CN114019593A - Superlens array and design method thereof - Google Patents
Superlens array and design method thereof Download PDFInfo
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- CN114019593A CN114019593A CN202111362695.4A CN202111362695A CN114019593A CN 114019593 A CN114019593 A CN 114019593A CN 202111362695 A CN202111362695 A CN 202111362695A CN 114019593 A CN114019593 A CN 114019593A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
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- G—PHYSICS
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
Abstract
The invention discloses a super lens array, which is characterized in that the super lens array is formed by a plurality of super lens structure unit arrays in a distributed way, and the super lens structure unit comprises: a nano-pillar, an indium tin oxide layer, and a substrate; the nano column is made of a phase-change material; the indium tin oxide layer is arranged between the substrate and the nano-pillars, and the phase state of the nano-pillar phase change material is adjusted by heating the indium tin oxide layer; by independently controlling the phase state of the phase-change material in the nano-columns, the super-lens array can display any pattern through arrangement of focal points in a focal plane. The super lens array can realize ultrahigh-speed dynamic display with ultrahigh resolution, provides a new direction for an AR display imaging technology, and meanwhile, the super lens array designed by the invention is widely applied to modern scientific and technological products such as a telescope, a microscope, a digital camera, a wavefront detector and the like.
Description
Technical Field
The invention belongs to the technical field of optical imaging, and particularly relates to a super lens array and a design method thereof.
Background
The traditional vortex generator is only used for generating vortex light beams with plane output wave fronts, and in an actual experiment, when the vortex light needs to be focused, an extra lens needs to be added for realization, so that the method can increase the volume of an optical system and improve the complexity. And the optical element generates vortex beams, so that the integration level of the device is greatly increased. Although there are designs for controllable array superlenses, the optical performance is not ideal.
Compared with the traditional lens, the super lens array has the advantages of small volume, high integration and the like, can be compatible with a nanometer device, and is widely applied to many fields in recent years. Although the superlens has more remarkable optical performance, the practical requirement cannot be met in the large-area display occasion of the adaptive optical wavefront detection box, and therefore, the superlens array becomes an ideal solution for solving the problems. However, although the material of the superlens array can realize the focusing of the lens array at present, the superlens array cannot be adjusted after being manufactured.
Disclosure of Invention
In order to solve the above problems, the present invention provides a superlens array and a design method thereof, wherein the superlens array is formed by a plurality of superlens structure unit arrays, and the superlens structure unit includes:
a nano-pillar, an indium tin oxide layer, and a substrate; the nano column is made of a phase-change material;
the indium tin oxide layer is arranged between the substrate and the nano-pillars, and the phase state of the nano-pillar phase change material is adjusted by heating the indium tin oxide layer;
by independently controlling the phase state of the phase-change material in the nano-columns, the super-lens array can display any pattern through arrangement of focal points in a focal plane.
Preferably, the nano-pillars adopt phase-change material Ge2Sb2Te5。
Preferably, the nanopillars are rectangular.
Preferably, the substrate is silicon dioxide.
The corresponding design method of the super lens array adopts Pancharatnam-Berry phase matching to the super lens array to the phase of the super lens structure unit, and realizes the control of the phase of the super lens array by changing the rotation angle of the nano column.
The corresponding other design method of the super lens array can also focus the vortex rotation with different orbital angular momentum on one focal plane simultaneously by independently controlling the state of the nano-column phase change material in the super lens unit of the super lens array.
Further, the super lens array can display a preset pattern through arrangement of focal points in a focal plane.
The invention has the advantages that the superlens array can realize controllable focusing of vortex beams, greatly reduces the complexity of design, improves the integration level of devices, enables the superlens array to have multiple functions simultaneously, can realize ultrahigh-speed dynamic display with ultrahigh resolution, and provides a new idea for AR display imaging technology. Meanwhile, the super lens array has obvious refractive index adjusting capability in near infrared and also has the same obvious adjusting capability in mid-infrared wave band. In addition, the super lens array designed by the invention is widely applied to modern science and technology products such as a telescope, a microscope, a digital camera, a wavefront detector and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic diagram of a superlens structure unit.
FIG. 2 is a diagram of the unit size of a superlens structure.
Fig. 3 is a schematic view of the angle of deflection of the nanopillar.
Fig. 4 is a graph of nanopillar dimensions.
Fig. 5 is a schematic diagram of a 2 x 2 superlens array structure.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
The invention designs a super lens array and a design method thereof, wherein the super lens array is formed by a plurality of super lens unit arrays in a distributed way, as shown in figure 1, the super lens unit comprises:
the nano-pillar comprises a nano-pillar 1, an indium tin oxide layer 2 and a substrate 3; the nano-column 1 is made of a phase-change material;
the indium tin oxide layer 2 is arranged between the substrate 3 and the nano-pillars 1, and the phase state of the phase change material of the nano-pillars 1 is adjusted by heating the indium tin oxide layer 2;
by individually controlling the phase state of the phase change material in the nano-pillars 1, the superlens array can display an arbitrary pattern by arranging the focal points in the focal plane.
In one embodiment, the nano-pillars are rectangular and the phase change material adopted by the nano-pillars is Ge2Sb2Te5(GST), the substrate is silicon dioxide, the size of the super lens structure unit is shown in FIG. 2, and the deflection angle and projection size of the nano-pillar are shown in FIGS. 3 and 4. The period of the superlens structure unit is p, the height of the rectangular nano-column is h, the length of the rectangular nano-column is l, and the width of the rectangular nano-column is w. The height of the Indium Tin Oxide (ITO) layer is t2, the height of the silicon dioxide substrate is t1, and the included angle between the nano-column and the x axis is theta. Wherein the parameters are set as: p is 3 μm, h is 2.5 μm, l is 1 μm, w is 0.7 μm, t1 is 0.1 μm, and t2 is 0.02 μm. The 1.55 mu m circularly polarized light is perpendicularly incident to the super lens structure unit, the parameters of the super lens structure unit are scanned, and the average conversion efficiency of the lens of the super lens structure unit can reach over 90 percent when GST is in an amorphous state and is not subject to the rotation of the nano columnThe influence of the angle.
The corresponding design method of the super lens array adopts Pancharatnam-Berry phase matching to the super lens array to the phase of the super lens structure unit, and realizes the control of the phase of the super lens array by changing the rotation angle of the nano column.
The corresponding other design method of the super lens array can also focus the vortex rotation with different orbital angular momentum on one focal plane simultaneously by independently controlling the state of the nano-column phase change material in the super lens unit of the super lens array. The super lens array can display a preset pattern through arrangement of focal points in a focal plane.
In one embodiment, the superlens array can implement controllable concentrated vortex rotation in the communication band, wherein the 2 × 2 superlens array can simultaneously focus vortex light with different orbital angular momentum on one focal plane, and the structure diagram is shown in fig. 5, the lens array is composed of 100 × 100 pixels, where the upper left of the superlens array is topology charge l ═ 1, the upper right is topology charge l ═ 2, the lower left is topology charge l ═ 3, and the lower right is topology charge l ═ 4, where l is the topology charge of vortex rotation. In order to generate vortex light carrying a track amount by a planar lens, a spiral phase shift needs to be added to a planar wavefront, and therefore, a phase formula of the lens needs to satisfy formula (1). Where f represents the focal length of the superlens and λ is the wavelength of the incident light. (x, y) are coordinates of any point on the planar lens, an included angle between the GST nanopillar of the unit structure and the x-axis is θ, and the phase ψ of the unit structure and ψ which θ needs to satisfy are 2 θ, so that the included angle between the unit structure and the x-axis needs to satisfy formula (2).
The included angle between the unit structure of the focusing vortex beam superlens and the x axis needs to satisfy the formula:
by independently controlling the state of GST in each superlens structure unit, the superlens array can display any pattern through the arrangement of focal points in a focal plane, and a superlens array capable of being actively adjusted is realized, for example, a 3X 3 planar lens array can respectively display letters and symbols such as 'L', 'plus', 'minus', and the like in the focal plane, and can generate and simultaneously focus vortex light beams, thereby greatly increasing the integration degree and the degree of freedom of the device. When the number of superlens structure units is extended to N x N. More complex patterns can also be displayed.
The application of the super lens array in the aspect of AR display brings a direction, so that the interaction between virtual and reality can be realized through a single device, and the complexity of AR equipment is greatly reduced.
The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present application. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (7)
1. A superlens array, wherein the superlens array is formed by a plurality of superlens structure unit arrays, and the superlens structure unit comprises:
a nano-pillar, an indium tin oxide layer, and a substrate; the nano column is made of a phase-change material;
the indium tin oxide layer is arranged between the substrate and the nano-pillars, and the phase state of the nano-pillar phase change material is adjusted by heating the indium tin oxide layer;
by independently controlling the phase state of the phase-change material in the nano-columns, the super-lens array can display any pattern through arrangement of focal points in a focal plane.
2. The superlens array of claim 1, wherein the nano-pillars employ a phase change material Ge2Sb2Te5。
3. The superlens array of claim 1, wherein the nanopillars are rectangular.
4. The superlens array of claim 1, wherein the substrate is silicon dioxide.
5. A design method of a super lens array is characterized in that Pancharatnam-Berry phase matching super lens unit phases are adopted for the super lens array of claims 1-4, and the control of the super lens array phases is realized by changing the rotation angle of a nano column.
6. The design method of claim 5, wherein the superlens array implements vortex rotation capable of simultaneously focusing different orbital angular momenta on one focal plane by individually controlling the states of the nanopillar phase change materials in the superlens cells of the superlens array.
7. The design method of claim 6, wherein the superlens array is capable of displaying a predetermined pattern by an arrangement of focal points in a focal plane.
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| CN114815014A (en) * | 2022-03-29 | 2022-07-29 | 中国人民解放军国防科技大学 | Superlens and superlens array for focusing vortex light beam |
| CN115453670A (en) * | 2022-09-29 | 2022-12-09 | 苏州大学 | Reflection type orthogonal circular polarization double-focusing super lens and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114815014A (en) * | 2022-03-29 | 2022-07-29 | 中国人民解放军国防科技大学 | Superlens and superlens array for focusing vortex light beam |
| CN115453670A (en) * | 2022-09-29 | 2022-12-09 | 苏州大学 | Reflection type orthogonal circular polarization double-focusing super lens and preparation method thereof |
| CN115453670B (en) * | 2022-09-29 | 2023-08-15 | 苏州大学 | Reflective orthogonal circular polarization double-focusing superlens and preparation method thereof |
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