CN114062401A - Sealing structure and scanning electron microscope - Google Patents
Sealing structure and scanning electron microscope Download PDFInfo
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- CN114062401A CN114062401A CN202111567092.8A CN202111567092A CN114062401A CN 114062401 A CN114062401 A CN 114062401A CN 202111567092 A CN202111567092 A CN 202111567092A CN 114062401 A CN114062401 A CN 114062401A
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- 238000007789 sealing Methods 0.000 title claims abstract description 344
- 238000005192 partition Methods 0.000 claims description 20
- 230000009471 action Effects 0.000 claims description 11
- 230000000694 effects Effects 0.000 abstract description 17
- 238000002955 isolation Methods 0.000 abstract description 12
- 230000001066 destructive effect Effects 0.000 abstract description 2
- 125000006850 spacer group Chemical group 0.000 description 11
- 238000006073 displacement reaction Methods 0.000 description 10
- 230000000903 blocking effect Effects 0.000 description 8
- 238000003825 pressing Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 5
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- 238000000034 method Methods 0.000 description 4
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- 238000010276 construction Methods 0.000 description 3
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- 238000004519 manufacturing process Methods 0.000 description 3
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- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
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- 238000010030 laminating Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000000452 restraining effect Effects 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
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Abstract
The application discloses a sealing structure and a scanning electron microscope, which relate to the technical field of vacuum sealing and are used for sealing a conveying channel for an object to enter and exit on a cavity, wherein a fixed sealing surface is arranged on the wall of the cavity around a channel opening of the conveying channel; the sealing structure comprises a sealing component movably connected to the wall of the chamber, the sealing component is provided with a movable sealing surface, the sealing component moves to open or close the conveying channel, and when the channel opening is closed, the movable sealing surface is pressed against and attached to the fixed sealing surface to seal the channel opening. The application provides a seal structure to on the basis of guaranteeing sealed and isolation effect, the switching and the sealed operation of solving passageway among the prior art are not simple and convenient fast enough and cause great destructive problem to vacuum environment, and simultaneously, this structure is applicable to the sealed isolation between two adjacent cavities.
Description
Technical Field
The application relates to the technical field of vacuum sealing, in particular to a sealing structure and further relates to a scanning electron microscope with the sealing structure.
Background
Due to the requirements of functions and applications, various devices are related to partial work in a sealed and isolated chamber, and particularly for the devices which are required to work in a high-vacuum environment all the time, the requirements on vacuum isolation and vacuum sealing are high. For example, a scanning electron microscope is an electron optical instrument, which uses various physical signals excited by a focused electron beam to scan a sample surface line by line to modulate and image. The electron beam needs to work in a high vacuum environment to ensure accurate scanning imaging and ensure working performance. However, each time the sample is taken and placed, that is, the sample enters and exits the high vacuum environment, the vacuum degree in the chamber is damaged, and in order to ensure the vacuum environment in the working process, after the sample is placed in the high vacuum environment, the passage port for the sample to enter and exit the chamber needs to be quickly sealed to form isolation from the external environment. Therefore, in such devices relating to high vacuum working environment, there is a high requirement for the tightness of the passage opening of the high vacuum chamber, and meanwhile, since the transfer passage needs to be opened and closed frequently to take and place the sample, there is a certain demand for the simplicity and rapidity of the opening and closing and sealing operations to prevent the vacuum environment inside the chamber from being damaged for a long time and to a heavy degree.
In the conventional technology, a gate valve is usually installed at a channel opening, a valve hole is communicated with the channel opening to allow articles to enter and exit, and when closing and sealing operations are performed, the valve hole needs to be aligned with a valve cover, the valve hole needs to be aligned and covered, and then fastening operations such as screwing or pressing need to be performed to enable the valve cover to seal the valve hole. This traditional structure technique, not only the operation is not enough simple and convenient quick, and the transfer passage open time is longer when leading to getting to put the sample, and is great to vacuum environment's destructiveness, also easily because of valve gap and the valve opening well just nature not good and the lower problem of leakproofness appears, on the other hand, should carry out switching and sealed structure through the valve and be not applicable to the application that switches on and keep apart between two adjacent cavities.
Disclosure of Invention
In view of this, the present application provides a sealing structure, so as to solve the problem that the opening and closing and sealing operations of the channel in the prior art are not simple, convenient and fast enough to cause great damage to the vacuum environment on the basis of ensuring the sealing and isolating effects, and meanwhile, the structure is suitable for the sealing and isolating between two adjacent chambers. The application also provides a scanning electron microscope with the sealing structure.
In order to achieve the purpose, the invention provides the following technical scheme:
a sealing structure is used for sealing a conveying channel for the inlet and outlet of an object on a chamber, and a fixed sealing surface is arranged on the chamber wall of the chamber and surrounds a channel opening of the conveying channel; the sealing structure comprises a sealing component movably connected to the wall of the chamber, the sealing component is provided with a movable sealing surface, the sealing component moves to open or close the conveying channel, and when the channel opening is closed, the movable sealing surface is pressed against and attached to the fixed sealing surface to seal the channel opening.
Optionally, the sealing member is slidably arranged to be slidably displaced by a pushing or pulling action to switch between the open position and the closed position.
Optionally, an included angle exists between each of the movable sealing surface and the fixed sealing surface and the chamber wall, and the sliding direction of the sealing component is parallel to the extending direction of the chamber wall.
Optionally, a sealing ring arranged around the channel opening in the circumferential direction is arranged between the movable sealing surface and the fixed sealing surface, and when the movable sealing surface blocks the conveying channel, the sealing ring is pressed and seals the channel opening.
Optionally, the sealing device further comprises a constraint surface opposite to and spaced from the fixed sealing surface, and the sealing member is inserted between the fixed sealing surface and the constraint surface when the sealing member blocks the transfer passage, so that the movable sealing surface is pressed against the fixed sealing surface.
Optionally, the transfer device further comprises a partition member hermetically connected to the chamber wall, the stationary sealing surface is formed on the partition member, and a through hole arranged in the thickness direction of the partition member forms the passage port in the stationary sealing surface and communicates with the transfer passage of the chamber.
Optionally, the sealing member and the guide chute for sliding the sealing member are both disposed on or connected to the partition.
Optionally, the guide sliding groove is disposed at two sides of the passage opening, the sealing member includes a sealing plate, two sides of the sealing plate are respectively slidably embedded into the guide sliding groove, a plate surface of the sealing plate, which is opposite to and close to the fixed sealing surface, forms the movable sealing surface, and a section of groove wall of the guide sliding groove forms the constraint surface.
Optionally, a push handle is provided on the sealing member.
The invention also provides a scanning electron microscope which comprises a cavity and a sealing structure, wherein the cavity is the cavity, and the sealing structure is the sealing structure.
According to the technical scheme provided by the application, a fixed sealing surface is arranged on the wall of a chamber of the sealing structure around a channel opening, a sealing part which is movable relative to the fixed sealing surface is arranged, a movable sealing surface is arranged on the sealing part, the movable sealing surface leaves or is attached to the fixed sealing surface along with displacement, the channel can be opened or closed, opening and closing operation is achieved, meanwhile, the movable sealing surface is pressed against and attached to the fixed sealing surface in the position of a closed conveying channel, and the channel opening can be effectively sealed; the movable sealing surface is formed on the movably arranged sealing part, the switching of the conduction or closed sealing state of the conveying channel can be realized by the displacement of the sealing part, the operations such as additional compaction or screwing are not needed, the execution action is simple, convenient, rapid and efficient, the damage degree to the indoor environment can be effectively reduced, the required working condition can be recovered rapidly and efficiently in the subsequent chamber, and the working efficiency is improved; on the other hand, the opening and closing operation can be completed by moving the sealing component, the limitation on the operation space and the operation direction is reduced, so that the sealing structure can be completely applied to the sealing isolation between two adjacent chambers, and the sealing structure has the function of simply and conveniently completing the conduction or quickly sealing and isolating two adjacent specific air pressure environments.
The application also provides a preferable scheme, the sealing part is arranged in a sliding mode, and the sealing part can move in a sliding mode under the pushing and pulling action to switch between the opening position and the closing position.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, it is obvious that the drawings in the following description are only embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic view of the application of a seal structure in an embodiment of the present invention;
FIG. 2 is a schematic cross-sectional view of FIG. 1;
FIG. 3 is a schematic diagram illustrating the separation of the sealing member from the chamber + according to an embodiment of the present invention;
FIG. 4 is a schematic view of a seal structure in an embodiment of the present invention;
FIG. 5 is a schematic view of a seal configuration according to an embodiment of the present invention, shown disassembled at a first angle;
fig. 6 is a schematic diagram illustrating a second angle disassembly of the sealing structure according to the embodiment of the present invention.
In fig. 1-6:
1-chamber, 11-chamber wall, 2-transfer channel, 21-channel mouth, 3-sealing part, 31-sealing plate, 311-moving sealing surface, 32-sealing ring, 33-pushing handle, 4-spacer, 41-inclined projection, 411-fixed sealing surface, 42-second sealing element, 5-guide block, 51-guide runner, 511-constraining surface.
Detailed Description
The application provides a seal structure to on the basis of guaranteeing sealed and isolation effect, the switching and the sealed operation of solving passageway among the prior art are not simple and convenient fast enough and cause great destructive problem to vacuum environment, and simultaneously, this structure is applicable to the sealed isolation between two adjacent cavities. The application also provides a scanning electron microscope with the sealing structure.
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
As shown in fig. 1 to 6, the present embodiment provides a sealing structure for sealing a transfer passage 2 on a chamber 1 for objects to enter and exit, comprising a sealing member 3; the chamber wall 11 is provided or formed with a stationary sealing surface 411, the stationary sealing surface 411 being provided around the passage opening 21 of the transport channel 2, it also being understood that the passage opening 21 of the transport channel 2 opens onto this stationary sealing surface 411; the sealing member 3 is movably connected to the chamber wall 11 and is provided with a moving sealing surface 311. The sealing component 3 can move under the action of pushing and pulling, along with moving, the movable sealing surface 311 leaves or is attached to the fixed sealing surface 411 to open or close the passage port 21, opening and closing operation is achieved, when the sealing component 3 moves to the position of a closed passage, the movable sealing surface 311 is attached to the fixed sealing surface 411 in a pressing and abutting mode, the function of abutting constraint force is achieved, the passage is closed, and the passage port 21 is effectively sealed.
With such an arrangement, on one hand, the sealing structure provided by the embodiment realizes opening, closing and sealing by the separation or pressing and abutting engagement of the two sealing surfaces, and ensures the sealing effect during closing; on the other hand, the sealing part 3 can move under the action of pushing and pulling, the switching position can realize the conduction and the sealing of the transmission channel 2, and no additional other operation is needed, such as screwing or pressing a valve by other parts in the prior art, an operator only needs to push and pull the sealing part 3 to conduct or close the transmission channel 2, the cavity 1 can be opened and closed to finish sample transfer, and the closing and the sealing of the transmission channel 2 are realized synchronously; on the other hand, the sealing component 3 can realize opening, closing and sealing by direct displacement, and the limitation on the operation space and the operation direction is also obviously reduced, so that the sealing structure can be completely applied to the sealing isolation between two adjacent chambers 1 and has the function of simply and conveniently completing the conduction or quickly sealing and isolating two adjacent specific air pressure environments.
The seal structure that this embodiment provided has not only solved prior art, has the cavity 1 that specific atmospheric pressure environment required, and the sealed operation of its passageway is quick simple and convenient firm technical problem inadequately, has still solved between two adjacent cavities 1 that all have specific atmospheric pressure environment requirement, and the realization of being inconvenient for switches on and the technical problem of quick sealed isolation operation, and suitability and practicality are stronger.
The sealing member 3 is movably disposed relative to the chamber wall 11, and in some embodiments, the sealing member 3 may be hinged, for example, the sealing member 3 includes a sealing plate 31 and two hinge shafts connected to two sides of the sealing plate 31, through which the sealing plate 31 is hinged to the chamber wall and can be displaced relative to the stationary sealing surface 411, and the plate surface of the sealing plate 31 forms a movable sealing surface 311; under the push-pull action, the sealing plate 31 rotates or swings to displace, and is switched between two positions of opening the conveying channel 2 and closing and sealing the conveying channel 2, so that conduction and sealing are realized.
In a preferred embodiment provided by the present application, the sealing member 3 is slidably arranged, i.e. slidably connected, with respect to the chamber wall 11, and the sealing member 3 is slidably displaced by pushing up or down or left or right to switch between the positions for opening and closing the passage. By the arrangement, on one hand, the sealing component 3 slides and displaces, and the opening and closing actions are smoothly and quickly executed, so that effective sealing can be quickly realized in simple execution actions, and the working efficiency of high vacuum obtaining of the cavity 1 is improved; on the other hand, the channel is convenient for operators to open and close, the space occupied by the sealing structure is reduced, the sealing structure is more favorable for being applied to the environment of the isolation sealing ring 32 between two adjacent chambers 1, and the size of the device is also favorable for being reduced. Fig. 2 is a schematic cross-sectional view of a seal structure in an embodiment of the present application, in which a seal member 3 is slidably disposed.
In some embodiments, in order to enhance the sealing performance and reduce the wear on the sealing portion, the movable sealing surface 311 and the fixed sealing surface 411 have included angles with the chamber wall 11, that is, both sealing surfaces are disposed in an inclined manner with respect to the chamber wall 11, and in order to enhance the sealing performance, the two inclined angles may be the same, and the two planes are parallel; meanwhile, the sliding direction of the sealing component 3 is parallel to the extending direction of the chamber wall 11, that is, an included angle exists between the two sealing surfaces and the sliding direction of the sealing component 3, and the two sealing surfaces are inclined relative to the sliding direction of the sealing component 3. So set up, on the one hand, the slope seal is realized in the laminating of two inclined planes, more do benefit to the guarantee and improve sealed effect, on the other hand, in the embodiment that sealing member 3 slided and sets up, sealing member 3 sliding displacement, the sealed face of two slopes forms can direct separation or laminating, can not produce stronger relative friction because of the displacement each other, has effectively avoided the condition of frequent wearing and tearing sealing member 3, does benefit to the long-term effective use of seal structure, does benefit to and maintains sealed long-term validity.
In some embodiments, when the smoothness and the flatness of the movable sealing surface 311 and the fixed sealing surface 411 reach high precision standards with high machining precision, a tight fit can be achieved without a sealing member therebetween, and an effective sealing effect is achieved.
In other embodiments, a first seal is disposed between the moving sealing surface 311 and the stationary sealing surface 411, and the first seal is attached to either the moving sealing surface 311 or the stationary sealing surface 411, although the first seal may be disposed on both sealing surfaces. Preferably, the first sealing member is annular and is provided as a sealing ring 32, and the sealing ring 32 is circumferentially provided along the passage opening 21 so as to surround the passage opening 21 in all directions. When the sealing component 3 blocks the conveying channel 2, wherein the movable sealing surface 311 is pressed against the fixed sealing surface 411, which has a strong effect on the sealing ring 32, and tightly adheres to each other on the basis of pressing the deformation of the sealing ring 32, thereby forming an effective sealing effect and effectively sealing the channel opening 21. After the sealing ring 32 is arranged, the sealing effect can be improved, the complexity of the processing technology of the two sealing surfaces can be slightly reduced to a certain degree, the production efficiency is improved, and the effect of reducing the production cost is also achieved. The embodiment that sets up sealing ring 32 combines together with the structure that two above-mentioned sealed faces all inclined to set up, can avoid the displacement to cause more serious wearing and tearing to sealing ring 32, sets up through simple but innovative structure, has realized that seal structure has good durability and the function of sealed long-term validity.
Limited to the opening and closing and sealing operations, only the sealing member 3 needs to be displaced to complete the operation without other operations, and when the sealing member 3 is displaced to the position for blocking the conveying passage 2, the sealing member has the pressing effect on the fixed sealing surface 411 at the same time. Therefore, in the present embodiment, as shown in fig. 2, the sealing structure further includes a restriction surface 511 disposed opposite to and spaced apart from the stationary sealing surface 411, the restriction surface 511 is located on the sliding path of the sealing member 3, and a location area where the sealing member 3 seals the conveying passage 2 is formed between the restriction surface 511 and the chamber wall 11. When the sealing component 3 is displaced to the position for blocking the conveying channel 2, the sealing component is embedded between the fixed sealing surface 411 and the constraint surface 511, and through size matching, a pressing force is generated between the constraint surface 511 and the sealing component 3, so that the movable sealing surface 311 is pressed against the fixed sealing surface 411, and the sealing component is tightly attached to the fixed sealing surface 411 on the basis of extruding the sealing ring 32, and is effectively sealed. So set up, both guaranteed the effective seal of sealing member 3 to transfer passage 2, prevented that the binding power is not enough and lead to the production of the tight condition of sealing, and need not carry out extra operation, push-and-pull sealing member 3 make its displacement can, guarantee to realize only needing can carry out closely effectively sealed function to the passageway under the executive action of push-and-pull. Meanwhile, the structure is reasonable and simple to arrange, and the structural complexity of a larger degree is not increased, so that the required functional requirements are realized on a simple structure, namely a high standard, and the sealing structure integrates the effects of simple and efficient execution, tight sealing, durability, long-term effective sealing and the like.
Of course, other embodiments exist, for example, some embodiments have a magnetic attraction structure between the sealing member 3 and the chamber wall 11, which can generate a strong attraction force, so that although the force required for moving the sealing member 3 from the blocking position needs to be increased, the conventional operation does not generate technical difficulty, does not derive other operations and requirements, and achieves the effect of ensuring the tightness and long-term effectiveness of the seal.
Specifically, the seal member 3 includes a seal plate 31 for covering the passage port 21, and in the embodiment in which the seal ring 32 is connected to the seal plate 31, the seal member 32 is also included. As shown in fig. 2 and 5, the sealing plate 31 may be a block shape with a cross section gradually increasing, and a slope in the trapezoid is used as a plate surface of the sealing plate 31 close to and opposite to the stationary sealing surface 411 and forms the above-mentioned movable sealing surface 311.
The sealing ring 32 may be a sealing ring or a sealing rubber pad. When the sealing ring is used, the sealing plate 31 is provided with a sealing groove into which the sealing ring is inserted, as shown in fig. 5, a notch is formed on the movable sealing surface 311, the diameter of the sealing ring is larger than the depth of the sealing groove, so that part of the sealing ring is inserted into the sealing groove and part of the sealing ring protrudes out of the groove, and when the movable sealing surface 311 is attached to the fixed sealing surface 411, the sealing ring is squeezed to form a tight effective seal for the passage opening 21.
The sealing plate 31 is slidably provided with respect to the chamber wall 11, and a guide rail for sliding the sealing plate 31 may be connected to the chamber wall 11, or a guide runner 51 for sliding the sealing plate 31 may be formed on the chamber wall 11. When the chamber wall 11 is provided with a guide rail, the restriction surface 511 may be provided directly on the chamber wall 11 or may be formed by the surface of a plate connected to the chamber wall 11, the restriction surface 511 and the stationary sealing surface 411 forming a groove into which the sealing plate 31 slides, the restriction surface 511 also being a groove wall of the groove. When the chamber wall 11 is formed with the guide slide groove 51 for the sliding movement of the sealing plate 31, the restriction surface 511 may be formed by a groove wall of the guide slide groove 51 at a position opposite to the stationary sealing surface 411.
One guide sliding groove 51 can be arranged, and the sealing plate 31 is provided with a protrusion extending into the sliding groove to realize sliding connection with the guide sliding groove 51; the direction spout 51 also can be at least two, divide the both sides of being listed as at the closing plate 31, and sliding connection carries out in the direction spout 51 is stretched into respectively to the both sides board end of closing plate 31, so, can guarantee the stationarity that slides, simultaneously, when shutoff transfer passage 2, the direction spout 51 of both sides has formed two constraining surfaces 511, carries out two sides to closing plate 31 and supports, and it has steadily and equilibrium to support, guarantees that closing plate 31 can not produce one side or the partial problem of upwarping.
The guiding sliding grooves 51 may be directly formed on the chamber wall 11, or may be formed on the guiding blocks 5, as shown in fig. 1, the guiding blocks 5 are respectively disposed on two sides of the sealing plate 31, the guiding sliding grooves 51 are respectively disposed on each guiding block 5, the guiding blocks 5 are directly or indirectly connected and fixed with the chamber wall 11, and the sealing plate 31 is slidably connected with the guiding blocks 5.
As shown in fig. 3 and 6, the two side plate ends of the sealing plate 31 are provided with connecting bosses for extending into the guide sliding grooves 51, the connecting bosses are strip-shaped and extend from the top end to the bottom end of the sealing plate 31, so that the connecting area with the guide sliding grooves 51 is increased, and the connecting stability and the displacement stability are enhanced. Meanwhile, the side walls on the two sides of the connecting boss and the plate end faces of the other regions form two butt-joint steps respectively, the two butt-joint steps are just in butt joint with the groove walls on the two sides of the notch of the guide sliding groove 51 and the outer end faces, and the faces abut against the faces, so that the butt-joint accuracy of the sealing plate 31 is improved, and the problem that the sealing plate 31 is inclined and offset to cause movement and jamming is avoided.
The fixed sealing surface 411 may be formed directly on the chamber wall 11, or, in this embodiment, as shown in fig. 1 and fig. 2, the sealing structure is further provided with a partition 4, the partition 4 is used for sealing connection with the chamber wall 11, meanwhile, the partition 4 is provided with a through hole which is through along the thickness direction, the through hole is communicated with the conveying channel 2 of the chamber 1 itself, in other words, the through hole forms part of the conveying channel 2; while stationary sealing surface 411 is formed on partition 4, the opening of the through-hole in stationary sealing surface 411 forms the above-mentioned passage opening 21. The sealing plate 31 is slidably disposed with respect to the spacer 4, and seals and closes the through hole in the spacer 4. With the arrangement, the fixed sealing surface 411 is directly machined on the partition 4, so that machining change of the chamber wall 11 is avoided, and the process complexity is reduced; and, the seal part 3 and guide block 5 formed with the guide runner 51 can all be connected directly on the spacer 4, make up the whole of the hermetically-sealed construction or basically, while using, connect the spacer 4 to fix on cavity wall 11, the whole assembly is fixed, have formed the hermetically-sealed construction that can be used directly on the cavity 1, have the function of flexible application, very easy to produce hermetically-sealed construction in batches, and apply to all kinds of apparatus or devices of different kinds and different specifications.
The partition 4 is connected to the chamber wall 11, and may be fixedly or non-detachably connected, such as by bonding or welding, or detachably connected, such as by screw fastening or snap connection. Whether removable or not, the connection of the through-hole to the transfer channel 2 of the chamber 1 itself needs to be sealed in order to ensure airtightness. Therefore, the side of the partition 4 for connecting with the chamber wall 11 is further provided with a second sealing member 42, and the second sealing member 42 may be a sealing ring or a sealing rubber gasket. Fig. 5 and 6 show a specific structure of the spacer 4 in the embodiment of the present application, wherein the spacer 4 is a plate-shaped block, which may be a spacer, one side of the block is flat and is used for connecting with the chamber wall 11, a sealing groove is provided thereon, a sealing ring is embedded in the groove, the sealing ring extends along the circumferential direction of the through hole and is arranged around the through hole, and when the spacer 4 is connected with the chamber wall 11, the sealing ring is pressed to form an effective sealing isolation for the gap at the connection. The other plate surface of the spacer 4 is provided with or forms the inclined stationary seal surface 411. The whole structure is simple, and the processing and forming are easy.
Because the movable sealing surface 311 and the fixed sealing surface 411 both form an included angle with the guide sliding groove 51, the sealing plate 31 and the spacer 4 may be triangular or trapezoidal, that is, both are provided with an inclined surface, the inclined surface of the spacer 4 forms the fixed sealing surface 411, and the inclined surface of the sealing plate 31 forms the movable sealing surface 311. Alternatively, as shown in fig. 6, the separator 4 has a flat plate shape, and a triangular inclined protrusion 41 is provided on one plate surface, the inclined surface of the inclined protrusion 41 forms a fixed seal surface 411, and a through hole is provided in the inclined protrusion 41. Meanwhile, the guide block 5 may be a strip-shaped rectangular shape, a triangular shape or a trapezoidal shape, and is connected to the partition 4 in a slant surface to slant surface, and the guide chute 51 is extended in a direction parallel to the other surface of the partition 4.
As can be seen from the above description, the two side plate ends of the sealing plate 31 are slidably connected to the guide sliding grooves 51, the sealing plate 31 moves in the guide sliding grooves 51 to open or close the conveying passage 2, and when the conveying passage 2 is closed, the sealing plate is inserted between the restraining surface 511 and the fixed sealing surface 411, and both surfaces are pressed against the sealing plate 31, and the sealing plate 31 can be locked, and when being pushed or pulled by force, the sealing plate 31 is separated from the position. That is, the sealing plate 31 is pressed and restrained by the restraining surface 511 at a position where it blocks the conveying path 2, and is locked thereto, and after moving away from this position, it can smoothly slide in the other groove sections of the guide sliding groove 51 without being pressed by the groove walls on both sides, ensuring smooth execution and perfect functions.
Based on this, the present application provides an embodiment, which is also a specific structure shown in the drawings of the present application, at the position for blocking the conveying channel 2, the sealing and position locking can be performed simultaneously by directly passing through the constraint between the constraint surface 511 and the fixed sealing surface 411 and the sealing plate 31, that is, the sealing plate 31 is inserted between the constraint surface 511 and the fixed sealing surface 411, the distance between the constraint surface 511 and the fixed sealing surface 411 is slightly smaller than the thickness of the corresponding plate section of the sealing plate 31, the two surfaces are pressed against each other, so that the sealing plate 31 is locked at this position, and the movable sealing surface 311 abuts against the fixed sealing surface 411.
Specifically, as shown in fig. 3, in the embodiment in which the partition 4 is provided with the inclined protrusion 41, the stationary seal surface 411 is formed on the inclined protrusion 41, and the guide blocks 5 are elongated and located on both sides of the inclined protrusion 41, respectively, so that the guide slide grooves 51 are located on both sides of the inclined protrusion 41, respectively, and the notches are directed toward the inclined protrusion 41, while the tip of the inclined protrusion 41 covers part of the guide slide grooves 51, that is, part of the stationary seal surface 411 passes over the groove wall of the guide slide grooves 51 opposite to the restriction surface 511, so that the distance between the restriction surface 511 and the stationary seal surface 411 is smaller than the groove width of this section; when the sealing plate 31 is displaced to the position for blocking the transfer passage 2, and is directly inserted between the restriction surface 511 and the stationary seal surface 411, a direct force is generated with the restriction surface 511 and the stationary seal surface 411, and the sealing plate 31 is pressed and restricted, sealing the transfer passage 2, and is also locked thereto. By the arrangement, the structure is reasonable, the constraint effect is direct and effective, and only one constraint effect is needed, so that the situation that indirect locking constraint is set can be avoided; meanwhile, the structure is that the guide runner 51 does not need to be widened, as shown in the drawing, the guide runner 51 and the guide block 5 are very convenient to process, and the restricting section of the sealing plate 31 can be formed by arranging the connecting position with the isolating piece 4 and carrying out staggered intersection with the inclined protrusion 41 with the fixed sealing surface 411.
Of course, other embodiments may be adopted, for example, in the position for blocking the conveying channel 2, the sealing plate 31 may be constrained by the guiding sliding groove 51, that is, the guiding sliding groove 51 reduces the groove width in the section of the constraining surface 511, and presses and constrains the connecting boss, so as to lock the sealing plate 31 in the position for blocking the conveying channel 2, and at the same time, the distance between the constraining surface 511 and the stationary sealing surface 411 is set to be slightly smaller than the thickness of the corresponding plate section of the sealing plate 31, so that the sealing plate 31 is clamped between the constraining surface 511 and the stationary sealing surface 411, and presses the stationary sealing surface 411. Specifically, the entire guide sliding groove 51 is spaced from the fixed seal surface 411, the fixed seal surface 411 is located on one side of the guide sliding groove 51 in the width direction, the guide sliding groove 51 includes a first groove section having a first groove width and a second groove section having a second groove width, the first groove width is larger than the second groove width, the constraint surface 511 is a groove wall of the second groove section opposite to the fixed seal surface 411, and the cross-sectional shape and size of the connection boss on the seal plate 31 are matched with the first groove section and the second groove section, for example, the cross-sections of the guide sliding groove 51 and the connection boss are trapezoidal, tapered, or step hole-shaped. The implementation structure has two constraint effects, one is locking constraint of the second groove section of the guide chute 51 on the displacement aspect of the connecting boss, and the other is extrusion constraint between the constraint surface 511 and the fixed moving surface as well as the sealing plate 31; it is somewhat cumbersome.
As shown in fig. 1, in this embodiment, the sealing plate 31 is further provided with a pushing handle 33 for connecting or pushing the pushing member. So set up, closing plate 31 can be connected the use with promoting the structure, and the displacement need not artifical push-and-pull operation under the effect that promotes the structure, has further reduced the space occupy and the space demand to closing plate 31 opposite side to the space. Compared with other sealing operation modes, the sealing structure is not convenient for sealing a channel between two adjacent chambers 1 due to the defects of large operation amplitude, complex action, large occupied space and the like, and is particularly suitable for sealing and isolating between two adjacent chambers 1. Two sides of the sealing plate 31 are both chambers 1 with specific air pressure environment requirements, a partition plate for isolating the two chambers 1 is provided with a transmission channel 2 for transferring samples between the two chambers 1, and a sealing structure is arranged on the partition plate for opening or blocking the channel; the pushing structure comprises pushing power and a push-pull rod, the push-pull rod is connected with a pushing handle 33 on the sealing plate 31, and the sealing plate 31 can be displaced under the driving of the pushing power. The switch or the operating handle of the push-pull power is arranged outside the two chambers 1, even the push power can be arranged outside the chambers 1, and only the push-pull rod penetrates into the chambers 1 and is connected with the push handle 33 of the sealing plate 31. So set up, need not the manual work and interfere to cavity 1 inside, can not lead to the fact destruction to the environment of cavity 1 inside, can carry out switching on or sealed isolation between two cavities 1, very effectual improvement work efficiency and the simple and convenient degree of work.
On the basis of the sealing structure, the application also provides a scanning electron microscope, which comprises a chamber 1 and a sealing structure, wherein the chamber 1 is the chamber 1 in each embodiment, and the sealing structure is the sealing structure in each embodiment. Since the sem has the chamber 1, and the transmission channel 2 of the chamber 1 is sealed by the sealing structure, the beneficial effects of the sem caused by the sealing structure are please refer to the above contents, and are not described herein again.
The components, devices referred to in this application are meant as illustrative examples only and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the drawings. These components, devices may be connected, arranged, configured in any manner, as will be appreciated by those skilled in the art. Words such as "including," "comprising," "having," and the like are open-ended words that mean "including, but not limited to," and are used interchangeably therewith. The words "or" and "as used herein mean, and are used interchangeably with, the word" and/or, "unless the context clearly dictates otherwise. The word "such as" is used herein to mean, and is used interchangeably with, the phrase "such as but not limited to".
It should also be noted that in the apparatus of the present application, the components may be disassembled and/or reassembled. These decompositions and/or recombinations are to be considered as equivalents of the present application.
The previous description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other aspects without departing from the scope of the application. Thus, the present application is not intended to be limited to the aspects shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
The foregoing description has been presented for purposes of illustration and description. Furthermore, the description is not intended to limit embodiments of the application to the form disclosed herein. While a number of example aspects and embodiments have been discussed above, those of skill in the art will recognize certain variations, modifications, alterations, additions and sub-combinations thereof.
The above description is only exemplary of the present application and should not be taken as limiting the present application, as any modifications, equivalents and the like that are within the spirit and principle of the present application should be included in the scope of the present application.
Claims (10)
1. A sealing arrangement for sealing a transfer channel (2) of a chamber (1) for the ingress and egress of objects, characterized in that a stationary sealing surface (411) is provided on a chamber wall (11) of the chamber (1) around a passage opening (21) of the transfer channel (2); the sealing structure comprises a sealing component (3) movably connected to the chamber wall (11), the sealing component (3) is provided with a movable sealing surface (311), the sealing component (3) moves to open or close the conveying channel (2), and when the channel opening (21) is closed, the movable sealing surface (311) is pressed against and attached to the fixed sealing surface (411) to seal the channel opening (21).
2. A sealing arrangement according to claim 1, characterised in that the sealing member (3) is slidably arranged to be displaced in sliding movement under a pushing and pulling action to switch between an open position and a closed position.
3. A sealing arrangement according to claim 1 or 2, characterised in that the moving sealing surface (311) and the stationary sealing surface (411) are angled with respect to the chamber wall (11), the sliding direction of the sealing element (3) being parallel to the extension direction of the chamber wall (11).
4. A sealing arrangement according to claim 3, characterised in that a sealing ring (32) is arranged between the moving sealing surface (311) and the stationary sealing surface (411) and runs around the passage opening (21), the sealing ring (32) being pressed and sealing the passage opening (21) when the moving sealing surface (311) blocks the transport channel (2).
5. A sealing arrangement according to claim 4, further comprising a confining surface (511) spaced apart from and facing the stationary sealing surface (411), the sealing member (3) being inserted between the stationary sealing surface (411) and the confining surface (511) when closing off the transport channel (2) to press the moving sealing surface (311) against the stationary sealing surface (411).
6. A sealing arrangement according to claim 5, further comprising a partition (4) sealingly connected to the chamber wall (11), the stationary sealing surface (411) being formed on the partition (4), through-holes in the partition (4) being provided in the thickness direction forming the passage openings (21) in the stationary sealing surface (411) and communicating with the transfer channel (2) of the chamber (1).
7. The seal structure according to claim 6, wherein the seal member (3) and a guide runner (51) for sliding movement of the seal member (3) are provided or connected to the partition (4).
8. The seal structure according to claim 7, wherein the guide slide groove (51) is provided with a seal plate (31) which is arranged on both sides of the passage opening (21) and slidably fitted into the guide slide groove (51) on both sides, a plate surface of the seal plate (31) which is opposed to and adjacent to the stationary seal surface (411) forms the moving seal surface (311), and a groove wall of the guide slide groove (51) forms the restriction surface (511).
9. A sealing arrangement according to claim 1, characterised in that the sealing member (3) is provided with a push handle (33).
10. A scanning electron microscope comprising a chamber (1) and a sealing structure, characterized in that the chamber (1) is a chamber (1) according to any one of claims 1 to 9 and the sealing structure is a sealing structure according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111567092.8A CN114062401A (en) | 2021-12-20 | 2021-12-20 | Sealing structure and scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111567092.8A CN114062401A (en) | 2021-12-20 | 2021-12-20 | Sealing structure and scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114062401A true CN114062401A (en) | 2022-02-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111567092.8A Pending CN114062401A (en) | 2021-12-20 | 2021-12-20 | Sealing structure and scanning electron microscope |
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| Country | Link |
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| CN (1) | CN114062401A (en) |
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| JPS6362972A (en) * | 1986-08-30 | 1988-03-19 | Anelva Corp | Gate valve for vacuum vessel |
| US4921213A (en) * | 1988-09-14 | 1990-05-01 | Vat Holding Ag | Valve slide |
| US20010040230A1 (en) * | 1999-11-30 | 2001-11-15 | Woo Sik Yoo | Compact gate valve |
| CN102820247A (en) * | 2011-06-07 | 2012-12-12 | 东京毅力科创株式会社 | Substrate conveying container opening/closing device, lid opening/closing device and semiconductor manufacturing apparatus |
| CN103206552A (en) * | 2012-01-16 | 2013-07-17 | 中国科学院微电子研究所 | Vacuum isolation valve device |
| CN206301757U (en) * | 2016-11-17 | 2017-07-04 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Cavity seal and semiconductor processing equipment |
| CN216900296U (en) * | 2021-12-20 | 2022-07-05 | 北京中科科仪股份有限公司 | Sealing structure and scanning electron microscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5740168A (en) * | 1980-07-30 | 1982-03-05 | Anelva Corp | Gate valve |
| JPS6362972A (en) * | 1986-08-30 | 1988-03-19 | Anelva Corp | Gate valve for vacuum vessel |
| US4921213A (en) * | 1988-09-14 | 1990-05-01 | Vat Holding Ag | Valve slide |
| US20010040230A1 (en) * | 1999-11-30 | 2001-11-15 | Woo Sik Yoo | Compact gate valve |
| CN102820247A (en) * | 2011-06-07 | 2012-12-12 | 东京毅力科创株式会社 | Substrate conveying container opening/closing device, lid opening/closing device and semiconductor manufacturing apparatus |
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