CN114034471B - Measuring method for laser light path profile - Google Patents

Measuring method for laser light path profile Download PDF

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Publication number
CN114034471B
CN114034471B CN202111426541.7A CN202111426541A CN114034471B CN 114034471 B CN114034471 B CN 114034471B CN 202111426541 A CN202111426541 A CN 202111426541A CN 114034471 B CN114034471 B CN 114034471B
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laser
micro
target surface
image
light spot
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CN114034471A (en
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曹荣刚
李佳武
马啸
周宇
胡雪仪
李发栋
曹宇曦
张安琪
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Beijing Institute of Technology BIT
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0242Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention provides a measuring method of a laser light path contour, which comprises the following specific processes: setting up a laser path profile measuring system, wherein the system comprises a laser emitter, a guide rail, a micro-motion turntable, a target surface, a movable base, an image sensor and a data processing module; the target surface is arranged on the guide rail through the micro-motion turntable and is aligned with the laser transmitter; the method has the advantages that the spot shape characteristics at a specific distance from the transmitter are obtained, so that the whole light path outline of the laser transmitter is described, the related information between the laser transmitter and the receiving target surface is more conveniently obtained, the spatial characteristics of the laser beam are comprehensively and objectively described, the laser transmitter can be subjected to multi-dimensional angle adjustment, and a calibration basis is provided for later imaging.

Description

Measuring method for laser light path profile
Technical Field
The invention relates to a measuring method of a laser light path contour, and belongs to the technical field of photoelectric measurement.
Background
In research, design and manufacture of laser emitters, the requirements on performance of the laser emitters are strict, including threshold current and power output, modulation gain, relative intensity noise RIN, linear range, in-band flatness, temperature characteristics, line width and alternating current equivalent input impedance, the specification parameters of the emitters determine the spatial performance of the light beams, such as the divergence angle of the light beams, field intensity distribution, beam waist spot size, beam width product, and beam limiting multiplying power diffraction factor M2, etc., and the acquisition of the spatial performance parameters can be deduced on the basis of the acquisition of the laser spot size, so that the size of the laser spot needs to be accurately calculated, and the optical path spatial profile of the laser emitters is further obtained by combining the distance information of the light spot and the emitters.
At present, the laser spot size is obtained by establishing the spot sizes in the X and Y directions under a rectangular coordinate system, and then obtaining the laser light path information on the basis that the spot is an ideal circle, but in actual situations, the spot output by a laser is not always a perfect circle or an ellipse, the spot shape at a specific distance is often an irregular figure similar to a circle, and the edge of the spot is possibly provided with a bulge, a groove, a burr and the like, and the quality of a laser beam cannot be scientifically and accurately reflected by using the beam parameters in the X and Y directions.
Chinese patent application CN110260787a discloses a full angle evaluation and characterization method for laser spot size. By constructing a rectangular coordinate system with the centroid position of the light spot as an origin, according to the relationship between the light spot size and the light intensity second moment, the laser spot sizes in different angular directions passing through the origin are solved, so that the representation of the laser spot sizes in any angular direction with the horizontal direction is realized. However, the measured light spot is limited to a certain place, and if the light path outline of the whole laser transmitter is required to be described, the adjustment is complicated.
Chinese patent application CN111442744a discloses a laser transmitter and a device for calibrating equipment. The invention relates to the field of automobile calibration, and provides a laser transmitter and a device for calibrating calibration equipment, wherein the laser transmitter is arranged on a vehicle and is used for transmitting a laser beam to the calibration equipment of an auxiliary driving system of the vehicle so as to adjust the position of the laser beam relative to the vehicle. However, the invention is limited in the field of automobile maintenance and equipment calibration technology, and can only perform angle adjustment in one dimension, so that the applicability is not strong.
Disclosure of Invention
In view of the above, the present invention provides a method for measuring a laser light path profile, which can accurately measure the laser light path profile.
The technical scheme for realizing the invention is as follows:
a measuring method of laser light path contour comprises the following specific processes:
step one, a laser path contour measurement system is built, wherein the system comprises a laser transmitter, a guide rail, a micro-motion turntable, a target surface, a movable base, an image sensor and a data processing module; the target surface is arranged on the guide rail through the micro-motion turntable and is aligned with the laser transmitter;
step two, continuously adjusting the micro-motion turntable, wherein the image sensor collects the light spot image emitted to the target surface by the laser emitter;
selecting N images from the images acquired by the image sensor by the data processing module, and calculating the centroid corresponding to each selected image facula and the facula outline of each selected image; fusing the mass centers and the light spot contours of the N images to obtain the mass centers and the contours corresponding to the target surface light spot diagrams at the current position;
step four, moving the micro-motion rotary table for multiple times to adjust the distance between the target surface and the laser emitter, and repeating the step two and the step three after each movement; when the number of times of the micro-motion turntable movement reaches Nmax, obtaining the mass center of the Nmax group and the light spot outline, and entering a step five;
and fifthly, fitting a three-dimensional profile of a laser light path by using the centroid and the profile according to the centroid and the profile of the obtained light spots with different distances between the laser transmitter and the micro-motion turntable and taking the distance as a Z axis.
Further, the three steps of the invention select the minimum N images in the facula area.
Further, the third step of the present invention further includes preprocessing the image, where the preprocessing process is as follows: converting a corresponding light spot gray level image captured by an image sensor into a binary image, connecting disconnected pixel points through morphological processing, and if two non-zero connected area pixels exist around a certain pixel point 0, defaulting to 8 for connection, and changing a value of 0 into 1; and then filling the closed area in the image to be 1 value, and removing noise through the operation of etching before expanding.
Further, the guide rail is a marble movable guide rail with scales.
Further, the laser ranging system is used for measuring the distance of the movable micro-motion turntable.
Further, the interval between the adjacent two-time moving micro-motion rotary tables is 0.01m.
Advantageous effects
According to the invention, the spot shape characteristics of the laser transmitter at a specific distance from the transmitter are obtained under the conditions of non-ideal beam quality and irregular spot shape of the laser transmitter, so that the whole light path outline of the laser transmitter is described, the related information between the laser transmitter and the receiving target surface is more conveniently obtained, the spatial characteristics of the laser beam are comprehensively and objectively described, and the laser transmitter can be subjected to multi-dimensional angle adjustment, so that a calibration basis is provided for later imaging.
Compared with the prior art, the laser light path contour measuring method provided by the invention solves the problem of measuring the whole laser light path contour, and has the advantages of simplicity and flexibility in operation and strong practicability.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic diagram of a laser path profile measurement system provided by the present invention.
Fig. 2 is a hardware system block diagram of the laser path profile measuring system provided by the invention.
Fig. 3 is a schematic view of a spot profile according to the present invention.
Fig. 4 is an ideal optical path imaging schematic diagram of a laser provided by the invention.
Fig. 5 is a schematic diagram of actual optical path imaging and distance of a laser according to the present invention.
Fig. 6 is a diagram of actual light spots of different distances of the laser provided by the invention.
Fig. 7 is a graph of the actual optical path profile of the laser provided by the invention.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
It should be noted that, without conflict, the following embodiments and features in the embodiments may be combined with each other; and, based on the embodiments in this disclosure, all other embodiments that may be made by one of ordinary skill in the art without inventive effort are within the scope of the present disclosure.
It is noted that various aspects of the embodiments are described below within the scope of the following claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the present disclosure, one skilled in the art will appreciate that one aspect described herein may be implemented independently of any other aspect, and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method practiced using any number of the aspects set forth herein. In addition, such apparatus may be implemented and/or such methods practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.
An embodiment of the application provides a method for measuring a laser light path profile, which comprises the following steps:
step one, a laser path profile measuring system is built, and as shown in fig. 1, the system comprises a laser transmitter 1, a guide rail 4, a micro-motion turntable 3, a target surface 2, a movable base 5, an image sensor 6 and a data processing module; the target surface is arranged on the guide rail through the micro-motion turntable and is aligned with the laser transmitter;
in the implementation, as shown in fig. 2, the guide rail may be a marble moving guide rail with scales, which provides a precise distance between the laser transmitter and the receiving target surface, and also provides Z-direction information for the final laser three-dimensional profile construction. The micro-motion turntable can be a micro-motion turntable with six degrees of freedom, can realize free adjustment in the direction of X, Y, Z and the rotation direction around X, Y, Z shafts, and can adjust and control the minimum area of the target surface for receiving laser spots. The target surface receives the emitted laser to form a light spot, and the laser can be a high-precision large target surface so as to realize the completion bearing of the laser light spot. The movable base is provided with a pulley and moves with the micro-motion turntable. The image sensor can be a CMOS camera with high frame rate, can record a plurality of images in a short time, and transmit the images to the upper computer to provide images for the later two-dimensional and three-dimensional laser profile construction, and the data processing module can be realized by the lower computer. After the laser path falls down to the system and initially builds, an initialization command is issued to complete collimation and calibration of the laser transmitter and initialization of the CMOS camera.
The whole laser path profile measuring system is shown in fig. 1, and comprises a laser transmitter (1), a high-precision large target surface (2), a micro-motion turntable (3) with six degrees of freedom, a marble material moving guide rail (4) with scales, a moving base (5) and a high-frame-rate CMOS camera (6) for recording light spots, and a lower computer module comprising a PC for carrying out subsequent image analysis and processing. The high-frame-rate CMOS image sensor captures light spots of a laser generator on a high-precision large target surface mounted on the micro-motion turntable, then stores target surface light spot data by using an FPGA, and then continuously moves the distance between the target surface and the laser transmitter on a guide rail to record the data. After the measurement is completed, the image is transmitted to a PC, and the PC analyzes and processes the spot image information under different distances so as to draw the outline graph of the laser light path.
In yet another embodiment of the present application, higher measurement accuracy may be obtained by upgrading the pixels of the target surface image sensor, and it may also be considered that a plurality of small target surfaces are spliced to obtain an overall spot image.
According to the laser distance measuring system, a set of laser distance measuring system can be additionally added to replace a marked marble Dan Daogui, the practicability of the laser distance measuring system can be improved, the distances between light spots with different sizes and laser transmitters can be reversely calculated through corresponding laser path outlines, and the laser distance measuring system can be applied to the situation of distance measurement.
And step two, continuously adjusting the micro-motion turntable, wherein the image sensor acquires the light spot image emitted to the target surface by the laser emitter.
In the implementation, at a fixed distance x0 from the laser transmitter, the position of the micro-motion turntable is fixed, the micro-motion turntable can be a micro-motion turntable with six degrees of freedom, the translational angle of the micro-motion turntable in the X, Y, Z direction and the rotation angle around X, Y, Z are continuously adjusted, and the light spot condition of a high-precision large target surface carried on the micro-motion turntable is acquired through an image sensor.
Selecting the minimum N images in the facula area from the images acquired by the image sensor by the data processing module, and calculating the centroid corresponding to each facula of the selected images and the facula outline of each selected image; and fusing the mass centers and the light spot contours of the N images to obtain the mass centers and the contours corresponding to the target surface light spot graph at the current position, as shown in figure 3. The image with the smallest spot area is chosen here because its area of focused spot is smallest when the laser beam is incident on the lens at normal incidence. In the case of non-normal incidence, the imaging profile of the focused light spot is irregular and the area is large. Ideally, the spot is circular with a radius of:
ω'=λf/πω
wherein ω is the radius of the spot of the laser incident on the laser surface, λ is the wavelength of the incident laser, f is the focal length of the lens, and ω' is the radius of the spot of the condensed light.
In the specific implementation, the target surface light spots rotating in each degree of freedom of the turntable are preprocessed, then 5 light spot graphs with the smallest area in all light spots are screened out, the barycenter coordinates of the light spots are respectively calculated, the average value is calculated, the light spot contours in the 5 light spot graphs are fused, and the barycenter and the contour corresponding to the target surface light spot graphs in the current position are obtained.
The pretreatment process of the target surface light spots rotating in each degree of freedom of the turntable is as follows: the corresponding light spot gray level image captured by the image sensor is converted into a binary image, the disconnected pixel points are connected through morphological processing, and if two non-zero connected area pixels exist around a certain pixel point 0, the pixel point is generally defaulted to be 8 connected, and the value of 0 is changed into 1. The enclosed area in the image is then filled with 1 value, thus essentially obtaining a spot with little noise. Noise is then removed by etching followed by expansion to obtain the desired pattern for the baseline measurement.
The process of calculating the barycenter coordinates of the light spots is as follows: and acquiring a target light spot image, recording the width W (pixel number) and the height H (pixel number) of the target light spot image, taking the upper left corner of the image as an origin of coordinates, taking the horizontal right direction as the positive direction of the x axis, taking the vertical downward direction as the positive direction of the y axis, and establishing a plane rectangular coordinate system. Extracting the coordinates (x i ,y i ) Corresponding light intensity (I) (xi,yi) ) Then the centroid coordinate (x) c ,y c ) The method comprises the following steps:
the mean value of the 5 light spot images is calculated as follows: the centroid coordinates of the five-time spot diagrams obtained in sequence are (x) cj ,y cj ) J=1, 2,3,4,5. Then the centroid corresponding mean (x c ,y c ) The method comprises the following steps:
step four, moving the micro-motion rotary table for multiple times to adjust the distance between the target surface and the laser emitter, and repeating the step two and the step three after each movement; when the number of times of the inching turntable movement reaches Nmax, the mass center of the Nmax group and the light spot outline are obtained, and as shown in fig. 6, the fifth step is entered.
In the implementation, the whole measurement image sensing measurement system device advances for a certain distance, and the fixed distance x0 between the laser transmitter and the micro-motion turntable is adjusted, wherein the interval between two adjacent values is 0.01m, so that x0 is changed within the range of 0-10 m. And repeating the second and third steps every time to obtain and record the centroid (xi, yi) of the light spot, the shape outline (xi, yi)) of the light spot and the distance di between the laser transmitter and the micro turntable.
And fifthly, fitting a three-dimensional profile of a laser light path by using the centroid and the profile according to the centroid and the profile of the obtained light spot with the laser transmitter and the micro-motion turntable at different distances and taking the distance as a Z axis, as shown in fig. 7.
And when the method is specifically implemented, the fourth step is executed, mass centers and light spot shape images of the laser transmitters at different distances from the micro-motion turntable can be obtained, and then the distance is taken as a Z axis, so that the three-dimensional outline of the laser light path is finally obtained. The image of the laser emitter falling on the high-precision large target surface is often not an ideal regular circle or ellipse, as shown in fig. 4-5, but the unique self-characteristics are more beneficial to the final reconstruction of the three-dimensional profile of the laser light path, and the self-characteristics of the laser light spot are analyzed, so that corresponding characteristic points (bulges, grooves, burrs and the like) are identified, the corresponding characteristic points are subjected to the image matching of the light spot at different distances, and the three-dimensional profile of the laser light path is finally drawn.
The three-dimensional laser path contour method provided by the invention realizes real-time on-line rapidness, and the method is a non-contact measurement mode by using a high-frame-rate CMOS image sensor to grasp the laser spot contour at a specific position. The follow-up step-by-step fine motion revolving stage in proper order on the movable guide rail, it is quick convenient to measure, but automatic output laser light path profile two-dimensional and three-dimensional appearance characteristic, and data processing module can adopt the lower computer to realize, can adopt the host computer to image laser light path profile and three-dimensional appearance characteristic, and the host computer is based on image sensing chip formation of image, adopts commercial low-cost digital image sensing chip, and is with low costs, the system upgrade extension of being convenient for.
Finally, it should be noted that the above-mentioned embodiments are only for illustrating the technical solution of the present invention and not for limiting the scope of the present invention, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solution of the present invention may be modified or equivalent replaced without departing from the spirit and scope of the technical solution of the present invention.

Claims (6)

1. The measuring method of the laser light path profile is characterized by comprising the following specific steps:
step one, a laser path contour measurement system is built, wherein the system comprises a laser transmitter, a guide rail, a micro-motion turntable, a target surface, a movable base, an image sensor and a data processing module; the target surface is arranged on the guide rail through the micro-motion turntable and is aligned with the laser transmitter;
step two, continuously adjusting the micro-motion turntable, wherein the image sensor collects the light spot image emitted to the target surface by the laser emitter;
selecting N images from the images acquired by the image sensor by the data processing module, and calculating the centroid corresponding to each selected image facula and the facula outline of each selected image; fusing the mass centers and the light spot contours of the N images to obtain the mass centers and the contours corresponding to the target surface light spot diagrams at the current position;
step four, moving the micro-motion rotary table for multiple times to adjust the distance between the target surface and the laser emitter, and repeating the step two and the step three after each movement; when the number of times of the micro-motion turntable movement reaches Nmax, obtaining the mass center of the Nmax group and the light spot outline, and entering a step five;
and fifthly, fitting a three-dimensional profile of a laser light path by using the centroid and the profile according to the centroid and the profile of the obtained light spot with the laser transmitter and the micro-motion turntable at different distances and taking the distance as a Z axis.
2. The method of claim 1, wherein the three steps select the smallest N images of the spot area.
3. The method of claim 1, wherein the third step further comprises preprocessing the image, the preprocessing comprising: converting a corresponding light spot gray level image acquired by an image sensor into a binary image, and changing a value of 0 into 1 if two non-zero connected area pixels are arranged around a certain pixel point 0; the enclosed area in the image is then filled to a value of 1, and then noise is removed by etching followed by expansion.
4. The method of claim 1, wherein the rail is a graduated marble moving rail.
5. The method of claim 1, wherein the laser ranging system is configured to measure a distance of the moving jog turntable.
6. The method of claim 4 or 5, wherein the interval between two adjacent moving micro-motion turrets is 0.01m.
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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7519502B1 (en) * 2003-09-05 2009-04-14 The United States Of America As Represented By The Secretary Of The Navy Surface profile measurement processing method
CN103090883A (en) * 2013-01-15 2013-05-08 中国电子科技集团公司第二十七研究所 Device and method for calibrating dynamic tracking precision of photoelectric tracking system
CN104966308A (en) * 2015-06-12 2015-10-07 深圳大学 Method for calculating spot size of laser beam
CN109900357A (en) * 2019-03-22 2019-06-18 中国人民解放军国防科技大学 Method and system for measuring large-scale laser spots of target surface
CN110567395A (en) * 2019-09-18 2019-12-13 长春理工大学 Laser spot size edge contour line drawing method
CN110969656A (en) * 2019-12-10 2020-04-07 长春精仪光电技术有限公司 Airborne equipment-based laser beam spot size detection method
CN111964694A (en) * 2020-08-19 2020-11-20 天津大学 Laser range finder calibration method for three-dimensional measurement
CN113137957A (en) * 2021-04-08 2021-07-20 上海力信测量系统有限公司 Laser target auxiliary calibration device, laser target calibration system, laser target auxiliary calibration method and storage medium

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10690486B2 (en) * 2018-07-03 2020-06-23 Amo Development, Llc Water-immersed high precision laser focus spot size measurement apparatus

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7519502B1 (en) * 2003-09-05 2009-04-14 The United States Of America As Represented By The Secretary Of The Navy Surface profile measurement processing method
CN103090883A (en) * 2013-01-15 2013-05-08 中国电子科技集团公司第二十七研究所 Device and method for calibrating dynamic tracking precision of photoelectric tracking system
CN104966308A (en) * 2015-06-12 2015-10-07 深圳大学 Method for calculating spot size of laser beam
CN109900357A (en) * 2019-03-22 2019-06-18 中国人民解放军国防科技大学 Method and system for measuring large-scale laser spots of target surface
CN110567395A (en) * 2019-09-18 2019-12-13 长春理工大学 Laser spot size edge contour line drawing method
CN110969656A (en) * 2019-12-10 2020-04-07 长春精仪光电技术有限公司 Airborne equipment-based laser beam spot size detection method
CN111964694A (en) * 2020-08-19 2020-11-20 天津大学 Laser range finder calibration method for three-dimensional measurement
CN113137957A (en) * 2021-04-08 2021-07-20 上海力信测量系统有限公司 Laser target auxiliary calibration device, laser target calibration system, laser target auxiliary calibration method and storage medium

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
基于扫描成像方法的激光光斑测量系统研制;李宝柱;贾晓东;张永进;;红外与激光工程(S3);200-205 *
深孔内轮廓尺寸光学测量系统;朱文娟;徐春广;周世圆;;机械工程学报;20060515(S1);201-204 *

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