CN114029740A - Welding method for special-shaped materials - Google Patents
Welding method for special-shaped materials Download PDFInfo
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- CN114029740A CN114029740A CN202111539446.8A CN202111539446A CN114029740A CN 114029740 A CN114029740 A CN 114029740A CN 202111539446 A CN202111539446 A CN 202111539446A CN 114029740 A CN114029740 A CN 114029740A
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- back plate
- target blank
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P23/00—Machines or arrangements of machines for performing specified combinations of different metal-working operations not covered by a single other subclass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
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Abstract
The invention belongs to the technical field of sputtering target material preparation, and particularly relates to a welding method of a special-shaped material, which comprises the following steps: s1: forming a pit matched with the target blank on the surface of the back plate, and placing the target blank in the pit on the back plate; s2: heating the back plate, and then placing the target blank in a pit of the back plate for rolling; s3: controlling the rolling pressure and deformation of the first pass; s4: rotating the back plate and the target blank by 90 degrees relative to the first pass to perform second pass rolling, and controlling the rolling pressure and deformation of the second pass; s5: and rotating the back plate and the target blank in the same direction, rolling once at the same angle, and controlling the rolling pressure, deformation and rolling frequency of each pass to form interface connection between the back plate and the target blank, so as to realize welding of the special-shaped material and obtain the target. The welding method of the invention not only can obtain the target with high binding rate and small crystal grains, but also has high welding efficiency and low cost.
Description
Technical Field
The invention belongs to the technical field of sputtering target material preparation, and particularly relates to a welding method of a special-shaped material.
Background
The traditional target material is welded asThe following three methods: 1) indium binding, the binding technology is simple, and only one heating platform is needed. The technology has lower investment threshold, but the indium binding temperature resistance is lower, and the technology is not suitable for the use occasions with the temperature higher than 120 ℃. 2) The electron beam welding is only suitable for welding annular welding seams, the welding materials are generally aluminum alloy 6061, high-purity aluminum and the like, and the electron beam welding has the advantage of high welding seam strength. 3) Diffusion welding, which requires the use of hot isostatic pressing equipment, which is expensive and requires 30000m of filler for each use3The use pressure of the argon is 200Mpa, and the welding cost of each time is up to 3000 yuan per sheet. The diffusion temperature of atomic quality inspection is required to be more than 500 ℃, the grains in the material are greatly grown along with welding, and particularly, the defects that the grains grow from 200 mu m to 1000 mu m are caused in high-purity aluminum.
Because the welding methods have the characteristics of high cost and are difficult to be used for welding the special-shaped materials, how to realize the binding of the special-shaped materials and reduce the welding cost of the target material is a problem to be solved urgently.
Disclosure of Invention
Aiming at the problems in the prior art, the application aims to provide the welding method of the special-shaped material, which not only has high binding rate of the obtained target material and small crystal grains, but also has high welding efficiency and low cost.
Based on the purpose, the technical scheme adopted by the application is as follows:
a welding method of special-shaped materials comprises the following steps:
s1: forming a pit matched with the target blank on the surface of the back plate, and placing the target blank in the pit on the back plate;
s2: heating the back plate to a certain temperature, and then placing the target blank in a pit of the back plate for rolling;
s3: controlling the rolling pressure and deformation of the first pass, and pre-positioning the back plate and the target blank;
s4: rotating the back plate and the target blank by 90 degrees relative to the first pass to perform second pass rolling, and controlling the rolling pressure and deformation of the second pass to enable the contact interface of the back plate and the target blank to form metallurgical bonding;
s5: and rotating the back plate and the target blank in the same direction, rolling once at the same angle, and controlling the rolling pressure, deformation and rolling frequency of each pass to form interface connection between the back plate and the target blank to obtain the target material so as to realize welding of the special-shaped material.
Compared with the traditional welding method of the target material, the method adopts a rolling mode, realizes the welding of the special-shaped material by controlling the rolling parameters, and has the advantages of simple operation and low cost; and the whole rolling process can be realized within 5min, and the welding method has the advantage of high welding efficiency.
Further, step S1 includes processing the surface roughness of the backing plate and the target blank to be less than 1.6 μm.
The poor binding of the back plate and the target blank is avoided by processing the surface roughness of the back plate and the target blank to be less than 1.6 mu m.
Further, the surface roughness of the backing plate and the target blank is treated to 0.8 μm or less.
The surface roughness of the back plate and the target blank is processed to be less than 0.8 mu m, so that the interface welding of the back plate and the target blank is facilitated on one hand, and whether the surface oxidation phenomenon occurs on the surfaces of the target blank and the back plate or not can be found in time on the other hand, thereby avoiding the bad binding caused by the influence on the interface welding of the target blank and the back plate due to the surface oxidation of the target blank and the back plate.
Further, the back plate is an aluminum alloy back plate, a copper back plate or a stainless steel back plate; the target blank is a high-purity aluminum target blank, a high-purity aluminum copper (99.5:0.5) target blank or a high-purity aluminum silicon copper (98:1:1) target blank, and the purity of the target blank is not lower than 99.999%.
Further, the temperature of the back sheet in step S2 is 400 ℃.
Compared with the mode of heating the back plate and the target blank simultaneously by the traditional welding method, the method only heats the back plate in the rolling process, the temperature of the target blank is not higher than 80 ℃ after rolling and welding, and is lower than the recrystallization temperature of high-purity aluminum metal by 180 ℃, so that the growth of grains in the high-purity aluminum can be effectively inhibited.
Furthermore, the rolling pressure of the first pass and the second pass is 300MPa, and the rolling deformation is not higher than 0.25 mm.
The purpose of the first rolling is to realize primary positioning of the target blank and the back plate through low deformation, so that the deformation of the first rolling is controlled to be not higher than 0.25mm, and slippage and even separation of two special-shaped materials caused by large deformation are avoided.
The purpose of the second pass rolling is to realize the preliminary metallurgical bonding of the target blank and the back plate interface, so the rolling deformation is not easy to be overlarge.
Further, the backing plate and the target blank are rolled every 45 ° rotation in step S5.
The target material is rolled once by rotating for 45 degrees, so that the cross section of the rolled target material is in a perfect circle shape, and the thickness uniformity of each position of the target blank is consistent.
Further, in step S5, the rolling pressure per pass is 800MPa, the rolling deformation per pass is 1mm, and the number of passes is 8.
Further, the welding method comprises the step of carrying out C-scanning detection on the rolled target, wherein the binding rate of the target is not lower than 98%.
Further, the welding method also comprises the step of carrying out heat treatment on the target material subjected to the C scanning detection at 180 ℃ for 1h after vacuum drying.
The welded target is subjected to vacuum drying treatment, so that the growth of crystal grains in high-purity aluminum can be further inhibited, and meanwhile, moisture in the target after C sweeping is dried, and the target is prevented from being oxidized; and (3) carrying out heat treatment on the target material subjected to vacuum drying at 180 ℃ for 1h, so that after the elongated lath-shaped crystal grains of the target material in the rolling process obtain energy, the unstable crystal boundary is crushed to obtain uniformly refined crystal grains smaller than 80 mu m.
Compared with the prior art, the invention has the following beneficial effects:
the welding method realizes the welding of the back plate and the target blank by utilizing the heat generated by rolling deformation, and the rolling force is the level which can be reached by the model of a common rolling mill, so the welding method has low requirement on equipment, low rolling cost and the binding rate of the target material is not lower than 98 percent; the special-shaped material is welded by rolling, the welding time is within 5min, the welding efficiency is high, and the welding energy consumption is low. In addition, the back plate is only preheated in the rolling process, the temperature of the high-purity aluminum target blank is not higher than 80 ℃ after the high-purity aluminum target blank is rolled and welded, and the temperature is lower than the recrystallization temperature of high-purity aluminum metal by 180 ℃, so that the welding method can effectively inhibit the growth of grains of the high-purity aluminum target blank, and finally the average grain of the prepared target material is less than 80 mu m.
Drawings
FIG. 1 is a schematic view of the relative positions of a target blank and a backing plate before rolling;
FIG. 2 is a schematic diagram of the relative positions of the target blank and the backing plate during rolling;
fig. 3 is a schematic diagram of the relative positions of the rolled target blank and the backing plate.
Detailed Description
To better illustrate the objects, aspects and advantages of the present invention, the present invention will be further described with reference to specific examples. It will be understood by those skilled in the art that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The test methods used in the examples are all conventional methods unless otherwise specified; the materials, reagents and the like used are commercially available unless otherwise specified.
Example 1
The welding method of the special-shaped material is suitable for welding the back plate and the target blank, which are well known to those skilled in the art, for example, the back plate is an aluminum alloy back plate, a copper back plate or a stainless steel back plate, the target blank is a high-purity aluminum target blank, a high-purity aluminum copper target blank or a high-purity aluminum silicon copper target blank, and the purity requirement of the target blank is not lower than 99.999%.
In this embodiment, an aluminum alloy 6061 is used as a back plate, and high-purity aluminum (99.999%) is used as a target blank as an example, and the welding method of the special-shaped material of the present invention is described as shown in fig. 1 to 3, and the specific process is as follows:
1. the aluminum alloy 6061 back plate 1 is processed to D400 multiplied by 15 (the diameter is 400mm, the thickness is 15mm), a D332 multiplied by 0.5 pit is reserved in the middle of the back plate 1, and the surface roughness of the back plate 1 is processed to be less than 1.6 micrometers, preferably 0.8 micrometers. The surface roughness of the back plate 1 is lower than 1.6 μm, so that the welding is not adversely affected, the observation of whether the surface of the back plate 1 is oxidized or not is facilitated, and if the surface of the back plate 1 is oxidized, the subsequent interface welding operation is seriously affected.
2. Rolling the high-purity aluminum (the purity is more than 99.999%) target blank 2 from the thickness of 50mm to the thickness of 12mm, wherein the rolling temperature is room temperature, the temperature rise of the target blank 2 in the rolling process is controlled, and the deformation amount of each pass of rolling is not less than 5mm because the mechanical energy is converted into internal energy to raise the temperature of the target blank 2, and a rolling mill is required to be a 1600-ton rolling mill in the rolling process; the target blank 2 is processed to D332 multiplied by 9 by a rolling mill, the surface roughness of the target blank 2 is processed to Ra0.8 mu m or less, and the flatness requirement of the target blank 2 is less than 0.1 mm.
3. The whole aluminum alloy 6061 back plate 1 is heated to 400 ℃, the high-purity aluminum target blank 2 at room temperature is embedded into the pit in the middle of the aluminum alloy 6061 back plate 1, then the high-purity aluminum target blank and the pit are quickly placed into a rolling mill, and the total thickness of the whole target is 15+ 12-27 mm. Setting the first pass roll gap to be 26.75mm, firstly preliminarily positioning the target blank 2 and the back plate 1 through low deformation, wherein the deformation is 0.25mm, and if the deformation is higher than 0.25mm, the two special-shaped materials are easy to slide and cause separation.
4. Setting the deformation amount of the second pass to be 0.25mm, and after the back plate 1 and the target blank 2 are rotated clockwise by 90 degrees for rolling, the overall thickness is changed to be 26 mm. The rolling force is 264 tons, the pressure acting on the target material is 300Mpa, and the back plate 1 and the target blank 2 are subjected to primary metallurgical bonding.
5. The target material is rotated clockwise by 45 degrees, the rolling amount of each pass is 1mm, the thickness of the target material after 8 passes is 18.0mm, the average rolling force of each pass is 706 tons, and the pressure acting on the target material is 800 MPa. Because the target material is rolled clockwise, the target material forms a basically round shape, and the temperature inside the target material is raised to about 300 ℃. At the moment, the target blank 2 and the back plate 1 are completely in interface connection, the tensile strength is about 80Mpa, the welding joint capable of resisting the temperature of more than 300 ℃ is realized, and the process is completed within 5 min.
6. C scanning detection is carried out on the welded target material, the scanning value is 32DB, due to the fact that the sound velocity of the aluminum alloy is close to that of high-purity aluminum, an interface peak is displayed at a place with poor welding in the detection process, only a surface peak and a bottom peak are arranged at the place with the welding completion, the welding area reaches more than 98% through detection, namely the binding rate is more than 98%, and the place with poor welding is caused by surface oxidation or flatness problems of the back plate 1 or the target blank 2. The binding rate of the target material of 98 percent completely meets the sputtering use of the target material.
7. After the welding was completed, the target was vacuum dried at 80 ℃ for 4h, followed by heat treatment at 180 ℃ for 1 h.
The vacuum drying is beneficial to inhibiting the growth of crystal grains in the temperature rise process, and the drying procedure can effectively dry the moisture in the target material after the bubble water C is swept, so that the target material is prevented from being oxidized.
After vacuum drying, heat treatment is carried out for 1h at 180 ℃ for the following purposes: the target material is elongated by elongated lath-shaped grains in the rolling process, so that grains with uniform thinning smaller than 80 mu m are obtained after the grain boundary with unstable energy crushing is obtained.
8. The target material with smooth surface and the surface roughness Ra of less than 0.4 mu m is finally obtained by using RPM500, the feed depth of 0.5mm and the feed speed of 80mm/min and using a TGP diamond blade to carry out the surface size processing of the target material.
In conclusion, the welding method realizes the welding of the back plate and the target blank by utilizing the heat generated by rolling deformation, and the rolling force is the level which can be reached by the model of a common rolling mill, so the welding method has low requirement on equipment and low rolling cost; the special-shaped material is welded by rolling, the welding time is within 5min, the welding efficiency is high, and the welding energy consumption is low. In addition, the back plate is only preheated in the rolling process, the temperature of the high-purity aluminum target blank is not higher than 80 ℃ after the high-purity aluminum target blank is rolled and welded, and the temperature is lower than the recrystallization temperature of high-purity aluminum metal by 180 ℃, so that the welding method can effectively inhibit the growth of grains of the high-purity aluminum target blank, and finally the average grain of the prepared target material is less than 80 mu m.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the protection scope of the present invention, and although the present invention is described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (10)
1. A welding method of special-shaped materials is characterized by comprising the following steps:
s1: forming a pit matched with the target blank on the surface of the back plate, and placing the target blank in the pit on the back plate;
s2: heating the back plate to a certain temperature, and then placing the target blank in a pit of the back plate for rolling;
s3: controlling the rolling pressure and deformation of the first pass, and pre-positioning the back plate and the target blank;
s4: rotating the back plate and the target blank by 90 degrees relative to the first pass to perform second pass rolling, and controlling the rolling pressure and deformation of the second pass to enable the contact interface of the back plate and the target blank to form metallurgical bonding;
s5: and rotating the back plate and the target blank in the same direction, rolling once at the same angle, and controlling the rolling pressure, deformation and rolling frequency of each pass to form interface connection between the back plate and the target blank to obtain the target material so as to realize welding of the special-shaped material.
2. The soldering method according to claim 1, wherein the step S1 further comprises processing the surface roughness of the backing plate and the target blank to 1.6 μm or less.
3. The soldering method according to claim 2, wherein the surface roughness of the backing plate and the target blank is treated to 0.8 μm or less.
4. The welding method of claim 1, wherein the backing plate is an aluminum alloy backing plate, a copper backing plate, or a stainless steel backing plate; the target blank is a high-purity aluminum target blank, a high-purity aluminum copper target blank or a high-purity aluminum silicon copper target blank, and the purity of the target blank is not lower than 99.999%.
5. The soldering method according to claim 1, wherein the temperature of the back plate in the step S2 is 400 ℃.
6. The welding method according to claim 1, wherein the rolling pressure of the first pass and the rolling pressure of the second pass are both 300MPa, and the rolling deformation is not higher than 0.25 mm.
7. The welding method according to claim 1, wherein the backing plate and the target blank are rolled every 45 ° rotation in step S5.
8. The welding method according to claim 1, wherein the rolling pressure in each pass in the step S5 is 800MPa, the rolling deformation in each pass is 1mm, and the rolling times are 8 passes.
9. The welding method according to claim 1, wherein the welding method comprises a step of performing a C-scan detection process on the rolled target material, and the binding rate of the target material is not lower than 98%.
10. The welding method according to claim 9, further comprising a step of subjecting the target material after the C-scan test to a heat treatment at 180 ℃ for 1 hour after vacuum drying.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111539446.8A CN114029740A (en) | 2021-12-15 | 2021-12-15 | Welding method for special-shaped materials |
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| CN202111539446.8A CN114029740A (en) | 2021-12-15 | 2021-12-15 | Welding method for special-shaped materials |
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| CN114029740A true CN114029740A (en) | 2022-02-11 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117697242A (en) * | 2023-12-14 | 2024-03-15 | 光微半导体材料(宁波)有限公司 | Sputtering target welding method |
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2021
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