CN114011757B - Optical element surface cleaning system and cleaning method thereof - Google Patents
Optical element surface cleaning system and cleaning method thereof Download PDFInfo
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- CN114011757B CN114011757B CN202111287733.4A CN202111287733A CN114011757B CN 114011757 B CN114011757 B CN 114011757B CN 202111287733 A CN202111287733 A CN 202111287733A CN 114011757 B CN114011757 B CN 114011757B
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- 238000004140 cleaning Methods 0.000 title claims abstract description 226
- 230000003287 optical effect Effects 0.000 title claims abstract description 94
- 238000000034 method Methods 0.000 title claims abstract description 18
- 230000007246 mechanism Effects 0.000 claims abstract description 65
- 239000007788 liquid Substances 0.000 claims abstract description 24
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 239000004744 fabric Substances 0.000 claims description 7
- 239000002390 adhesive tape Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010926 purge Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 6
- 239000003344 environmental pollutant Substances 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 231100000719 pollutant Toxicity 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 231100001240 inorganic pollutant Toxicity 0.000 description 2
- 238000013021 overheating Methods 0.000 description 2
- 239000002957 persistent organic pollutant Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000002352 surface water Substances 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
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- B08B1/143—
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- B08B1/30—
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K13/00—Thermometers specially adapted for specific purposes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Abstract
The invention discloses an optical element surface cleaning system, which comprises a frame; the electric control rotating platform is arranged on the rack and is provided with a clamping mechanism for fixing the optical element; the cleaning seat is arranged on one side of the electric control rotating platform through a three-dimensional moving mechanism, and is provided with an air knife, a cleaning head interface, a plasma cleaning head and a liquid wiping cleaning head; a position sensor mounted on the cleaning seat for detecting a distance from the optical element and outputting a distance signal; and the controller can control the three-dimensional moving mechanism and the electric control rotating platform to move according to the distance signal so as to adjust the relative position of the cleaning seat and the optical element and control the cleaning seat to clean the optical element according to a preset cleaning track. The automatic cleaning device can realize automatic cleaning of the surface of the optical element, greatly improves the cleaning efficiency, ensures the stability of the cleaning process and improves the cleaning effect compared with manual wiping cleaning. The invention also discloses a cleaning method of the cleaning system.
Description
Technical Field
The invention belongs to the technical field of optical element surface cleaning treatment, and relates to an optical element surface cleaning system and a cleaning method thereof.
Background
In a large-diameter high-energy laser device, the requirement for the cleanliness of the surface of an optical element is high, and the surface of the element is inevitably contaminated to various degrees by inorganic substances and organic substances due to processing, storage, assembly, debugging and the like, so that the surface of the element is usually cleaned before being mounted on a line.
The traditional cleaning treatment mode is mainly that the cleaning is carried out through manual wiping, the efficiency is low, the cleaning effect is different from person to person, the process is unstable, and particularly for elements with surfaces easy to deliquesce, such as neodymium glass, marks, deliquescence spots and the like are easy to leave on the surfaces of the elements.
Disclosure of Invention
In order to solve the above problems, the present invention provides a system for cleaning the surface of an optical element, which can automatically clean the optical element to remove inorganic contaminants and organic contaminants on the surface of the element.
In order to realize the purpose, the technical scheme of the invention is as follows:
an optical element surface cleaning system includes a frame; the electric control rotating platform is rotatably arranged on the rack and is provided with a clamping mechanism for fixing the optical element; a cleaning seat mounted on one side of the electrically controlled rotating table through a three-dimensional moving mechanism, the cleaning seat being provided with an air knife and a cleaning head interface, and being configured with a plasma cleaning head and a liquid wiping cleaning head, the cleaning head interface being configured to be suitable for selectively mounting the plasma cleaning head and the liquid wiping cleaning head; a position sensor mounted on the cleaning seat for detecting a distance from the optical element and outputting a distance signal; and the controller can control the three-dimensional moving mechanism and the electric control rotating platform to move according to the distance signal so as to adjust the relative position of the cleaning seat and the optical element and control the cleaning seat to clean the optical element according to a preset cleaning track.
Technical scheme more than adopting can realize the self-cleaning on optical element surface, compares the manual work and cleans the washing, has greatly improved the cleaning efficiency, guarantees cleaning process's stability, cleans the cleaning head with the help of air knife, plasma cleaning head and liquid, can effectively get rid of the inorganic pollutant and the organic pollutant on optical element surface, improves the cleaning performance.
Preferably, a temperature sensor is mounted on the cleaning seat and is associated with a plasma gas source solenoid valve connected to the plasma cleaning head. Therefore, the temperature rise condition of the surface of the element under the action of the plasma can be detected in real time in the plasma cleaning process, and once the temperature of the surface of the element exceeds a set value, the air source is automatically disconnected, so that the surface of the element is prevented from being damaged due to overheating.
Preferably, the three-dimensional moving mechanism comprises a horizontal guide rail horizontally fixed on the frame, a horizontal sliding block in sliding fit with the horizontal guide rail, a vertical guide rail vertically fixed on the horizontal sliding block, a vertical sliding block in sliding fit with the vertical guide rail, a transverse guide rail horizontally installed on the vertical sliding block and perpendicular to the horizontal guide rail, and a transverse sliding block in sliding fit with the transverse guide rail, and the cleaning seat is fixed on the transverse sliding block. Through the structure, the position of the cleaning seat in the three-dimensional space can be adjusted in an electric control mode, and the cleaning seat is compact in structure, convenient to install and arrange.
Preferably, the transverse guide rail is slidably mounted on the vertical slider by means of a pneumatic push-pull mechanism, and the movement direction of the pneumatic push-pull mechanism is the same as the sliding direction of the transverse slider. Therefore, when the surface of the optical element is cleaned, the pneumatic push-pull mechanism can be used for carrying out quick coarse positioning on the cleaning seat, and the transverse sliding block is used for carrying out accurate positioning, so that the positioning time is saved, and the cleaning efficiency is improved.
Preferably, the cleaning seat is provided with a fixed clamping block and a detachable clamping block detachably fixed on the fixed clamping block, and the fixed clamping block and the detachable clamping block surround to form the cleaning head interface so as to realize the detachable installation of the plasma cleaning head and the liquid wiping cleaning head and the switching between the plasma cleaning head and the liquid wiping cleaning head.
Preferably, the liquid wiping and cleaning head comprises a clamping handle matched with the clamping hole, an upper clamping piece and a lower clamping piece connected to the end part of the clamping handle, and an adhesive tape clamped between the upper clamping piece and the lower clamping piece, wherein silk cloth is wrapped on the adhesive tape so as to infiltrate the silk cloth with water or alcohol to wipe the surface of the optical element.
Preferably, fixture includes that the level is fixed the floorbar on automatically controlled revolving stage and installs vertically at the floorbar and two curb girders of installing vertically on the floorbar, all be provided with tight piece of clamp on floorbar and the curb girder, can guarantee optical element and vertical planar depth of parallelism like this, install the line rail on the floorbar, the curb girder bottom be equipped with line rail sliding fit's slider, can realize fixture's regulation adaptation different model size optical element's clean processing requirement.
The invention also discloses a cleaning method of the cleaning system, which comprises the following steps:
s1, mounting the optical element, and fixing the optical element on the clamping mechanism;
s2, distance detection, namely moving the cleaning seat to a set cleaning initial position through a three-dimensional moving mechanism, measuring the distance between the position sensor and the optical element, comparing the distance with a set value, and finely adjusting the position of the cleaning seat;
s3, cleaning an air knife, starting an air source of the air knife, and moving a cleaning seat by a three-dimensional moving mechanism according to a preset cleaning track to purge and clean the surface of the element;
s4, plasma cleaning, wherein a gas source of a plasma cleaning head is started, and a three-dimensional moving mechanism moves a cleaning seat according to a preset cleaning track to carry out plasma cleaning on the surface of the element;
s5, cleaning with water and alcohol, switching the cleaning seat into a liquid wiping cleaning head, moving the cleaning seat by the three-dimensional moving mechanism according to a preset cleaning track, and sequentially cleaning the surface of the element with water and alcohol;
s6, turning over the element, moving the cleaning seat to a safe position by the three-dimensional moving mechanism, and rotating the electric control rotating platform by 180 degrees to enable the other surface of the optical element to be opposite to the cleaning seat;
and S7, repeating the steps S2 to S5 until the optical element surface cleaning is finished. The method can realize automatic cleaning of the surface of the optical element, can effectively improve the cleaning efficiency compared with manual wiping cleaning, and ensures the stability of the cleaning effect.
Preferably, step S6 further includes calculating the deflection angle of the optical element after the element is turned over, and feeding the deflection angle back to the electrically controlled rotary table to correct the pose of the optical element. Therefore, the cleaning seat can still be directly opposite to the cleaning seat after the element is turned over, and the cleaning effect is prevented from being influenced by deflection of the optical element.
Preferably, the wash bowl is reciprocally moved in steps S3 to S5, including several reciprocal wash trajectories, the latter reciprocal wash trajectory is partially overlapped with the former reciprocal wash trajectory, and the reciprocal moving direction in step S4 is different from the reciprocal moving direction in steps S3 and S5. The cleaning process adopts overlapped scanning cleaning, the step length is fixed, the cleaning is more uniform than manual cleaning, and the reciprocating directions of different cleaning steps are different through the overlapped design of cleaning tracks, so that marks can not be left on the surfaces of elements after cleaning, and the cleaning effect is greatly improved.
Compared with the prior art, the invention has the beneficial effects that: the automatic cleaning of the surface of the optical element is realized, the efficiency is greatly improved, various pollutants on the surface of the element can be effectively removed by combining various cleaning modes, and marks, deliquescence spots and the like can be avoided.
Drawings
FIG. 1 is a schematic perspective view of a system for cleaning a surface of an optical element according to the present invention;
FIG. 2 is a schematic view of the three-dimensional translation mechanism of FIG. 1;
FIG. 3 is a schematic view of the clamping mechanism of FIG. 1;
FIG. 4 is a schematic structural view of the cleaning seat;
FIG. 5 is a schematic structural view of the cleaning base after the plasma cleaning head is installed;
FIG. 6 is a schematic view of a cleaning seat mounted liquid wiping cleaning head;
FIG. 7 is a schematic view of a liquid wiping cleaning head.
Detailed Description
The present invention will be further described with reference to the following examples and the accompanying drawings.
An optical element surface cleaning system as shown in fig. 1 comprises a frame 1, an electric control rotating platform 2 and a three-dimensional moving mechanism 5 are installed on the frame 1, a clamping mechanism 3 for fixing an optical element 9 is arranged on the electric control rotating platform 2, a cleaning seat 4 is hung on the three-dimensional moving mechanism 5, the three-dimensional moving mechanism 5 can realize the three-dimensional movement of the cleaning seat 4, the electric control rotating platform 2 can drive the optical element 9 to rotate around a longitudinal axis, the cleaning seat 4 is driven by the three-dimensional moving mechanism 5 to move to be matched with the electric control rotating platform 2 to complete the cleaning of the optical element 9 fixed on the clamping mechanism 3, and a controller 7 for controlling the electric control rotating platform 2 and the three-dimensional moving mechanism 5 to move is arranged on one side of the frame 1.
For convenient layout, the frame 1 is set to be a step structure and comprises a lower step 11 and an upper step 12, the three-dimensional moving mechanism 5 is installed on the lower step 11, and the electric control rotating platform 2 is arranged on the upper step 12.
Fig. 2 exemplarily shows the three-dimensional moving mechanism 5, the three-dimensional moving mechanism 5 includes a horizontal guide rail 51 horizontally fixed on the lower step 11 along the length direction of the rack 1, a horizontal slider 52 slidably fitted to the horizontal guide rail 51 is installed on the horizontal guide rail 51, a vertical guide rail 53 is vertically fixed on the horizontal slider 52, a vertical slider 54 is slidably installed on the vertical guide rail 53, the vertical slider 54 can slide up and down along the vertical guide rail 53, a horizontal guide rail 55 is also installed on the vertical slider 54, the horizontal guide rail 55 is perpendicular to the horizontal guide rail 51 and horizontally arranged, a horizontal slider 56 is installed on the horizontal guide rail 55, and the cleaning seat 4 is installed on the horizontal slider 56 and can be driven by the horizontal slider 56 to approach or leave the optical element. For convenient control, in this embodiment, the horizontal guide rail 51, the vertical guide rail 53 and the transverse guide rail 55 all adopt an electric control linear module structure, and other moving mechanisms capable of realizing the same type of motion are also applicable.
In order to improve the cleaning efficiency, a pneumatic push-pull mechanism 57 is further arranged between the transverse guide rail 55 and the vertical sliding block 54, the moving direction of the pneumatic push-pull mechanism 57 is the same as that of the transverse sliding block, the transverse guide rail 55 and the transverse sliding block 56 can be pushed to a preset position rapidly in a pneumatic mode to realize coarse positioning, and then the position of the transverse sliding block 56 on the transverse guide rail 55 is adjusted through electric control to carry out accurate positioning.
As shown in fig. 3, the device comprises a bottom beam 31 horizontally fixed on the electrically controlled rotary table 2 and two side beams 32 vertically arranged on the bottom beam 31, wherein clamping blocks 33 are arranged on the bottom beam 31 and the side beams 32, and flexible materials such as teflon are arranged on the clamping blocks 33 to facilitate clamping and protect optical elements.
In this embodiment, the bottom beam 31 has a wire rail 34 arranged along the length direction, and the two side beams 32 are respectively mounted on the bottom beam 31 by a slide block 35 in sliding fit with the wire rail 34, so that the two side beams 32 can slide along the length direction of the bottom beam 31, and the distance between the two side beams 32 is adjusted to meet the clamping requirements of optical elements with different sizes and models.
Referring to fig. 4, the front end of the cleaning seat 4 is provided with an air knife 41, the rear end is provided with a connecting plate 46 for connecting and fixing with a transverse sliding block 56, the middle part forms a cleaning head interface 4a with a hole-shaped structure by surrounding a fixed clamping block 44 and a detachable clamping block 45, the cleaning head interface is used for installing a plasma cleaning head 42 and a liquid wiping cleaning head 43, wherein the fixed clamping block 44 is locked and fixed with the air knife 41 and the connecting plate 46 by bolts, and the detachable clamping block 45 is detachably connected to the fixed clamping block 44 by screw connection or other methods.
A position sensor 6 and a temperature sensor 8 are further provided on both sides of the cleaning head interface 4a for detecting the distance from the optical element and detecting the surface temperature of the optical element, respectively, and the position sensor 6 and the temperature sensor 8 are mounted to the removable clamp block 45 and the fixed clamp block 44, respectively, by means of brackets.
Fig. 5 and 6 show the cleaning seat 4 after the plasma cleaning head 42 and the liquid wiping head 43 are installed, respectively, the plasma cleaning head 42 and the liquid wiping head 43 are used for performing plasma cleaning and liquid wiping cleaning on optical elements, respectively, both the plasma cleaning head 42 and the liquid wiping head 43 can be matched and fixed with the cleaning head interface 4a, when the cleaning head needs to be replaced, the detachable clamping block 45 is detached, and the corresponding plasma cleaning head 42 or liquid wiping head 43 is replaced and fixed.
As shown in fig. 7, the liquid wiping and cleaning head 43 includes a holder 431 engaged with the holding hole, a rubber strip 434 is held and fixed at the front end of the holder 431 by an upper clip 432 and a lower clip 433, and a silk cloth 435 is wrapped on the rubber strip 434 so as to wet the silk cloth 435 with liquid such as water and alcohol, thereby performing liquid wiping and cleaning on the optical element.
The invention also provides an optical element surface cleaning method which is carried out by the optical element surface cleaning system and comprises the following steps:
and S1, mounting the components, fixing the optical components on the clamping mechanism 3, and flexibly clamping and supporting the optical components through polytetrafluoroethylene glue nails and glue blocks on the clamping mechanism 3, wherein the geometric center of the optical components is required to be horizontally coincided with the center 2 of the rotating platform.
And S2, distance detection, namely moving the cleaning seat 4 to a set cleaning initial position through the three-dimensional moving mechanism 5, quickly pushing out the cleaning seat 4 through the pneumatic push-pull mechanism 57, moving the vertical slide block 54 to a set position, measuring the distance between the position sensor 6 and the optical element, comparing the distance with the set value, closing a loop with the three-dimensional moving mechanism 5, and adjusting the distance between the cleaning head and the surface of the optical element.
S3, cleaning by using an air knife, starting an air source of the air knife 41, enabling a horizontal sliding block 52 and a vertical sliding block 54 in the three-dimensional moving mechanism 5 to be matched with each other, moving the cleaning seat 4 in a reciprocating manner from top to bottom and from left to right, and partially overlapping the left-to-right track, namely partially overlapping the back reciprocating cleaning track and the front reciprocating cleaning track, so that the full-aperture surface of the optical element is cleaned by purging, and the surface dust of the optical element is purged.
S4, plasma cleaning, wherein an air source of the plasma cleaning head 42 is started, the three-dimensional moving mechanism 5 moves the cleaning seat 4 in a reciprocating manner according to a preset cleaning track, the upper track and the lower track are partially overlapped from left to right and from top to bottom, namely, the next reciprocating cleaning track is partially overlapped with the previous reciprocating cleaning track, so that the full-aperture surface plasma cleaning of the element is realized, the plasma cleaning head 42 ionizes compressed air blown out by the air knife 41 through discharging to form plasma, and pollutants on the surface of the optical element are removed; temperature sensor 8 real-time detection component surface temperature rise condition under the plasma effect in the cleaning process forms closed loop with plasma air supply solenoid valve switch, in case component surface temperature surpasss the setting value, the air supply automatic disconnection avoids optical element surface to receive the damage because of overheating.
And S5, cleaning with water and alcohol, quickly withdrawing the cleaning seat 4 by the pneumatic push-pull mechanism 57, moving the cleaning seat 4 to a set safety position by the three-dimensional moving mechanism 5, switching the plasma cleaning head 42 into a liquid wiping cleaning head 43, soaking the silk cloth 435 with water, moving the cleaning seat 4 to a cleaning initial position by the three-dimensional moving mechanism 5, quickly pushing out the cleaning seat 4 by the pneumatic push-pull mechanism 57, moving the cleaning seat 4 by the three-dimensional moving mechanism 5 according to a preset cleaning track which reciprocates from top to bottom and from left to right, and partially overlapping and moving from left to right, thereby completing the optical element full-aperture surface water cleaning.
Then, the cleaning seat 4 is quickly retracted by the pneumatic push-pull mechanism 57, the cleaning seat 4 is moved to a set safe position by the three-dimensional moving mechanism 5, the silk cloth 435 is soaked by alcohol, the cleaning seat 4 is moved to a cleaning initial position by the three-dimensional moving mechanism 5, the cleaning seat 4 is quickly pushed out by the pneumatic push-pull mechanism 57, the three-dimensional moving mechanism 5 drives the cleaning seat 4 to move unidirectionally from top to bottom, partial moving tracks from left to right are overlapped, the full-aperture surface alcohol dehydration cleaning of the optical element is completed, and the removal of pollutants on the surface of the optical element is completed through the cooperation of water and alcohol.
S6, turning over the element, moving the cleaning seat 4 to a safe position by the three-dimensional moving mechanism 5, and rotating the electric control rotating platform 2 for 180 degrees to enable the other surface of the optical element to be opposite to the cleaning seat 4; after the elements are turned over, the deflection angle of the optical elements needs to be calculated, and the deflection angle is fed back to the electric control rotating platform 2 to correct the pose of the optical elements.
The deflection angle of the optical element is measured and calculated by detecting the distance between the cleaning seat 4 and the optical element at different positions in the horizontal direction, during correction, the three-dimensional moving mechanism 5 moves the cleaning seat 4 to the cleaning initial position, the position sensor 6 measures the distance M from the optical element, the horizontal sliding block 52 moves the set fixed distance L, the position sensor 6 measures the distance N from the optical element at the moment, the deflection angle theta of the optical element relative to the horizontal guide rail 51 is ATAN (M-N/L), the controller 7 feeds back the automatically measured theta value to the electric control rotating platform 2 for correction, the optical element is ensured to be parallel to the horizontal guide rail 51, the parallelism in the vertical direction is ensured by the reference plane at the bottom of the clamping mechanism 3, the device debugging stage ensures that the reference plane at the bottom of the clamping mechanism 3 is vertical to the vertical guide rail 53, so as to ensure that the optical element is installed on the clamping mechanism 3, parallel to the vertical rail 53.
And S7, repeating the steps S2 to S5 until the optical element surface cleaning is finished.
By adopting the method, inorganic pollutants and organic pollutants adhered to the surface of the optical element can be effectively removed, and deliquescence spots are prevented from occurring.
Finally, it should be noted that the above-mentioned description is only a preferred embodiment of the present invention, and that those skilled in the art can make various similar representations without departing from the spirit and scope of the present invention.
Claims (10)
1. An optical element surface cleaning system, comprising:
a frame (1);
an electric control rotating platform (2) which is rotatably arranged on the frame (1) and is provided with a clamping mechanism (3) for fixing an optical element;
a cleaning seat (4) installed on one side of the electrically controlled rotating table (2) through a three-dimensional moving mechanism (5), wherein an air knife (41) and a cleaning head interface (4a) are arranged on the cleaning seat (4), a plasma cleaning head (42) and a liquid wiping cleaning head (43) are configured, and the cleaning head interface (4a) is suitable for selectively installing the plasma cleaning head (42) and the liquid wiping cleaning head (43);
a position sensor (6) mounted on the cleaning seat (4) for detecting a distance from the optical element and outputting a distance signal; and
and the controller (7) can control the three-dimensional moving mechanism (5) and the electric control rotating platform (2) to move according to the distance signal so as to adjust the relative position of the cleaning seat (4) and the optical element and control the cleaning seat (4) to clean the optical element according to a preset cleaning track.
2. The optical element surface cleaning system according to claim 1, wherein: the cleaning seat (4) is provided with a temperature sensor (8), and the temperature sensor (8) is connected to a plasma gas source solenoid valve connected with a plasma cleaning head (42).
3. The optical element surface cleaning system according to claim 1, wherein: the three-dimensional moving mechanism (5) comprises a horizontal guide rail (51) horizontally fixed on the rack (1), a horizontal sliding block (52) in sliding fit with the horizontal guide rail (51), a vertical guide rail (53) vertically fixed on the horizontal sliding block (52), a vertical sliding block (54) matched with the vertical guide rail (53), a transverse guide rail (55) horizontally installed on the vertical sliding block (54) and perpendicular to the horizontal guide rail (51), and a transverse sliding block (56) slidably installed on the transverse guide rail (55), and the cleaning seat (4) is fixed on the transverse sliding block (56).
4. The optical element surface cleaning system according to claim 3, wherein: the transverse guide rail (55) is arranged on the vertical sliding block (54) in a sliding mode through a pneumatic push-pull mechanism (57), and the moving direction of the pneumatic push-pull mechanism (57) is the same as the sliding direction of the transverse sliding block (56).
5. The optical element surface cleaning system according to claim 1, wherein: the cleaning seat (4) is provided with a fixed clamping block (44) and a detachable clamping block (45) detachably fixed on the fixed clamping block (44), and the fixed clamping block (44) and the detachable clamping block (45) surround to form the cleaning head interface (4 a).
6. The optical element surface cleaning system according to claim 4, wherein: the liquid wiping and cleaning head (43) comprises a clamp handle (431) matched with the clamping hole, an upper clamping piece (432) and a lower clamping piece (433) connected to the end part of the clamp handle (431), and an adhesive tape (434) clamped between the upper clamping piece (432) and the lower clamping piece (433), wherein silk cloth (435) is wrapped on the adhesive tape (434).
7. The optical element surface cleaning system according to any one of claims 1 to 6, wherein: fixture (3) are including the level fix floorbar (31) on automatically controlled revolving stage (2) and install curb girder (32) on floorbar (31) and two vertical installing on floorbar (31) vertically, all be provided with on floorbar (31) and curb girder (32) and press from both sides tight piece (33), install line rail (34) on floorbar (31), curb girder (32) bottom be equipped with line rail (34) sliding fit's slider (35).
8. An optical element surface cleaning method using the optical element surface cleaning system according to any one of claims 1 to 6, comprising the steps of:
s1, mounting the optical element, and fixing the optical element on the clamping mechanism (3);
s2, distance detection, namely moving the cleaning seat (4) to a set cleaning initial position through a three-dimensional moving mechanism (5), measuring the distance between the cleaning seat and an optical element by a position sensor (6), comparing the distance with a set value, and finely adjusting the position of the cleaning seat (4);
s3, cleaning an air knife, starting an air source of the air knife (41), moving a cleaning seat (4) by a three-dimensional moving mechanism (5) according to a preset cleaning track, and purging and cleaning the surface of an element;
s4, plasma cleaning, wherein an air source of a plasma cleaning head (42) is started, and a three-dimensional moving mechanism (5) moves a cleaning seat (4) according to a preset cleaning track to perform plasma cleaning on the surface of the element;
s5, cleaning with water and alcohol, switching the cleaning seat (4) into a liquid wiping cleaning head (43), moving the cleaning seat (4) by the three-dimensional moving mechanism (5) according to a preset cleaning track, and sequentially cleaning the element surface with water and alcohol;
s6, turning over the elements, moving the cleaning seat (4) to a safe position by the three-dimensional moving mechanism (5), and rotating the electric control rotating platform (2) for 180 degrees to enable the other surface of the optical element to be opposite to the cleaning seat (4);
and S7, repeating the steps S2 to S5 until the optical element surface cleaning is finished.
9. A method for cleaning a surface of an optical element according to claim 8, wherein: and the step S6 also comprises the steps of calculating the deflection angle of the optical element after the element is turned over, and feeding back the deflection angle to the electric control rotating platform (2) to correct the pose of the optical element.
10. A method for cleaning a surface of an optical element according to claim 8, wherein: in steps S3 to S5, the bidet (4) is reciprocally moved including a plurality of reciprocal bidet trajectories, the latter reciprocal bidet trajectory is partially overlapped with the former reciprocal bidet trajectory, and the reciprocal moving direction in step S4 is different from the reciprocal moving direction in steps S3 and S5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111287733.4A CN114011757B (en) | 2021-11-02 | 2021-11-02 | Optical element surface cleaning system and cleaning method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111287733.4A CN114011757B (en) | 2021-11-02 | 2021-11-02 | Optical element surface cleaning system and cleaning method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114011757A CN114011757A (en) | 2022-02-08 |
| CN114011757B true CN114011757B (en) | 2022-08-26 |
Family
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