CN112334655A - Cryopump system and method for operating cryopump system - Google Patents
Cryopump system and method for operating cryopump system Download PDFInfo
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- CN112334655A CN112334655A CN201980040153.XA CN201980040153A CN112334655A CN 112334655 A CN112334655 A CN 112334655A CN 201980040153 A CN201980040153 A CN 201980040153A CN 112334655 A CN112334655 A CN 112334655A
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- refrigerant gas
- cryopump
- compressors
- compressor
- pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F04B37/16—Means for nullifying unswept space
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
Abstract
A cryopump system (10) according to the present invention includes: at least one cryopump (12), each cryopump (12) including a cryopanel (16) and a refrigerator (18) that cools the cryopanel (16) by adiabatic expansion of a refrigerant gas; and N +1 compressors (14) connected in parallel with each other so that the refrigerant gas is supplied to each of the refrigerators (18) and operated simultaneously, wherein N is a positive integer. Any N compressors (14) of the N +1 compressors (14) are set such that the sum of the refrigerant gas supply capacities of the N compressors (14) is not less than the sum of the refrigerant gas flow rates required for cryopanel cooling by the refrigerators (18) of at least one cryopump (12).
Description
Technical Field
The present invention relates to a cryopump system and a method of operating a cryopump system.
Background
The cryopump is a vacuum pump that traps gas molecules by condensation or adsorption on a cryopanel cooled to an ultra-low temperature and exhausts the gas molecules. Cryopumps are commonly used to achieve the clean vacuum environment required in semiconductor circuit manufacturing processes and the like. A cryogenic refrigerator for cooling a cryopanel is incorporated in the cryopump. The refrigerator operates using a refrigerant gas supplied from the compressor.
Prior art documents
Patent document
Patent document 1: japanese laid-open patent publication No. 2012-67633
Disclosure of Invention
Technical problem to be solved by the invention
A plurality of cryopumps may be provided in a vacuum processing apparatus used in a semiconductor manufacturing process. In a case where a refrigerant gas needs to be supplied at a large flow rate, such as when a plurality of cryopumps are operated simultaneously, a cryopump system having a plurality of compressors arranged in parallel may be used.
However, if any one of the compressors is abnormally stopped for some reason during the operation of such a cryopump system, the refrigerant gas supply capacity to the cryopump is reduced. For example, if the cryopump system has two compressors and one of the compressors is stopped, the supply capacity of the refrigerant gas may be reduced to approximately half. Insufficient supply of the refrigerant gas may cause a decrease in the refrigerating capacity of the refrigerator of each cryopump, which may cause an increase in the temperature of the cryopanel. A significant increase in the temperature of the cryopanel compromises the function of the cryopump. For example, if the low-temperature plate temperature exceeds a certain threshold temperature (for example, about 20K), non-condensable gas such as hydrogen gas cannot be adsorbed.
One of the exemplary purposes of one embodiment of the present invention is to provide redundancy to the cryopump system.
Means for solving the technical problem
According to one embodiment of the present invention, there is provided a cryopump system including: at least one cryopump, each cryopump including a cryopanel and a refrigerator that cools the cryopanel by adiabatic expansion of a refrigerant gas; and N +1 compressors (where N is a positive integer) connected in parallel with each other so that the refrigerant gas is supplied to the respective refrigerators and operated simultaneously. The total of refrigerant gas supply capacities of the N compressors is set to be not less than the total of refrigerant gas flow rates required for the cryoplate cooling by the cryocoolers of the at least one cryopump.
A method of operating a cryopump system is provided according to one embodiment of the invention. The cryopump system includes: at least one cryopump, each cryopump including a cryopanel and a refrigerator that cools the cryopanel by adiabatic expansion of a refrigerant gas; and N +1 compressors (where N is a positive integer) connected in parallel to each other so that the refrigerant gas is supplied to each of the refrigerators. The method comprises the following steps: operating the N +1 compressors simultaneously; and continuing to operate the remaining N compressors when any one of the N +1 compressors is abnormally stopped. The total of refrigerant gas supply capacities of the N compressors is set to be not less than the total of refrigerant gas flow rates required for the cryoplate cooling by the cryocoolers of the at least one cryopump.
In addition, any combination of the above-described constituent elements or an embodiment in which the constituent elements and expressions of the present invention are replaced with each other in a method, an apparatus, a system, and the like is also effective as an embodiment of the present invention.
Effects of the invention
According to the invention, the cryopump system can have redundancy.
Drawings
Fig. 1 is a diagram schematically showing a cryopump system according to an embodiment.
Fig. 2 is a diagram schematically showing the flow of the refrigerant gas in the cryopump system according to the embodiment.
Fig. 3 is a control block diagram of a cryopump system according to an embodiment.
Detailed Description
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following description and the drawings, the same or equivalent constituent elements, components, and processes are denoted by the same reference numerals, and overlapping description is appropriately omitted. In the drawings, the scale and shape of each portion are appropriately set for convenience of explanation, and are not to be construed restrictively unless otherwise specified. The embodiments are merely examples, which do not limit the scope of the present invention in any way. All the features or combinations thereof described in the embodiments are not necessarily essential to the invention.
Fig. 1 is a diagram schematically showing a cryopump system 10 according to an embodiment. The cryopump system 10 includes at least one cryopump 12 and a plurality of compressors 14. Here, as an exemplary structure, the case where the cryopump system 10 has two cryopumps 12 and two compressors 14 is shown.
The cryopump 12 is attached to, for example, a vacuum chamber of a sputtering apparatus or a vapor deposition apparatus, and is used to increase the degree of vacuum inside the vacuum chamber to a level required for a desired vacuum process.
The cryopump 12 includes a cryopanel 16 and a refrigerator 18 that cools the cryopanel 16 by adiabatic expansion of refrigerant gas. The cryopanel 16 is housed in the cryopump 12, and when the cryopump 12 is operated, the cryopanel 16 is cooled to a cryogenic temperature by the refrigerator 18. The refrigerator 18 is also referred to as an expander or cold head, and constitutes a cryogenic refrigerator together with the compressor 14. The gas entering from the inlet of the cryopump 12 is condensed on the surface of the cryopanel 16 cooled to an ultra-low temperature, or adsorbed and trapped by an adsorbent provided on the cryopanel 16. The configuration of the cryopump 12, such as the arrangement and shape of the cryopanel 16, may be any of various known configurations, and therefore, will not be described in detail here.
The compressors 14 are connected in parallel to supply refrigerant gas to the refrigerators 18 and are operated simultaneously. The compressor 14 is configured to recover the refrigerant gas from the refrigerator 18, to increase the pressure of the recovered refrigerant gas, and to supply the refrigerant gas to the refrigerator 18 again.
As will be described later, the plurality of compressors 14 are normally operated simultaneously while the cryopump system 10 is operating. When any one of the compressors 14 stops operating for some reason, the remaining compressors 14 continue to operate.
The cycle of the refrigerant gas between the compressor 14 and the refrigerator 18 and the appropriate pressure fluctuation and volume fluctuation of the refrigerant gas in the refrigerator 18 are combined, thereby constituting a thermodynamic cycle in which cold is generated so that the cooling stage of the refrigerator 18 is cooled to a desired ultralow temperature. This enables the cryopanel 16 thermally connected to the cooling stage of the refrigerator 18 to be cooled to the target cooling temperature. The refrigerant gas is typically helium, although other gases may be suitably used. For ease of understanding, the flow direction of the refrigerant gas is indicated by arrows in fig. 1.
For example, the refrigerator 18 is a Gifford-McMahon (GM) refrigerator of a single-stage type or a two-stage type, but may be a pulse tube refrigerator, a stirling refrigerator, or a cryogenic refrigerator of another type. The refrigerator 18 has a different structure according to the type of the cryogenic refrigerator. The compressor 14 can use the same structure regardless of the type of the cryogenic refrigerator.
In general, the pressure of the refrigerant gas supplied from the compressor 14 to the refrigerator 18 and the pressure of the refrigerant gas recovered from the refrigerator 18 to the compressor 14 are both significantly higher than atmospheric pressure, and may be referred to as the 1 st high pressure and the 2 nd high pressure, respectively. For convenience of description, the 1 st high voltage and the 2 nd high voltage may be referred to as a high voltage and a low voltage, respectively. Typically, the high pressure is, for example, in the range of about 2 to 3MPa, and the low pressure is, for example, in the range of about 0.5 to 1.5 MPa.
The compressor 14 has a discharge port 20 and a suction port 21. The discharge port 20 is an outlet of the refrigerant gas provided in the compressor 14 to output the refrigerant gas pressurized to a high pressure by the compressor 14 from the compressor 14, and the suction port 21 is an inlet of the refrigerant gas provided in the compressor 14 to receive the low pressure refrigerant gas from the compressor 14.
The cryopump system 10 includes a piping system 24, and the piping system 24 connects the compressor 14 and the refrigerator 18 to circulate the refrigerant gas therebetween. The piping system 24 includes a high-pressure line 26 and a low-pressure line 28. The high-pressure line 26 is configured to allow the refrigerant gas to flow from the discharge port 20 of the compressor 14 to the high-pressure port 22 of the refrigerator 18 through the high-pressure merging portion 25. The low-pressure line 28 is configured to allow the refrigerant gas to flow from the low-pressure port 23 of the refrigerator 18 to the suction port 21 of the compressor 14 through the low-pressure merging portion 27. The piping system 24 includes a discharge-side check valve 29 and a suction-side check valve 30 for each compressor 14.
High-pressure line 26 has a compressor high-pressure secondary line 31 and a refrigerator high-pressure secondary line 32. The compressor high-pressure sub-line 31 connects the discharge port 20 of the compressor 14 to the high-pressure merging portion 25, and the refrigerator high-pressure sub-line 32 connects the high-pressure port 22 of the refrigerator 18 to the high-pressure merging portion 25. Since the high-pressure line 26 is a flow path of the refrigerant gas from the compressor 14 toward the refrigerator 18, a flow direction from the compressor 14 toward the refrigerator 18 may be referred to as a forward direction of the high-pressure line 26, and a direction opposite thereto may be referred to as a reverse direction of the high-pressure line 26. The forward direction corresponds to the direction of the illustrated arrow. The discharge-side check valve 29 is disposed in the compressor high-pressure sub-line 31 to allow the refrigerant gas to flow in the forward direction and block the refrigerant gas from flowing in the reverse direction.
The low-pressure line 28 has a compressor low-pressure secondary line 33 and a refrigerator low-pressure secondary line 34. The compressor low-pressure sub-line 33 connects the suction port 21 of the compressor 14 to the low-pressure merging portion 27, and the refrigerator low-pressure sub-line 34 connects the low-pressure port 23 of the refrigerator 18 to the low-pressure merging portion 27. Since the low-pressure line 28 is a flow path of the refrigerant gas from the refrigerator 18 toward the compressor 14, a flow direction from the refrigerator 18 toward the compressor 14 may be referred to as a forward direction of the low-pressure line 28, and a direction opposite thereto may be referred to as a reverse direction of the low-pressure line 28. The suction side check valve 30 is disposed on the compressor low pressure secondary line 33 to allow forward refrigerant gas flow while shutting off reverse refrigerant gas flow.
Each of the discharge-side check valve 29 and the suction-side check valve 30 is configured to open when the refrigerant gas pressure on the upstream side in the forward direction (i.e., the inlet side of the check valve) exceeds the refrigerant gas pressure on the downstream side in the forward direction (i.e., the outlet side of the check valve), and to close when the refrigerant gas pressure on the upstream side in the forward direction does not exceed the refrigerant gas pressure on the downstream side in the forward direction. In other words, each check valve (29, 30) is configured so that, when there is a forward flow of refrigerant gas flowing through the check valve, the check valve naturally opens due to a pressure loss of the forward flow. On the other hand, the check valves 29 and 30 are configured to close when a pressure difference (i.e., an outlet pressure higher than an inlet pressure) that may cause backflow of the refrigerant gas is generated between the inlet and outlet of the check valve. The check valve that is opened and closed by the action of the pressure difference between the upstream side and the downstream side as described above is generally easily available, and such a general check valve can be suitably used for each of the check valves 29 and 30.
The high-pressure line 26 and the low-pressure line 28 are formed of flexible pipes, for example, but may be formed of rigid pipes. Also, the high pressure joining portion 25 and/or the low pressure joining portion 27 may be constituted as a single part (e.g., a manifold). The discharge-side check valve 29 and/or the suction-side check valve 30 may be assembled in the single component.
The piping system 24 includes: one set of detachable joints 35 provided on both sides of the discharge-side check valve 29 and the other set of detachable joints 35 provided on both sides of the suction-side check valve 30. The detachable joint 35 is, for example, a self-sealing joint.
The detachable joint 35 may be provided only on one side of the discharge-side check valve 29 (that is, between the discharge-side check valve 29 and the discharge port 20 or between the discharge-side check valve 29 and the high-pressure merging portion 25). Similarly, the detachable joint 35 may be provided only on the side of the suction-side check valve 30. The discharge-side check valve 29 may be integrally assembled to the discharge port 20. The suction-side check valve 30 may be integrally assembled to the suction port 21.
In a normal state, the plurality of compressors 14 are operated simultaneously during operation of the cryopump system 10.
As shown in fig. 1, the high-pressure refrigerant gas compressed by each compressor 14 is output from the discharge port 20 of the compressor 14 to the compressor high-pressure sub-line 31. The refrigerant gas can flow through the discharge-side check valve 29 due to the forward flow of the refrigerant gas toward the high-pressure line 26. The refrigerant gas flows from the plurality of compressors 14 are merged at the high-pressure merging portion 25 and then split again into the refrigerator high-pressure sub-line 32. The refrigerant gas is supplied to the chiller 18 from the chiller high pressure secondary line 32 through the high pressure port 22 of the chiller 18. In this manner, the cryopump system 10 can supply the high-pressure refrigerant gas from the plurality of compressors 14 to the cryopump 12.
The low pressure refrigerant gas discharged from each of the cryocoolers 18 flows from the low pressure port 23 of the cryocooler 18 to the cryocooler low pressure secondary line 34. The refrigerant gas flow merges at the low-pressure merging portion 27 and is then split again into the compressor low-pressure sub-line 33. Due to the forward flow of refrigerant gas toward the low pressure line 28, it is able to flow through the suction side check valve 30. Refrigerant gas is recovered from the compressor low pressure secondary line 33 to the compressor 14 through the suction port 21 of the compressor 14. In this manner, the cryopump system 10 can recover low-pressure refrigerant gas from the cryopump 12 to the plurality of compressors 14.
Fig. 2 is a diagram schematically showing the flow of the refrigerant gas in the cryopump system 10 according to the embodiment. Fig. 2 shows the flow of the refrigerant gas in an abnormal state in which one compressor 14 of the plurality of compressors 14 stops operating for some reason, unlike the case of the normal operation of the cryopump system 10 shown in fig. 1. The compressor 14 may be abnormally stopped under the influence of various external factors (for example, power failure, trouble in cooling equipment, abnormal changes in the surrounding environment such as air temperature, humidity, and air pressure, and the like) that cannot be controlled or are difficult to handle by the cryopump system 10 itself.
When one of the compressors 14 is abnormally stopped, the remaining compressors 14 continue to operate, thereby preventing the cryopump system 10 from stopping operating. An example of a cryopump system 10 having two compressors 14 is shown in fig. 2, and thus, in the case where one of the compressors 14 stops operating, the other compressor 14 continues to operate normally.
For convenience of explanation, the compressor in operation is referred to as the 1 st compressor 14a, and the compressor stopped is referred to as the 2 nd compressor 14 b. The discharge-side check valve 29 and the suction-side check valve 30 attached to the 1 st compressor 14a are referred to as a 1 st discharge-side check valve 29a and a 1 st suction-side check valve 30a, respectively. Similarly, the discharge-side check valve 29 and the suction-side check valve 30 of the 2 nd compressor 14b are referred to as a 2 nd discharge-side check valve 29b and a 2 nd suction-side check valve 30b, respectively.
At this time, as shown in fig. 2, the high-pressure refrigerant gas compressed by the 1 st compressor 14a is output from the discharge port 20 of the 1 st compressor 14a to the high-pressure line 26. The refrigerant gas passes through the high-pressure merging portion 25 from the compressor high-pressure sub-line 31, then branches into the refrigerator high-pressure sub-lines 32, and flows into the high-pressure ports 22 of the refrigerators 18. The refrigerant gas can flow through the 1 st discharge-side check valve 29a due to the forward flow of the refrigerant gas toward the high-pressure line 26.
On the other hand, since the 2 nd compressor 14b stops operating, the refrigerant gas is not discharged from the discharge port 20 of the 2 nd compressor 14 b. Therefore, the 2 nd discharge-side check valve 29b has a lower refrigerant gas pressure on the upstream side in the forward direction than on the downstream side in the forward direction, and the 2 nd discharge-side check valve 29b is closed. Therefore, the 2 nd discharge-side check valve 29b blocks the refrigerant gas from flowing backward through the compressor high-pressure sub-line 31 toward the 2 nd compressor 14 b.
In this way, the high-pressure refrigerant gas can be supplied from the 1 st compressor 14a to the refrigerator 18 through the high-pressure line 26. Also, the reverse flow from the 1 st compressor 14a through the high-pressure line 26 toward the 2 nd compressor 14b can be prevented from occurring.
The low pressure refrigerant gas discharged from the refrigerator 18 is output from the low pressure port 23 of the refrigerator 18 to the low pressure line 28. The refrigerant gas flows from the refrigerator low-pressure sub-line 34 into the suction port 21 of the 1 st compressor 14a through the low-pressure merging portion 27 and the compressor low-pressure sub-line 33. The refrigerant gas can flow through the 1 st suction side check valve 30a due to the forward flow of the refrigerant gas toward the low pressure line 28.
On the other hand, since the 2 nd compressor 14b stops operating, the refrigerant gas is not sucked from the suction port 21 of the 2 nd compressor 14 b. Therefore, regarding the 2 nd suction side check valve 30b, the pressure on the downstream side in the forward direction thereof becomes higher than the pressure on the upstream side in the forward direction, and the 2 nd suction side check valve 30b is closed. Therefore, the 2 nd suction side check valve 30b blocks the refrigerant gas from flowing backward toward the 2 nd compressor 14b through the compressor low pressure sub-line 33.
In this way, the low-pressure refrigerant gas can be recovered from the refrigerator 18 to the 1 st compressor 14a through the low-pressure line 28. Further, the reverse flow from the 2 nd compressor 14b to the 1 st compressor 14a through the low pressure line 28 can be prevented from occurring.
In addition, the discharge port 20 and the suction port 21 of the compressor 14 are normally equalized during the shutdown. That is, the discharge port 20 and the suction port 21 both have an average pressure of high pressure and low pressure (for example, if the high pressure is 2MPa and the low pressure is 0.6MPa, the average pressure is 1.3 MPa). Therefore, both the 2 nd discharge-side check valve 29b and the 2 nd suction-side check valve 30b have the outlet pressure significantly higher than the inlet pressure, and are reliably closed by the pressure difference.
Fig. 3 is a control block diagram of the cryopump system 10 according to the embodiment. The relevant portions of the cryopump system 10 are shown in fig. 3, and details of the interior of one of the cryopumps 12 are shown, while the other cryopumps 12 are identical and are therefore omitted from illustration. Similarly, the plurality of compressors 14 are shown only in detail inside one compressor, and the other compressors 14 are the same as those described above, and therefore, the illustration thereof is omitted.
The control structure of the cryopump system 10 can be realized by hardware components or circuits such as a CPU and a memory of a computer, and can be realized by software components such as a computer program, and a functional block diagram realized by cooperation of these components is appropriately shown in fig. 3. Those skilled in the art will appreciate that the functional block diagrams may be implemented in various forms depending on a combination of hardware and software.
The cryopump system 10 includes a cryopump controller (hereinafter, also referred to as a CP controller) 100. CP controller 100 controls cryopump 12 (i.e., refrigerator 18) and compressor 14. The CP controller 100 includes: a CPU that executes various arithmetic processes, a ROM that stores various control programs, a RAM that is a work area for storing data or executing programs, an input/output interface, a memory, and the like. The CP controller 100 is configured to be able to communicate with a higher-level controller (not shown) for controlling a vacuum processing apparatus in which the cryopump 12 is installed.
The CP controller 100 is provided separately from the cryopump 12 and the compressor 14. CP controller 100 is communicatively coupled to cryopump 12 and compressor 14. The cryopump 12 includes: an IO module 50 for processing input and output for communication with the CP controller 100. The CP controller 100 may be integrally mounted on either the cryopump 12 or the compressor 14.
As described above, the CP controller 100 is communicatively connected to the IO module 50 of each cryopump 12. The IO module 50 includes a refrigerator inverter 52 and a signal processing unit 54. The refrigerator 18 includes a drive source (i.e., a refrigerator motor 56) that drives a thermodynamic cycle of the refrigerator 18. The chiller inverter 52 adjusts electric power of a predetermined voltage and frequency supplied from an external power source (e.g., a commercial power source) and supplies the adjusted electric power to the chiller motor 56. The voltage and frequency to be supplied to the chiller motor 56 are controlled by the CP controller 100. The cryopump 12 is provided with a cryopanel temperature sensor 58. The cryopanel temperature sensor 58 measures the temperature of the cold plate of the refrigerator 18 and/or the cryopanel 16 (refer to fig. 1).
The CP controller 100 specifies the command control amount according to the sensor output signal. The signal processing unit 54 transfers the command control amount transmitted from the CP controller 100 to the chiller inverter 52. For example, the signal processing unit 54 converts the command signal from the CP controller 100 into a signal that can be processed by the chiller inverter 52, and sends the signal to the chiller inverter 52. The command signal includes a signal indicative of the operating frequency of the chiller 18. The signal processing unit 54 then transfers the outputs of the various sensors of the cryopump 12 to the CP controller 100. For example, the signal processing unit 54 converts the sensor output signal into a signal that can be processed by the CP controller 100 and transmits the signal to the CP controller 100.
Various sensors including a cryopanel temperature sensor 58 are connected to the signal processing unit 54 of the IO module 50. The cryopanel temperature sensor 58 periodically measures the temperature of the cryopanel 16 and outputs a signal indicative of the measured temperature value. The measured temperature signal of the coldplate temperature sensor 58 is input to the CP controller 100 at predetermined intervals, and the temperature measurement value is stored and held in a predetermined storage area of the CP controller 100.
The operating frequency (also referred to as an operating speed) of the chiller 18 represents the operating frequency or rotational speed of the chiller motor 56, the operating frequency of the chiller inverter 52, the frequency of the thermodynamic cycle (e.g., a refrigeration cycle such as a GM cycle) of the chiller 18, or any one of these. The frequency of the thermodynamic cycle refers to: number of thermodynamic cycles per unit time performed in the refrigerator 18.
The CP controller 100 is configured to determine (e.g., according to PID control) the operating frequency of the chiller 18 as a function of the deviation between the target cooling temperature and the measured temperature of the cryopanel. The CP controller 100 outputs the determined operating frequency to the chiller inverter 52. The chiller inverter 52 converts the input power into power having an operating frequency input from the CP controller 100. The input power to the chiller inverter 52 is supplied from a chiller power supply (not shown). The chiller inverter 52 outputs the converted electric power to the chiller motor 56. In this manner, the chiller motor 56 operates at the operating frequency determined by the CP controller 100 and output from the chiller inverter 52.
In the event of an increase in the thermal load of the cryopump 12, the temperature of the cryopanel 16 may increase. If the measured temperature of the coldplate temperature sensor 58 is greater than the target temperature, the CP controller 100 increases the operating frequency of the chiller 18. As a result, the frequency of the thermodynamic cycle in the refrigerator 18 also increases (i.e., the refrigerating capacity of the refrigerator 18 increases), and the cryopanel 16 is cooled toward the target temperature. Conversely, if the measured temperature of the cryopanel temperature sensor 58 is lower than the target temperature, the operating frequency of the refrigerator 18 decreases, resulting in a decrease in the cooling capacity, and the cryopanel 16 increases in temperature toward the target temperature. In this way, the temperature of the cryopanel 16 can be maintained within a temperature range near the target temperature. This control contributes to reducing the power consumption of the cryopump 12 because the operating frequency of the refrigerator 18 can be appropriately adjusted according to the thermal load.
In this way, the flow rate of the refrigerant gas used for cooling the cryopanel of the refrigerator 18 is changed in accordance with the thermal load of the cryopump 12, and the temperature of the cryopanel 16 is maintained at the target temperature. If the flow rate of the refrigerant gas supplied from the compressor 14 to the refrigerator 18 is insufficient, the cooling capacity of the refrigerator 18 does not sufficiently increase even if the operating frequency of the refrigerator 18 increases. Therefore, the cryopump system 10 according to the embodiment is configured to be able to change the refrigerant gas discharge flow rate from the compressor 14. An example of such compressor control will be described below.
The compressor 14 includes a compressor controller 60, a compressor inverter 62, a compressor motor 64, a 1 st pressure sensor 66, and a 2 nd pressure sensor 68. The compressor 14 is configured as, for example, a scroll pump, a rotary pump, or another pump that boosts the pressure of the refrigerant gas, and the compressor motor 64 is a drive source that drives the compressor 14.
As in the case of the refrigerator 18, the compressor controller 60 determines the operating frequency of the compressor 14, and outputs the determined operating frequency to the compressor inverter 62. The compressor inverter 62 converts input power in accordance with the operating frequency input from the compressor controller 60, and outputs the converted power to the compressor motor 64. As such, the compressor motor 64 operates at an operating frequency determined by the compressor controller 60 and output from the compressor inverter 62. Here, the operating frequency of the compressor 14 is, for example: the operating frequency of the compressor inverter 62, the operating frequency or speed of the compressor motor 64.
Inside the compressor 14, a 1 st pressure sensor 66 is provided to measure the high pressure of the cryopump system 10 (e.g., the pressure of the high pressure line 26), and a 2 nd pressure sensor 68 is provided to measure the low pressure of the cryopump system 10 (e.g., the pressure of the low pressure line 28). The 1 st pressure sensor 66 and the 2 nd pressure sensor 68 each periodically measure the pressure of the refrigerant gas, and output a signal indicating the measured pressure value to the compressor controller 60. The compressor controller 60 may also send a measured pressure signal and/or the operating frequency of the compressor 14 to the CP controller 100.
The compressor controller 60 is configured to control the operating frequency of the compressor 14 based on the measured pressure of the 1 st pressure sensor 66 and/or the 2 nd pressure sensor 68. For example, the compressor controller 60 is configured to determine the operating frequency of the compressor 14 (e.g., based on PID control) as a function of the deviation between the pressure difference between the discharge side and the suction side of the compressor 14 and the target pressure difference. Such control of the compressor 14 is sometimes referred to as "pressure difference constant control". Further, the target value of the pressure difference may be changed as necessary during execution of the pressure difference constant control. In the pressure difference constant control, the compressor controller 60 obtains a pressure difference between the measured pressure of the 1 st pressure sensor 66 and the measured pressure of the 2 nd pressure sensor 68. The compressor controller 60 determines the operating frequency of the compressor 14 in such a manner that the measured pressure difference coincides with the target pressure difference value. If the measured pressure difference is greater than the pressure difference target value, the compressor controller 60 decreases the operating frequency, and if the measured pressure difference is less than the pressure difference target value, the operating frequency is increased.
The flow rate of the refrigerant gas used for cooling the cryopanel of the refrigerator 18 is proportional to the operating frequency of the refrigerator 18, and can be determined, for example, from the product of the internal volume of the refrigerator 18 and the operating frequency of the refrigerator 18. The greater the operating frequency of the refrigerator 18, the greater the flow rate of the refrigerant gas supplied from the compressor 14 to the refrigerator 18. At this time, if the operating frequency of the compressor 14 is low and the supply of the refrigerant gas from the compressor 14 is insufficient, the pressure on the discharge side of the compressor 14 decreases. As the operating frequency of chiller 18 increases, the flow rate of refrigerant gas recovered from chiller 18 to compressor 14 also increases. At this time, if the operating frequency of the compressor 14 is low, the compressor 14 cannot sufficiently recover the refrigerant gas discharged from the refrigerator 18, and therefore the pressure on the suction side of the compressor 14 increases. In this way, an increase in the operating frequency of the refrigerator 18 reduces the pressure difference between the discharge side and the suction side of the compressor 14. Conversely, a decrease in the operating frequency of the refrigerator 18 increases the pressure difference between the discharge side and the suction side of the compressor 14.
According to the constant control of the pressure difference of the compressor 14, if the load of the cryopump 12 increases and the operating frequency of the refrigerator 18 increases, the operating frequency of the compressor 14 increases to suppress a decrease in the pressure difference between the discharge side and the suction side of the compressor 14, and the supply of the refrigerant gas from the compressor 14 to the refrigerator 18 also increases. On the other hand, when the load of the cryopump 12 decreases and the operating frequency of the refrigerator 18 decreases, the operating frequency of the compressor 14 decreases, and the supply of the refrigerant gas from the compressor 14 to the refrigerator 18 is also suppressed. Since the operating frequency of the compressor 14 can be appropriately adjusted according to the load of the cryopump system 10, the constant pressure difference control contributes to reduction of the power consumption of the cryopump system 10.
However, a typical cryopump system may be configured with only one compressor. In contrast, in the cryopump system 10 according to the embodiment, not only one compressor 14 but also another compressor 14 is additionally provided. The cryopump system 10 has redundancy for the compressor 14. The two compressors 14 are operated simultaneously as refrigerant gas supply sources for the cryopump 12 during operation of the cryopump system 10.
The sum of the refrigerant gas supply capacities of the two compressors 14 is set to be not less than the sum of the refrigerant gas flow rates required for the respective refrigerators 18 of the cryopump 12 to perform cryopanel cooling. Here, the refrigerant gas supply capacity of the compressor 14 is, for example: the maximum discharge flow rate of the compressor 14 achieved when the compressor 14 is operated at the maximum operating frequency. The refrigerant gas flow rate required for the refrigerator 18 is, for example: the refrigerant gas flow rate used by the refrigerator 18 when the refrigerator 18 is operating at the maximum operating frequency. Therefore, the refrigerant gas supply capacities of the two compressors 14 are represented by Qc1、Qc2And refrigerant gas flow rates required for the two refrigerators 18 are represented by qr1、qr2The following relationship holds.
Qc1+Qc2≥qr1+qr2
By setting the refrigerant gas supply capacity of the compressors 14 in this manner, it is possible to supply sufficient refrigerant gas to the two refrigerators 18 by simultaneous operation of the two compressors 14. Since the shortage of the refrigerant gas in the refrigerator 18 can be avoided, the cryopanel 16 can be maintained at the target temperature, and the operation of the cryopump system 10 can be continued.
In the cryopump system 10 according to the embodiment, each of the two compressors 14 is set so that the refrigerant gas supply capacity of the compressor 14 is not lower than the sum of the refrigerant gas flow rates required for the refrigerators 18 of the cryopumps 12 to cool the cryopanels. That is, the cryopump system 10 also satisfies the following relationship.
Qc1≥qr1+qr2And Qc2≥qr1+qr2
Assume a situation in which one compressor 14 stops operating for some reason as described above with reference to fig. 2. However, the cryopump system 10 can supply a sufficient amount of refrigerant gas to the two refrigerators 18 from the other compressor 14 that is not stopped. As described above, even in a state where one compressor 14 is not operated, the cryopump system 10 can maintain the cryopanel 16 of each cryopump 12 at the target temperature, and the cryopump system 10 can be continuously operated.
The structure of the cryopump system 10 according to the embodiment can be generalized as follows. The cryopump system 10 includes M cryopumps 12 and N +1 compressors 14, and the N +1 compressors 14 are connected in parallel to supply refrigerant gas to the refrigerators 18 of the cryopumps 12 and are operated simultaneously. Wherein M, N are each positive integers. For example, the positive integer M may be 1 or more, 2 or more, 3 or more, 5 or more, or 10 or more. The positive integer M may also be, for example, 20 or less, 10 or less, 5 or less, or 3 or less positive integer. The positive integer N may be, for example, 1 or more than it, 2 or more than it, 3 or more than it, 5 or more than it, or 10 or more than it. The positive integer N may also be, for example, 20 or less, 10 or less, 5 or less, or 3 or less positive integer.
Each of N +1 compressors 14 is set so that the total of refrigerant gas supply capacities of the N compressors 14 is not less than the total of refrigerant gas flow rates required for the refrigerators 18 of the cryopumps 12 to perform cryopanel cooling. Therefore, the refrigerant gas supply capacities of the N +1 compressors 14 are represented by Qc1、Qc2、……、QcN、QcN+1And the flow rate of refrigerant gas necessary for the M refrigerators 18 is represented by qr1、qr2、……、qrMIn this case, the cryopump system 10 satisfies all of the following relationships.
ΣQc-Qc1≥Σqr
ΣQc-Qc2≥Σqr
……
ΣQc-QcN≥Σqr
ΣQc-QcN+1≥Σqr，
Here, ∑ Qc ═ Qc1+Qc2+……+QcN+QcN+1(i.e., the sum of the refrigerant gas supply capacities of the N +1 compressors 14), and Σ qr1+qr2+……+qrM(i.e., the sum of the flow rates of the refrigerant gas necessary for the M refrigerators 18). Therefore, the left side of the above equations represents the sum of the refrigerant gas supply capacities of any N compressors 14 out of the N +1 compressors 14.
In this way, even if one of the compressors 14 is stopped for some reason, the cryopump system 10 can supply a sufficient amount of refrigerant gas to the refrigerators 18 of the M cryopumps 12 from the remaining compressors 14 that are not stopped. The cryopump system 10 can maintain the cryopanel 16 of each cryopump 12 at a target temperature even while a certain compressor 14 is stopped, and can continue the operation of the cryopump system 10.
In a normal condition where all of the N +1 compressors 14 are operating, the cryopump system 10 includes one extra compressor 14. Therefore, the refrigerant gas flow rate to be supplied by each of the N +1 compressors 14 can be smaller than in the case where the cryopump system 10 includes only the N compressors 14. Therefore, according to the cryopump system 10 of the embodiment, each compressor 14 can be operated at a low load (i.e., an operation frequency), which contributes to an extension of the life of the compressor 14.
The cryopump system 10 includes a control unit (for example, the compressor controller 60 or the CP controller 100) that controls the N +1 compressors 14. The control unit is configured to control each of the compressors 14 to increase the supply of the refrigerant gas to each of the N compressors 14 that are simultaneously operated, when the number of the compressors 14 that are simultaneously operated is decreased from N +1 to N.
A preferable example of such compressor control is the above-described constant pressure difference control. In consideration of a situation where any one of the plurality of compressors 14 stops operating, the sum of the refrigerant gas supply flow rates decreases by the amount corresponding to the one compressor 14 that stops operating, and therefore the pressure of the high-pressure line 26 may decrease and the pressure of the low-pressure line 28 may increase. That is, when one of the compressors 14 stops operating, the pressure difference between the discharge side and the suction side of each of the remaining compressors 14 tends to decrease. According to the pressure difference constant control, the operation frequency of each compressor 14 is increased to restore the drop of the pressure difference to the target pressure difference. In this way, the cryopump system 10 can control the compressors 14 so that the refrigerant gas supply to each of the N compressors 14 that are simultaneously operated is increased when the number of the compressors 14 that are simultaneously operated is reduced from N +1 to N.
The piping system 24 of the cryopump system 10 includes a discharge-side check valve 29 and a suction-side check valve 30 for each compressor 14. In this way, even if any one of the plurality of compressors 14 stops operating, the refrigerant gas can be prevented from flowing backward from the remaining compressor 14 in operation toward the compressor 14 that is stopped. Since the discharge-side check valve 29 and the suction-side check valve 30 are mechanically closed according to the difference in pressure, the compressor 14 that is stopped can be naturally disconnected from the cryopump system 10 without electrical control.
In particular, the discharge-side check valve 29 and the suction-side check valve 30 may be general-purpose check valves that operate according to the pressure difference between the inlet and the outlet, and such check valves have a relatively simple structure and are inexpensive. Compared to the case where the electric control valve for disconnection is provided on the piping system 24, the structure of the piping system 24 can be further simplified, which contributes to reduction in the manufacturing cost of the cryopump system 10. Further, the piping system 24 may be provided with a control valve configured to block the refrigerant gas from flowing back toward the compressor 14 that is stopped, instead of the discharge-side check valve 29 and/or the suction-side check valve 30, as necessary.
The piping system 24 includes a pair of detachable joints 35 provided on both sides of the discharge-side check valve 29. The piping system 24 includes another set of detachable joints 35 provided on both sides of the suction-side check valve 30. In this way, the worker can detach the compressor 14, which has been stopped, from the cryopump system 10 and perform maintenance. Alternatively, the operator can remove the compressor 14 from the cryopump system 10 and replace it with a new compressor or another compressor that has been serviced. This is convenient because the cryopump system 10 can be continuously operated and the maintenance work can be performed.
The present invention has been described above with reference to the embodiments. The present invention is not limited to the above-described embodiments, and those skilled in the art will understand that various design changes can be made, various modifications can be made, and such modifications are also included in the scope of the present invention. Various features described in one embodiment can be applied to other embodiments. The new embodiment generated by the combination has the effect of the combined embodiments.
In the above embodiment, the refrigerant gas flow rate required for the refrigerator 18 is, for example: the refrigerant gas flow rate used by the refrigerator 18 when the refrigerator 18 is operating at the maximum operating frequency. In fact, it is rare that the maximum operating frequency of the refrigerator 18 is required only when the cryopump system 10 is started (in this case, the refrigerator 18 is desired to be cooled from room temperature to a cryogenic temperature at a high speed). In this way, the refrigerant gas flow rate required for the refrigerator 18 in a state in which the cryopump system 10 is stably operated after being started up is not necessarily large. Thus, the refrigerant gas flow required by chiller 18 may also refer to: the refrigerant gas flow rate used by the refrigerator 18 when the refrigerator 18 is operated at a certain operation frequency threshold. The operating frequency threshold is less than the maximum operating frequency. In this way, the refrigerant gas supply capacity of the compressor 14 can be designed to be lower, and therefore, the size of each compressor 14 and the manufacturing cost of the cryopump system 10 can be reduced.
The cryopump system 10 may also include at least one cryopump 12 and more than N +1 compressors 14 (e.g., N +2 or N +3 compressors 14) operating simultaneously. In regard to any N compressors 14 among the N +1 compressors 14, the total of the refrigerant gas supply capacities of the N compressors 14 is set to be not less than the total of the refrigerant gas flow rates required for the refrigerators 18 of the at least one cryopump 12 to perform cryopanel cooling. In this way, the compressors 14 of the cryopump system 10 are further made redundant, and the cryopump system 10 can be continuously operated even if, for example, two or three compressors 14 are stopped.
Alternatively, the remaining compressors 14 beyond the N +1 compressors may be provided in the cryopump system 10 as backup compressors that are not operated simultaneously with the other compressors 14 in the normal state.
Industrial applicability
The present invention can be used in the field of a cryopump system and a method of operating a cryopump system.
Description of the symbols
10-cryopump system, 12-cryopump, 14-compressor, 16-cryopanel, 18-refrigerator, 24-piping, 29-discharge-side check valve, 30-suction-side check valve, 35-detachable joint.
Claims (6)
1. A cryopump system includes:
at least one cryopump, each cryopump including a cryopanel and a refrigerator that cools the cryopanel by adiabatic expansion of a refrigerant gas; and
n +1 compressors connected in parallel with each other in such a manner that a refrigerant gas is supplied to each of the refrigerators and operated simultaneously, wherein N is a positive integer,
the total of refrigerant gas supply capacities of the N compressors is set to be not less than the total of refrigerant gas flow rates required for the cryoplate cooling by the respective refrigerators of the at least one cryopump.
2. The cryopump system of claim 1,
the compressor control system further comprises a control unit which controls the N +1 compressors, and controls each compressor to: when the number of the compressors which are operated simultaneously is reduced from N +1 to N, the refrigerant gas supply of each of the N compressors which are operated simultaneously is increased.
3. The cryopump system of claim 2,
the control unit controls the supply of refrigerant gas to each of the N compressors so that a pressure difference between a discharge side and a suction side of each of the N compressors is constant.
4. The cryopump system of any one of claims 1 to 3,
the system further includes a piping system that connects the refrigerating machines of the cryopumps and the N +1 compressors, and the piping system includes a discharge-side check valve and a suction-side check valve for each of the compressors.
5. The cryopump system of claim 4,
the piping system is provided with:
a set of detachable joints arranged at two sides of the discharge side check valve; and
and the other set of detachable joints is arranged on two sides of the suction side check valve.
6. A method of operating a cryopump system, the method comprising,
the cryopump system includes:
at least one cryopump, each cryopump including a cryopanel and a refrigerator that cools the cryopanel by adiabatic expansion of a refrigerant gas; and
n +1 compressors connected in parallel to each other so that a refrigerant gas is supplied to each of the refrigerators, wherein N is a positive integer,
the method comprises the following steps:
operating the N +1 compressors simultaneously; and
when any one of the N +1 compressors is abnormally stopped, the remaining N compressors are continuously operated,
the total of refrigerant gas supply capacities of the N compressors is set to be not less than the total of refrigerant gas flow rates required for the cryoplate cooling by the cryocoolers of the at least one cryopump.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018130862A JP2020007986A (en) | 2018-07-10 | 2018-07-10 | Cryopump system |
| JP2018-130862 | 2018-07-10 | ||
| PCT/JP2019/026296 WO2020013031A1 (en) | 2018-07-10 | 2019-07-02 | Cryopump system and method for operating cryopump system |
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| Publication Number | Publication Date |
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| CN112334655A true CN112334655A (en) | 2021-02-05 |
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| CN201980040153.XA Pending CN112334655A (en) | 2018-07-10 | 2019-07-02 | Cryopump system and method for operating cryopump system |
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| Country | Link |
|---|---|
| JP (1) | JP2020007986A (en) |
| CN (1) | CN112334655A (en) |
| TW (1) | TWI727363B (en) |
| WO (1) | WO2020013031A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114623065A (en) * | 2020-12-10 | 2022-06-14 | 爱发科低温泵株式会社 | Cryopump and heat insulating structure for cryopump |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR102536332B1 (en) * | 2022-09-23 | 2023-05-26 | 크라이오에이치앤아이(주) | Cryogenic pump system |
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| Publication number | Publication date |
|---|---|
| JP2020007986A (en) | 2020-01-16 |
| TW202006251A (en) | 2020-02-01 |
| WO2020013031A1 (en) | 2020-01-16 |
| TWI727363B (en) | 2021-05-11 |
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