CN114083163A - Remote laser etching triaxial device - Google Patents
Remote laser etching triaxial device Download PDFInfo
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- CN114083163A CN114083163A CN202111364854.4A CN202111364854A CN114083163A CN 114083163 A CN114083163 A CN 114083163A CN 202111364854 A CN202111364854 A CN 202111364854A CN 114083163 A CN114083163 A CN 114083163A
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- transmission mechanism
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- axis
- laser emitter
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- 238000010329 laser etching Methods 0.000 title claims abstract description 26
- 230000007246 mechanism Effects 0.000 claims abstract description 83
- 230000005540 biological transmission Effects 0.000 claims abstract description 80
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 5
- JGRGMDZIEXDEQT-UHFFFAOYSA-N [Cl].[Xe] Chemical compound [Cl].[Xe] JGRGMDZIEXDEQT-UHFFFAOYSA-N 0.000 claims description 4
- VFQHLZMKZVVGFQ-UHFFFAOYSA-N [F].[Kr] Chemical compound [F].[Kr] VFQHLZMKZVVGFQ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 230000036541 health Effects 0.000 abstract description 3
- 230000010354 integration Effects 0.000 abstract description 3
- 230000033001 locomotion Effects 0.000 description 14
- 238000000034 method Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 12
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 10
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 4
- 230000006978 adaptation Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003252 repetitive effect Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000000474 nursing effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a remote laser etching triaxial device, which comprises an X-axis module and a Z-axis module which are arranged on a scanning platform, wherein a Y-axis module is arranged on the Z-axis module and is connected with the Z-axis module through a third transmission mechanism; the X-axis module is provided with an object carrying workbench, and the object carrying workbench is connected with the X-axis module through a first transmission mechanism; the Y-axis module is provided with a laser emitter, and the laser emitter is connected with the Y-axis module through a second transmission mechanism; the first transmission mechanism, the second transmission mechanism and the third transmission mechanism are respectively connected with a motor, the motor is connected with an integrated control module, and the integrated control module is connected with a network IO relay and an upper computer. The remote laser etching triaxial device disclosed by the invention realizes the remote operation of all the operations, greatly improves the integration and the simplicity of the operations, and more importantly, greatly reduces the probability of laser contact of operators and ensures the health of the operators.
Description
Technical Field
The invention belongs to the field of laser etching equipment, and relates to a three-axis device.
Background
The main function of the three-axis device is in the stroke range, and the device can control the movement in the X direction, the Y direction and the Z direction so as to meet the requirements of the process.
In the process of implementing the invention, the inventor finds that at least one of the following technical problems exists in the prior art:
1. looking at the present situation, devices for increasing conductivity of conductive silver paste through laser scanning are few in the market, most devices are temporarily built, and the device does not have the characteristic of triaxial flexible scanning.
2. Human input is required to perform real-time nursing scanning.
3. It is necessary for a person to operate the device in close proximity, as the control system of the device is in a very simple state.
For some laser scanners with other purposes, the three-axis laser scanner also has the advantages of three-axis precise and flexible control, remote operation and the like.
Disclosure of Invention
In view of this, the present invention aims to provide a three-axis device with three axes controlled precisely and flexibly. It is a further object of the present invention to provide a triaxial apparatus that can be remotely operated.
The invention provides a remote laser etching three-axis device, which comprises an X-axis module and a Z-axis module which are arranged on a scanning platform, wherein the Z-axis module is provided with a Y-axis module, and the Y-axis module is connected with the Z-axis module through a third transmission mechanism; the X-axis module is provided with an object carrying workbench, and the object carrying workbench is connected with the X-axis module through a first transmission mechanism; the Y-axis module is provided with a laser transmitter, and the laser transmitter is connected with the Y-axis module through a second transmission mechanism; the first transmission mechanism, the second transmission mechanism and the third transmission mechanism are respectively connected with a motor, the motor is connected with an integrated control module, the integrated control module is connected with a network IO relay, and the network IO relay is connected with an upper computer through signals.
According to one embodiment of the remote laser etching triaxial device, the first transmission mechanism is a lead screw transmission mechanism, the second transmission mechanism is a lead screw transmission mechanism, and the third transmission mechanism is a lead screw transmission mechanism.
According to one embodiment of the remote laser etching triaxial device, the screw transmission mechanism is a ball screw.
According to one embodiment of the remote laser etching triaxial device, the laser emitter is connected with a laser energy controller, and the laser energy controller is connected with the network IO relay.
According to one embodiment of the remote laser etching triaxial device, the network IO relay is a WiFi controller.
According to one embodiment of the remote laser etching triaxial apparatus of the present invention, the lead screw transmission mechanism includes a lead screw shaft and a nut; the X-axis module comprises a first bracket, a screw shaft of the first transmission mechanism is assembled on the first bracket through a bearing, and the object carrying worktable is installed on a nut of the first transmission mechanism;
the Y-axis module comprises a second support, a screw shaft of the second transmission mechanism is assembled on the second support through a bearing, and the laser emitter is installed on a nut of the second transmission mechanism;
the Z-axis module comprises a third support, a screw shaft of a third transmission mechanism is assembled on the third support through a bearing, and the second support is installed on a nut of the third transmission mechanism.
According to one embodiment of the remote laser etching triaxial device, the number of the Z-axis modules is two, and the second support is arranged between the two third supports.
According to one embodiment of the remote laser etching triaxial device, the first bracket is provided with a first guide rail, and a nut of the first transmission mechanism is in sliding fit with the first guide rail; and a second guide rail is arranged on the second support, and a nut of the second transmission mechanism is in sliding fit with the second guide rail.
According to one embodiment of the remote laser etching triaxial apparatus of the present invention, the laser emitter comprises one or more of a krypton-fluorine laser emitter, a xenon-chlorine laser emitter, a nitrogen laser emitter, an argon laser emitter, a helium-neon laser emitter, and a helium-neon laser emitter.
Compared with the prior art, one of the technical schemes has the following advantages:
a) according to one embodiment of the triaxial apparatus of the present invention, the triaxial apparatus can be precisely positioned by controlling the power input of the triaxial apparatus in three axial directions.
b) According to the embodiment of the three-axis device, the aims of accurately controlling the laser intensity, the scanning speed, the scanning time and other parameters can be achieved; meanwhile, the remote control aims to greatly reduce the probability of direct exposure of the operator to the laser so as to reduce the damage of the laser to the eyes of the operator.
c) According to the embodiment of the three-axis device, the conductive silver paste is subjected to laser scanning processing by matching with the laser processor, and the three-axis device can be applied to the fields of improvement of conductivity of silk-screen silver paste on the surface layer of a PCB (printed circuit board), repetitive laser scanning cutting, other laser scanning and the like.
d) The implementation mode of the three-axis device is beneficial to improving the stability and controllability of the conductive silver paste laser scanning process so as to achieve the aims of controlling the light intensity and controlling the scanning speed.
e) According to the embodiment of the three-axis device, the three axes are used for accurate control, the motion can be greatly controlled, the process can be digitalized, the whole laser scanning conductive silver paste process can clearly and quickly find the process optimal point when process details of a specific product are explored, the defects of uneven scanning and fuzzy data caused by manual operation are overcome, and the process parameter reliability is higher.
f) According to one embodiment of the triaxial device, the integrated controller is designed to be matched with the network IO relay, so that remote control can be realized. The integrated controller integrates all control contents inside the controller, and the network IO relay can realize the remote control of all operations through the cooperation of IP communication and the integrated controller, thereby greatly improving the integration and the simplicity of the operations, and more importantly, greatly reducing the probability of the contact of the operators with the laser and ensuring the health of the operators.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on the drawings without inventive efforts.
Fig. 1 is a front view of a preferred embodiment of the triaxial apparatus of the present invention.
Fig. 2 is a schematic perspective view of fig. 1.
Fig. 3 is a schematic diagram of a triaxial apparatus control system according to the present invention.
The labels in the figure are respectively:
100 of the scanning platform, and a scanning platform,
the 110X-axis module is used for carrying out the following steps,
111 a first transmission mechanism for the first transmission mechanism,
112 of the object carrying table, and a control device,
113 a first support frame (113) for supporting the first support frame,
a 120Y-axis module, a light source module,
121 of the second transmission mechanism is provided,
122 a laser light emitter, and a laser light emitter,
123 a second support for the second support, and,
130Z-axis module(s) of the module,
131 of a third transmission mechanism is provided,
132 a third support, and a third support,
210 of the host computer is set up,
220 of the network IO relay,
231 of the integrated control module are connected with each other,
232 laser energy controller.
Detailed Description
The following description is made with reference to the accompanying drawings and a specific embodiment.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it may not be further defined and explained in subsequent figures.
The mainstream technical scheme for improving the conductivity of the conductive silver paste by screen printing the silver paste on the surface layer of the PCB is that a person holds a laser to perform a scanning process, and the defect is that the aim of accurately controlling parameters such as laser intensity, scanning time and scanning speed cannot be fulfilled for the whole process; the close contact of the personnel also increases the harm of the laser to human eyes; in the whole laser industry, as described in CN201920844109.1, an adjusting device of a laser scanning device, the laser scanning device is still in a position where only short-distance operation and adjustment of laser power can be performed to complete the process in cooperation, but the device itself has no flexibility, and can not realize flexible control of three axes, and an operator can not perform remote operation, and can only perform protection operation using labor protection products. The remote laser etching triaxial device in the embodiment can solve the problems in the prior art.
In the invention, the X axis, the Y axis and the Z axis respectively represent a horizontal axis, a vertical axis and a vertical axis in a space rectangular coordinate system.
See fig. 1-3. The remote laser etching three-axis device described in this embodiment includes an X-axis module 110 and a Z-axis module 130 that are installed on the scanning platform 100, a Y-axis module 120 is installed on the Z-axis module 130, and the Y-axis module 120 is connected to the Z-axis module 130 through a third transmission mechanism 131. The X-axis module is a module which is transversely arranged, the Y-axis module is a module which is longitudinally arranged, and the Z-axis module is a module which is vertically arranged.
Referring to fig. 1, an object stage 112 is mounted on the X-axis module 110, and the object stage 112 is connected to the X-axis module 110 through a first transmission mechanism 111; the Y-axis module 120 is provided with a laser emitter 122, and the laser emitter 122 is connected with the Y-axis module 120 through a second transmission mechanism 121.
The main function of the three-axis device is to use a transmission mechanism to perform accurate motion control in the X direction, the Y direction and the Z direction within the stroke range. In this embodiment, the first transmission mechanism 111 is a screw transmission mechanism, the second transmission mechanism 121 is a screw transmission mechanism, and the third transmission mechanism 131 is a screw transmission mechanism.
In this embodiment, the screw transmission mechanism is a ball screw. The ball screw consists of a screw rod, a nut, a steel ball, a preforming piece, a reverser and a dust remover. Its function is to convert the rotary motion into a linear motion, which is a further extension and development of the acme screw.
Of course, the transmission mechanism is not limited to the roller screw, and is not limited to the screw, and may be other mechanisms that linearly reciprocate. In the present embodiment, a screw mechanism, particularly a ball screw, will be described as an example. The ball screw has the characteristics of high precision, reversibility and high efficiency. Through verification, the position precision error of the three-axis device is less than 0.1mm, and the speed precision is less than 0.1 mm/s.
Referring to fig. 1 and 2, the lead screw transmission mechanism includes a lead screw shaft and a nut; the X-axis module 110 includes a first bracket 113, a screw shaft of the first transmission mechanism 111 is mounted on the first bracket 113 through a bearing, and the stage 112 is mounted on a nut of the first transmission mechanism 111.
The ball screw carries the stage 112 to reciprocate in the X direction as a movement in the X direction. It should be appreciated that in a ball screw, the nut moves linearly on the screw shaft, and additional components are required to constrain the nut to prevent rotation of the nut, so that during rotation of the screw shaft, the nut can move linearly and the stage 112 can move on the X-axis. In order to restrain the nut from rotating, a first guide rail (not shown) may be disposed on the first bracket 113, and the nut of the first transmission mechanism 111 is slidably engaged with the first guide rail. Of course, the first guide rail may be directly formed on the first bracket 113.
It should also be understood that, because the object stage 112 is mounted on the nut of the first transmission mechanism 111, the motion constraint on the nut of the first transmission mechanism is also the motion constraint on the object stage 112, and conversely, the motion constraint on the object stage 112 is also the motion constraint on the nut of the first transmission mechanism, that is, the object stage 112 can also be in sliding fit with the first guide rail, so as to ensure that the object stage 112 smoothly and linearly reciprocates on the X-axis module 110 along the X-axis.
The Y-axis module 120 includes a second bracket 123, a screw shaft of the second transmission mechanism 121 is assembled on the second bracket 123 through a bearing, and the laser transmitter 122 is mounted on a nut of the second transmission mechanism 121.
The laser emitter 122 includes one or more of a krypton-fluorine laser emitter, a xenon-chlorine laser emitter, a nitrogen laser emitter, an argon laser emitter, a helium-neon laser emitter, and a helium-neon laser emitter. The laser emitted by the laser emitter 122 includes krypton-fluorine laser (ultraviolet light 248nm), xenon-chlorine laser (ultraviolet light 308nm), nitrogen laser (ultraviolet light 337nm), argon laser (blue light 488nm), argon laser (green light 514 nm), helium-neon laser (green light 543nm), helium-neon laser (red light 633nm) and other lasers with different wavelengths. The laser emitter is not improved, but the existing laser emitter is integrated in a remote laser etching three-axis device, so that the laser can be accurately controlled, even remotely controlled, in the PCB surface layer silver paste silk-screen printing process. In a more specific implementation manner, in this embodiment, the laser emitter parameters are selected as follows: the energy power range is 0-5w, and the minimum laser energy power control precision is 50 mw.
The Y-axis module 120 is located right above the X-axis module 110, and the laser emitted by the laser emitter 122 acts on the PCB on the objective table 112, so that the conductive silver paste on the PCB is subjected to laser scanning treatment, and the conductivity of the silver paste on the surface layer of the PCB is improved. Of course, it can also be used for repetitive laser scanning cutting and other laser scanning of a workpiece on a stage.
The motion constraint of the laser emitter 122 is the same as the motion constraint of the object table 112, and the second guide rail is arranged on the second support 123 or is directly constructed on the second support 123 to constrain the motion of the second transmission mechanism 121 nut or the laser emitter 122, so as to ensure that the laser emitter 122 can only reciprocate linearly on the Y-axis module 120 along the Y-axis direction.
The Y-axis module 120 is mounted above the X-axis module 110 by the Z-axis module 130 as a bracket. In this embodiment, two Z-axis modules 120 are respectively installed on two sides of the X-axis module. The Z-axis module 130 includes a third bracket 132, a screw shaft of the third transmission mechanism 131 is mounted on the third bracket 132 through a bearing, and the second bracket 123 is mounted on a nut of the third transmission mechanism 131. Referring to fig. 1, the left end of the second bracket 123 is connected to the nut of the left Z-axis module 120, the right end of the second bracket 123 is connected to the nut of the right Z-axis module 120, and the second bracket 123 is installed between the two third brackets 132.
See fig. 3. The first transmission mechanism 111, the second transmission mechanism 121, and the third transmission mechanism 131 are respectively connected to motors, and specifically, a screw shaft in the X-axis module is directly or indirectly connected to a power output shaft of the first motor, a screw shaft in the Y-axis module is directly or indirectly connected to a power output shaft of the second motor, and a screw shaft in the Z-axis module is directly or indirectly connected to a power output shaft of the third motor. The control lines of the motors are all integrally connected to the integrated control module 231, and the integrated control module 231 is a module for controlling the motion of all the shafts through relay signals. The integrated control module 231 is connected with a network IO relay 220, the laser transmitter 122 is connected with a laser energy controller 232, and the laser energy controller 232 is connected with the network IO relay 220. The network IO relay 220 is a module for realizing remote control of an upper computer and a control system by an IP protocol. In this embodiment, the network IO relay 220 is a WiFi controller. The network IO relay 220 communicates with the upper computer 210 via an IP protocol. The integrated controller can realize remote control by matching with a network IO relay. The integrated controller integrates all control contents inside the controller, and the network IO relay realizes the remote operation of all operations through the cooperation of IP communication and the integrated controller, thereby greatly improving the integration and the simplicity of the operation, more importantly, greatly reducing the probability of the contact of the operators with laser and ensuring the health of the operators.
In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "up", "down", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The above are only preferred embodiments of the present invention, and it should be noted that the above preferred embodiments should not be considered as limiting the present invention, and the protection scope of the present invention should be subject to the scope defined by the claims. It will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the spirit and scope of the invention, and these modifications and adaptations should be considered within the scope of the invention.
Claims (9)
1. A remote laser etching triaxial device is characterized by comprising an X-axis module and a Z-axis module which are arranged on a scanning platform, wherein the Z-axis module is provided with a Y-axis module which is connected with the Z-axis module through a third transmission mechanism; the X-axis module is provided with an object carrying workbench, and the object carrying workbench is connected with the X-axis module through a first transmission mechanism; the Y-axis module is provided with a laser emitter, and the laser emitter is connected with the Y-axis module through a second transmission mechanism; the first transmission mechanism, the second transmission mechanism and the third transmission mechanism are respectively connected with a motor, the motor is connected with an integrated control module, the integrated control module is connected with a network IO relay, and the network IO relay is connected with an upper computer through signals.
2. The remote laser etching triaxial apparatus of claim 1, wherein the first transmission mechanism is a lead screw transmission mechanism, the second transmission mechanism is a lead screw transmission mechanism, and the third transmission mechanism is a lead screw transmission mechanism.
3. The remote laser etching triaxial apparatus of claim 2, wherein the screw transmission mechanism is a ball screw.
4. The remote laser etching triaxial apparatus of claim 1, wherein the laser emitter is connected to a laser energy controller, and the laser energy controller is connected to the network IO relay.
5. The remote laser etching triaxial apparatus of claim 4, wherein the network IO relay is a WiFi controller.
6. The remote laser etching tri-axial apparatus of claim 2, wherein the lead screw drive mechanism comprises a lead screw shaft and a nut; the X-axis module comprises a first bracket, a screw shaft of the first transmission mechanism is assembled on the first bracket through a bearing, and the object carrying worktable is installed on a nut of the first transmission mechanism;
the Y-axis module comprises a second support, a screw shaft of the second transmission mechanism is assembled on the second support through a bearing, and the laser emitter is installed on a nut of the second transmission mechanism;
the Z-axis module comprises a third support, a screw shaft of a third transmission mechanism is assembled on the third support through a bearing, and the second support is installed on a nut of the third transmission mechanism.
7. The remote laser etching triaxial apparatus of claim 6, wherein there are two Z-axis modules, and the second bracket is mounted between two third brackets.
8. The remote laser etching triaxial apparatus according to claim 6, wherein the first bracket is provided with a first guide rail, and a nut of the first transmission mechanism is in sliding fit with the first guide rail; and a second guide rail is arranged on the second support, and a nut of the second transmission mechanism is in sliding fit with the second guide rail.
9. The remote laser etching triaxial apparatus of claim 1, wherein the laser emitter comprises one or more of a krypton-fluorine laser emitter, a xenon-chlorine laser emitter, a nitrogen laser emitter, an argon laser emitter, a helium-neon laser emitter, and a helium-neon laser emitter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111364854.4A CN114083163A (en) | 2021-11-17 | 2021-11-17 | Remote laser etching triaxial device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111364854.4A CN114083163A (en) | 2021-11-17 | 2021-11-17 | Remote laser etching triaxial device |
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| Publication Number | Publication Date |
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| CN114083163A true CN114083163A (en) | 2022-02-25 |
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| CN202111364854.4A Pending CN114083163A (en) | 2021-11-17 | 2021-11-17 | Remote laser etching triaxial device |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150117597A1 (en) * | 2013-10-24 | 2015-04-30 | Institute Of Nuclear Energy Research Atomic Energy Council, Executive Yuan | Scanning system for three-dimensional imaging |
| CN205344273U (en) * | 2016-01-26 | 2016-06-29 | 河源职业技术学院 | Small -size triaxial engraver |
| WO2018224015A1 (en) * | 2017-06-07 | 2018-12-13 | 李昕昱 | Fully-automatic microscopic scanner |
| KR20190072286A (en) * | 2017-12-15 | 2019-06-25 | (주)엔디케이 | Module changeable type multifunctional apparatus equipped witd triaxis control function |
| WO2021208230A1 (en) * | 2020-04-15 | 2021-10-21 | 上海工程技术大学 | Intelligent assembly control system |
-
2021
- 2021-11-17 CN CN202111364854.4A patent/CN114083163A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150117597A1 (en) * | 2013-10-24 | 2015-04-30 | Institute Of Nuclear Energy Research Atomic Energy Council, Executive Yuan | Scanning system for three-dimensional imaging |
| CN205344273U (en) * | 2016-01-26 | 2016-06-29 | 河源职业技术学院 | Small -size triaxial engraver |
| WO2018224015A1 (en) * | 2017-06-07 | 2018-12-13 | 李昕昱 | Fully-automatic microscopic scanner |
| WO2018223510A1 (en) * | 2017-06-07 | 2018-12-13 | 李昕昱 | Fully automatic microscopic scanner |
| KR20190072286A (en) * | 2017-12-15 | 2019-06-25 | (주)엔디케이 | Module changeable type multifunctional apparatus equipped witd triaxis control function |
| WO2021208230A1 (en) * | 2020-04-15 | 2021-10-21 | 上海工程技术大学 | Intelligent assembly control system |
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