CN114023519B - Ultrahigh frequency radio frequency resistor - Google Patents
Ultrahigh frequency radio frequency resistor Download PDFInfo
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- CN114023519B CN114023519B CN202111101674.7A CN202111101674A CN114023519B CN 114023519 B CN114023519 B CN 114023519B CN 202111101674 A CN202111101674 A CN 202111101674A CN 114023519 B CN114023519 B CN 114023519B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C1/00—Details
- H01C1/01—Mounting; Supporting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C1/00—Details
- H01C1/02—Housing; Enclosing; Embedding; Filling the housing or enclosure
- H01C1/024—Housing; Enclosing; Embedding; Filling the housing or enclosure the housing or enclosure being hermetically sealed
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C1/00—Details
- H01C1/08—Cooling, heating or ventilating arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C1/00—Details
- H01C1/08—Cooling, heating or ventilating arrangements
- H01C1/084—Cooling, heating or ventilating arrangements using self-cooling, e.g. fins, heat sinks
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention discloses an ultrahigh frequency radio frequency resistor, which utilizes a metal coating at the bottom of a diamond substrate and is matched with trace mercury to be filled in a composite position of the metal heat dissipation substrate and the diamond substrate, so that the metal coating at the bottom of the diamond substrate and the metal heat dissipation substrate form an integral alloy, and the heat transfer performance between the metal heat dissipation substrate and the diamond substrate is greatly improved.
Description
Technical Field
The invention relates to the field of radio frequency resistors, in particular to an ultrahigh frequency radio frequency resistor.
Background
The radio frequency resistor is an electronic component which utilizes high-frequency current to form high-frequency electromagnetic waves, and is a key element in the field of microwave communication.
The reflection loss of the rf resistor increases with the increasing operating frequency, and the heating becomes more severe. Therefore, the company develops the ultrahigh frequency radio frequency resistor which is made of the diamond substrate serving as the substrate material, and the ultrahigh heat conduction performance of the diamond substrate is utilized, and the metal heat dissipation substrate is compounded on the diamond substrate so as to improve the heat dissipation performance of the radio frequency resistor.
In conventional production, the process of compounding the diamond substrate and the metal heat dissipation substrate is as follows: and coating a layer of heat-conducting silicone grease with the thickness of about 0.02mm at the composite position of the metal heat-radiating substrate and the diamond substrate, and then fixing the heat-conducting silicone grease into a whole in a screw mode. The heat-conducting silicone grease has the function of removing air at the composite position of the metal heat-radiating substrate and the diamond substrate and improving heat-radiating performance.
However, the thermal conductivity of the thermal grease is still low, which forms a main thermal resistance factor between the metal heat dissipation substrate and the diamond substrate, and affects the further improvement of the heat dissipation performance.
Disclosure of Invention
The invention discloses an ultrahigh frequency radio frequency resistor, which utilizes a metal coating at the bottom of a diamond substrate and fills trace mercury in a composite position of the metal radiating substrate and the diamond substrate, so that an integral alloy is formed between the metal coating at the bottom of the diamond substrate and the metal radiating substrate, and the heat transfer performance between the metal radiating substrate and the diamond substrate is greatly improved.
The ultrahigh-frequency radio-frequency resistor comprises a metal heat dissipation substrate 1, a diamond substrate 2, a tantalum nitride resistance layer 3, a packaging layer 4 and a lead-out pin piece 5, wherein a metal coating 6 is formed on the bottom of the diamond substrate 2 through vacuum evaporation, and trace mercury is added between the metal heat dissipation substrate 1 and the diamond substrate 2 for compounding.
Further, the metal heat dissipation substrate 1 is a gold-plated copper plate.
Furthermore, the metal plating layer 6 is made of copper, silver or gold.
Furthermore, a circle of groove 7 is formed in the bottom of the diamond substrate, and a circle of protruding ribs 8 are arranged at positions, corresponding to the groove 7, of the metal heat dissipation substrate 1. The inner part of the convex edge is filled with trace mercury to form an integral alloy, and the outer part of the convex edge is still filled with heat-conducting silicone grease. The protruding arris not only can fix a position the diamond substrate, plays the cofferdam effect moreover, very big volatilization that slows down mercury.
Further, the heat-conducting silicone grease is cross-linkable, cured and absorbs fixed mercury, and the formula of the heat-conducting silicone grease is as follows: 15-20 parts of hydroxyl-terminated silicone oil, 1-3 parts of epoxy silicone oil on the end side, 10-15 parts of heat-conducting silicone oil, 3-5 parts of polysiloxane, 1-2 parts of silane coupling agent and 8-10 parts of nano montmorillonite. The parts are parts by mass.
Furthermore, the particle size of the nano montmorillonite is 20 nm-50 nm.
Further, the nano-montmorillonite is further modified, so that the capability of absorbing and fixing mercury can be greatly improved, and the preparation method comprises the following steps:
(1) Dispersing nano montmorillonite in 90% ethanol with the mass multiple of 3-5 times, adding polysulfide with the mass of 20-30% of the nano montmorillonite, heating to 80-85 ℃, and performing reflux intercalation for 4-6 h;
(2) Evaporating ethanol, supplementing water with the mass multiple of 1-2 times of the nano-montmorillonite, adding dilute hydrochloric acid to adjust the pH value to 5.0-5.5, then adding a silane coupling agent with the mass of 5-10% of the nano-montmorillonite, and drying and dispersing after the reaction is finished to prepare the modified nano-montmorillonite.
Further, the silane coupling agent is KH580 or KH590.
Further, the polysulfide is bis (3-triethoxysilylpropyl) disulfide or bis (3-triethoxysilylpropyl) tetrasulfide.
The invention has the advantages that:
1. according to the invention, the metal coating at the bottom of the diamond substrate is utilized, and trace mercury is filled in the composite position of the metal heat dissipation substrate and the diamond substrate, so that an integral alloy is formed between the metal coating at the bottom of the diamond substrate and the metal heat dissipation substrate, and the heat transfer performance between the metal heat dissipation substrate and the diamond substrate is greatly improved;
2. the metal heat dissipation substrate is provided with a circle of raised edges, after the raised edges are inserted into the grooves at the bottom of the diamond substrate, the interior of each raised edge is filled with trace mercury to form an integral alloy, and the exterior of each raised edge is still filled with heat-conducting silicone grease;
3. the heat-conducting silicone grease which can be cross-linked, cured and absorb and fix mercury can be cured, bonded and sealed with the diamond substrate and the metal heat-radiating substrate, and the volatile mercury can be adsorbed by the nano-montmorillonite, and the curing speed of the heat-conducting silicone grease and the fixing effect on the mercury can be improved by the modified nano-montmorillonite.
Drawings
FIG. 1 is a top view of comparative example 2 of the present invention;
FIG. 2 is a sectional view of comparative example 2 of the present invention;
FIG. 3 is a sectional exploded view of embodiment 2 of the present invention;
in the figure, 1-metal heat dissipation substrate, 2-diamond substrate, 3-tantalum nitride resistance layer, 4-packaging layer, 5-pin-out sheet, 6-metal coating, 7-groove and 8-convex edge
Detailed Description
Example 1
An ultrahigh frequency radio frequency resistor comprises a metal heat dissipation substrate 1, a diamond substrate 2, a tantalum nitride resistance layer 3, a packaging layer 4 and a lead-out pin 5, wherein the metal heat dissipation substrate 1 is a gold-plated copper plate, and a copper metal plating layer 6 is vacuum-evaporated at the bottom of the diamond substrate 2; the bottom of the diamond substrate is provided with a circle of groove 7, and the metal heat dissipation substrate 1 is provided with a circle of convex edge 8 at the position corresponding to the groove 7.
The inner part of the convex edge is filled with trace mercury to form an integral alloy, and the outer part of the convex edge is still filled with heat-conducting silicone grease.
The heat-conducting silicone grease is cross-linkable, cured and absorbs fixed mercury, and the formula of the heat-conducting silicone grease is as follows: 15 parts of hydroxyl-terminated silicone oil, 1 part of epoxy silicone oil on the end side, 10 parts of heat-conducting silicone oil, 5 parts of polysiloxane, 1 part of silane coupling agent KH580 and 8 parts of nano montmorillonite. The parts are parts by mass.
The nano montmorillonite has a particle size of 50nm, is modified and comprises the following steps:
(1) Dispersing nano montmorillonite in 90% ethanol with the mass multiple of 3 times, adding bis (3-triethoxysilylpropyl) tetrasulfide with the mass of 20% of the nano montmorillonite, heating to 80 ℃, and performing reflux intercalation for 6 hours;
(2) Evaporating the ethanol, supplementing water with the mass which is 1 time of that of the nano-montmorillonite, adding dilute hydrochloric acid to adjust the pH value to 5.0, then adding a silane coupling agent KH580 with the mass which is 5 percent of that of the nano-montmorillonite, drying and dispersing after the reaction is finished, and obtaining the modified nano-montmorillonite.
Example 2
An ultrahigh frequency radio frequency resistor comprises a metal heat dissipation substrate 1, a diamond substrate 2, a tantalum nitride resistance layer 3, a packaging layer 4 and a lead-out pin 5, wherein the metal heat dissipation substrate 1 is a gold-plated copper plate, and a silver metal coating 6 is vacuum-evaporated at the bottom of the diamond substrate 2; the bottom of the diamond substrate is provided with a circle of groove 7, and the metal heat dissipation substrate 1 is provided with a circle of convex edge 8 at the position corresponding to the groove 7.
The inner part of the convex edge is filled with trace mercury to form an integral alloy, and the outer part of the convex edge is still filled with heat-conducting silicone grease.
The heat-conducting silicone grease is capable of being cross-linked, cured and absorbing fixed mercury, and the formula of the heat-conducting silicone grease is as follows: 16 parts of hydroxyl-terminated silicone oil, 2 parts of epoxy silicone oil on the end side, 12 parts of heat-conducting silicone oil, 4 parts of polysiloxane, 2 parts of a silane coupling agent KH590 and 9 parts of nano montmorillonite. The parts are parts by mass.
The nano montmorillonite has a particle size of 20nm, is modified and has the preparation method that:
(1) Dispersing nano montmorillonite in 90% ethanol with the mass multiple of 4, adding bis (3-triethoxysilylpropyl) disulfide with the mass of 25% of that of the nano montmorillonite, heating to 80 ℃, and performing reflux intercalation for 6 hours;
(2) Evaporating the ethanol, supplementing water with the mass which is 2 times of that of the nano-montmorillonite, adding dilute hydrochloric acid to adjust the pH value to 5.5, then adding a silane coupling agent KH590 with the mass of 8 percent of that of the nano-montmorillonite, drying and dispersing after the reaction is finished, and preparing the modified nano-montmorillonite.
Example 3
An ultrahigh frequency radio frequency resistor comprises a metal heat dissipation substrate 1, a diamond substrate 2, a tantalum nitride resistance layer 3, a packaging layer 4 and a lead-out pin 5, wherein the metal heat dissipation substrate 1 is a gold-plated copper plate, and a gold metal plating layer 6 is vacuum-evaporated at the bottom of the diamond substrate 2; the bottom of the diamond substrate is provided with a circle of groove 7, and the metal heat dissipation substrate 1 is provided with a circle of convex edge 8 at the position corresponding to the groove 7.
The inner part of the convex edge is filled with a trace amount of mercury to form an integral alloy, and the outer part of the convex edge is still filled with the heat-conducting silicone grease.
The heat-conducting silicone grease is capable of being cross-linked, cured and absorbing fixed mercury, and the formula of the heat-conducting silicone grease is as follows: 20 parts of hydroxyl-terminated silicone oil, 3 parts of epoxy silicone oil at the end side, 15 parts of heat-conducting silicone oil, 3 parts of polysiloxane, 2 parts of silane coupling agent KH590 and 10 parts of nano montmorillonite. The parts are parts by mass.
The particle size of the nano montmorillonite is 20nm, the nano montmorillonite is modified nano montmorillonite, and the preparation method comprises the following steps:
(1) Dispersing nano montmorillonite in 90% ethanol with mass multiple of 5 times, adding bis (3-triethoxysilylpropyl) disulfide with mass of 30% of nano montmorillonite, heating to 85 deg.C, and performing reflux intercalation for 4 hr;
(2) Evaporating ethanol, supplementing water with the mass multiple of 2 times of that of the nano montmorillonite, adding dilute hydrochloric acid to adjust the pH value to 5.5, then adding a silane coupling agent KH590 with the mass of 10% of that of the nano montmorillonite, and drying and dispersing after the reaction is finished to prepare the modified nano montmorillonite.
Comparative example 1
A radio frequency resistor comprises a metal radiating substrate 1, a diamond substrate 2, a tantalum nitride resistor layer 3, a packaging layer 4 and a lead-out pin 5, wherein the metal radiating substrate 1 is a gold-plated copper plate, a silver metal coating 6 is vacuum-evaporated at the bottom of the diamond substrate 2, and heat-conducting silicone grease is filled at the composite position of the metal radiating substrate and the diamond substrate.
Comparative example 2
A radio frequency resistor comprises a metal heat dissipation substrate 1, a diamond substrate 2, a tantalum nitride resistance layer 3, a packaging layer 4 and a lead-out pin 5, wherein the metal heat dissipation substrate 1 is a gold-plated copper plate, a silver metal coating 6 is vacuum-evaporated at the bottom of the diamond substrate 2, and a trace amount of mercury is filled at the composite position of the metal heat dissipation substrate and the diamond substrate.
Comparative example 3
A radio frequency resistor comprises a metal radiating substrate 1, a diamond substrate 2, a tantalum nitride resistor layer 3, a packaging layer 4 and a lead-out pin 5, wherein the metal radiating substrate 1 is a gold-plated copper plate, and a silver metal plating layer 6 is vacuum-evaporated at the bottom of the diamond substrate 2; the bottom of the diamond substrate is provided with a circle of groove 7, and the metal heat dissipation substrate 1 is provided with a circle of convex edge 8 at the position corresponding to the groove 7.
The inner part of the convex edge is filled with a trace amount of mercury to form an integral alloy, and the outer part of the convex edge is still filled with the heat-conducting silicone grease.
Comparative example 4
A radio frequency resistor, wherein the formulation of the heat-conducting silicone grease used in the radio frequency resistor is not modified by nano montmorillonite, the rest is the same as the example 2.
Comparative example 5
A radio frequency resistor is prepared from the following heat-conducting silicone grease in a formula: 34 parts of heat-conducting silicone oil, 10 parts of unmodified nano montmorillonite, and 2 parts of a silane coupling agent KH590. The rest is the same as example 2.
Comparative example 6
A radio frequency resistor is prepared from the following heat-conducting silicone grease in a formula: 34 parts of heat-conducting silicone oil, 570 parts of silane coupling agent KH, and 10 parts of unmodified nano montmorillonite. The rest is the same as example 2.
Comparative example 7
A radio frequency resistor is prepared by using epoxy silicone oil without end side in a formula of heat-conducting silicone grease, and nano montmorillonite is not modified, and the rest is the same as the example 2.
Comparative example 8
The formula of the heat-conducting silicone grease used in the radio-frequency resistor is not polysiloxane, and the nano montmorillonite is not modified, and the rest is the same as that in the embodiment 2.
Comparative example 9
A radio frequency resistor is prepared by using a thermal conductive silicone grease without silane coupling agent in the formula, and modifying nano montmorillonite, and the rest is the same as the example 2.
Comparative example 10
The same as example 2 except that polysulfide intercalation is not used in the formula of the thermal conductive silicone grease used in the radio frequency resistor, wherein the modified nano montmorillonite is modified by using the thermal conductive silicone grease.
Comparative example 11
A radio frequency resistor is disclosed, wherein the formula of the heat-conducting silicone grease used in the radio frequency resistor is the same as that of the embodiment 2, wherein the modified nano montmorillonite is not surface-modified by using a silane coupling agent in the step (2).
Comparative example 12
A radio frequency resistor is prepared by using silane coupling agent KH570 to modify montmorillonite on the surface in step (2) of modifying nano montmorillonite in the formula of heat-conducting silicone grease, and the rest is the same as in example 2.
And (3) performance detection:
the rf resistors were produced by the production methods described in the above examples and comparative examples, and the diamond substrates used for the rf resistors were 1.6mm by 0.8mm by 0.38mm in size, the metal heat-dissipating substrates were 3.2mm by 1.0mm, the metal plating thickness was 0.05mm, and the amount of mercury was 0.03g;
the radio frequency resistor is installed in a closed electrical box and continuously works for 24 hours under the conditions of 50W of power and 30GHz of working frequency, the temperature and standing-wave ratio of the radio frequency resistor during stable working are tested, the concentration of mercury in the electrical box is tested, and the test result is shown in table 1;
the radio frequency resistors produced in the above embodiments and comparative examples continuously increase the working frequency in a stable working state, and the cut-off frequency of the radio frequency resistor is tested, and the test results are shown in table 1;
whether the nano montmorillonite is uniform or not, whether the nano montmorillonite is cured or not and the curing time after the heat-conducting silicone grease is coated are observed, the peel strength of the metal heat-radiating substrate and the diamond substrate in each embodiment and each comparative example is tested, and the test results are shown in table 2.
TABLE 1
TABLE 2
As can be seen from the above table, the metal plating layer at the bottom of the diamond substrate is used, and trace mercury is filled in the composite position of the metal heat dissipation substrate and the diamond substrate, so that an integral alloy is formed between the metal plating layer at the bottom of the diamond substrate and the metal heat dissipation substrate, the heat transfer performance between the metal heat dissipation substrate and the diamond substrate is greatly improved, and the cut-off frequency of the radio frequency resistor is further improved;
through the arrangement of the grooves and the convex edges, the use of the heat-conducting silicone grease which can be cross-linked, cured and absorb fixed mercury and the further modification of montmorillonite, the curing speed of the heat-conducting silicone grease and the fixing effect on mercury can be improved.
And finally: the above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that are within the spirit and principle of the present invention are intended to be included in the scope of the present invention.
Claims (6)
1. An ultra high frequency radio frequency resistor, comprising: the ultrahigh frequency radio frequency resistor comprises a metal heat dissipation substrate, a diamond substrate, a tantalum nitride resistance layer, a packaging layer and a lead-out pin sheet, wherein a metal coating is formed on the bottom of the diamond substrate through vacuum evaporation, and trace mercury is added between the metal heat dissipation substrate and the diamond substrate for compounding;
the bottom of the diamond substrate is provided with a circle of grooves, the metal heat dissipation substrate is provided with a circle of convex edges at positions corresponding to the grooves, the interior of each convex edge is filled with trace mercury to form an integral alloy, and heat-conducting silicone grease is filled outside each convex edge;
the heat-conducting silicone grease is capable of being cross-linked, cured and absorbing fixed mercury, and the formula of the heat-conducting silicone grease is as follows: 15-20 parts of hydroxyl-terminated silicone oil, 1-3 parts of epoxy silicone oil on the end side, 10-15 parts of heat-conducting silicone oil, 3-5 parts of polysiloxane, 1-2 parts of silane coupling agent and 8-10 parts of nano montmorillonite;
the nano montmorillonite is further modified, and the preparation method comprises the following steps:
(1) Dispersing nano montmorillonite in 90% ethanol with the mass multiple of 3-5 times, adding polysulfide with the mass of 20-30% of the nano montmorillonite, heating to 80-85 ℃, and performing reflux intercalation for 4-6 h;
(2) Evaporating ethanol, supplementing water with the mass multiple of 1-2 times of the nano-montmorillonite, adding dilute hydrochloric acid to adjust the pH value to 5.0-5.5, then adding a silane coupling agent with the mass of 5-10% of the nano-montmorillonite, and drying and dispersing after the reaction is finished to prepare the modified nano-montmorillonite.
2. The uhf radio frequency resistor of claim 1, wherein: the metal heat dissipation substrate is a gold-plated copper plate.
3. The uhf radio frequency resistor of claim 1, wherein: the metal coating is made of copper, silver or gold.
4. The uhf radio frequency resistor of claim 1, wherein: the grain size of the nano montmorillonite is 20 nm-50 nm.
5. The uhf radio frequency resistor of claim 1, wherein: the polysulfide is bis (3-triethoxysilylpropyl) disulfide or bis (3-triethoxysilylpropyl) tetrasulfide.
6. The uhf radio frequency resistor of claim 1, wherein: the silane coupling agent is KH580 or KH590.
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| US5225157A (en) * | 1989-07-19 | 1993-07-06 | Microelectronics And Computer Technology Corporation | Amalgam composition for room temperature bonding |
| DE10220360B4 (en) * | 2002-05-07 | 2006-09-21 | Rosenberger Hochfrequenztechnik Gmbh & Co. Kg | Use of a diamond-based electrical resistance device |
| US8268744B2 (en) * | 2009-06-16 | 2012-09-18 | Amcol International Corporation | High shear method for manufacturing a synthetic smectite mineral |
| CN101899263A (en) * | 2010-03-26 | 2010-12-01 | 福建瑞森化工有限公司 | Flame-retarding and heat-conducting silicon rubber insulating paint and preparation method thereof |
| CN110233016B (en) * | 2019-05-29 | 2020-11-13 | 北京科技大学 | Method for manufacturing diamond-based thin film resistor element |
| CN210671094U (en) * | 2019-08-27 | 2020-06-02 | 北京小米移动软件有限公司 | Electronic device |
| CN112712950A (en) * | 2020-12-18 | 2021-04-27 | 中国振华集团云科电子有限公司 | Power resistor and preparation method thereof |
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