CN114047133A - Optical path adjustable multi-point reflection gas absorption pool - Google Patents

Optical path adjustable multi-point reflection gas absorption pool Download PDF

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Publication number
CN114047133A
CN114047133A CN202210029100.1A CN202210029100A CN114047133A CN 114047133 A CN114047133 A CN 114047133A CN 202210029100 A CN202210029100 A CN 202210029100A CN 114047133 A CN114047133 A CN 114047133A
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China
Prior art keywords
optical path
absorption cell
gas absorption
air chamber
gas
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CN202210029100.1A
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Chinese (zh)
Inventor
王兆伟
王寿林
魏玉宾
张婷婷
李艳芳
宫卫华
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Laser Institute of Shandong Academy of Science
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Laser Institute of Shandong Academy of Science
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Priority to CN202210029100.1A priority Critical patent/CN114047133A/en
Publication of CN114047133A publication Critical patent/CN114047133A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/0303Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/391Intracavity sample

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  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention relates to the technical field of laser spectrum gas sensors, in particular to a multipoint reflection gas absorption cell with an adjustable optical path.A gas chamber is of a rectangular structure, the top of the gas chamber is provided with a gas chamber cover plate, and the center of the gas chamber cover plate is provided with a vent hole; one side of the air chamber is provided with a laser tail fiber interface, the opposite angle of the other side is provided with a photoelectric detector, a group of multi-point reflection light path modules are respectively arranged on the two sides, one multi-point reflection light path module is connected with the adjusting rod and can vertically slide under the driving of the adjusting rod. The invention has the beneficial effects that: the multi-point reflection gas absorption cell with the adjustable optical path adopts a single two-dimensional multi-point reflection optical path, and has a simple structure and easy realization. The total detection optical path is increased in the absorption cell through multiple light beam reflections of the reflection optical path, so that the detection signal-to-noise ratio and the measurement precision are improved; the multiple reflection light path reduces the volume of the absorption cell, thereby reducing the response time of the measurement.

Description

Optical path adjustable multi-point reflection gas absorption pool
Technical Field
The invention relates to the technical field of laser spectrum gas sensors, in particular to a multipoint reflection gas absorption cell with an adjustable optical path.
Background
In recent years, techniques for measuring gas components and concentrations by using the infrared laser spectrum absorption principle have become mature. The measurement precision is continuously improved, the measuring range is continuously enlarged, and the cost is gradually reduced. Tunable Diode Laser Absorption Spectroscopy (TDLAS) utilizes the tunable wavelength of a semiconductor laser, and can completely scan the characteristic absorption peak of gas by tuning the output wavelength of the laser, thereby realizing qualitative identification and quantitative detection of the gas. In order to adapt to environmental conditions of field measurement, measurement equipment is required to be small and precise, namely, the volume of the measurement equipment is required to be smaller as much as possible on the premise of ensuring the measurement precision. It is known that the largest volume in a measurement system is the gas absorption cell. Therefore, if the size of the gas absorption cell is reduced, the volume of the whole detection equipment can be greatly improved. Currently, the commonly used gas absorption cell structures include transmission, reflection, and multiple reflection white cell and herriet cell structures. The two ends of the gas absorption cell with the transmission structure are oppositely irradiated by using the optical fiber collimator or the optical lens, so that the obtained optical path is short, and the high-sensitivity detection of trace gas is not facilitated. The reflecting gas absorption cell can obtain the same optical path as the transmitting gas chamber by installing the reflector at the position of half of the focal length of the collimator. Nowadays, a multi-reflection type gas chamber structure is generally adopted, wherein typical multi-reflection type gas chambers have a White pool and a Herriott pool structure. Therefore, how to increase the length of the measuring optical path and reduce the volume of the gas chamber is a key technical problem to be solved.
The White type gas absorption cell needs three reflectors, and has a complex structure, high assembly and adjustment difficulty and poor stability. While the Herriott cell only needs two mirrors, if a larger optical path is needed, the distance between the two mirrors needs to be increased and the mirror surface needs to be enlarged, which is contrary to the original intention of reducing the volume and increasing the optical path. The light path structure of the gas absorption cell is fixed, and the light path length in the gas chamber cannot be adjusted as required.
Therefore, the application designs a multi-point reflecting gas absorption cell with an adjustable optical path to solve the above problems.
Disclosure of Invention
The invention provides a multipoint reflection gas absorption cell with an adjustable optical path, which is used for overcoming the defects in the prior art.
A multipoint reflection gas absorption cell with an adjustable optical path is characterized in that a gas chamber is of a rectangular structure, a gas chamber cover plate is arranged at the top of the gas chamber, and a vent hole is formed in the center of the gas chamber cover plate; one side of the air chamber is provided with a laser tail fiber interface, the opposite angle of the other side is provided with a photoelectric detector, a group of multi-point reflection light path modules are respectively arranged on the two sides, one multi-point reflection light path module is connected with the adjusting rod and can vertically slide under the driving of the adjusting rod.
Furthermore, in order to better realize the invention, a sintering filter screen is arranged on the vent hole of the air chamber cover plate.
Further, in order to better implement the invention, the shell materials of the air chamber and the air chamber cover plate are metal.
Furthermore, in order to better implement the invention, the multi-point reflection optical path module is formed by connecting a plurality of reflectors end to end in an angle of 45 degrees, a laser optical path enters from a laser tail fiber interface, and the laser optical path is received by the photoelectric detector after being directly reflected by the two groups of multi-point reflection optical path modules.
Further, in order to better implement the present invention, the reflecting mirror is a plane reflecting mirror or a reflecting mirror surface formed by optically polishing and coating a reflecting film on a mirror surface base plate or a reflecting mirror surface composed of reflecting surfaces of a 45 ° reflecting prism.
Further, in order to better realize the present invention, the inner wall of the gas chamber and the inner wall of the chamber cover are coated with black coating for reducing reflected light.
Furthermore, in order to better implement the invention, the laser tail fiber interface is accessed into the air chamber through the laser tail fiber interface after the front-end DFB laser is tuned.
Further, in order to better implement the invention, a lens is arranged in front of one end of the photoelectric detector, which is positioned in the gas chamber.
Furthermore, in order to better realize the invention, the adjusting rod comprises an inner rod fixedly connected with the adjusting rod, one end of the inner rod is fixedly connected with a multi-point reflection light path module, the inner rod is sleeved in the sleeve in a sliding manner through a ball, the outer wall of the sleeve is provided with a plurality of limiting grooves, the inner rod is hinged with a positioning bolt through a hinge, the back of the wedge-shaped end of the positioning bolt is movably connected with the inner rod through a spring, and the front of the wedge-shaped end of the positioning bolt is clamped in the limiting grooves.
The invention has the beneficial effects that:
the multipoint reflection gas absorption cell with the adjustable optical path adopts a single two-dimensional multipoint reflection optical path, and is simple in structure and easy to realize. The total detection optical path is increased in the absorption cell through multiple light beam reflections of the reflection optical path, so that the detection signal-to-noise ratio and the measurement precision are improved; the multiple reflection light path reduces the volume of the absorption cell, thereby reducing the response time of the measurement. The distance between the reflector and the laser is adjusted through the adjusting rod, so that the optical path adjusting function is achieved, the air chamber is more flexible to use, and the gas detection device can be suitable for gas detection occasions with various concentrations. By adopting the transceiving design of the parallel light source and the photoelectric detector with the focusing lens, the precision of the incident angle of the mirror surface is ensured by utilizing the high precision and the size consistency of precision machining; the whole invention design not only reduces the complexity of the production process, but also improves the yield of the product, and is convenient for large-scale production.
Drawings
FIG. 1 is a schematic perspective view of a multi-point reflecting gas absorption cell with adjustable optical path according to the present invention;
FIG. 2 is a schematic view of the structure of a cover plate of a gas chamber of the gas absorption cell according to the present invention;
FIG. 3 is a schematic view of the structure of the adjusting lever of the present invention;
FIG. 4 is a longitudinal cross-sectional view of FIG. 3;
fig. 5 is an enlarged view of a portion of the position bolt of fig. 4.
In the figure, the position of the upper end of the main shaft,
1. laser instrument tail optical fiber interface, 2, air chamber, 3, air chamber inner wall, 4, speculum, 5, photoelectric detector, 6, regulation pole, 7, air chamber apron, 8, air vent, 9, light path schematic line, 10, sintering filter screen, 11, interior pole, 12, sleeve, 13, ball, 14, spacing groove, 15, locating pin, 16, hinge, 17, spring.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the described embodiments are merely a few embodiments of the invention, and not all embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "middle", "upper", "lower", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships conventionally laid out when products of the present invention are used, and are only used for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should be noted that the terms "disposed," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected unless otherwise explicitly stated or limited. Either mechanically or electrically. They may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Some embodiments of the invention are described in detail below with reference to the accompanying drawings. The embodiments described below and the features of the embodiments can be combined with each other without conflict.
Fig. 1-5 show an embodiment of the present invention, in which a plurality of mirrors are used to form a reflection optical path, so as to effectively extend a gas measurement optical path under a limited gas chamber volume, thereby achieving the purpose of increasing measurement accuracy.
In the embodiment, under the condition that the external dimension of the gas measurement equipment is limited, the total length of the measurement optical path is increased, so that the purpose of improving the gas concentration measurement accuracy is achieved. And the size of the optical path can be adjusted as required, so that the gas detection device can be applied to the occasions of gas detection with different concentrations.
In this embodiment, a gas cell 2 consisting of a multi-point reflection optical path module, a laser and a detector is adopted. The multi-point reflection light path module is composed of N reflection elements (plane mirrors or reflection prisms). Each light path is vertical to the adjacent straight light path; and a reflecting mirror 4 forming an angle of 45 degrees with the linear light path is arranged between every two adjacent linear light paths.
Fig. 1 shows a schematic light path diagram with 20 mirrors 4. In order to illustrate the basic concepts and principles of the invention. The gas diffuses into the gas cell 2 through a vent 8 fitted with a sintered metal filter mesh 10, the laser source emerges from 1, is incident on a mirror 4 at an angle of incidence of 45 °, its reflected beam is reflected off the mirror at an angle of 45 ° and is again incident on the other mirror at 45 °. Thereby constantly reflecting to the next mirror. When the light beam passes through the last reflector, the light beam reaches the photoelectric detector 5, the photoelectric detector 5 converts the light signal into an electric signal, and the electric signal is processed by the signal processing circuit to form an output signal with the concentration of the gas to be detected.
FIG. 2 shows a cover plate 7 of the gas chamber with a vent hole 8 for letting gas into the gas chamber; 10 is a sintered filter screen; and 7 is an air chamber cover plate. The gas is diffused into the gas chamber 2 through the sintering filter screen 10, and the sintering filter screen 10 plays a dustproof role.
In the detection of trace and trace gases, a long optical path is needed to improve the detection accuracy, but when the optical path is applied to the detection of a constant gas, the gas absorption is saturated due to the overlong optical path, and the expected detection effect cannot be achieved. Therefore, in the detection of gases having different concentrations, the optical path length of the gas cell can be adjusted as necessary. In the embodiment, the purpose of optical path adjustment is achieved by additionally arranging the adjusting rod 6 on the group of reflectors 4 opposite to the laser. By advancing and retreating the inner rod 11, the reflector 4 advances and retreats, the reflection distance is shortened, and the length of the whole optical path is changed. For explaining the structural features and the action principle, the cross-sectional structure is as shown in fig. 3, and the advancing and retreating of the integral reflecting mirror 4 can be controlled by advancing and pulling out the adjusting rod 6, so that the distance between the two groups of reflecting mirrors is reduced, and the purpose of adjusting the optical path is achieved. When a short optical path is needed for detecting a constant gas, only the adjusting rod 6 needs to be pushed forwards, the inner rod 11 slides more easily with the help of the movable ball 13 fixed in the sleeve 12, the positioning bolt 15 is pressed by the limiting groove 14 and gradually presses the spring 17 to bend downwards, the positioning bolt 15 is compressed into the sleeve 12, and is ejected again when reaching the next limiting groove 14 and clamped in the limiting groove 14; when a long optical path is needed to detect trace gas, when the positioning bolt 15 is compressed into the sleeve 12, the inner rod 11 is connected with the reflector group through the bearing, so that when the adjusting rod drives the inner rod 11 to rotate, the reflector 4 cannot be influenced, the positioning bolt 15 is far away from the limit groove 14 for a certain distance through rotating the adjusting rod 6 so as to keep the inner rod from popping out, and the inner rod can be accurately adjusted into any limit groove through the scale on the inner rod 11 and the positive mark of the adjusting rod 6.
Finally, the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting, and other modifications or equivalent substitutions made by the technical solutions of the present invention by those of ordinary skill in the art should be covered within the scope of the claims of the present invention as long as they do not depart from the spirit and scope of the technical solutions of the present invention.

Claims (9)

1. An optical path adjustable multi-point reflecting gas absorption cell, which comprises a gas chamber (2), and is characterized in that:
the air chamber (2) is of a rectangular structure, an air chamber cover plate (7) is arranged at the top of the air chamber, and a vent hole (8) is formed in the center of the air chamber cover plate (7);
one side of the air chamber (2) is provided with a laser tail fiber interface (1), the opposite angle of the other side is provided with a photoelectric detector (5), a group of multi-point reflection light path modules are respectively arranged on the two sides, one of the multi-point reflection light path modules is movably connected with an adjusting rod (6) and can vertically slide under the driving of the adjusting rod (6).
2. The optical path adjustable multi-point reflecting gas absorption cell according to claim 1, wherein:
and a sintering filter screen (10) is arranged on the vent hole (8) of the air chamber cover plate (7).
3. The optical path adjustable multi-point reflecting gas absorption cell according to claim 1, wherein:
the shell materials of the air chamber (2) and the air chamber cover plate (7) are metal.
4. The optical path adjustable multi-point reflecting gas absorption cell according to claim 1, wherein:
the multipoint reflection light path module is formed by connecting a plurality of reflectors (4) end to end in an angle of 45 degrees, a laser light path enters from a laser tail fiber interface (1), and the laser light path is received by a photoelectric detector (5) after being directly reflected by the two groups of multipoint reflection light path modules.
5. The optical path adjustable multi-point reflecting gas absorption cell according to claim 4, wherein:
the reflecting mirror (4) is a plane reflecting mirror or a reflecting mirror surface formed by optically polishing and coating a reflecting film on a mirror surface bottom plate or a reflecting mirror surface consisting of reflecting surfaces of a 45-degree reflecting prism.
6. The optical path adjustable multi-point reflecting gas absorption cell according to claim 1, wherein:
the inner wall of the gas chamber (2) and the inner wall of the gas chamber cover plate (7) are coated with a black coating for reducing reflected light.
7. The optical path adjustable multi-point reflecting gas absorption cell according to claim 1, wherein:
the laser tail fiber interface (1) is connected into the air chamber (2) through the laser tail fiber interface (1) after being tuned by a front-end DFB laser.
8. The optical path adjustable multi-point reflecting gas absorption cell according to claim 1, wherein:
and a lens is arranged in front of one end of the photoelectric detector (5) positioned in the air chamber (2).
9. The optical path adjustable multi-point reflecting gas absorption cell according to claim 1, wherein:
adjust pole (6) including rather than fixed connection's interior pole (11), the one end of interior pole (11) is passed through the bearing and is rotated and connect a multiple spot reflection light path module, interior pole (11) slide through ball (13) and cup joint inside sleeve (12), the outer wall of sleeve (12) is opened has a plurality of spacing grooves (14), it has gim peg (15) to articulate through hinge (16) on interior pole (11), pole (11) are passed through in spring (17) swing joint in the back of the wedge end of gim peg (15), the front card of the wedge end of gim peg (15) is established in spacing groove (14).
CN202210029100.1A 2022-01-12 2022-01-12 Optical path adjustable multi-point reflection gas absorption pool Pending CN114047133A (en)

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4749276A (en) * 1986-01-23 1988-06-07 Mcdonnell Douglas Corporation Long path absorption cell
KR100664913B1 (en) * 2005-11-24 2007-01-04 충북대학교 산학협력단 Co2 gas measurement equipment having sample cell to adjust length
CN103398950A (en) * 2013-08-20 2013-11-20 天津亿利科能源科技发展股份有限公司 Array-type multi-optical-path system for gas-phase monitoring
EP2993461A1 (en) * 2014-09-07 2016-03-09 Unisearch Associates Inc. Gas cell assembly for absorption spectroscopy
EP3339837A1 (en) * 2016-12-22 2018-06-27 General Electric Technology GmbH Miltipass gas cell with variable optical path lentgh and method for gas analysis
CN108837237A (en) * 2018-07-10 2018-11-20 温州市人民医院 A kind of retractable syringe
CN208476773U (en) * 2018-06-01 2019-02-05 济南盛泰电子科技有限公司 A kind of variable light path gas absorption gas chamber sensor-based system
CN209372679U (en) * 2018-12-27 2019-09-10 天津国阳科技发展有限公司 Long light path sample cell for gas concentration detection
CN111537453A (en) * 2020-04-23 2020-08-14 山东省科学院激光研究所 Two-dimensional multi-point reflection long-optical-path gas sensor probe and gas sensor
CN113820279A (en) * 2021-10-22 2021-12-21 郑州如阳科技有限公司 Long-optical-path gas laser detection absorption cell

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4749276A (en) * 1986-01-23 1988-06-07 Mcdonnell Douglas Corporation Long path absorption cell
KR100664913B1 (en) * 2005-11-24 2007-01-04 충북대학교 산학협력단 Co2 gas measurement equipment having sample cell to adjust length
CN103398950A (en) * 2013-08-20 2013-11-20 天津亿利科能源科技发展股份有限公司 Array-type multi-optical-path system for gas-phase monitoring
EP2993461A1 (en) * 2014-09-07 2016-03-09 Unisearch Associates Inc. Gas cell assembly for absorption spectroscopy
EP3339837A1 (en) * 2016-12-22 2018-06-27 General Electric Technology GmbH Miltipass gas cell with variable optical path lentgh and method for gas analysis
CN208476773U (en) * 2018-06-01 2019-02-05 济南盛泰电子科技有限公司 A kind of variable light path gas absorption gas chamber sensor-based system
CN108837237A (en) * 2018-07-10 2018-11-20 温州市人民医院 A kind of retractable syringe
CN209372679U (en) * 2018-12-27 2019-09-10 天津国阳科技发展有限公司 Long light path sample cell for gas concentration detection
CN111537453A (en) * 2020-04-23 2020-08-14 山东省科学院激光研究所 Two-dimensional multi-point reflection long-optical-path gas sensor probe and gas sensor
CN113820279A (en) * 2021-10-22 2021-12-21 郑州如阳科技有限公司 Long-optical-path gas laser detection absorption cell

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Application publication date: 20220215