en) * | 2019-10-14 | 2022-07-08 | 广东芬尼克兹节能设备有限公司 | Compressor ultralow-temperature safe operation control method, device, equipment and storage medium |
| CN114459166A (en) * | 2020-11-09 | 2022-05-10 | 住友重机械工业株式会社 | Cryogenic refrigerator and method for starting cryogenic refrigerator |
| CN112856873A (en) * | 2021-01-18 | 2021-05-28 | 苏州龙雨电子设备有限公司 | Equipment for accurately controlling gas temperature |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201435285A (en) | 2014-09-16 |
| JP6067423B2 (en) | 2017-01-25 |
| KR101990519B1 (en) | 2019-06-18 |
| KR20140109249A (en) | 2014-09-15 |
| US20140245754A1 (en) | 2014-09-04 |
| US9470436B2 (en) | 2016-10-18 |
| JP2014169813A (en) | 2014-09-18 |
| CN104034078B (en) | 2017-03-22 |
| KR20160054439A (en) | 2016-05-16 |
| TWI583903B (en) | 2017-05-21 |
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